JP2017142536A - Reversing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce a space for reversing a substrate.SOLUTION: A reversing device 1 includes a first holding member 3a and a rotating member 2. The first holding member 3a has a first holding surface for holding a substrate W. The rotating member 2 supports the first holding member 3a slidably along a first shaft, and rotates so that front and rear surfaces of the first holding surface of the first holding member are reversed. The first holding member 3a slides between a first advance position and a first retreat position.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a reversing device for reversing a substrate.

  The liquid crystal device is configured by a bonded substrate in which a first substrate and a second substrate are bonded together with a sealing material so that a liquid crystal layer is interposed (for example, Patent Document 1). This bonded substrate is once manufactured in a large size state from the viewpoint of productivity, etc., and it is generally performed to divide the large size substrate into a necessary size to produce a plurality of bonded substrates. Yes.

  When dividing this bonded substrate, generally, a step of turning the bonded substrate upside down is required. An example of the method for dividing the bonded substrate will be described. First, the bonded substrate is fixed so that the first substrate is on the upper side, and a scribe groove is formed in the first substrate. Then, the bonded substrate is reversed so that the bonded substrate is fixed so that the second substrate is on the upper side, the bonded substrate is pressed and bent from the second substrate side, and the first substrate is moved along the scribe groove. Divide. Next, after the scribe groove is formed on the second substrate of the bonded substrate with the second substrate on the upper side, the bonded substrate is turned over so that the first substrate is on the upper side. Fix it. Then, the bonded substrate is pressed and bent from the first substrate side, and the second substrate is divided along the scribe groove.

JP2012-203235A

  As described above, when the substrate is divided, a step of inverting the substrate is required. However, since the size of the substrate has increased in recent years, there is a problem that a large space is required for the inversion of the substrate.

  An object of the present invention is to invert a substrate in a smaller space.

  (1) A reversing device according to an aspect of the present invention is a device for reversing a substrate, and includes a first holding member and a rotating member. The first holding member has a first holding surface that holds the substrate. The rotating member supports the first holding member so as to be slidable along the first axis, and rotates so as to reverse the front and back of the first holding surface of the first holding member. The first holding member slides between the first forward position and the first backward position. In the first retracted position, the first holding surface is closer to the rotating shaft side of the rotating member than the first advanced position.

  According to this configuration, since the first holding member is slidably supported between the first forward position and the first backward position, the substrate is moved by moving the first holding member forward to the first forward position. The step of holding the first holding member on the first holding surface can be easily performed. Further, by retracting the first holding member to the first retracted position, the radius of rotation in the reversing device when the rotating member rotates can be reduced. As a result, the substrate can be turned upside down in a smaller space.

  (2) Preferably, the reversing device further includes a second holding member having a second holding surface for holding the substrate. The rotating member supports the second holding member so as to be slidable along a second axis extending in parallel with the first axis. The second holding member slides between the second forward position and the second backward position. In the second retracted position, the second holding surface is closer to the rotating shaft than the second advanced position. The second holding surface of the second holding member is reversed by the rotation of the rotating member. The first forward position and the second forward position are located in opposite directions around the rotation axis.

  According to this configuration, since the reversing device further includes the second holding member, the second substrate sent from the upstream process is second while the substrate reversed by the first holding member is sent to the downstream process. It can be received by a holding member. As a result, the waiting time of the substrate in the inversion process can be shortened.

  (3) Preferably, the 1st holding member goes up and down. For example, the reversing device further includes a support member that can move up and down while rotatably supporting the rotation member. According to this configuration, the substrate can be smoothly received from the upstream process by raising and lowering the first holding member to adjust the height of the first holding surface to the same height as the apparatus in the upstream process. In addition, the substrate can be placed smoothly by adjusting the height of the first holding surface to the same height as the downstream process apparatus.

  (4) Preferably, the rotating member rotates when the first holding member is in the first retracted position. According to this configuration, since the rotating member rotates when the first holding member is located at the first retracted position that is closer to the rotation axis than the first advanced position, the rotation radius of the reversing device can be reduced.

  (5) Preferably, the 1st holding member has an adsorption part which adsorbs a substrate. According to this structure, the 1st holding member can hold | maintain a board | substrate by adsorb | sucking a board | substrate by an adsorption | suction part.

  According to the present invention, the substrate can be inverted in a smaller space.

