JP2017087408A - Pressurizer, pressurization method and pressurization program - Google Patents

Abstract

PROBLEM TO BE SOLVED: To freely set a pressurization force from the dead weight or less to the dead weight or more by measuring the dead weight of a slide unit to enable the setting of a set pressurization force without making a user aware of the dead weight of the slide unit.SOLUTION: A dead weight measurement part 7 measure the dead weight of a slide unit 2, positioned at a bottom dead point of a set stroke, by pulling the slide unit 2 upward under the thrust of a magnetic operation element 3 by energizing the magnetic operation element 3 in negative polarity at a height position where the slide unit 2 is separated above from an object. A pressurization part 8 controlling the drive of a Z-axis stage 1 and that of the magnetic operation element 3 on the basis of detection signals of a bottom dead point sensor 5, thereby energizing the magnetic operation element 3 with a current value equivalent to a difference of (set pressurization value-target value) to impress the pressurization force by the magnetic operation element 3 on the object in the state that the Z-axis stage 1 is stopped at a position of a height H5 where the slide unit 2 can vertically slide within a range of the set stroke with respect to the object.SELECTED DRAWING: Figure 1

Description

  The present invention makes it possible to set the set pressure without making the user aware of the weight of the slide unit by measuring the weight of the slide unit, and to freely set the pressure from the weight of the slide unit to the weight of the slide unit. The present invention relates to an apparatus, a pressing method, and a pressing program.

  For example, polishing / cutting is performed by applying a load below the Z-axis. Taking polishing as an example, the polishing apparatus polishes the sample while applying a load below the Z-axis. Taking cutting as an example, drilling with a drill is performed by an NC machine.

  In the polishing apparatus, a horizontally rotating polishing disk and a sample holder to which a polishing object is fixed are arranged to face each other in the vertical direction, and a slide unit supporting the sample holder is lowered in the Z-axis direction to The polishing object fixed to a sample holder is brought into contact with the polishing disk, and the polishing object is polished by the polishing disk while applying a load below the Z axis to the polishing object.

  When drilling with a drill by the NC processing machine, the drilling is performed on a workpiece by applying a load below the Z axis to the drill.

  As described above, when polishing / cutting, etc., it is necessary to apply a load below the Z-axis, but if the load below the Z-axis is not appropriate, errors will occur in polishing / cutting, etc. Therefore, it is necessary to set the load below the Z-axis to be appropriate for polishing / cutting or the like.

  The direction of the force applied as the polishing load is below the Z axis, and the component of the force is the sum of the movable part of the slider unit, the sample holder, and the weight of the sample (hereinafter referred to as the total weight). When adjusting the polishing load with this configuration, the following two cases can be considered. In the following description, the polishing load will be described as an example, but this is the same when cutting or the like is performed.

When it is desired to increase the polishing load from the total weight, a force applied to the polishing board surface is added by a method of placing a weight on the movable side of the slide unit (Patent Document 1) or applying pressure with a spring.
Conversely, when it is desired to reduce the polishing load from the total weight, a method such as supporting the slide unit with a spring in a direction in which the slide unit is lifted upward in the Z-axis, or supporting a part of its own weight with a counterweight mechanism or the like (Patent Document 1). ).

JP 2003-324088 A

  However, in the load control using the spring described above, the force generated by the spring due to the stroke changes depending on the spring constant of the spring, and therefore, harmful phenomena such as resonance are likely to occur.

  Furthermore, in the load control using a spring, some kind of feedback control must be performed for fine load control. For that purpose, a load sensor is used to measure the pressure applied to the spring or to provide a scale for measuring the amount of expansion and contraction of the spring. Feedback control must be performed. The same applies to load control using a weight.

  In load control using a spring or weight, the load below the Z-axis due to the spring or weight always acts on the object to be polished or the object to be processed. When adjusting the height position of the slide unit to contact the workpiece etc. at the initial stage, if the specimen of the sample holder or the drill for cutting is brought into direct contact with the grinding machine or workpiece, the specimen or machining There is a risk of damaging the object and the teeth of the drill. Therefore, the height position of the slide unit has been adjusted by contacting the dummy at these height positions at positions other than the polishing machine or the workpiece.

  For this reason, a height mechanism that adjusts the height position of the dummy to the height position of the polishing machine, the workpiece, etc. is required, which increases the size of the device and increases the cost of the device, and the slide unit at the initial stage. There was a problem that time for polishing and processing could not be shortened because it took time to adjust the height.

  An object of the present invention is to enable setting of a set pressure without making the user aware of the weight of the slide unit by measuring the weight of the slide unit, and to freely set a pressure greater than or equal to the weight of the slide unit. A pressurizing apparatus, a pressurizing method, and a pressurizing program are provided.

  In order to achieve the above object, a pressurizing apparatus according to the present invention is a pressurizing apparatus that lowers a Z-axis stage in a vertical direction and applies a pressure force to an object. Is slidably supported in the direction, and the coil is energized by the interaction of the slide unit that descends to the bottom dead center with its own weight and the magnetic force of the magnetic circuit and the magnetic force generated by energizing the coil in the magnetic circuit. A magnetic actuation element that applies a thrust proportional to the current value to the slide unit via a connecting shaft, a drive circuit that drives and controls the Z-axis stage and the magnetic actuation element, and a bottom dead center of the set stroke. A bottom dead center sensor that detects the slide unit that descends and detects the slide unit that rises from the bottom dead center of the set stroke; and the bottom dead center sensor Based on the detection signal, the drive circuit drives and controls the Z-axis stage and the magnetic actuating element, and the slide unit is lifted upward away from the object by thrust generated by energizing the magnetic actuating element. A self-weight measuring unit that measures the self-weight of the slide unit based on a current value supplied to the magnetic actuating element at the time, and the Z-axis stage and the magnetic operation by the drive circuit based on a detection signal of the bottom dead center sensor In a state where the Z-axis stage is stopped at a height position at which the slide unit can slide up and down within the range of the set stroke with respect to the object by driving and controlling the element, A pressurization unit that applies a current value corresponding to a difference between a set pressurization value and a self-weight value) and applies a pressure applied by the magnetic actuator to the object. To.

