JP2017119907A - ペロブスカイト膜の製造方法 - Google Patents
ペロブスカイト膜の製造方法 Download PDFInfo
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- JP2017119907A JP2017119907A JP2016056304A JP2016056304A JP2017119907A JP 2017119907 A JP2017119907 A JP 2017119907A JP 2016056304 A JP2016056304 A JP 2016056304A JP 2016056304 A JP2016056304 A JP 2016056304A JP 2017119907 A JP2017119907 A JP 2017119907A
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- 239000002243 precursor Substances 0.000 claims abstract description 12
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- 125000001424 substituent group Chemical group 0.000 claims description 31
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- 125000005843 halogen group Chemical group 0.000 claims description 8
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- 229910005191 Ga 2 O 3 Inorganic materials 0.000 description 3
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 3
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- 229910001416 lithium ion Inorganic materials 0.000 description 1
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 1
- 125000002960 margaryl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 229910001509 metal bromide Inorganic materials 0.000 description 1
- 229910001510 metal chloride Inorganic materials 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 229910001507 metal halide Inorganic materials 0.000 description 1
- 229910001511 metal iodide Inorganic materials 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 description 1
- 125000006626 methoxycarbonylamino group Chemical group 0.000 description 1
- 125000004184 methoxymethyl group Chemical group [H]C([H])([H])OC([H])([H])* 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 125000000250 methylamino group Chemical group [H]N(*)C([H])([H])[H] 0.000 description 1
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- 239000011733 molybdenum Substances 0.000 description 1
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- 125000001400 nonyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 125000002347 octyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
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- 125000002971 oxazolyl group Chemical group 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- AHKZTVQIVOEVFO-UHFFFAOYSA-N oxide(2-) Chemical compound [O-2] AHKZTVQIVOEVFO-UHFFFAOYSA-N 0.000 description 1
- 125000004043 oxo group Chemical group O=* 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 125000001037 p-tolyl group Chemical group [H]C1=C([H])C(=C([H])C([H])=C1*)C([H])([H])[H] 0.000 description 1
- 125000000913 palmityl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- BRVSNRNVRFLFLL-HQSVLGJOSA-N pcbo Chemical compound CCCCCCCCOC(=O)CCCC1([C@]23C4=C5C=CC6=C7C=CC8=C9C=CC%10=C%11C=CC%12=C(C=C4)[C@]31C1=C3C4=C2C5=C6C=2C7=C8C5=C9C%10=C(C3=C5C4=2)C%11=C%121)C1=CC=CC=C1 BRVSNRNVRFLFLL-HQSVLGJOSA-N 0.000 description 1
