JP2017128116A5 - - Google Patents

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Publication number
JP2017128116A5
JP2017128116A5 JP2017003656A JP2017003656A JP2017128116A5 JP 2017128116 A5 JP2017128116 A5 JP 2017128116A5 JP 2017003656 A JP2017003656 A JP 2017003656A JP 2017003656 A JP2017003656 A JP 2017003656A JP 2017128116 A5 JP2017128116 A5 JP 2017128116A5
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JP
Japan
Prior art keywords
aerosol
additional material
polarity
substrate
deposition system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2017003656A
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English (en)
Japanese (ja)
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JP6749849B2 (ja
JP2017128116A (ja
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Publication date
Priority claimed from US15/001,408 external-priority patent/US10500784B2/en
Application filed filed Critical
Publication of JP2017128116A publication Critical patent/JP2017128116A/ja
Publication of JP2017128116A5 publication Critical patent/JP2017128116A5/ja
Application granted granted Critical
Publication of JP6749849B2 publication Critical patent/JP6749849B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2017003656A 2016-01-20 2017-01-12 付加堆積システムおよび方法 Expired - Fee Related JP6749849B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US15/001,408 2016-01-20
US15/001,408 US10500784B2 (en) 2016-01-20 2016-01-20 Additive deposition system and method

Publications (3)

Publication Number Publication Date
JP2017128116A JP2017128116A (ja) 2017-07-27
JP2017128116A5 true JP2017128116A5 (enExample) 2020-02-27
JP6749849B2 JP6749849B2 (ja) 2020-09-02

Family

ID=57796214

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017003656A Expired - Fee Related JP6749849B2 (ja) 2016-01-20 2017-01-12 付加堆積システムおよび方法

Country Status (6)

Country Link
US (1) US10500784B2 (enExample)
EP (1) EP3196002B1 (enExample)
JP (1) JP6749849B2 (enExample)
KR (1) KR102481039B1 (enExample)
CN (1) CN106985378B (enExample)
TW (1) TWI707769B (enExample)

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