TWM551750U - Tank and chemical liquid preparation device - Google Patents

Description

Barrel and liquid preparation device

The present invention relates to a barrel in which a brewing tank for modulating a predetermined concentration of a plurality of chemical liquids and a storage tank for storing the prepared chemical liquid are integrally formed in such a manner that the limited installation space can be effectively utilized, and the integrated structure is provided. The barrel can automatically modulate the liquid chemical modulation device of various liquid chemicals at a predetermined concentration.

A wide variety of liquids are used in various industrial fields. In order to maximize the performance of the chemical solution, such a chemical solution requires a solution in which the active ingredient is dissolved in a solvent at a predetermined concentration. Thus, a chemical liquid preparation device that automatically modulates such a chemical liquid is developed and used.

The chemical solution preparation device includes a modulation tank used to prepare a chemical solution having a predetermined concentration. In many cases, the chemical liquid preparation device not only has a brewing tank, but also has a storage tank for storing the prepared chemical liquid once in advance. Moreover, these modulation grooves and storage tanks are devices that require the largest installation space in the chemical liquid preparation device.

However, when the liquid medicine preparation device is introduced, there is little case where a sufficient installation space is provided at the beginning. It is necessary to consider a large number of cases in which a chemical liquid preparation device having a required modulation capacity is placed in a limited installation space. In this case, it is required to have a design of a modulation groove and a storage tank which will require a large installation space to effectively utilize the setting of a limited installation space.

Patent Document 1 discloses a chemical liquid preparation device that modulates a developer used in a process of a semiconductor or a liquid crystal display. Patent Document 1 discloses a cylindrical double-layer structural barrel in which a conventional chemical liquid preparation device and a chemical liquid preparation tank provided separately in a preparation tank and a storage tank are coaxially arranged inside a chemical solution storage tank.

Prior technical literature Patent literature

Patent Document 1 Japanese Patent Laid-Open Publication No. 2002-324754

However, in the double-layer structure barrel of Patent Document 1, in order to arrange the chemical liquid preparation tank inside the chemical liquid storage tank, it is necessary to make the chemical liquid preparation tank small. Therefore, in the chemical liquid preparation apparatus using the double-layer structure barrel, there is a problem that it is necessary to reduce the important modulation capacity of the apparatus specification as the chemical liquid preparation apparatus.

Further, in the double-layer structure barrel of Patent Document 1, since the chemical liquid preparation tank is disposed inside the chemical liquid storage tank, it is difficult to stir the chemical liquid inside the chemical liquid preparation barrel which is required to be most stirred sufficiently, and it is difficult to rapidly modulate the liquid. A uniform solution.

This creation is made in view of the problems that have been seen in the prior art. In other words, the purpose of the present invention is to provide a bucket that can be integrally formed by a method in which a limited installation space is effectively used without a reduction in the modulation capacity, and a modulation tank and a storage tank are easily stirred to modulate the groove. The integrally constructed barrel can automatically modulate a liquid medicine preparation device of various chemical liquids at a predetermined concentration.

In order to achieve the above object, the barrel of the present invention is characterized in that it has a brewing tank for modulating a set concentration of the chemical liquid and a storage tank for storing the chemical liquid prepared in the brewing tank, and the brewing tank and the storage tank are integrally formed.

A bucket of a preferred aspect of the present invention is a bucket in which the brewing tank and the storage tank are integrally formed by the modulation tank and the storage tank being disposed on the inside of the other.

More preferably, the storage tank is disposed inside the brewing tank and the brewing tank and the storage tank are integrally formed. Further, the barrel formed integrally with this is preferably provided with a coaxial double-layered cylindrical shape.

In a preferred embodiment of the present invention, the partition wall for separating the brewing tank from the storage tank is a barrel in which the brewing tank and the storage tank are integrally formed by a part of the side of the brewing tank and the storage tank. That is, the two grooves are barrels integrally formed by a part of the side surfaces.

In a preferred embodiment of the present invention, the bottom surface of the brewing tank is formed as a top surface of the storage tank, and a brewing tank is disposed on the storage tank to form a tank integrally formed with the storage tank.

A preferred aspect of the present invention is a bucket having a plurality of modulation grooves and having a plurality of modulation grooves integrally formed with the storage tank.

According to the barrel of the present invention, the limited space for setting can be effectively utilized in comparison with the barrel for the liquid medicine preparation provided in the brewing tank and the storage tank. Moreover, the bucket of the present invention is easily stirred in the brewing tank, and the uniform chemical solution can be quickly prepared. Moreover, the brewing tank can be integrally formed with the storage tank without significantly reducing the modulation capacity as compared with the conventional barrel.

Further, in the preferred embodiment of the present invention, a flow path through which the chemical liquid flows between the brewing tank and the storage tank is formed in the partition wall separating the brewing tank and the storage tank. Further, it is preferable to form a gas communication path through which gas flows between the upper space of the modulation tank and the upper space of the storage tank.

In the preferred aspect of the present invention, a gas passage for flowing a chemical liquid or a gas communication path for flowing a gas is formed in a partition wall separating the brewing tank and the storage tank. It is not necessary to provide a device such as a pipe or a liquid supply pump that can be connected to the liquid medicine or the gas between the storage tank and the preparation tank. Therefore, it is possible to create a bucket that more effectively uses the installation space than a conventional bucket that requires such piping or the like.

In order to achieve the above object, the liquid chemical preparation device of the present invention includes: a tank for modulating a brewing tank for modulating a set concentration of the chemical liquid and a storage tank for storing the chemical liquid prepared in the brewing tank; And measuring the concentration of the chemical solution in the preparation tank; and controlling means for controlling the concentration supplied to the preparation tank according to the concentration measured by the modulation tank concentration measuring means so that the concentration of the chemical liquid prepared in the preparation tank becomes the set concentration The amount of raw material supplied to the liquid.

A preferred chemical liquid preparation device of the present invention is a chemical liquid preparation device having a barrel in which one of a modulation tank and a storage tank is disposed inside the other. More preferably, the storage tank is provided with a chemical liquid preparation device which is disposed integrally with the inside of the preparation tank. It is preferable that the barrel formed integrally for this purpose is a coaxial double-layered cylinder shape.

The preferred liquid chemical preparation device of the present invention is provided with a barrel integrally constituting the modulation groove and the storage tank by partitioning the modulation groove from the storage tank by a part of the side surface of the preparation groove and the storage tank. . In other words, it is a chemical liquid preparation device having a barrel in which two grooves share a part of the side surface thereof.

In the preferred embodiment of the present invention, the chemical liquid preparation device is provided with a barrel in which the modulation groove and the storage tank are integrally formed by arranging a modulation groove on the storage tank such that the bottom surface of the preparation groove becomes the upper surface of the storage tank.

The preferred chemical liquid preparation device of the present invention is provided with a plurality of preparation grooves which are integrally formed with the storage tank, and is provided with a modulation groove concentration determination of the concentration of the chemical liquid according to the plurality of modulation grooves. means.

According to the liquid chemical modulating device of the present invention, the medicinal liquid modulating device provided separately from the modulating tank and the storage tank can effectively set a limited installation space. Moreover, the barrel of the liquid chemical preparation device of the present invention is easy to stir the brewing tank, and the uniform chemical liquid can be quickly prepared. Further, compared with the conventional chemical liquid preparation device, the modulation groove and the storage tank can be integrally formed without reducing the modulation capacity as much as possible.

The preferred chemical liquid preparation device of the present invention further includes a storage tank concentration measuring means for measuring the concentration of the chemical liquid in the storage tank.

According to the chemical liquid preparation device of this aspect, it is possible to monitor the concentration of the chemical liquid waiting for being stored in the storage tank and supplied. Further, the concentration of the chemical solution measured by the storage tank concentration measuring means can be used to set the concentration of the chemical liquid having the set concentration to a higher precision.

Furthermore, in the preferred chemical liquid preparation device of the present invention, the preparation groove and the storage tank are formed in the partition wall separating the modulation tank and the storage tank. The flow path of the liquid medicine is flowed between. Further, it is more preferable to form a gas communication path through which gas flows between the upper space of the modulation tank and the upper space of the storage tank.

By forming a flow path through which the chemical liquid flows or a gas communication path through the partition wall separating the brewing tank and the storage tank, it is not necessary to provide the liquid chemical preparation device in the storage tank. A device such as a pipe or a liquid supply pump in which a chemical liquid or a gas can flow between the preparation grooves. Therefore, it is possible to provide a chemical liquid preparation device capable of more effectively utilizing the installation space than a conventional chemical liquid preparation device which requires such a pipe or the like.

The barrel for the preparation of the liquid medicine involved in the present creation can effectively use the limited installation space. The barrel for the preparation of the liquid medicine involved in the present creation can be completed without greatly reducing the modulation capacity. Further, in the tub for preparing the chemical solution involved in the present creation, it is easy to stir the chemical solution prepared in the brewing tank. Therefore, a uniform liquid can be obtained quickly.

Similarly, the liquid chemical modulation device of the present invention can effectively utilize a limited set space. The liquid chemical modulation device of the present invention can be completed without greatly reducing the modulation capacity. Moreover, the chemical liquid preparation device of the present invention easily stirs the chemical solution prepared in the preparation tank. Therefore, a uniform liquid can be obtained quickly.

1‧‧‧Computer (control means)

2‧‧‧ storage tank

3, 3A, 3B‧‧‧ modulation slot

4‧‧‧ barrel

5‧‧‧Pharmaceutical supply piping

6‧‧‧Integrated flowmeter

8‧‧‧flow path

9‧‧‧ gas communication road

10‧‧‧Drug preparation device

11, 12‧‧ ‧ liquid material storage tank

13, 14, 15, 16, 17, 18, 19‧‧‧ control valves

21‧‧‧Measurement method for storage tank concentration

22‧‧‧2nd level meter

23, 33‧‧‧Circulating agitator

24, 34‧‧‧Circulation pipeline

25‧‧‧ Liquid pump

26, 35‧‧‧ jet mixing device

31‧‧‧Measurement tank concentration measurement method

32‧‧‧1st level meter

41‧‧‧Pure water supply piping

42‧‧‧Supply piping for chemical raw materials

43‧‧‧Pharmaceutical material supply piping

44, 45, 46, 47, 48, 49, 92‧‧‧ signal lines

51‧‧‧ pure water inlet

52‧‧‧ drug liquid raw material entrance

53‧‧‧Drug supply port

60‧‧‧ nitrogen inlet

62, 65‧‧‧Nitrogen supply piping

70‧‧‧ Support feet

90‧‧‧Drug equipment

100‧‧‧ next door

102‧‧‧ bottom

104‧‧‧Modification groove next door

Fig. 1 is a perspective view of a barrel integrally formed by a storage tank on the inner side of a brewing tank.

