JP2017073488A - Cassette for exchanging lamp, lamp house, light irradiation device, and lamp exchanging method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a light irradiation device which can efficiently exchange a plurality of lamps.SOLUTION: A cassette 400 for exchanging a lamp comprises a frame like supporting member 402 which can support a plurality of lamps including a lamp part of a straight tube and a socket part connected to both ends of the lamp part. The supporting member 402 is provided with frame parts 404 and 426 which are provided so that a plurality of pedestal bases 412 constructed by holding the socket parts of the lamps is arranged in one line along a Y direction, and includes a frame part 406 facing to the frame part 404. In each pedestal base 412, an energization member 414 energizing the socket part in a Z direction is provided. In each pedestal base 426, an energization member 428 energizing the socket part in the Z direction is provided.SELECTED DRAWING: Figure 9

Description

  The present disclosure relates to a lamp replacement cassette, a lamp house, a light irradiation device, and a lamp replacement method.

Patent Document 1 discloses a processing chamber in which an object to be processed (for example, a substrate) can be disposed, and an excimer lamp (ultraviolet lamp) configured to irradiate ultraviolet rays toward the processing chamber. The light irradiation apparatus provided with a house is disclosed. Ultraviolet light irradiated from the excimer lamp is irradiated to the processing chamber through a window member provided in the lamp house, and reacts with oxygen (O ₂ ) in the atmosphere in the processing chamber, so that ozone (O ₃ ) is formed around the object to be processed. ) Is generated. The object to be processed is processed by the action of the generated ozone. For example, the light irradiation device functions as a resist removing device (ashing device) that removes (ashing) a resist film provided on the surface of the object to be processed by the action of ozone.

JP 2009-099579 A

  During the operation of the excimer lamp, the temperature of the excimer lamp becomes extremely high. Therefore, the excimer lamp may be brought into contact with the cooling member to continuously exchange heat between the excimer lamp and the cooling member.

  In recent years, a plurality of excimer lamps may be disposed in a lamp house for reasons such as an increase in the size of an object to be processed and efficient ozone generation. Since the tolerance of each lamp is relatively large, in order to bring a plurality of lamps into contact with the cooling member, an operator manually attaches the lamps to the cooling member one by one. Therefore, it took time and effort to replace the lamp.

  Therefore, the present disclosure describes a lamp replacement cassette, a lamp house, a light irradiation device, and a lamp replacement method that can efficiently replace a plurality of lamps.

  A cassette for lamp replacement according to one aspect of the present disclosure is a frame shape capable of supporting a plurality of lamps including a straight tubular lamp portion and first and second socket portions connected to both ends of the lamp portion, respectively. The support member is provided in such a manner that a plurality of first pedestals configured to hold the first socket portions of the respective lamps are arranged in a line along the first direction. And a plurality of second pedestals configured to hold the second socket portion of each lamp and the second socket portion of each lamp are provided so as to be aligned in a line along the first direction. And a second frame portion facing each other, and each first pedestal has a third crossing in both the first direction and the second direction facing the first and second frame portions. A first biasing member for biasing the first socket portion in the direction of Are, respectively in each second seat, the second urging member for urging the second socket part in the third direction is provided.

  In the lamp replacement cassette according to one aspect of the present disclosure, each first base is provided with a first biasing member that biases the first socket portion in the third direction. Each of the second pedestals is provided with a second urging member that urges the second socket portion in the third direction. Therefore, when the lamp is mounted on the cassette so that the first and second socket portions of the lamp are located on the first and second pedestals, respectively, the lamp is connected to the first and second socket portions via the first and second socket portions. It is urged toward the third direction by the second urging member. Accordingly, when a cassette on which a plurality of lamps are mounted is accommodated in the lamp house, the lamp biased in the third direction is pressed against a lid member (for example, a cooling member) in the lamp house. Thus, since each lamp is individually urged in the third direction by the first and second urging members regardless of the tolerance of the lamp, the urging force for any one of the lamps is not insufficient. All lamps come into contact with the lid member. As described above, since it is not necessary to manually install a plurality of lamps in the lamp house so that the lamp contacts the lid member in order to exchange heat between the lamp and the lid member, the plurality of lamps can be efficiently replaced. Can be performed.

  First and second projecting portions projecting outward are provided on the end surfaces of the first and second socket portions, respectively, and the support member is provided on the first pedestal. The first positioning member in which a long hole extending along the third direction can be inserted and the second pedestal can be inserted, and the second protrusion can be inserted in the third direction. And a second positioning member in which a long hole extending along the line is formed. In this case, when the lamp is mounted on the cassette so that the first and second socket portions of the lamp are located on the first and second pedestals, respectively, the first and second protrusions are respectively the first and second protrusions. It is inserted through the long hole of the positioning member. Therefore, the lamp can be roughly positioned with respect to the cassette. Further, since the lamp is urged in the third direction by the first and second urging members, the lamp is displaced in the third direction until the lamp is pressed against the lid member in the lamp house. . Therefore, it is possible to determine whether or not the lamp is in contact with the lid member by grasping the relative positions of the first and second protrusions with respect to the elongated hole extending in the third direction.

  The first pedestal is provided with a regulating member that regulates the movement of the lamp from the second pedestal toward the first pedestal, and the first socket portion is regulated on the second pedestal. A third urging member that urges the second socket portion from the second pedestal toward the first pedestal side so as to contact the member may be provided. In this case, when the third urging member urges the second socket portion, the first socket portion abuts on the regulating member. Therefore, even if there is a tolerance between the plurality of lamps, the positions of the plurality of lamps are aligned in the facing direction (second direction) of the first and second frame portions. Therefore, light can be more uniformly irradiated from the lamp portions of the plurality of lamps.

  The lamp replacement cassette according to one aspect of the present disclosure may further include a buffer member provided on the back side of the support member opposite to the front portion where the lamp is held. In this case, when the support member holding the plurality of lamps is accommodated in the lamp house, even if the support member and the wall portion of the lamp house come into contact with each other and an impact is generated, the shock is alleviated by the buffer member. Therefore, even if the support member falls unexpectedly, the lamp can be prevented from being damaged.

  A lamp house according to another aspect of the present disclosure is a frame-shaped support member capable of supporting a plurality of lamps including a straight tubular lamp portion and first and second socket portions connected to both ends of the lamp portion, respectively. A lamp replacement cassette, and a housing configured to accommodate the cassette, the housing having a bottomed container having a bottom wall provided with a window member, and opening the bottomed container opening And a lid member configured to be closable, and the support member includes a plurality of first pedestals configured to hold the first socket portions of the respective lamps in a row along the first direction. A plurality of second pedestals configured to hold a first frame portion provided in a row and a second socket portion of each lamp so as to line up in a row along the first direction. Is provided and faces the first frame part 2 and a pair of flange portions projecting sideways, and the bottomed container has an inclined surface that is inclined from the opening side toward the bottom wall portion side. A pair of guide members configured to guide the flange portion is provided, and each first base has a first direction and a second direction in which the first and second frame portions are opposed to each other. A first urging member is provided to urge the first socket portion so that the lamp contacts the lid member in a third direction intersecting both of the lamps and the cassette being housed in the housing. Each second pedestal has a second attachment for urging the second socket portion in the third direction so that the lamp contacts the lid member in a state where the cassette is accommodated in the housing. A force member is provided.

  In the cassette of the lamp house according to another aspect of the present disclosure, each first base is provided with a first biasing member that biases the first socket portion in the third direction. Each of the two pedestals is provided with a second urging member that urges the second socket portion in the third direction. Therefore, when the lamp is mounted on the cassette so that the first and second socket portions of the lamp are located on the first and second pedestals, respectively, the lamp is connected to the first and second socket portions via the first and second socket portions. It is urged toward the third direction by the second urging member. Accordingly, when a cassette on which a plurality of lamps are mounted is accommodated in the lamp house, the lamp biased in the third direction is pressed against a lid member (for example, a cooling member) in the lamp house. Thus, since each lamp is individually urged in the third direction by the first and second urging members regardless of the tolerance of the lamp, the urging force for any one of the lamps is not insufficient. All lamps come into contact with the lid member. As described above, since it is not necessary to manually install a plurality of lamps in the lamp house so that the lamp contacts the lid member in order to exchange heat between the lamp and the lid member, the plurality of lamps can be efficiently replaced. Can be performed.

  Incidentally, in recent years, a plurality of excimer lamps may be arranged in a lamp house for reasons such as an increase in the size of an object to be processed and efficient ozone generation. In recent years, with the increase in size of the light irradiation device including the lamp house, the work space for replacing the lamp is limited, and it tends to be difficult to largely open the lid (door) of the lamp house. Due to these factors, there is a concern that it takes time and labor to replace the lamp. In addition, since the working space is narrowed, there is a concern that the operator may hit the lamp against the surrounding device when replacing the lamp, and the lamp may be damaged.