  The pressurizing unit can set the pressure applied by the magnetic actuating element to a pressure equal to or less than the weight of the slide unit by switching energization to the magnetic actuating element to a negative polarity, and the magnetic actuating element By switching the energization to positive polarity, the pressure of the magnetic actuating element can be set to a pressure greater than the weight of the slide unit.

  The pressurizing unit takes over the current value at the time of measuring the self-weight of the self-weight measuring unit, gradually decreases the current value, moves the slide unit to the bottom dead center of the set stroke, and maintains the state of the slide unit. It has the function to contact with the said target object, It is characterized by the above-mentioned.

  A pressurizing method according to the present invention is a pressurizing method in which a Z-axis stage is lowered in a vertical direction to apply a pressure force to an object, and the Z-axis stage and the Z-axis stage are vertically moved within a set stroke range. A slide unit that is slidably supported by its own weight and descends to the bottom dead center of the set stroke, and drives and controls the Z-axis stage and the magnetic actuator based on the detection signal of the bottom dead center sensor to A self-weight measuring step for measuring the self-weight of the slide unit based on a current value to be supplied to the magnetic operating element when the slide unit is pulled upward from the object by thrust generated by energizing the operating element; Based on the detection signal of the bottom dead center sensor, the Z-axis stage and the magnetic actuating element are driven and controlled, and the slide unit is placed on the object. In the state where the Z-axis stage is stopped at a height position that can be slid up and down within the set stroke range, a current value corresponding to a difference between the set pressure value and the dead weight value is applied to the magnetic actuator. Performing a pressurizing step of energizing and applying a pressure applied by the magnetic actuating element to the object.

  In the pressurizing step, by switching the energization to the magnetic actuating element to negative polarity, the pressurizing force by the thrust of the magnetic actuating element is set to a pressurizing force less than the weight of the slide unit, and By switching energization to positive polarity, the pressure applied by the magnetic actuating element is set to a pressure greater than the weight of the slide unit.

  In the pressurizing step, the current value at the time of self-weight measurement of the self-weight measuring unit is taken over and the current value is gradually decreased to move the slide unit to the bottom dead center of the set stroke, and the state is maintained and the slide unit is maintained. It has the function to contact with the said target object, It is characterized by the above-mentioned.

  The pressurization program according to the present invention is a pressurization program that performs control to lower the Z-axis stage in the vertical direction and apply an applied pressure to the object, and based on the detection signal of the bottom dead center sensor, Drive control of the magnetic actuating element, and the slide unit is lifted upwardly away from the object by thrust generated by energization of the magnetic actuating element, and based on the current value of energizing the magnetic actuating element based on the current value of the slide unit A self-weight measuring function for measuring the self-weight, and driving control of the Z-axis stage and the magnetic actuating element based on a detection signal of the bottom dead center sensor, so that the slide unit has a range of the set stroke with respect to the object. The Z-axis stage is stopped at a height position in which the Z-axis stage can be slid up and down. It said pressure applied by said magnetic actuation device by energizing the current values, characterized in that to execute a pressure function to be applied to the object, to the computer.

  In the computer, by switching the energization to the magnetic actuating element to negative polarity, the pressurizing force by the magnetic actuating element is set to a pressurizing force below the dead weight of the slide unit, and the energization to the magnetic actuating element is positive. By switching to, the function of setting the pressure applied by the magnetic actuating element to a pressure greater than the weight of the slide unit is executed.

  The computer takes over the current value at the time of the self-weight measurement of the self-weight measuring unit and gradually reduces the current value to move the slide unit to the bottom dead center of the set stroke, and maintains the state to maintain the slide unit A function of bringing the object into contact with an object is executed.

  As described above, according to the present invention, it is possible to set the set pressure without making the user aware of the weight of the slide unit by measuring the weight of the slide unit.

  Further, by measuring the weight of the slide unit, it is possible to freely set a pressure force that is less than or equal to the weight of the slide unit.

It is a block diagram which shows the structure of the pressurization apparatus which concerns on embodiment of this invention. It is a block diagram which shows the specific example of the control unit shown in FIG. It is a perspective view which shows the grinding | polishing apparatus which grind | polishes the sample to which the pressurization apparatus which concerns on embodiment of this invention is applied. It is sectional drawing which shows the relationship between the slide unit in the pressurization apparatus which concerns on embodiment of this invention, and the voice coil motor (VCM) which is a magnetic actuating element. (A) is a characteristic diagram showing the relationship between the current value energizing the voice coil motor and the thrust, and (b) is a characteristic showing the relationship of measuring the weight of the slide unit from the current value (thrust) energizing the voice coil motor. FIG. It is a flowchart explaining the operation | movement which performs a dead weight measurement just before a grinding | polishing operation | movement start in the pressurization apparatus shown in FIG. It is a flowchart explaining operation | movement from a grinding | polishing start to completion | finish of grinding | polishing in the pressurization apparatus shown in FIG. It is a flowchart explaining the operation | movement which reduces the contact pressure at the time of a slide unit contacting a target object in the pressurization apparatus shown in FIG. It is a flowchart explaining the operation | movement which prepares before a grinding | polishing start in the pressurization apparatus shown in FIG. It is a flowchart explaining the operation | movement which sets a pressurizing force in the pressurization apparatus shown in FIG. It is a mechanism figure which shows a series of operation | movement of the slide unit in the pressurization apparatus shown in FIG. It is a mechanism figure which shows a series of operation | movement of the slide unit in the pressurization apparatus shown in FIG. It is a mechanism figure which shows a series of operation | movement of the slide unit in the pressurization apparatus shown in FIG. It is a mechanism figure which shows a series of operation | movement of the slide unit in the pressurization apparatus shown in FIG. It is a mechanism figure which shows a series of operation | movement of the slide unit in the pressurization apparatus shown in FIG. (A) is sectional drawing which shows the improvement of the voice coil motor (VCM) used as a magnetic actuating element for the pressurization device concerning an embodiment of the present invention, (b) is a voice coil motor (VCM) which is a magnetic actuating element. It is a characteristic view explaining a thrust characteristic.

