CN207085819U

CN207085819U - Tank and decoction modulating device

Info

Publication number: CN207085819U
Application number: CN201720285859.0U
Authority: CN
Inventors: 中川俊元
Original assignee: Hirama Rika Kenkyusho Ltd
Current assignee: Hirama Rika Kenkyusho Ltd; Hirama Laboratories Co Ltd
Priority date: 2016-03-25
Filing date: 2017-03-22
Publication date: 2018-03-13
Anticipated expiration: 2027-03-22
Also published as: TWM551750U; TW201738930A; JP2017170393A; KR20170113112A; CN107224929A

Abstract

The utility model provides tank and decoction modulating device, the storagetank for the decoction that the tank modulates the preparation vessel of the various decoctions of modulation specifications concentration with storage is integrally constituted, so as to it is arranged to effectively utilize limited installation space, the decoction modulating device possesses this tank being integrally constituted, and is capable of the various decoctions of automatically modulation specifications concentration.Tank (4) possesses：The storagetank (2) for the decoction that the preparation vessel (3) of the decoction of the set concentration of modulation and storage are modulated by preparation vessel, preparation vessel is integrally constituted with storagetank.Decoction modulating device (10) possesses：Tank (4), preparation vessel is integrally constituted with storagetank；Preparation vessel concentration mensuration mechanism (31), it determines the concentration of the decoction of preparation vessel；And computer (1), its concentration determined according to preparation vessel concentration mensuration mechanism come control to preparation vessel supply decoction raw material quantity delivered, to cause the decoction in preparation vessel to turn into normal concentration.

Description

Tank and decoction modulating device

Technical field

It the utility model is related to tank and decoction modulating device, the tank is by the preparation vessel of the various decoctions of modulation specifications concentration Storagetank with storing the decoction modulated is integrally constituted, so as to be arranged to effectively utilize limited installation space, The decoction modulating device possesses this tank being integrally constituted, and is capable of the various decoctions of automatically modulation specifications concentration.

Background technology

Various decoctions use in each industrial field.In order to play the performance as decoction to greatest extent, It is that active ingredient is dissolved in into the solution formed in solvent with defined concentration that these decoctions, which need,.Also, develop and use Automatically modulate the decoction modulating device of this decoction.

Decoction modulating device possesses the preparation vessel used in the decoction of the concentration of modulation specifications.As a rule, medicine Liquid modulating device not only possesses preparation vessel, is also provided simultaneously with temporarily storing the storagetank of the decoction modulated.Also, these are modulated Groove and the equipment that storagetank is the installation space that maximum is needed in decoction modulating device.

However, when importing decoction modulating device, it is less from the situation for the installation space that just can initially prepare abundance.Through Often have to take into account that and the decoction modulating device with required modulation capability is dexterously arranged in effective installation space. In this case, it is desirable to be designed to the preparation vessel for needing big installation space being configured to effective land productivity with storagetank With limited installation space.

Patent Document 1 discloses be modulated at the developer solution that is used in the manufacturing process of semiconductor or liquid crystal display Decoction modulating device.In patent document 1, the decoction for disclosing the conventional type for separately possessing preparation vessel and storagetank is adjusted Device processed, furthermore disclosed decoction modulation tank in cylindric dual structure of the coaxial configuration in the inside of medicine liquid-storage tank Tank.

Citation

Patent document 1：Japanese Unexamined Patent Publication 2002-324754 publications

However, in the dual structure tank of patent document 1, in order to which decoction modulation tank is configured in medicine liquid-storage tank Portion, it is necessary to reduce decoction modulation tank.Therefore, in the decoction modulating device using the dual structure tank, exist and have to cut down The problem of device specification as decoction modulating device very important modulation capability.

In addition, in the dual structure tank of patent document 1, due to decoction modulation tank is configured in medicine liquid-storage tank Portion, therefore, it is difficult to the decoction for the inside for modulating tank to most requiring the decoction for being sufficiently carried out stirring to be stirred, it is difficult to promptly Modulate uniform decoction.

Utility model content

Utility model problem to be solved

The utility model be in view of above-mentioned all problems for formerly finding in technology and complete.That is, mesh of the present utility model Be following tank and decoction modulating device be provided, the tank is by preparation vessel with storagetank to be easily stirred to preparation vessel Mode be integrally constituted, so as not to strongly cut down modulation capability i.e. can be provided with effect utilize limited installation space, The decoction modulating device possesses this tank being integrally constituted, and is capable of the various decoctions of automatically modulation specifications concentration.

For solving the scheme of problem

In order to reach above-mentioned purpose, tank of the present utility model possesses following feature, modulates the decoction of set concentration The storagetank for the decoction that preparation vessel modulates with reservoir is integrally constituted.

The tank of preferred embodiment of the present utility model by by either one configuration in preparation vessel and storagetank the opposing party's Inner side, so as to which preparation vessel and storagetank are integrally constituted.

It is that storagetank configuration is integrally constituted in the inner side of preparation vessel and preparation vessel with storagetank in preferred mode Tank.In addition, the tank that more preferably this composition is integrated possesses coaxial dual drum.

The next door that the tank of preferred embodiment of the present utility model separates preparation vessel and storagetank is preparation vessel and storagetank Side a part, so that preparation vessel and storagetank are integrally constituted.That is, shared by two grooves the part of its side and The tank being integrally constituted.

The tank of preferred embodiment of the present utility model will in a manner of the upper surface for turning into storagetank by the bottom surface of preparation vessel Preparation vessel is configured on storagetank, so as to which preparation vessel and storagetank are integrally constituted.

The tank of preferred embodiment of the present utility model possesses multiple preparation vessels, and above-mentioned multiple preparation vessels are configured to one with storagetank Body.

According to tank of the present utility model, with separately possessing preparation vessel compared with the decoction modulation tank of storagetank, It can be arranged to effectively utilize limited installation space.In addition, tank of the present utility model can be carried out easily to preparation vessel Stirring, so as to promptly modulate uniform decoction.In addition, compared with conventional tank, modulation capability can not be strongly being cut down In the case of preparation vessel and storagetank are integrally constituted.

In addition, in the tank of preferred embodiment of the present utility model, by the next door that preparation vessel and storagetank separate formed with The stream to be circulated for decoction between preparation vessel and storagetank.It is in addition, more preferably empty on the top of preparation vessel formed with supplied gas Between the gas connection road circulated between the upper space of storagetank.

Pass through the gas for setting the stream for liquid medicine flow, supplied gas to circulate in the next door for separating preparation vessel and storagetank Access, so as in the tank of preferred embodiment of the present utility model, without being equipped with can make decoction, gas in storagetank with adjusting The equipment such as pipe arrangement that the mode to be circulated between groove processed connects, liquid-feeding pump.Therefore, compared with needing the conventional tank of these pipe arrangements, Can be formed can more efficiently utilize the tank of installation space.

In order to reach above-mentioned purpose, decoction modulating device of the present utility model possesses：Tank is dense set by the modulation of the tank The preparation vessel of the decoction of degree is integrally constituted with storing the storagetank of the decoction modulated by preparation vessel；Preparation vessel concentration mensuration machine Structure, it determines the concentration of the decoction of preparation vessel；And controlling organization, its concentration determined according to preparation vessel concentration mensuration mechanism To control the quantity delivered of the raw material of the decoction supplied to preparation vessel, institute is turned into the concentration for the decoction for be modulated by preparation vessel The concentration of setting.

The decoction modulating device of preferred embodiment of the present utility model possesses preparation vessel and existed with either one configuration in storagetank The tank of the inner side of the opposing party.It is to possess storagetank configuration being integrally constituted in the inner side of preparation vessel in preferred mode Tank decoction modulating device.In addition, more preferably possesses the medicine that the tank that this composition is integrated possesses coaxial dual drum Liquid modulating device.

The decoction modulating device of preferred embodiment of the present utility model possesses tank, in the tank, by preparation vessel and storagetank every The next door opened is a part for the side of preparation vessel and storagetank, so as to which preparation vessel is integrally constituted with storagetank.That is, it is tool The decoction modulating device of the standby tank for by two grooves sharing the part of its side to be integrally constituted.

The decoction modulating device of preferred embodiment of the present utility model possesses tank, in the tank, by with the bottom surface of preparation vessel Mode as the upper surface of storagetank configures preparation vessel on storagetank, so as to which preparation vessel is configured to one with storagetank Body.

The decoction modulating device of preferred embodiment of the present utility model possesses what multiple preparation vessels were integrally constituted with storagetank Tank, above-mentioned multiple preparation vessels each equipped with determine the preparation vessel in decoction concentration preparation vessel concentration mensuration machine Structure.

According to decoction modulating device of the present utility model, with separately possessing the modulation of the decoction of preparation vessel and storagetank Device is compared, and can be arranged to effectively utilize limited installation space.In addition, decoction modulating device of the present utility model can Easily preparation vessel is stirred, so as to promptly modulate uniform decoction.In addition, with possessing the modulation of the decoction of conventional tank Device is compared, and can be integrally constituted preparation vessel and storagetank in the case where not cutting down modulation capability strongly.

The decoction modulating device of preferred embodiment of the present utility model is also equipped with determining the storage of the concentration of the decoction of storagetank Groove concentration mensuration mechanism.

According to the decoction modulating device of which, additionally it is possible to monitoring be stored in storagetank it is medium it is to be supplied in the state of medicine The concentration of liquid.Furthermore it is possible to the concentration of the decoction determined by storagetank concentration mensuration mechanism is applied to make set dense The decoction of degree more precisely turns into setting concentration.

In addition, in the decoction modulating device of preferred embodiment of the present utility model, what preparation vessel and storagetank were separated Next door is formed with the stream to be circulated for decoction between preparation vessel and storagetank.In addition, more preferably modulated formed with supplied gas The gas connection road circulated between the upper space of groove and the upper space of storagetank.