  On the other hand, in the lamp house cassette according to another aspect of the present disclosure, the support member includes a pair of flange portions projecting sideways. On the other hand, in the housing of the lamp house according to another aspect of the present disclosure, a pair of guide members is provided in the bottomed container. The pair of guide members have an inclined surface inclined from the opening side of the bottomed container toward the bottom wall portion side, and are configured to guide each flange portion by the inclined surface. Therefore, when the cassette is accommodated in the housing, the cassette is moved according to the inclination of the inclined surface by moving the cassette so that the flange portion slides on the inclined surface while contacting the inclined surface. It moves from the part side to the bottom wall part side. Therefore, since the cassette can be accommodated in the housing by simply sliding the cassette from the side of the housing, the housing lid member can be completely removed from the bottomed container, or the housing lid member can be removed from the bottomed container. There is no need to open it up. As a result, even if the work space is narrow, it is possible to replace the lamp safely and efficiently by simply sliding the cassette from the side of the housing.

  The cassette further includes a latch member provided on the back side of the support member opposite to the front portion where the lamp is held, and an engaging portion that can be engaged with the latch member is provided inside the bottomed container. It may be provided. In this case, when the cassette is accommodated in the housing, the latch member of the cassette engages with the engaging portion of the bottomed container, so that the cassette is more reliably positioned with respect to the housing. Therefore, a plurality of lamps can be brought into contact with the lid member at an appropriate position.

  A lamp house according to another aspect of the present disclosure is capable of supporting a plurality of lamps including a straight tube lamp portion and first and second socket portions connected to both ends of the lamp portion, and the plurality of lamps. A lamp replacement cassette having a frame-shaped support member, and a housing configured to receive the cassette, the housing including a bottomed container having a bottom wall portion provided with a window member, and a bottomed container A lid member configured to be able to open and close the opening of the lamp, and the support member includes a plurality of first pedestals configured to hold the first socket portions of the respective lamps. A plurality of second pedestals configured to hold a first frame portion provided in a line along the direction and a second socket portion of each lamp, respectively, along the first direction. The first frame is arranged in a line. The first and second socket portions are provided with first and second urging members, respectively, and the first urging member is the first urging member, The first direction and the first and second frame portions are opposed to each other by a reaction force generated by being compressed between the first socket portion and the first pedestal when the socket portion is held by the first pedestal. The first socket portion is urged so that the lamp contacts the lid member in a third direction that intersects both the second direction and the cassette is housed in the housing. The biasing member is in the third direction by a reaction force generated by being compressed between the second socket portion and the second pedestal when the second socket portion is held by the second pedestal. The second socket portion is urged so that the lamp contacts the lid member while the cassette is accommodated in the housing. .

  In a lamp of a lamp house according to another aspect of the present disclosure, first and second urging members are provided in the first and second socket portions, respectively. When a cassette holding a plurality of lamps is accommodated in the housing and the lamp is sandwiched between the cassette and a lid member (for example, a cooling member), the first urging member has the first socket portion as the first socket portion. The first socket portion so that the lamp contacts the lid member in the third direction by a reaction force generated by being compressed between the first socket portion and the first pedestal when held by the pedestal. Energize. Similarly, the second urging member has a second force generated by a reaction force generated by being compressed between the second socket portion and the second pedestal when the second socket portion is held by the second pedestal. The second socket portion is urged so that the lamp contacts the lid member in the direction of 3. Therefore, since each lamp is individually urged in the third direction by the first and second urging members regardless of the tolerance of the lamp, all the urging forces for any one of the lamps are not insufficient. In contact with the lid member. Therefore, it is not necessary to manually install a plurality of lamps in the lamp house so that the lamp contacts the lid member in order to exchange heat between the lamp and the lid member. Can be done.

  A lamp house according to another aspect of the present disclosure is configured to impart a resistance force to the lid member that slows down the operation when the lid member changes the posture from the open state to the closed state with respect to the opening. A damper may be further provided. In this case, since the sudden opening and closing of the lid member is suppressed, it is difficult for the impact force to act on the cassette and the lamp accommodated in the housing.

  First and second projecting portions projecting outward are provided on the end surfaces of the first and second socket portions, respectively, and the support member is provided on the first pedestal. The second positioning member in which the protrusion can be inserted and a long hole extending along the third direction is formed, and the second pedestal is provided, and the second protrusion can be inserted in the third direction. And a third positioning member formed with a long hole extending along the axis. In this case, when the lamp is mounted on the cassette so that the first and second socket portions of the lamp are located on the first and second pedestals, respectively, the first and second protrusions are respectively the second and third protrusions. It is inserted through the long hole of the positioning member. Therefore, the lamp can be roughly positioned with respect to the cassette. Further, since the lamp is urged in the third direction by the first and second urging members, the lamp is displaced in the third direction until the lamp is pressed against the lid member in the lamp house. . Therefore, it is possible to determine whether or not the lamp is in contact with the lid member by grasping the relative positions of the first and second protrusions with respect to the elongated hole extending in the third direction.

  A light irradiation apparatus according to another aspect of the present disclosure includes any one of the lamp houses described above and a substrate processing chamber that is connected to the bottom wall portion of the lamp house and configured to be capable of arranging a substrate therein.

  A lamp replacement method according to another aspect of the present disclosure includes a frame-shaped support capable of supporting a plurality of lamps including a straight tubular lamp portion and first and second socket portions connected to both ends of the lamp portion, respectively. A lamp replacement cassette having a member, wherein the support member includes a plurality of first pedestals configured to hold the first socket portions of the respective lamps in a row along the first direction. A first frame portion provided in a line and a plurality of second pedestals configured to hold a second socket portion of each lamp are provided so as to be aligned in a line along the first direction. A first frame portion, a second frame portion facing the first frame portion, and a pair of flange portions projecting sideways. 2 in the second direction facing the frame part A first urging member for urging the first socket portion in the third direction is provided, and each second pedestal urges the second socket portion in the third direction. The first step of preparing the cassette provided with the second urging member, the bottomed container provided with the window member on the bottom wall, and the opening of the bottomed container can be opened and closed A housing having a lid member, wherein the bottomed container is provided with a pair of guide members having inclined surfaces inclined from the opening side toward the bottom wall side. 2, a third step of mounting a plurality of lamps on the cassette such that the first and second socket portions of each lamp are held on the first and second pedestals, respectively, and a third step After that, the pair of flange portions of the cassette are respectively opened with the lid member opened. A fourth step of sliding the cassette toward the bottom wall along the pair of guide members while abutting against the inclined surfaces of the pair of guide members; and the opening portion is closed by the lid member after the fourth step. And a fifth step in which the first and second urging members urge the first and second socket portions so that the lamp contacts the lid member by accommodating the cassette in the housing. Including.

  In the lamp replacement method according to another aspect of the present disclosure, in the third step, the plurality of lamps are arranged such that the first and second socket portions of each lamp are held by the first and second pedestals, respectively. It is mounted on the cassette. Each first pedestal is provided with a first urging member for urging the first socket portion in the third direction, and each second pedestal is provided with a first urging member in the third direction. Since the second urging member for urging the two socket portions is provided, the lamp is moved in the third direction by the first and second urging members via the first and second socket portions. It is energized towards. Accordingly, in the fifth step, when a cassette loaded with a plurality of lamps is accommodated in the lamp house, the lamp biased in the third direction is pressed against a lid member (for example, a cooling member) in the lamp house. . Thus, since each lamp is individually urged in the third direction by the first and second urging members regardless of the tolerance of the lamp, the urging force for any one of the lamps is not insufficient. All lamps come into contact with the lid member. As described above, since it is not necessary to manually install a plurality of lamps in the lamp house so that the lamp contacts the lid member in order to exchange heat between the lamp and the lid member, the plurality of lamps can be efficiently replaced. Can be performed.

  Incidentally, in recent years, a plurality of excimer lamps may be arranged in a lamp house for reasons such as an increase in the size of an object to be processed and efficient ozone generation. In recent years, with the increase in size of the light irradiation device including the lamp house, the work space for replacing the lamp is limited, and it tends to be difficult to largely open the lid (door) of the lamp house. Due to these factors, there is a concern that it takes time and labor to replace the lamp. In addition, since the working space is narrowed, there is a concern that the operator may hit the lamp against the surrounding device when replacing the lamp, and the lamp may be damaged.

  On the other hand, in the lamp replacement method according to another aspect of the present disclosure, in the fourth step, the pair of flange portions protruding toward the side of the support member are brought into contact with the inclined surfaces of the pair of guide members, respectively. Meanwhile, the cassette is slid along the pair of guide members toward the bottom wall. Therefore, in the fourth step, the cassette moves from the opening side of the bottomed container to the bottom wall side according to the inclination of the inclined surface. Therefore, since the cassette can be accommodated in the housing by simply sliding the cassette from the side of the housing, the housing lid member can be completely removed from the bottomed container, or the housing lid member can be removed from the bottomed container. There is no need to open it up. As a result, even if the work space is narrow, it is possible to replace the lamp safely and efficiently by simply sliding the cassette from the side of the housing.