The perspective view of an inversion apparatus. The side view of an inversion apparatus. The side view of an inversion apparatus. The side view of an inversion apparatus. The side view of an inversion apparatus. The perspective view of the inversion apparatus which concerns on the modification 1. FIG. The side view of the inversion apparatus which concerns on the modification 2. FIG. The perspective view of the inversion apparatus which concerns on the modification 3. FIG.

  Hereinafter, embodiments of a reversing device according to the present invention will be described with reference to the drawings. FIG. 1 is a perspective view of a reversing device 1 according to this embodiment. In FIG. 1, the first holding member 3a is located at the first advance position, and the second holding member 3b is located at the second advance position.

[Reversing device]
As shown in FIG. 1, the reversing device 1 is a device for reversing the front and back of the substrate W, and mainly includes a rotating member 2 and first and second holding members 3 a and 3 b. Details of each member will be described below.

[Rotating member]
The rotating member 2 is configured to slidably support the first and second holding members 3a and 3b and to rotate the substrate W so that the substrate W is reversed. Specifically, the rotation member 2 is rotatably supported by the first and second support members 4a and 4b. In addition, the 1st and 2nd support members 4a and 4b are arrange | positioned at intervals, and the rotation member 2 is arrange | positioned among these. The first and second support members 4 a and 4 b have a bearing recess 41.

  The rotating member 2 includes a rotating portion 21, first and second frame portions 22a and 22b, first and second slide driving portions 23, first to fourth guide rails 24a to 24d, and first to fourth. Rack gears 25a to 25d are provided.

  The rotating part 21 is rotatably supported by the first and second support members 4a and 4b. Specifically, the rotating portion 21 is a frame-shaped member, and the first rotating shaft 211a extends from the first end portion 212a in the longitudinal direction, and the second rotating shaft extends from the second end portion 212b in the longitudinal direction. 211b extends. The first rotating shaft 211a and the second rotating shaft 211b extend in the longitudinal direction of the rotating unit 21 (X direction in FIG. 1). The first rotation shaft 211a is rotatably supported by the bearing recess 41 of the first support member 4a, and the second rotation shaft 211b is rotatably supported by the bearing recess (not shown) of the second support member 4b. Note that the first and second rotating shafts 211 a and 211 b serve as the rotating shaft of the rotating member 2.

  The rotation drive unit 5 is connected to the first rotation shaft 211 a of the rotation unit 21. The rotation drive unit 5 drives the rotation unit 21 to rotate about the first and second rotation shafts 211a and 211b. The rotation drive unit 5 is attached to the first support member 4a. The rotation drive unit 5 can be constituted by, for example, a rotation cylinder using air as a drive source.

  The first and second frame portions 22a and 22b extend in parallel to each other and are perpendicular to the vertical plane (the Y direction in FIG. 1) including the direction in which the rotation axis of the rotating portion 21 extends (the X direction in FIG. 1). ). The first frame portion 22 a is fixed to the first end portion 212 a of the rotating portion 21, and the second frame portion 22 b is fixed to the second end portion 212 b of the rotating portion 21. More specifically, the first frame portion 22a is attached to the rotating portion 21 via the first attachment member 26a, and the second frame portion 22b is attached to the rotating portion 21 via the second attachment member 26b. Yes.

  The first frame portion 22a is formed in a rectangular parallelepiped shape, and a concave portion 221a extending along the longitudinal direction is formed on the surface on the second frame portion 22b side. The second frame portion 22b is formed in a rectangular parallelepiped shape, and a concave portion 221b extending along the longitudinal direction is formed on the surface on the first frame portion 22a side.

  The first slide drive unit (not shown) is installed in the recess 221a of the first frame 22a, and the second slide drive unit 23 is installed in the recess 221b of the second frame 22b. The first slide drive unit is a member for slidingly driving the first holding member 3a, and the second slide drive unit 23 is a member for slidingly driving the second holding member 3b. The 1st and 2nd slide drive part 23 is the mutually same structure, Comprising: For example, it can comprise with a rodless cylinder etc. Referring to the second slide drive unit 23 shown in FIG. 1, the second slide drive unit 23 includes a cylinder tube 231 extending in the longitudinal direction in the recess 221 b of the second frame portion 22 b, and a cylinder tube 231. And a movable portion 232 that moves along. The movable portion of the first slide drive unit is connected to the first holding member 3a and moves integrally with the first holding member 3a. In addition, the movable portion 232 of the second slide driving unit 23 is connected to the second holding member 3b and moves integrally with the second holding member 3b. In addition, the drive source of the movable part 232 can be air, for example.

