JP2017126785A - Sheet sticking device and sheet sticking method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a sheet sticking device that makes it possible to supply a supply material without stopping the device and is capable of preventing the device's performance per unit time from reducing.SOLUTION: A sheet sticking device 1 comprises: a frame stocker 3 in which a plurality of frame accommodation means can be arranged; transfer means 5; raw fabric connection means for connecting a termination area of a raw fabric, to which a first adhesive sheet is temporarily attached, supported by any of a plurality of raw fabric support members for supporting raw fabrics with a tip area of a raw fabric supported by another; and sticking means 8 for sticking the first adhesive sheet to a frame member RF and an adherend WF. The transfer means 5, when any one of the frame accommodation means becomes empty, performs selection operation of taking out a frame member RF from another frame accommodation means. The frame stocker 3 is provided so as to be capable of separating the empty frame accommodation means at the timing of the transfer means 5 performing the selection operation, and replacing the empty frame accommodation means with frame accommodation means accommodating a frame member RF.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a sheet sticking apparatus and a sheet sticking method.

Conventionally, in a semiconductor manufacturing process, a sheet sticking apparatus for sticking an adhesive sheet to a semiconductor wafer (hereinafter sometimes simply referred to as a wafer) or a ring frame is known (for example, see Patent Document 1).
The sheet sticking device described in Patent Document 1 includes a wafer supply unit loaded with cassettes for storing a plurality of wafers in multiple stages, a ring frame supply unit in which ring frames are stored in multiple stages, and a tape supply for supplying dicing tape. The dicing tape supplied from the tape supply unit is applied to the back surface of the ring frame and the wafer, and the dicing tape is cut so that the ring frame and the wafer are integrated with the dicing tape. Yes.

JP 2006-165385 A

However, in the conventional sheet sticking apparatus as described in Patent Document 1, since only one tape supply unit that supplies a dicing tape as a supply material can be disposed, the dicing tape is used up and the dicing tape is used in the tape supply unit. When the device is set again, the operation of the device is forced to stop, and the processing capacity per unit time is lowered.
Here, even if a plurality of tape supply units are provided, since only one ring frame supply unit that supplies a ring frame that is a supply material is arranged, the above inconvenience cannot be completely eliminated. Further, if the tape supply unit and the ring frame supply unit are simply provided and other members do not correspond to the tape supply unit or the ring frame supply unit, the entire apparatus cannot be realized.

  An object of the present invention is to provide a sheet sticking device and a sheet sticking method that can supply a supply material without stopping the device and prevent a reduction in processing capacity per unit time of the device.

  In order to achieve the above object, a sheet sticking device of the present invention includes a frame stocker capable of arranging a plurality of frame accommodating means capable of accommodating a plurality of frame members integrated with an adherend via a first adhesive sheet; The frame member and the adherend are supported, and one of the plurality of frame accommodating means arranged in the frame stocker is selected and accommodated in any one of the frame accommodating means. Transfer means for taking out the transferred frame member and transferring it to the support means; sheet supply means having a plurality of original fabric support members for supporting the original fabric on which the first adhesive sheet is temporarily attached; An original fabric connecting means for connecting an end region of the original fabric supported by the other to an end region of the original fabric supported by any one of the original fabric support members, and a frame supported by the support means. And a sticking means for sticking the first adhesive sheet to the adherend, wherein the transfer means includes any one of the plurality of frame housing means. When empty, the frame stocker performs a selecting operation to take out the frame member from another frame storing means, and the frame stocker separates the empty frame storing means at the timing when the transfer means performs the selecting operation, and the frame member is stored. A configuration is adopted in which the frame housing means is provided in a replaceable manner.

At this time, in the sheet sticking device of the present invention, a second adhesive sheet is stuck on the surface of the adherend opposite to the sticking surface of the first adhesive sheet, and a peeling tape is attached to the second adhesive sheet. A peeling means for peeling off the second adhesive sheet from the adherend by applying a tension to the peeling tape and a collecting means for storing the second adhesive sheet peeled off from the adherend A plurality of collection means stockers that can be arranged, and the transfer means selects any one of the plurality of collection means arranged in the collection means stocker, and the one collection means has the The second adhesive sheet peeled off by the peeling means is provided so as to be discarded, and when any one of the plurality of collecting means becomes full, the second adhesive sheet is selected to be discarded by another collecting means Line action , The recovery unit stocker, disconnect the recovery means becomes full at the time of the transfer means makes a selection operation, provided to be exchanged empty recovery means, it is preferable.
The sheet sticking apparatus of the present invention further includes an adherend stocker capable of arranging a plurality of adherend accommodation means capable of accommodating a plurality of the adherends, and the transfer means is disposed in the adherend stocker. Any one of the plurality of adherend accommodation means is selected, and the adherend accommodated in any one of the adherend accommodation means is taken out and transferred to the support means. And when any one of the plurality of adherend accommodating means is empty, a selection operation for taking out the adherend from another adherend accommodating means is performed, The adherend stocker is provided so as to be able to replace the adherend accommodation means that is empty at the timing when the transfer means performs the selection operation, and to replace the adherend accommodation means in which the adherend is accommodated. Is preferable.

