JP2017084743A - 試料加工装置、電子顕微鏡装置、試料加工方法、および、試料評価方法 - Google Patents
試料加工装置、電子顕微鏡装置、試料加工方法、および、試料評価方法 Download PDFInfo
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Abstract
Description
<装置構成>
第1の実施形態に係る試料加工装置100(以下、「加工装置100」と称する)の装置構成について、図1および図2を用いて説明する。図1は、第1の実施形態に係る試料加工装置の構成を模式的に示す図である。
以下に、本実施形態に係る試料加工方法および試料評価方法について述べる。
第2の実施形態に係る試料加工装置200(以下、「加工装置200」と称する)の装置構成について、図4を用いて説明する。図4は、第2の実施形態に係る試料加工装置の装置構成を模式的に示す図である。
2 試料台
3 温度調整手段
5 イオンビーム照射手段
6 光硬化手段
100 試料加工装置
Claims (10)
- 試料を載置する試料台と、
前記試料台の温度を前記試料が凍結する温度以下に調整する温度調整手段と、
前記試料台に載置した前記試料にイオンビームを照射するイオンビーム照射手段と、を有する試料加工装置であって、
前記イオンビームが照射された前記試料を前記試料台に載置したまま、前記試料に対して光を照射して前記試料を光硬化させる光硬化手段を有することを特徴とする試料加工装置。 - 前記光硬化手段が、前記イオンビーム照射手段が前記試料に前記イオンビームを照射することで露出した面に、前記光を直接照射可能な位置に配置されていることを特徴とする請求項1に記載の試料加工装置。
- 前記光が紫外線であることを特徴とする請求項1または請求項2に記載の試料加工装置。
- 前記試料から放出される電子またはイオンを検出する検出手段をさらに有することを特徴とする請求項1乃至請求項3のいずれか一項に記載の試料加工装置。
- 前記温度調整手段が、前記イオンビーム照射手段による前記イオンビームの照射および前記光硬化手段による前記光の照射が行われる期間中、前記試料台の温度を前記試料が凍結する温度以下に維持する手段であることを特徴とする請求項1乃至請求項4のいずれか一項に記載の試料加工装置。
- 前記試料が、光重合性組成物を含むことを特徴とする請求項1乃至請求項5のいずれか一項に記載の試料加工装置。
- 第1の試料室と第2の試料室とを有し、
前記イオンビーム照射手段は前記第1の試料室に、前記光硬化手段は前記第2の試料室に、それぞれ配置されており、
前記試料台は前記第1の試料室と前記第2の試料室との間を移動可能に構成されていることを特徴とする請求項1乃至請求項6のいずれか一項に記載の試料加工装置。 - 試料を載置する試料台と、
前記試料台の温度を前記試料が凍結する温度以下に調整する温度調整手段と、
前記試料台に載置した前記試料にイオンビームを照射するイオンビーム照射手段と、
前記イオンビームが照射された前記試料を試料台に載置したまま、前記試料に対して光を照射して前記試料を光硬化させる光硬化手段と、
前記イオンビームが照射された前記試料を試料台に載置したまま、前記試料に対して電子線を照射する電子線照射手段と、
前記電子ビームを照射することにより前記試料から放出される電子またはイオンを検出する検出手段と、を有することを特徴とする電子顕微鏡装置。 - 光重合性組成物を含む試料を加工する試料加工方法であって、
前記試料を試料台上に載置し、前記試料台の温度を前記試料が凍結する温度以下に調整する工程と、
前記試料台に載置した前記試料にイオンビームを照射する工程と、
前記イオンビームが照射された前記試料を前記試料台に載置したまま、前記試料に対して光を照射して前記試料を光硬化させる工程と、を含むことを特徴とする試料加工方法。 - 光重合性組成物を含む試料を評価する試料評価方法であって、
前記試料を試料台上に載置し、前記試料台の温度を前記試料が凍結する温度以下に調整する工程と、
前記試料台に載置した前記試料にイオンビームを照射する工程と、
前記イオンビームが照射された前記試料を前記試料台に載置したまま、前記試料に対して光を照射して前記試料を光硬化させる工程と、
前記光を照射した前記試料に電子線を照射し、前記電子線が照射された前記試料から放出される二次電子を検出する工程と、を含むことを特徴とする試料評価方法。
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