2 is a perspective view of another tub integrally formed by providing a storage tank on the inner side of the brewing tank.

Fig. 3 is a perspective view of another tub integrally formed by providing a storage tank on the inside of the brewing tank.

4 is a perspective view of another tub integrally formed by providing a storage tank on the inner side of the brewing tank.

Fig. 5 is a perspective view of another tub integrally formed by providing a storage tank on the inner side of the brewing tank.

Fig. 6 is a perspective view of another tub integrally formed by providing a storage tank on the inner side of the brewing tank.

Fig. 7 is a perspective view of another tub integrally formed by providing a storage tank on the inner side of the brewing tank.

Fig. 8 is a perspective view of another tub integrally formed by providing a storage tank on the inner side of the brewing tank.

Figure 9 is a perspective view of the barrel in which the modulation groove and the storage tank share a part of the side surface.

Fig. 10 is a perspective view showing another barrel integrally formed by a part of the side surface of the modulation groove and the storage tank.

Fig. 11 is a perspective view showing another barrel integrally formed by a part of the side surface of the modulation groove and the storage tank.

Fig. 12 is a perspective view showing another barrel integrally formed by a part of the side surface of the modulation groove and the storage tank.

Fig. 13 is a perspective view showing another barrel integrally formed by a part of the side surface of the modulation groove and the storage tank.

Fig. 14 is a perspective view showing another barrel integrally formed by a part of the side surface of the modulation groove and the storage tank.

Fig. 15 is a perspective view showing another barrel integrally formed by a part of the side surface of the modulation groove and the storage tank.

Figure 16 is a perspective view of a barrel in which the brewing tank is placed over the storage tank and integrally formed.

Figure 17 is another perspective view of the barrel in which the brewing tank is placed over the storage tank and integrally formed.

Fig. 18 is another perspective view of the barrel in which the brewing tank is placed on the storage tank and integrally formed.

Fig. 19 is another perspective view of the barrel in which the brewing tank is placed on the storage tank and integrally formed.

Figure 20 is a perspective view of a barrel integrally formed by two modulation grooves and one storage tank.

Figure 21 is a perspective view of another barrel integrally formed by two modulation grooves and one storage tank.

Figure 22 is a perspective view of another barrel integrally formed by two modulation grooves and one storage tank.

Figure 23 is a perspective view of another barrel integrally formed by two modulation grooves and one storage tank.

Figure 24 is a perspective view of another barrel integrally formed by two modulation grooves and one storage tank.

Figure 25 is a perspective view of another barrel integrally formed by two modulation grooves and one storage tank.

Figure 26 is a perspective view of another barrel integrally formed by two modulation grooves and one storage tank.

Figure 27 is a perspective view of another barrel integrally formed by two modulation grooves and one storage tank.

Figure 28 is a perspective view of another barrel integrally formed by two modulation grooves and one storage tank.

Figure 29 is a perspective view of another barrel integrally formed by two modulation grooves and one storage tank.

Figure 30 is a schematic illustration of a medical fluid preparation device.

Figure 31 is a perspective view of the barrel.

Figure 32 is a cross-sectional view showing the barrel cut in the horizontal direction.

Hereinafter, a preferred embodiment of the present invention will be described in detail with reference to the drawings. However, the shape, the size, the dimensional ratio, the relative arrangement, and the like of the devices and the like described in the embodiments are not limited to the ones described above unless otherwise specified. It is merely schematically illustrated in a single illustrative example.

The first to fourth embodiments to be described below are for explaining a suitable embodiment of the bucket of the present invention. As a feature common to these embodiments, the modulation tank and the storage tank are integrally formed. By integrally forming the two grooves, it is possible to effectively utilize the installation space as compared with the case where they are separately provided.

In addition, in order to explain the buckets of the first to fourth embodiments, a perspective view of the tub shown in FIGS. 1 to 29 is used. The barrels depicted in these drawings are collectively configured for how the modulation grooves and the storage tanks are integrally formed in the respective embodiments. Therefore, other configurations or meters that are less related to the main configuration of the barrel are omitted.

However, other components or instrumentation not shown in these drawings do not represent an unnecessary need. On the other hand, if necessary, other structures or instruments not shown in the figure are provided in an appropriate and appropriate manner. Other components or meters not shown in the drawings include, for example, a leg portion for supporting the tub, a supply means for supplying a raw material for supplying the chemical solution to the brewing tank, a pipe, and the like, and a stirring agent. a stirring means for the liquid, various measuring means or management means for managing the concentration or amount of the chemical liquid, a supply means or a pipe for supplying the prepared chemical liquid to the outside of the tub, and a chemical liquid to be placed on the partition wall Flow path or gas communication path, etc.

Further, in FIGS. 1 to 29, although the tub is depicted very simply, the bucket of the present creation is not limited to the simplified aspect illustrated in the drawings. It is set to include a few changes that are often made at the site of the design or production of the bucket without limiting the essence of the invention.

As such a change, for example, the second one can be mentioned. In order to prevent partial agitation or effusion, the corner of the inside of the barrel is set to a curved surface with a moderate curvature. To increase the strength of the barrel, the curvature of the side surface is slightly attached to the curved surface to form a curved surface, and the bottom surface or the upper surface of the barrel is roughly formed. Bowl-shaped song To prevent the liquid from remaining when pumping from the bottom of the barrel, the bottom of the barrel is set to a funnel shape or a curved surface, and the upper surface of the barrel is set to be liberated in the case where the barrel is not required to be sealed, or to prevent the upper space of the sealed barrel. When the gas is pumped, the gas remains and the upper portion is set to a curved surface or the like.

The first embodiment to the third embodiment are suitable embodiments of the barrel integrally formed in the case where one storage tank is provided for one storage tank.

[First Embodiment]

The tub of the present embodiment is a tub in which the brewing tank and the storage tank are integrally formed by one of the brewing tank and the storage tank. Which is the inner side and the outer side is not particularly limited. However, when the storage tank is provided with a storage tank and the preparation tank and the storage tank are integrally formed, it is more preferable to perform stirring in a preparation tank which is required to be sufficiently stirred. In particular, in the case where the modulation capacity is larger than the storage capacity, it is convenient to increase the modulation groove by arranging the modulation groove outside the storage tank.

1 to 8 show a tub of this embodiment in which a brewing tank and a storage tank are integrally formed by providing a storage tank on the inner side of the brewing tank. However, the tub having one body configuration according to the present embodiment is not limited to a tub having a storage tank inside the brewing tank. The inner and outer configurations of the two slots are set to be opposite barrels, that is, the barrels having the modulation grooves on the inner side of the storage tank. Even if there is a barrel with a modulation groove on the inside of the storage tank, as long as it is Unlike the coaxial double-layer cylindrical barrel shown in Patent Document 1, it is possible to obtain a remarkable effect than the coaxial double-layer cylindrical barrel. In other words, even if the tub having the brewing groove is provided on the inner side of the storage tank, for example, it is not a coaxial shape or a non-cylindrical shape but a substantially cubic shape or a substantially rectangular parallelepiped shape, and the following description will be made using FIGS. 1 to 8 . The inside of the preparation groove is the same as the barrel in which the storage tank is provided, and has an effect superior to that of the coaxial double-layered cylindrical shape illustrated in Patent Document 1 from the viewpoint of more effectively utilizing the installation space.

The tub 4 shown in Fig. 1 is configured such that the brewing tank 3 and the storage tank 2 are integrally formed such that the storage tank 2 is disposed inside the brewing tank 3 and has a vertically coaxial double-layered cylindrical shape. In other words, the cylindrical storage tank 2 is integrally formed with the central axis as a common arrangement in the same manner as the inside of the cylindrical brewing groove 3. The ratio of the radius of the modulation groove 3 to the radius of the storage tank 2 in the horizontal cross section of the tub 4 is not limited to FIG. 1, but is suitable for the internal volume of the preparation groove or the internal volume of the storage tank. Free design. Here, the longitudinal cylindrical shape means that the central axis of the cylinder is the longitudinal direction (vertical direction).

According to this aspect of the tub, not only is it easy to stir in the brewing tank 3, but also a very smooth stirring flow can be obtained, which is suitable for sufficiently stirring the liquid medicine in the brewing tank 3. In particular, in the case of a jet stirring method in which the chemical liquid in the brewing tank 3 is stirred by a jet flow, it is preferable to cause a stirring flow.

The tub 4 shown in FIG. 2 is configured such that the brewing tank 3 and the storage tank 2 are integrally formed so that the storage tank 2 is disposed inside the brewing tank 3 and is formed into a vertically coaxial double-tube shape. In Fig. 2, the brewing tank 3 has a substantially barrel shape, and the storage tank 2 has a cylindrical shape, but is not limited thereto. Alternatively, both the brewing tank 3 and the storage tank 2 may be substantially barrel-shaped, or the brewing tank 3 may have a cylindrical shape, and the storage tank 2 may have a substantially barrel shape. The storage tank 2 is coaxial with the brewing tank 3. As in the case of Fig. 1, the radius ratio of the two grooves in the horizontal section can be appropriately designed in accordance with various design conditions. The degree of swelling of the side surface in the approximate barrel shape may also be freely designed without being limited to FIG.

According to the barrel of this aspect, the liquid medicine in the preparation tank 3 can be easily and sufficiently stirred as in the case of the case of Fig. 1, and a smooth stirring flow is easily generated, which tends to cause a stirring flow. Further, by bulging the side surface of the outer modulating groove 3, the internal volume of the modulating groove 3 can be increased as compared with the case of the cylindrical shape. Furthermore, a more aesthetic design is also achieved in terms of appearance and shape.

