JP2017073428A - Processing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a processing device that is adaptable to a case where a primary workpiece transporting device provided at the outside sets primary workpieces at plural specific positions.SOLUTION: A processing device 10 includes first transporting means 20 for receiving a primary workpiece WK1 from a first primary workpiece transporting device CA1 at a first receiving position PA1 and mounting the primary workpiece WK1 on a sheet sticking table 47, frame transporting means 30 for mounting a frame member RF on the sheet sticking table 47, sheet sticking means 40 for sticking a second adhesive sheet AS2 on the primary workpiece WK1 and the frame member RF to form a secondary workpiece WK2, second transporting means 50 for mounting the secondary workpiece WK2 on a sheet peeling table 68, sheet peeling means 60 for peeling the first adhesive sheet AS1 from the mounted secondary workpiece WK2 to form a tertiary workpiece WK3. The first transporting means 20 is provided so as to be capable of receiving the primary workpiece WK1 from a second primary workpiece transporting device CA2 at a second receiving position PA2, and mounting the primary workpiece WK1 on the sheet sticking table 47.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a processing apparatus.

  2. Description of the Related Art Conventionally, a processing apparatus is known that forms a predetermined processed product by applying a second adhesive sheet to a primary processed product in which a first adhesive sheet is applied to one surface of an adherend (for example, Patent Document 1). reference).

JP 2000-68293 A

  However, the conventional processing apparatus as described in Patent Document 1 can only deal with a case where the primary workpiece transport apparatus provided outside the processing apparatus sets the primary workpiece at one specific position. There is an inconvenience.

  The objective of this invention is providing the processing apparatus which can respond even if the primary workpiece conveyance apparatus provided outside the said processing apparatus sets a primary workpiece in several specific positions.

  The processing apparatus of the present invention is a processing apparatus for attaching a second adhesive sheet to a primary processed product having a first adhesive sheet attached to one surface of an adherend, and is provided outside the processing apparatus. A first conveying means for receiving the primary processed product at a first receiving position from one primary processed product conveying device, and placing the primary processed product on a sheet sticking table; A sheet affixing means for affixing the second adhesive sheet to the primary processed product to form a secondary processed product, wherein the first conveying means is a second primary process provided outside the processing apparatus. The primary processed product is received from a product transporting device at a second receiving position different from the first receiving position, and the primary processed product is provided so as to be placed on a sheet sticking table. .

The processing apparatus of the present invention is for peeling the second processed product on the sheet peeling table and the first adhesive sheet in the second processed product placed on the sheet peeling table. Affixing a tape, and peeling the first adhesive sheet from the adherend through the peeling tape to form a tertiary processed product, and carrying out the tertiary processed product from the sheet peeling unit, A third transporting means for delivering the tertiary processed product at a first delivery position to a first tertiary processed product transporting device provided outside the processing apparatus, wherein the third transporting means comprises the processing apparatus; It is preferable that the third processed product conveying device provided outside the second processed product transport apparatus is provided so that the third processed product can be delivered at a second delivery position different from the first delivery position.
Further, the processing apparatus of the present invention unloads the secondary processed product from the sheet sticking means, and transfers the secondary processed product to the first secondary processed product transport apparatus provided outside the processing apparatus at the third delivery position. 4th conveyance means which delivers a secondary processed product is provided, The said 4th conveyance means differs from the said 3rd delivery position to the 2nd secondary workpiece conveyance apparatus provided in the exterior of the said processing apparatus. It is preferable that the secondary workpiece is delivered at the fourth delivery position.

  According to the present invention, the first transport means can receive the primary workpiece from the first primary workpiece transport device and the second primary workpiece transport device at the first receiving position and the second receiving position. Therefore, even if the primary workpiece conveying device provided outside the processing apparatus sets the primary workpieces at a plurality of specific positions, it can be dealt with.

Further, the third conveying means can deliver the tertiary processed product to the first tertiary processed product conveying device and the second tertiary processed product conveying device at the first delivery position and the second delivery position. In this case, even if there are a plurality of tertiary processed product conveying apparatuses provided outside the processing apparatus, it can be dealt with.
Further, the fourth transport means can deliver the secondary processed product to the first secondary processed product transport device and the second secondary processed product transport device at the third delivery position and the fourth delivery position. With such a configuration, even if there are a plurality of secondary workpiece transfer apparatuses provided outside the processing apparatus, it can be handled.

