JP2017076707A - Processing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a processing device including operation means capable of relaxing the impact due to collision from the lower side.SOLUTION: A processing device (2) includes a chuck table (22), processing means (24), an exterior cover (28) covering the chuck table and processing means, and operation means (30) for inputting the processing conditions of the processing means. The operation means includes an operation panel (32) having a screen (32a) for displaying the processing state by the processing means, and a trapezoidal frame (34) for supporting the operation panel. The frame includes a lower bottom (34a) elongating in the vertical direction, an upper bottom (34b) elongating in the vertical direction, and having the lower end above the lower end of the lower bottom, and an arm (34c) elongating obliquely upward from the lower end of the lower bottom toward the lower end of the upper bottom, and the lower bottom side is coupled with the exterior cover rotatably about a rotating shaft parallel with the vertical direction.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a processing apparatus for processing a plate-like workpiece such as a semiconductor wafer.

  When processing a plate-like workpiece such as a semiconductor wafer, a processing apparatus such as a laser processing apparatus, a cutting apparatus, a grinding apparatus, or a polishing apparatus is widely used. In recent years, it has become mainstream to provide a touch panel type user interface (hereinafter referred to as an operation panel) for inputting processing conditions and the like to these processing apparatuses.

  This operation panel is usually arranged at a position that assumes operation on the front side of the processing apparatus. On the other hand, if the operation panel can be operated only on the front side of the processing apparatus, it is often inconvenient for the operator. Therefore, a processing apparatus having an operation panel that can rotate within a predetermined angle range has been proposed (see, for example, Patent Document 1).

JP 2013-116532 A

  In the above-described processing apparatus, for example, the operation panel can be operated on the side surface in addition to the front surface side, so that convenience is greatly improved. However, depending on the orientation of the operation panel, the operation panel may protrude from the exterior cover of the processing apparatus. For example, an operator who is working contacts the operation panel from below or the operation panel is damaged by the impact. There was also a possibility.

  The present invention has been made in view of such problems, and an object of the present invention is to provide a processing apparatus provided with an operation means that can relieve an impact caused by contact from below.

  According to the present invention, a chuck table that holds a workpiece, a processing unit that processes the workpiece held on the chuck table, an exterior cover that covers the chuck table and the processing unit, and a An operation means for inputting machining conditions, the operation means having an operation panel having a display surface for displaying a machining state by the machining means, and a trapezoidal shape supporting the operation panel. A lower bottom portion extending in the vertical direction, an upper bottom portion extending in the vertical direction and having a lower end above the lower end of the lower bottom portion, and a lower end of the upper bottom portion from the lower end of the lower bottom portion And an arm portion extending obliquely upward toward the bottom, and the lower bottom side is connected to the exterior cover in a state of being rotatable around a rotation axis parallel to the vertical direction. An apparatus is provided.

  In the present invention, the frame is a window in which a region on the first surface side where the display surface of the operation panel is arranged and a region on the second surface side opposite to the first surface can be visually recognized. And when there is an obstacle that hinders rotation of the frame in one of the first surface side region and the second surface side region, the first surface side region and the second surface side It is preferable that the obstacle can be confirmed through the window from the other side of the two-surface region.

  In the processing apparatus according to the present invention, the operation panel is supported by a frame including an arm portion extending obliquely upward from the lower end of the lower bottom portion toward the lower end of the upper bottom portion. By deflecting diagonally upward at the part, the impact due to contact can be mitigated. As a result, effects such as mitigation of an impact on the operator and prevention of breakage of the operation panel can be obtained.

It is a perspective view which shows typically the structural example of a laser processing apparatus. It is a front view which shows typically the structure of an operation unit, etc. It is a perspective view which shows the example of the usage condition of an operation unit typically. It is a front view which shows typically the structure of the operation unit which concerns on a modification.

  Embodiments of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a perspective view schematically showing a configuration example of a laser processing apparatus (processing apparatus) 2 according to the present embodiment. In the present embodiment, the laser processing apparatus 2 will be described as an example, but the processing apparatus of the present invention may be a cutting apparatus, a grinding apparatus, a polishing apparatus, or the like.

  As shown in FIG. 1, the laser processing apparatus 2 includes a base 4 that supports each component. A wall-like support structure 6 extending in the Z-axis direction (vertical direction) is provided at the rear end portion of the base 4. On the other hand, cassette support tables 10a and 10b for supporting cassettes 8a and 8b that can accommodate workpieces (not shown) are provided at the front end of the base 4.