  The first to fourth guide rails 24a to 24d are rails for slidably guiding the first or second holding members 3a and 3b. The first guide rail 24a is installed on the first surface (upper surface) of the first frame portion 22a, and the second guide rail 24b is installed on the second surface (lower surface) of the first frame portion 22a. The third guide rail 24c is installed on the first surface (upper surface) of the second frame portion 22b, and the fourth guide rail 24d is installed on the second surface (lower surface) of the second frame portion 22b. The first and second guide rails 24a and 24b extend along the longitudinal direction of the first frame portion 22a, and the third and fourth guide rails 24c and 24d extend along the longitudinal direction of the second frame portion 22b. It extends. The second and fourth guide rails 24b and 24d correspond to the first axis of the present invention, and the first and third guide rails 24a and 24c correspond to the second axis of the present invention.

  The first to fourth rack gears 25a to 25d are installed in order to stably slide the first or second holding members 3a and 3b. The first rack gear 25a is installed on the first surface (upper surface) of the first frame portion 22a, and the second rack gear (not shown) is installed on the second surface (lower surface) of the first frame portion 22a. The third rack gear 25c is installed on the first surface (upper surface) of the second frame portion 22b, and the fourth rack gear 25d is installed on the lower surface of the second frame portion 22b. The first rack gear 25a and the second rack gear extend along the longitudinal direction of the first frame portion 22a, and the third and fourth rack gears 25c and 25d extend along the longitudinal direction of the second frame portion 22b. .

[First and second holding members]
The first holding member 3 a is a member for holding the substrate W, and is slidably supported by the rotating member 2. The first holding member 3a slides between a first forward position shown in FIG. 2 and a first backward position shown in FIG. 2 and 3 are side views of the reversing device 1, and some members are not shown for convenience of explanation.

  As shown in FIG. 1, the first holding member 3 a is formed in a comb shape. Specifically, the first holding member 3a includes a plurality of rod-like portions 31a, a connecting portion 32a, two pinion gears 33, and a plurality of suction portions 34a.

  Each rod-shaped part 31a is formed so as to extend in the sliding direction (Y direction in FIG. 1), and is arranged with a space therebetween. The connecting portion 32a extends in the rotational axis direction (X direction in FIG. 1) of the rotating member 2 from the second guide rail 24b to the fourth guide rail 24d. Each rod-shaped part 31a is attached to this connection part 32a in the base end side. Moreover, the connection part 32a has the two slide parts 321a in the both ends in a rotating shaft direction. Two slide portions 321a installed at the end portion (first end portion) on the second guide rail 24b side in the coupling portion 32a are slidably attached to the second guide rail 24b. Further, the two slide portions 321a installed at the end portion (second end portion) on the fourth guide rail 24d side in the connecting portion 32a are slidably attached to the fourth guide rail 24d. Accordingly, the first holding member 3a can slide along the second and fourth guide rails 24b and 24d.

  A pinion gear 33 is rotatably installed at each of both ends of the connecting portion 32a, and each pinion gear 33 is connected via a rotating rod 331. By being connected through the rotating rod 331 in this way, the pinion gears 33 rotate in synchronization with each other. A pinion gear (not shown) installed at the first end of the coupling portion 32a meshes with the second rack gear, and the pinion gear 33 installed at the second end meshes with the fourth rack gear 25d.

  Each suction portion 34a is provided on the first surface (upper surface) of each rod-shaped portion 31a. Each suction part 34a has a suction hole, and holds the substrate W by sucking the substrate W from the suction hole. Each suction portion 34a has a suction surface for sucking the substrate W facing upward, and the first holding surface of the first holding member 3a is formed by the suction surface of each suction portion 34a. Note that the first holding surface faces upward.

  The second holding member 3b is a member for holding the substrate W similarly to the first holding member 3a, and is slidably supported by the rotating member 2. The first holding member 3a slides between a second forward position shown in FIG. 2 and a second backward position shown in FIG. Note that the second forward position is point-symmetric with the first forward position about the rotation axis of the rotating member 2.