- 125000002958 pentadecyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 125000006634 pentyloxycarbonylamino group Chemical group 0.000 description 1
- AZVQGIPHTOBHAF-UHFFFAOYSA-N perfluoropentacene Chemical compound FC1=C(F)C(F)=C(F)C2=C(F)C3=C(F)C4=C(F)C5=C(F)C(F)=C(F)C(F)=C5C(F)=C4C(F)=C3C(F)=C21 AZVQGIPHTOBHAF-UHFFFAOYSA-N 0.000 description 1
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- CSHWQDPOILHKBI-UHFFFAOYSA-N peryrene Natural products C1=CC(C2=CC=CC=3C2=C2C=CC=3)=C3C2=CC=CC3=C1 CSHWQDPOILHKBI-UHFFFAOYSA-N 0.000 description 1
- 125000001792 phenanthrenyl group Chemical group C1(=CC=CC=2C3=CC=CC=C3C=CC12)* 0.000 description 1
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- 125000004625 phenanthrolinyl group Chemical group N1=C(C=CC2=CC=C3C=CC=NC3=C12)* 0.000 description 1
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- 125000005954 phenoxathiinyl group Chemical group 0.000 description 1
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- 230000001443 photoexcitation Effects 0.000 description 1
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- 125000004193 piperazinyl group Chemical group 0.000 description 1
- 125000000587 piperidin-1-yl group Chemical group [H]C1([H])N(*)C([H])([H])C([H])([H])C([H])([H])C1([H])[H] 0.000 description 1
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- 229920003227 poly(N-vinyl carbazole) Polymers 0.000 description 1
- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 1
- 229920000548 poly(silane) polymer Polymers 0.000 description 1
- 229920006122 polyamide resin Polymers 0.000 description 1
- 229920000767 polyaniline Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
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- 239000011112 polyethylene naphthalate Substances 0.000 description 1
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- 239000009719 polyimide resin Substances 0.000 description 1
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- 229920005990 polystyrene resin Polymers 0.000 description 1
- 229920000123 polythiophene Polymers 0.000 description 1
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- 229910052700 potassium Inorganic materials 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 125000000561 purinyl group Chemical group N1=C(N=C2N=CNC2=C1)* 0.000 description 1
- 125000003373 pyrazinyl group Chemical group 0.000 description 1
- 125000003226 pyrazolyl group Chemical group 0.000 description 1
- 125000001725 pyrenyl group Chemical group 0.000 description 1
- 125000000168 pyrrolyl group Chemical group 0.000 description 1
- 125000002294 quinazolinyl group Chemical group N1=C(N=CC2=CC=CC=C12)* 0.000 description 1
- 125000005493 quinolyl group Chemical group 0.000 description 1
- 125000001567 quinoxalinyl group Chemical group N1=C(C=NC2=CC=CC=C12)* 0.000 description 1