Pass through the gas for setting the stream for liquid medicine flow, supplied gas to circulate in the next door for separating preparation vessel and storagetank Access, so as in the decoction modulating device of preferred embodiment of the present utility model, without being equipped with so that decoction, gas can be made to exist The equipment such as pipe arrangement that the mode to be circulated between storagetank and preparation vessel connects, liquid-feeding pump.Therefore, with needing the conventional of these pipe arrangements Decoction modulating device compare, can be formed can more efficiently utilize installation space decoction modulating device.

Utility model effect

The tank of decoction modulation involved by the utility model can be arranged to effectively utilize limited installation space.This The tank of decoction modulation involved by utility model can be without strongly cutting down modulation capability.In addition, involved by the utility model And decoction modulation tank in, easily the decoction modulated by preparation vessel is stirred.Therefore, it is possible to quickly get Even decoction.

Equally, decoction modulating device of the present utility model can be arranged to effectively utilize limited installation space.This reality Can be without strongly cutting down modulation capability with new decoction modulating device.In addition, decoction modulating device of the present utility model holds Easily the decoction modulated by preparation vessel is stirred.Therefore, it is possible to quickly get uniform decoction.

Brief description of the drawings

Fig. 1 is the stereogram for the tank for being integrally constituted them by possessing storagetank on the inside of preparation vessel.

Fig. 2 is the stereogram for another tank for being integrally constituted them by possessing storagetank on the inside of preparation vessel.

Fig. 3 is the stereogram for another tank for being integrally constituted them by possessing storagetank on the inside of preparation vessel.

Fig. 4 is the stereogram for another tank for being integrally constituted them by possessing storagetank on the inside of preparation vessel.

Fig. 5 is the stereogram for another tank for being integrally constituted them by possessing storagetank on the inside of preparation vessel.

Fig. 6 is the stereogram for another tank for being integrally constituted them by possessing storagetank on the inside of preparation vessel.

Fig. 7 is the stereogram for another tank for being integrally constituted them by possessing storagetank on the inside of preparation vessel.

Fig. 8 is the stereogram for another tank for being integrally constituted them by possessing storagetank on the inside of preparation vessel.

Fig. 9 is preparation vessel with storagetank by a part for common side the stereogram of tank that is integrally constituted.

Figure 10 is preparation vessel with storagetank by a part for common side the stereogram of another tank that is integrally constituted.

Figure 11 is preparation vessel with storagetank by a part for common side the stereogram of another tank that is integrally constituted.

Figure 12 is preparation vessel with storagetank by a part for common side the stereogram of another tank that is integrally constituted.

Figure 13 is preparation vessel with storagetank by a part for common side the stereogram of another tank that is integrally constituted.

Figure 14 is preparation vessel with storagetank by a part for common side the stereogram of another tank that is integrally constituted.

Figure 15 is preparation vessel with storagetank by a part for common side the stereogram of another tank that is integrally constituted.

Figure 16 is the stereogram by the way that preparation vessel to be arranged on to the tank for being integrally constituted them on storagetank.

Figure 17 is the stereogram by the way that preparation vessel to be arranged on to another tank for being integrally constituted them on storagetank.

Figure 18 is the stereogram by the way that preparation vessel to be arranged on to another tank for being integrally constituted them on storagetank.

Figure 19 is the stereogram by the way that preparation vessel to be arranged on to another tank for being integrally constituted them on storagetank.

Figure 20 is the stereogram for the tank for being integrally constituted two preparation vessels and a storagetank.

Figure 21 is the stereogram for another tank for being integrally constituted two preparation vessels and a storagetank.

Figure 22 is the stereogram for another tank for being integrally constituted two preparation vessels and a storagetank.

Figure 23 is the stereogram for another tank for being integrally constituted two preparation vessels and a storagetank.

Figure 24 is the stereogram for another tank for being integrally constituted two preparation vessels and a storagetank.

Figure 25 is the stereogram for another tank for being integrally constituted two preparation vessels and a storagetank.

Figure 26 is the stereogram for another tank for being integrally constituted two preparation vessels and a storagetank.

Figure 27 is the stereogram for another tank for being integrally constituted two preparation vessels and a storagetank.

Figure 28 is the stereogram for another tank for being integrally constituted two preparation vessels and a storagetank.

Figure 29 is the stereogram for another tank for being integrally constituted two preparation vessels and a storagetank.

Figure 30 is the schematic diagram of decoction modulating device.

Figure 31 is the stereogram of tank.

Figure 32 is the sectional view for cutting off tank in the horizontal direction.

Description of reference numerals

1 ... computer (controlling organization), 2 ... storagetanks, 3,3A, 3B ... preparation vessel, 4 ... tanks, 5 ... decoction supplying tubings, 6 ... flow integration meters, 8 ... streams, 9 ... gas connection roads, 10 ... decoction modulating devices, 11,12 ... decoction storage tanks, 13rd, 14,15,16,17,18,19 ... control valve, 21 ... storagetank concentration mensuration mechanisms, 22 ... second liquid level meters, 23,33 ... follow Ring mixing pump, 24,34 ... circulation lines, 25 ... liquid-feeding pumps, 26,35 ... jet stirring devices, 31 ... preparation vessel concentration mensuration machines Structure, 32 ... first liquid level meters, 41 ... pure water supplying tubings, 42 ... decoction raw materials supplement pipe arrangement, 43 ... decoction raw material supplying tubings, 44th, 45,46,47,48,49,92 ... signal wire, 51 ... pure water entrances, 52 ... decoction feed(raw material)inlets, 53 ... decoction supply mouths, 60 ... nitrogen inlets, 62,65 ... nitrogen supplying tubings, 70 ... support foots, 90 ... decoctions use equipment, 100 ... next doors, and 102 ... Bottom surface, 104 ... preparation vessel next doors.

Embodiment

Hereinafter, it is appropriate that preferred embodiment of the present utility model is described in detail referring to the drawings.Wherein, above-mentioned implementation The shape of device described in mode, size, size ratio, its relative configuration etc. are in the case of without special instruction not by this practicality New scope is defined in diagram scope.As simple explanation example, only schematically illustrated.

First embodiment described below is used for the side of being preferable to carry out to tank of the present utility model to the 4th embodiment Formula illustrates.As the feature shared in these embodiments, preparation vessel can be enumerated and be integrally constituted with storagetank.Pass through Two grooves are integrally constituted, compared with the situation for separately setting them, installation space can be effectively utilized.

It should be noted that in order to be illustrated to tank of the first embodiment to the 4th embodiment, Fig. 1~figure is used The stereogram of tank described in 29.For the tank described in these accompanying drawings, emphatically to preparation vessel in each embodiment and storage Deposit groove and how to be integrally constituted and illustrate, thus associate less other structures for the primary structure with tank, meters save Sketch map shows.

But this is not offered as not needing other structures (not shown), meters in these accompanying drawings.As needed, suitable When position, by rights equipped with other structures (not shown), meters.As in these accompanying drawings it is (not shown) other Structure, meters, such as the foot for supporting tank can be enumerated；For the supply machine for the raw material that decoction is supplied to preparation vessel Structure, pipe arrangement etc.；For stirring the rabbling mechanism of decoction；For managing the concentration, the various measuring means of liquid measure, supervisor of decoction Structure；For the decoction modulated is supplied to outside tank feed mechanism, with tubing；It is arranged at stream, the gas of the decoction in next door Body access etc..

In addition, very simplified tank is depicted in Fig. 1~Figure 29, but tank of the present utility model is not limited in these accompanying drawings The simplified way of diagram.In the essential scope for not changing utility model, in addition to tank design, making scene often Changed on a small quantity as progress.

As this change, such as change can be listed below., will in order to prevent that local stirring is bad, liquid accumulates Corner inside tank is formed as the curved surface of appropriate curvature；In order to improve the intensity of tank, make the plane of sidepiece with song slightly Rate and be formed as curved surface, or tank bottom face, upper surface are shaped generally as to bowl-type (bowl-shaped) curved surface；In order to prevent Liquid residue when discharging liquid from pot bottom, is formed as funnel-form or curved surface by pot bottom；Without tank is formed as sealing Tank upper surface is formed as into open state in the case of structure；Or in order to prevent the upper space from the tank of sealing from discharging gas When gas residue, top is formed as into curved surface etc..

First embodiment to the 3rd embodiment is shown in the case of possessing a preparation vessel for a storagetank The preferred embodiment for the tank being integrally constituted.

[first embodiment]

The tank of present embodiment is by the way that the side in preparation vessel and storagetank is configured in the inner side of the opposing party so that will The tank that preparation vessel is integrally constituted with storagetank.Which side which side is not particularly limited in outside in inner side.But if with Preparation vessel and storagetank are integrally constituted by the mode in preparation vessel equipped with storagetank, then easily to needing sufficient stirring It is stirred in preparation vessel, so as to be more highly preferred to.Particularly, in the big even more important situation of modulation capability compared with storage capacity Under, by by preparation vessel configuration in the outside of storagetank, it is larger so as to be easier preparation vessel being made to, be more adapted to.

Fig. 1~8 are illustrated by being equipped with what preparation vessel and storagetank were integrally constituted by storagetank in the inner side of preparation vessel The tank of present embodiment.But it is not intended to the tank being integrally constituted involved by present embodiment being defined in preparation vessel Inner side equipped with storagetank tank.Can also be the tank for the mode for making the inside and outside configuration of two grooves opposite, i.e. in storagetank Inner side equipped with preparation vessel tank.Tank even in the inner side of storagetank equipped with preparation vessel, if being schemed with patent document 1 The tank of the coaxial dual drum shown is different, then more excellent effect can be played compared with the tank of coaxial dual drum Fruit.That is, the tank even in the inner side of storagetank equipped with preparation vessel, for example, be not in coaxial, or not cylindrical shape and It is in the case of substantially cube or approximately parallelepiped body shape etc., with the explanation of Fig. 1 used below~8 in the inner side of preparation vessel Equipped with storagetank tank in the same manner, be based on more efficiently utilize installation space viewpoint, have than the institute of patent document 1 The more excellent effect of the tank of the coaxial dual drum of diagram.