  The pressurizing apparatus according to the embodiment of the present invention applies a constant pressure in the vertical direction (Z-axis direction), such as a polishing apparatus for polishing a sample or a plywood laminating apparatus for laminating and bonding a plurality of plywoods. The present invention can be applied to an apparatus for applying to the above.

In the following description, the pressurizing apparatus according to the embodiment of the present invention will be described along with an example in the case where it is applied to the above-described polishing apparatus. Note that the application of the pressurizing apparatus according to the embodiment of the present invention is not limited to the above-described polishing apparatus or plywood laminating apparatus, and applies a constant pressure to the object in the vertical direction (Z-axis direction). Any device may be used as long as it is necessary.
When polishing a sample, a sample as an object to be polished is attached to a sample holder that is slidable in the Z-axis direction (vertical direction) with respect to a rotating polishing disk, and the sample holder is attached according to the amount of polishing. The sample is polished by the polishing disk to a set polishing amount while vertically moving in the axial direction. When polishing the sample, it is necessary to apply a set polishing load (pressure) to the sample.

As an existing technology, a polishing apparatus that lowers the Z-axis stage 1 in the vertical direction and applies a pressure to the object has been developed. In the embodiment of the present invention, the slide unit 2 is vertically mounted on the Z-axis stage 1. The structure is characterized in that it is supported so as to be slidable within a set stroke range in the direction, and the pressure applied by the slide unit 1 is applied instead of the pressure applied by lowering the Z-axis stage 1. In addition, there is a feature in that a constant pressure is applied without being influenced by the stroke of the slide unit 1.
In the polishing apparatus to which the pressurizing apparatus according to the embodiment of the present invention is applied, the sample 12 held by the slide unit 2 comes into contact with the polishing board 21 as the slide unit 2 descends, and magnetic A pressing force due to the thrust of the actuating element 3 is applied, and the sample 12 is polished by the polishing board 21. In the polishing apparatus, from the time when the sample 12 held on the slide unit 12 comes into contact with the polishing board 21, pressure is applied to the sample 12 by receiving the thrust of the magnetic actuating element 3 applied to the slide unit 12.

  As shown in FIGS. 1 and 2, the pressurizing device according to the embodiment of the present invention is supported by the Z-axis stage 1 so as to be slidable in the vertical direction within a set stroke range, and is lowered to the bottom dead center of the set stroke by its own weight. The slide unit 2 is attached to the Z-axis stage 1, and the coil 3d is energized by the interaction between the magnetic force of the magnetic circuit (magnet 3b) and the magnetic force generated by energizing the coil 3d in the magnetic circuit (magnet 3b). Drive circuit 4a, 4b for driving and controlling the magnetic actuating element 3 (see the voice coil motor in FIG. 4) 3 for exciting the thrust proportional to the current value to be vertically driven, and the Z-axis stage 1 and the magnetic actuating element 3. And detecting the slide unit 1 descending to the bottom dead center of the set stroke and detecting the slide unit 2 rising from the bottom dead center of the set stroke. A sensor 5, the driving circuit 4a, and a control unit 6 for driving and controlling 4b, has. The drive circuit 4a is a VCM drive circuit that controls the drive of the magnetic actuator 3, and the drive circuit 4b is a Z-axis stage drive circuit that controls the drive source 24 provided in the Z-axis stage 1. It may be expressed as circuits 4a and 4b.

  As shown in FIG. 2, the control unit 6 controls the drive of the Z-axis stage 1 and the magnetic actuating element 3 by the drive circuits 4a and 4b based on the detection signal of the bottom dead center sensor 5, and the magnetic unit A self-weight measuring unit 7 that measures the self-weight of the slide unit 2 based on the value of the current that is energized to the magnetic actuating element 3 by pulling the slide unit 1 upward away from the object by thrust generated by energizing the actuating element 3. Then, based on the detection signal of the bottom dead center sensor 5, the drive circuits 4a and 4b drive and control the Z-axis stage 1 and the magnetic actuating element 3, so that the slide unit 2 controls the object. In a state where the Z-axis stage 1 is stopped at a height position that can be slid up and down within the set stroke range, an electric power corresponding to a difference (set pressure value−self-weight value) to the magnetic actuating element 3. And having a pressure portion 8 for applying the pressure applied by said magnetic actuation device 3 is energized the values to the magnetic actuation element to the subject matter, the.

  The pressurizing unit 8 can set the pressure applied by the magnetic actuating element 3 to a pressure equal to or less than the weight of the slide unit 2 by switching the energization of the magnetic actuating element 3 by the drive circuit 4a to negative polarity. In addition, by switching the energization of the magnetic actuation element 3 by the drive circuit 4a to positive polarity, the pressurization force by the magnetic actuation element 3 can be set to a pressurization force higher than the weight of the slide unit 1 itself. It has a function.

  As shown in FIG. 2, the control unit 6 has a height measuring sensor 9 that measures the height position of the Z-axis stage 1. A linear encoder is used as the height measuring sensor 9 and is installed in the vertical direction along the guide 23 shown in FIG. 1 to measure the height of the Z-axis stage 1 that moves up and down as guided by the guide 23. It is like that. The weight measuring unit 7 and the pressurizing unit 8 have a memory 10.

  Next, in the embodiment of the present invention, as shown in FIG. 4, a voice coil motor is used as the magnetic actuating element 3. As shown in FIG. 5A, the voice coil motor as the magnetic actuating element 3 is linearly proportional to the relationship between the current value applied to the coil 3d of the voice coil motor 3 and the thrust generated by the voice coil motor 3. Have a relationship. Furthermore, since the current value energized to the coil 3d of the voice coil motor 3, that is, the thrust generated by the boil coil motor 3, indicates the ability to lift the slide unit 2 upward, the thrust of the voice coil motor 3 and the slide unit As shown in FIG. 5B, the relationship between the weight of 2 and its own weight is linearly proportional. The memory 10 stores data shown in FIGS. 5A and 5B and data such as a set pressure applied to the object and a current value corresponding thereto.

