JP6244111B2 - Reversing device - Google Patents

Reversing device Download PDF

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JP6244111B2
JP6244111B2 JP2013117472A JP2013117472A JP6244111B2 JP 6244111 B2 JP6244111 B2 JP 6244111B2 JP 2013117472 A JP2013117472 A JP 2013117472A JP 2013117472 A JP2013117472 A JP 2013117472A JP 6244111 B2 JP6244111 B2 JP 6244111B2
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holding member
holding
substrate
rotating
reversing device
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JP2014235352A (en
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西尾　仁孝
仁孝 西尾
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Mitsuboshi Diamond Industrial Co Ltd
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Priority to TW103111007A priority patent/TWI592377B/en
Priority to CN201410165996.1A priority patent/CN104211293B/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67718—Changing orientation of the substrate, e.g. from a horizontal position to a vertical position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
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  • Microelectronics & Electronic Packaging (AREA)
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  • Computer Hardware Design (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Liquid Crystal (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
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Description

本発明は、基板を反転させる反転装置に関するものである。   The present invention relates to a reversing device for reversing a substrate.

液晶装置は、液晶層を間に介在するように第１基板と第２基板とがシール材によって貼り合わされる貼り合わせ基板によって構成される（例えば特許文献１）。この貼り合わせ基板は、生産性の観点などから一旦大判サイズの状態で作製され、この大判サイズの基板を必要なサイズに分断して複数の貼り合わせ基板を作製することが一般的に行われている。   The liquid crystal device is configured by a bonded substrate in which a first substrate and a second substrate are bonded together with a sealing material so that a liquid crystal layer is interposed (for example, Patent Document 1). This bonded substrate is once manufactured in a large size state from the viewpoint of productivity, etc., and it is generally performed to divide the large size substrate into a necessary size to produce a plurality of bonded substrates. Yes.

この貼り合わせ基板を分断する際、一般的に貼り合わせ基板を表裏反転させる工程が必要となる。この貼り合わせ基板の分断方法の一例について説明すると、まず、第１基板が上側となるように貼り合わせ基板を固定し、第１基板にスクライブ溝を形成する。そして、貼り合わせ基板を表裏反転させて第２基板が上側となるように貼り合わせ基板を固定し、第２基板側から貼り合わせ基板を押圧して撓ませ、第１基板をスクライブ溝に沿って分断する。次に、第２基板が上側になった状態で、貼り合わせ基板の第２基板にスクライブ溝を形成した後、貼り合わせ基板を表裏反転させて第１基板が上側となるように貼り合わせ基板を固定する。そして、第１基板側から貼り合わせ基板を押圧して撓ませ、第２基板をスクライブ溝に沿って分断する。   When dividing this bonded substrate, generally, a step of turning the bonded substrate upside down is required. An example of the method for dividing the bonded substrate will be described. First, the bonded substrate is fixed so that the first substrate is on the upper side, and a scribe groove is formed in the first substrate. Then, the bonded substrate is reversed so that the bonded substrate is fixed so that the second substrate is on the upper side, the bonded substrate is pressed and bent from the second substrate side, and the first substrate is moved along the scribe groove. Divide. Next, after the scribe groove is formed on the second substrate of the bonded substrate with the second substrate on the upper side, the bonded substrate is turned over so that the first substrate is on the upper side. Fix it. Then, the bonded substrate is pressed and bent from the first substrate side, and the second substrate is divided along the scribe groove.

特開２０１２−２０３２３５号公報JP2012-203235A

上述したように、基板を分断する際には、基板を反転させる工程が必要となる。しかし、基板は近年大型化してきているため、基板の反転に大きなスペースが必要となるという問題がある。   As described above, when the substrate is divided, a step of inverting the substrate is required. However, since the size of the substrate has increased in recent years, there is a problem that a large space is required for the inversion of the substrate.

本発明の課題は、より小さなスペースで基板を反転させることにある。   An object of the present invention is to invert a substrate in a smaller space.

（１）本発明のある側面に係る反転装置は、基板を反転させるための装置であって、第１保持部材と回転部材とを備えている。第１保持部材は、基板を保持する第１保持面を有する。回転部材は、第１保持部材を第１軸に沿ってスライド可能に支持するとともに、第１保持部材の第１保持面の表裏を反転させるように回転する。第１保持部材は、第１前進位置と、第１後退位置との間をスライドする。第１後退位置は、第１前進位置よりも第１保持面が回転部材の回転軸側となる。   (1) A reversing device according to an aspect of the present invention is a device for reversing a substrate, and includes a first holding member and a rotating member. The first holding member has a first holding surface that holds the substrate. The rotating member supports the first holding member so as to be slidable along the first axis, and rotates so as to reverse the front and back of the first holding surface of the first holding member. The first holding member slides between the first forward position and the first backward position. In the first retracted position, the first holding surface is closer to the rotating shaft side of the rotating member than the first advanced position.

この構成によれば、第１保持部材が第１前進位置と第１後退位置との間でスライド可能に支持されているため、第１保持部材を第１前進位置まで前進させることで、基板を第１保持部材の第１保持面に保持させる工程を容易に行うことができる。また、第１保持部材を第１後退位置に後退させることで、回転部材が回転する際の反転装置における回転半径を小さくすることができる。この結果、より小さなスペースで基板を表裏反転させることができる。   According to this configuration, since the first holding member is slidably supported between the first forward position and the first backward position, the substrate is moved by moving the first holding member forward to the first forward position. The step of holding the first holding member on the first holding surface can be easily performed. Further, by retracting the first holding member to the first retracted position, the radius of rotation in the reversing device when the rotating member rotates can be reduced. As a result, the substrate can be turned upside down in a smaller space.