For the tank 4 shown in Fig. 1, configured with storagetank 2 in the inner side of preparation vessel 3 and be formed as longitudinal same Preparation vessel 3 and storagetank 2 are integrally constituted by the mode of the dual drum of axle.That is, with the preparation vessel 3 of drum The tank that the common center axle of storagetank 2 of the equally cylindrical shape in side and the mode that configures are integrally constituted.The horizontal direction of tank 4 The ratio of the radius of preparation vessel 3 in section and the radius of storagetank 2 is not limited to Fig. 1, according to the internal volume of required preparation vessel, Internal volume of storagetank etc. and suitably freely design.Here, longitudinal drum refers to the central shaft of cylinder along longitudinal direction (vertical).

According to the tank of which, not only easily to being stirred in preparation vessel 3, and can obtain smoothly stirring very much Stream, suitable for being sufficiently stirred to the decoction in preparation vessel 3.Particularly the decoction in preparation vessel 3 is entered using by jet flow In the case of the jet flow agitating mode of row stirring, easily cause stirring to be flowed, be more adapted to.

For the tank 4 shown in Fig. 2, configured with storagetank 2 in the inner side of preparation vessel 3 and be formed as longitudinal same Preparation vessel 3 and storagetank 2 are integrally constituted by the mode of the dual barrel shape of axle.In fig. 2, preparation vessel 3 is in substantially barrel-shaped shape, storage Deposit 2 cylindrical shape of groove, but not limited to this.Can also preparation vessel 3, the substantially barrel-shaped shape (barrel- of this two Fang Juncheng of storagetank 2 Shaped), can with 3 cylindrical shape of preparation vessel and storagetank 2 is in substantially barrel-shaped shape.Storagetank 2 and preparation vessel 3 are coaxial.With Fig. 1 situation is identical, and the radius ratio in the horizontal profile of two grooves suitably can freely design according to various design conditions.It is right Degree is heaved in the side of substantially barrel-shaped shape, Fig. 2 is also not necessarily limited to and can freely design.

It is identical with the tank of Fig. 1 situation according to the tank of which, easily the decoction in preparation vessel 3 is stirred so as to It can be sufficiently carried out stirring, easily produce smoothly stirring stream, easily cause stirring to be flowed.In addition, the modulation by making outside The side of groove 3 is heaved, so as to compared with side is formed as into the situation of drum, increase the internal volume of preparation vessel 3.This Outside, more graceful design can be formed as face shaping.

As the variation of the tank using the embodiment shown in Fig. 1 and Fig. 2, the horizontal direction that can enumerate tank is cutd open The Fig. 1 or Fig. 2 that are shaped as ellipse in face tank.Except the preparation vessel 3 in outside and the storagetank 2 of inner side are respectively provided with ellipse Beyond the situation of section shape, can also outside preparation vessel 3 there is the section of ellipse and the storagetank 2 of inner side with circular Section.In the case where two grooves are respectively provided with the section of ellipse, the oval-shaped profile of two grooves can be shape similar each other, Can also be dissimilar.The major axis of the oval-shaped profile of two grooves and the direction of short axle can be with identical, can also be different.

According to the tank of the variation, in the case of being rectangle on the ground of the installation space of tank, with set Fig. 1, Fig. 2 this The tank that the section shape of sample is rounded is compared, and can ensure larger by internal volume of preparation vessel etc. as much as possible, and can More efficiently utilize the installation space of tank.

For the tank 4 shown in Fig. 3, configured with storagetank 2 in the inner side of preparation vessel 3 and be formed as dual tubular Preparation vessel 3 and storagetank 2 are integrally constituted by the mode of shape.The profile of tank 4 is in substantially cube or approximately parallelepiped body shape, storage It is in longitudinal drum to deposit groove 2.

According to the tank of which, the ground of the installation space of tank it is square, it is rectangular in the case of, with setting cylinder The tank of shape is compared, and can ensure larger by the internal volume of preparation vessel as much as possible, and can more efficiently utilize tank Installation space.

For the tank 4 shown in Fig. 4, configured with storagetank 2 in the inner side of preparation vessel 3 and be formed as dual tubular Preparation vessel 3 and storagetank 2 are integrally constituted by the mode of shape.The profile of tank 4 is in substantially cube or approximately parallelepiped body shape, storage Groove 2 is deposited in substantially cube or approximately parallelepiped body shape.It should be noted that the level of the preparation vessel 3 in outside is drawn in Fig. 4 The a direction at the angle of the section shape of a direction at the angle of the section shape in direction and the horizontal direction of the storagetank 2 of inner side Identical situation, in other words, the situation of the diagonal of preparation vessel 3 and the diagonal line overlap of storagetank 2 when being depicted in top view, But not limited to this.The direction at the angle of the section of inside groove and water jacket can also differ.

The tank of which can be considered as the variation of the tank using the embodiment shown in Fig. 3, have with being shown using Fig. 3 The same effect of embodiment.That is, the ground of the installation space of tank it is square, it is rectangular in the case of, with set justify The tank of barrel shape is compared, and can ensure larger by the internal volume of preparation vessel as much as possible, and can more efficiently utilize The installation space of tank.In addition, in the tank of which, the storagetank 2 of inner side has angle, so that in the preparation vessel 3 in outside The raw appropriate wadding of stirring miscarriage is random, so as to promote stirring, mixing.

For the tank 4 shown in Fig. 5, configured with storagetank 2 in the inner side of preparation vessel 3 and be formed as longitudinal same Preparation vessel 3 and storagetank 2 are integrally constituted by the mode of the dual barrel shape of axle.Although using preparation vessel 3 in horizontal profile as six sides The tubular of shape, the mode of 2 cylindrical shape of storagetank are drawn, but not limited to this.The section of the preparation vessel 3 in outside can also be in appoint The polygonal shape of meaning, in addition, the section of the storagetank 2 of inner side can also be in arbitrary polygonal shape, elliptical shape.It is interior The storagetank 2 of side can also be in substantially barrel shape shape.It should be noted that in Figure 5, storagetank 2 and preparation vessel 3 are coaxial.

According to the tank of which, even if the ground of the installation space of tank is arbitrary shape, can also be formed can be according to it Installation space and as much as possible the internal volume of preparation vessel is ensured larger and effectively empty using the setting of tank to greatest extent Between tank.In addition, according to the tank of which, can be relatively inexpensive and tank be easily made.For example, leave following situation etc.：Cause The high reason of height of tank, after preparation vessel 3 of the storagetank 2 on the inside of preparation with outside respectively, it can not use and hang storagetank 2 Hang and insert production process as the inner side of preparation vessel 3.In this case, after storagetank 2 is got out, by using with The mode for surrounding storagetank 2 without leakage is engaged the sheet material of the side of preparation vessel 3 to form preparation vessel 3 so by welding etc. Production process, can be relatively inexpensive and easily make.

For the tank 4 shown in Fig. 6, configured with storagetank 2 in the inner side of preparation vessel 3 and be formed as longitudinal pair Preparation vessel 3 and storagetank 2 are integrally constituted by the mode of bicircular barrel shape.Storagetank 2 and 3 respective horizontal direction of preparation vessel The cylindrical shape of section, but not coaxial, respective eccentricity of central axis.

For the tank 4 shown in Fig. 7, configured with storagetank 2 in the inner side of preparation vessel 3 and be formed as longitudinal pair Preparation vessel 3 and storagetank 2 are integrally constituted by the mode of weight barrel shape.Preparation vessel 3 is in generally oblong barrel shape, and storagetank 2 is in Drum.Storagetank 2 is not coaxial with preparation vessel 3, respective eccentricity of central axis.

Fig. 6 and Fig. 7 tank can be considered as the variation of Fig. 1 tank.Because inside groove is not coaxial with water jacket, therefore can It is that side in preparation vessel 3 obtains broad space in water jacket, it is sometimes more excellent than coaxial tank in this.

For example, wanting to set agitating device, densimeter, liquid level meter etc. in preparation vessel 3, but using the tank with shape shaft It is favourable when can not ensure sufficient installation space etc..For example, have set when must be separated with wall of a container face fully distance and The liquid level meter of the type of setting, in the case where setting this liquid level meter, it must increase if designing tank if being defined to same shape shaft The preparation vessel 3 of big water jacket, it is difficult to form the size for the installation space for being accommodated in tank.In this case, by abandoning coaxial shape Shape and the tank for being formed as the dual structure that central shaft staggers as Fig. 6, Fig. 7, can not change the big of the i.e. preparation vessel 3 of water jacket In the case of small, the installation space of liquid level meter etc. is ensured in preparation vessel 3.

Equally, for using Fig. 2~Fig. 5 brief description of the drawings mode tank, in can also enumerating as shown in Figure 6, Figure 7 The tank for the mode that mandrel staggers is used as their variation.The same effect of tank with the mode with being illustrated using Fig. 6, Fig. 7 Fruit.

For the tank 4 shown in Fig. 8, configured with storagetank 2 in the inner side of preparation vessel 3 and be formed as horizontal same Preparation vessel 3 and storagetank 2 are integrally constituted by the mode of the dual drum of axle.In fig. 8, the tank of coaxial dual cylinder is drawn Shape, but not limited to this.Can also be by tank shape that is not coaxial and combining in a manner of central shaft staggers.Preparation vessel 3, storage Depositing groove 2 can also be formed as taking cylindroid, barrel shape, polygon as the tank of the mode of the brief description of the drawings using Fig. 2~Fig. 5 The variously-shaped tank shape such as shape cylinder, cuboid, cube.Horizontal drum refers to the central shaft of cylinder along transverse direction (horizontal direction).

According to the tank of which, the installation space in tank be limited in the height direction and it is broad in the horizontal in the case of, It can be formed as not increasing height and the tank of horizontal installation space being effectively utilized.Or tank, energy are supported by foot It is enough that liquid-feeding pump is set in the space of the lower section of tank, with tubing etc..

It should be noted that the tank of first embodiment is by the way that preparation vessel is matched somebody with somebody with the side in storagetank in nested shape Put the tank being integrally constituted in the inner side of the opposing party.In this case, the wall configured in the groove of inner side turns into storagetank 2 The next door 100 separated with preparation vessel 3.Here, the stream for liquid medicine flow, the gas of supplied gas circulation are suitably formed as needed Access.