  The second holding member 3b has a plurality of rod-like parts 31b, a connecting part 32b, two pinion gears, and a plurality of suction parts 34b. And the connection part 32b has two slide parts 321b at both ends. Since the 2nd holding member 3b comprised in this way is the same structure as the 1st holding member 3a mentioned above, detailed description is not repeated. In the second holding member 3b, the suction surface of each suction part 34b for sucking the substrate W faces downward, and the second holding surface of the second holding member 3b is caused by the suction surface of each suction part 34b. Is formed. Note that the second holding surface faces downward. The connecting portion 32b of the second holding member 3b extends from the first guide rail 24a to the third guide rail 24c. Two slide portions 321b installed at the end of the coupling portion 32b on the first guide rail 24a side are slidably attached to the first guide rail 24a. Further, the two slide portions 321b installed at the end portion of the connecting portion 32b on the third guide rail 24c side are slidably attached to the third guide rail 24c. In this way, the second holding member 3b is supported by the rotating member 2 in a state of point symmetry with the first holding member 3a with the rotation axis of the rotating member 2 as the center.

(Operation of reversing device 1)
Next, the operation of the reversing device 1 configured as described above will be described with reference to the drawings.

  As shown in FIG. 2, first, the reversing device 1 slides the first holding member 3 a to the first forward position and slides the second holding member 3 b to the second forward position. When the first holding member 3a is in the first forward position, the first holding member 3a has the first holding surface located outward from the first and second frame portions 22a and 22b. That is, when the 1st holding member 3a exists in a 1st advance position, the 1st holding surface of the 1st holding member 3a is from the rotating shaft of the rotating member 2 rather than the 1st front-end | tip of 1st and 2nd frame part 22a, 22b. In a remote location. Further, when the second holding member 3b is in the second forward movement position, the second holding member 3b has the second holding surface located outward from the first and second frame portions 22a and 22b. That is, when the second holding member 3b is in the second forward movement position, the second holding surface of the second holding member 3b is closer to the rotating shaft of the rotating member 2 than the second tips of the first and second frame portions 22a and 22b. In a remote location.

  And in the state which has the 1st holding member 3a in a 1st advance position, the 1st holding member 3a receives the board | substrate W from an upstream process. Specifically, the substrate W is sucked and held by the suction portions 34a of the first holding member 3a.

  After the first holding member 3a receives the substrate W, the movable portion of the first slide drive unit moves along the cylinder tube. As a result, the first holding member 3a connected to the movable portion of the first slide driving unit slides along the second and fourth guide rails 24b and 24d and moves to the first retracted position as shown in FIG. To do. The first retracted position is a position where the first holding surface of the first holding member 3a is closer to the first and second rotating shafts 211a and 211b of the rotating unit 21 than the first advanced position. Specifically, when the first holding member 3a is in the first retracted position, the first holding member 3a has the first and second frame portions 22a, 22a, 22b in the longitudinal direction of the first and second frame portions 22a, 22b. 22b.

  Further, when the first holding member 3a moves to the first retracted position, the second holding member 3b moves to the second retracted position. Specifically, when the movable portion 232 of the second slide drive portion 23 moves along the cylinder tube 231, the second holding member 3b moves to the second retracted position as shown in FIG. The second retracted position is a position where the second holding surface of the second holding member 3b is closer to the first and second rotating shafts 211a and 211b of the rotating unit 21 than the second advanced position. Specifically, when the second holding member 3b is in the second retracted position, the second holding member 3b is arranged in the longitudinal direction of the first and second frame portions 22a and 22b. 22b.

  When the first holding member 3a moves to the first retracted position and the second holding member 3b moves to the second retracted position, the rotation driving unit 5 drives the rotation member 2 to rotate. As a result, the rotating member 2 rotates by 180 degrees clockwise or counterclockwise about the first and second rotating shafts 211a and 211b. As a result, as shown in FIG. 4, the first holding member 3a is inverted so that the first holding surface faces downward, and as a result, the front and back of the substrate W held by the first holding member 3a can be inverted. it can. Further, the second holding member 3b is inverted so that the second holding surface faces upward. Since the first and second holding members 3a and 3b are accommodated in the first and second frame portions 22a and 22b in the longitudinal direction, the rotation radius when the rotary member 2 is rotated is the first and second frame members 22a and 22b. It becomes half the length of the two frame portions 22a and 22b.