  A lamp replacement method according to another aspect of the present disclosure includes a frame-shaped support capable of supporting a plurality of lamps including a straight tubular lamp portion and first and second socket portions connected to both ends of the lamp portion, respectively. A lamp replacement cassette having a member, wherein the support member includes a plurality of first pedestals configured to hold the first socket portions of the respective lamps in a row along the first direction. A first frame portion provided in a line and a plurality of second pedestals configured to hold a second socket portion of each lamp are provided so as to be aligned in a line along the first direction. The first frame portion and the second frame portion facing each other, the support member is provided with a through hole, and each first pedestal has a first direction and a first and second direction, respectively. The frame part of the frame intersects both the opposite second direction A first urging member for urging the first socket portion in the third direction is provided, and each second pedestal is provided with a second urging member for urging the second socket portion in the third direction. The first step of preparing the cassette provided with two urging members, the bottomed container provided with the window member on the bottom wall, and the opening of the bottomed container can be opened and closed. And a fixing member for fixing the lid member and the cassette. The lid member is swingably attached to the bottomed container so that the lid member approaches and separates from the opening. And a hook member extending toward the inside of the bottomed container is provided on the inner surface side of the lid member and in the vicinity of the attachment position between the lid member and the bottomed container. And the first and second socket parts of each lamp on the first and second pedestals, respectively. A third step of mounting a plurality of lamps on the cassette so as to be held, and after the third step, with the lid member opened, the cassette is slid toward the hook member to penetrate A fourth step of inserting the tip of the hook member into the hole, and after the fourth step, by fixing the cassette to the lid member, the first and second attachments are made so that the lamp contacts the lid member. The biasing member includes a fifth step of biasing the first and second socket portions, respectively, and a sixth step of closing the opening with the lid member after the fifth step.

  In the lamp replacement method according to another aspect of the present disclosure, in the third step, the plurality of lamps are arranged such that the first and second socket portions of each lamp are held by the first and second pedestals, respectively. It is mounted on the cassette. Each first pedestal is provided with a first urging member for urging the first socket portion in the third direction, and each second pedestal is provided with a first urging member in the third direction. Since the second urging member for urging the two socket portions is provided, the lamp is moved in the third direction by the first and second urging members via the first and second socket portions. It is energized towards. Accordingly, in the fifth step, when a cassette on which a plurality of lamps are mounted is fixed to the lid member, the lamp biased in the third direction is applied to the lid member (for example, a cooling member) provided on the lid member. Pressed. Thus, since each lamp is individually urged in the third direction by the first and second urging members regardless of the tolerance of the lamp, the urging force for any one of the lamps is not insufficient. All lamps come into contact with the lid member. As described above, since it is not necessary to manually install a plurality of lamps in the lamp house so that the lamp contacts the lid member in order to exchange heat between the lamp and the lid member, the plurality of lamps can be efficiently replaced. Can be performed.

  According to the lamp replacement cassette, the lamp house, the light irradiation apparatus, and the lamp replacement method according to the present disclosure, it is possible to efficiently replace a plurality of lamps.

FIG. 1 is a perspective view showing an example of a substrate processing system. 2 is a cross-sectional view taken along line II-II in FIG. 3 is a cross-sectional view taken along line III-III in FIG. 4 is a cross-sectional view taken along line IV-IV in FIG. FIG. 5 is a side view showing an example of the light irradiation device. FIG. 6 is a perspective view showing an example of a lamp house. 7 is a cross-sectional view taken along line III-III in FIG. FIG. 8 is a perspective view showing a bottomed container. FIG. 9 is a perspective view showing the cassette. FIG. 10 is a side view showing the cassette. FIG. 11 is a front view showing the cassette. FIG. 12 is a rear view showing the cassette. FIG. 13 is a diagram for explaining a lamp replacement method. FIG. 14 is a diagram for explaining an example of a lamp replacement method. FIG. 15 is a cross-sectional view showing another example of a lamp house. FIG. 16 is a diagram for explaining another example of the lamp replacement method. FIG. 17 is a side view showing another example of the lamp.

  Since the embodiment according to the present disclosure described below is an example for explaining the present invention, the present invention should not be limited to the following contents. In the following description, the same reference numerals are used for the same elements or elements having the same function, and redundant description is omitted.

[Substrate processing system]
First, the substrate processing system 1 will be described with reference to FIGS. The substrate processing system 1 is, for example, a film forming processing system, and forms a film on an object to be processed. The object to be processed may be, for example, a semiconductor substrate, a glass substrate, a mask substrate, an FPD (Flat Panel Display) substrate, or other various substrates. The substrate processing system 1 includes a carrier block 2 and a processing block 3.

  The carrier block 2 includes a carrier station 21 and a carry-in / out unit 22. The carrier station 21 supports a plurality of carriers 10. The carrier 10 accommodates, for example, a plurality of circular semiconductor substrates W in a sealed state. On one side surface 10 a of the carrier 10, an opening / closing door for taking in and out the semiconductor substrate W is provided.

  The carry-in / out unit 22 is arranged so as to be interposed between the carrier station 21 and the processing block 3, and has a plurality of opening / closing doors 22 a respectively corresponding to the plurality of carriers 10 on the carrier station 21. The carry-in / out section 22 incorporates a delivery arm A1. The delivery arm A1 is configured to take out the semiconductor substrate W from the carrier 10 and pass it to the processing block 3 in a state where both the opening / closing door of the carrier 10 and the corresponding opening / closing door 22a are opened, and the processed semiconductor substrate. A process of receiving W from the processing block 3 and returning it to the carrier 10 can be performed.

  As shown in FIG. 2, the processing block 3 includes a plurality of processing modules 31 to 34, a shelf 35, and a transfer arm A2. The shelf 35 is arranged on the carrier block 2 side in the processing block 3. The shelf 35 temporarily stores the semiconductor substrate W, and is used to transfer the semiconductor substrate W between the transfer arm A1 and the processing block 3. The transfer arm A <b> 2 transfers the semiconductor substrate W between the shelf 35 and the processing modules 31 to 34 and between the processing modules 31 to 34.

  As shown in FIG. 3, each of the processing modules 31 and 32 has a plurality of liquid processing units U1 arranged in the vertical direction. The liquid processing unit U1 applies, for example, a liquid for forming an organic film to the surface of the semiconductor substrate W. A liquid storage chamber R1 for storing a liquid to be supplied to the liquid processing unit U1 is provided below the processing modules 31 and 32.

  As shown in FIG. 4, each of the processing modules 33 and 34 includes a plurality of heat treatment units U2 and a plurality of light irradiation units U3 (light irradiation devices) arranged in the vertical direction. The heat treatment unit U2 performs heat treatment associated with the formation of an organic film, for example. Specific examples of the heat treatment include heat treatment for curing a coating film for forming an organic film. The light irradiation unit U3 irradiates the organic film formed on the surface of the semiconductor substrate W with light, and performs, for example, adjustment of the film thickness of the organic film (so-called etching process), removal of the organic film (so-called ashing), etc. To do.

  The substrate processing system 1 processes the semiconductor substrate W by the following procedure, for example. First, the delivery arm A <b> 1 transports the semiconductor substrate W in the carrier 10 to the shelf portion 35. Next, the transfer arm A <b> 2 transfers the semiconductor substrate W of the shelf 35 to the liquid processing unit U <b> 1 of either of the processing modules 31 and 32. The liquid processing unit U1 applies a liquid for forming an organic film on the surface of the semiconductor substrate W. Next, the transfer arm A2 transfers the semiconductor substrate W to which the liquid has been applied to one of the heat treatment units U2 of the processing modules 33 and 34. The heat treatment unit U2 performs heat treatment for curing the coating film on the surface of the semiconductor substrate W. Thereby, an organic film is formed on the surface of the semiconductor substrate W.

  Next, the transfer arm A2 transfers the semiconductor substrate W having the organic film formed on the surface thereof to one of the light irradiation units U3 of the processing modules 33 and 34. The light irradiation unit U3 irradiates the organic film with light. Thereafter, the transfer arm A <b> 2 transfers the semiconductor substrate W to the shelf 35, and the transfer substrate A <b> 1 returns to the inside of the carrier 10. Thus, the processing of the semiconductor substrate W is completed.

[Light irradiation unit]
Next, the light irradiation unit U3 will be described in more detail with reference to FIG. The light irradiation unit U3 is a device that processes an object to be processed with light irradiated from a plurality of lamps LP. The light may be, for example, ultraviolet light.

  The lamp LP includes a lamp portion LPa, socket portions LPb and LPc, a cable LPd, and a plurality of protruding portions LPe and LPf (see FIGS. 13 and 14). The lamp part LPa has a straight tube shape and emits light to the surroundings. The socket part LPb is connected to one end of the lamp part LPa. The socket part LPc is connected to the other end of the lamp part LPa. The cable LPd is connected to the socket part LPb. The cable LPd is electrically connected to a power source, thereby supplying electricity to the lamp LP. The plurality of projecting portions LPe (two projecting portions LPe in this embodiment) are provided on the end surface so as to project outward from the end surface of the socket portion LPb. The plurality of projecting portions LPf (two projecting portions LPf in the present embodiment) are provided on the end surface so as to project outward from the end surface of the socket portion LPc. The protrusions LPe and LPf are, for example, bolt heads.

  The light irradiation unit U3 includes a substrate processing chamber 100 and a lamp house 200. The substrate processing chamber 100 and the lamp house 200 are adjacent to each other in the vertical direction. The top wall portion of the substrate processing chamber 100 and the bottom wall portion of the lamp house 200 are detachably connected.