（２）好ましくは、反転装置は、基板を保持する第２保持面を有する第２保持部材をさらに備える。回転部材は、第２保持部材を、第１軸と平行に延びる第２軸に沿ってスライド可能に支持する。第２保持部材は、第２前進位置と、第２後退位置との間をスライドする。第２後退位置は、第２前進位置よりも第２保持面が回転軸側となるである。第２保持部材は、回転部材の回転により第２保持面が表裏反転する。第１前進位置と、第２前進位置とは、回転軸を中心に反対方向に位置する。   (2) Preferably, the reversing device further includes a second holding member having a second holding surface for holding the substrate. The rotating member supports the second holding member so as to be slidable along a second axis extending in parallel with the first axis. The second holding member slides between the second forward position and the second backward position. The second retracted position is such that the second holding surface is closer to the rotating shaft than the second advanced position. The second holding surface of the second holding member is reversed by the rotation of the rotating member. The first forward position and the second forward position are located in opposite directions around the rotation axis.

この構成によれば、反転装置が第２保持部材をさらに備えているため、第１保持部材によって反転させた基板を下流工程に送る間に、上流工程から送られてくる別の基板を第２保持部材によって受け取ることができる。この結果、反転工程における基板の待ち時間を短縮化することができる。   According to this configuration, since the reversing device further includes the second holding member, the second substrate sent from the upstream process is second while the substrate reversed by the first holding member is sent to the downstream process. It can be received by a holding member. As a result, the waiting time of the substrate in the inversion process can be shortened.

（３）好ましくは、第１保持部材が昇降する。例えば、反転装置は、回転部材を回転可能に支持するとともに、昇降可能な支持部材をさらに備える。この構成によれば、第１保持部材が昇降して第１保持面の高さを調整して上流工程の装置と同じ高さにすることによって、上流工程から基板をスムーズに受け取ることができる。また、第１保持面の高さを調整して下流工程の装置と同じ高さとすることによって、基板をスムーズに置くことができる。   (3) Preferably, the 1st holding member goes up and down. For example, the reversing device further includes a support member that can move up and down while rotatably supporting the rotation member. According to this configuration, the substrate can be smoothly received from the upstream process by raising and lowering the first holding member to adjust the height of the first holding surface to the same height as the apparatus in the upstream process. In addition, the substrate can be placed smoothly by adjusting the height of the first holding surface to the same height as the downstream process apparatus.

（４）好ましくは、回転部材は、第１保持部材が第１後退位置にあるときに回転する。この構成によれば、第１前進位置よりも回転軸側となる第１後退位置に第１保持部材があるときに回転部材が回転するため、反転装置における回転半径を小さくすることができる。   (4) Preferably, the rotating member rotates when the first holding member is in the first retracted position. According to this configuration, since the rotating member rotates when the first holding member is located at the first retracted position that is closer to the rotation axis than the first advanced position, the rotation radius of the reversing device can be reduced.

（５）好ましくは、第１保持部材は、基板を吸着する吸着部を有する。この構成によれば、第１保持部材は、吸着部によって基板を吸着することによって、基板を保持することができる。   (5) Preferably, the 1st holding member has an adsorption part which adsorbs a substrate. According to this structure, the 1st holding member can hold | maintain a board | substrate by adsorb | sucking a board | substrate by an adsorption | suction part.

本発明によれば、より小さなスペースで基板を反転させることができる   According to the present invention, the substrate can be inverted in a smaller space.

反転装置の斜視図。The perspective view of an inversion apparatus. 反転装置の側面図。The side view of an inversion apparatus. 反転装置の側面図。The side view of an inversion apparatus. 反転装置の側面図。The side view of an inversion apparatus. 反転装置の側面図。The side view of an inversion apparatus. 変形例１に係る反転装置の斜視図。The perspective view of the inversion apparatus which concerns on the modification 1. FIG. 変形例２に係る反転装置の側面図。The side view of the inversion apparatus which concerns on the modification 2. FIG. 変形例３に係る反転装置の斜視図。The perspective view of the inversion apparatus which concerns on the modification 3. FIG.

以下、本発明に係る反転装置の実施形態について図面を参照しつつ説明する。図１は本実施形態に係る反転装置１の斜視図である。なお、図１において、第１保持部材３ａは第１前進位置に位置しており、第２保持部材３ｂは第２前進位置に位置している。   Hereinafter, embodiments of a reversing device according to the present invention will be described with reference to the drawings. FIG. 1 is a perspective view of a reversing device 1 according to this embodiment. In FIG. 1, the first holding member 3a is located at the first advance position, and the second holding member 3b is located at the second advance position.

［反転装置］
図１に示すように、反転装置１は、基板Ｗを表裏反転させるための装置であって、回転部材２と、第１及び第２保持部材３ａ、３ｂと、を主に備えている。以下、各部材の詳細について説明する。 [Reversing device]
As shown in FIG. 1, the reversing device 1 is a device for reversing the front and back of the substrate W, and mainly includes a rotating member 2 and first and second holding members 3 a and 3 b. Details of each member will be described below.

［回転部材］
回転部材２は、第１及び第２保持部材３ａ、３ｂをスライド可能に支持するとともに、基板Ｗを表裏反転させるために回転するように構成されている。具体的には、回転部材２は、第１及び第２支持部材４ａ、４ｂによって回転可能に支持されている。なお、第１及び第２支持部材４ａ、４ｂは、互いに間隔をおいて配置されており、この間に回転部材２が配置されている。第１及び第２支持部材４ａ、４ｂは、軸受凹部４１を有している。 [Rotating member]
The rotating member 2 is configured to slidably support the first and second holding members 3a and 3b and to rotate the substrate W so that the substrate W is reversed. Specifically, the rotation member 2 is rotatably supported by the first and second support members 4a and 4b. In addition, the 1st and 2nd support members 4a and 4b are arrange | positioned at intervals, and the rotation member 2 is arrange | positioned among these. The first and second support members 4 a and 4 b have a bearing recess 41.