  On the other hand, the sheet sticking method of the present invention includes a step of disposing a plurality of frame accommodating means capable of accommodating a plurality of frame members integrated with an adherend via a first adhesive sheet in a frame stocker, the frame members, The step of supporting the adherend and the transfer means select any one of the plurality of frame accommodation means, and take out the frame member accommodated in any one of the frame accommodation means. A step of transferring to the support means, a step of supporting the original fabric on which the first adhesive sheet is temporarily attached by a plurality of original fabric support members, and an original supported by any of the plurality of original fabric support members A step of joining the leading end region of the original fabric supported by the other to the opposite end region, and a step of attaching the first adhesive sheet to the frame member and the adherend supported by the supporting means, When any one of the frame accommodating means becomes empty, the transfer means performs a selection operation to take out the frame member from another frame accommodation means, and at the timing when the transfer means performs the selection operation. A configuration is adopted in which a step of separating the empty frame housing means from the frame stocker and replacing the frame housing means with a frame housing means in which a frame member is accommodated is employed.

  According to the present invention as described above, both when the raw material that is the supply material is lost (when it is about to disappear) and when the frame member that is the supply material is gone in the frame housing means, Since the original fabric and the frame accommodating means can be exchanged without stopping the apparatus, it is possible to prevent the processing capacity per unit time of the apparatus from being lowered.

The top view of the sheet sticking apparatus which concerns on one Embodiment of this invention. The arrow arrow view of the sticking means of a sheet sticking apparatus. The BR arrow figure of the original fabric connection means of a sheet sticking apparatus. AR arrow directional view of the peeling means of a sheet sticking apparatus. Operation | movement explanatory drawing of an original fabric connection means.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
Note that the X axis, the Y axis, and the Z axis in this embodiment are orthogonal to each other, the X axis and the Y axis are axes in a horizontal plane, and the Z axis is an axis that is orthogonal to the horizontal plane. Further, in the present embodiment, when viewed from the direction of the arrow AR parallel to the Y axis, when indicating the direction, “up” is the arrow direction of the Z axis, “down” is the opposite direction, and “left”. Is the arrow direction of the X axis, “right” is the opposite direction, “front” is the arrow direction of the Y axis, and “rear” is the opposite direction.

  1 to 4, the sheet sticking apparatus 1 can accommodate a plurality of wafers WF as adherends each having a protective sheet PS (FIG. 2) as a second adhesive sheet attached to a surface WF1 as one surface. It is integrated with the wafer WF via an adherend stocker 2 on which the first adherend accommodating means 2A and the second adherend accommodating means 2B can be arranged, and an adhesive sheet AS (FIG. 2) as a first adhesive sheet. A frame stocker 3 capable of accommodating a first frame accommodating means 3A and a second frame accommodating means 3B capable of accommodating a plurality of ring frames RF as frame members, and at least the ring frame RF of the ring frame RF and the wafer WF. The supporting means 4 and any one of the first frame accommodating means 3A and the second frame accommodating means 3B arranged in the frame stocker 3 A transfer means 5 for selecting the container means (3A or 3B), taking out the ring frame RF accommodated in any one of the frame accommodating means (3A or 3B) and transferring it to the support means 4, and an adhesive sheet AS. Sheet supply means 6 having support rollers 61 (first and second support rollers 61A, 61B (FIG. 2)) as a plurality of original fabric support members that support the original fabric RS (FIG. 2) temporarily attached thereto; An original fabric joining means 7 for joining an end region of the original fabric RS supported by the other to an end region of the original fabric RS supported by any one of the plurality of support rollers 61, and a ring frame supported by the support means 4. Affixing means 8 for affixing the adhesive sheet AS to the RF or ring frame RF and the wafer WF, and a support roller 91 (first roller) as a plurality of tape support members for supporting the peeling tape PT. And the peeling tape supply means 9 having the second support rollers 91A and 91B (FIG. 4), and the peeling supported by the other end region of the peeling tape PT supported by any one of the plurality of support rollers 91 The protective tape PS is peeled from the wafer WF by attaching the peeling tape PT to the protective sheet PS and applying tension to the peeling tape PT. A peeling means 11 and a collecting means stocker 12 capable of arranging a first collecting means 12A and a second collecting means 12B for accommodating the protective sheet PS peeled from the wafer WF are provided and supported by the frame 13.

  The adherend stocker 2 includes a first notch 131 formed in the frame 13 and a positioning means (not shown) that is provided in the first notch 131 and can position and fix the first and second adherend receiving means 2A and 2B. And. The first and second adherend accommodation means 2A and 2B are respectively rotated by first and second wafer cassettes 21A and 21B capable of accommodating wafers WF in multiple stages in the vertical direction, with casters or driving devices not shown on the lower surface. The first and second carriages 20A and 20B provided with possible rotating wheels are provided so as to be disposed in the first notch 131 manually or automatically.