[second embodiment]

The tank of present embodiment be by the next door 100 for making to separate preparation vessel 3 and storagetank 2 turn into preparation vessel 3 and A part for the side of storagetank 2 and the tank being integrally constituted.That is, a part for its side is set to by preparation vessel 3 with storagetank 2 The tank that next door 100 shares and is integrally constituted.According to the tank of present embodiment, the setting that can not only effectively utilize tank is empty Between, and compared with the tank with preparation vessel and storagetank are combined with nested shape, hold in storagetank in preparation vessel and Easily it is stirred, so it is preferred that.

Tank 4 shown in Fig. 9 is to engage preparation vessel 3 and integrated tank across next door 100 with storagetank 2, the preparation vessel 3 With storagetank 2 in the semi-cylindrical shape that cylinder cuts in half along central shaft.Next door 100 forms preparation vessel 3 and storage A part for the side of groove 2.The profile of tank 4 is in longitudinal drum.It should be noted that next door 100 is plane.

According to the tank of the embodiment, the installation space of tank can not only be effectively utilized, and with by preparation vessel and The tank that storagetank 2 is combined with nested shape is compared, and is stirred in storagetank in preparation vessel and easily.

Tank 4 shown in Figure 10 is to engage preparation vessel 3 and integrated tank across next door 100 with storagetank 2, the preparation vessel 3 cut off the shape formed in by a part for cylinder with storagetank 2 along central shaft.Next door 100 forms preparation vessel 3 and storagetank A part for 2 side.The profile of tank 4 is in substantially gourd shape.Next door 100 is plane.It should be noted that paint in Fig. 10 Go out symmetrical across next door 100 for preparation vessel 3 and storagetank 2, but be not limited to the situation.For example, it is also possible to only storagetank 2 is formed For semi-cylindrical shape etc., suitably change size, shape of preparation vessel 3 and storagetank 2 etc. and combine.

The tank of which can be considered as the variation of the tank of the mode shown in Fig. 9, play same effect.In addition, make In tank with Figure 10 modes illustrated, additionally it is possible to freely design preparation vessel 3, the internal volume of storagetank 2.

Tank 4 shown in Figure 11 is tank by the engagement sides of storagetank 2 and the preparation vessel 3 of drum and integrated, should Storagetank 2 is in the shape for forming a part for cylinder along central shaft excision.Blocking storagetank 2 in the side of preparation vessel 3 The part of the cut out portion of side turns into next door 100.Next door 100 forms a part for the side of preparation vessel 3 and storagetank 2. The profile of tank 4 is in substantially gourd shape.Preparation vessel 3 is set in which may be reversed with storagetank 2.It should be noted that in this reality Apply in mode, next door 100 is flexure plane.

The tank of which can be considered as the variation of the tank of the mode shown in Figure 10, have same effect.In addition, with making Compared with the tank of Figure 10 modes illustrated, preparation vessel 3 can keep drum without cut-out, therefore the man-hour made is reduced So as to easily make.

Tank 4 shown in Figure 12 be by cuboid or the preparation vessel of cubic shaped 3 with storagetank 2 with transversely arranged side Formula engages and the tank of integration.Next door 100 forms a part for the side of preparation vessel 3 and storagetank 2.The profile of tank 4 is in big Cause rectangular shape or substantially cubic shaped.It should be noted that in the present embodiment, next door 100 is plane.

According to the tank of which, the ground of the installation space of tank is square, when rectangle, with section shape Compared in the substantially gourd shape for combining circle, can more efficiently utilize the installation space of tank.

Tank 4 shown in Figure 13 is the variation of tank 4 shown in Fig. 9, and its section shape is in oval or oblong shape.Next door 100 Form a part for the side of preparation vessel 3 and storagetank 2.The profile of tank 4 is in generally oblong barrel shape.Preparation vessel 3 and storage Groove 2 can be formed as symmetrical across next door 100.It should be noted that in the present embodiment, next door 100 is plane.

According to the tank of which, in the case of being rectangle on the ground of the installation space of tank, with section shape is set to The shape of Fig. 9,10,11 is compared, and can more efficiently utilize the installation space of tank.

Tank 4 shown in Figure 14 is to engage preparation vessel 3 and integrated tank across next door 100 with storagetank 2, the preparation vessel 3 with storagetank 2 be in semi-cylindrical shape that cylinder cuts in half along central shaft.Next door 100 forms preparation vessel 3 and storage A part for the side of groove 2.The profile of tank 4 is in horizontal drum.Horizontal drum refers to the central shaft edge of cylinder Laterally (horizontal direction).It should be noted that in the present embodiment, next door 100 is plane.

According to the tank of which, the installation space in tank be limited in the height direction and it is broad in the horizontal in the case of, It can be formed as not increasing height and the tank of horizontal installation space being effectively utilized., can if supporting tank by foot It is enough that liquid-feeding pump is set in the space of the lower section of tank, with tubing etc..

Tank 4 shown in Figure 15 is the side by preparation vessel 3 and the substantially storagetank 2 of cubic shaped or approximately parallelepiped body shape Face engages and the tank of integration, and the preparation vessel 3 is in the shape for forming a part for cylinder along central shaft excision.Preparation vessel 3 It can be in the shape for forming the part excision of cylindroid.The section of the horizontal direction of storagetank 2 can not be in quadrangle and It is in other polygons to be.Storagetank 2 is set in which may be reversed with preparation vessel 3.It should be noted that in the present embodiment, Next door 100 is plane.

According to the tank of which, preparation vessel 3 is in the shape for forming the part excision of cylinder, therefore easily in preparation vessel Stirring is caused to be flowed in decoction in 3, so as to easily be stirred.Particularly in the case where being stirred by jet flow, easily Liquid medicine flow in groove is made by jet flow.On the other hand, storagetank 2 is in the shape of substantially cube or approximately parallelepiped body, because This compared with setting the storagetank of drum, can increase the internal volume of storagetank, Neng Gougeng in identical setting area Add the installation space for effectively utilizing tank.

[the 3rd embodiment]

The tank of present embodiment is configured preparation vessel 3 in a manner of the upper surface that the bottom surface of preparation vessel 3 turns into storagetank 2 On storagetank 2, so as to which preparation vessel 3 and storagetank 2 are integrally constituted., can not only be effective according to the tank of present embodiment Ground utilizes the installation space of tank, and compared with the tank with preparation vessel 3 and storagetank 2 are combined with nested shape, is modulating Easily it is stirred in groove and in storagetank, so it is preferred that.

For the tank 4 shown in Figure 16, it will be adjusted in a manner of the upper surface that the bottom surface 102 of preparation vessel 3 turns into storagetank 2 Groove 3 processed is configured on storagetank 2, so as to which preparation vessel 3 and storagetank 2 are integrally constituted.Bottom surface 102 is also by preparation vessel 3 The next door separated with storagetank 2.The profile of tank 4 is in longitudinal drum.Preparation vessel 3 can also not have phase with storagetank 2 Same diameter.

The installation space that the tank of which is suitable to tank is limited and unrestricted situation in the height direction in the horizontal direction Deng.With being separately provided preparation vessel compared with the situation of storagetank, face can be occupied by floor corresponding with a storagetank Product, the tank equal with setting two grooves is set.In addition, according to the tank of which, with by preparation vessel 3 and storagetank 2 with nested shape The tank combined is compared, and is stirred in storagetank in preparation vessel and easily.In addition, in the tank of which, will adjust Groove processed is provided on storagetank, if therefore being circulated in bottom surface 102 (next door) equipped with for decoction from preparation vessel 3 to storagetank 2 Stream, then when reducing the liquid measure in storagetank 2 because supplying decoction to outside tank from storagetank 2, the decoction of decrement from So transferred from preparation vessel 3 by the stream to storagetank 2.Decoction in storagetank 2 is without liquid-feeding pump etc. and automatically from tune Groove 3 processed is fed.

For the tank 4 shown in Figure 17, it will be adjusted in a manner of the upper surface that the bottom surface 102 of preparation vessel 3 turns into storagetank 2 Groove 3 processed is configured on storagetank 2, so as to which preparation vessel 3 and storagetank 2 are integrally constituted.Bottom surface 102 is also by preparation vessel 3 The next door separated with storagetank 2.The profile of tank 4 is in approximately parallelepiped body shape or substantially cubic shaped.Preparation vessel 3 and storagetank 2 can not have identical size.

According to the tank of which, in addition to the effect same except the tank for obtaining the mode with illustrating using Figure 16, in setting for tank Ground between being empty is square, it is rectangular in the case of, the tank phase with setting the circular cross section of horizontal direction, ellipse Than that can effectively utilize installation space, the internal volume of two grooves can be increased.

For the tank 4 shown in Figure 18, it will be adjusted in a manner of the upper surface that the bottom surface 102 of preparation vessel 3 turns into storagetank 2 Groove 3 processed is configured on storagetank 2, so as to which preparation vessel 3 and storagetank 2 are integrally constituted.Bottom surface 102 is also by preparation vessel 3 The next door separated with storagetank 2.The profile of tank 4 is in generally oblong barrel shape.Preparation vessel 3 can not have identical with storagetank 2 Size.

According to the tank of which, in addition to the effect same except the tank for obtaining the mode with illustrating using Figure 16, in setting for tank , being capable of effective land productivity compared with the tank of circular cross section of horizontal direction is set in the case that ground between being empty is rectangle With installation space, the internal volume of two grooves can be increased.

For the tank 4 shown in Figure 19, it will be adjusted in a manner of the upper surface that the bottom surface 102 of preparation vessel 3 turns into storagetank 2 Groove 3 processed is configured on storagetank 2, so as to which preparation vessel 3 and storagetank 2 are integrally constituted.Bottom surface 102 is also by preparation vessel 3 The next door separated with storagetank 2.The profile of tank 4 is in horizontal drum.Horizontal drum refers to the central shaft of cylinder Along transverse direction (horizontal direction).