回転部材２は、回転部２１と、第１及び第２フレーム部２２ａ、２２ｂと、第１及び第２スライド駆動部２３と、第１〜第４ガイドレール２４ａ〜２４ｄと、第１〜第４ラックギア２５ａ〜２５ｄを備えている。   The rotating member 2 includes a rotating portion 21, first and second frame portions 22a and 22b, first and second slide driving portions 23, first to fourth guide rails 24a to 24d, and first to fourth. Rack gears 25a to 25d are provided.

回転部２１は、第１及び第２支持部材４ａ、４ｂに回転可能に支持されている。具体的には、回転部２１は、枠状の部材であって、長手方向の第１端部２１２ａから第１回転軸２１１ａが延びており、長手方向の第２端部２１２ｂから第２回転軸２１１ｂが延びている。なお、第１回転軸２１１ａ及び第２回転軸２１１ｂは、回転部２１の長手方向（図１のＸ方向）に延びている。第１回転軸２１１ａは第１支持部材４ａの軸受凹部４１に回転可能に支持され、第２回転軸２１１ｂは第２支持部材４ｂの軸受凹部（図示省略）に回転可能に支持されている。なお、この第１及び第２回転軸２１１ａ、２１１ｂが、回転部材２の回転軸となる。   The rotating part 21 is rotatably supported by the first and second support members 4a and 4b. Specifically, the rotating portion 21 is a frame-shaped member, and the first rotating shaft 211a extends from the first end portion 212a in the longitudinal direction, and the second rotating shaft extends from the second end portion 212b in the longitudinal direction. 211b extends. The first rotating shaft 211a and the second rotating shaft 211b extend in the longitudinal direction of the rotating unit 21 (X direction in FIG. 1). The first rotation shaft 211a is rotatably supported by the bearing recess 41 of the first support member 4a, and the second rotation shaft 211b is rotatably supported by the bearing recess (not shown) of the second support member 4b. Note that the first and second rotating shafts 211 a and 211 b serve as the rotating shaft of the rotating member 2.

この回転部２１の第１回転軸２１１ａには、回転駆動部５が連結されている。回転駆動部５は、回転部２１を第１及び第２回転軸２１１ａ、２１１ｂを中心に回転駆動させる。この回転駆動部５は、第１支持部材４ａに取り付けられている。回転駆動部５は、例えばエアーを駆動源とする回転シリンダによって構成することができる。   The rotation drive unit 5 is connected to the first rotation shaft 211 a of the rotation unit 21. The rotation drive unit 5 drives the rotation unit 21 to rotate about the first and second rotation shafts 211a and 211b. The rotation drive unit 5 is attached to the first support member 4a. The rotation drive unit 5 can be constituted by, for example, a rotation cylinder using air as a drive source.

第１及び第２フレーム部２２ａ、２２ｂは、互いに平行に延びるとともに、回転部２１の回転軸が延びる方向（図１のＸ方向）を含む鉛直面に対して垂直な方向（図１のＹ方向）に延びている。第１フレーム部２２ａは回転部２１の第１端部２１２ａに固定されており、第２フレーム部２２ｂは回転部２１の第２端部２１２ｂに固定されている。より具体的には、第１フレーム部２２ａは第１取付部材２６ａを介して回転部２１に取り付けられており、第２フレーム部２２ｂは第２取付部材２６ｂを介して回転部２１に取り付けられている。   The first and second frame portions 22a and 22b extend in parallel to each other and are perpendicular to the vertical plane (the Y direction in FIG. 1) including the direction in which the rotation axis of the rotating portion 21 extends (the X direction in FIG. 1). ). The first frame portion 22 a is fixed to the first end portion 212 a of the rotating portion 21, and the second frame portion 22 b is fixed to the second end portion 212 b of the rotating portion 21. More specifically, the first frame portion 22a is attached to the rotating portion 21 via the first attachment member 26a, and the second frame portion 22b is attached to the rotating portion 21 via the second attachment member 26b. Yes.

第１フレーム部２２ａは直方体状に形成されており、第２フレーム部２２ｂ側の面において、長手方向に沿って延びる凹部２２１ａが形成されている。また、第２フレーム部２２ｂは、直方体状に形成されており、第１フレーム部２２ａ側の面において、長手方向に沿って延びる凹部２２１ｂが形成されている。   The first frame portion 22a is formed in a rectangular parallelepiped shape, and a concave portion 221a extending along the longitudinal direction is formed on the surface on the second frame portion 22b side. The second frame portion 22b is formed in a rectangular parallelepiped shape, and a concave portion 221b extending along the longitudinal direction is formed on the surface on the first frame portion 22a side.

第１スライド駆動部（図示省略）は、第１フレーム２２ａの凹部２２１ａ内に設置されており、第２スライド駆動部２３は、第２フレーム２２ｂの凹部２２１ｂ内に設置されている。第１スライド駆動部は第１保持部材３ａをスライド駆動するための部材であり、第２スライド駆動部２３は第２保持部材３ｂをスライド駆動するための部材である。第１及び第２スライド駆動部２３は、互いに同じ構成であって、例えばロッドレスシリンダなどによって構成することができる。図１に示される第２スライド駆動部２３を用いて説明すると、第２スライド駆動部２３は、第２フレーム部２２ｂの凹部２２１ｂ内を長手方向に沿って延びるシリンダチューブ２３１と、シリンダチューブ２３１に沿って移動する可動部２３２とを有している。第１スライド駆動部の可動部は、第１保持部材３ａと連結しており、第１保持部材３ａと一体的に移動する。また、第２スライド駆動部２３の可動部２３２は、第２保持部材３ｂと連結しており、第２保持部材３ｂと一体的に移動する。なお、可動部２３２の駆動源は例えばエアーとすることができる。   The first slide drive unit (not shown) is installed in the recess 221a of the first frame 22a, and the second slide drive unit 23 is installed in the recess 221b of the second frame 22b. The first slide drive unit is a member for slidingly driving the first holding member 3a, and the second slide drive unit 23 is a member for slidingly driving the second holding member 3b. The 1st and 2nd slide drive part 23 is the mutually same structure, Comprising: For example, it can comprise with a rodless cylinder etc. Referring to the second slide drive unit 23 shown in FIG. 1, the second slide drive unit 23 includes a cylinder tube 231 extending in the longitudinal direction in the recess 221 b of the second frame portion 22 b, and a cylinder tube 231. And a movable portion 232 that moves along. The movable portion of the first slide drive unit is connected to the first holding member 3a and moves integrally with the first holding member 3a. In addition, the movable portion 232 of the second slide driving unit 23 is connected to the second holding member 3b and moves integrally with the second holding member 3b. In addition, the drive source of the movable part 232 can be air, for example.