  The frame stocker 3 includes a second notch 132 formed in the frame 13 and positioning means (not shown) provided in the second notch 132 and capable of positioning and fixing the first and second frame accommodating means 3A and 3B. Yes. The first and second frame accommodating means 3A and 3B can be rotated by first and second frame cassettes 31A and 31B capable of accommodating the ring frame RF in multiple stages in the vertical direction, and by a caster or a driving device (not shown) on the lower surface. The first and second carriages 30A and 30B provided with various rotating wheels are provided so as to be disposed in the second notch 132 manually or automatically.

  The support means 4 includes a table 42 having a support surface 41 capable of attracting and holding the wafer WF and the ring frame RF by suction means such as a decompression pump and a vacuum ejector (not shown), and a drive for supporting the table 42 with a slider 43 (FIG. 2). And a linear motor 44 as a device. The support means 4 also serves as the peeling means 11.

  The transfer means 5 includes an articulated robot 51 as a driving device and a holding means 52 provided at the tip of the articulated robot 51. The multi-joint robot 51 is a so-called six-axis robot having joints that can rotate at six locations. Within the work range of the multi-joint robot 51, the wafer WF and the ring frame RF held by the holding means 52 are located at any position. It is configured to be movable even at an angle of. The holding means 52 includes a disk-like holding frame 54 having a concave portion 53 on one surface 54A, an XY table 55 disposed in the concave portion 53, and an XY table, as shown in the view from the AR direction indicated by reference numeral AA. The suction plate 57 is supported by the output unit 56 of 55, and the suction plate 57 can be moved in two orthogonal axes in the plane along the surface 54A of the holding frame 54, and the suction plate 57 is rotated in the plane. It is configured to be possible. The suction plate 57 has a suction surface 59 provided with a plurality of suction holes 58, and is connected to an articulated robot 51 so as to be connected to suction means such as a decompression pump or a vacuum ejector (not shown), The ring frame RF can be sucked and held. Further, there are two systems of suction plates 57: a system for attracting and holding the wafer WF and a system for attracting and holding the ring frame RF. The transfer means 5 is either one of the first adherend accommodating means 2A and the second adherend accommodating means 2B arranged in the adherend stocker 2 and the adherend accommodating means (2A or 2B). And a function of taking out the wafer WF accommodated in any one of the adherend accommodation means (1A or 2B) and transferring it to the support means 4, and a first recovery means arranged in the recovery means stocker 12 A function of selecting any one of the collecting means (12A or 12B) of 12A and the second collecting means 12B and discarding the protective sheet PS peeled off by the peeling means 11 to any one of the collecting means (12A or 12B) Is also provided.

  On the left side of the transfer means 5 are the outer edge position of the wafer WF, orientation marks such as notches and orientation flats (not shown) formed on the wafer WF, circuit patterns, street or outer edge and inner edge positions of the ring frame RF, and the ring frame. There is provided first detection means 141 composed of an optical sensor, an imaging device or the like that can detect notch RF1 and the like provided on the outer periphery of RF.

  As shown in FIG. 2, the sheet supply means 6 has an adhesive sheet AS having an adhesive layer AD on one surface of the base sheet BS, on one surface of the strip-shaped release sheet RL via the adhesive layer AD. A plurality of support rollers 61 (first and second support rollers 61A and 61B) that respectively support the temporarily-attached original fabric RS (first and second original fabrics RS1 and RS2), and a rotation motor 62 as a drive device. And a plurality of guides for guiding the raw fabric RS, and a roller holding means 64 that rotatably supports the first and second support rollers 61A and 61B at both ends thereof. A roller 65, a peeling plate 66 that peels the adhesive sheet AS from the peeling sheet RL by folding back the original fabric RS, a driving roller 67 driven by a rotation motor 67A as a driving device, A pinch roller 68 for sandwiching the release liner RL between the rollers 67, and a collection roller 69 for collecting the release liner RL are driven by a drive device (not shown) in its entirety is supported by the frame 60. Below the roller holding means 64, there is a second sensor constituted by an optical sensor, an imaging device or the like that can detect that the remaining amount of the raw fabric RS supported by the lower support roller 61 is reduced. Detection means 142 is provided.

  As shown in FIGS. 2 and 3, the original fabric connecting means 7 forms a gap CL at the center, and can hold the original RS from the lower surface side by suction means (not shown) such as a decompression pump and a vacuum ejector. And an upper side having a holding surface 721 that is provided above the lower side suction unit 71 and is capable of sucking and holding the original fabric RS from the upper surface side by a suction unit (not shown) such as a vacuum pump or a vacuum ejector. Provided in front of the adsorbing means 72 and the upper adsorbing means 72, and provided below the connecting sheet supply means 73 for supplying the connecting sheet CS for connecting the original fabric RS, and for connecting And a joining sheet attaching means 74 for attaching the sheet CS to the original fabric RS. The lower suction means portion 71A located on the right side of the gap CL is rotatably provided by a rotation motor 71B that is a driving device.