[Substrate processing room]
The substrate processing chamber 100 is a chamber provided with a stage (not shown) configured to be capable of placing (arranging) the semiconductor substrate W. In the substrate processing chamber 100, the transfer of the semiconductor substrate W by the transfer arm A2, the placement of the semiconductor substrate W on the stage, the irradiation of light to the semiconductor substrate W on the stage, and the transfer arm of the processed semiconductor substrate W are performed. Carrying out by A2 is executed. Therefore, an opening (not shown) for loading / unloading the semiconductor substrate W is provided in the side wall portion of the substrate processing chamber 100. A light irradiation opening (not shown) through which light from the lamp house 200 can enter is provided in the top wall portion of the substrate processing chamber 100.

[Lamp House]
The lamp house 200 accommodates a plurality of lamps LP, and is configured to irradiate light toward the substrate processing chamber 100 through an opening for light irradiation. As illustrated in FIG. 6, the lamp house 200 includes a housing 300 and a lamp replacement cassette 500.

[housing]
The housing 300 is configured to accommodate the cassette 400. As illustrated in FIGS. 6 to 8, the housing 300 includes a bottomed container 302, a lid member 304, and a damper 306. The bottomed container 302 includes a bottom wall portion 308, a pair of side wall portions 310 and 312, and a pair of end wall portions 314 and 316. The bottomed container 302 has an opening 302a opened upward. The opening 302a is constituted by the upper edges of the side wall portions 310 and 312 and the end wall portions 314 and 316.

  The bottom wall portion 308 has a rectangular shape. As shown in FIG. 8, the bottom wall portion 308 is a plate-like body having a pair of side edges 308a and 308b and a pair of end edges 308c and 308d. The pair of side edges 308a and 308b face each other and extend along the first direction (X direction in the figure). The pair of end edges 308c and 308d face each other and are adjacent to the pair of side edges 308a and 308b. The pair of end edges 308c and 308d extend along a second direction (Y direction in the drawing) orthogonal to the X direction.

  As shown in FIGS. 6 and 7, a through hole 308 e that penetrates the bottom wall portion 308 is formed in the center portion of the bottom wall portion 308. The through hole 308 e communicates with the light irradiation opening of the substrate processing chamber 100 in a state where the lamp house 200 is attached to the substrate processing chamber 100. A window member 318 capable of transmitting light emitted from the lamp LP is attached to the through hole 308e. The window member 318 closes the through hole 308e.

  A concave groove portion 308f (engagement portion) having a rectangular shape is formed in the vicinity of a corner portion of the bottom wall portion 308 where the side edge 308a and the end edge 308c intersect. A concave groove portion 308g (engagement portion) having a rectangular shape is formed in the vicinity of a corner portion of the bottom wall portion 308 where the side edge 308b and the end edge 308c intersect. The recessed groove portions 308f and 308g are configured to be engageable with latch members 436 and 438 (described later) of the cassette 400, respectively. The recessed groove portions 308f and 308g only have to be provided in the bottomed container 302, and may be provided in other wall portions 310, 312, 314, and 316 other than the bottom wall portion 308.

  As shown in FIGS. 7 and 8, a pair of positioning members 320 and 322 and a pair of positioning members 324 and 326 are provided on the bottom wall portion 308. These positioning members 320, 322, 324, and 326 are configured to define the position of the cassette 400 with respect to the bottomed container 302. These positioning members 320, 322, 324, and 326 only have to be provided in the bottomed container 302, and are provided in other wall portions 310, 312, 314, and 316 other than the bottom wall portion 308. Also good.

  The positioning members 320 and 322 are erected on the bottom wall portion 308. The positioning members 320 and 322 have a columnar shape extending along the Z direction. The positioning members 320 and 322 face each other in the Y direction. The positioning member 320 is close to the side edge 308a and is located between the center portion of the side edge 308a and the end edge 308c in the X direction. The positioning member 322 is close to the side edge 308b and is positioned between the center portion of the side edge 308b and the end edge 308c in the X direction.

  The positioning members 324 and 326 are erected on the bottom wall portion 308. The positioning members 324 and 326 have a columnar shape extending along the Z direction. The positioning members 324 and 326 are opposed to each other in the Y direction. The positioning member 324 is located at a corner where the side edge 308a and the end edge 308d intersect, and is bent into an L shape along the corner. The positioning member 326 is located at a corner where the side edge 308b and the end edge 308d intersect, and is bent into an L shape along the corner.

  The side wall portions 310 and 312 are erected on the bottom wall portion 308. The side wall portions 310 and 312 are rectangular bodies having a rectangular shape, and face each other in the Y direction. As shown in FIG. 8, the side wall portions 310 and 312 are provided near the side edges 308a and 308b, respectively, and extend along the side edges 308a and 308b.

  Guide members 328 and 330 are provided on the inner surfaces of the side walls 310 and 312, respectively. In addition, these guide members 328 and 330 should just be provided in the bottomed container 302, and may be provided in wall parts 314 and 316 other than the side wall parts 310 and 312. FIG.

  The guide member 328 includes rails 332 and 334. The rail 332 includes first to third portions 336, 338, and 340. The first portion 336 extends near the end edge 308c and near the upper edge of the side wall portion 310 along the upper edge. One end of the second portion 338 is connected to the end of the first portion 336 on the end edge 308d side. The other end of the second portion 338 extends toward the edge 308d and toward the bottom wall 308. That is, the second portion 338 is inclined at a predetermined angle so as to approach the bottom wall portion 308 toward the end edge 308d side. One end of the third portion 340 is connected to the other end of the second portion 338. The other end of the third portion 340 extends toward the bottom wall portion 308 on the end edge 308 d side and is connected to the bottom wall portion 308. That is, the third portion 340 is inclined at a predetermined angle so as to approach the bottom wall portion 308 toward the end edge 308d side. The inclination angle of the third portion 340 is larger than the inclination angle of the second portion 338. The upper surfaces of the second and third portions 338 and 340 constitute an inclined surface that is inclined from the opening 302a side toward the bottom wall portion 308 side. The rail 334 extends substantially parallel to the second portion 338 above the second portion 338.

  The guide member 330 includes rails 342 and 344. The rail 342 includes first to third portions 346, 348, 350. The first portion 346 extends near the edge 308c and near the upper edge of the side wall 312 along the upper edge. One end of the second portion 348 is connected to the end of the first portion 346 on the end edge 308d side. The other end of the second portion 348 extends toward the edge 308d and toward the bottom wall 308. That is, the second portion 348 is inclined at a predetermined angle so as to approach the bottom wall portion 308 toward the end edge 308d side. One end of the third portion 350 is connected to the other end of the second portion 348. The other end of the third portion 350 extends toward the bottom wall portion 308 on the end edge 308 d side, and is connected to the bottom wall portion 308. That is, the third portion 350 is inclined at a predetermined angle so as to approach the bottom wall portion 308 toward the end edge 308d side. The inclination angle of the third portion 350 is larger than the inclination angle of the second portion 348. The upper surfaces of the second and third portions 348 and 350 constitute an inclined surface that is inclined from the opening 302a side toward the bottom wall portion 308 side. The rail 344 extends substantially parallel to the second portion 348 above the second portion 348.

  The end wall portions 314 and 316 are erected from the bottom wall portion 308 upward (in the Z direction in the drawing). The end wall portions 314 and 316 are plate-like bodies having a rectangular shape and face each other in the X direction. As shown in FIG. 8, each of the end wall portions 314 and 316 is provided in the vicinity of the end edges 308c and 308d, and extends along the end edges 308c and 308d.

  The end wall portion 314 is provided with a plurality of circular opening portions 314a to 314d. The openings 314a to 314d are arranged in a line from the side edge 308a side to the side edge 308b side. At the upper end of the end wall portion 314, a recess 314e that is recessed toward the lower end side (the bottom wall portion 308 side) is provided. The recess 314e extends along the end edge 308c. The recess 314e communicates with the upper ends of the openings 314a to 314d. Therefore, the upper ends of the openings 314a to 314d are opened upward.

  As shown in FIGS. 6 and 7, a closing member 352 is detachably attached to the recess 314e. The closing member 352 is a plate-like body having a shape corresponding to the recess 314e, that is, a rectangular shape.

  A pair of closing members 354 and 356 that close the openings 314a to 314d are detachably attached to the outer surface of the end wall portion 314. The blocking members 354 and 356 are both plate-like bodies having a rectangular shape. A plurality of recesses 354 a to 354 d having a semicircular shape are provided on the lower edge of the closing member 354. The recesses 354a to 354d extend in the thickness direction of the closing member 354. That is, the inner surfaces of the recesses 354a to 354d have a semi-cylindrical shape. The recesses 354a to 354d are arranged in a line from the side edge 308a side to the side edge 308b side so as to correspond to the openings 314a to 314d, respectively.

  A plurality of concave portions 356 a to 356 d having a semicircular shape are provided on the upper edge of the closing member 356. The recesses 356a to 356d extend in the thickness direction of the closing member 356. That is, the inner surfaces of the recesses 356a to 356d have a semi-cylindrical shape. The recesses 356a to 356d are arranged in a line from the side edge 308a side to the side edge 308b side so as to correspond to the openings 314a to 314d, respectively.

