JP2017170393A5 - - Google Patents
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- JP2017170393A5 JP2017170393A5 JP2016061536A JP2016061536A JP2017170393A5 JP 2017170393 A5 JP2017170393 A5 JP 2017170393A5 JP 2016061536 A JP2016061536 A JP 2016061536A JP 2016061536 A JP2016061536 A JP 2016061536A JP 2017170393 A5 JP2017170393 A5 JP 2017170393A5
- Authority
- JP
- Japan
- Prior art keywords
- stirring
- control valve
- tank
- concentration
- chemical solution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- 238000003756 stirring Methods 0.000 description 7
- 239000000126 substance Substances 0.000 description 7
- 239000000243 solution Substances 0.000 description 5
- 238000002360 preparation method Methods 0.000 description 3
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Substances [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 3
- HADKRTWCOYPCPH-UHFFFAOYSA-M trimethylphenylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C1=CC=CC=C1 HADKRTWCOYPCPH-UHFFFAOYSA-M 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
Description
この態様の薬液調製装置によれば、さらに、貯留槽に貯留されて供給されるのを待っている状態の薬液の濃度を監視することができる。さらに、貯留槽濃度測定手段により測定された薬液の濃度を、より高精度に設定濃度とすることに活用することができる。 According to the chemical preparation apparatus of this aspect, it is possible to monitor the concentration of the chemical in a state where it is stored in the storage tank and waiting to be supplied. Furthermore, it can be utilized to the concentration of the chemical solution measured by reservoir density measuring device, and set the concentration to good Ri high accuracy.
調製槽3内の薬液を攪拌するための手段は、噴流攪拌装置に限定されない。各種の攪拌手法を採用し得る。攪拌翼を回転させる攪拌装置を用いるのでもよく、槽内で撹拌子を回転させる攪拌装置でもよい。槽内の薬液を抜き取り再度槽内に戻す循環攪拌方式で、吐出口にスプレーノズルを用い、噴流攪拌するのが好ましい。薬液の原料を循環攪拌の配管に合流させて供給し、直ちに攪拌されるようにすると好適である。速やかに均一な濃度の薬液が得られる。 The means for stirring the chemical solution in the preparation tank 3 is not limited to the jet flow stirring device. Various agitation techniques can be employed. Stirring blade may also the use a 攪拌device you want to rotate., May be a stirring device for rotating the stirrer in the tank. It is preferable to carry out jet stirring by using a spray nozzle at the discharge port in a circulating stirring method in which the chemical solution in the tank is extracted and returned to the tank again. It is preferable that the raw materials for the chemical solution are supplied after being joined to a circulation stirring pipe and immediately stirred. A chemical solution with a uniform concentration can be obtained quickly.
例えば、調製槽3内のTMAH濃度が2.38%よりも低い場合には、コンピュータ1は制御バルブ14又は16のどちらか一方と制御バルブ17とを開いて、20%のTMAH水溶液を継ぎ足す。制御バルブ17は開示流量の調節された開閉制御バルブで、コンピュータ1が所定時間制御バルブ17を開くように制御することにより、必要量の20%のTMAH水溶液が補給される。 For example, when the TMAH concentration in the preparation tank 3 is lower than 2.38%, the computer 1 opens either the control valve 14 or 16 and the control valve 17 to add 20% TMAH aqueous solution. . The control valve 17 is an open / close control valve with a disclosed flow rate adjusted, and the computer 1 is controlled so as to open the control valve 17 for a predetermined time, so that 20% of the required amount of TMAH aqueous solution is supplied.