  The upper suction means 72 has a cutter groove 722 extending in the front-rear direction at the center of the holding surface 721, and is supported on the output shaft 724 of a linear motion motor 723 as a drive device from the upper surface side.

  In the connecting sheet supply means 73, the connecting sheet CS having the adhesive layer AE on one surface of the base sheet BU is temporarily attached to one surface of the strip-shaped release sheet RM via the adhesive layer AE. A support roller 731 for supporting the connecting sheet original fabric RT, a guide roller 732 for guiding the connecting sheet original fabric RT, and a release for peeling the connecting sheet CS from the release sheet RM by folding the connecting sheet original fabric RT. A roller 733, a driving roller 735 driven by a rotation motor 734 as a driving device, a pinch roller 736 sandwiching the release sheet RM between the drive roller 735, and a drive device (not shown) to drive the release sheet RM. A collection roller 737 for collection is provided, and the whole is supported by a frame (not shown). Two connecting sheet supply means 73 are provided in the direction orthogonal to the paper surface (X-axis direction) in FIG. 3, and are provided so as to be movable in the direction orthogonal to the paper surface by a drive device such as a linear motor (not shown). Yes.

  The connecting sheet sticking means 74 includes a holding table 741 having a holding surface 742 capable of sucking and holding the connecting sheet CS supplied from the connecting sheet supply means 73 by a suction means such as a decompression pump or a vacuum ejector (not shown), and holding A linear motion motor 744 that is a drive device that supports the table 741 from the lower surface side by the output shaft 743, a linear motor 746 that is a drive device that supports the linear motion motor 744 by the slider 745 from below, and a holding surface 742 of the holding table 741. And a cutter blade 747 provided on the rear end side.

  The affixing means 8 includes a pressing roller 81 that affixes the adhesive sheet AS peeled off by the peeling plate 66 by bringing it into contact with the back surface WF2 as the other surface of the wafer WF and the ring frame RF.

  As shown in FIG. 4, the stripping tape supply means 9 is a stripping tape PT (first and second stripping tapes) in which a heat-sensitive adhesive layer AG is laminated on one surface of a strip-shaped base tape BT. A plurality of support rollers 91 (first and second support rollers 91A and 91B) that respectively support the tapes PT1 and PT2) and an output shaft 93 of a rotation motor 92 as a drive device are rotatably supported. At both ends, a roller holding means 94 that rotatably supports the first and second support rollers 91A and 91B, a plurality of guide rollers 95 that guide the peeling tape PT, and a tip region of the peeling tape PT are supported. Leading end support means 96 for pulling out, pulling means 97 for pulling out the peeling tape PT, peeling tape attaching means 98 for attaching the peeling tape PT to the protective sheet PS, and peeling tape And a cutting means 99 for cutting the T, is supported by the frame 90 via a bracket (not shown) or the like. Below the roller holding means 94, there is a third sensor constituted by an optical sensor, an imaging device, or the like that can detect that the remaining amount of the peeling tape PT supported by the lower support roller 91 is reduced. Detection means 143 is provided.

The tip support means 96 includes a bush 961, a rod 962 supported by the bush 961 so as to be able to advance and retreat, a tape receiving plate 964 fixed to the tip of the rod 962 and having a cutter groove 963, and a tape receiving plate 964 attached to the left. And a coil spring 965 to be energized.
The pulling means 97 includes a chuck cylinder 972 as a driving device for gripping the peeling tape PT with a pair of gripping claws 971 and a linear motor 974 as a driving device for supporting the chuck cylinder 972 with a slider 973.
The peeling tape attaching means 98 includes a pressing head 983 provided at the lower end portion of the output shaft 982 of the linear motion motor 981 which is a driving device, and a coil heater or an infrared heater for heating the pressing surface portion 984 at the lower end of the pressing head 983. Heating means 985.
The cutting means 99 includes a cutter blade 991 and an air cylinder 993 that is a drive device that supports the cutter blade 991 with an output shaft 992.

  The peeling tape joining means 10 has the same configuration as the above-described original fabric joining means 7 and can be described by replacing the number 7 at the top of the numbering in the original fabric joining means 7 with 10 as shown in FIG. Therefore, the description is omitted.

The collection means stocker 12 includes a third notch 133 formed in the frame 13, and a positioning means (not shown) provided in the third notch 133 and capable of positioning and fixing the first and second collection means 12A and 12B. Yes. The first and second collection means 12A and 12B can be rotated by first and second collection boxes 121A and 121B that can accommodate the protective sheet PS peeled off from the wafer WF, and a caster or a driving device (not shown) on the lower surface. These are provided with carts 120 </ b> A and 120 </ b> B provided with various rotating wheels, and can be arranged in the third notch 133 manually or automatically.
In addition, on the left side of the third notch 133, there are fourth and fourth optical sensors and imaging devices that can detect the amount of the protective sheet PS accommodated in the first and second collecting means 12A and 12B. 5 detecting means 144 and 145 are provided.