  As shown in FIGS. 1 and 11, the pressurizing device according to the embodiment of the present invention supports the slide unit 2 on the Z-axis stage 1 so as to be slidable in the vertical direction within a set stroke range. The bottom dead center sensor 5 detects the slide unit 2 lowered to the bottom dead center of the set stroke and lowered to the bottom dead center of the set stroke, and the slide unit 2 raised from the bottom dead center of the set stroke. Based on the detection signal of the bottom dead center sensor 5, the interaction between the magnetic force of the magnetic circuit of the magnetic actuating element 3 attached to the Z-axis stage 1 and the magnetic force generated by energization of the coil 3d in the magnetic circuit. A thrust proportional to a current value supplied to the coil 3d is excited, and the slide unit 2 is moved to the subject by a thrust generated by applying current to the magnetic actuating element 3. The weight of the slide unit 2 is measured on the basis of the value of the current that is pulled upward and away from the magnetic actuation element 3, and the detection signal of the bottom dead center sensor 5 is detected as shown in FIGS. 12 to 15. On the basis of this, in a state in which the Z-axis stage 1 is stopped at a position of a height H5 (H5 <H2) where the slide unit 2 can slide up and down within the set stroke range with respect to the object. A current value corresponding to the difference of (set pressure value−self-weight value) is applied to the actuating element 3 to apply the pressure applied by the magnetic actuating element 3 to the object.

  In the above description, the present invention is constructed as a pressurizing device, but may be constructed as a pressurizing program. The pressurizing program according to the present invention is a pressurizing program for performing control for lowering the Z-axis stage in the vertical direction and applying a pressurizing force to an object, based on a detection signal of the bottom dead center sensor 5. The Z-axis stage 1 and the magnetic actuating element 3 are driven and controlled, and the slide unit 2 is lifted upwardly away from the object by the thrust generated by energizing the magnetic actuating element 3, and the magnetic actuating element 3 is energized. A self-weight measuring function for measuring the self-weight of the slide unit 2 based on a current value to be driven, and driving control of the Z-axis stage 1 and the magnetic actuating element 3 based on a detection signal of the bottom dead center sensor 5; In a state where the Z-axis stage 1 is stopped at a height position H5 where the slide unit 2 can slide up and down within the set stroke range with respect to the object, And causing the moving element 3 to execute a pressurizing function of applying a current value corresponding to the difference of (set pressurization value−self-weight value) and applying the pressure applied by the magnetic actuating element 3 to the object. Build as a configuration.

  In the pressurizing program, the computer is configured to set the pressure applied by the magnetic operating element 3 to a pressure equal to or less than the weight of the slide unit 2 by switching the energization to the magnetic operating element 3 to negative polarity. By switching the energization to the magnetic actuating element 3 to the positive polarity, the function of setting the pressurizing force by the magnetic actuating element 3 to a pressurizing force higher than the weight of the slide unit 2 is executed. In addition, the computer takes over the current value at the time of measuring the dead weight of the dead weight measuring unit and gradually decreases the current value to move the slide unit 2 to the bottom dead center of the set stroke, and maintains the state of the slide unit 2 The unit 2 is constructed so as to execute a function of bringing the unit 2 into contact with the object.

  In FIG. 3 showing a polishing apparatus to which a pressurizing apparatus according to an embodiment of the present invention is applied, a Z-axis direction is set in the vertical direction of the drawing, an X-axis direction is set in the horizontal direction of the drawing, and a Y-axis direction is set in the depth direction of the drawing. To explain. The polishing by the polishing apparatus according to the embodiment of the present invention is not limited to simply polishing a sample, but for obtaining sample information necessary for observation and removal of a laminated interface structure, multilayer film (thin film), and crystal analysis. This includes polishing, failure analysis of semiconductors, structural analysis of plated layers, and surface polishing and cross-section polishing of electronic components.

The polishing apparatus shown in FIG. 3 includes a polishing board 21 that is rotatably supported by the apparatus main body 20 and includes an abrasive (not shown) on the upper surface, and three axes that are orthogonal to the X-axis direction, the Y-axis direction, and the Z-axis direction. A Z-axis base 22 that moves while being guided by a guide 22a in the direction, a Z-axis stage 1 that is supported by the Z-axis base 22 so as to be movable in the Z-axis direction (vertical direction), and a Z-axis that is supported by the Z-axis stage 1 And a slide unit 2 supported so as to be slidable in a direction (vertical direction). In the polishing apparatus shown in FIG. 3, the sample 12 is held by the slide unit 2, and the sample 12 comes into contact with the polishing plate 21 as the Z-axis stage 1 and the slide unit 2 move downward, and the further slide unit 2. A pressing force (polishing pressure) is applied along with the downward movement of. In the case of a polishing apparatus, a holder (not shown) is attached to the lower end of the slide unit 2, and the sample 12 is held by the holder. In this case, the weight of the slide unit 2 is the weight of the slide unit 2 and the holder (not shown). In addition, the total weight of the sample 12 is obtained.
Note that the polishing apparatus itself shown in FIG. 3 has no characteristics, and the present inventors have disclosed the specific structure of the polishing apparatus shown in FIG. 7 in Japanese Patent Application No. 2014-180567, and description of the specific structure will be made. Is omitted. Below, only the structure which has the characteristics in embodiment of this invention is demonstrated.

A specific relationship between the Z-axis stage 1 and the slide unit 2 will be described in detail with reference to FIG. In FIG. 4, a lifting mechanism for moving the Z-axis stage 1 in the Z-axis direction (vertical direction) is a general purpose one, and the lifting mechanism is not shown. The Z-axis stage 1 includes the Z-axis motor 24 shown in FIG. 3, and the Z-axis motor 24 is driven and controlled by the Z-axis stage drive circuit 4 b of FIG. It moves in the Z-axis direction (vertical direction) in FIG. 4 via the mechanism.
The Z-axis stage 1 is guided by vertical guides 23, 23 of the Z-axis base 22 and can move in the Z-axis direction (vertical direction). The Z-axis stage 1 further includes a drive source 24. The height position with respect to the polishing disk 21 as the object is set by moving in the vertical direction in the Z-axis direction by driving the Z-axis motor 24. The height position of the Z-axis stage 1 is measured by a linear encoder installed along the guide 23. The height position sensor 9 may be other than the linear encoder as long as it can measure the height of the Z-axis stage 1.