According to the tank of which, in addition to the effect same except the tank for obtaining the mode with illustrating using Figure 16, in setting for tank Be limited in the height direction between being empty and it is broad in the horizontal in the case of, can be formed as not increasing height and can be effectively Utilize the tank of the installation space of transverse direction.If supporting tank by foot, liquid-feeding pump, pipe arrangement can be set in the space of the lower section of tank Class etc..

[the 4th embodiment]

In the present embodiment, as the example for possessing multiple preparation vessels, illustrate two preparation vessels and a storagetank The tank being integrally constituted.Multiple preparation vessels are configured in a manner of at least being abutted with storagetank, or configuration up and down, are thus configured to One.

For the tank 4 shown in Figure 20, storagetank 2 is configured in the inner side of preparation vessel, so as to by preparation vessel and storage Groove 2 is deposited to be integrally constituted.For preparation vessel, two preparation vessel 3A and 3B turns into preparation vessel with preparation vessel 3A bottom surface 102 The mode of 3B upper surface is stacked on top of one another.Storagetank 2 penetrates preparation vessel 3A and preparation vessel 3B.The profile of tank 4 is in longitudinal cylinder Shape.The side of storagetank 2 turns into the next door 100 for separating preparation vessel 3A, 3B and storagetank 2.It should be noted that in Figure 20 In draw storagetank configuration in the tank of the coaxial dual drum of the inner side for the preparation vessel for being divided into two layers up and down, but be not limited to This.Not coaxial and variation that central shaft staggers can also be used, have oval, polygon variation of section etc. first real Apply the various modifications example illustrated in mode.In addition, preparation vessel 3A, 3B can not have identical size.

According to the tank of which, except the same effect of the tank that can obtain the mode with illustrating in first embodiment with Outside, due to possessing two preparation vessels, so even either one breaks down, can also be continued by the preparation vessel of the opposing party The modulation of decoction, the decoction that can not be interrupted and continuously be modulated to storagetank supply by preparation vessel.

For the tank 4 shown in Figure 21, by the way that two preparation vessels 3A, 3B are configured in storagetank 2, so as to modulate Groove 3A, 3B and storagetank 2 are integrally constituted.The profile of tank 4 is in generally oblong barrel shape.Preparation vessel 3A, 3B are in longitudinal circle Barrel shape.

According to the tank of which, due to possessing two preparation vessels, so even either one breaks down, also can be by another The preparation vessel of one side continues the modulation of decoction.The medicine that can not be interrupted and continuously be modulated to storagetank supply by preparation vessel Liquid.

For the tank 4 shown in Figure 22, be formed as a cylindrical shape with two preparation vessels 3A, 3B and a storagetank 2 The mode of shape, preparation vessel 3A, 3B and storagetank 2 are integrally constituted.Next door 100 forms preparation vessel 3A, 3B and storagetank 2 Side a part.The profile of tank 4 is in longitudinal drum.It should be noted that in fig. 22, next door 100 is by three Plane is formed, central shaft extending sideways towards tank 4 of each plane from tank 4.Painted in fig. 22 in a manner of by cylinder trisection Go out, but not limited to this.Can not also trisection.The situation can include making the angle of engagement on the central shaft in next door 100 from 120 degree are played change so as to change the situation of the internal volume of each groove, can also include the bonding station stray circle by making next door 100 The central shaft of cylinder is so as to changing the situation of the internal volume of each groove.

According to the tank of which, the installation space of tank can not only be effectively utilized, and in appearance also can such as into Gracefully designed like that for a tank.Certainly, due to possessing two preparation vessels, so even either one breaks down, also can Continue the modulation of decoction by the preparation vessel of the opposing party.

For the tank 4 shown in Figure 23, preparation vessel 3A, 3B are engaged in the two of the storagetank 2 of approximately parallelepiped body shape Side, so as to which preparation vessel 3A, 3B and storagetank 2 are integrally constituted.Next door 100 is connected by storagetank 2 with preparation vessel 3A, 3B Side form.Next door 100 is plane.The profile of tank 4 is in approximately parallelepiped body shape or substantially cubic shaped.Need to illustrate , preparation vessel 3A and 3B is drawn in fig 23 is configured to clip the mode of storagetank 2, but not limited to this.

According to the tank of which, due to possessing two preparation vessels, so even either one breaks down, also can be by another The preparation vessel of one side continues the modulation of decoction, can not interrupt and continuously feed modulated decoction.In the setting of tank In the case of the ground in space is square or rectangular, compared with the tank of drum is set, setting can be effectively utilized Space, the internal volume of each groove can be increased.

For the tank 4 shown in Figure 24, two preparation vessels 3A, 3B of semi-cylindrical shape are engaged in approximately parallelepiped body shape The two sides of the storagetank 2 of shape, so as to which preparation vessel 3A, 3B and storagetank 2 are integrally constituted.Next door 100 by storagetank 2 with The side that preparation vessel 3A, 3B connect is formed.Next door 100 is plane.The profile of tank 4 is in drum of substantially growing crosswise.Can also In generally oblong barrel shape.It should be noted that drawing preparation vessel 3A and 3B in fig. 24 is configured to clip the side of storagetank 2 Formula, but not limited to this.It is further possible to enumerate next door 100 be not plane but the variation of curved surface.For example, preparation vessel 3A, 3B Situation of cylindrical shape etc. (next door 100 is a part for the side of the cylinder).

According to the tank of which, due to possessing two preparation vessels, so even either one breaks down, also can be by another The preparation vessel of one side continues the modulation of decoction, the medicine that can not be interrupted and continuously be modulated to storagetank supply by preparation vessel Liquid.Also can gracefully it be designed as a tank in appearance.

For the tank 4 shown in Figure 25, make to be in the two of the shape for forming a part for cylinder along central shaft excision Individual preparation vessel 3A, 3B engage with a storagetank 2 of substantially cube or approximately parallelepiped body shape, so as to by preparation vessel 3A, 3B and storagetank 2 are integrally constituted.Next door 100 forms a part for the side of preparation vessel 3A and storagetank 2, another next door 100 form a part for the side of preparation vessel 3B and storagetank 2.It should be noted that in fig. 25, next door 100 is by two Plane is formed, but not limited to this.Also can enumerate next door 100 be not plane but the variation of curved surface.For example, preparation vessel 3A, Situation of the cylindrical shapes of 3B etc. (next door 100 is a part for the side of the cylinder).In addition, preparation vessel 3A is drawn in fig. 25 It is configured to clip the mode of storagetank 2, but not limited to this with 3B.

According to the tank of which, preparation vessel 3A, 3B are in the shape for forming the part excision of cylinder, therefore are easily being adjusted Stirring is caused to be flowed in decoction in groove 3A, 3B processed, so as to easily be stirred.Particularly in situation about being stirred by jet flow Under, the liquid medicine flow in groove is made easily by jet flow.On the other hand, storagetank 2 is in substantially cube or approximately parallelepiped body Shape, therefore in identical setting area compared with the storagetank of drum is set, the internal volume of storagetank can be increased, The installation space of tank can more efficiently be utilized.In addition, according to the tank of which, due to possessing two preparation vessels, therefore i.e. Just either one breaks down, and can also continue the modulation of decoction by the preparation vessel of the opposing party, can not interrupt and continuous Ground supplies the decoction modulated by preparation vessel to storagetank.

For the tank 4 shown in Figure 26, turn into the upper table of storagetank 2 with preparation vessel 3A and preparation vessel 3B bottom surface 102 The mode in face, by preparation vessel 3A, 3B configuration on storagetank 2, so as to which preparation vessel 3A, 3B and storagetank 2 are configured into one Body.Bottom surface 102 and the next door for separating preparation vessel 3A, 3B and storagetank 2.The profile of tank 4 is in longitudinal drum.Modulation Groove 3A, 3B and storagetank 2 can also not have identical diameter.In addition, the profile of tank 4 can also be in cylindroid shape etc..Will The preparation vessel next door 104 that preparation vessel 3A and preparation vessel 3B is separated forms a part for preparation vessel 3A and preparation vessel 3B side, from And the tank for being integrally constituted preparation vessel 3A and preparation vessel 3B.

The installation space that the tank of which is suitable to tank is limited and unrestricted situation in the height direction in the horizontal direction Deng.With being separately provided preparation vessel compared with the situation of storagetank, face can be occupied by floor corresponding with a storagetank Product, the tank equal with setting two grooves is set.In addition, according to the tank of which, with by preparation vessel and storagetank with nested shape group Close the tank formed to compare, be stirred in storagetank in preparation vessel and easily.In addition, in the tank of which, will modulate Groove is provided on storagetank, if therefore bottom surface 102 (next door) equipped with for liquid medicine flow stream, when because being supplied to outside tank When making the liquid measure reduction in storagetank 2 to decoction, the decoction of decrement passes through the stream respectively from preparation vessel 3A, 3B naturally Transferred to storagetank 2.Decoction in storagetank 2 is automatically fed without liquid-feeding pump etc. from preparation vessel 3A, 3B.In addition, according to The tank of which, due to possessing two preparation vessels, so even either one breaks down, it can also pass through the preparation vessel of the opposing party Continue the modulation of decoction, the decoction that can not be interrupted and continuously be modulated to storagetank supply by preparation vessel.

For the tank 4 shown in Figure 27, with the preparation vessel 3A and preparation vessel 3B separated by preparation vessel next door 104 bottom surface 102 turn into the mode of the upper surface of storagetank 2, by preparation vessel 3A, 3B configuration on storagetank 2, so as to by preparation vessel 3A, 3B And storagetank 2 is integrally constituted.The profile of tank 4 is in approximately parallelepiped body shape or substantially cubic shaped.

According to the tank of which, in addition to the effect same except the tank for obtaining the mode with illustrating using Figure 26, in setting for tank Ground between being empty is square, it is rectangular in the case of, the tank phase with setting the circular cross section of horizontal direction, ellipse Than that can effectively utilize installation space, the internal volume of two grooves can be increased.

