JP2017142154A - センサ - Google Patents
センサ Download PDFInfo
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- JP2017142154A JP2017142154A JP2016023434A JP2016023434A JP2017142154A JP 2017142154 A JP2017142154 A JP 2017142154A JP 2016023434 A JP2016023434 A JP 2016023434A JP 2016023434 A JP2016023434 A JP 2016023434A JP 2017142154 A JP2017142154 A JP 2017142154A
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- sic
- beam portion
- graphene
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- measurement
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- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims abstract description 68
- 229910010271 silicon carbide Inorganic materials 0.000 claims abstract description 67
- 238000005259 measurement Methods 0.000 claims abstract description 51
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 47
- 229910021389 graphene Inorganic materials 0.000 claims abstract description 43
- 239000000758 substrate Substances 0.000 claims abstract description 41
- 230000005284 excitation Effects 0.000 claims description 20
- 238000001069 Raman spectroscopy Methods 0.000 claims description 13
- 238000006073 displacement reaction Methods 0.000 claims description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- 239000010410 layer Substances 0.000 description 25
- 239000013078 crystal Substances 0.000 description 12
- 238000010438 heat treatment Methods 0.000 description 8
- 238000005530 etching Methods 0.000 description 7
- 230000003287 optical effect Effects 0.000 description 7
- 239000000126 substance Substances 0.000 description 6
- 238000001237 Raman spectrum Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 4
- 238000009530 blood pressure measurement Methods 0.000 description 4
- 229910052739 hydrogen Inorganic materials 0.000 description 4
- 239000001257 hydrogen Substances 0.000 description 4
- 230000031700 light absorption Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000001678 irradiating effect Effects 0.000 description 3
- 238000001020 plasma etching Methods 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- 241000252506 Characiformes Species 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 239000003518 caustics Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000001634 microspectroscopy Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
Images
Landscapes
- Measuring Fluid Pressure (AREA)
- Micromachines (AREA)
- Pressure Sensors (AREA)
- Recrystallisation Techniques (AREA)
Abstract
Description
Claims (4)
- 炭化シリコンから構成された基板と、
炭化シリコンから構成されて前記基板の上に形成された支持部と、
炭化シリコンから構成されて一部が前記支持部で支持されて前記基板の上に離間して配置された梁部と、
前記梁部の表面に設けられてグラフェンが形成されている測定領域と、
前記測定領域を用いて前記梁部の変位を光学的に測定する測定手段と、
前記梁部を励振する励振手段と
を備えることを特徴とするセンサ。 - 請求項1記載のセンサにおいて、
前記測定領域には、前記梁部の表面を構成する炭化シリコンのシリコンが欠落することで構成されたグラフェンが形成されている
ことを特徴とするセンサ。 - 請求項1または2記載のセンサにおいて、
前記測定手段は、前記測定領域に照射した光の反射光のラマン散乱を分光するラマン分光法により前記梁部の変位を測定する
ことを特徴とするセンサ。 - 請求項1〜3のいずれか1項に記載のセンサにおいて、
前記励振手段は、ピエゾ素子から構成されていることを特徴とするセンサ。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016023434A JP6426636B2 (ja) | 2016-02-10 | 2016-02-10 | センサ |
Applications Claiming Priority (1)
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---|---|---|---|