- 230000027756 respiratory electron transport chain Effects 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- HFHDHCJBZVLPGP-UHFFFAOYSA-N schardinger α-dextrin Chemical compound O1C(C(C2O)O)C(CO)OC2OC(C(C2O)O)C(CO)OC2OC(C(C2O)O)C(CO)OC2OC(C(O)C2O)C(CO)OC2OC(C(C2O)O)C(CO)OC2OC2C(O)C(O)C1OC2CO HFHDHCJBZVLPGP-UHFFFAOYSA-N 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 125000002914 sec-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
- GGYFMLJDMAMTAB-UHFFFAOYSA-N selanylidenelead Chemical compound [Pb]=[Se] GGYFMLJDMAMTAB-UHFFFAOYSA-N 0.000 description 1
- 150000003346 selenoethers Chemical class 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- XUARKZBEFFVFRG-UHFFFAOYSA-N silver sulfide Chemical compound [S-2].[Ag+].[Ag+] XUARKZBEFFVFRG-UHFFFAOYSA-N 0.000 description 1
- 229940056910 silver sulfide Drugs 0.000 description 1
- 125000003808 silyl group Chemical group [H][Si]([H])([H])[*] 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- PFUVRDFDKPNGAV-UHFFFAOYSA-N sodium peroxide Chemical compound [Na+].[Na+].[O-][O-] PFUVRDFDKPNGAV-UHFFFAOYSA-N 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 229910052950 sphalerite Inorganic materials 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 125000004079 stearyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 1
- VEALVRVVWBQVSL-UHFFFAOYSA-N strontium titanate Chemical compound [Sr+2].[O-][Ti]([O-])=O VEALVRVVWBQVSL-UHFFFAOYSA-N 0.000 description 1
- 125000000547 substituted alkyl group Chemical group 0.000 description 1
- 125000003107 substituted aryl group Chemical group 0.000 description 1
- 125000000020 sulfo group Chemical group O=S(=O)([*])O[H] 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- 125000001973 tert-pentyl group Chemical group [H]C([H])([H])C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- 125000001935 tetracenyl group Chemical group C1(=CC=CC2=CC3=CC4=CC=CC=C4C=C3C=C12)* 0.000 description 1
- 125000003718 tetrahydrofuranyl group Chemical group 0.000 description 1
- 125000001412 tetrahydropyranyl group Chemical group 0.000 description 1
- 125000003831 tetrazolyl group Chemical group 0.000 description 1
- 125000000335 thiazolyl group Chemical group 0.000 description 1
- 125000001166 thiolanyl group Chemical group 0.000 description 1
- 125000003944 tolyl group Chemical group 0.000 description 1
- 125000005259 triarylamine group Chemical group 0.000 description 1
- 125000004306 triazinyl group Chemical group 0.000 description 1
- 125000002023 trifluoromethyl group Chemical group FC(F)(F)* 0.000 description 1
- YFHICDDUDORKJB-UHFFFAOYSA-N trimethylene carbonate Chemical compound O=C1OCCCO1 YFHICDDUDORKJB-UHFFFAOYSA-N 0.000 description 1
- 150000001651 triphenylamine derivatives Chemical class 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910001930 tungsten oxide Inorganic materials 0.000 description 1
- ZNOKGRXACCSDPY-UHFFFAOYSA-N tungsten trioxide Chemical compound O=[W](=O)=O ZNOKGRXACCSDPY-UHFFFAOYSA-N 0.000 description 1
- 125000002948 undecyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- 125000005023 xylyl group Chemical group 0.000 description 1