In the sheet sticking apparatus 1 described above, a procedure for sticking the adhesive sheet AS to the wafer WF and the ring frame RF will be described.
First, as shown in FIG. 2, the first and second original fabrics RS1 and RS2 are set on the first and second support rollers 61A and 61B, respectively, and the holding surface 721 of the upper suction means 72 is used to form the second original fabric RS2. The tip region is held by suction. Also, as shown in FIG. 4, the first and second peeling tapes PT1 and PT2 are set on the first and second support rollers 91A and 91B, respectively, and the second peeling tape is held on the holding surface 1021 of the upper suction means 102. The tip region of PT2 is sucked and held. Further, as shown in FIG. 3, the connecting sheet original fabric RT is connected to each of the support rollers 731 and 1031 of the connecting sheet supply means 73 (103) provided for each of the original RS and the peeling tape PT. Are set, and the leading ends of the connecting sheet raw fabrics RT are fixed to the collecting rollers 737 and 1037, respectively.
Further, as shown in FIG. 1, the first and second adherend accommodation units 2A and 2B in which the wafer WF is accommodated are set in the adherend stocker 2, and the first and second in which the ring frame RF is accommodated. The frame accommodating means 3A, 3B are set in the frame stocker 3, and the empty first and second collection means 12A, 12B are set in the collection means stocker 12.

  When the setting is completed as described above, the transfer means 5 drives the articulated robot 51, and the holding means 52 is inserted into the first wafer cassette 21A to bring the suction surface 59 into contact with the wafer WF. The suction means not to be driven is driven to suck and hold the wafer WF. Next, the transfer means 5 drives the articulated robot 51, moves the wafer WF to a position that can be detected by the first detection means 141, drives the XY table 55, and rotates the wafer WF by a predetermined angle. As a result, the first detection means 141 detects the outer edge position of the wafer WF and the notch position (not shown), and these data are output to the control means (not shown). When various data of the wafer WF are input to a control means (not shown), the center position of the wafer WF is calculated, and the transfer means 5 drives the XY table 55 and the articulated robot 51 to show the center position of the wafer WF and not shown. It is mounted on the support surface 41 of the table 42 so that the notch position is a predetermined position.

  Next, the transfer means 5 drives the articulated robot 51, inserts the holding means 52 into the first frame cassette 31A and brings the suction surface 59 into contact with the ring frame RF, and then drives the suction means (not shown). The ring frame RF is sucked and held. Next, the transfer means 5 drives the articulated robot 51 to move the ring frame RF to a position where it can be detected by the first detection means 141, and performs the same operation as when the first detection means 141 is the wafer WF described above. Thereafter, the center position of the opening of the ring frame RF matches the center position of the wafer WF supported on the table 42, and the notch RF1 of the ring frame RF faces a predetermined direction. The ring frame RF is placed on the support surface 41 of the table 42.

Next, the support unit 4 drives the linear motor 44 to move the table 42 to the left, and when the detection unit (not shown) detects that the wafer WF and the ring frame RF have reached predetermined positions, In synchronization with the movement, the sheet supply means 6 drives the rotation motor 67A to feed out the first original fabric RS1. Thereby, the adhesive sheet AS is peeled off from the release sheet RL by the release plate 66, and the peeled adhesive sheet AS is attached to the wafer WF and the ring frame RF by the pressing roller 81, and as shown by a two-dot chain line in FIG. A wafer support WK in which the wafer WF is integrated with the ring frame RF through the adhesive sheet AS is formed. When the wafer support WK is thus formed, it is detected by a detection means (not shown), and the support means 4 stops the linear motor 44. Then, the transfer means 5 drives the articulated robot 51 to lift the wafer support WK upside down, transfer it to a transfer means (not shown) having a suction support surface facing the support surface 41, and mount it on the support surface 41 again. By placing the wafer support WK, the wafer support WK is turned upside down. Thereafter, the support means 4 drives the linear motor 44 to move the table 42 in the left direction.
Next, when the detection means (not shown) detects that the wafer support WK has reached a predetermined position, the peeling tape supply means 9 drives the linear motor 974 with the gripping claws 971 separated from each other. Gripping claws 971 push the tape receiving plate 964 in the direction of the bush 961, and receive the tip region of the first peeling tape PT1 between the upper and lower gripping claws 971. Next, the peeling tape supply means 9 drives the chuck cylinder 976, closes the gripping claw 971, and grips the tip region of the first peeling tape PT1 with the gripping claw 971. Next, the peeling tape supply means 9 drives the linear motor 974, pulls out the first peeling tape PT1 for a predetermined length and stops it, drives the linear motion motor 981, pushes down the pressing head 983, and presses the pressing surface portion 984. 1 The peeling tape PT1 is pressed against the protective sheet PS. At this time, the peeling tape applying means 98 drives the heating means 985 to heat the pressing surface portion 984 and attach the first peeling tape PT1 to the protective sheet PS. Thereafter, the peeling tape supply means 9 drives the air cylinder 993 to lower the cutter blade 991 and then raise it to cut the first peeling tape PT1.