  The workpiece is, for example, a disk-shaped semiconductor wafer, a resin substrate, a ceramic substrate, a package substrate, or the like. However, there are no restrictions on the material and shape of the workpiece. An opening 4a is formed on the front end side of the upper surface of the base 4, and a transport mechanism 12 for transporting the workpiece is disposed in the opening 4a.

  A chuck table moving mechanism 14 is provided behind the opening 4a. The chuck table moving mechanism 14 is disposed on the upper surface of the Y-axis moving table 16 that moves in the Y-axis direction (index feed direction) and the X-axis movement that moves in the X-axis direction (machining feed direction). And a table 18.

  A table base 20 is provided on the upper surface side of the X-axis moving table 18. A chuck table 22 that holds a workpiece is disposed on the table base 20. The chuck table 22 is connected to a rotation drive source (not shown) such as a motor, and rotates around a rotation axis substantially parallel to the Z-axis direction.

  If the Y-axis moving table 16 is moved in the Y-axis direction by the chuck table moving mechanism 14 described above, the chuck table 22 is indexed and fed in the Y-axis direction. If the X-axis moving table 18 is moved in the X-axis direction by the chuck table moving mechanism 14, the chuck table 22 is processed and fed in the X-axis direction.

  The upper surface of the chuck table 22 is a holding surface 22a that holds a workpiece. The holding surface 22a is connected to a suction source (not shown) through a suction path (not shown) formed inside the chuck table 22 and the table base 20. The workpiece can be sucked and held by the chuck table 22 by applying the negative pressure of the suction source to the holding surface 22a.

  The support structure 6 is provided with a support arm 6a protruding forward, and a laser processing unit (processing means) 24 for irradiating a laser beam downward is disposed at the tip of the support arm 6a. . A camera 26 that captures an image of the workpiece held on the chuck table 22 is installed at a position adjacent to the laser processing unit 24.

  The laser processing unit 24 irradiates a workpiece held on the chuck table 22 with a laser beam oscillated by a laser oscillator (not shown). For example, the workpiece can be laser processed along the X-axis direction by feeding the chuck table 22 in the X-axis direction while irradiating the laser beam with the laser processing unit 24.

  Components such as the transport mechanism 12, the chuck table moving mechanism 14, the chuck table 22, the laser processing unit 24, and the camera 26 described above are covered with an exterior cover 28 attached to the upper portion of the base 4. A recess 28b is provided on the first surface 28a side of the exterior cover 28, and an operation unit (operation means) 30 for inputting processing conditions of the laser processing unit 24 is disposed in the recess 28b. Yes.

  FIG. 2 is a front view schematically showing the structure and the like of the operation unit 30. In FIG. 2, an operator 13 working around the laser processing apparatus 2 is also shown. As shown in FIG. 2, the operation unit 30 includes a rectangular operation panel 32 that functions as a user interface, and a trapezoidal frame 34 that supports the operation panel 32.

  The operation panel 32 is a so-called touch panel, and includes a display surface (operation surface) 32a that serves as both an input unit and an output unit. The operator 13 can input various information including the processing conditions of the laser processing unit 24 to the laser processing apparatus 2 by bringing a finger or the like into contact with the display surface 32a.

  On the display surface 32a, information (processing state by the laser processing unit 24) necessary for grasping the processing state such as the processing progress and the state of the laser processing unit 24 is displayed. The operator 13 can perform, for example, replacement of the cassettes 8a and 8b, maintenance of the laser processing unit 24, and the like based on information displayed on the display surface 32a.

  The frame 34 includes a lower bottom portion 34a that extends in the vertical direction in a state of being attached to the exterior cover 28, and an upper bottom portion 34b that is substantially parallel to the lower bottom portion 34a. The lower end of the upper bottom portion 34b is located above the lower end of the lower bottom portion 34a, and the lower arm portion 34c that connects the lower end of the lower bottom portion 34a and the lower end of the upper bottom portion 34b is connected to the upper bottom portion 34b from the lower end of the lower bottom portion 34a. It extends obliquely upward toward the lower end of.

  On the other hand, the upper end of the upper bottom portion 34b is located at the same height as the upper end of the lower bottom portion 34a, and the upper arm portion 34d connecting the upper end of the lower bottom portion 34a and the upper end of the upper bottom portion 34b is the upper end of the lower bottom portion 34a. From the top toward the upper end of the upper bottom portion 34b. The operation panel 32 is supported so that both side portions are sandwiched between the lower bottom portion 34a and the upper bottom portion 34b.