  As shown in FIG. 4, the Z-axis stage 1 has two guides 13 and 13 extending in the vertical direction. The slide unit 2 is supported by the guides 13 and 13 of the Z-axis stage 1 so as to be slidable in the Z-axis direction (vertical direction) within a set stroke range. Slide to the bottom dead center of the set stroke. FIG. 4 shows that the slide unit 2 is located at the bottom dead center of the set stroke under its own weight. When the slide unit 2 slides to the bottom dead center of the set stroke, a stopper 1a that prevents the slide unit 2 from coming down from the Z-axis stage 1 is provided on the guides 13 and 13 of the Z-axis stage 1. It is provided at the position of the lowest point, and the bottom dead center of the set stroke of the slide unit 2 is set at that position.

  A bottom dead center sensor 5 is installed at the bottom dead center position of the set stroke of the slide unit 2. The bottom dead center sensor 5 detects the slide unit 1 that descends to the bottom dead center of the set stroke, and detects the slide unit 2 that rises from the bottom dead center of the set stroke. In the example of the bottom dead center sensor 5 shown in FIG. 4, the light emitting element 5a (or the light receiving element 5b) is attached to the Z-axis stage 1, and the light receiving element 5b (or the light emitting element 5a) is attached to the slide unit 2. The slide unit 2 is detected by turning on and off the light between 5a and the light receiving element 5b. Although an optical sensor is used as the bottom dead center sensor 5, the present invention is not limited to this, and any sensor that can detect the slide unit 2 may be used.

In the embodiment of the present invention, a voice coil motor (VCM) is used as the magnetic actuating element 3, and the relationship between the VCM 3 and the slide unit 2 will be described in detail with reference to FIG. Although a voice coil motor is used as the magnetic actuating element 3, the current value energized in the coil by the interaction between the magnetic force of the magnetic circuit and the magnetic force generated by energizing the coil in the magnetic circuit as in the voice coil motor. As long as it is configured to excite a thrust proportional to, a motor other than the voice coil motor may be used.
As shown in FIG. 4, the VCM 3 is movable in the Z-axis direction with respect to the Z-axis stage 1 and the cylindrical magnet 3b attached to the inner peripheral surface of the fixed frame 3a. And a coil 3d wound around the connecting shaft 3c in the range of the magnetic circuit G by the magnet 3b. The connecting shaft 3c is linearly moved in the Z-axis direction inside the cylindrical magnet 3b. The connecting shaft 3 c of the magnetic actuating element 3 is connected to the slide unit 2.

  The slide unit 1 is connected to the lower end of the connecting shaft 3c. Therefore, when the VCM 3 is energized to the coil 3d from the VCM drive circuit 4a, the VCM 3 interacts with the magnetic force of the magnetic circuit G by the magnet 3b and the magnetic force by the energization of the coil 3d in the magnetic circuit G. The thrust proportional to the current value supplied to the coil 3d is excited in the vertical direction, and while the current supply to the coil 3d is continued, the thrust is continuously excited in the VCM 3, and the connecting shaft 3c The slide unit 2 is guided by the guides 13 and 13 of the Z-axis stage 1 and slides in the Z-axis direction (vertical direction) by the linear movement thrust, and moves linearly. The VCM 3 switches the polarity of energization from the VCM drive circuit 4a, for example, when switched to the negative polarity (−) side, the VCM 3 excites a thrust force that linearly moves the connecting shaft 3c above the Z axis, thereby positive polarity (+). When switched to the side, the thrust that linearly moves the connecting shaft 3c below the Z-axis is excited.

(Description of operation)
Next, the case where the pressurizing force is controlled using the pressurizing apparatus according to the embodiment of the present invention will be described with reference to FIGS.

[Slide unit self-weight measurement]
6 and 11 show a case where the weight of the slide unit 2 is measured by combining the weights of a sample holder (not shown), the sample 12, the connecting shaft 3c and the coil 3d of the VCM 3, the light receiving element 5b of the bottom dead center sensor 5, and the like. This will be described with reference to FIG. As shown in FIG. 11, the movement of the Z-axis base 22 in the left-right direction is fixed.

As shown in FIG. 11, the self-weight measuring unit 7 receives the output of the height position sensor 9 and drives and controls the drive source 24 by the Z-axis stage drive circuit 4b to raise the Z-axis stage 1 to the height H1. The slide unit 2 is stopped at the height position H1, the current value to the coil 3d of the VCM 3 is set to zero, that is, a non-powered state (step S1 in FIG. 6), and the slide unit 2 is set by the weight of the slide unit 1 as shown in FIG. Slide to the bottom dead center. This height position is assumed to be H2. When the slide unit 2 slides to the bottom dead center of the set stroke, the bottom dead center sensor 5 detects the slide unit 2.
The self-weight measuring unit 7 receives the output of the bottom dead center sensor 5, and determines whether the bottom dead center sensor 5 has detected the slide unit 2 at the bottom dead center of the set stroke (step S2 in FIG. 6). When the bottom dead center sensor 5 does not detect the slide unit 2 (the bottom dead center sensor 5 is OFF), the dead weight measuring unit 7 outputs a mechanical error signal (not detected in step S2 in FIG. 6).

  The bottom dead center sensor 5 is turned on when the slide unit 2 descends to the bottom dead center of the set stroke, and the slide unit 2 is positioned at a height H2 spaced upward from the polishing board 21, as shown in FIG. That is, the slide unit 2 is hung from the Z-axis stage 1 at the bottom dead center of the set stroke.