In the modification of the tub using the embodiment shown in Figs. 1 and 2, the bucket of Fig. 1 or Fig. 2 in which the shape of the cross section in the horizontal direction of the tub is elliptical is exemplified. In addition to the case where the outer modulation groove 3 and the inner storage groove 2 have an elliptical cross-sectional shape, the outer modulation groove 3 may have an elliptical shape and the inner storage groove 2 may have a circular cross section. In the case where both grooves have an elliptical cross section, the elliptical cross sections of the two grooves may have similar shapes to each other, and may not be similar. The orientation of the long axis and the short axis of the two grooves in the elliptical cross section may be aligned, and the alignment may be omitted.

According to the bucket of this modification, in the case where the floor surface of the installation space of the tub is rectangular, it is possible to ensure the inside of the brewing tank as much as possible in comparison with the bucket having a circular cross-sectional shape as shown in FIG. 1 or FIG. The volume is set to be large, and the installation space of the barrel is used more effectively and effectively.

The tub 4 shown in FIG. 3 is configured such that the storage tank 2 is disposed inside the brewing tank 3 and has a double cylinder shape so that the brewing tank 3 and the storage tank 2 are integrally formed. The outer shape of the tub 4 is a substantially cubic shape or a substantially rectangular parallelepiped shape, and the storage tub 2 has a longitudinal cylindrical shape.

According to the barrel of this aspect, in the case where the floor surface of the installation space of the barrel is square or rectangular, as compared with the barrel provided with the cylindrical shape, it is possible to ensure as much as possible that the content of the preparation groove is large, and the setting of the barrel is set. Space is better and more effective.

The tub 4 shown in FIG. 4 is configured such that the brewing tank 3 and the storage tank 2 are integrally formed such that the storage tank 2 is disposed inside the brewing tank 3 and has a double cylinder shape. The shape of the tub 4 is generally a cubic shape or a substantially rectangular parallelepiped shape, and the storage tank 2 has a substantially cubic shape or a substantially rectangular parallelepiped shape. In addition, in FIG. 4, the angular direction of the cross-sectional shape of the outer side modulation groove 3 and the horizontal direction of the inner side of the storage tank 2 are aligned, and in other words, although The case where the diagonal line of the modulation groove 3 overlaps the diagonal line of the storage tank 2 in the upper view is depicted, but is not limited thereto. The direction of the angle of the section of the inner groove and the outer groove may also be misaligned.

The bucket of this aspect can be understood as a modification of the bucket using the embodiment shown in Fig. 3, and has the same effect as that of the embodiment shown in Fig. 3. That is, in the case where the floor surface of the installation space of the tub is square or rectangular, the inner volume of the brewing tank can be increased as much as possible and the installation space of the tub can be utilized more effectively than the barrel provided with the cylindrical shape. Further, in the bucket of this aspect, since the storage tank 2 on the inner side has a corner portion, the agitation flow in the outer modulation tank 3 is moderately disturbed to promote stirring and mixing.

The tub 4 shown in FIG. 5 is configured by integrally arranging the brewing tank 3 and the storage tank 2 such that the storage tank 2 is disposed inside the brewing tank 3 and is formed into a vertically coaxial double-tube shape. Although the preparation groove 3 is a cylindrical shape having a hexagonal horizontal cross section, the storage tank 2 has a cylindrical shape, but is not limited thereto. The outer modulation groove 3 may have an arbitrary polygonal shape in cross section, and the inner storage groove 2 may have an arbitrary polygonal shape or an elliptical shape. The inner storage tank 2 may also have a substantially barrel shape. In addition, in FIG. 5, the storage tank 2 and the modulation tank 3 are coaxial.

According to the bucket of this aspect, even if the floor surface of the installation space of the bucket is of any shape, it can be matched with the installation space, and it is ensured that the inner volume of the brewing tank can be set as large as possible and the setting space of the bucket can be maximized. A bucket that is effectively used. Moreover, according to the bucket of this aspect, the tub can be made cheaper and easier. For example, depending on the length of the barrel, there may be a case where the inner storage tank 2 and the outer modulation tank 3 are separately prepared and cannot be used. The storage tank 2 is hung to the inside of the brewing tank 3, and the like is inserted into such a process. In this case, the process of joining the plate material on the side surface of the brewing tank 3 to the liquid-free side and assembling the brewing tank 3 so as to surround the preparation tank 2 after the preparation of the storage tank 2 can be made cheaper and easier. .

The tub 4 shown in FIG. 6 is configured such that the storage tank 2 and the storage tank 2 are integrally formed such that the storage tank 2 is disposed inside the brewing tank 3 and has a double cylindrical shape that is vertically disposed. The horizontal direction of each of the storage tank 2 and the modulation tank 3 is a cylindrical shape, but is not coaxial, and each central axis is eccentric.

The tub 4 shown in FIG. 7 is configured such that the brewing tank 3 and the storage tank 2 are integrally formed such that the storage tank 2 is disposed inside the brewing tank 3 and has a double tubular shape that is vertically disposed. The modulating groove 3 has a substantially elliptical cylindrical shape, and the storage tank 2 has a cylindrical shape. The storage tank 2 and the modulation tank 3 are not coaxial, and each central axis is eccentric.

The barrel of Figs. 6 and 7 can be regarded as a modification of the barrel of Fig. 1. In the case where the inner groove and the outer groove are not coaxial and a wide space can be obtained on one side in the modulation groove 3 of the outer groove, it is sometimes superior to the coaxial barrel.

For example, it is advantageous to provide a stirring device, a concentration meter, a liquid level meter, and the like in the brewing tank 3. However, it is advantageous to make a barrel having a coaxial shape incapable of securing a sufficient installation space. For example, the liquid level meter has a type that must be disposed at a sufficient distance from the wall surface of the container at the time of installation, but in the case where such a liquid level meter is provided, when the barrel is designed to be coaxial, the case How to increase the modulation groove 3 of the outer tank becomes difficult to set the size of the installation space to be accommodated in the tub. In this case, a double-layered barrel having a coaxial shape as shown in FIG. 6 or FIG. 7 and having a central axis deviation is discarded, and the installation space of the liquid level meter or the like can be ensured at the size of the modulation groove 3 which does not change the outer groove. Modulation in the groove 3.

Similarly, a bucket in which the center axis shown in FIG. 6 or FIG. 7 is deviated is used as a modification of the bucket described with reference to the drawings of FIGS. 2 to 5. It has the same effect as the bucket of the aspect described using FIG. 6 or FIG.

The tub 4 shown in FIG. 8 is configured such that the brewing tank 3 and the storage tank 2 are integrally formed such that the storage tank 2 is disposed inside the brewing tank 3 and has a coaxial double-layered cylindrical shape. Although the barrel shape of the coaxial double-layer cylinder is depicted in Fig. 8, it is not limited thereto. It may also be a barrel shape that is non-coaxial and combined in a manner that the central axis is offset. The brewing tank 3 and the storage tank 2 are in the form of a bucket as described with reference to Figs. 2 to 5, and may be in the shape of a barrel having various shapes such as an elliptical cylinder or a barrel type, a polygonal cylinder, a rectangular parallelepiped or a cube. The transverse cylindrical shape means that the central axis of the cylinder is lateral (horizontal direction).

According to the bucket of this aspect, in the case where the installation space of the tub is limited to the height direction but wide in the lateral direction, it is possible to create a bucket which can effectively utilize the installation space in the lateral direction without increasing the height. Alternatively, if the bucket can be supported by the foot, the liquid supply pump or the piping or the like can be provided in the space generated under the tub.

Further, in the barrel-modulating groove and the storage tank of the first embodiment, one of the tanks is integrally formed in a nested shape on the inside of the other. In this case, the wall surface of the groove disposed on the inner side serves as the partition wall 100 for partitioning the storage tank 2 from the brewing tank 3. Here, a gas passage through which a flow path or a gas through which the chemical solution flows is appropriately formed as needed.

[Second embodiment]

The tub of the present embodiment is a tub integrally formed by the partition wall 100 for partitioning the brewing tank 3 from the storage tub 2 as a part of the side surface of the brewing tank 3 and the storage tank 2. In other words, the brewing tank 3 and the storage tank 2 are integrally formed by a part of the side surface thereof as the partition wall 100. According to the barrel of the embodiment, it is not only effective to utilize the installation space of the barrel, but is easy to stir in the preparation tank and the storage tank as compared with the barrel which is formed by combining the preparation tank and the storage tank. .

The tub 4 shown in Fig. 9 is a barrel in which a semi-cylindrical brewing groove 3 whose cylinder is half-sectioned along a central axis is coupled to the storage tank 2 and is joined to the partition wall 100. The partition wall 100 constitutes a part of the side surface of the brewing tank 3 and the storage tank 2. The outer shape of the tub 4 is a cylindrical shape that is longitudinal. Further, the partition wall 100 is a flat surface.

According to the barrel of this aspect, not only the space for setting up the tub can be effectively utilized, but also the barrel in which the brewing tank and the storage tank 2 are combined in a set shape is easily stirred in the brewing tank and in the storage tank.

The brewing tank 3 having a shape in which a part of the tub 4 is cut along the central axis shown in Fig. 10 and the storage tank 2 are sandwiched by the partition wall 100 to be integrally connected to the tub. The partition wall 100 constitutes a part of the side surface of the brewing tank 3 and the storage tank 2. The shape of the tub 4 is generally a gourd shape. The partition wall 100 is a flat surface. In addition, although the modulation groove 3 and the storage tank 2 are symmetrical with respect to the storage tank 100 in FIG. 10, it is not limited by this. For example, only the storage tank 2 is formed in a semi-cylindrical shape or the like, and the size, shape, and the like of the preparation tank 3 and the storage tank 2 may be appropriately changed and combined.

The barrel of this aspect can be regarded as a modification of the barrel of the aspect shown in Fig. 9, and the same effect can be obtained. Further, with respect to the bucket which is illustrated in Fig. 10, the inner volume of the brewing tank 3 or the storage tank 2 can be further freely designed.