  The frame 34 configured in this manner is connected to the exterior cover 28 on the lower bottom 34a side in a state in which the frame 34 can rotate (rotate) within a predetermined angular range around a rotation axis (rotation axis) parallel to the vertical direction. The As the coupling tool 36 that couples the frame 34 to the exterior cover 28, for example, a hinge can be used. However, the coupling tool 36 may not be a hinge as long as it is configured to be able to rotate the frame 34 around a rotation axis parallel to the vertical direction.

  Further, an area surrounded by the lower bottom portion 34a, the upper bottom portion 34b, the lower arm portion 34c, and the lower portion of the operation panel 32 is an opening (window portion) 34e. As a result, a region on the first surface side where the display surface 32a of the operation panel 32 is disposed (region on the near side in FIG. 2) and a region on the second surface side opposite to the first surface (the back surface in FIG. 2). Side area) can be visually recognized.

  For example, in FIG. 2, the operator 13 in the region on the second surface side can be confirmed from the region on the first surface side through the opening 34e. As described above, by providing the opening 34e in the frame 34, an obstacle that exists in one of the first surface side region and the second surface side region and inhibits the rotation of the frame 34 (operation unit 30) is provided. It can be confirmed through the opening 34e from the other of the first surface side region and the second surface side region. The opening 34e may be omitted.

  FIG. 3 is a perspective view schematically showing an example of how the operation unit 30 is used. As described above, the operation unit 30 is attached to the exterior cover 28 so as to be able to rotate within a predetermined angle range. Therefore, depending on the mode of use, the operation unit 30 may jump out of the exterior cover 28 as shown in FIG.

  3 shows a state in which the operation unit 30 is rotated from the second surface 28c side of the outer cover 28 to a position where it can be easily operated. On the other hand, when the operation unit 30 is rotated from the first surface 28a side of the outer cover 28 to a position where it can be easily operated, the operation unit 30 is accommodated in the recess 28b (FIG. 1).

  As shown in FIG. 3, when the operation unit 30 protrudes from the exterior cover 28, for example, when the operator 13 working in a squatting state tries to stand up, the head is brought into contact with the lower part of the operation unit 30. There is a possibility that. In addition, there is a possibility that the operation panel may be damaged due to an impact when contacting the operator 13.

  On the other hand, in the laser processing apparatus 2 according to the present embodiment, the operation panel 32 is supported by the frame 34 including the lower arm portion 34c extending obliquely upward from the lower end of the lower bottom portion 34a toward the lower end of the upper bottom portion 34b. Therefore, the force acting by the contact from the lower side is deflected obliquely upward by the lower arm portion 34c, and the impact due to the contact can be reduced. As a result, the operator 13 can be protected and the operation panel 32 can be prevented from being damaged.

  In addition, in order to improve the above-mentioned effect, you may comprise the flame | frame 34 with the material which bends by the assumed impact, for example. In this case, the direction of the force acting by the contact can be diverted while relaxing the impact by the bending of the frame 34, so that the operator 13 can be more appropriately protected and the operation panel 32 can be more effectively prevented from being damaged.

  In this case, it is desirable to form a gap that does not hinder the bending of the frame 34 so that a sufficient amount of bending of the frame 34 is ensured. The opening 34e described above is also suitable as this gap. Similarly, the lower arm portion 34c of the frame 34 may be covered with a material (shock absorbing material) such as a resin that absorbs shock so as to alleviate the shock.

  Further, as shown in FIG. 2 and the like, it is desirable that the corners of the frame 34 be formed in a rounded shape. Thereby, even when the operator 13 contacts the corner portion of the frame 34, the local impact is reduced. Similarly, the corners of the frame 34 may be covered with a material (shock absorbing material) such as a resin having a shock absorbing property to alleviate the shock.

  As described above, in the laser processing apparatus 2 according to the present embodiment, the operation panel 32 is supported by the frame 34 including the lower arm portion 34c extending obliquely upward from the lower end of the lower bottom portion 34a toward the lower end of the upper bottom portion 34b. Therefore, the force acting by the contact from the lower side is deflected obliquely upward by the lower arm portion 34c, and the impact due to the contact can be reduced. Thereby, effects such as mitigation of the impact on the operator 13 and prevention of breakage of the operation panel 32 are obtained.