Two preparation vessels 3A, 3B being separated for the tank 4 shown in Figure 28 by preparation vessel next door 104 and a storage Groove 2 is integrally constituted in a manner of the profile for forming drum.Storagetank 2 is configured under preparation vessel 3A, 3B.Preparation vessel 3A Turn into the upper surface of storagetank 2 with preparation vessel 3B bottom surface 102.Bottom surface 102 is also to separate preparation vessel 3A, 3B and storagetank 2 Next door.The profile of tank 4 is in horizontal drum.It can also be in cylindroid shape.It should be noted that in present embodiment In, next door 100 is made up of three planes, central shaft extending sideways towards tank 4 of each plane from tank 4.

According to the tank of which, the installation space in tank be limited in the height direction and it is broad in the horizontal in the case of, It can be formed as not increasing height and the tank of horizontal installation space being effectively utilized., can if supporting tank by foot It is enough that liquid-feeding pump is set in the space of the lower section of tank, with tubing etc..Further, since possess two preparation vessels, so even either one Break down, can also continue the modulation of decoction by the preparation vessel of the opposing party, can not interrupt and continuously to storage The decoction that groove supply is modulated by preparation vessel.

For the tank 4 shown in Figure 29, the two preparation vessel 3A, the preparation vessel 3B and one that are separated by preparation vessel next door 104 Individual storagetank 2 is integrally constituted in a manner of the profile for forming drum.With preparation vessel 3A and preparation vessel 3B bottom surface 102 into For the mode of the upper surface of storagetank 2, by preparation vessel 3A, 3B configuration on storagetank 2, so as to by preparation vessel 3A, 3B and Storagetank 2 is integrally constituted.The profile of tank 4 is in horizontal drum.It can also be in cylindroid shape.

More than, exemplified by possessing two preparation vessels 3A, 3B tank 4 for a storagetank 2, to possess multiple preparation vessels and The tank being integrally constituted is illustrated, but the utility model not limited to this.For example, it is also possible to possess for a storagetank The preparation vessel of more than three and the tank being integrally constituted.For example, it is also possible to for for two storagetanks possess three preparation vessels and Tank being integrally constituted etc..In these cases, also with being described with reference to before by a storagetank and two preparation vessels The example for the tank being integrally constituted similarly considers the structure of tank.

The tank for the respective embodiments described above that preparation vessel and storagetank are integrally constituted is preferably at least by preparation vessel and storage The next door that groove separates, formed with the stream to be circulated for decoction between preparation vessel and storagetank.

As this stream, such as it can contemplate the opening for being arranged at next door, slit, otch etc..Stream can be one Can also be multiple.Stream refers to the passage for being arranged at the decoction in next door in a word, makes tune when being reduced with the decoction in storagetank Decoction in groove processed is naturally flowed into storagetank.

Situation in the tank that preparation vessel and storagetank share a part for its side and be integrally constituted, in preparation vessel In the case that side is configured with the longitudinal type tank of the dual structure of storagetank, preferably the lower section of next door sets otch etc..More preferably Next door is set in a manner of gap being present between next door and the bottom surface of tank.So, the liquid that can eliminate tank bottom is residual Stay, liquid stockpiles.

Preparation vessel is set on storagetank in a manner of the upper surface for turning into storagetank by the bottom surface of preparation vessel and formed In the case of the tank being integrated, the bottom surface of preparation vessel turns into the next door for separating preparation vessel and storagetank.In this case, as Stream, preferably make the bottom surface of preparation vessel that opening is set to storagetank lateral bend and near its foot.Preparation vessel can be eliminated Liquid residue, the liquid of bottom stockpile.

By setting the stream for liquid medicine flow in the next door for separating preparation vessel and storagetank, following effect can be obtained Fruit.In the case where reducing the decoction in storagetank because of the equipment supply decoction to outside tank, in the medicine of preparation vessel internal modulation Liquid energy is enough naturally flowed into storagetank, so as to prevent that storagetank is emptying.The continuous supply of decoction can be realized.In addition, it is not required to Will be needed in the case of no this stream for pipe arrangement from the decoction of preparation vessel to storagetank, the liquid-feeding pump of transferring Deng.It therefore, there is no need to the installation space needed for this pipe arrangement, liquid-feeding pump etc., can further increase the installation space of tank.

The tank for the respective embodiments described above that preparation vessel and storagetank are integrally constituted is preferably at least by preparation vessel and storage The next door that groove separates is also formed with the gas that supplied gas circulates between the upper space of preparation vessel and the upper space of storagetank Access.

As this gas connection road, such as it can contemplate the opening for being arranged at next door, slit, otch etc..Gas connection It can also be multiple that road, which can be one,.Gas connection road refers to the passage for being arranged at the gas in next door in a word, with preparation vessel Enable the free dealing of gas of upper space between storagetank.

Situation in the tank that preparation vessel and storagetank share a part for its side and be integrally constituted, in preparation vessel In the case that side is configured with the longitudinal type tank of the dual structure of storagetank, preferably the top of next door sets otch etc..More preferably Next door is set in a manner of gap being present between next door and the top surface of tank.So, groove is made in preparation vessel and storagetank Internal pressure it is identical.

Preparation vessel is arranged on storagetank and structure in a manner of the upper surface for turning into storagetank by the bottom surface of preparation vessel In the case of the tank being integrally formed, as gas connection road, preferably make insertion turn into the pipe arrangement of the modulation groove bottom in next door along The inner side of pot sidewall is set to preparation vessel top from storagetank top.Decoction going out relative to storagetank can swimmingly be carried out Enter.

By setting gas connection road in the next door for separating preparation vessel and storagetank, following effect can be obtained.No Pipe arrangement being arranged at outside tank needed for needing in the case of no gas connection road etc..It therefore, there is no need to the institute such as this pipe arrangement The installation space needed, it can further increase the installation space of tank.

Next, the decoction modulating device involved by the utility model is illustrated.

In the following description, to be illustrated exemplified by the manufacturing process of semiconductor or liquid crystal display substrate.But this The industrial field not limited to this that utility model is applied.In other industrial fields such as manufacturing process of electrolyte used in battery Also the utility model can be applied.In addition, in the following description, the manufacturing process as semiconductor or liquid crystal display substrate The concrete example of the middle decoction used, it is appropriate to use 2.38% tetramethyl used in developing procedure mainly as developer solution Ammonium hydroxide aqueous solution (following, TMAH is referred to as into TMAH) illustrates.

But the decoction not limited to this that the utility model is applied.Other medicines that can be applied as the utility model The example of liquid, in addition to developer solution, etching solution, stripper, antistatic agent or cleaning fluid etc. can be enumerated.

Multiple species, the decoction of composition respectively also be present in these decoctions.For example, as developer solution, it is furthermore possible to enumerate hydrogen The aqueous solution, the trimethyl monoethanol ammonium hydroxide (choline) of the inorganic compounds such as potassium oxide, sodium hydroxide, sodium phosphate, sodium metasilicate Aqueous solution Deng organic compound etc..For example, as etching solution, the mixed of oxalic acid aqueous solution, sulfuric acid and hydrogen peroxide can be enumerated The mixed aqueous solution of Heshui solution, copper-bath, phosphoric acid and acetic acid and nitric acid, hot phosphoric acid, the ammonium ceric nitrate aqueous solution, iron chloride Solution etc..For example, as stripper, solution, the 1-METHYLPYRROLIDONE system of dimethyl sulfoxide (DMSO) system stoste and pure water can be enumerated The water system such as the solution of stoste and pure water, alkanolamine and solution of glycol ether and pure water anticorrosive additive stripping liquid controlling, MEA and fourth Non- water system anticorrosive additive stripping liquid controlling such as the mixed solution of base diethylene glycol (DEG) and additive etc..

[the 5th embodiment]

Figure 30 is the schematic diagram for being illustrated to the decoction modulating device of present embodiment.In saying for present embodiment In bright, to be 20% by concentration the TMAH aqueous solution and pure water allocate so as to modulate the medicine for the TMAH aqueous solution that concentration is 2.38% Liquid modulating device illustrates as concrete example.

The decoction modulating device 10 of present embodiment includes：Tank 4 that preparation vessel 3 and storagetank 2 are integrally constituted, measure are adjusted The preparation vessel concentration mensuration mechanism 31 of the concentration of the decoction of groove 3 processed, the concentration determined according to preparation vessel concentration mensuration mechanism 31 To control the quantity delivered of the raw material of the decoction supplied to preparation vessel 3 with so that the concentration of the decoction modulated by preparation vessel 3 turns into Decoction supplying tubing 5 of liquor charging such as the controlling organization 1 of the concentration of setting and the equipment by the decoction modulated to outside tank etc..

The tank 4 being integrally constituted as preparation vessel 3 and storagetank 2, is configured in the same of the inside of preparation vessel 3 with storagetank 2 Illustrated exemplified by the tank of the dual drum of axle.

But the tank not limited to this of the decoction modulating device involved by the utility model.Can also be by first to The mode for the various tanks enumerated in the explanation of four embodiments, storagetank 2 and preparation vessel 3 are integrally constituted.On this practicality How the storagetank of the tank of new involved decoction modulating device is integrally constituted with preparation vessel, with first to fourth embodiment party The explanation of formula is identical.In the following description, the explanation how being integrally constituted on the tank of decoction modulating device is omitted.

The jet stirring device 35 for being stirred to the decoction in preparation vessel 3 is provided with the preparation vessel 3 of tank 4. As jet stirring device 35, preferably using nozzle.Jet stirring device 35 and the circulation line for being provided with circulation stirring pump 33 34 connections.

Mechanism for being stirred to the decoction in preparation vessel 3 is not limited to jet stirring device.Various stir can be used Mix gimmick.The agitating device that can rotate stirring vane, or the agitating device for rotating stirring parts in groove. Decoction in by groove is discharged and then again returned in the return circulation stirring mode in groove, is preferably entered in outlet using nozzle Row jet flow stirs.It is preferred that supplying the raw material of decoction in a manner of converging in the pipe arrangement in circulation stirring, it is stirred immediately after. The decoction of even concentration can be quickly got.