When the bottom dead center sensor 5 detects the slide unit 2 (the bottom dead center sensor 5 is ON: detection in step S2 in FIG. 6), the dead weight measuring unit 7 switches the polarity of the VCM drive circuit 4a to the negative polarity ( Step S3 in FIG. 6), the VCM drive circuit 4a is driven and controlled, and negative current is gradually increased, for example, by 1 mA to the coil 3d of the VCM 3 to generate upward thrust in the VCM 3 (step S4 in FIG. 6).
As shown in FIG. 12, when the thrust generated by the VCM 3 exceeds the weight of the slide unit 2, the slide unit 2 is lifted upward by the thrust of the VCM 3, and the light receiving element 5b attached to the slide unit 2 is moved to the Z-axis stage. By moving away from the light emitting element 5a, the bottom dead center sensor 5 is turned off.
When the weight measuring unit 7 receives the output of the bottom dead center sensor 5 and determines that the slide unit 2 is lifted by the thrust of the VCM 3 and the bottom dead center sensor 5 is turned off (Step S5 in FIG. 6 is not detected). ), The weight of the slide unit 2 is measured based on the value of the current flowing in the coil 3d of the VCM 3 at that moment, and the measured value is stored in the memory 10 (step S6 in FIG. 6). That is, when the instantaneous current value is the current value A1 in the characteristics shown in FIGS. 5A and 5B, the self-weight measuring unit 7 indicates that the thrust generated by the VCM 3 is F1 and the current value A1. In this case, by determining that the weight of the slide unit 3 is M1, the weight of the slide unit 3 is measured, and the weight of the slide unit 2, the instantaneous current value A1, and the thrust F1 are associated with each other and stored in the memory 10.

  In the process of step S5 of FIG. 6, when the bottom dead center sensor 5 remains ON (detection of step S5 of FIG. 6), the self-weight measuring unit 7 has the maximum value of the current supplied to the coil 3d of the VCM 3. (Step S7 in FIG. 6). If the current value is not the maximum (NO in step S7 in FIG. 6), the dead weight measuring unit 7 returns the process to the process in step S4 in FIG. When the current value is the maximum (step S7 in FIG. 6: YES), the self-weight measuring unit 7 stops energizing the VCM 3 (step S8 in FIG. 6), and outputs a display indicating that the self-weight is over (step in FIG. 6). S9). In this case, the thrust generated by the VCM 3 cannot lift the slide unit 2 upward from the bottom dead center of the set stroke, that is, the weight of the slide unit 2 cannot be measured.

[Polishing operation]
Next, a series of operations from the start of polishing to the end of polishing after completion of the weight measurement of the slide unit 2 shown in FIG. 6 will be described with reference to FIG.
When the start button for starting polishing is operated as shown in step S20 of FIG. 7, a process for measuring the weight of the slide unit 1 according to the operation flow shown in FIG. 7 is executed (step 6 in FIG. 6 and step S21 in FIG. 7). The contact pressure reduction process (step S22 in FIG. 7) shown in FIG. 8 is executed. As shown in FIG. 8, the contact pressure reduction process (step S22 in FIG. 7) moves the slide unit 2 to the bottom dead center in order to detect the contact between the polishing board 21 and the sample 12 with the bottom dead center sensor 5, In addition, this is a process for minimizing damage to a polishing surface (not shown) of the polishing board 21 in contact.
Next, after rotating the polishing board 21, the Z-axis stage 1 is lowered to bring the sample 12 into contact with the polishing surface of the polishing board 21 (step S24 in FIG. 7). In this way, the polishing plate 21 is rotated to bring the sample 12 into contact with the polishing surface of the polishing plate 21, thereby reducing damage when the sample 12 contacts the polishing plate 21.
Next, after the polishing load setting process (step S25 in FIG. 7) by the pressurizing unit 8, the slide unit 2 is lowered by the linear movement of the connecting shaft 3d of the VCM 3, and the sample 12 is pressed against the polishing plate 21. The slide unit 2 gradually receives the thrust of the VCM 3 in accordance with the amount of polishing, and moves below the Z axis, and the sample 12 is polished by the polishing board 21 (step S26 in FIG. 7).
Polishing of the sample 12 by the polishing board 21 is executed up to the stop condition (step S27 in FIG. 7), and when the polishing is completed, the Z-axis stage 1 is raised from the position of the height H5 in FIG. Is detached from the polishing board 21 (step S28 in FIG. 7). Thereafter, when the Z-axis stage 1 is raised to the height H1 in FIG. 10, the energization to the VCM 3 is stopped (step S29 in FIG. 7), and accordingly, the rotation operation of the polishing board 21 is stopped (in FIG. 7). Step S30), the polishing operation ends.

[Contact pressure reduction processing]
The contact pressure reducing process executed in step 22 of FIG. 7 will be described based on the flow shown in FIG. The contact pressure reduction processing shown in FIG. 8, that is, the slide unit 2 is moved to the bottom dead center in order to detect the contact between the polishing plate 21 and the sample 12 by the bottom dead center sensor 5, and Execute contact pressure reduction processing to minimize damage to the polished surface.
The pressurizing unit 8 reads out the current value at the time of measuring the dead weight of the slide unit 2 from the memory 10 and gradually decreases the current value at the time of measuring the own weight by, for example, 1 mA (step S31 in FIG. 8), as shown in FIG. The slide unit 2 is gradually slid to the bottom dead center, and the current value energized to the coil 3d of the VCM 3 when the slide unit 2 reaches the bottom dead center, that is, the slide unit 2 reaches the stopper 1a is held. (Step 32 in FIG. 8: detection).

When the bottom dead center sensor 5 remains ON (step S32 in FIG. 8: non-detection) in the pressurizing unit 8;
It is determined whether or not the current value to the VCM 3 is zero (step S33 in FIG. 8). If the current value is not zero (NO in step S33 in FIG. 8), the process returns to step S31. When the current value is zero (YES in step S33 in FIG. 8), the pressurizing unit 8 displays a mechanical error (step S33 in FIG. 8).