- 229940063789 zinc sulfide Drugs 0.000 description 1
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
- 125000004933 β-carbolinyl group Chemical group C1(=NC=CC=2C3=CC=CC=C3NC12)* 0.000 description 1
- PAPBSGBWRJIAAV-UHFFFAOYSA-N ε-Caprolactone Chemical compound O=C1CCCCCO1 PAPBSGBWRJIAAV-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/50—Organic perovskites; Hybrid organic-inorganic perovskites [HOIP], e.g. CH3NH3PbI3
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Chemically Coating (AREA)
- Chemical Vapour Deposition (AREA)
- Formation Of Insulating Films (AREA)
Abstract
Description
また、本発明者らは、上記知見を得た後、さらに検討を重ねて、本発明を完成させるに至った。
[1] ペロブスカイト構造体の前駆体溶液を霧化または液滴化し、得られたミストまたは液滴をキャリアガスで基体まで搬送し、ついで前記ミストまたは液滴を熱反応させて前記基体上に前記ペロブスカイト構造体を成膜することを特徴とするペロブスカイト膜の製造方法。
[2] 前駆体溶液が有機金属ハロゲン化物を含む前記[1]記載の製造方法。
[3] 前駆体溶液がアンモニウム化合物を含む前記[1]または[2]に記載の製造方法。
[4] 前駆体溶液の溶媒が有機溶媒である前記[1]〜[3]のいずれかに記載の製造方法。
[5] 有機溶媒が、非プロトン性溶媒である前記[4]記載の製造方法。
[6] 有機溶媒が、下記式(1)で表される前記[4]または[5]に記載の製造方法。
[7] 有機溶媒が、下記式(2)で表される前記[4]または[5]に記載の製造方法。
[8] 熱反応を、250℃以下の温度で行う前記[1]〜[7]のいずれかに記載の製造方法。
[9] 基体が、ガラス基板である前記[1]〜[8]のいずれかに記載の製造方法。
[10] 基体がスズドープ酸化インジウム膜またはフッ素ドープ酸化インジウム膜を含む前記[1]〜[9]のいずれかに記載の製造方法。
[11] 基体がチタニア膜を含む前記[1]〜[10]のいずれかに記載の製造方法。
[12] 前記[1]〜[11]のいずれかに記載の製造方法を用いて製造されたペロブスカイト膜。
[13] 前記[12]記載のペロブスカイト膜を含む光電変換素子。
霧化・液滴化工程は、原料溶液を霧化または液滴化する。霧化手段または液滴化手段は、原料溶液を霧化または液滴化できさえすれば特に限定されず、公知の手段であってよいが、本発明においては、超音波を用いる霧化手段または液滴化手段が好ましい。超音波を用いて得られたミストまたは液滴は、初速度がゼロであり、空中に浮遊するので好ましく、例えば、スプレーのように吹き付けるのではなく、空間に浮遊してガスとして搬送することが可能なミストであるので衝突エネルギーによる損傷がないため、非常に好適である。液滴サイズは、特に限定されず、数mm程度の液滴であってもよいが、好ましくは50μm以下であり、より好ましくは100nm〜10μmである。
前記原料溶液は、ペロブスカイト構造体の前駆体溶液であり、霧化または液滴化が可能であれば特に限定されず、無機材料を含んでいてもよいし、有機材料を含んでいてもよい。また、前記原料溶液は、無機材料および有機材料の両方の材料を含んでいてもよい。また、前記ペロブスカイト構造体は、ペロブスカイト構造を有していれば特に限定されず、公知のものであってよい。無機材料からなるものであってもよいし、有機材料からなるものであってもよいが、本発明においては、前記ペロブスカイト構造体が有機無機複合材料からなるのが好ましい。前記有機無機複合材料としては、例えば、下記式(I)または下記式(II)で表される化合物などが挙げられる。
CH3NH3M1X3 ・・・(I)
(式中、M1は2価の金属イオンであり、Xは、F、Cl、BrまたはIである。)
(R6NH3)2M1X4 ・・・(II)
(式中、R6は炭素数2以上のアルキル基、アルケニル基、アラルキル基、アリール基、複素環基または芳香族複素環基であり、M1は2価の金属イオンであり、Xは、F、Cl、BrまたはIである。)
脂肪族複素環基としては、例えば、炭素数2〜14で、異種原子として少なくとも1個、好ましくは1〜3個の例えば窒素原子、酸素原子及び/又は硫黄原子等のヘテロ原子を含んでいる、3〜8員、好ましくは5又は6員の単環、多環又は縮合環の脂肪族複素環基が挙げられる。脂肪族複素環基の具体例としては、例えば、ピロリジル−2−オン基、ピペリジル基、ピペリジノ基、ピペラジニル基、モルホリノ基、モルホリニル基、テトラヒドロフリル基、テトラヒドロピラニル基、チオラニル基又はスクシンイミジル基等が挙げられる。
搬送工程では、キャリアガスでもって前記ミストまたは前記液滴を成膜室内に設置されている基体まで搬送する。前記キャリアガスとしては、本発明の目的を阻害しない限り特に限定されず、例えば、酸素、オゾン、窒素やアルゴン等の不活性ガス、または水素ガスやフォーミングガス等の還元ガスなどが好適な例として挙げられる。また、キャリアガスの種類は1種類であってよいが、2種類以上であってもよく、流量を下げた希釈ガス(例えば10倍希釈ガス等)などを、第2のキャリアガスとしてさらに用いてもよい。また、キャリアガスの供給箇所も1箇所だけでなく、2箇所以上あってもよい。キャリアガスの流量は、特に限定されないが、0.01〜20L/分であるのが好ましく、1〜10L/分であるのがより好ましい。希釈ガスの場合には、希釈ガスの流量が、0.001〜2L/分であるのが好ましく、0.1〜1L/分であるのがより好ましい。
成膜工程では、基体上で前記ミストまたは液滴を熱反応させることによって、基体上に、ペロブスカイト構造体を成膜する。熱反応は、熱でもって前記ミストまたは液滴が反応すればそれでよく、反応条件等も本発明の目的を阻害しない限り特に限定されない。本工程においては、前記熱反応を、通常、溶媒の蒸発温度以上の温度で行うが、高すぎない温度(例えば500℃)以下が好ましく、250℃以下がより好ましく、150℃以下が最も好ましい。下限については、本発明の目的を阻害しない限り特に限定されないが、100℃以上が好ましく、110℃以上がより好ましい。また、熱反応は、本発明の目的を阻害しない限り、真空下、非酸素雰囲気下、還元ガス雰囲気下および酸素雰囲気下のいずれの雰囲気下で行われてもよいが、非酸素雰囲気下または酸素雰囲気下で行われるのが好ましい。また、大気圧下、加圧下および減圧下のいずれの条件下で行われてもよいが、本発明においては、大気圧下で行われるのが好ましい。なお、膜厚は、成膜時間を調整することにより、設定することができる。