第１〜第４ガイドレール２４ａ〜２４ｄは、第１又は第２保持部材３ａ、３ｂをスライド可能に案内するためのレールである。第１ガイドレール２４ａは第１フレーム部２２ａの第１面（上面）に設置されており、第２ガイドレール２４ｂは第１フレーム部２２ａの第２面（下面）に設置されている。また、第３ガイドレール２４ｃは第２フレーム部２２ｂの第１面（上面）に設置されており、第４ガイドレール２４ｄは第２フレーム部２２ｂの第２面（下面）に設置されている。第１及び第２ガイドレール２４ａ、２４ｂは、第１フレーム部２２ａの長手方向に沿って延びており、第３及び第４ガイドレール２４ｃ、２４ｄは、第２フレーム部２２ｂの長手方向に沿って延びている。なお、第２及び第４ガイドレール２４ｂ、２４ｄは本発明の第１軸に相当し、第１及び第３ガイドレール２４ａ、２４ｃは本発明の第２軸に相当する。   The first to fourth guide rails 24a to 24d are rails for slidably guiding the first or second holding members 3a and 3b. The first guide rail 24a is installed on the first surface (upper surface) of the first frame portion 22a, and the second guide rail 24b is installed on the second surface (lower surface) of the first frame portion 22a. The third guide rail 24c is installed on the first surface (upper surface) of the second frame portion 22b, and the fourth guide rail 24d is installed on the second surface (lower surface) of the second frame portion 22b. The first and second guide rails 24a and 24b extend along the longitudinal direction of the first frame portion 22a, and the third and fourth guide rails 24c and 24d extend along the longitudinal direction of the second frame portion 22b. It extends. The second and fourth guide rails 24b and 24d correspond to the first axis of the present invention, and the first and third guide rails 24a and 24c correspond to the second axis of the present invention.

第１〜第４ラックギア２５ａ〜２５ｄは、第１又は第２保持部材３ａ、３ｂを安定してスライドさせるために設置されている。第１ラックギア２５ａは第１フレーム部２２ａの第１面（上面）に設置されており、第２ラックギア（図示省略）は第１フレーム部２２ａの第２面（下面）に設置されている。また、第３ラックギア２５ｃは第２フレーム部２２ｂの第１面（上面）に設置されており、第４ラックギア２５ｄは第２フレーム部２２ｂの下面に設置されている。第１ラックギア２５ａ及び第２ラックギアは、第１フレーム部２２ａの長手方向に沿って延びており、第３及び第４ラックギア２５ｃ、２５ｄは、第２フレーム部２２ｂの長手方向に沿って延びている。   The first to fourth rack gears 25a to 25d are installed in order to stably slide the first or second holding members 3a and 3b. The first rack gear 25a is installed on the first surface (upper surface) of the first frame portion 22a, and the second rack gear (not shown) is installed on the second surface (lower surface) of the first frame portion 22a. The third rack gear 25c is installed on the first surface (upper surface) of the second frame portion 22b, and the fourth rack gear 25d is installed on the lower surface of the second frame portion 22b. The first rack gear 25a and the second rack gear extend along the longitudinal direction of the first frame portion 22a, and the third and fourth rack gears 25c and 25d extend along the longitudinal direction of the second frame portion 22b. .

［第１及び第２保持部材］
第１保持部材３ａは、基板Ｗを保持するための部材であって、回転部材２によってスライド可能に支持されている。この第１保持部材３ａは、図２に示す第１前進位置と、図３に示す第１後退位置との間でスライドする。なお、図２及び図３は反転装置１の側面図であり、説明の便宜上、一部の部材の記載を省略している。 [First and second holding members]
The first holding member 3 a is a member for holding the substrate W, and is slidably supported by the rotating member 2. The first holding member 3a slides between a first forward position shown in FIG. 2 and a first backward position shown in FIG. 2 and 3 are side views of the reversing device 1, and some members are not shown for convenience of explanation.

図１に示すように、第１保持部材３ａは櫛状に形成されている。具体的には、第１保持部材３ａは、複数の棒状部３１ａ、連結部３２ａ、２つのピニオンギア３３、及び複数の吸引部３４ａを有している。   As shown in FIG. 1, the first holding member 3 a is formed in a comb shape. Specifically, the first holding member 3a includes a plurality of rod-like portions 31a, a connecting portion 32a, two pinion gears 33, and a plurality of suction portions 34a.