The tub 4 shown in Fig. 11 is a barrel in which the storage tank 2 having a shape in which a part of the cylinder is cut along the central axis is coupled to the side surface of the cylindrical brewing tank 3. A portion of the side surface of the brewing tank 3 that blocks the side surface of the storage tank 2 is the partition wall 100. The partition wall 100 constitutes a part of the side surface of the brewing tank 3 and the storage tank 2. The shape of the tub 4 is generally a gourd shape. Alternatively, the brewing tank 3 may be opposite to the storage tank 2. Further, in the present embodiment, the partition wall 100 is a curved surface.

The bucket of this aspect can be regarded as a modification of the bucket of the aspect shown in Fig. 10, and has the same effect. Further, the brewing tank 3 can maintain a cylindrical shape as compared with the tubing described with reference to Fig. 10, and can be easily produced without requiring a cutting process.

The tub 4 shown in Fig. 12 is a barrel in which a rectangular parallelepiped or a cube-shaped modulating groove 3 is laterally and in contact with the storage tank 2 and integrated. The partition wall 100 constitutes a part of the side surface of the brewing tank 3 and the storage tank 2. The shape of the tub 4 is generally a rectangular shape or even a substantially cubic shape. Further, in the present embodiment, the partition wall 100 is a flat surface.

According to the bucket of this aspect, in the case where the floor surface of the installation space of the bucket is a square or a rectangle, the installation space of the bucket can be more effectively compared to the shape of the general hoist which is formed by combining the cross-sectional shape into a circle. Use it.

The tub 4 shown in Fig. 13 is a modified example in which the cross-sectional shape of the tub 4 shown in Fig. 9 is an ellipse or an oblong shape. The partition wall 100 constitutes a part of the side surface of the brewing tank 3 and the storage tank 2. The shape of the tub 4 is substantially elliptical in shape. The modulating groove 3 and the storage tank 2 may not be symmetrical with the partition wall 100. Further, in the present embodiment, the partition wall 100 is a flat surface.

According to the bucket of this aspect, in the case where the floor surface of the installation space of the tub is rectangular, the installation space of the tub can be utilized more effectively than the shape of the cross-sectional shape as shown in Figs. 9, 10, and 11.

The tub 4 shown in Fig. 14 is a barrel in which a semi-cylindrical brewing groove 3 which is half-sectioned along a central axis and a storage tank 2 which is coupled to the partition wall 100 and integrated. The partition wall 100 constitutes a part of the side surface of the brewing tank 3 and the storage tank 2. The outer shape of the tub 4 is a transverse cylindrical shape. The transverse cylindrical shape means The central axis of the cylinder is the lateral direction (horizontal direction). Further, in the present embodiment, the partition wall 100 is a flat surface.

According to the bucket of this aspect, in the case where the installation space of the tub is limited to the height direction but wide in the lateral direction, it is possible to create a bucket which can effectively utilize the installation space in the lateral direction without increasing the height. If the bucket can be supported by the foot, a liquid supply pump or piping can be provided in the space generated under the tub.

The tub 4 shown in Fig. 15 is a barrel in which the modulation groove 3 having a shape in which a part of the cylinder is cut along the central axis is connected to the side surface of the storage tank 2 of a substantially cubic or substantially rectangular body. The brewing tank 3 may also be in the shape of cutting off a part of the elliptical cylinder. It is also possible that the cross section of the storage tank 2 in the horizontal direction is not a quadrangle but other polygons. It is also possible that the storage tank 2 is opposite to the brewing tank 3. Further, in the present embodiment, the partition wall 100 is a flat surface.

According to the barrel of this aspect, since the brewing tank 3 has a shape in which a part of the cylinder is chopped off, the chemical liquid in the brewing tank 3 is likely to cause a stirring flow and is easy to stir. In particular, in the case of stirring by a jet flow, it is easy to shake the chemical liquid in the tank by the jet flow. On the one hand, since the storage tank 2 has a substantially cubic shape or a substantially rectangular shape, the storage tank can be large in size and the installation space of the bucket can be more effective than providing a cylindrical storage tank in the same installation area. Use it locally.

[Third embodiment]

In the tub of the present embodiment, the brewing tank 3 is disposed on the storage tank 2 so that the bottom surface of the brewing tank 3 becomes the upper surface of the storage tank 2, and the tank 3 is integrally formed with the storage tank 2. According to the barrel of the embodiment, not only can the space for the barrel be effectively utilized, but also the barrel of the preparation tank 3 and the storage tank 2 can be easily assembled in the preparation tank and the storage tank, which is suitable for mixing. of.

In the tub 4 shown in FIG. 16, the modulating groove 3 is disposed on the storage tank 2 such that the bottom surface 102 of the modulating groove 3 becomes the upper surface of the storage tank 2, and the modulating groove 3 and the storage tank 2 are integrally formed. The bottom surface 102 is also a partition wall for separating the brewing tank 3 from the storage tank 2. The outer shape of the tub 4 is a cylindrical shape that is longitudinal. The brewing tank 3 and the storage tank 2 may not necessarily be the same diameter.

The barrel of this aspect is suitable for the case where the installation space of the barrel is limited to the horizontal direction and the height direction is not limited. Compared with the case where the modulation tank and the storage tank are separately arranged, a bucket equivalent to the one provided with the two slots can be provided on the floor area occupying one storage tank. Further, according to the barrel of this aspect, it is easy to stir in the inside of the preparation tank and in the storage tank as compared with the barrel in which the preparation tank 3 and the storage tank 2 are combined. Further, in the bucket of this aspect, since the brewing tank is provided with a brewing tank, if the bottom surface 102 (partition wall) is provided with a flow path through which the chemical liquid flows from the brewing tank 3 to the storage tank 2, the chemical liquid is used. When the supply amount is reduced from the storage tank 2 to the outside of the tub to reduce the amount of liquid in the storage tank 2, the chemical solution having a reduced amount is naturally transferred from the brewing tank 3 to the storage tank 2 through the flow path. The chemical solution in the storage tank 2 is automatically replenished from the brewing tank 3 without a liquid feed pump or the like.

The tub 4 shown in FIG. 17 is such that the bottom surface 102 of the brewing tank 3 is placed on the upper surface of the storage tank 2, and the brewing tank 3 is disposed on the storage tank 2, and the brewing tank 3 is integrally formed with the storage tank 2. The bottom surface 102 is also a partition wall for partitioning the brewing tank 3 from the storage tank 2. The shape of the tub 4 is generally a rectangular shape or even a substantially cubic shape. The brewing tank 3 and the storage tank 2 may not necessarily be the same size.

According to the bucket of this aspect, in addition to the same effect as the bucket of the aspect described using FIG. 16, the floor surface of the installation space of the bucket is square or rectangular, compared to the horizontal direction. The cross section is a circular or elliptical barrel, which can effectively utilize the installation space, and the contents of the two slots can be large.

The tub 4 shown in FIG. 18 is such that the bottom surface 102 of the brewing tank 3 is placed on the upper surface of the storage tank 2, and the brewing tank 3 is disposed on the storage tank 2, and the brewing tank 3 and the storage tank 2 are integrally formed. The bottom surface 102 is also a partition wall for partitioning the brewing tank 3 from the storage tank 2. The shape of the tub 4 is substantially elliptical in shape. The brewing tank 3 and the storage tank 2 may not necessarily be the same size.

According to the barrel of this aspect, in addition to the same effect as the barrel of the aspect described with reference to Fig. 16, the floor surface of the installation space of the barrel is rectangular, compared to the section in which the horizontal direction is set. It is a circular barrel, which can effectively use the setting space and can enlarge the contents of the two slots.

The tub 4 shown in FIG. 19 is such that the bottom surface 102 of the brewing tank 3 is placed on the upper surface of the storage tank 2, and the brewing tank 3 is disposed on the storage tank 2, and the brewing tank 3 and the storage tank 2 are integrally formed. The bottom surface 102 is also a partition wall for partitioning the brewing tank 3 from the storage tank 2. The outer shape of the tub 4 is a cylindrical shape that is transverse. The transverse cylindrical shape means that the central axis of the cylinder is lateral (horizontal direction).

According to the bucket of this aspect, in addition to the same effect as the bucket of the aspect described using FIG. 16, the space in which the bucket is set is limited to the height direction but wide in the lateral direction can be made at the height. Under the increase, it can effectively use the bucket of the installation space in the horizontal direction. If the bucket can be supported by the foot, a liquid supply pump or piping can be provided in the space generated under the tub.

[Fourth embodiment]

In the present embodiment, in the example in which a plurality of modulation grooves are provided, a barrel in which two modulation grooves are integrally formed with one storage groove is exemplified. The plurality of modulation grooves are disposed so as to be adjacent to at least the storage tank, or are arranged integrally with each other.

In the tub 4 shown in FIG. 20, the storage tank 2 is disposed inside the brewing tank, and the brewing tank is integrally formed with the storage tank 2. The modulation groove has two modulation grooves 3A and 3B which are vertically overlapped so that the bottom surface 102 of the modulation groove 3A becomes the upper surface of the modulation groove 3B. The storage tank 2 passes through the modulation tank 3A and the modulation tank 3B. The outer shape of the tub 4 is a cylindrical shape that is longitudinal. The side of the storage tank 2 is used The partition wall 100 which separates the modulation grooves 3A and 3B from the storage tank 2. In addition, in FIG. 20, although the storage tank is shown in the coaxial double-layer cylindrical shape barrel arrange|positioned inside the modulation groove divided into the upper and lower stage, it is not limited by this. Modifications such as a non-coaxial and central axis deviation, a modification of a cross section having an elliptical or polygonal shape, and the like, and various modifications as described in the first embodiment can be employed. Further, the modulation grooves 3A and 3B may not necessarily have the same size.

According to the bucket of this aspect, in addition to the same effect as the bucket of the aspect described in the first embodiment, since two modulation grooves are provided, even if any one fails, another brewing tank can be continued. The preparation of the chemical solution can continuously supply the chemical solution prepared in the brewing tank to the storage tank without interrupting it.

The tub 4 shown in Fig. 21 is configured by integrally arranging two modulation grooves 3A and 3B in the storage tank 2 so that the brewing grooves 3A and 3B and the storage tank 2 are integrally formed. The shape of the tub 4 is substantially elliptical in shape. The modulation grooves 3A and 3B are cylindrical shapes that are vertically disposed.