前記基体は、前記ペロブスカイト膜を支持できるものであれば特に限定されない。前記基体の材料も、本発明の目的を阻害しない限り特に限定されず、公知の基体であってよく、有機化合物であってもよいし、無機化合物であってもよい。多孔質構造体であってもよい。前記基体の形状としては、どのような形状のものであってもよく、あらゆる形状に対して有効であり、例えば、平板や円板等の板状、繊維状、棒状、円柱状、角柱状、筒状、螺旋状、球状、リング状などが挙げられるが、本発明においては、基板が好ましい。基板の厚さは、本発明においては特に限定されないが、0.5μm〜100mmが好ましく、1μm〜10mmがより好ましい。
より具体的には、電子輸送層の空孔率Cとしては、緻密層であるのが好ましく、より具体的には例えば、約20%以下であるのが好ましく、約5%以下であるのがより好ましく、約2%以下であるのが最も好ましい。これにより、短絡防止や整流作用といった効果をより向上することができる。ここで、電子輸送層の空孔率の下限は、可能な限り小さいことが好ましいため、特に限定されないが、通常、約0.05%以上である。
1.成膜装置
図1を用いて、本実施例で用いたミストCVD装置1を説明する。ミストCVD装置1は、キャリアガスを供給するキャリアガス源2と、キャリアガス源2から送り出されるキャリアガスの流量を調節するための流量調節弁3と、原料溶液4aが収容されるミスト発生源4と、水5aが入れられる容器5と、容器5の底面に取り付けられた超音波振動子6と、成膜室7と、ミスト発生源4から成膜室7までをつなぐ供給管9と、成膜室7内に設置されたホットプレート8とを備えている。なお、ホットプレート8上には、基板10が設置されている。
メチルアンモニウム鉛ヨウ化物をγ-ブチロラクトンに混合し、これを原料溶液とした。なお、溶液中のメチルアンモニウム鉛ヨウ化物のモル濃度は0.011mol/Lとした。
上記2.で得られた原料溶液4aをミスト発生源4内に収容した。次に、基板10として、15mm角のガラス/ITO基板をホットプレート8上に設置し、ホットプレート8を作動させて成膜室7内の温度を120℃にまで昇温させた。次に、流量調節弁3a、3bを開いて、キャリアガス源であるキャリアガス供給手段2a、2bからキャリアガスを成膜室7内に供給し、成膜室7の雰囲気をキャリアガスで十分に置換した後、キャリアガスの流量を4L/分に調節した。なお、キャリアガスとして窒素を用いた。
次に、超音波振動子6を2.4MHzで振動させ、その振動を、水5aを通じて原料溶液4aに伝播させることによって、原料溶液4aを霧化させてミスト4bを生成させた。このミスト4bが、キャリアガスによって、供給管9内を通って、成膜室7内に導入され、大気圧下、120℃にて、成膜室7内でミストが熱反応して、基板10上に膜が形成された。なお、膜厚は1μmであり、成膜時間は20分間であった。
XRD回折装置を用いて、ペロブスカイト膜の同定を行った。結果を図2に示す。また、得られた膜につき、SEM観察を行った。SEM像を図3に示す。
成膜温度を130℃にしたこと以外は、実施例1と同様にしてペロブスカイト膜を製造した。実施例1と同様にして、X線回折装置を用いて、結晶膜の同定を行ったところ、得られた膜は、ペロブスカイト膜であった。なお、XRDチャートを図4に示す。
成膜温度を125℃にしたこと以外は、実施例1と同様にしてペロブスカイト膜を製造した。実施例1と同様にして、X線回折装置を用いて、結晶膜の同定を行ったところ、得られた膜は、ペロブスカイト膜であった。なお、XRDチャートを図5に示す。
成膜温度を110℃にしたこと以外は、実施例1と同様にしてペロブスカイト膜を製造した。実施例1と同様にして、X線回折装置を用いて、結晶膜の同定を行ったところ、得られた膜は、ペロブスカイト膜であった。
実施例1で用いた原料溶液と同じものを、スプレーで、ホットプレート(温度:140℃)上に設置したガラス/ITO基板に吹き付け、ペロブスカイト膜を得ようと試みたが、そもそも基板に膜がつかず、このような方法でペロブスカイト膜を得るには、大量に吹き付けて、さらに、少なくともアニール処理が必要と思われる。
成膜温度を115℃にしたこと以外は、実施例1と同様にしてペロブスカイト膜を製造した。実施例1と同様にして、X線回折装置を用いて、結晶膜の同定を行ったところ、得られた膜は、ペロブスカイト膜であった。なお、XRDチャートを図6に示す。
2 キャリアガス源
3 流量調節弁
4 ミスト発生源
4a 原料溶液
4b ミスト
5 容器
5a 水
6 超音波振動子
7 成膜室
8 ホットプレート
9 供給管
10 基板
Claims (13)
- ペロブスカイト構造体の前駆体溶液を霧化または液滴化し、得られたミストまたは液滴をキャリアガスで基体まで搬送し、ついで前記ミストまたは液滴を熱反応させて前記基体上に前記ペロブスカイト構造体を成膜することを特徴とするペロブスカイト膜の製造方法。
- 前駆体溶液が有機金属ハロゲン化物を含む請求項1記載の製造方法。
- 前駆体溶液がアンモニウム化合物を含む請求項1または2に記載の製造方法。
- 前駆体溶液の溶媒が有機溶媒である請求項1〜3のいずれかに記載の製造方法。
- 有機溶媒が、非プロトン性溶媒である請求項4記載の製造方法。
- 有機溶媒が、下記式(1)で表される請求項4または5に記載の製造方法。
- 有機溶媒が、下記式(2)で表される請求項4または5に記載の製造方法。
- 熱反応を、250℃以下の温度で行う請求項1〜7のいずれかに記載の製造方法。
- 基体が、ガラス基板である請求項1〜8のいずれかに記載の製造方法。
- 基体が、スズドープ酸化インジウム膜またはフッ素ドープ酸化インジウム膜を含む請求項1〜9のいずれかに記載の製造方法。
- 基体が、チタニア膜を含む請求項1〜10のいずれかに記載の製造方法。
- 請求項1〜11のいずれかに記載の製造方法を用いて製造されたペロブスカイト膜。
- 請求項12記載のペロブスカイト膜を含む光電変換素子。
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WO2023234118A1 (ja) * | 2022-06-03 | 2023-12-07 | 東洋紡株式会社 | 光電変換素子及びその製造方法 |
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