各棒状部３１ａは、スライド方向（図１のＹ方向）に延びるように形成されており、互いに間隔をあけて配置されている。連結部３２ａは、第２ガイドレール２４ｂから第４ガイドレール２４ｄに亘って、回転部材２の回転軸方向（図１のＸ方向）に延びている。この連結部３２ａに各棒状部３１ａが基端側において取り付けられている。また、連結部３２ａは、回転軸方向における両端部に、スライド部３２１ａを２つずつ有している。連結部３２ａにおける第２ガイドレール２４ｂ側の端部（第１端部）に設置された２つのスライド部３２１ａは、第２ガイドレール２４ｂにスライド可能に取り付けられている。また、連結部３２ａにおける第４ガイドレール２４ｄ側の端部（第２端部）に設置された２つのスライド部３２１ａは、第４ガイドレール２４ｄにスライド可能に取り付けられている。これによって、第１保持部材３ａは、第２及び第４ガイドレール２４ｂ、２４ｄに沿ってスライド可能となっている。   Each rod-shaped part 31a is formed so as to extend in the sliding direction (Y direction in FIG. 1), and is arranged with a space therebetween. The connecting portion 32a extends in the rotational axis direction (X direction in FIG. 1) of the rotating member 2 from the second guide rail 24b to the fourth guide rail 24d. Each rod-shaped part 31a is attached to this connection part 32a in the base end side. Moreover, the connection part 32a has the two slide parts 321a in the both ends in a rotating shaft direction. Two slide portions 321a installed at the end portion (first end portion) on the second guide rail 24b side in the coupling portion 32a are slidably attached to the second guide rail 24b. Further, the two slide portions 321a installed at the end portion (second end portion) on the fourth guide rail 24d side in the connecting portion 32a are slidably attached to the fourth guide rail 24d. Accordingly, the first holding member 3a can slide along the second and fourth guide rails 24b and 24d.

連結部３２ａの両端部のそれぞれには、ピニオンギア３３が１つずつ回転可能に設置されており、この各ピニオンギア３３は、回転ロッド３３１を介して連結されている。このように回転ロッド３３１を介して連結されることにより、各ピニオンギア３３は互いに同期して回転する。連結部３２ａの第１端部に設置されたピニオンギア（図示省略）は、第２ラックギアに噛み合っており、第２端部に設置されたピニオンギア３３は第４ラックギア２５ｄと噛み合っている。   A pinion gear 33 is rotatably installed at each of both ends of the connecting portion 32a, and each pinion gear 33 is connected via a rotating rod 331. By being connected through the rotating rod 331 in this way, the pinion gears 33 rotate in synchronization with each other. A pinion gear (not shown) installed at the first end of the coupling portion 32a meshes with the second rack gear, and the pinion gear 33 installed at the second end meshes with the fourth rack gear 25d.

各吸引部３４ａは、各棒状部３１ａの第１面（上面）に設けられている。各吸引部３４ａは、吸引孔を有しており、この吸引孔から基板Ｗを吸引することによって基板Ｗを保持する。各吸引部３４ａは、基板Ｗを吸引するための吸引面が上方を向いており、この各吸引部３４ａの吸引面によって第１保持部材３ａの第１保持面が形成されている。なお、第１保持面は上方を向いている。   Each suction portion 34a is provided on the first surface (upper surface) of each rod-shaped portion 31a. Each suction part 34a has a suction hole, and holds the substrate W by sucking the substrate W from the suction hole. Each suction portion 34a has a suction surface for sucking the substrate W facing upward, and the first holding surface of the first holding member 3a is formed by the suction surface of each suction portion 34a. Note that the first holding surface faces upward.

第２保持部材３ｂは、第１保持部材３ａと同様に基板Ｗを保持するための部材であって、回転部材２によってスライド可能に支持されている。この第１保持部材３ａは、図２に示す第２前進位置と、図３に示す第２後退位置との間でスライドする。なお、第２前進位置は、回転部材２の回転軸を中心にして、第１前進位置と点対称となっている。   The second holding member 3b is a member for holding the substrate W similarly to the first holding member 3a, and is slidably supported by the rotating member 2. The first holding member 3a slides between a second forward position shown in FIG. 2 and a second backward position shown in FIG. Note that the second forward position is point-symmetric with the first forward position about the rotation axis of the rotating member 2.

第２保持部材３ｂは、複数の棒状部３１ｂ、連結部３２ｂ、２つのピニオンギア、及び複数の吸引部３４ｂを有している。そして、連結部３２ｂは、両端部にスライド部３２１ｂを２つずつ有している。このように構成された第２保持部材３ｂは、上述した第１保持部材３ａと同じ構成であるため、詳細な説明は繰り返さない。なお、第２保持部材３ｂは、基板Ｗを吸引するための各吸引部３４ｂの吸引面が下方を向いており、この各吸引部３４ｂの吸引面によって第２保持部材３ｂの第２保持面が形成されている。なお、第２保持面は下方を向いている。また、第２保持部材３ｂの連結部３２ｂは、第１ガイドレール２４ａから第３ガイドレール２４ｃに亘って延びている。連結部３２ｂにおける第１ガイドレール２４ａ側の端部に設置された２つのスライド部３２１ｂは、第１ガイドレール２４ａにスライド可能に取り付けられている。また、連結部３２ｂにおける第３ガイドレール２４ｃ側の端部に設置された２つのスライド部３２１ｂは、第３ガイドレール２４ｃにスライド可能に取り付けられている。このように、第２保持部材３ｂは、回転部材２の回転軸を中心にして第１保持部材３ａと点対称の状態で回転部材２に支持されている。   The second holding member 3b has a plurality of rod-like parts 31b, a connecting part 32b, two pinion gears, and a plurality of suction parts 34b. And the connection part 32b has two slide parts 321b at both ends. Since the 2nd holding member 3b comprised in this way is the same structure as the 1st holding member 3a mentioned above, detailed description is not repeated. In the second holding member 3b, the suction surface of each suction part 34b for sucking the substrate W faces downward, and the second holding surface of the second holding member 3b is caused by the suction surface of each suction part 34b. Is formed. Note that the second holding surface faces downward. The connecting portion 32b of the second holding member 3b extends from the first guide rail 24a to the third guide rail 24c. Two slide portions 321b installed at the end of the coupling portion 32b on the first guide rail 24a side are slidably attached to the first guide rail 24a. Further, the two slide portions 321b installed at the end portion of the connecting portion 32b on the third guide rail 24c side are slidably attached to the third guide rail 24c. In this way, the second holding member 3b is supported by the rotating member 2 in a state of point symmetry with the first holding member 3a with the rotation axis of the rotating member 2 as the center.