  By combining the blocking members 354 and 356, as shown in FIG. 6, the recesses 354a and 356a constitute one through hole 358a that passes through the blocking members 354 and 356. Similarly, the recesses 354b and 356b constitute one through hole 358b that passes through the closing members 354 and 356. The recesses 354c and 356c constitute one through hole 358c that penetrates the blocking members 354 and 356. The recesses 354d and 356d constitute one through hole 358d that penetrates the blocking members 354 and 356. The diameters of these through holes 358a to 358d are sufficiently smaller than the diameters of the openings 314a to 314d and are approximately the same as the diameter of the cable LPd of the lamp LP.

  The lid member 304 is a plate-like body having a rectangular shape as shown in FIGS. The size of the lid member 304 is larger than that of the opening 302a and is approximately the same as that of the bottom wall 308. The lid member 304 is connected to the end wall portion 316 via a plurality of hinges 360. Therefore, the lid member 304 can swing between a closed position that closes the opening 302a and an open position that is spaced apart from the opening 302a and opens the opening 302a, with the hinge 360 as a rotation axis. That is, the lid member 304 is configured to be able to open and close the opening 302a.

  A cooling member 362, a mirror member 364, and a lamp holder 366 are provided on the inner surface (lower surface) of the lid member 304. Therefore, the cooling member 362, the mirror member 364, and the lamp holder 366 are opposed to the bottom wall portion 308 in a state where the lid member 304 is located at the closing position that closes the opening 302a.

  The cooling member 362 is configured to cool the lamp LP by exchanging heat with the plurality of lamps LP. Therefore, a flow path (not shown) is provided in the cooling member 362 for circulating a refrigerant (for example, a cooling gas or a cooling liquid).

  A plurality of concave portions (not shown) having a semicircular shape are provided on the lower surface of the cooling member 362. The plurality of concave portions are arranged along the facing direction (Y direction) of the side edges 308a and 308b. The concave portion extends in a direction (X direction) opposite to the end edges 308c and 308d. That is, the inner surface of the recess has a semi-cylindrical shape corresponding to the outer peripheral surface of the lamp portion LPa.

  The mirror member 364 is configured to reflect the light of the lamp LP toward the window member 318. The mirror members 364 are respectively disposed between adjacent recesses in the cooling member 362. The lamp holder 366 is configured to hold the socket portion LPb of the lamp LP. Specifically, the lamp holder 366 includes a pair of holding portions having an arc shape. The pair of holding portions oppose each other so as to have a shape corresponding to the outer peripheral surface of the lamp portion LPa. The pair of holding portions are biased so as to return to their original positions when they are pushed outward so as to be separated from each other.

  The damper 306 is configured to apply a resistance force that slows the operation of the lid member 304 to the lid member 304 when the posture of the lid member 304 changes from the open position to the closed position. That is, the damper 306 is a device that prevents the lid member 304 from being suddenly displaced from the open position to the closed position. The damper 306 moves the lid member 304 from the intermediate position to the closed position rather than the speed (first speed) when the lid member 304 moves from the open position to an intermediate position between the open position and the closed position. A resistance force may be applied to the lid member 304 so that the speed (second speed) at the time becomes small. That is, the moving speed of the lid member 304 changes in two stages by the resistance force of the damper 306 until it moves from the open position to the closed position. The moving speed of the lid member 304 may change in multiple stages (three or more stages) depending on the resistance force of the damper 306.

[cassette]
The cassette 400 is configured to hold a plurality of lamps LP (four lamps LP in the present embodiment). By loading / unloading the plurality of lamps LP into / from the housing 300 using the cassette 400, the used or old lamp LP can be taken out and a new lamp LP can be attached quickly and easily. That is, the cassette 400 is used for replacing a plurality of lamps LP.

  As illustrated in FIGS. 9 to 12, the cassette 400 includes a frame-shaped support member 402 that can support a plurality of lamps LP. The support member 402 includes a pair of frame portions 404 and 406 and a pair of frame portions 408 and 410. The frame portions 404 and 406 oppose each other in the X direction and extend along the Y direction. The frame portions 408 and 410 oppose each other in the Y direction and extend along the X direction. The frame portions 404 and 406 and the frame portions 408 and 410 are adjacent to each other.

  The frame portion 404 (first frame portion) is provided with a plurality of pedestals 412 (in the present embodiment, the same number of four pedestals 412 as the lamps LP). The plurality of pedestals 412 (first pedestals) are arranged in a line along the extending direction of the frame portion 404. Each pedestal 412 is configured such that, for example, one flat plate is bent into a concave shape, and holds the socket portion LPb of each lamp LP. That is, the pedestal 412 includes a bottom plate, a pair of side plates, and a pair of upper plates. The bottom plate extends in the Y direction. The pair of side plates are erected on both ends of the bottom plate so as to extend in a third direction (Z direction) orthogonal to both the X direction and the Y direction. The pair of upper plates extends in the Y direction from the tips of the pair of side plates to the outside. The width of the base 412 (the spacing between the pair of side plates) is set slightly smaller than the diameter of the socket portion LPb.

  The pedestal 412 is provided with a biasing member 414. The urging member 414 is a pair of leaf springs having an L shape and is elastically deformable. Specifically, one end side of the leaf spring is a fixed end attached to the upper plate of the pedestal 412. The other end side of the leaf spring is a free end located in the hollow of the recess of the base 412 (above the bottom plate). When an external force is applied to the free end, a restoring force is generated in the leaf spring to return the free end to its original position. Therefore, when the socket portion LPb placed on the pedestal 412 presses the urging member 414 toward the recessed portion of the pedestal 412, the urging member 414 has the opening end direction of the recessed portion of the pedestal 412, that is, the Z direction (see FIG. The socket portion LPb is biased in the upward direction). Hereinafter, the side (upper side in the figure) on which the lamp LP is placed in the cassette 400 is referred to as the front part of the cassette 400, and the opposite side (lower side in the figure) is referred to as the back part of the cassette 400.

  A regulating member 416 is provided on the side plate of the base 412. The restricting member 416 is, for example, a flat plate that protrudes upward from the upper plate. The restricting member 416 is configured to abut the socket portion LPb and restrict the movement of the lamp LP from the frame portion 406 toward the frame portion 404.

  The frame portion 404 is provided with a plurality of fixing members 418 (two fixing members 418 in this embodiment). The fixing member 418 is a fastener such as a snap lock. The fixing member 418 is configured to engage with a hook member (not shown) provided on the lid member 304 to lock the cassette 400 to the lid member.

  A positioning member 420 having a flat plate shape is provided on the outer surface of the frame portion 404. The positioning member 420 has a plurality of projecting portions 422 projecting in the Z direction (the upper side in the figure, the front side of the cassette 400). Each protrusion 422 is arranged at a position corresponding to each pedestal 412. Each protrusion 422 is formed with a pair of long holes 424 extending along the Z direction. The width of the long hole 424 is set to be slightly larger than the outer shape of the protrusion LPe of the lamp LP. Therefore, the protrusions LPe can be inserted into the respective long holes 424 one by one in a state where the socket part LPb is placed on the pedestal 412. The protrusion portion LPe is relatively movable in the width direction and the extension direction of the long hole 424 in the long hole 424 (see FIG. 11).

  A pair of latch members 436 and 438 (buffer members) are provided on the back side of the cassette 400 in the frame portion 404. The latch members 436 and 438 are separated from each other in the extending direction (Y direction) of the frame portion 404. The latch members 436 and 438 are leaf springs having an L shape and can be elastically deformed. Specifically, one end side of the leaf spring is a fixed end attached to the back side (the lower surface side in the drawing) of the frame portion 404. The other end of the leaf spring is a free end that extends downward and then bends upward. When an external force is applied to the free end, a restoring force is generated in the leaf spring to return the free end to its original position. Therefore, when the latch members 436 and 438 abut against the bottom wall portion 308, the latch members 436 and 438 are configured to urge the cassette 400 toward the side away from the bottom wall portion 308 (the lid member 304 side) while absorbing the impact force. ing. With the cassette 400 housed in the housing 300, the free end of the latch member 436 is inserted into the recessed groove portion 308f and engaged with the recessed groove portion 308f, and the free end of the latch member 438 is inserted into the recessed groove portion 308g. And engages with the groove 308g.

  The frame portion 406 (second frame portion) is provided with a plurality of pedestals 426 (in this embodiment, the same number of four pedestals 426 as the lamps LP). The plurality of bases 426 (second bases) are arranged in a line along the extending direction of the frame portion 406. Each pedestal 426 is configured such that, for example, one flat plate is bent into a concave shape, and holds the socket portion LPc of each lamp LP. That is, the pedestal 426 includes a bottom plate, a pair of side plates, and a pair of upper plates. The bottom plate extends in the Y direction. The pair of side plates is erected on both ends of the bottom plate so as to extend in the Z direction. The pair of upper plates extends in the Y direction from the tips of the pair of side plates to the outside. The width of the base 426 (the spacing between the pair of side plates) is set slightly smaller than the diameter of the socket portion LPc.

  An urging member 428 is provided on the base 426. The biasing member 428 is, for example, a pair of leaf springs having an L shape and is elastically deformable. Specifically, one end side of the leaf spring is a fixed end attached to the upper plate of the pedestal 426. The other end of the leaf spring is a free end located in the hollow of the recess of the base 426 (above the bottom plate). When an external force is applied to the free end, a restoring force is generated in the leaf spring to return the free end to its original position. Therefore, when the socket portion LPc placed on the pedestal 426 presses the urging member 428 toward the recessed portion of the pedestal 426, the urging member 428 has an open end direction of the recessed portion of the pedestal 426, that is, the Z direction (see FIG. The socket portion LPb is biased toward the upper side of the cassette 400 and the front side of the cassette 400.