When the contact pressure reduction process shown in FIG. 8 is completed, the pressurizing unit 8 lowers the Z-axis stage 1 shown in FIG. 14 as shown in FIG. 15 and performs the Z-axis lowering process shown in step S24 of FIG. This process will be described with reference to FIGS.
When the Z-axis lowering process S40 shown in FIG. 9 is started, as shown in FIG. 15, the pressurizing unit 8 controls the drive of the Z-axis motor 24 by the Z-axis drive circuit 4b so that the Z-axis stage 1 is positioned at the height H4. (Step S41 in FIG. 9). When the Z-axis stage 1 passes the position of the height H4, the bottom dead center sensor 5 is turned off.
As shown in FIG. 15, the pressurizing unit 8 obtains the output of the height position sensor 9 when the bottom dead center sensor 5 is turned OFF, and the slide unit 2 slides downward within the range of the set stroke. The Z-axis stage 1 is lowered to a possible height position H5, preferably a height position corresponding to the midpoint of the set stroke at which the slide unit 2 slides, and stopped at the height H5 (H5 <H2) ( Step S43 in FIG. 9).

[Polishing weight setting process]
A load setting process necessary for polishing will be described with reference to FIG. In step S25 of FIG. 10, the pressurizing unit 8 determines the measured value of the weight of the slide unit 2 measured by the own weight measuring unit 7, the current value at the time of measuring the own weight, the set load value of the set load (set pressure force), and The current value corresponding to the set load value is read and the magnitude of the weight of the slide unit 2 and the set load value is compared (step S50 in FIG. 10).
In step S50 of FIG. 10, when the weight of the slide unit 2 is larger than the set load value (the weight of the slide unit 2> the set load value) (step 50: YES in FIG. 10), the pressurizing unit 8 is the coil of the VCM 3. A current value corresponding to the difference of (set pressure value−self-weight value) is continuously supplied to the coil 3d of the VCM 3 while the current to be supplied to 3d remains negative (step S51 in FIG. 10). Therefore, since the thrust upward of the VCM 3 acts on the weight of the slide unit 2, the weight of the slide unit 2 is reduced and the load applied to the sample 12 is set to a load smaller than the weight of the slide unit 2. The

  In step S50 of FIG. 10, when the weight of the slide unit 2 is smaller than the set load value (the weight of the slide unit 2 <the set load value) (step 50: NO in FIG. 10), the pressurizing unit 8 is the coil of the VCM 3. The current to be supplied to 3d is switched to the positive polarity, and the current value corresponding to the difference of (set pressure value−self-weight value) is continuously supplied to the coil 3d of the VCM 3 with the positive polarity (step S52 in FIG. 10). Therefore, since the thrust downward of the VCM 3 is applied to the weight of the slide unit 2, the load applied to the sample 12 is set to be larger than the weight of the slide unit 2.

Next, a modification of the embodiment of the present invention will be described. As shown in FIG. 16B, there is a hysteresis characteristic in that the current value to the coil 3d of the VCM 3 is gradually increased and the slide unit 2 starts to move. This has a characteristic that the current vs. thrust characteristic of the VCM 3 has a gentle drum-shaped curve with the center of the stroke of the slide unit 2 as a vertex.
Therefore, as shown in FIG. 16 (a), the inner peripheral surface of the magnet 3b of the VCM 3 is configured to have a concave shape opposite to a gentle drum-shaped curve with the stroke center of the connecting shaft 3c of the VCM 3 as a vertex. Thus, magnetic force correcting means 15 for correcting the magnetic force of the magnet 3b within the sliding range of the slider unit 2 may be configured.

  As described above, according to the embodiment of the present invention, the slide unit is supported on the Z-axis stage so as to be vertically slidable within the set stroke range, and is lowered to the bottom dead center of the set stroke by the weight of the slide unit. The slide unit that descends to the bottom dead center of the set stroke and the slide unit that rises from the bottom dead center of the set stroke are detected by a bottom dead center sensor, respectively, and based on the detection signal of the bottom dead center sensor And exciting a thrust proportional to a current value supplied to the coil by an interaction between a magnetic force of a magnetic circuit of a magnetic actuating element attached to the Z-axis stage and a magnetic force generated by energizing the coil in the magnetic circuit. Thus, the slide unit is lifted upward away from the object by the thrust generated by energizing the magnetic actuating element. Based on the current value to be supplied to the serial magnetic actuation element is advantageously possible to measure the weight of the slide unit.

  Further, in a state where the Z-axis stage is stopped at a height position where the slide unit can slide up and down within the range of the set stroke with respect to the object based on a detection signal of the bottom dead center sensor, A current value corresponding to a difference of (set pressure value−self-weight value) to the magnetic actuation element can be applied to the magnetic actuation element to apply a pressure applied by the thrust of the magnetic actuation element to the object. There is an effect.

  Further, by measuring the weight of the slide unit, it is possible to set the set pressure without making the user aware of the weight of the slide unit.

  Further, by measuring the weight of the slide unit, it is possible to freely set a pressure force that is less than or equal to the weight of the slide unit.

  The pressurizing unit switches the energization to the magnetic actuating element to a negative polarity, thereby setting the pressurizing force by the thrust of the magnetic actuating element to a pressurizing force equal to or less than the weight of the slide unit. By switching the energization to the positive polarity, the pressure applied by the thrust of the magnetic actuating element can be set to a pressure greater than the weight of the slide unit.

  The self-weight measuring unit can avoid the damage of the slide unit due to the collision by gradually decreasing the current value during the self-weight measurement and soft landing the slide unit to the bottom dead center of the set stroke.

  The pressurizing unit takes over the current value at the time of measuring the self-weight of the self-weight measuring unit, gradually decreases the current value, moves the slide unit to the bottom dead center of the set stroke, and maintains the state of the slide unit. Since the slide unit can be soft-landed on the object, the slide unit can be prevented from colliding with the object and the object can be protected. can do.

  Further, as shown in FIG. 16 (b), the inner circumferential surface of the VCM magnet is configured to have a concave shape opposite to a gentle drum-shaped curve with the stroke center of the connecting shaft of the VCM as an apex. By constructing magnetic force correction means for correcting the magnetic force of the magnetic circuit within the slide range of the slider unit, it is possible to obtain a substantially linear thrust (constant pressure thrust) characteristic of a gentle drum curve. .