  Next, by operating the first slide drive unit, as shown in FIG. 5, the first holding member 3a is again moved to the first forward position. Then, the substrate W is transferred to the downstream process. Before the rotating member 2 rotates, the first holding member 3a moves to the upstream process when moved to the first advanced position. However, after the rotating member 2 rotates, the first holding member 3a moves to the first advanced position. If it moves to, it will move to a downstream process. Further, while the first holding member 3a passes the substrate W to the downstream process, the second holding member 3b moves to the second advance position and receives another substrate W 'from the upstream process.

  Then, the second holding member 3b repeats the same operation as that of the first holding member 3a described above, thereby inverting the received substrate W 'and passing it to the downstream process. Note that the rotation direction of the rotating member 2 repeats alternately clockwise and counterclockwise. Thereby, it is possible to prevent the tubes (not shown) connected to the suction portions 34 a and 34 b from being entangled with the rotation shaft of the rotating member 2.

[Feature]
The reversing device 1 according to the present embodiment has the following characteristics.

  (1) Since the first holding member 3a is slidably supported between the first forward position and the first backward position, the substrate W is moved by moving the first holding member 3a forward to the first forward position. The step of holding the first holding member 3a on the first holding surface can be easily performed. Further, by retracting the first holding member 3a to the first retracted position, the turning radius of the reversing device 1 when the rotating member 2 rotates can be reduced. As a result, the substrate W can be turned upside down in a smaller space.

  (2) Since the reversing device 1 further includes the second holding member 3b, another substrate W ′ sent from the upstream process while the substrate W reversed by the first holding member 3a is sent to the downstream process. Can be received by the second holding member 3b. As a result, the waiting time of the substrate W in the inversion process can be shortened.

  (3) Since the rotating member 2 rotates when both the first and second holding members 3a and 3b are in the retracted position, the turning radius in the reversing device 1 can be reduced.

  (4) The first and second holding members 3a and 3b can hold the substrate W by the suction portions 34a and 34b that suck the substrate W.

[Modification]
As mentioned above, although embodiment of this invention was described, this invention is not limited to these, A various change is possible unless it deviates from the meaning of this invention.

Modification 1
The first holding member 3a and the second holding member 3b can be configured to move up and down. Specifically, as shown in FIG. 6, the first and second support members 4 a and 4 b are attached to the respective base members 6 so as to be movable up and down. The first and second support members 4a and 4b move up and down using, for example, a linear motor as a drive source. According to this configuration, the first holding member 3a moves up and down to adjust the height of the apparatus with the upstream process or the downstream process, whereby the substrate W can be smoothly received from the upstream process, and the first holding is performed. The member 3a can smoothly place the substrate in the downstream process.

Modification 2
In the embodiment described above, the reversing device 1 has the two holding members, the first holding member 3a and the second holding member 3b, but is not particularly limited thereto. For example, as shown in FIG. 7, the reversing device 1 includes only the first holding member 3a and does not need to include the second holding member 3b. In this case, the first and third guide rails 24a and 24c, the first and third rack gears 25a and 25c, and the second slide drive unit 23 are not necessary, so that these members can be omitted.

Modification 3
In the said embodiment, although the 1st holding member 3a is formed in the comb shape which consists of several rod-shaped part 31a, it is not limited to this in particular. For example, as shown in FIG. 8, the 1st holding member 3a can use one plate 30a instead of the some rod-shaped part 31a. Each suction part 34a is installed on the first surface (upper surface) of the plate 30a. Similarly, the second holding member 3b can use one plate 30b instead of the plurality of rod-shaped portions 31b.

DESCRIPTION OF SYMBOLS 1 Reverse device 2 Rotating member 3a 1st holding member 3b 2nd holding member 4a 1st support member 4b 2nd support member W board | substrate

Claims (1)

A reversing device for reversing a substrate,
A first holding member having a first holding surface for holding the substrate;
A rotating member that supports the first holding member so as to be slidable along a first axis, and that rotates so as to reverse the front and back of the first holding surface of the first holding member. Sliding between a first forward position and a first retracted position where the first holding surface is closer to the rotating shaft side of the rotating member than the first forward position ;
A reversing device in which a first advance position of the first holding member moves from an upstream process to a downstream process before and after the rotation of the rotating member.