According to this aspect of the barrel, since there are two modulation grooves, even if any one of the barrels is broken, the preparation of the chemical solution can be continued in the other modulation tank. The chemical solution prepared in the brewing tank can be continuously supplied to the storage tank without being interrupted.

The tub 4 shown in Fig. 22 integrally forms the brewing grooves 3A, 3B and the storage tank 2 such that the two brewing grooves 3A, 3B and one of the storage tanks 2 have a cylindrical shape. The partition wall 100 constitutes a part of the side surfaces of the modulation grooves 3A and 3B and the storage tank 2. The outer shape of the tub 4 is a cylindrical shape that is longitudinal. Further, in FIG. 22, the partition wall 100 is constituted by three planes, each of which extends from the central axis of the tub 4 toward the side of the tub 4. Although the cylinder is divided into three equal parts in Fig. 22, it is not limited thereto. It can also be divided into three equal parts. In this case, in addition to changing the joint angle on the central axis of the partition wall 100 from 120 degrees to change the internal volume of each groove, the joint position of the partition wall 100 may be changed by shifting the joint position of the partition wall 100 from the center axis of the cylinder. The case of the inner volume of the slot.

According to this aspect of the bucket, not only the bucket space can be effectively utilized, but also the appearance can be aesthetically designed as a bucket. Of course, since there are two modulation grooves, even if any one fails, the modulation of the chemical solution can be continued in another modulation tank.

In the tub 4 shown in Fig. 23, the modulating grooves 3A and 3B are joined to both sides of the substantially rectangular parallel-shaped storage tank 2, and the modulating grooves 3A and 3B and the storage tank 2 are integrally formed. The partition wall 100 is constituted by a side surface of the storage tank 2 that is in contact with the modulation grooves 3A, 3B. The partitions 100 are all flat. The shape of the tub 4 is generally a rectangular shape or even a substantially cubic shape. In addition, although FIG. 23 depicts the arrangement in which the modulating grooves 3A and 3B sandwich the storage tank 2, it is not limited thereto.

Since the barrel according to this aspect has two modulation grooves, even if any one of the barrels is broken, the preparation of the chemical liquid can be continued in the other preparation tank, and the prepared chemical liquid can be continuously supplied without interruption. In the case where the floor surface of the installation space of the tub is square or rectangular, the installation space can be effectively utilized as compared with the barrel provided with the cylindrical shape, and the contents of the respective grooves can be made large.

In the tub 4 shown in Fig. 24, two modulation grooves 3A and 3B having a semi-cylindrical shape are joined to both sides of the substantially rectangular parallel-shaped storage tank 2, and the brewing grooves 3A and 3B and the storage tank 2 are integrally formed. The partition wall 100 is constituted by a side surface of the storage tank 2 that is in contact with the modulation grooves 3A, 3B. The partitions 100 are all flat. The shape of the tub 4 is substantially a horizontally long cylindrical shape. It can also be in the shape of a substantially elliptical cylinder. In addition, although FIG. 24 depicts the arrangement in which the modulating grooves 3A and 3B sandwich the storage tank 2, it is not limited thereto. Further, a modification in which the partition wall 100 is not a flat surface but a curved surface can be cited. For example, when the modulation grooves 3A and 3B have a cylindrical shape (the partition 100 is a part of the side surface of the cylinder).

Since the barrel according to this aspect has two modulation grooves, even if any one of the barrels is broken, the preparation of the chemical solution can be continued in the other preparation tank, and the chemical solution prepared in the preparation tank can be continuously supplied without being interrupted. To the storage tank. The appearance can also be aesthetically designed as a barrel.

The tub 4 shown in Fig. 25 is a combination of two modulating grooves 3A, 3B of a shape in which a part of the cylinder is cut along the central axis, and a storage tank 2 of a substantially cubic shape or a substantially rectangular parallelepiped shape to modulate the grooves 3A, 3B. And storage The storage tank 2 is integrally formed. The partition wall 100 constitutes a part of the side surface of the brewing tank 3A and the storage tank 2, and the other partition wall 100 constitutes a part of the side surface of the brewing tank 3B and the storage tank 2. Further, in Fig. 25, the partition wall 100 is constituted by two planes, but is not limited thereto. A modification in which the partition wall 100 is not a flat surface but a curved surface can be cited. For example, when the modulation grooves 3A and 3B are in a cylindrical shape (the partition 100 is a part of the side surface of the cylinder). Further, although FIG. 25 depicts the arrangement in which the modulating grooves 3A and 3B sandwich the storage tank 2, it is not limited thereto.

According to the barrel of this aspect, since the modulating grooves 3A and 3B are in a shape in which a part of the cylinder is chopped off, it is easy to cause a stirring flow in the chemical liquid in the modulating grooves 3A and 3B to facilitate agitation. In particular, in the case where the jet stream is used for agitation, the liquid medicine in the tank is easily moved by the jet flow. On the one hand, since the storage tank 2 has a shape of a substantially cubic shape or a substantially rectangular parallelepiped, the contents of the storage tank can be accumulated in the same installation area as compared with the storage tank provided with a cylindrical shape, so that the installation space of the bucket is provided. Be more effective. Further, since the barrel according to this aspect has two modulation grooves, even if any one of the barrels is broken, the preparation of the chemical solution can be continued in the other modulation tank, and the liquid medicine prepared in the preparation tank can be continuously interrupted without being interrupted. Ground is supplied to the storage tank.

In the tub 4 shown in FIG. 26, the modulating grooves 3A and 3B are disposed on the storage tank 2 such that the modulating groove 3A and the bottom surface 102 of the modulating groove 3B are the upper surface of the storage tank 2, and the modulating grooves 3A, 3B and the storage tank 2 are integrated. Composition. The bottom surface 102 is also used to separate the modulation grooves 3A, 3B from the storage tank 2. next door. The outer shape of the tub 4 is a cylindrical shape that is longitudinal. The modulation grooves 3A, 3B and the storage tank 2 may not necessarily be the same diameter. Further, the outer shape of the tub 4 may be an elliptical cylinder shape or the like. The modulation groove partition 104 for separating the modulation groove 3A from the modulation groove 3B constitutes a part of the side surface of the modulation groove 3A and the modulation groove 3B, and is a barrel integrally formed by the modulation groove 3A and the modulation groove 3B.

The barrel of this aspect is suitable for the case where the installation space of the barrel is limited to the horizontal direction and the height direction is not limited. Compared with the case where the modulation tank and the storage tank are separately arranged, a bucket equivalent to the one provided with the two slots can be provided on the floor area occupying one storage tank. Moreover, according to the barrel of this aspect, it is easy to stir in the preparation tank and the storage tank as compared with the barrel in which the preparation tank and the storage tank are combined. Further, in the barrel of this aspect, since the brewing tank is provided on the storage tank, if the flow path through which the chemical liquid flows is provided in the bottom surface 102 (partition wall), the storage tank is supplied to the outside of the tub due to the chemical liquid. When the amount of liquid in 2 is reduced, the chemical liquid having a reduced amount is naturally transferred from the preparation tanks 3A and 3B to the storage tank 2 through the flow path. The chemical solution in the storage tank 2 is automatically replenished from the brewing tanks 3A, 3B without a liquid feed pump or the like. Further, since the barrel according to this aspect has two modulation grooves, even if any one of the barrels is broken, the preparation of the chemical solution can be continued in another modulation tank, and the chemical solution prepared in the preparation tank can be continuously interrupted without being interrupted. Supply to the storage tank.

The tub 4 shown in Fig. 27 is provided with modulation grooves 3A and 3B on the storage tank 2 such that the modulation groove 3A partitioned by the groove defining partition wall 104 and the bottom surface 102 of the modulation groove 3B become the upper surface of the storage tank 2 The grooves 3A, 3B and the storage tank 2 are integrally formed. The shape of the tub 4 is generally a rectangular shape or even a substantially cubic shape.

According to the bucket of this aspect, in addition to the same effect as the bucket of the aspect described using FIG. 26, the floor surface of the installation space of the tub is a square or a rectangle, compared to the horizontal direction. The cross section is a circular or elliptical bucket, which can effectively utilize the installation space and can integrate the contents of the two slots.

The tub 4 shown in Fig. 28 is integrally formed by two modulation grooves 3A and 3B partitioned by the modulating groove partition wall 104 and an outer shape in which one storage tank 2 has a cylindrical shape. The storage tank 2 is disposed below the brewing tanks 3A, 3B. The modulation groove 3A and the bottom surface 102 of the modulation groove 3B serve as the upper surface of the storage tank 2. The bottom surface 102 is also a partition wall for partitioning the modulation grooves 3A, 3B from the storage tank 2. The outer shape of the tub 4 is a cylindrical shape that is transverse. It can also be in the shape of an oval cylinder. Further, in the present embodiment, the partition wall 100 is formed by three planes, and each plane extends from the central axis of the tub 4 toward the side surface of the tub 4.

According to the bucket of this aspect, in the case where the installation space of the tub is limited to the height direction but wide in the lateral direction, it is possible to create a bucket which can effectively utilize the installation space in the lateral direction without increasing the height. If the bucket can be supported by the foot, a liquid supply pump or piping can be provided in the space generated under the tub. Further, since the two modulation grooves are provided, even if any one of the failures is completed, the preparation of the chemical liquid can be continued in the other preparation tank, and the chemical solution prepared in the preparation tank can be continuously supplied to the storage tank without being interrupted.

The tub 4 shown in Fig. 29 is integrally formed in such a manner that the two modulation grooves 3A partitioned by the modulating groove partition wall 104 and the modulating groove 3B and one storage tank 2 have a cylindrical outer shape. Modulation grooves 3A and 3B are disposed on the storage tank 2 so that the bottom surface 102 of the preparation tank 3A and the modulation tank 3B are the upper surface of the storage tank 2, and the preparation grooves 3A and 3B and the storage tank 2 are integrally formed. The outer shape of the tub 4 is a cylindrical shape that is transverse. It can also be in the shape of an oval cylinder.