The decoction that set concentration is adjusted to from preparation vessel 3 supplies to storagetank 2.Decoction is by being formed at storagetank 2 Side (that is, next door preparation vessel 3 and storagetank 2 separated) stream 8, moved from preparation vessel 3 to storagetank 2.Storagetank 2 Storage carries out the decoction after concentration adjustment.In Figure 30 embodiment, the side (next door) of storagetank 2 be arranged to side with Gap be present between the bottom surface of tank 4, the gap of the side and the bottom surface of tank 4 plays function as stream 8.

In addition, in the side of storagetank 2 (next door) formed with gas connection road 9, so as to obtain gas on the top of storagetank 2 Circulated between the upper space of space and preparation vessel 3.

The bottom surface of storagetank 2 is provided with the jet stirring device for being stirred to the decoction for being stored in storagetank 2 26.As jet stirring device 26, preferably using nozzle.Jet stirring device 26 and the circulation pipe for being provided with circulation stirring pump 23 Road 24 connects.The rabbling mechanism of storagetank 2 also in the same manner as the rabbling mechanism of preparation vessel 3, is not limited to jet stirring device.Can Using various agitating modes.

Allocated by the 20% TMAH aqueous solution and pure water in the case of the TMAH aqueous solution of modulation 2.38%, turn into former What is expected is the 20% TMAH aqueous solution, and it is stored in into decoction original via decoction raw material supplement pipe arrangement 42 from decoction feed(raw material)inlet 52 Expect hold-up tank 11 or 12.

Control valve 13~18 is connected via signal wire 44 with computer 1 (controlling organization).Computer 1 will via signal wire 44 Control signal is transmitted to control valve 13~18, so as to which control be opened and closed to control valve 13~18.To decoction storage tank During the TMAH aqueous solution of 11 fillings 20%, control valve 13 is opened.In the TMAH water to the filling of decoction storage tank 12 20% During solution, control valve 15 is opened.

Decoction storage tank 11 and 12 by the nitrogen that is supplied from nitrogen inlet 60 via nitrogen supplying tubing 62 and It is pressurized.Via the decoction raw material supplying tubing 43 being connected with preparation vessel 3,20% the stored TMAH aqueous solution of conveying. When conveying the 20% TMAH aqueous solution in decoction storage tank 11, control valve 14 and control valve 17 are opened.In conveying medicine During the 20% TMAH aqueous solution in liquid storage tank 12, control valve 16 and control valve 17 are opened.

By 20% the TMAH aqueous solution modulate 2.38% the TMAH aqueous solution when, to 20% the TMAH aqueous solution be mixed into it is pure Water and be diluted.Pure water is supplied to preparation vessel 3 from pure water entrance 51 via pure water supplying tubing 41., will when conveying pure water Control valve 18 is opened.

Preparation vessel 3 possesses preparation vessel concentration mensuration mechanism 31 and the first liquid level meter 32.Preparation vessel concentration mensuration mechanism 31 Decoction in preparation vessel 3 is sampled, and determines its concentration.The liquid level of decoction in first liquid level meter 32 measure preparation vessel 3 Position.In addition, decoction in preparation vessel 3 is by being provided to the circulation stirring pump 33 and jet stirring device of circulation line 34 35 and by circulation stirring.Thus, the decoction in preparation vessel 3 turns into uniform concentration.

In fig. 30, storagetank 2 is configured in the inner side of preparation vessel 3.The stoste and pure water supplied to preparation vessel 3 is stored in The inner side of preparation vessel 3 and the space in the outside of storagetank 2.It is stirred and mixes in the raw material of the space inner liquid medicine, modulates dense Spend uniform decoction.Can be by producing stirring stream in decoction of the jet stirring device 35 in preparation vessel 3, so as to fully right Decoction is stirred.In addition, by making jet stirring device 35 intermittently work, decoction can be stirred using inertia force Mix.

Can also be by shown in Figure 30 circulation stirring pump 33 for example formed as the multiple circulation stirrings being arranged Pump.By setting multiple circulation stirring pumps, in the case of assuming that a circulation stirring pump breaks down, it can also make medicine Liquid modulating device 10 continuously operates.

Preparation vessel concentration mensuration mechanism 31 and the first liquid level meter 32 are via signal wire 45 and 46 and the (control of computer 1 Mechanism) connection.Computer 1 monitors the concentration of the decoction determined by preparation vessel concentration mensuration mechanism 31 and by the first liquid level The liquid level position for the decoction that meter 32 determines.Computer 1 is according to measured values such as concentration, liquid level positions, as follows to control Control is opened and closed in valve 13~18.Thereby, it is possible to automatically modulate rule in a manner of liquid measure and quantity delivered as defined in being always Determine decoction, the 2.38% TMAH aqueous solution of concentration.

For example, in the case that the TMAH concentration in preparation vessel 3 is less than 2.38%, computer 1 is by control valve 14 or 16 Either one opened with control valve 17, supplement the 20% TMAH aqueous solution.Control valve 17 is the open and close controlling of flow when regulation is opened Valve, computer 1 are controlled in a manner of control valve 17 is opened into the stipulated time, so as to feed the desired amount of 20% TMAH water Solution.

For example, in the case that the TMAH concentration in preparation vessel 3 is higher than 2.38%, computer 1 opens control valve 18, mends Fill pure water.Control valve 18 is the open and close control valve of regulation flow when opening, and computer 1 is so that control valve 18 to be opened to the side of stipulated time Formula is controlled, so as to feed the desired amount of pure water.

For example, in the case that the liquid level position in preparation vessel 3 reduces, suitably by either one in control valve 14 or 16 Opened with control valve 17 and control valve 18, increase the modulation voltage of decoction.

In addition, becoming space-time in decoction storage tank 11, control valve 14 is closed, control valve 13 is opened by computer 1, to Decoction storage tank 11 supplements decoction raw material.Equally, space-time is become in decoction storage tank 12, computer 1 is by control valve 16 Close, control valve 15 is opened, decoction raw material is supplemented to decoction storage tank 12.So, computer 1 is ensured in decoction raw material In hold-up tank 11 or 12 either one necessarily be filled with decoction raw material state.

By the 2.38% TMAH aqueous solution that preparation vessel 3 modulates through being formed from the stream of the side (next door) of storagetank 2 Move and store to storagetank 2 in road 8.Make to be stored in internal medicine when from storagetank 2 to decoction using the supply decoction of equipment 90 When liquid measure is reduced, moved from the decoction that preparation vessel 3 modulates via stream 8 to storagetank 2.

In the present embodiment, the opening bottom surface of storagetank 2 is set to stream 8, but not limited to this.For example, in storagetank 2 In the case of with side and bottom surface, the through hole at least one party that can be will be formed in side and bottom surface is set to stream 8.

Stream 8, which has, becomes the concentration that the variation of caused liquor strength will not involve inside storagetank 2 in preparation vessel 3 Dynamic cushioning effect., can be according to preparation vessel 3, the capacity of storagetank 2, institute for the size of stream 8, shape, the position formed The liquid measure of the stoste of supply, the liquid measure of used decoction and suitably determine.

In the embodiment shown in Figure 30, have in the next door for separating preparation vessel 3 and storagetank 2 for liquid medicine flow Stream 8, therefore need not be provided for connecting the connection pipe arrangement of decoction.

Storagetank 2 also possesses storagetank concentration mensuration mechanism 21 and the second liquid level meter 22 in the same manner as preparation vessel 3.Above-mentioned Storagetank concentration mensuration mechanism 21 and the second liquid level meter 22 also connect via signal wire 47 and 48 and computer 2 (controlling organization) Connect.The concentration and the second liquid level for the decoction in storagetank 2 that computer 1 is determined according to storagetank concentration mensuration mechanism 21 The liquid level position for the decoction in storagetank 2 that meter 22 determines, is suitably controlled to control valve 13~18.Control and modulation The situation of groove 3 is identical.The concentration change of storagetank 2 is very small, thus actually without inside decoction concentration monitoring, Liquid measure management and quantity delivered management.

In addition, the decoction in storagetank 2 is filled by the circulation stirring pump 23 and jet flow stirring for being provided to circulation line 24 Put 26 and by circulation stirring.Thus, the decoction in storagetank 2 is maintained uniform concentration.

Be stored in the decoction of storagetank 2 using liquid-feeding pump 25 by decoction supplying tubing 5 and flow integration meter 6 and from medicine Liquid supply mouth 53 supplies to decoction and uses equipment 90.Decoction is connected using equipment 90 via signal wire 92 with computer 1.Computer 1, which receives the decoction sent from the decoction of user side using equipment 90 via signal wire 92, supplies request signal.Control valve 19 passes through It is connected by signal wire 49 with computer 1.Computer 1 is according to the requirement from decoction using the user of the side of equipment 90, to being equipped with Control is opened and closed in the control valve 19 of decoction supplying tubing 5.Thus, decoction can be when needing decoction with institute using equipment 90 The amount needed receives the supply of decoction.

If the decoction of storagetank 2 is reduced, by the level pressure difference of preparation vessel 3 and storagetank 2 by the medicine in preparation vessel 3 Liquid supplies to storagetank 2 naturally via stream 8.Declined by the liquid level of preparation vessel 3, the liquid level of storagetank 2 rises, so as to adjust The liquid level of groove 3 processed and storagetank 2 generally remains constant.In liquid level constant, the liquid level of preparation vessel 3 declines.Computer 1 is supervised Control valve 13~18 is carried out depending on the liquid level position of the decoction determined by the first liquid level meter 32, therefore according to the liquid level position Open and close controlling, automatically the decoction of modulation specifications concentration, 2.38% TMAH are water-soluble in a manner of turning into defined liquid measure all the time Liquid.

The TMAH aqueous solution has strong basicity, and the carbon dioxide in air is absorbed if liquid level is exposed in air, is produced dense Degree changes and deteriorated.As the example, in the case where preventing decoction and atmosphere, sometimes to preparation vessel 3, storagetank 2 Top import the sealing gas such as nitrogen.