  Next, the support means 4 that also serves as the peeling means 11 drives the linear motor 44 and moves the table 42 in the left direction, thereby peeling the protective sheet PS from the wafer WF. Then, the transfer means 5 drives the articulated robot 51, brings the suction surface 59 into contact with the peeled protective sheet PS, drives a suction means (not shown), sucks and holds the protective sheet PS, and holds the first collection means 12 </ b> A. Discard it. Further, the wafer support WK from which the protective sheet PS has been peeled is transferred to another process by a transfer means (not shown), the table 42 returns to the position indicated by the solid line in FIG. After returning to the position, the same operation is repeated thereafter.

As described above, when all the wafers WF are taken out from the first wafer cassette 21A, the transfer means 5 takes out the wafer WF from the second wafer cassette 21B and places it on the support means 4, that is, transfer. The means 5 performs a selection operation to take out the wafer WF from another first or second wafer cassette 21A, 21B when the first or second wafer cassette 21A, 21B becomes empty. Similarly to the above, when the first or second frame cassette 31A, 31B becomes empty, the transfer means 5 performs a selection operation of taking out the ring frame RF from another first or second frame cassette 31A, 31B. Further, similarly to the above, when the first or second collection box 121A, 121B is filled with the protection sheet PS, the transfer means 5 discards the protection sheet PS in another first or second collection box 121A, 121B. Perform the selection operation.
Then, at the timing when the transfer means 5 performs the selection operation, a control means (not shown) drives warning means such as warning sound generation means and lighting means (not shown), and any one of the wafer cassettes (21A, 21B) or frame cassette is driven. The operator is informed that (31A, 31B) is empty and that any of the collection boxes (121A, 121B) is full. As a result, the operator can replace the empty adherend storage means (2A, 2B), the frame storage means (3A, 3B), and the full recovery means (12A, 12B) with the adherend stocker 2, frame Separated from the stocker 3 and the recovery means stocker 12, the adherend storage means (2A, 2B) in which the wafer WF is stored, the frame storage means (3A, 3B) in which the ring frame RF is stored, the empty recovery means (12A, 12B) are set in the adherend stocker 2, the frame stocker 3, and the collection means stocker 12, respectively.
Thereby, it is not necessary to stop the operation of the sheet sticking apparatus 1 when the wafer WF or the ring frame RF is replenished.

  In addition, when the adhesive sheet AS is repeatedly applied, the second detection unit 142 detects that the remaining amount of the first original fabric RS1 has decreased, and in this embodiment, the light receiver detects the light of the projector. The raw fabric connecting means 7 drives the linear motion motor 744, raises the holding table 741, contacts the holding surface 742 with the base sheet BU of the connecting sheet CS, and then drives the suction means (not shown), The connecting sheet CS is sucked and held by the holding surface 742. Next, the original fabric connecting means 7 drives the rotation motor 734, drives the linear motor 746 in synchronization with the operation of feeding out the connecting sheet original fabric RT, and moves the holding table 741 rearward, thereby connecting the connecting sheet. The CS is peeled from the peeling sheet RM by the peeling roller 733, and the peeled connecting sheet CS is held by the holding table 741 as indicated by a double chain line in FIG. Then, at the timing when the feeding of the first original fabric RS1 is stopped, the original fabric joining means 7 drives a suction means (not shown), and the release sheet RL of the first original fabric RS1 is held by the holding surface 711 of the lower suction means 71. After attracting and holding the rear end region, the linear motion motor 723 is driven, and the upper attracting means 72 is lowered, so that the rear end of the release sheet RL of the first original fabric RS1 as shown in FIG. An area | region and the front-end | tip area | region of peeling sheet RL of 2nd original fabric RS2 are made to contact. Next, the raw fabric connecting means 7 drives the linear motor 746 and moves the holding table 741 backward, so that the cutter blade 747 passes through the cutter groove 722 as shown in FIG. The overlapping part of 1st original fabric RS1 and 2nd original fabric RS2 is cut | disconnected. Thus, the first original fabric rear end portion RS11 is formed on the left side of the cutting position in the first original fabric RS1, and the first original fabric unnecessary portion RS12 is formed on the right side. In addition, the second original fabric tip portion RS21 is formed on the right side of the cutting position in the second original fabric RS2, and the second original fabric unnecessary portion RS22 is formed on the left side.

When the cutting of the overlapping portion is completed, the connecting sheet CS supported by the holding table 741 is located immediately below the cutting position of the first original fabric RS1 and the second original fabric RS2, and the original fabric connecting means 7 is connected to the linear motor 746. Stop driving. After that, as shown in FIG. 5C, the original fabric connecting means 7 drives the rotation motor 71B to rotate the lower suction means portion 71A downward, and the first original fabric unnecessary portion RS12 is changed to the second original material RS12. Pull away from the opposite tip RS21.
Then, as shown in FIG. 5 (D), the original fabric connecting means 7 drives the linear motion motor 744 to raise the holding table 741 to cause the first original fabric rear end portion RS11 and the second original fabric distal end portion RS21 to move. The connecting sheet CS is affixed to the first original fabric RS1 and the second original fabric RS2.