The side view of the processing apparatus which concerns on one Embodiment of this invention. Operation | movement explanatory drawing of a processing apparatus. Operation | movement explanatory drawing of a processing apparatus.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
In this embodiment, the X axis, the Y axis, and the Z axis are orthogonal to each other, the X axis and the Y axis are axes in a predetermined plane, and the Z axis is an axis that is orthogonal to the predetermined plane. To do. Furthermore, in the present embodiment, when viewed from the direction of the arrow AR parallel to the Y axis, and when indicating the direction, “up” is the front direction in FIG. 1 parallel to the Z axis and “down” is the opposite. The direction, “left” is the arrow direction of the X axis, “right” is the opposite direction, “front” is the arrow direction of the Y axis, and “rear” is the opposite direction.

  1 to 3, the processing apparatus 10 applies a primary processed product WK1 in which a first adhesive sheet AS1 is attached to one surface of a semiconductor wafer (hereinafter, simply referred to as “wafer”) WF as an adherend. A device for affixing the second adhesive sheet AS2, which receives the primary processed product WK1 from the first primary processed product transport apparatus CA1 provided outside the processing apparatus 10 at the first receiving position PA1, The first workpiece WK1 is placed on the sheet sticking table 47, and the ring is formed by positioning the primary workpiece WK1 in the opening RF1 of the ring frame RF as a frame member having the opening RF1. The frame conveying means 30 for placing the frame RF on the sheet sticking table 47, the primary processed product WK1 placed on the sheet sticking table 47, and the ring frame RF The sheet sticking means 40 for sticking the adhesive sheet AS2 to form the secondary processed product WK2, the second transport means 50 for placing the secondary processed product WK2 on the sheet peeling table 68, and the sheet peeling table 68. The peeling tape PT (FIG. 3) is applied to the first adhesive sheet AS1 in the placed secondary processed product WK2, and the first adhesive sheet AS1 is peeled from the wafer WF via the peeling tape PT to perform the third processing. The sheet peeling means 60 for forming the product WK3 and the tertiary processed product WK3 are unloaded from the sheet peeling means 60 and transferred to the first tertiary processed product transport apparatus CB1 provided outside the processing apparatus 10 at the first delivery position. And a third conveying means 70 for delivering the tertiary processed product WK3 by PB1.

The first transport means 20 is supported by a tip arm (working arm) 21A, and has a multi-joint robot 21 as a drive device having a holding member 21B that can be sucked and held by a decompression means (not shown) such as a decompression pump or a vacuum ejector A linear motor 22 as a driving device that supports the joint robot 21 with its slider 22A and an alignment device 23 that positions the primary workpiece WK1 are provided. Note that the first transport means 20 receives the primary processed product from the second primary processed product transport apparatus CA2 provided outside the processing apparatus 10 at a second receiving position PA2 different from the first receiving position PA1. WK1 is received, and the primary processed product WK1 is provided so as to be placed on the sheet sticking table 47. The first receiving position PA1 is provided on the rear side of the processing apparatus 10 and is the upper surface of the receiving table T1 on which the primary workpiece WK1 is temporarily placed. The second receiving position PA2 is the front side of the processing apparatus 10 And is an upper surface of a receiving table T2 on which the primary processed product WK1 is temporarily placed.
In the case of this embodiment, the 1st conveyance means 20 functions also as the 3rd conveyance means 70, and the said 3rd conveyance means 70 (1st conveyance means 20) is the 2nd provided in the exterior of the said processing apparatus 10. FIG. Is provided so that the third workpiece WK3 can be delivered at a second delivery position PB2 different from the first delivery position PB1. The first delivery position PB1 is provided on the rear side of the processing apparatus 10 and is the upper surface of the delivery table T3 on which the tertiary workpiece WK3 is temporarily placed. The second delivery position PB2 is the processing apparatus 10 This is an upper surface of a delivery table T4 that is provided on the front side and temporarily places the third processed product WK3.