  In addition, this invention is not limited to description of the said embodiment, A various change can be implemented. For example, in the above embodiment, the operation unit (operation means) 30 including the opening (window portion) 34e below the operation panel 32 is illustrated, but an opening (window portion) may be provided above the operation panel 32. FIG. 4 is a front view schematically showing the structure of an operation unit (operation means) 40 according to a modification.

  The basic structure of the operation unit 40 is the same as that of the operation unit 30 according to the above embodiment. That is, the operation unit 40 includes a rectangular operation panel 42 that functions as a user interface, and a trapezoidal frame 44 that supports the operation panel 42. The operation panel 42 includes a display surface (operation surface) 42a that serves as both an input unit and an output unit.

  The frame 44 includes a lower bottom portion 44a that extends in the vertical direction while being attached to the exterior cover 28, and an upper bottom portion 44b that is substantially parallel to the lower bottom portion 44a. The lower end of the upper bottom portion 44b is located above the lower end of the lower bottom portion 44a, and the lower arm portion 44c that connects the lower end of the lower bottom portion 44a and the lower end of the upper bottom portion 44b is connected to the upper bottom portion 44b from the lower end of the lower bottom portion 44a. It extends obliquely upward toward the lower end of.

  On the other hand, the upper end of the upper bottom portion 44b is located below the upper end of the lower bottom portion 44a, and the upper arm portion 44d that connects the upper end of the lower bottom portion 44a and the upper end of the upper bottom portion 44b extends from the upper end of the lower bottom portion 44a to the upper bottom portion. It extends obliquely downward toward the upper end of 44b. The lower bottom 44 a side of the frame 44 is connected to the exterior cover 28 by a connector 46.

  Thus, in the operation unit 40 according to the modification, the area surrounded by the lower bottom 44a, the upper bottom 44b, the lower arm 44c, and the lower part of the operation panel 42 becomes an opening (window) 44e, and the lower bottom 44a A region surrounded by the upper part of 44a, the upper bottom part 44b, the upper arm part 44d, and the operation panel 42 is an opening (window part) 44f.

  Therefore, the area on the first surface side (the area on the near side in FIG. 4) where the display surface 42a of the operation panel 42 is arranged through the opening 44e or the opening 44f, and the second surface side opposite to the first surface. The region (the region on the back side in FIG. 4) can be visually recognized.

  In addition, the configurations, methods, and the like according to the above-described embodiments can be appropriately modified and implemented without departing from the scope of the object of the present invention.

2 Laser processing equipment (processing equipment)
4 base 4a opening 6 support structure 6a support arm 8a, 8b cassette 10a, 10b cassette support 12 transport mechanism 14 chuck table moving mechanism 16 Y-axis moving table 18 X-axis moving table 20 table base 22 chuck table 22a holding surface 24 laser Processing unit (processing means)
26 Camera 28 Exterior cover 28a First surface 28a
28b Recessed portion 28c Second surface 30 Operation unit (operation means)
32 Operation panel 32a Display surface (operation surface)
34 frame 34a lower bottom part 34b upper bottom part 34c lower arm part 34d upper arm part 34e opening (window part)
36 connector 40 operation unit (operation means)
42 Operation panel 42a Display surface (operation surface)
44 Frame 44a Lower bottom 44b Upper bottom 44c Lower arm 44d Upper arm 44e Opening (window)
44f Opening (window)
46 connector 13 operator

Claims (2)

A chuck table for holding a workpiece, a processing means for processing the workpiece held on the chuck table, an exterior cover for covering the chuck table and the processing means, and a processing condition for the processing means A processing device comprising:
The operation means includes
An operation panel having a display surface for displaying a processing state by the processing means;
A trapezoidal frame that supports the operation panel;
The frame includes a lower bottom portion extending vertically, an upper bottom portion extending vertically and having a lower end above the lower end of the lower bottom portion, and obliquely upward from the lower end of the lower bottom portion toward the lower end of the upper bottom portion. And a lower arm side connected to the exterior cover in a state of being rotatable about a rotation axis parallel to the vertical direction. The frame further includes a window portion that allows a region on the first surface side where the display surface of the operation panel is disposed and a region on the second surface side opposite to the first surface to be mutually visible. ,
When there is an obstacle that inhibits the rotation of the frame in one of the first surface side region and the second surface side region, the first surface side region and the second surface side region The processing apparatus according to claim 1, wherein the obstacle can be confirmed through the window portion from the other side.

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