Next, as shown in FIG. 5 (E), the original fabric connecting means 7 controls the suction means (not shown) to stop the suction of the right half area in FIG. 5 (E) on the holding surface 721, and the linear motion motor 723. And the upper suction means 72 is raised to separate the second raw fabric unnecessary portion RS22 away from the first raw fabric rear end RS11, and suction holding by the holding means 711 and the holding face 742 by the suction means (not shown) is performed. Stop. Thereafter, the original fabric connecting means 7 drives the linear motor 744 and the linear motor 746 to return the holding table 741 to the position indicated by the solid line in FIG. The connection with the tip region of the anti-RS2 is completed. Thereafter, the sheet supply means 6 drives the rotation motor 62, rotates the roller holding means 64 counterclockwise in FIG. 2, and moves the second support roller 61B supporting the second original fabric RS2 downward. Position.
In addition, 1st and 2nd original fabric unnecessary parts RS12 and RS22 are collect | recovered by the collection means which is not shown in figure. Further, the operator removes the winding core such as the paper tube of the first original fabric RS1 remaining on the first support roller 61A, supports the new first original fabric RS1 on the first support roller 61A, and the first original fabric RS1. The tip region of the upper suction means 72 is sucked and held by the holding surface 721 of the upper suction means 72.
With such a configuration, it is not necessary to stop the operation of the sheet sticking apparatus 1 when the raw material RS is replenished.

Further, by repeating the peeling process of the protective sheet PS, the third detection unit 143 detects that the remaining amount of the first peeling tape PT1 has decreased. In the case of this embodiment, the light of the projector is received as a light receiver. Is detected, the peeling tape joining means 10 performs the same operation as the original fabric joining means 7 to join the rear end region of the first peeling tape PT1 and the leading end region of the second peeling tape PT2. With such a configuration, it is not necessary to stop the operation of the sheet sticking apparatus 1 when the peeling tape PT is replenished.
Further, when the detecting means (not shown) detects that the connecting sheet CS of the connecting sheet supply means 73 (103) is low, the original fabric connecting means 7 (10) detects a drive device such as a linear motor (not shown). Driven, the connecting sheet supply means 73 (103) is moved in the X-axis direction, and the new connecting sheet original fabric RT is positioned on the holding table 741 (1041). With such a configuration, it is not necessary to stop the operation of the sheet sticking apparatus 1 when the connecting sheet CS is replenished.

According to this embodiment as described above, the following effects are obtained.
That is, the wafer WF, the ring frame RF, the raw fabric RS, the peeling tape PT, the raw material, which is the supply material, is exhausted (when it is about to disappear), and when the collecting means is full. Since the sheets can be exchanged without stopping the sheet sticking apparatus 1, it is possible to prevent the processing capacity per unit time of the sheet sticking apparatus 1 from being lowered. Further, since the processing capability of the sheet sticking apparatus 1 is lowered, it is possible to reduce the complexity that the operator has to quickly supply the ring frame RF and the adhesive sheet AS to the sheet sticking apparatus 1. it can.

  As described above, the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this. That is, the invention has been illustrated and described with particular reference to certain specific embodiments, but without departing from the spirit and scope of the invention, Various modifications can be made by those skilled in the art in terms of material, quantity, and other detailed configurations. In addition, the description of the shape, material, and the like disclosed above is exemplary for ease of understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded the limitation of one part or all of such restrictions is included in this invention.

For example, only the ring frame RF may be placed on the table 42 and the adhesive sheet AS may be attached to the ring frame RF.
Further, instead of the pressing roller 81, a pressing member made of a blade material, rubber, resin, sponge, or the like can be adopted, and a configuration in which pressing is performed by air blowing can also be adopted.
Further, instead of the peeling plate 66, a peeling member such as a roller may be adopted, or a peeling plate may be adopted instead of the peeling roller 733 (1033).

Further, three or more adherend storage units 2A and 2B, frame storage units 3A and 3B, collection units 12A and 12B, support rollers 61A and 61B, and support rollers 91A and 91B may be provided.
Further, at least one of the adherend storage means 2A, 2B, the frame storage means 3A, 3B, and the collection means 12A, 12B may not be separated from the frame 13.
Alternatively, the first peeling tape PT1 and the second peeling tape PT2 may be joined together by heat.

  In addition, the type and material of the adhesive sheet AS in the present invention are not particularly limited. For example, the adhesive sheet AS has an intermediate layer provided between the base sheet and the adhesive layer, or has three other layers. The above may be used. The semiconductor wafer can be exemplified by a silicon semiconductor wafer, a compound semiconductor wafer, and the like. The adhesive sheet to be attached to such a semiconductor wafer is not limited to a protective sheet, dicing tape, and die attach film, but any other sheet or film. A sheet having an arbitrary use and shape such as a tape can be applied. Further, the adherend may be an optical disk substrate, and the adhesive sheet may have a resin layer constituting the recording layer. Moreover, as a to-be-adhered body, not only a glass plate, a steel plate, a resin plate, a board | substrate etc., and other members but the member, articles | goods, etc. of arbitrary forms can also be made into object. Furthermore, it is also possible to target a wafer in which a pattern circuit is formed on the surface of the wafer.