（反転装置１の動作）
次に、上述したように構成された反転装置１の動作について図面を参照しつつ説明する。 (Operation of reversing device 1)
Next, the operation of the reversing device 1 configured as described above will be described with reference to the drawings.

図２に示すように、まず、反転装置１は、第１保持部材３ａを第１前進位置にスライドさせるとともに、第２保持部材３ｂを第２前進位置にスライドさせる。第１保持部材３ａが第１前進位置にあるとき、第１保持部材３ａは、第１保持面が第１及び第２フレーム部２２ａ、２２ｂよりも外方に位置している。すなわち、第１保持部材３ａが第１前進位置にあるとき、第１保持部材３ａの第１保持面は第１及び第２フレーム部２２ａ、２２ｂの第１先端よりも回転部材２の回転軸から離れた位置にある。また、第２保持部材３ｂが第２前進位置にあるとき、第２保持部材３ｂは、第２保持面が第１及び第２フレーム部２２ａ、２２ｂよりも外方に位置している。すなわち、第２保持部材３ｂが第２前進位置にあるとき、第２保持部材３ｂの第２保持面は第１及び第２フレーム部２２ａ、２２ｂの第２先端よりも回転部材２の回転軸から離れた位置にある。   As shown in FIG. 2, first, the reversing device 1 slides the first holding member 3 a to the first forward position and slides the second holding member 3 b to the second forward position. When the first holding member 3a is in the first forward position, the first holding member 3a has the first holding surface located outward from the first and second frame portions 22a and 22b. That is, when the 1st holding member 3a exists in a 1st advance position, the 1st holding surface of the 1st holding member 3a is from the rotating shaft of the rotating member 2 rather than the 1st front-end | tip of 1st and 2nd frame part 22a, 22b. In a remote location. Further, when the second holding member 3b is in the second forward movement position, the second holding member 3b has the second holding surface located outward from the first and second frame portions 22a and 22b. That is, when the second holding member 3b is in the second forward movement position, the second holding surface of the second holding member 3b is closer to the rotating shaft of the rotating member 2 than the second tips of the first and second frame portions 22a and 22b. In a remote location.

そして、第１保持部材３ａが第１前進位置にある状態において、第１保持部材３ａは上流工程から基板Ｗを受け取る。具体的には、第１保持部材３ａの各吸引部３４ａによって基板Ｗを吸引して保持する。   And in the state which has the 1st holding member 3a in a 1st advance position, the 1st holding member 3a receives the board | substrate W from an upstream process. Specifically, the substrate W is sucked and held by the suction portions 34a of the first holding member 3a.

第１保持部材３ａが基板Ｗを受け取った後、第１スライド駆動部の可動部がシリンダチューブに沿って移動する。これにより、第１スライド駆動部の可動部に連結された第１保持部材３ａは、第２及び第４ガイドレール２４ｂ、２４ｄに沿ってスライドし、図３に示すように第１後退位置まで移動する。なお、第１後退位置とは、第１前進位置よりも第１保持部材３ａの第１保持面が回転部２１の第１及び第２回転軸２１１ａ、２１１ｂ側となる位置である。具体的には、第１保持部材３ａが第１後退位置にあるとき、第１保持部材３ａは、第１及び第２フレーム部２２ａ、２２ｂの長手方向において、第１及び第２フレーム部２２ａ、２２ｂ内に収まる。   After the first holding member 3a receives the substrate W, the movable portion of the first slide drive unit moves along the cylinder tube. As a result, the first holding member 3a connected to the movable portion of the first slide driving unit slides along the second and fourth guide rails 24b and 24d and moves to the first retracted position as shown in FIG. To do. The first retracted position is a position where the first holding surface of the first holding member 3a is closer to the first and second rotating shafts 211a and 211b of the rotating unit 21 than the first advanced position. Specifically, when the first holding member 3a is in the first retracted position, the first holding member 3a has the first and second frame portions 22a, 22a, 22b in the longitudinal direction of the first and second frame portions 22a, 22b. 22b.

また、第１保持部材３ａが第１後退位置まで移動する際、第２保持部材３ｂは第２後退位置まで移動する。具体的には、第２スライド駆動部２３の可動部２３２がシリンダチューブ２３１に沿って移動することによって、図３に示すように第２保持部材３ｂが第２後退位置まで移動する。なお、第２後退位置とは、第２前進位置よりも第２保持部材３ｂの第２保持面が回転部２１の第１及び第２回転軸２１１ａ、２１１ｂ側となる位置である。具体的には、第２保持部材３ｂが第２後退位置にあるとき、第２保持部材３ｂは、第１及び第２フレーム部２２ａ、２２ｂの長手方向において、第１及び第２フレーム部２２ａ、２２ｂ内に収まる。   Further, when the first holding member 3a moves to the first retracted position, the second holding member 3b moves to the second retracted position. Specifically, when the movable portion 232 of the second slide drive portion 23 moves along the cylinder tube 231, the second holding member 3b moves to the second retracted position as shown in FIG. The second retracted position is a position where the second holding surface of the second holding member 3b is closer to the first and second rotating shafts 211a and 211b of the rotating unit 21 than the second advanced position. Specifically, when the second holding member 3b is in the second retracted position, the second holding member 3b is arranged in the longitudinal direction of the first and second frame portions 22a and 22b. 22b.