According to the bucket of this aspect, in the case where the installation space of the tub is limited to the height direction but wide in the lateral direction, it is possible to create a bucket which can effectively utilize the installation space in the lateral direction without increasing the height. If the bucket can be supported by the foot, a liquid supply pump or piping can be provided in the space generated under the tub. Further, since the two modulation grooves are provided, even if any one of the failures is completed, the preparation of the chemical liquid can be continued in the other preparation tank, and the chemical solution prepared in the preparation tank can be continuously supplied to the storage tank without being interrupted.

In the above, a barrel 4 having a plurality of modulation grooves 3A and 3B in one storage tank 2 is taken as an example, and a barrel having a plurality of modulation grooves is provided. However, the present invention is not limited thereto. For example, it may be a barrel in which one storage tank is provided with three or more modulation tanks and integrated. For example, it may be a bucket or the like which is provided with three modulation grooves for two storage tanks and is integrally formed. These cases are also the same as the example of the barrel integrally formed by one storage tank and two modulation grooves as described above with reference to the drawings, and only the configuration of the barrel can be considered.

The barrel of each of the above-described embodiments in which the preparation tank and the storage tank are integrally formed is preferably formed so that the chemical liquid flows at least between the partition wall for separating the preparation tank from the storage tank, the preparation tank, and the storage tank.

As such a flow path, for example, an opening, a slit, a slit, or the like provided in the partition wall can be considered. The flow path can also be one or plural. The so-called flow path is, in short, a passage for the chemical liquid provided in the partition wall so that the chemical liquid in the tank naturally flows into the storage tank when the chemical liquid in the storage tank is reduced.

In the case of a barrel in which the modulation tank and the storage tank share a part of the side surface thereof, or a vertical type barrel in which the storage tank is disposed inside the preparation tank, a slit is provided in advance under the partition wall. And so on. More preferably, the partition wall is provided in such a manner that a gap can be formed between the partition wall and the bottom surface of the tub. Thereby, there is no liquid residue or liquid accumulation in the lower portion of the tub.

In the case where the brewing groove is placed on the storage tank so that the bottom surface of the brewing tank is placed on the upper surface of the storage tank, the bottom surface of the brewing tank is a partition wall for partitioning the brewing tank from the storage tank. In this case, it is preferable that the bottom surface of the brewing groove is bent toward the storage tank side and an opening is provided in the vicinity of the lowermost portion as a flow path. There is no liquid residue or liquid accumulation in the lower part of the brewing tank.

The flow path through which the chemical solution flows is provided in the partition wall for partitioning the brewing tank from the storage tank, the following effects can be obtained. By supplying the liquid to the outside of the bucket In the case where the liquid medicine in the storage tank is reduced, the chemical liquid prepared in the preparation tank naturally flows into the storage tank, and the storage tank can be prevented from becoming empty. Continuous supply of the chemical liquid can be performed. Further, if such a flow path is not provided, it is not necessary to transfer the chemical solution of the necessary preparation tank to the piping or the liquid supply pump in the storage tank. Therefore, the installation space required for such a pipe or a liquid supply pump or the like becomes unnecessary, and the installation space of the tub can be made wider.

The tub of each of the above embodiments, in which the brewing tank and the storage tank are integrally formed, further forms a gas communication path at least in the partition wall for separating the brewing tank from the storage tank, so that the gas is in the upper space of the brewing tank and the upper portion of the storage tank. Circulation between spaces is preferred.

As such a gas communication path, for example, an opening, a slit, a slit, or the like provided in the partition wall can be considered. The gas communication path may also be one or plural. The so-called gas communication path, in short, the gas in the upper space is disposed in the passage of the gas of the partition wall in a freely arrangable manner between the modulating groove and the storage tank.

In the case of a barrel in which the modulation tank and the storage tank share a part of the side surface thereof, or a vertical type barrel in which the storage tank is disposed inside the preparation tank, a slit is provided in advance above the partition wall. And so on. More preferably, the partition wall is provided in such a manner as to create a gap between the partition wall and the tub patio. Thereby, the internal pressure of the groove in the brewing tank and the storage tank can be made common.

In the case where the bottom surface of the preparation tank is the upper surface of the storage tank, the preparation tank is placed on the tank integrally formed on the storage tank, and it is suitable to store the piping penetrating the bottom surface of the preparation tank as the partition wall along the inner side of the tank side wall. The upper portion of the groove is provided to the upper portion of the modulation tank as a gas communication path. The access of the chemical solution in the storage tank can be smoothly performed.

The following effects can be obtained by providing a gas communication path between the partition walls for separating the brewing tank from the storage tank. If there is no gas communication path, it is not necessary to provide piping or the like outside the barrel. Therefore, the installation space required for such a pipe or the like becomes unnecessary, and the installation space of the vat can be made larger.

Next, a description will be given of the chemical liquid preparation device involved in the present creation.

In the following description, a process of a semiconductor or a liquid crystal display substrate will be described as an example. However, the industrial fields to which this creation applies are not limited by this. This creation can also be applied to other industrial fields, such as the process of electrolyte used in batteries. In the following description, as a specific example of the chemical liquid used in the process of the semiconductor or the liquid crystal display substrate, a 2.38% tetramethylammonium hydroxide aqueous solution which is mainly used as a developing solution in the development process is suitably used (hereinafter, Tetramethylammonium hydroxide is referred to as TMAH.).

However, the liquid medicine to which this creation is applied is not limited by this. Examples of other chemical liquids that can be applied to the present invention include an etching solution, a peeling liquid, an antistatic agent, a cleaning solution, and the like in addition to the developer.

These chemical liquids are each further present in various types or compositions. For example, as the developer, an aqueous solution of an inorganic compound such as potassium hydroxide, sodium hydroxide, sodium phosphate or sodium citrate or an aqueous solution of an organic compound such as trimethylammonium monoethanolammonium (choline) or the like may be mentioned. . For example, examples of the etching solution include an aqueous solution of oxalic acid, a mixed aqueous solution of sulfuric acid and hydrogen peroxide, a copper sulfate solution, a mixed aqueous solution of phosphoric acid and acetic acid and nitric acid, a hot phosphoric acid, an aqueous solution of ammonium nitrate, and a ferric chloride solution. For example, examples of the peeling liquid include a solution of a dimethyl sulfoxide-based stock solution and a pure water, a solution of a N-methylpyrrolidone-based stock solution and a pure water, a solution of an alcoholamine, a glycol ether, and a pure water. A water-based resist stripping solution or a non-aqueous resist stripping solution such as a mixed solution of monoethanolamine and diethylene glycol monobutyl ether and an additive.

[Fifth Embodiment]

Fig. 30 is a schematic view for explaining the chemical liquid preparation device of the embodiment. In the description of the present embodiment, a chemical liquid preparation device in which a TMAH aqueous solution having a concentration of 20% is mixed with pure water to prepare a TMAH aqueous solution having a concentration of 2.38% will be described as a specific example.

The chemical solution preparation device 10 of the present embodiment is constituted by a container 4 in which the modulation tank 3 and the storage tank 2 are integrally formed, and a modulation tank concentration measuring means 31 for measuring the concentration of the chemical solution in the preparation tank 3; In the means 1, the concentration measured by the modulation tank concentration measuring means 31 is such that the concentration of the chemical solution prepared in the preparation tank 3 becomes the set concentration. The supply amount of the raw material supplied to the chemical liquid supplied to the brewing tank 3 is controlled, and the chemical liquid supply pipe 5 is transported to the outside equipment and the like.

The barrel 4 which is integrally formed with the preparation tank 3 and the storage tank 2 will be described by way of an example of a coaxial double-layer cylindrical barrel in which the storage tank 2 is disposed inside the preparation tank 3.

However, the tub of the liquid chemical brewing device involved in the present creation is not limited by this. The storage tank 2 and the preparation tank 3 may be integrally formed in the manner of the various barrels exemplified in the description of the first to fourth embodiments. The storage tank and the preparation tank of the tub of the chemical-solution preparation device according to the present invention are integrally formed, and are the same as those described in the first to fourth embodiments. In the following description, a description will be given of a description of how the tub of the chemical-solution preparing device is integrally formed.

The brewing tank 3 of the tub 4 is provided with a jet stirring device 35 for stirring the chemical liquid in the brewing tank 3. As the jet agitating device 35, it is preferable to use a nozzle. The jet agitating device 35 is connected to a circulation line 34 provided with a circulation agitation pump 33.

The means for stirring the chemical liquid in the brewing tank 3 is not limited to the jet stirring device. Various stirring methods can be employed. It is also possible to use a stirring device that rotates the stirring blade, or a stirring device that rotates the stirring member in the tank. It is preferable to use a circulating stirring method in which the chemical solution in the tank is taken out and returned to the tank again, and the nozzle is used for the jet stirring at the discharge port. Suitable for making liquid medicine The raw materials are supplied in a combined manner with the circulating agitated pipes and directly stirred. A uniform concentration of the drug solution can be obtained quickly.

The chemical solution adjusted to the set concentration in the brewing tank 3 is supplied to the storage tank 2. The chemical liquid moves from the brewing tank 3 toward the storage tank 2 through the flow path 8 formed on the side surface of the storage tank 2 (that is, the partition wall for partitioning the brewing tank 3 from the storage tank 2). The storage tank 2 stores the adjusted concentration of the chemical solution. In the embodiment of Fig. 30, the side surface (partition wall) of the storage tank 2 is provided so as to form a gap between the bottom surface of the tub 4, and the gap with the bottom surface of the tub 4 functions as the flow path 8.

Further, a gas communication path 9 is formed on the side surface (partition wall) of the storage tank 2, and gas flows between the upper space of the storage tank 2 and the upper space of the preparation tank 3.

A jet agitating device 26 for agitating the chemical liquid stored in the storage tank 2 is provided on the bottom surface of the storage tank 2. As the jet agitating device 26, it is preferable to use a nozzle. The jet agitating device 26 is connected to a circulation line 24 provided with a circulating agitation pump 23. The stirring means of the storage tank 2 is also the same as the stirring means of the brewing tank 3, and is not limited to the jet flow stirring apparatus. Various mixing methods can be used.