  A positioning member 430 having a flat plate shape is provided on the outer surface of the frame portion 406. The positioning member 430 protrudes from the frame portion 404 in the Z direction (the upper side in the figure, the front side of the cassette 400). The positioning member 430 is formed with a pair of long holes 432 and an urging member 434 at positions corresponding to the pedestals 426. The width of the long hole 432 is set to be slightly larger than the outer shape of the protrusion LPf of the lamp LP. In each of the long holes 432, one protruding portion LPf can be inserted one by one in a state where the socket portion LPc is placed on the base 426. The protrusion LPf is relatively movable in the long hole 432 in the width direction and the extending direction of the long hole 432 (see FIG. 12).

  The positioning member 430 is formed with a pair of through holes 440 and 442. The through holes 440 and 442 are separated from each other in the extending direction (Y direction) of the frame portion 406. The through holes 440 and 442 have a rectangular shape extending in the extending direction (Y direction) of the frame portion 406.

  The urging member 434 is, for example, a leaf spring that is inclined so as to approach the frame portion 404 side toward the lower side of the drawing (back side of the cassette 400), and can be elastically deformed. Specifically, one end side of the leaf spring is a fixed end attached to the positioning member 430. The other end side of the leaf spring is a free end that is located on the frame portion 404 side and lower side than the one end. When an external force is applied to the free end, a restoring force is generated in the leaf spring to return the free end to its original position. Therefore, when the socket portion LPc placed on the pedestal 426 presses the biasing member 434 toward the frame portion 406 side, the biasing member 434 has a socket portion LPc from the frame portion 406 side toward the frame portion 404 side. Is configured to energize.

  The frame portion 408 is a columnar member that connects one ends of the frame portions 404 and 406. A flange portion 444 is provided on the outer surface of the frame portion 408 so as to protrude toward the side (Y direction). The flange portion 444 has a flat plate shape. The flange portion 444 extends along the frame portion 408 between the central portion in the X direction of the frame portion 408 and the vicinity of the end portion on the frame portion 406 side. The flange portion 444 faces a flange portion 446 described later in the Y direction.

  The frame portion 408 is provided with a leg portion 448 that protrudes toward the lower side of the drawing (the back side of the cassette 400). The leg portion 448 extends along the extending direction (X direction) of the frame portion 408. The direction in which the leg portion 448 extends is also a direction orthogonal to both the opposing direction of the flange portions 444 and 446 and the Z direction. Leg portion 448 includes a pair of sliding portions 448a and 448b. The pair of sliding portions 448 a and 448 b also extend along the extending direction (X direction) of the frame portion 408. The sliding portion 448 a is located at the end of the frame portion 408 on the frame portion 404 side. The sliding portion 448 b is located at the end of the frame portion 408 on the frame portion 406 side. Therefore, the center part in the extending direction (X direction) of the frame part 408 in the leg part 448 is recessed toward the front part side (upward in the drawing) of the cassette 400. The corner portions of the sliding portions 448a and 448b are skewed toward the front side (upper side in the figure) of the cassette 400 toward the end.

  The frame part 410 is a rod-shaped member that connects the other ends of the frame parts 404 and 406. This is a columnar member that connects the other ends of the frame portions 404 and 406. A flange portion 446 that protrudes toward the side (Y direction) is provided on the outer surface of the frame portion 410. The flange portion 446 has a flat plate shape. The flange portion 446 extends along the frame portion 410 between the center portion in the X direction of the frame portion 410 and the vicinity of the end portion on the frame portion 406 side.

  The frame portion 410 is provided with leg portions 450 that protrude toward the lower side of the drawing (the back side of the cassette 400). The leg portion 450 extends along the extending direction (X direction) of the frame portion 410. The direction in which the leg portion 450 extends is also a direction orthogonal to both the facing direction of the flange portions 444 and 446 and the Z direction. The leg portion 450 includes a pair of sliding portions 450a and 450b. The pair of sliding portions 450 a and 450 b also extend along the extending direction (X direction) of the frame portion 410. The sliding portion 450a is located at the end of the frame portion 410 on the frame portion 404 side. The sliding part 450b is located at the end of the frame part 410 on the frame part 406 side. Therefore, the center part in the extending direction (X direction) of the frame part 410 among the leg parts 450 is recessed toward the front part side (upward in the drawing) of the cassette 400. The corner portions of the sliding portions 450a and 450b are skewed toward the front side of the cassette 400 (upward in the drawing) toward the end.

[How to replace the lamp]
Next, a method for replacing the lamp LP in the lamp house 200 will be described. First, the housing 300 and the cassette 400 described above are prepared. At this time, as shown in FIG. 13, the housing 300 is in a state where the lid member 304 is located at the open position and the closing members 352, 354, 356 are removed from the end wall portion 314. FIG. 13 shows the housing 300 in cross section, while the cassette 400 on which the lamp LP is mounted is shown as viewed from the side instead of the cross section (also in FIGS. 14 to 16 to be described later). The same).

  Subsequently, a plurality of lamps LP are mounted on the cassette 400 so that the socket part LPb of each lamp LP is held by the pedestal 412 and the socket part LPc of each lamp LP is held by the pedestal 426. At this time, the socket portions LPb and LPc are urged toward the front side of the cassette 400 by the urging members 414 and 428, respectively. Further, the socket portion LPc is urged toward the frame portion 404 by the urging member 434 so that the socket portion LPb contacts the restriction member 416. Further, the protrusions LPe and LPf are inserted into the long holes 424 and 432 of the positioning members 420 and 430, respectively.

  Subsequently, as shown in FIG. 13, the cassette 400 is moved along the guide members 328 and 330 while the flange portions 444 and 446 of the cassette 400 are brought into contact with the inclined surfaces of the guide members 328 and 330, respectively. Slide towards the side. That is, the flange portions 444 and 446 are guided by the inclined surfaces of the guide members 328 and 330. At this time, since the corner portions of the sliding portions 448b and 450b are skewed, the collision of the corner portions with the bottom wall portion 308 is alleviated.

  Thereafter, when the entire cassette 400 is placed on the bottom wall portion 308, the frame portion 408 comes into contact with the positioning members 324 and 326. At this time, the cassette 400 is positioned with respect to the bottomed container 302 in the Y direction by the positioning members 320, 322, 324, and 326. The cassette 400 is positioned with respect to the bottomed container 302 in the X direction by the positioning members 324 and 326. The latch members 436 and 438 enter the recessed groove portions 308f and 308g, respectively, and engage with the recessed groove portions 308f and 308g. Thereby, as shown in FIG. 14, the cassette 400 stops at a predetermined position of the bottomed container 302.

  Subsequently, the lid member 304 is moved to the closed position, the opening 302 a is closed by the lid member 304, and the cassette 400 on which the lamp LP is mounted is accommodated in the housing 300. At this time, the lamp holder 366 is engaged with the socket part LPb and holds the socket part LPb. Further, since the socket portions LPb and LPc are urged by the urging members 414 and 428, respectively, the lamp portion LPa is pressed against the cooling member 362 and comes into contact (contact) with the cooling member 362. When the lamp portion LPa comes into contact with the cooling member 362, the projecting portions LPe and LPf inserted into the long holes 424 and 432 are positioned at the center of the long holes 424 and 432 in the Z direction. Therefore, by grasping the relative positions of the protrusions LPe and LPf with respect to the long holes 424 and 432, it can be determined whether or not the lamp portion LPa has contacted the cooling member 362.

  Subsequently, the closing member 352 is attached to the recess 314 e of the end wall portion 314. Thereafter, the closing members 354 and 356 are attached to the outer surface of the end wall portion 314. Thereby, the cable LPd of the lamp LP is inserted into the openings 314a to 314d and the through holes 358a to 358d, respectively. Thus, the cassette 400 on which the lamp LP is mounted is disposed in the housing 300, and the replacement of the lamp LP is completed.

[Action]
In the present embodiment as described above, each base 412 is provided with a biasing member 414 that biases the socket portion LPb, and each base 426 is provided with a biasing member 428 that biases the socket portion LPc. ing. Therefore, when the lamp LP is mounted on the cassette 400 so that the socket portions LPb and LPc of the lamp LP are positioned on the bases 412 and 426, the lamp LP is moved by the biasing members 414 and 428 through the socket portions LPb and LPc. It is urged toward the direction (front side of the cassette 400). Therefore, when the cassette 400 loaded with a plurality of lamps LP is accommodated in the lamp house 200, the lamp LP biased in the Z direction is pressed against the cooling member 362 (lid member 304) in the lamp house 200. As described above, since each lamp LP is individually urged in the Z direction by the urging members 414 and 428 regardless of the tolerance of the lamp LP, the urging force for any of the lamps LP does not become insufficient. The lamp LP comes into contact with the cooling member 362. As described above, since it is not necessary to manually mount the plurality of lamps LP in the lamp house 200 so that the lamps LP are in contact with the cooling member 362 in order to exchange heat between the lamp LP and the cooling member 362, the efficiency is improved. It is possible to exchange a plurality of lamps LP well.