第１保持部材３ａが第１後退位置まで移動し、第２保持部材３ｂが第２後退位置まで移動すると、回転駆動部５が回転部材２を回転駆動する。これによって、回転部材２が、第１及び第２回転軸２１１ａ、２１１ｂを中心に時計回り又は反時計回りに１８０度だけ回転する。この結果、図４に示すように、第１保持部材３ａは第１保持面が下方を向くように反転し、この結果、第１保持部材３ａに保持された基板Ｗの表裏を反転させることができる。また、第２保持部材３ｂは第２保持面が上方を向くように反転する。なお、第１及び第２保持部材３ａ、３ｂは長手方向において第１及び第２フレーム部２２ａ、２２ｂ内に収まっているため、回転部材２を回転させたときの回転半径は、第１及び第２フレーム部２２ａ、２２ｂの長さの半分となる。   When the first holding member 3a moves to the first retracted position and the second holding member 3b moves to the second retracted position, the rotation driving unit 5 drives the rotation member 2 to rotate. As a result, the rotating member 2 rotates by 180 degrees clockwise or counterclockwise about the first and second rotating shafts 211a and 211b. As a result, as shown in FIG. 4, the first holding member 3a is inverted so that the first holding surface faces downward, and as a result, the front and back of the substrate W held by the first holding member 3a can be inverted. it can. Further, the second holding member 3b is inverted so that the second holding surface faces upward. Since the first and second holding members 3a and 3b are accommodated in the first and second frame portions 22a and 22b in the longitudinal direction, the rotation radius when the rotary member 2 is rotated is the first and second frame members 22a and 22b. It becomes half the length of the two frame portions 22a and 22b.

次に、第１スライド駆動部を作動することによって、図５に示すように、第１保持部材３ａは、再度、第１前進位置に移動する。そして、下流工程に基板Ｗを渡す。なお、回転部材２が回転する前では、第１保持部材３ａは第１前進位置に移動すると上流工程へと移動するが、回転部材２が回転した後では第１保持部材３ａは第１前進位置に移動すると下流工程へと移動する。また、第１保持部材３ａが下流工程に基板Ｗを渡している間、第２保持部材３ｂは第２前進位置に移動して上流工程から別の基板Ｗ’を受け取る。   Next, by operating the first slide drive unit, as shown in FIG. 5, the first holding member 3a is again moved to the first forward position. Then, the substrate W is transferred to the downstream process. Before the rotating member 2 rotates, the first holding member 3a moves to the upstream process when moved to the first advanced position. However, after the rotating member 2 rotates, the first holding member 3a moves to the first advanced position. If it moves to, it will move to a downstream process. Further, while the first holding member 3a passes the substrate W to the downstream process, the second holding member 3b moves to the second advance position and receives another substrate W 'from the upstream process.

そして、第２保持部材３ｂは上述した第１保持部材３ａの動作と同様の動作を繰り返すことで、その受け取った基板Ｗ’を反転させて下流工程に渡す。なお、回転部材２の回転方向は、時計回りと反時計回りとを交互に繰り返す。これによって、各吸引部３４ａ、３４ｂに接続されるチューブ（図示省略）などが回転部材２の回転軸に絡まることを防止できる。   Then, the second holding member 3b repeats the same operation as that of the first holding member 3a described above, thereby inverting the received substrate W 'and passing it to the downstream process. Note that the rotation direction of the rotating member 2 repeats alternately clockwise and counterclockwise. Thereby, it is possible to prevent the tubes (not shown) connected to the suction portions 34 a and 34 b from being entangled with the rotation shaft of the rotating member 2.

［特徴］
本実施形態に係る反転装置１は、次の特徴を有する。 [Feature]
The reversing device 1 according to the present embodiment has the following characteristics.

（１）第１保持部材３ａが第１前進位置と第１後退位置との間でスライド可能に支持されているため、第１保持部材３ａを第１前進位置まで前進させることで、基板Ｗを第１保持部材３ａの第１保持面に保持させる工程を容易に行うことができる。また、第１保持部材３ａを第１後退位置に後退させることで、回転部材２が回転する際の反転装置１における回転半径を小さくすることができる。この結果、より小さなスペースで基板Ｗを表裏反転させることができる。   (1) Since the first holding member 3a is slidably supported between the first forward position and the first backward position, the substrate W is moved by moving the first holding member 3a forward to the first forward position. The step of holding the first holding member 3a on the first holding surface can be easily performed. Further, by retracting the first holding member 3a to the first retracted position, the turning radius of the reversing device 1 when the rotating member 2 rotates can be reduced. As a result, the substrate W can be turned upside down in a smaller space.

（２）反転装置１が第２保持部材３ｂをさらに備えているため、第１保持部材３ａによって反転させた基板Ｗを下流工程に送る間に、上流工程から送られてくる別の基板Ｗ’を第２保持部材３ｂによって受け取ることができる。この結果、反転工程における基板Ｗの待ち時間を短縮化することができる。   (2) Since the reversing device 1 further includes the second holding member 3b, another substrate W ′ sent from the upstream process while the substrate W reversed by the first holding member 3a is sent to the downstream process. Can be received by the second holding member 3b. As a result, the waiting time of the substrate W in the inversion process can be shortened.

（３）第１及び第２保持部材３ａ、３ｂの両方が、後退位置にあるとき回転部材２が回転するため、反転装置１における回転半径を小さくすることができる。   (3) Since the rotating member 2 rotates when both the first and second holding members 3a and 3b are in the retracted position, the turning radius in the reversing device 1 can be reduced.

（４）第１及び第２保持部材３ａ、３ｂは、基板Ｗを吸着する吸着部３４ａ、３４ｂによって基板Ｗを保持することができる。   (4) The first and second holding members 3a and 3b can hold the substrate W by the suction portions 34a and 34b that suck the substrate W.

［変形例］
以上、本発明の実施形態について説明したが、本発明はこれらに限定されるものではなく、本発明の趣旨を逸脱しない限りにおいて種々の変更が可能である。 [Modification]
As mentioned above, although embodiment of this invention was described, this invention is not limited to these, A various change is possible unless it deviates from the meaning of this invention.