In fig. 30, nitrogen is supplied to preparation vessel 3 and storagetank 2 via nitrogen supplying tubing 65.The nitrogen supplied exists Preparation vessel 3, the upper space of storagetank 2 mix with the decoction to gasify in groove, turn into the gas of moistening.With the liquid level position in groove That puts is moved up and down correspondingly, and nitrogen is supplied suitably into groove or nitrogen is discharged to outside groove.

In the side of storagetank 2 (next door for separating preparation vessel 3 and storagetank 2) formed with gas connection road 9, if nitrogen It is fed through preferentially supplying to carry out, then due to decoction from the upper space of preparation vessel 3 to the upper space of storagetank Steam and the nitrogen that moistens is directed into storagetank 2, therefore compared with importing the situation of dry nitrogen, storagetank 2 can be suppressed Interior meaningless evaporation, can effectively suppress decoction in storagetank 2 because of concentration change caused by evaporation.

Gas is circulated in the upper space of storagetank 2 and preparation vessel 3 by gas connection road 9, thus preparation vessel 3 with The pressure of the inside of storagetank 2 generally remains constant.When the liquid level of preparation vessel 3 and storagetank 2 declines, preparation vessel 3 and storage The volume increase of the gas compartment of the inside of groove 2, so as to which the internal pressure of preparation vessel 3 and storagetank 2 declines.Thus, nitrogen from So supply to preparation vessel 3 and storagetank 2.

When by supplying at least one party in stoste and pure water to preparation vessel 3 to make the liquid level of preparation vessel 3 and storagetank 2 During rising, preparation vessel 3 and the volume of the gas compartment of the inside of storagetank 2 reduce, so as to the inside of preparation vessel 3 and storagetank 2 Pressure rises.Thus, preparation vessel 3 and the nitrogen of the inside of storagetank 2 return to nitrogen supplying tubing 65 naturally.

In the embodiment of above-mentioned decoction modulating device 10, to the TMAH stostes dilution allotment by 20% is developed Liquid is that the device of the 2.38% TMAH aqueous solution is illustrated as concrete example.The decoction illustrated in this embodiment is adjusted The decoction modulating part of device 10 processed is typical example, but the utility model is not defined in into this.As long as it can be adjusted by raw material Pharmacy liquid can then be adopted in various manners using the decoction of the constituent concentration needed for equipment 90.Certainly, decoction modulating device 10 Decoction modulating part can use various modifications example according to the species of the decoction of desired modulation.Except by pure water to stoste carry out Beyond the situation for diluting allotment, it can apply and realize situation about being allocated to multiple decoctions, be modulated by solid material The device of various modulator approaches such as situation structure.

In addition, the transmission (route) of control signal of the expression of signal wire 44~49,92 from computer 1, signal wire 44~ 49th, 92 can be signal cable or radio communication.

In the explanation of above-mentioned decoction modulating device, figure is carried out according to the decoction modulating device 10 to preferred embodiment The Figure 30 shown is illustrated.But for the decoction modulating device involved by the utility model, the knot described in Figure 30 Structure is entirely not required.As decoction modulating device of the present utility model, as long as set by the raw material modulation of decoction The decoction of concentration, then including various modifications example.

In addition, the tank 4 that storagetank 2 is configured in the coaxial dual drum of the inside of preparation vessel 3 is carried out as an example Explanation, but tank 4 not limited to this.Do not departing from the scope of the utility model, the tank with other structures can be applied to Decoction modulating device 10.The storagetank 2 for forming tank 4 can set stream 8 with the next door that preparation vessel 3 separates.Stream 8 can The liquid level for being arranged on the decoction than being stored in storagetank 2 and the liquid level for the liquid level of decoction this two side for being stored in preparation vessel 3 lean on The position of lower section.

The storagetank 2 for forming tank 4 can set gas connection road 9 with the next door that preparation vessel 3 separates.Gas connection road 9 can be arranged on the liquid level of the decoction than being stored in storagetank 2 and be stored in the liquid of this two side of the liquid level of the decoction of preparation vessel 3 The position of face on the lower.

Decoction modulating device 10 of the present utility model mainly possesses：Preparation vessel 3, it modulates the decoction of set concentration； Storagetank 2, it stores the decoction modulated by preparation vessel 3；Preparation vessel concentration mensuration mechanism 31, it determines the decoction of preparation vessel 3 Concentration；And controlling organization (computer 1 etc.), its concentration determined according to preparation vessel concentration mensuration mechanism 31 come control to The quantity delivered of the raw material for the decoction that preparation vessel 3 supplies, turn into set with the concentration for the decoction for be modulated by preparation vessel 3 Concentration, decoction modulating device can effectively utilize installation space by the way that storagetank 2 and preparation vessel 3 are integrally constituted.

Next, the detailed construction of tank 4 is illustrated.Figure 31 is the stereogram of tank 4.Figure 32 is by dual structure tank edge The sectional view of horizontal direction cut-out.As shown in figure 31, tank 4 by by preparation vessel 3 and the storagetank 2 of cylindrical shape with storagetank 2 Mode in the inside of preparation vessel 3 is formed in the so-called dual cylindrical structure of coaxial configuration.Tank 4 is provided to preparation vessel 3 Multiple support foots 70 support.

In Figure 31, in the side of storagetank 2 formed with two through holes.The through hole of two is sent out as stream 8 Wave function.Stream 8 is formed by the through hole of the slit-shaped almost parallel with the short transverse of storagetank 2.However, stream 8 is unlimited In the through hole of slit-shaped, such as the through hole of the through hole of toroidal, multiple toroidals can also be applied etc..

As shown in Figure 31 and Figure 32, two jet stirring devices 35 are arranged on mutually opposing in the side wall of preparation vessel 3 Position.Stirring stream is produced in preparation vessel 3 by jet stirring device 35, so as to equably be stirred to decoction.Particularly, By the way that tank 4 is formed as into dual cylindrical structure, circulation stirring swimmingly can be carried out to decoction.

As shown in figure 31, jet stirring device 26 is arranged on jet direction towards oblique upper on the bottom surface of storagetank 2 Position.Decoction after being adjusted by jet stirring device 26 to concentration carries out circulation stirring inside storagetank 2.Jet flow stirring dress It can be that equidirectional can also be opposite direction that 35, which are put, with the jet direction of jet stirring device 26.As described above, pass through Jet stirring device 35 is intermittently worked, decoction can be stirred using inertia force.Equally, by making jet flow stirring dress Put 26 intermittently to work, decoction can be stirred using inertia force.

In the above-described embodiment, as tank 4, with storagetank 2 configure the inner side of storagetank 3 and preparation vessel 3 with It is illustrated exemplified by the tank for the coaxial dual drum that storagetank 2 is integrally constituted, but preparation vessel 3 is formed with storagetank 2 The structure not limited to this for the tank 4 being integrated.

Next, the tank that preparation vessel is integrally constituted with storagetank also includes connecting to single preparation vessel with storagetank The situation of one, the next door for separating preparation vessel and storagetank be a part for the side of preparation vessel and storagetank situation, Or preparation vessel is configured into the situation on storagetank in a manner of the upper surface that the bottom surface of preparation vessel turns into storagetank.

, can be in multiple preparation vessels 3 in the case where the tank 4 shown in Figure 20~29 is applied into decoction modulating device 10 Preparation vessel concentration mensuration mechanism 31 is equipped with each.

More than, for referring to the drawings for the content that each embodiment illustrates, in semiconductor, liquid crystal display The various electrolyte that are used in the manufacture of the various decoctions, battery that are used in the manufacturing process of device, the decoction for being modulated supply Modulating device can similarly be implemented.

Claims

1. a kind of tank, it is characterised in that possess：

Preparation vessel, it modulates the decoction of set concentration；And

Storagetank, it stores the decoction modulated by the preparation vessel,

The preparation vessel is integrally constituted with the storagetank,

By the next door that the preparation vessel and the storagetank separate formed with for decoction in the preparation vessel and the storagetank Between the stream that circulates.

2. tank according to claim 1, it is characterised in that

The preparation vessel is with either one configuration in the storagetank in the inner side of the opposing party.

3. tank according to claim 2, it is characterised in that

The tank possesses the coaxial dual drum that the storagetank configuration forms in the inner side of the preparation vessel.

4. tank according to claim 1, it is characterised in that

The next door is a part for the side of the preparation vessel and the storagetank.

5. tank according to claim 1, it is characterised in that

The preparation vessel is configured in the storagetank in a manner of the upper surface that the bottom surface of the preparation vessel turns into the storagetank On.

6. tank according to claim 1, it is characterised in that

The tank possesses multiple preparation vessels.

7. tank according to claim 1, it is characterised in that

Supplied gas is also formed with the next door between the upper space of the preparation vessel and the upper space of the storagetank The gas connection road of circulation.

8. a kind of decoction modulating device, it is characterised in that possess：

Tank, the preparation vessel of the decoction of the concentration set by the modulation of the tank and the storage for storing the decoction modulated by the preparation vessel Groove is deposited to be integrally constituted；

Preparation vessel concentration mensuration mechanism, it determines the concentration of the decoction of the preparation vessel；And

Controlling organization, its concentration determined according to the preparation vessel concentration mensuration mechanism come control to the preparation vessel supply The quantity delivered of the raw material of the decoction, to cause the concentration of decoction modulated by the preparation vessel to turn into described set dense Degree,

9. decoction modulating device according to claim 8, it is characterised in that

10. decoction modulating device according to claim 9, it is characterised in that

11. decoction modulating device according to claim 8, it is characterised in that

12. decoction modulating device according to claim 8, it is characterised in that

13. decoction modulating device according to claim 8, it is characterised in that

The tank possesses multiple preparation vessels,

Each in multiple preparation vessels is respectively equipped with the preparation vessel concentration mensuration mechanism.

14. decoction modulating device according to claim 8, it is characterised in that

15. the decoction modulating device according to any one of claim 8 to 13, it is characterised in that

The decoction modulating device is also equipped with determining the storagetank concentration mensuration mechanism of the concentration of the decoction of the storagetank.