In the case where a 20% aqueous solution of TMAH is mixed with pure water to prepare a 2.38% aqueous solution of TMAH, the raw material is a 20% aqueous solution of TMAH, and it is stored from the chemical raw material inlet 52 through the chemical raw material supply pipe 42 to the chemical raw material. The bucket 11 or 12 is stored.

The control valves 13 to 18 are connected to the computer 1 (control means) via the signal line 44. The computer 1 transmits a control signal to the control valves 13 to 18 via the signal line 44, and controls the opening and closing of the control valves 13 to 18. When the chemical liquid material storage tank 11 is filled with a 20% aqueous solution of TMAH, the control valve 13 is opened. The control valve 15 is opened while the chemical liquid material storage tank 12 is filled with a 20% aqueous solution of TMAH.

The chemical solution material storage tanks 11 and 12 are pressurized by nitrogen gas supplied from the nitrogen gas inlet 60 via the nitrogen gas supply pipe 62. The stored 20% TMAH aqueous solution is transported through the chemical raw material supply pipe 43 connected to the brewing tank 3. The control valve 14 and the control valve 17 are opened while transporting the 20% aqueous solution of TMAH in the chemical raw material storage tank 11. The control valve 16 and the control valve 17 are opened while transporting the 20% aqueous solution of TMAH in the chemical raw material storage tank 12.

When a 2.38% aqueous TMAH solution was prepared from a 20% aqueous TMAH solution, 20% of the TMAH aqueous solution was mixed with pure water for dilution. The pure water is supplied from the pure water inlet 51 to the brewing tank 3 via the pure water supply pipe 41. The control valve 18 is opened while the pure water is being transported.

The modulation tank 3 includes a modulation tank concentration measuring means 31 and a first liquid level meter 32. The brewing tank concentration measuring means 31 samples the chemical liquid in the brewing tank 3, and measures the concentration thereof. The first liquid level meter 32 measures the position of the liquid surface of the chemical liquid in the brewing tank 3. Moreover, the liquid medicine in the brewing tank 3 is prepared in the circulation line The circulating agitating pump 33 of 34 and the jet agitating device 35 are circulated and stirred. Therefore, the chemical liquid in the brewing tank 3 is set to a uniform concentration.

In FIG. 30, the storage tank 2 is disposed inside the modulation tank 3. The stock solution and pure water supplied to the brewing tank 3 are stored in the space inside the brewing tank 3 and on the outer side of the storage tank 2. The raw materials of the chemical solution are stirred and mixed in this space to prepare a uniform concentration of the drug solution. The chemical flow in the brewing tank 3 is generated by the jet agitating device 35, and the chemical solution can be sufficiently stirred. Further, by intermittently operating the jet agitating device 35, the chemical solution can be stirred by the inertial force.

One of the circulating agitation pumps 33 shown in Fig. 30 may be, for example, a plurality of circulating agitation pumps arranged in parallel. By providing a plurality of circulating agitation pumps, the chemical solution preparing device 10 can be continuously operated even if one of the circulating agitation pumps temporarily fails.

The modulation tank concentration measuring means 31 and the first liquid level meter 32 are connected to the computer 1 (control means) via the signal lines 45 and 46. The computer 1 monitors the concentration of the chemical solution measured by the modulation tank concentration measuring means 31 and the liquid level position of the chemical liquid measured by the first liquid level meter 32. The computer 1 controls the opening and closing of the control valves 13 to 18 in accordance with the measured values such as the concentration and the liquid level position as follows. Thereby, it is possible to automatically prepare a 2.38% aqueous solution of TMAH, which is a chemical solution having a predetermined concentration, and to constantly set a predetermined amount of liquid and a supply amount.

For example, in the case where the TMAH concentration in the brewing tank 3 is lower than 2.38%, the computer 1 opens either the control valve 14 or 16 and the control valve 17, and supplements 20% of the TMAH aqueous solution. The control valve 17 is an open/close control valve that adjusts the flow rate at the time of opening, and is controlled by the computer 1 to open the control valve 17 at a predetermined time to supply a necessary amount of 20% aqueous solution of TMAH.

For example, in the case where the TMAH concentration in the modulation tank 3 is higher than 2.38%, the computer 1 opens the control valve 18 to make up the pure water. The control valve 18 is an opening and closing control valve that adjusts the flow rate at the time of opening, and is controlled to open the control valve 18 by the computer 1 for a predetermined period of time to supply a necessary amount of pure water.

For example, in the case where the liquid level position in the brewing tank 3 is lowered, any one of the control valve 14 or 16 and the control valve 17 and the control valve 18 are appropriately opened to increase the amount of the chemical liquid to be modulated.

Further, when the chemical liquid material storage tank 11 becomes empty, the computer 1 closes the control valve 14, opens the control valve 13, and replenishes the chemical liquid material to the chemical liquid material storage tank 11. Similarly, when the liquid medicine material storage tank 12 becomes empty, the computer 1 closes the control valve 16, opens the control valve 15, and replenishes the chemical liquid material to the liquid medicine material storage tank 12. In this way, the computer 1 is kept in a state in which any of the chemical liquid material storage tanks 11 or 12 must be filled with the chemical liquid material.

The 2.38% aqueous solution of TMAH prepared in the brewing tank 3 is moved and stored in the storage tank 2 through the flow path 8 formed on the side surface (partition wall) of the storage tank 2. When the chemical liquid is supplied from the storage tank 2 to the chemical liquid use device 90 to reduce the amount of the chemical liquid stored therein, the chemical liquid prepared in the brewing tank 3 moves to the storage tank 2 via the flow path 8.

In the present embodiment, the open bottom surface of the storage tank 2 is defined as the flow path 8, but is not limited thereto. For example, when the storage tank 2 has a side surface and a bottom surface, at least one of the through holes formed on the side surface and the bottom surface may be the flow path 8.

The flow path 8 has a buffering action in which the fluctuation of the concentration of the chemical solution generated in the preparation tank 3 does not affect the so-called concentration fluctuation inside the storage tank 2. The size, shape, and position of the flow path 8 can be appropriately determined depending on the capacity of the preparation tank 3, the storage tank 2, the amount of liquid to be supplied to the raw liquid, and the liquid amount of the chemical liquid to be used.

In the embodiment shown in Fig. 30, the partition wall for partitioning the brewing tank 3 from the storage tank 2 has the flow path 8 through which the chemical liquid flows. Therefore, it is not necessary to provide a communication pipe for connecting the chemical liquid.

Similarly to the preparation tank 3, the storage tank 2 includes a storage tank concentration measuring means 21 and a second liquid level gauge 22. These storage tank concentration measuring means 21 and the second liquid level meter 22 are also connected to the computer 1 (control means) via the signal lines 47 and 48. Computer 1 is based on the storage tank concentration measuring means 21 The concentration of the chemical solution in the storage tank 2 and the liquid level position of the chemical liquid in the storage tank 2 measured by the second level gauge 22 are appropriately controlled to the control valves 13 to 18. The control system is the same as the case of the modulation tank 3. Since the storage tank 2 has extremely little change in concentration, actually, the concentration of the internal chemical liquid is monitored, the liquid amount management, and the supply amount management.

Further, the chemical solution in the storage tank 2 is circulated and stirred in accordance with the circulation stirring pump 23 and the jet flow agitating device 26 provided in the circulation line 24. Therefore, the liquid medicine in the storage tank 2 is maintained at a uniform concentration.

The chemical solution stored in the storage tank 2 is supplied from the chemical liquid supply port 53 to the chemical liquid use device 90 through the chemical supply pipe 5 and the integrated flow meter 6 by the liquid supply pump 25. The chemical liquid use device 90 is connected to the computer 1 via a signal line 92. The computer 1 receives the chemical supply request signal sent from the chemical-using device 90 on the user side via the signal line 92. The control valve 19 is connected to the computer 1 via a signal line 49. The computer 1 performs opening and closing control of the control valve 19 provided in the chemical liquid supply pipe 5 in response to a request from a user on the side of the chemical liquid use device 90. Therefore, the chemical liquid use device 90 can supply the supply of the chemical liquid to the extent necessary when the chemical liquid is required.

When the chemical solution in the storage tank 2 is reduced, the chemical solution in the preparation tank 3 is naturally supplied to the storage tank 2 via the flow path 8 in accordance with the head pressure difference between the preparation tank 3 and the storage tank 2. The liquid level of the brewing tank 3 is lowered, and the liquid level of the storage tank 2 is raised, whereby the liquid level of the brewing tank 3 and the storage tank 2 is kept substantially constant. When the liquid level becomes substantially constant, the liquid level of the groove 3 is adjusted. drop. The computer 1 monitors the liquid level of the chemical solution measured by the first liquid level meter 32. Therefore, the control valves 13 to 18 are controlled to open and close according to the liquid level position, and 2.38% of the TMAH aqueous solution, which is a predetermined concentration of the chemical solution, is always used. Modulation is automatically done in a way that is a given amount of liquid.

The TMAH aqueous solution is strongly alkaline, and when the liquid surface is exposed to the atmosphere, it absorbs carbon dioxide in the atmosphere and causes concentration fluctuations to deteriorate. As in this case, when the chemical liquid is in contact with the atmosphere, a sealing gas such as nitrogen gas may be introduced into the modulation tank 3 or the upper portion of the storage tank 2.

In FIG. 30, nitrogen gas is supplied to the brewing tank 3 and the storage tank 2 via the nitrogen gas supply piping 65. The supplied nitrogen gas is mixed with the chemical liquid vaporized in the tank in the upper space of the preparation tank 3 or the storage tank 2 to become a humid gas. The nitrogen gas is adjusted to vary above and below the liquid level in the tank, and is suitably supplied to the tank or exhausted to the outside of the tank.

A gas communication path 9 is formed on a side surface of the storage tank 2 (a partition wall for partitioning the brewing tank 3 from the storage tank 2), and supply of nitrogen gas toward the upper space of the storage tank is preferentially supplied from the upper space of the brewing tank 3. In the case of the vapor of the chemical liquid, the humid nitrogen gas is taken into the storage tank 2, so that wasteful evaporation in the storage tank 2 can be suppressed as compared with the case of introducing dry nitrogen gas, and the storage tank 2 can be effectively suppressed. The concentration change of the liquid medicine evaporates.

