JP2017102257A5 - - Google Patents
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- JP2017102257A5 JP2017102257A5 JP2015235065A JP2015235065A JP2017102257A5 JP 2017102257 A5 JP2017102257 A5 JP 2017102257A5 JP 2015235065 A JP2015235065 A JP 2015235065A JP 2015235065 A JP2015235065 A JP 2015235065A JP 2017102257 A5 JP2017102257 A5 JP 2017102257A5
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- JP
- Japan
- Prior art keywords
- state
- optical element
- light modulator
- spatial light
- information
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 230000003287 optical effect Effects 0.000 claims 45
- 238000000034 method Methods 0.000 claims 26
- 230000005540 biological transmission Effects 0.000 claims 2
- 230000007547 defect Effects 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015235065A JP6676942B2 (ja) | 2015-12-01 | 2015-12-01 | 制御装置及び制御方法、露光装置及び露光方法、デバイス製造方法、データ生成方法、並びに、プログラム |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015235065A JP6676942B2 (ja) | 2015-12-01 | 2015-12-01 | 制御装置及び制御方法、露光装置及び露光方法、デバイス製造方法、データ生成方法、並びに、プログラム |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017102257A JP2017102257A (ja) | 2017-06-08 |
| JP2017102257A5 true JP2017102257A5 (cg-RX-API-DMAC10.html) | 2018-12-13 |
| JP6676942B2 JP6676942B2 (ja) | 2020-04-08 |
Family
ID=59015352
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015235065A Active JP6676942B2 (ja) | 2015-12-01 | 2015-12-01 | 制御装置及び制御方法、露光装置及び露光方法、デバイス製造方法、データ生成方法、並びに、プログラム |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6676942B2 (cg-RX-API-DMAC10.html) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA3119884C (en) * | 2018-11-14 | 2025-04-08 | 11093606 Canada Ltd. | SPATIAL MODULATION DEVICE |
| JP7303701B2 (ja) * | 2019-08-19 | 2023-07-05 | 株式会社オプトラン | 光学膜厚制御装置、薄膜形成装置、光学膜厚制御方法および薄膜形成方法 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7379579B2 (en) * | 2001-11-27 | 2008-05-27 | Asml Netherlands B.V. | Imaging apparatus |
| US6618185B2 (en) * | 2001-11-28 | 2003-09-09 | Micronic Laser Systems Ab | Defective pixel compensation method |
| US6963434B1 (en) * | 2004-04-30 | 2005-11-08 | Asml Holding N.V. | System and method for calculating aerial image of a spatial light modulator |
| US7123348B2 (en) * | 2004-06-08 | 2006-10-17 | Asml Netherlands B.V | Lithographic apparatus and method utilizing dose control |
| JP4758443B2 (ja) * | 2005-01-28 | 2011-08-31 | エーエスエムエル ホールディング エヌ．ブイ． | 大域的最適化に基づくマスクレスリソグラフィ・ラスタライゼーション技術の方法、装置およびコンピュータ読取可能媒体 |
| JP2009217189A (ja) * | 2008-03-13 | 2009-09-24 | Hitachi Via Mechanics Ltd | マスクレス露光装置 |
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2015
- 2015-12-01 JP JP2015235065A patent/JP6676942B2/ja active Active