  Incidentally, in recent years, a plurality of lamps LP may be disposed in the lamp house 200 for reasons such as an increase in the size of the semiconductor substrate W and efficient ozone generation. In recent years, with the increase in size of the light irradiation unit U3 including the lamp house 200, the work space for replacing the lamp LP is limited, and it tends to be difficult to largely open the lid member 304 of the lamp house 200. . Due to these factors, there is a concern that it takes time and effort to replace the lamp LP. In addition, since the work space is narrowed, there is a concern that when the lamp LP is replaced, the operator hits the lamp LP with a peripheral device and damages the lamp LP.

  On the other hand, in this embodiment, the support member 402 includes flange portions 444 and 446 that protrude toward the side. In the present embodiment, guide members 328 and 330 are provided in the bottomed container 302. The guide members 328 and 330 have an inclined surface inclined from the opening 302a side of the bottomed container 302 toward the bottom wall portion 308, and are configured to guide the flange portions 444 and 446 by the inclined surface. Yes. Therefore, when the cassette 400 is accommodated in the housing 300, the cassette 400 is moved so that the flange portions 444 and 446 slide on the inclined surface while being in contact with the inclined surface, whereby the cassette 400 is moved according to the inclination of the inclined surface. 400 moves from the opening 302a side of the bottomed container 302 to the bottom wall 308 side. Therefore, since the cassette 400 can be accommodated in the housing 300 by simply sliding the cassette 400 from the side of the housing 300, the lid member 304 of the housing 300 can be completely removed from the bottomed container 302, or the lid of the housing 300 can be removed. The member 304 does not need to be greatly opened with respect to the bottomed container 302. As a result, even if the work space is narrow, it is possible to replace the lamp LP safely and efficiently by simply sliding the cassette 400 from the side of the housing 300.

  In the present embodiment, the corners of the sliding portions 448a, 448b, 450a, and 450b are all skewed toward the front side (upper side in the drawing) of the cassette 400 toward the end. Therefore, since the center part in the X direction of the leg parts 448 and 450 is recessed toward the front side, the cassette 400 is accommodated in the housing 300 and the leg parts are placed on the bottom wall part 308 of the bottomed container 302. When this is done, the leg portions 448 and 450 and the window member 318 provided on the bottom wall portion 308 are difficult to contact. Further, even when the cassette 400 approaches the bottom wall portion 308 with the cassette 400 inclined with respect to the bottom wall portion 308 of the bottomed container 302, the corners of the legs 448 and 450 contact the bottom wall portion 308. hard. As described above, since an impact force is suppressed between the cassette 400 and the housing 300, any of the cassette 400, the housing 300, and the lamp LP held in the cassette 400 is hardly damaged.

  In the present embodiment, latch members 436 and 438 are provided on the back side of the cassette 400 in the support member 402, and the recessed groove portions 308 f and 308 g that can be engaged with the latch members 436 and 438 are the bottom wall portion 308. Is provided. Therefore, when the cassette 400 is accommodated in the housing 300, the latch members 436 and 438 of the cassette 400 are engaged with the concave groove portions 308f and 308g, so that the cassette 400 is more reliably positioned with respect to the housing 300. . Therefore, the plurality of lamps LP can be brought into contact with the lid member 304 at an appropriate position.

  In the present embodiment, the latch members 436 and 438 are elastically deformable. Therefore, even if an impact occurs when the latch members 436 and 438 engage with the recessed groove portions 308f and 308g or come into contact with other members, the latch members 436 and 438 are elastically deformed and the impact is alleviated. Is done. Therefore, since an impact force is suppressed between the cassette 400 and the housing 300, any of the cassette 400, the housing 300, and the lamp LP held in the cassette 400 is hardly damaged.

  In the present embodiment, positioning members 320, 322, 324, and 326 configured to define the position of the cassette 400 with respect to the bottomed container 302 are provided on the bottom wall portion 308. Therefore, the cassette 400 is more reliably positioned with respect to the housing 300. Therefore, the plurality of lamps LP can be brought into contact with the lid member 304 at an appropriate position.

  In the present embodiment, the housing 300 includes a damper 306. For this reason, since the sudden opening and closing of the lid member 304 is suppressed, it is difficult for an impact force to act on the cassette 400 and the lamp LP accommodated in the housing 300.

  In the present embodiment, a restriction member 416 is provided on the pedestal 412, and an urging member 434 is provided on the pedestal 426. Therefore, the urging member 434 urges the socket portion LPc, so that the socket portion LPb comes into contact with the regulating member 416. Therefore, even if there is a tolerance between the plurality of lamps LP, the positions of the plurality of lamps LP are aligned in the facing direction (X direction) of the frame portions 404 and 406. As a result, light can be more uniformly irradiated from the lamp portions LPa of the plurality of lamps LP toward the substrate processing chamber 100.

[Other Embodiments]
As mentioned above, although embodiment concerning this indication was described in detail, you may add various deformation | transformation to said embodiment within the range of the summary of this invention. For example, the housing 300 does not include the cooling member 362, and the lamp portion LPa may directly exchange heat with the lid member 304.

  As long as the opening 302 a can be closed and opened, the lid member 304 may not be attached to the end wall 316 via the hinge 360. That is, the lid member 304 may be independent of the end wall portion 316.

  The latch members 436 and 438 may be provided on the bottomed container 302 side, and an engaging portion that can engage with the latch members 436 and 438 may be provided on the cassette 400 side.

  As shown in FIG. 15, the housing 300 may include hook members 368 and 370 instead of the guide members 328 and 330. The hook members 368 and 370 are provided on the inner surface side of the lid member 304 and in the vicinity of the end wall portion 316. The hook members 368 and 370 include a fixed end portion fixed to the lid member 304, an intermediate portion connected to the fixed end portion and projecting toward the bottom wall portion 308, and an intermediate portion connected to the intermediate portion. Furthermore, a free end portion bent toward the bottom wall portion 308 and toward the end wall portion 314 is included. The hook members 368 and 370 are leaf springs and can be elastically deformed. The hook members 368 and 370 are separated in the Y direction. The hook members 368 and 370 are disposed at positions corresponding to the through holes 440 and 442 of the cassette 400, respectively.

  When the cassette 400 is housed in such a housing 300, the cassette 400 is slid toward the end wall 316 while the end wall 314 and the closing members 352, 354, and 356 are removed from the housing 300. As shown in FIG. 16, when the frame portion 406 reaches the end wall portion 316, the free ends (tip portions) of the hook members 368 and 370 are inserted into the through holes 440 and 442. As a result, the cassette 400 is attached to the lid member 304 via the hook members 368 and 370.

  Subsequently, the cassette 400 is swung with the hook members 368 and 370 as the central axes so that the frame 404 side approaches the lid member 304, and the cassette 400 is fixed to the hook member (not shown) of the lid member 304 by the fixing member 418. To do. Thereby, the cassette 400 is fixed to the lid member 304. At this time, since the socket portions LPb and LPc are urged by the urging members 414 and 428, respectively, the lamp portion LPa is pressed against the cooling member 362 and comes into contact (contact) with the cooling member 362.

  In this state, the lid member 304 is moved to the closed position, and the end wall 314 and the closing members 352, 354, and 356 are sequentially attached to the bottomed container 302, whereby the cassette 400 is accommodated in the housing 300. Also in such a form, there exists an effect similar to said embodiment.

  As shown in FIG. 17, the urging members 414 and 428 may not be provided on the bases 412 and 426, and the urging members LPg and LPh may be provided on the socket portions LPb and LPc, respectively. The urging members LPg and LPh are, for example, springs. In this case, the urging member LPg causes the socket portion LPb to be placed on the front side of the cassette 400 by a reaction force generated by being compressed between the socket portion LPb and the pedestal 412 when the socket portion LPb is held by the pedestal 412. Energize. Therefore, in a state where the cassette 400 is accommodated in the housing 300, the socket portion LPb is pressed against the cooling member 362 side by the biasing member LPg so that the lamp portion LPa contacts the cooling member 362. Similarly, the biasing member LPh attaches the socket portion LPc to the front side of the cassette 400 by a reaction force generated by being compressed between the socket portion LPc and the pedestal 426 when the socket portion LPc is held by the pedestal 426. Rush. Therefore, in a state where the cassette 400 is accommodated in the housing 300, the socket portion LPc is pressed against the cooling member 362 side by the biasing member LPh so that the lamp portion LPa contacts the cooling member 362. Also in such a form, there exists an effect similar to said embodiment.