Since the gas flows through the upper space of the storage tank 2 and the modulating tank 3 through the gas communication path 9, the pressure inside the modulating tank 3 and the storage tank 2 is kept substantially constant. When the liquid level of the brewing tank 3 and the storage tank 2 is lowered, the volume of the gas space inside the brewing tank 3 and the storage tank 2 is increased, and the internal pressure of the brewing tank 3 and the storage tank 2 is lowered. Therefore, nitrogen gas is naturally supplied to the brewing tank 3 and the storage tank 2.

When the preparation tank 3 is supplied with at least one of the raw liquid and the pure water to raise the liquid level of the preparation tank 3 and the storage tank 2, the volume of the internal gas space of the preparation tank 3 and the storage tank 2 becomes small, and the modulation tank 3 and the modulation tank 3 are The internal pressure of the storage tank 2 rises. Thereby, the nitrogen gas in the inside of the preparation tank 3 and the storage tank 2 is naturally returned to the nitrogen gas supply piping 65.

In the embodiment of the above-described chemical liquid preparation device 10, a device in which a 2.38% aqueous TMAH solution of a developer solution is diluted and blended from a 20% TMAH stock solution is described as a specific example. The chemical solution modulating portion of the drug solution preparing device 10 described in this embodiment is a typical example, and the present invention is not limited thereto. The chemical liquid use device 90 can adopt various aspects if it can prepare a chemical solution having a necessary component concentration from its raw material. Of course, the chemical liquid preparation portion of the chemical liquid preparation device 10 can adopt various modifications depending on the type of the chemical liquid to be prepared. In addition to the case where the stock solution is diluted with pure water, the configuration of the apparatus for realizing various preparation methods can be applied to the case of mixing a plurality of chemical liquids or preparing a solid raw material.

Further, the signal lines 44 to 49 and 92 mean the transmission (path) of the control signal from the computer 1, and the signal lines 44 to 49 and 92 may be signal lines or wireless communication.

In the above description of the chemical liquid preparation device, a description will be given of Fig. 30 showing the chemical liquid preparation device 10 in accordance with a preferred embodiment. However, the chemical liquid preparation device involved in the present creation is not essential to all the configurations shown in FIG. The chemical liquid preparation device in the present invention includes various modifications as long as it is a chemical liquid having a concentration set from a raw material of the chemical liquid.

Further, although the coaxial double-decked cylindrical drum 4 in which the storage tank 2 is disposed inside the brewing tank 3 is taken as an example, the tub 4 is not limited thereto. The medical fluid preparation device 10 can be applied to a bucket having other configurations without being detached from the present invention. The flow path 8 can be provided in the partition wall for partitioning the storage tank 2 constituting the tub 4 from the brewing tank 3. The flow path 8 can be provided below the liquid level of the chemical liquid stored in the storage tank 2 and the liquid level of the liquid surface of the chemical liquid stored in the preparation tank 3.

A gas communication path 9 may be provided in a partition wall separating the storage tank 2 constituting the tub 4 from the brewing tank 3. The gas communication path 9 can be provided above the liquid level of the chemical liquid stored in the storage tank 2 and the liquid level of the liquid surface of the chemical liquid stored in the preparation tank 3.

In short, the liquid chemical preparation device 10 of the present invention includes a preparation tank 3 for preparing a chemical solution having a set concentration; a storage tank 2 for storing a chemical solution prepared in the preparation tank 3; and a concentration of the chemical solution for measuring the preparation tank 3. Modulation tank concentration measuring means 31; and measurement based on the modulation tank concentration measuring means 31 The control means (computer 1 or the like) for controlling the supply amount of the raw material of the chemical liquid supplied to the brewing tank 3 at a predetermined concentration, and setting the concentration of the concentration of the chemical liquid prepared in the brewing tank 3 by the storage tank 2 The chemical liquid preparation device which is configured integrally with the modulation tank 3 and can effectively utilize the installation space.

Next, the detailed configuration of the tub 4 will be described. Figure 31 is a perspective view of the tub 4. Figure 32 is a cross-sectional view showing the double-layered structure barrel cut in the horizontal direction. As shown in FIG. 31, the tub 4 is constituted by a so-called double-layered cylindrical structure in which the cylindrical brewing tank 3 and the storage tank 2 are disposed coaxially inside the brewing tank 3 in the storage tank 2. The tub 4 is supported by a plurality of support legs 70 provided in the brewing tank 3.

In Fig. 31, two through holes are formed in the side surface of the storage tank 2. These two through holes function as the flow path 8. The flow path 8 is formed by a slit-shaped through hole that is substantially parallel to the height direction of the storage tank 2. However, the flow path 8 is not limited to the slit-shaped through hole, and for example, a circular through hole, a plurality of circular through holes, or the like can be applied.

As shown in FIGS. 31 and 32, the two jet flow agitation devices 35 are disposed at positions where the side walls of the modulation tank 3 face each other. The stirring flow is generated in the brewing tank 3 by the jet agitating device 35 to uniformly agitate the chemical liquid. In particular, by setting the tub 4 to a double-layered cylindrical structure, the chemical solution can be smoothly circulated and stirred.

As shown in Fig. 31, the jet agitating device 26 is disposed on the bottom surface of the storage tank 2 and the jet flow direction is a position that is obliquely upward. The chemical solution adjusted to the concentration by the jet agitating device 26 is circulated and stirred inside the storage tank 2. The jet flow direction of the jet agitating device 35 and the jet agitating device 26 may be the same direction or the opposite direction. As described above, by intermittently moving the jet agitating device 35, the chemical solution can be stirred by the inertial force. Similarly, the jet agitating device 26 is intermittently actuated, and the chemical solution can be stirred by the inertial force.

In the above-described embodiment, the barrel 4 is described as an example of a coaxial double-layered cylindrical barrel in which the storage tank 2 is disposed inside the storage tank 3 and the preparation tank 3 and the storage tank 2 are integrally formed. The configuration of the tub 4 integrally formed with the storage tank 2 is not limited thereto.

Secondly, the barrel integrally formed by the modulation tank and the storage tank also includes: a case where the respective modulation grooves and the storage tank are connected to each other, and a partition wall for separating the modulation tank from the storage tank is a side of the modulation tank and the storage tank. In some cases, the modulation groove may be disposed on the storage tank such that the bottom surface of the preparation tank becomes the upper surface of the storage tank.

In the case where the tub 4 shown in Figs. 20 to 29 is applied to the chemical liquid preparation device 10, the modulation groove concentration measuring means 31 can be provided for each of the plurality of modulation grooves 3.

The contents described in the respective embodiments with reference to the drawings are also applicable to the process of semiconductor or liquid crystal display. A variety of chemical liquids, various electrolytes used in battery manufacturing, and liquid chemical preparation devices for preparing and supplying them.

2‧‧‧ storage tank

3‧‧‧Modulation slot

4‧‧‧ barrel

100‧‧‧ next door

Claims (19)

A barrel comprising: a brewing tank for modulating a concentration of the chemical solution; and a storage tank for storing the chemical solution prepared by the brewing tank, wherein the brewing tank is integrally formed with the storage tank. The bucket of claim 1, wherein any one of the aforementioned modulation groove and the storage tank is disposed inside the other. A barrel according to claim 2, wherein the storage tank is provided in a coaxial double-layered cylindrical shape disposed inside the modulation groove. The bucket of claim 1, wherein the partition wall for separating the brewing tank from the storage tank is a part of a side surface of the brewing tank and the storage tank. The barrel of claim 1, wherein the preparation groove is disposed on the storage tank such that a bottom surface of the preparation groove is an upper surface of the storage tank. The bucket of claim 1 has a plurality of the aforementioned modulation slots. The barrel according to any one of claims 1 to 6, wherein a flow path is formed in a partition wall for partitioning the preparation tank from the storage tank, and a chemical liquid is caused to flow between the preparation tank and the storage tank. Such as the bucket of claim 7 Further, a gas communication path is formed in the partition wall to allow gas to flow between the upper space of the preparation tank and the upper space of the storage tank. A chemical liquid preparation device comprising: a barrel configured to integrate a preparation tank for modulating a chemical solution having a set concentration with a storage tank for storing a chemical solution prepared in the preparation tank; and a modulation tank concentration measuring means for measuring the modulation tank And a control means for controlling the concentration to be supplied to the preparation tank in accordance with the concentration measured by the modulation tank concentration measuring means so that the concentration of the chemical solution prepared in the preparation tank becomes the predetermined concentration The supply amount of the raw material of the chemical liquid. The chemical liquid preparation device according to claim 9, wherein any one of the modulation tank and the storage tank is disposed inside the other. The chemical solution preparation device according to claim 10, further comprising a coaxial double-layered cylindrical shape in which the storage tank is disposed inside the modulation groove. The chemical liquid preparation device according to claim 9, wherein the partition wall for separating the preparation groove from the storage tank is a part of a side surface of the preparation groove and the storage tank. The chemical liquid preparation device according to claim 9, wherein the modulation groove is disposed on the storage tank such that a bottom surface of the preparation groove is an upper surface of the storage tank. The liquid chemical modulation device of claim 9, comprising a plurality of the aforementioned modulation grooves, Each of the plurality of modulation grooves includes the modulation groove concentration measuring means. The liquid preparation device according to any one of claims 9 to 14, wherein a flow path is formed in the partition wall for separating the modulation tank from the storage tank, so that the chemical liquid is between the preparation tank and the storage tank. Circulation. The chemical liquid preparation device according to claim 15, wherein the partition wall further has a gas communication path, and a gas flows between the upper space of the modulation tank and the upper space of the storage tank. The chemical solution preparation device according to any one of claims 9 to 14, further comprising a storage tank concentration measuring means for measuring a concentration of the chemical liquid in the storage tank. The chemical solution preparation device according to claim 17, wherein a flow path is formed in a partition wall for partitioning the modulation tank from the storage tank, and a chemical liquid is caused to flow between the preparation tank and the storage tank. The chemical liquid preparation device according to claim 18, wherein a gas communication path is further formed in the partition wall to allow a gas to flow between an upper space of the modulation tank and an upper space of the storage tank.