  The present invention contributes to the development of a pressure device that measures the dead weight of a slide unit that slides in the Z-axis direction, and subtracts an unnecessary load downward to set an appropriate pressing force downward in the Z-axis. Is something that can be done.

1 Z-axis stage 2 Slide unit 3 Magnetic actuator (VCM: Voice coil motor)
4a VCM drive circuit 4b Z-axis stage drive circuit

Claims (9)

In a pressurizing apparatus that lowers the Z-axis stage in the vertical direction and applies pressure to the object,
A slide unit that is supported by the Z-axis stage so as to be slidable in a vertical direction within a set stroke range and descends to the bottom dead center of the set stroke by its own weight;
A magnetic actuating element for applying a thrust proportional to a current value supplied to the coil to the slide unit through a coupling shaft by an interaction between the magnetic force of the magnetic circuit and the magnetic force generated by energizing the coil in the magnetic circuit;
A drive circuit that drives and controls the Z-axis stage and the magnetic actuator;
A bottom dead center sensor for detecting the slide unit descending to the bottom dead center of the set stroke and detecting the slide unit rising from the bottom dead center of the set stroke;
Based on the detection signal of the bottom dead center sensor, the drive circuit drives and controls the Z-axis stage and the magnetic actuating element, and the slide unit is separated from the object by thrust generated by energizing the magnetic actuating element. A self-weight measuring unit that measures the self-weight of the slide unit based on a current value energized to the magnetic actuating element when pulled upward;
Based on the detection signal of the bottom dead center sensor, the drive circuit drives and controls the Z-axis stage and the magnetic actuating element, and the slide unit slides up and down with respect to the object within the set stroke range. In a state where the Z-axis stage is stopped at a possible height position, a current value corresponding to a difference (set pressure value−self-weight value) is supplied to the magnetic actuation element to apply pressure by the magnetic actuation element. And a pressurizing unit that applies to the object. The pressurizing apparatus according to claim 1, wherein
The pressurizing unit can set the pressure applied by the magnetic actuating element to a pressure equal to or less than the weight of the slide unit by switching the energization to the magnetic actuating element to a negative polarity. A pressurizing device having a function of setting the pressure of the magnetic actuating element to a pressure equal to or greater than the weight of the slide unit by switching the energization to positive polarity. The pressurizing apparatus according to claim 1 or 2,
The pressurizing unit takes over the current value at the time of measuring the self-weight of the self-weight measuring unit, gradually decreases the current value, moves the slide unit to the bottom dead center of the set stroke, and maintains the state of the slide unit. A pressurizing apparatus having a function of bringing the object into contact with the object. In a pressurizing method in which the Z-axis stage is lowered in the vertical direction to apply pressure to the object,
A combination of the Z-axis stage and a slide unit that is supported by the Z-axis stage so as to be vertically slidable within a set stroke range and that descends to the bottom dead center of the set stroke by its own weight,
When the Z-axis stage and the magnetic actuating element are driven and controlled based on the detection signal of the bottom dead center sensor, the slide unit is lifted upward away from the object by the thrust generated by energizing the magnetic actuating element. A self-weight measuring step for measuring the self-weight of the slide unit based on a current value energized to the magnetic actuation element;
A height at which the slide unit can slide up and down with respect to the object within the range of the set stroke by driving and controlling the Z-axis stage and the magnetic actuating element based on a detection signal of the bottom dead center sensor. In a state where the Z-axis stage is stopped at a position, a current value corresponding to a difference of (set pressure value−self-weight value) is supplied to the magnetic actuating element to apply the pressure applied by the magnetic actuating element to the object. And a pressurizing step to apply to the pressurizing method. The pressurizing method according to claim 4,
In the pressurizing step, the pressure applied by the thrust of the magnetic actuating element can be set to a pressure equal to or less than the weight of the slide unit by switching the energization to the magnetic actuating element to a negative polarity. A pressurizing method, wherein the pressure applied by the magnetic operating element can be set to a pressure higher than the weight of the slide unit by switching energization to the operating element to positive polarity. The pressurizing method according to claim 4 or 5,
In the pressurizing step, the current value at the time of self-weight measurement of the self-weight measuring unit is taken over and the current value is gradually decreased to move the slide unit to the bottom dead center of the set stroke, and the state is maintained and the slide unit is maintained. A pressurizing method characterized by bringing the object into contact with the object. In a pressurizing program for performing control for lowering the Z-axis stage in the vertical direction and applying pressure to the object,
When the Z-axis stage and the magnetic actuating element are driven and controlled based on the detection signal of the bottom dead center sensor, the slide unit is lifted upward away from the object by the thrust generated by energizing the magnetic actuating element. A self-weight measuring function for measuring the self-weight of the slide unit based on a current value energized to the magnetic actuation element;
A height at which the slide unit can slide up and down with respect to the object within the range of the set stroke by driving and controlling the Z-axis stage and the magnetic actuating element based on a detection signal of the bottom dead center sensor. In a state where the Z-axis stage is stopped at a position, a current value corresponding to a difference of (set pressure value−self-weight value) is supplied to the magnetic actuating element to apply the pressure applied by the magnetic actuating element to the object. A pressurizing program for causing a computer to execute a pressurizing function to be applied to the computer. In the pressurization program according to claim 7,
A function of causing the computer to set the pressure applied by the magnetic actuator to a pressure equal to or less than the weight of the slide unit by switching the energization to the magnetic actuator to negative polarity; A pressurizing program for executing a function of setting a pressurizing force by the magnetic actuating element to a pressurizing force equal to or higher than the weight of the slide unit by switching energization to positive polarity. In the pressurization program according to claim 7 or 8,
The computer takes over the current value at the time of the self-weight measurement of the self-weight measuring unit and gradually reduces the current value to move the slide unit to the bottom dead center of the set stroke, and maintains the state to maintain the slide unit A pressurizing program for executing a function of contacting an object.

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