  DESCRIPTION OF SYMBOLS 1 ... Substrate processing system, 100 ... Substrate processing chamber (processing chamber), 200 ... Lamp house, 300 ... Housing, 302 ... Bottomed container, 302a ... Opening, 304 ... Lid member, 306 ... Damper, 308 ... Bottom wall part , 308f ... concave groove (engagement portion), 308g ... concave groove (engagement portion), 318 ... window member, 320 ... positioning member, 322 ... positioning member, 324 ... positioning member, 326 ... positioning member, 328 ... guide member , 330 ... Guide member, 362 ... Cooling member, 368 ... Hook member, 370 ... Hook member, 400 ... Cassette, 402 ... Support member, 404 ... Frame part (first frame part), 406 ... Frame part (second (Frame portion), 412 ... pedestal (first pedestal), 414 ... biasing member, 416 ... regulating member, 418 ... fixing member, 420 ... positioning member, 424 ... long hole, 26: Pedestal (second pedestal), 428 ... Biasing member, 430 ... Positioning member, 432 ... Long hole, 434 ... Biasing member, 436 ... Latch member, 438 ... Latch member, 440 ... Through hole, 442 ... Through Hole, 444 ... Flange, 446 ... Flange, 448 ... Leg, 450 ... Leg, LP ... Lamp, LPa ... Lamp, LPb ... Socket (first socket), LPc ... Socket (second) Socket), LPe ... projection (first projection), LPf ... projection (second projection), LPg ... biasing member, LPh ... biasing member, U3 ... light irradiation unit (light irradiation device) ).

Claims (12)

A frame-shaped support member capable of supporting a plurality of lamps including a straight tubular lamp part and first and second socket parts connected to both ends of the lamp part,
The support member is
A first frame portion provided so that a plurality of first pedestals configured to hold the first socket portions of the lamps are arranged in a line along a first direction;
A plurality of second pedestals configured to respectively hold the second socket portions of the lamps are provided so as to be arranged in a line along the first direction, and face the first frame portion. A second frame part that
Each of the first pedestals is provided with the first socket portion in a third direction intersecting both the first direction and the second direction in which the first and second frame portions are opposed to each other. A first biasing member for biasing is provided;
The lamp replacement cassette, wherein each of the second pedestals is provided with a second urging member that urges the second socket portion in the third direction. First and second projecting portions projecting outward are provided on the end surfaces of the first and second socket portions, respectively.
The support member is
A first positioning member provided on the first pedestal, through which the first projecting portion can be inserted, and an elongated hole extending along the third direction;
2. The second positioning member further comprising a second positioning member provided on the second pedestal, into which the second projecting portion can be inserted, and in which a long hole extending along the third direction is formed. Cassette. The first pedestal is provided with a regulating member that regulates the movement of the lamp from the second pedestal toward the first pedestal.
The second pedestal is biased from the second pedestal toward the first pedestal so that the first socket comes into contact with the restriction member. The cassette according to claim 1, wherein a third biasing member is provided.   The cassette according to any one of claims 1 to 3, further comprising a buffer member provided on a back side of the support member opposite to a front portion where the lamp is held. A lamp replacement cassette having a frame-shaped support member capable of supporting a plurality of lamps including a straight tubular lamp part and first and second socket parts respectively connected to both ends of the lamp part;
A housing configured to receive the cassette,
The housing is
A bottomed container provided with a window member on the bottom wall, and
A lid member configured to be able to open and close the opening of the bottomed container;
The support member is
A first frame portion provided so that a plurality of first pedestals configured to hold the first socket portions of the lamps are arranged in a line along a first direction;
A plurality of second pedestals configured to respectively hold the second socket portions of the lamps are provided so as to be arranged in a line along the first direction, and face the first frame portion. A second frame portion to
Including a pair of flange portions projecting sideways,
The bottomed container is provided with a pair of guide members configured to have an inclined surface inclined from the opening side toward the bottom wall side and to guide the flanges by the inclined surface. And
Each of the first pedestals has a third direction that intersects both the first direction and a second direction in which the first and second frame portions face each other, and the cassette is located in the housing. A first biasing member is provided for biasing the first socket portion so that the lamp contacts the lid member in a state of being housed inside;
Each of the second pedestals urges the second socket portion in the third direction so that the lamp contacts the lid member in a state where the cassette is accommodated in the housing. A lamp house provided with a second biasing member. The cassette further includes a latch member provided on the back side of the support member opposite to the front part where the lamp is held,
The lamp house according to claim 5, wherein an engagement portion that can be engaged with the latch member is provided inside the bottomed container. A plurality of lamps including a straight tubular lamp part and first and second socket parts respectively connected to both ends of the lamp part;
A lamp replacement cassette having a frame-shaped support member capable of supporting the plurality of lamps;
A housing configured to receive the cassette,
The housing is
A bottomed container provided with a window member on the bottom wall, and
A lid member configured to be able to open and close the opening of the bottomed container;
The support member is
A first frame portion provided so that a plurality of first pedestals configured to hold the first socket portions of the lamps are arranged in a line along a first direction;
A plurality of second pedestals configured to respectively hold the second socket portions of the lamps are provided so as to be arranged in a line along the first direction, and face the first frame portion. And a second frame portion to
The first and second socket portions are provided with first and second urging members, respectively.
The first urging member is caused by a reaction force generated by being compressed between the first socket portion and the first pedestal when the first socket portion is held on the first pedestal. The lamp is in a third direction intersecting both the first direction and a second direction in which the first and second frame portions are opposed, and the cassette is accommodated in the housing. Urging the first socket portion so that the contact with the lid member,
The second urging member is caused by a reaction force generated by being compressed between the second socket portion and the second pedestal when the second socket portion is held on the second pedestal. A lamp house for urging the second socket portion so that the lamp contacts the lid member in the third direction and the cassette being housed in the housing.   The damper is further provided with the damper comprised so that the resistance force which makes the operation | movement slow when the said cover member changes an attitude | position from the open state to the obstruction | occlusion state with respect to the said opening part may be provided to the said cover member. The lamp house according to any one of 7 above. First and second projecting portions projecting outward are provided on the end surfaces of the first and second socket portions, respectively.
The support member is
A second positioning member provided on the first pedestal, through which the first protrusion can be inserted and formed with a long hole extending along the third direction;
A third positioning member provided on the second pedestal, into which the second projecting portion can be inserted and in which a long hole extending along the third direction is formed. The lamp house according to any one of the above. The lamp house according to any one of claims 5 to 9,
A light irradiation apparatus comprising: a processing chamber connected to the bottom wall portion of the lamp house and configured to be able to arrange an object to be processed therein. A lamp replacement cassette having a frame-shaped support member capable of supporting a plurality of lamps including a straight tubular lamp portion and first and second socket portions connected to both ends of the lamp portion, respectively. ,
The support member is a first frame provided such that a plurality of first pedestals configured to hold the first socket portions of the lamps are arranged in a line along a first direction. And a plurality of second pedestals configured to respectively hold the second socket portions of the lamps are arranged in a line along the first direction, and the first frame A second frame portion facing the portion, and a pair of flange portions projecting sideways,
Each of the first pedestals is provided with the first socket portion in a third direction intersecting both the first direction and the second direction in which the first and second frame portions are opposed to each other. A first biasing member for biasing is provided;
Each of the second pedestals is provided with a second urging member for urging the second socket part in the third direction, and a first step of preparing a cassette;
A housing having a bottomed container provided with a window member on a bottom wall and a lid member configured to be able to open and close an opening of the bottomed container, wherein the bottomed container has the opening A second step of preparing a housing, provided with a pair of guide members having inclined surfaces that are inclined from the portion side toward the bottom wall portion side;
A third step of mounting the plurality of lamps on the cassette such that the first and second socket portions of the lamps are held on the first and second pedestals, respectively;
After the third step, with the lid member opening the opening, the pair of flange portions of the cassette are brought into contact with the inclined surfaces of the pair of guide members, respectively, and the cassette is A fourth step of sliding along the pair of guide members toward the bottom wall,
After the fourth step, the opening is closed by the lid member, and the cassette is accommodated in the housing, so that the lamp comes into contact with the lid member. And a fifth step in which a biasing member biases the first and second socket portions, respectively. A lamp replacement cassette having a frame-shaped support member capable of supporting a plurality of lamps including a straight tubular lamp portion and first and second socket portions connected to both ends of the lamp portion, respectively. ,
The support member is a first frame provided such that a plurality of first pedestals configured to hold the first socket portions of the lamps are arranged in a line along a first direction. And a plurality of second pedestals configured to respectively hold the second socket portions of the lamps are arranged in a line along the first direction, and the first frame A second frame portion facing the portion,
The support member is provided with a through hole,
Each of the first pedestals is provided with the first socket portion in a third direction intersecting both the first direction and the second direction in which the first and second frame portions are opposed to each other. A first biasing member for biasing is provided;
Each of the second pedestals is provided with a second urging member for urging the second socket part in the third direction, and a first step of preparing a cassette;
A bottomed container having a window member provided on a bottom wall; a lid member configured to be able to open and close an opening of the bottomed container; and a fixing member that fixes the lid member and the cassette. A housing,
The lid member is swingably attached to the bottomed container so that the lid member approaches and separates from the opening.
A second housing member is provided, wherein a hook member extending toward the inside of the bottomed container is provided on the inner surface side of the lid member and in the vicinity of an attachment position between the lid member and the bottomed container. And the process of
A third step of mounting the plurality of lamps on the cassette such that the first and second socket portions of the lamps are held on the first and second pedestals, respectively;
After the third step, with the lid member opening the opening, the cassette is slid toward the hook member, and the tip of the hook member is inserted into the through hole. And the process of
After the fourth step, by fixing the cassette to the lid member, the first and second urging members are respectively connected to the first and second urging members so that the lamp contacts the lid member. A fifth step of urging the socket portion;
And a sixth step of closing the opening by the lid member after the fifth step.

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