変形例１
第１保持部材３ａ及び第２保持部材３ｂが昇降するような構成とすることができる。具体的には、図６に示すように、第１及び第２支持部材４ａ、４ｂが各ベース部材６に対して昇降可能に取り付けられている。第１及び第２支持部材４ａ、４ｂは、例えばリニアモータを駆動源として昇降する。この構成によれば、第１保持部材３ａが昇降して上流工程又は下流工程の装置との高さを調整することによって、上流工程から基板Ｗをスムーズに受け取ることができ、また、第１保持部材３ａが下流工程に基板をスムーズに置くことができる。 Modification 1
The first holding member 3a and the second holding member 3b can be configured to move up and down. Specifically, as shown in FIG. 6, the first and second support members 4 a and 4 b are attached to the respective base members 6 so as to be movable up and down. The first and second support members 4a and 4b move up and down using, for example, a linear motor as a drive source. According to this configuration, the first holding member 3a moves up and down to adjust the height of the apparatus with the upstream process or the downstream process, whereby the substrate W can be smoothly received from the upstream process, and the first holding is performed. The member 3a can smoothly place the substrate in the downstream process.

変形例２
上記実施形態では、反転装置１は、第１保持部材３ａと第２保持部材３ｂとの２つの保持部材を有しているが、特にこれに限定されない。例えば、反転装置１は、図７に示すように、第１保持部材３ａのみを有しており、第２保持部材３ｂを有していなくてもよい。この場合、第１及び第３ガイドレール２４ａ、２４ｃ、第１及び第３ラックギア２５ａ、２５ｃ、並びに第２スライド駆動部２３は不要となるため、これら各部材を省略することができる。 Modification 2
In the embodiment described above, the reversing device 1 has the two holding members, the first holding member 3a and the second holding member 3b, but is not particularly limited thereto. For example, as shown in FIG. 7, the reversing device 1 includes only the first holding member 3a and does not need to include the second holding member 3b. In this case, the first and third guide rails 24a and 24c, the first and third rack gears 25a and 25c, and the second slide drive unit 23 are not necessary, so that these members can be omitted.

変形例３
上記実施形態では、第１保持部材３ａは、複数の棒状部３１ａからなる櫛状に形成されているが、特にこれに限定されない。例えば、図８に示すように、第１保持部材３ａは、複数の棒状部３１ａの代わりに１枚のプレート３０ａを用いることができる。各吸引部３４ａはプレート３０ａの第１面（上面）に設置されている。第２保持部材３ｂも同様に、複数の棒状部３１ｂの代わりに１枚のプレート３０ｂを用いることができる。 Modification 3
In the said embodiment, although the 1st holding member 3a is formed in the comb shape which consists of several rod-shaped part 31a, it is not limited to this in particular. For example, as shown in FIG. 8, the 1st holding member 3a can use one plate 30a instead of the some rod-shaped part 31a. Each suction part 34a is installed on the first surface (upper surface) of the plate 30a. Similarly, the second holding member 3b can use one plate 30b instead of the plurality of rod-shaped portions 31b.

１ 反転装置
２ 回転部材
３ａ 第１保持部材
３ｂ 第２保持部材
４ａ 第１支持部材
４ｂ 第２支持部材
Ｗ 基板 DESCRIPTION OF SYMBOLS 1 Reverse device 2 Rotating member 3a 1st holding member 3b 2nd holding member 4a 1st support member 4b 2nd support member W board | substrate

Claims (5)

基板を反転させるための反転装置であって、
前記基板を保持する第１保持面を有する第１保持部材と、
前記第１保持部材を第１軸に沿ってスライド可能に支持するとともに、前記第１保持部材の第１保持面の表裏を反転させるように回転する回転部材と、を備え
前記第１保持部材は、第１前進位置と、前記第１前進位置よりも前記第１保持面が前記回転部材の回転軸側となる第１後退位置との間をスライドし、
前記基板を保持する第２保持面を有する第２保持部材をさらに備え、
前記回転部材は、前記第２保持部材を、前記第１軸と平行に延びる第２軸に沿ってスライド可能に支持し、
前記第２保持部材は、第２前進位置と、前記第２前進位置よりも前記第２保持面が前記回転軸側となる第２後退位置との間をスライドするとともに、前記回転部材の回転により前記第２保持面が表裏反転し、
前記第１前進位置と、前記第２前進位置とは、前記回転軸を中心に反対方向に位置する、反転装置。 A reversing device for reversing a substrate,
A first holding member having a first holding surface for holding the substrate;
A rotating member that supports the first holding member so as to be slidable along a first axis, and that rotates so as to reverse the front and back of the first holding surface of the first holding member. Sliding between a first forward position and a first retracted position where the first holding surface is closer to the rotating shaft side of the rotating member than the first forward position ;
A second holding member having a second holding surface for holding the substrate;
The rotating member supports the second holding member so as to be slidable along a second axis extending in parallel with the first axis,
The second holding member slides between a second forward position and a second backward position where the second holding surface is closer to the rotary shaft than the second forward position, and the rotation of the rotary member The second holding surface is reversed,
The reversing device, wherein the first forward position and the second forward position are located in opposite directions around the rotation axis. 前記第１保持部材が昇降する、請求項１に記載の反転装置。The reversing device according to claim 1, wherein the first holding member moves up and down. 前記回転部材を回転可能に支持するとともに、昇降可能な支持部材をさらに備える、請求項１又は２に記載の反転装置。The reversing device according to claim 1, further comprising a support member capable of moving up and down while rotatably supporting the rotating member. 前記回転部材は、前記第１保持部材が前記第１後退位置にあるときに回転する、請求項１から３のいずれかに記載の反転装置。The reversing device according to any one of claims 1 to 3, wherein the rotating member rotates when the first holding member is in the first retracted position. 前記第１保持部材は、前記基板を吸引する吸引部を有する、請求項１から４のいずれかに記載の反転装置。The reversing device according to claim 1, wherein the first holding member has a suction unit that sucks the substrate.

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