JP2017107106A5 - - Google Patents

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Publication number
JP2017107106A5
JP2017107106A5 JP2015241643A JP2015241643A JP2017107106A5 JP 2017107106 A5 JP2017107106 A5 JP 2017107106A5 JP 2015241643 A JP2015241643 A JP 2015241643A JP 2015241643 A JP2015241643 A JP 2015241643A JP 2017107106 A5 JP2017107106 A5 JP 2017107106A5
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JP
Japan
Prior art keywords
stage
axis direction
tilt correction
adjustment
adjusting
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Application number
JP2015241643A
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Japanese (ja)
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JP6643072B2 (en
JP2017107106A (en
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Priority claimed from JP2015241643A external-priority patent/JP6643072B2/en
Priority to JP2015241643A priority Critical patent/JP6643072B2/en
Priority to US15/780,372 priority patent/US20180373015A1/en
Priority to CN201680072642.XA priority patent/CN108369331B/en
Priority to EP16815977.0A priority patent/EP3387477B1/en
Priority to PCT/JP2016/086318 priority patent/WO2017099104A2/en
Publication of JP2017107106A publication Critical patent/JP2017107106A/en
Publication of JP2017107106A5 publication Critical patent/JP2017107106A5/ja
Publication of JP6643072B2 publication Critical patent/JP6643072B2/en
Application granted granted Critical
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Anticipated expiration legal-status Critical

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Claims (1)

前記第１ステージの上面の前記Ｚ軸方向に対する傾きを調整する第１の調整手段と、
前記第２のマークの少なくとも３つの位置におけるフォーカス位置に基づいて、前記第１の調整手段を用いて、前記第１ステージのＸＹ面が前記Ｚ軸方向に垂直な面と平行になるように調整する第１のあおり補正手段と、をさらに備え、
前記第１の取得手段は、前記第１のあおり補正手段による調整を行った後、前記ステージ基準位置を決定することを特徴とする請求項７に記載の顕微鏡システム。
First adjusting means for adjusting an inclination of the upper surface of the first stage with respect to the Z-axis direction;
Based on the focus positions at at least three positions of the second mark, the first adjustment unit is used to adjust the XY plane of the first stage to be parallel to the plane perpendicular to the Z-axis direction. First tilt correction means for
The microscope system according to claim 7, wherein the first acquisition unit determines the stage reference position after the adjustment by the first tilt correction unit.
JP2015241643A 2015-12-10 2015-12-10 Microscope system and control method thereof Active JP6643072B2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2015241643A JP6643072B2 (en) 2015-12-10 2015-12-10 Microscope system and control method thereof
PCT/JP2016/086318 WO2017099104A2 (en) 2015-12-10 2016-12-07 Microscope system and method of controlling the same
CN201680072642.XA CN108369331B (en) 2015-12-10 2016-12-07 Microscope system and control method thereof
EP16815977.0A EP3387477B1 (en) 2015-12-10 2016-12-07 Microscope system and method of controlling the same
US15/780,372 US20180373015A1 (en) 2015-12-10 2016-12-07 Microscope system and method of controlling the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015241643A JP6643072B2 (en) 2015-12-10 2015-12-10 Microscope system and control method thereof

Publications (3)

Publication Number Publication Date
JP2017107106A JP2017107106A (en) 2017-06-15
JP2017107106A5 true JP2017107106A5 (en) 2019-01-24
JP6643072B2 JP6643072B2 (en) 2020-02-12

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Family Applications (1)

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JP2015241643A Active JP6643072B2 (en) 2015-12-10 2015-12-10 Microscope system and control method thereof

Country Status (5)

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US (1) US20180373015A1 (en)
EP (1) EP3387477B1 (en)
JP (1) JP6643072B2 (en)
CN (1) CN108369331B (en)
WO (1) WO2017099104A2 (en)

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