  The drive device in the embodiment employs an electric device such as a rotation motor, a linear motion motor, a linear motor, a single-axis robot, and an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition, it is possible to adopt a combination of them directly or indirectly (some of them overlap with those exemplified in the embodiment).

DESCRIPTION OF SYMBOLS 1 ... Sheet sticking apparatus 2 ... Adherent stocker 2A, 2B ... 1st, 2nd adherend accommodating means (adherent accommodating means)
3 ... Frame stocker 3A, 3B ... First and second frame accommodation means (frame accommodation means)
DESCRIPTION OF SYMBOLS 4 ... Supporting means 5 ... Transfer means 6 ... Sheet supply means 7 ... Raw material joining means 8 ... Pasting means 11 ... Peeling means 12 ... Collection means stocker 12A, 12B ... 1st, 2nd collection means 61 ... Support roller (original) Anti-supporting member)
AS ... Adhesive sheet (first adhesive sheet)
PS ... Protective sheet (second adhesive sheet)
PT ... Tape for peeling RF ... Ring frame (frame member)
RS ... Raw fabric WF ... Wafer (Substrate)

Claims (4)

A frame stocker capable of arranging a plurality of frame accommodating means capable of accommodating a plurality of frame members integrated with the adherend via the first adhesive sheet;
A support means for supporting the frame member and the adherend;
One of the plurality of frame accommodating means arranged in the frame stocker is selected, and the frame member accommodated in any one of the frame accommodating means is taken out and transferred to the support means. Transfer means;
Sheet supply means having a plurality of original fabric support members for supporting the original fabric to which the first adhesive sheet is temporarily attached;
An original fabric joining means for joining an end region of the original fabric supported by the other to an end region of the original fabric supported by any one of the plurality of original fabric support members,
A sheet sticking device comprising a frame member supported by the support means and a sticking means for sticking the first adhesive sheet to an adherend;
The transfer means performs a selection operation of taking out a frame member from another frame accommodation means when any one of the plurality of frame accommodation means becomes empty,
The frame stocker is provided in such a manner that the frame accommodating means that is empty at the timing when the transfer means performs the selection operation is separated, and is exchangeably provided in the frame accommodating means in which the frame member is accommodated. apparatus. A second adhesive sheet is affixed to a surface opposite to the affixing surface of the first adhesive sheet in the adherend,
A peeling means for peeling the second adhesive sheet from the adherend by attaching a peeling tape to the second adhesive sheet and applying tension to the peeling tape;
A recovery means stocker capable of arranging a plurality of recovery means for storing the second adhesive sheet peeled from the adherend;
The transfer means selects any one of the plurality of collecting means arranged in the collecting means stocker, and discards the second adhesive sheet peeled by the peeling means to any one of the collecting means When any one of the plurality of collecting means is full, a selection operation for discarding the second adhesive sheet to another collecting means is performed.
2. The sheet according to claim 1, wherein the collecting unit stocker is provided so that the collecting unit that is full at the timing when the transfer unit performs the selection operation is separated and replaced with an empty collecting unit. Pasting device. An adherend stocker capable of arranging a plurality of adherend accommodation means capable of accommodating a plurality of adherends;
The transfer means selects any one of the plurality of adherend accommodation means arranged in the adherend stocker and is accommodated in any one of the adherend accommodation means. The adherend is taken out and transferred to the support means, and when any one of the plurality of adherend accommodation means is empty, another adherend is attached. Perform a selection operation to remove the adherend from the body housing means,
The adherend stocker is provided so as to be able to replace the adherend accommodation means that is empty at the timing when the transfer means performs the selection operation, and to replace the adherend accommodation means in which the adherend is accommodated. The sheet sticking apparatus according to claim 1 or 2, wherein Arranging a plurality of frame housing means in the frame stocker capable of housing a plurality of frame members integrated with the adherend via the first adhesive sheet;
Supporting the frame member and the adherend;
Selecting any one of the plurality of frame accommodating means by the transferring means, taking out the frame member accommodated in any one of the frame accommodating means, and transferring the frame member to the supporting means;
A step of supporting the original fabric to which the first adhesive sheet is temporarily attached with a plurality of original fabric support members;
Connecting the leading end region of the original supported by the other to the end region of the original supported by any one of the plurality of original supporting members;
A step of attaching the first adhesive sheet to a frame member supported by the support means and an adherend,
When any one of the plurality of frame accommodating means becomes empty, the transfer means performs a selection operation to take out a frame member from another frame accommodation means, and the transfer means performs the selection operation. A sheet pasting method, comprising: a step of separating a frame accommodating means that is empty from the frame stocker at a timing and replacing the frame accommodating means with a frame accommodating means accommodating a frame member.

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