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016061536A JP2017170393A (en) | 2016-03-25 | 2016-03-25 | Tank and chemical liquid preparation device |
KR1020170031754A KR20170113112A (en) | 2016-03-25 | 2017-03-14 | Tank and chemical liquid preparation device |
CN201720285859.0U CN207085819U (en) | 2016-03-25 | 2017-03-22 | Tank and decoction modulating device |
CN201710176182.1A CN107224929A (en) | 2016-03-25 | 2017-03-22 | Tank and decoction modulating device |
TW106204152U TWM551750U (en) | 2016-03-25 | 2017-03-24 | Tank and chemical liquid preparation device |
TW106109871A TW201738930A (en) | 2016-03-25 | 2017-03-24 | Tank and chemical liquid preparation device can quickly obtain uniformity drug solution by easily stirring drug solution prepared in the preparation tank |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016061536A JP2017170393A (en) | 2016-03-25 | 2016-03-25 | Tank and chemical liquid preparation device |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017170393A JP2017170393A (en) | 2017-09-28 |
JP2017170393A5 true JP2017170393A5 (en) | 2018-05-17 |
Family
ID=59934469
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016061536A Pending JP2017170393A (en) | 2016-03-25 | 2016-03-25 | Tank and chemical liquid preparation device |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP2017170393A (en) |
KR (1) | KR20170113112A (en) |
CN (2) | CN107224929A (en) |
TW (2) | TWM551750U (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017170393A (en) * | 2016-03-25 | 2017-09-28 | 株式会社平間理化研究所 | Tank and chemical liquid preparation device |
CN114797607B (en) * | 2022-03-18 | 2024-05-10 | 中国建筑第八工程局有限公司 | Portable dry-wet simultaneously-installed powder tank and construction method thereof |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52101764A (en) * | 1976-02-24 | 1977-08-26 | Riyouwa Eakon Kk | Twooliquid mixer of quantity type |
JPS6215194Y2 (en) * | 1981-05-19 | 1987-04-17 | ||
JPS5939169B2 (en) * | 1982-06-21 | 1984-09-21 | 富士物産株式会社 | Thickener dissolution method and device |
JPH0340788Y2 (en) * | 1984-12-11 | 1991-08-27 | ||
JPH1081393A (en) * | 1996-07-15 | 1998-03-31 | Morimatsu Sogo Kenkyusho:Kk | Tank |
JPH11256865A (en) * | 1998-03-06 | 1999-09-21 | Nippon Steel Corp | Double tank structure in which doughnut-shaped tank is installed around existing tank |
JP2901584B1 (en) * | 1998-03-17 | 1999-06-07 | 株式会社森松総合研究所 | tank |
JP3610045B2 (en) * | 2001-02-06 | 2005-01-12 | 株式会社平間理化研究所 | Purified developer manufacturing apparatus and purified developer manufacturing method |
JP3610044B2 (en) * | 2001-02-06 | 2005-01-12 | 株式会社平間理化研究所 | Developer manufacturing apparatus and developer manufacturing method |
TWI298423B (en) * | 2001-02-06 | 2008-07-01 | Nagase & Co Ltd | Developer producing equipment and method |
US6513964B1 (en) * | 2001-08-04 | 2003-02-04 | Dylon Industries, Inc. | Mass balance proportioner |
JP4451581B2 (en) * | 2001-09-28 | 2010-04-14 | 株式会社日本触媒 | Polymerization inhibitor preparation and supply device and preparation supply method |
EP2127734A1 (en) * | 2008-05-28 | 2009-12-02 | Nestec S.A. | Mixing assembly comprising a mixing chamber and an overflow chamber and process for mixing |
CN201526806U (en) * | 2009-11-13 | 2010-07-14 | 北京物资学院 | Continuous liquid supply device |
JP2011105375A (en) * | 2009-11-20 | 2011-06-02 | Aura Tec:Kk | Circulation tank and liquid pouring mixing apparatus |
CN203777977U (en) * | 2014-04-18 | 2014-08-20 | 福建明方堂生物科技有限公司 | Liquid preparation tank for pharmaceutical processing |
JP2017148766A (en) * | 2016-02-26 | 2017-08-31 | 住友重機械エンバイロメント株式会社 | Mixing and agitating device |
JP2017170393A (en) * | 2016-03-25 | 2017-09-28 | 株式会社平間理化研究所 | Tank and chemical liquid preparation device |
-
2016
- 2016-03-25 JP JP2016061536A patent/JP2017170393A/en active Pending
-
2017
- 2017-03-14 KR KR1020170031754A patent/KR20170113112A/en not_active Application Discontinuation
- 2017-03-22 CN CN201710176182.1A patent/CN107224929A/en active Pending
- 2017-03-22 CN CN201720285859.0U patent/CN207085819U/en not_active Expired - Fee Related
- 2017-03-24 TW TW106204152U patent/TWM551750U/en not_active IP Right Cessation
- 2017-03-24 TW TW106109871A patent/TW201738930A/en unknown
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