JP2016023434A JP6426636B2 (ja) | 2016-02-10 | 2016-02-10 | センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017142154A true JP2017142154A (ja) | 2017-08-17 |
JP6426636B2 JP6426636B2 (ja) | 2018-11-21 |
Family
ID=59628425
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016023434A Active JP6426636B2 (ja) | 2016-02-10 | 2016-02-10 | センサ |
Country Status (1)
Country | Link |
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JP (1) | JP6426636B2 (ja) |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003231097A (ja) * | 2002-02-08 | 2003-08-19 | Mitsubishi Gas Chem Co Inc | 炭素からなる骨格を持つ薄膜状粒子を基板に載せた構造物およびその作製方法 |
JP2006322783A (ja) * | 2005-05-18 | 2006-11-30 | Dainippon Screen Mfg Co Ltd | 圧力センサおよび基板処理装置 |
JP2007045124A (ja) * | 2005-08-12 | 2007-02-22 | Seiko Epson Corp | 液滴吐出ヘッド及びその製造方法並びに液滴吐出装置 |
JP2015013352A (ja) * | 2013-07-08 | 2015-01-22 | 日本電信電話株式会社 | 微細機械構造の作製方法 |
JP2015040156A (ja) * | 2013-08-23 | 2015-03-02 | 日本電信電話株式会社 | グラフェン形成方法および形成装置 |
WO2015035465A1 (en) * | 2013-09-16 | 2015-03-19 | Griffith University | Process for forming graphene layers on silicon carbide |
US20160031701A1 (en) * | 2014-07-31 | 2016-02-04 | Infineon Technologies Ag | Micromechanical Structure and Method for Fabricating the Same |
-
2016
- 2016-02-10 JP JP2016023434A patent/JP6426636B2/ja active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003231097A (ja) * | 2002-02-08 | 2003-08-19 | Mitsubishi Gas Chem Co Inc | 炭素からなる骨格を持つ薄膜状粒子を基板に載せた構造物およびその作製方法 |
JP2006322783A (ja) * | 2005-05-18 | 2006-11-30 | Dainippon Screen Mfg Co Ltd | 圧力センサおよび基板処理装置 |
JP2007045124A (ja) * | 2005-08-12 | 2007-02-22 | Seiko Epson Corp | 液滴吐出ヘッド及びその製造方法並びに液滴吐出装置 |
JP2015013352A (ja) * | 2013-07-08 | 2015-01-22 | 日本電信電話株式会社 | 微細機械構造の作製方法 |
JP2015040156A (ja) * | 2013-08-23 | 2015-03-02 | 日本電信電話株式会社 | グラフェン形成方法および形成装置 |
WO2015035465A1 (en) * | 2013-09-16 | 2015-03-19 | Griffith University | Process for forming graphene layers on silicon carbide |
US20160031701A1 (en) * | 2014-07-31 | 2016-02-04 | Infineon Technologies Ag | Micromechanical Structure and Method for Fabricating the Same |
Non-Patent Citations (3)
Title |
---|
KOHEI ADACHI, NAOKI WATANABE, HAJIME OKAMOTO, HIROSHI YAMAGUCHI, TSUNENOBU KIMOTO, JUN SUDA: "Single-crystalline 4H-SiC micro cantilevers with a high quality factor", SENSORS AND ACTUATORS A: PHYSICAL, vol. vpl.197, JPN6018040455, 18 April 2013 (2013-04-18), NE, pages 122 - 125, ISSN: 0003898725 * |
KOSUKE SATO, KOHEI ADACHI, HAJIME OKAMOTO, HIROSHI YAMAGUCHI, TSUNENOBU KIMOTO, AND JUN SUDA: "Fabrication of electrostatically actuated 4H-SiC microcantilever resonators by using n/p/n epitaxial", MATERIAL SCIENCE FORUM, JPN6018040454, 2014, CH, pages 780 - 783, ISSN: 0003898726 * |
RYONG-SOK O, MAKOTO TAKAMURA, KAZUAKI FURUKAWA, MASAO NAGASE, AND HIROKI HIBINO: "Effects of UV light intensity on electrochemical wet etching of SiC for the fabrication of suspended", JAPANSE JOURNAL OF APPLIED PHYSICS, vol. 54, JPN6018040456, 30 January 2015 (2015-01-30), JP, pages 036502, ISSN: 0003898727 * |
Also Published As
Publication number | Publication date |
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JP6426636B2 (ja) | 2018-11-21 |
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