  The frame conveying means 30 is supported by a tip arm (working arm) 31A, and is a driving device having a holding member 31C that can be sucked and held by a suction pad 31B communicated with a pressure reducing means (not shown) such as a pressure reducing pump or a vacuum ejector. A joint robot 31 and a frame accommodating means 32 capable of accommodating the ring frame RF are provided. In the case of this embodiment, the frame transport unit 30 also functions as the second transport unit 50. The articulated robots 21 and 31 are so-called 6-axis robots that can be displaced at any position and at any angle by the holding members 21B and 31C within the working range.

  The sheet sticking means 40 includes a support roller 41 that supports the original fabric RS having the second adhesive sheet AS2 temporarily attached to one surface of the release sheet RL, a guide roller 42 that guides the original fabric RS, and the release sheet RL. A peeling plate 43 as a peeling member that bends and peels off the second adhesive sheet AS2 from the peeling sheet RL, and a driving roller 44 that is driven by a rotation motor 44A as a driving device and sandwiches the peeling sheet RL with a pinch roller 44B. A recovery roller 45 for recovering the release sheet RL; a press roller 46 as a pressing means for pressing and sticking the second adhesive sheet AS2 peeled off by the release plate 43 to the ring frame RF and the wafer WF; Supported by a slider 47B of the linear motor 47A and by a decompression means (not shown) such as a decompression pump or a vacuum ejector. And a sheet sticking stand 47 having a wear capable of holding the support surface 47C.

  The sheet peeling means 60 is driven by a support roller 61 that supports the peeling tape PT, a rotation motor 62A as a driving device, a driving roller 62 that sandwiches the peeling tape PT with a pinch roller 62B, and a driving device. The stripping tape PT is accommodated through the receiving means 63 supported by the output shaft 63B of the linear motor 63A and the suction hole 63D which is accommodated in the accommodating means 63 and formed in the suction surface 63C which is the bottom surface of the accommodating means 63. It is supported by a suction means 64 such as a vacuum pump or a vacuum ejector for holding by suction, and a slider 65B of a linear motor 65A as a drive device accommodated in the accommodation means 63, and is provided so as to be able to project and retract from the bottom surface of the accommodation means 63. The pressing member 65 is supported by a slider 66B of a linear motor 66A as a driving device accommodated in the accommodating means 63, and is A cutting blade 66 provided so as to be able to project and retract from the bottom surface of 63, an auxiliary roller 67 supported by an output shaft 67B of a linear motion motor 67A as a drive device, and contacting the peeling tape PT with the suction surface 63C, and a drive A sheet peeling table 68 having a supporting surface 68C supported by a slider 68B of a linear motor 68A as a device and having a supporting surface 68C that can be sucked and held by a decompression means (not shown) such as a decompression pump or a vacuum ejector.

  The first and second primary workpiece conveyance devices CA1 and CA2 have the same configuration as the articulated robot 21, and the first and second tertiary workpiece conveyance devices CB1 and CB2 are the same as the articulated robot 31. The detailed description is omitted because of the configuration.

In the above processing apparatus 10, the procedure for forming the tertiary processed product WK3 from the primary processed product WK1 will be described.
First, an operator sets the raw fabric RS and the peeling tape PT as shown in FIGS. 2 and 3 with respect to the processing apparatus 10 indicated by a solid line in FIG. 1 in which each member is arranged at the initial position. Next, when an automatic operation start signal is input to the processing apparatus 10 via an input means such as an operation panel (not shown) or a personal computer, the sheet peeling means 60 drives the suction means 64, and the peeling tape on the suction surface 63C. After the PT is adsorbed and held, the processing apparatus 10 enters a standby state.

  Then, when the first primary workpiece conveyance device CA1 places the primary workpiece WK1 at the first receiving position PA1, as indicated by a two-dot chain line in FIG. Further, the decompression means (not shown) is driven, and the primary workpiece WK1 is sucked and held by the holding member 21B. As shown by a two-dot chain line in FIG. Placed on. Here, when the second primary workpiece conveyance device CA2 places the primary workpiece WK1 at the second receiving position PA2 as shown by a two-dot chain line in FIG. 1, the first conveyance means 20 is articulated. The robot 21 and the decompression means (not shown) are driven, the primary workpiece WK1 is sucked and held by the holding member 21B, and the primary workpiece WK1 is placed on the alignment device 23 from the second receiving position PA2. In this way, the first transport means 20 can place the primary workpiece WK1 on the alignment device 23 from the first receiving position PA1 or from the second receiving position PA2. In addition, the 1st conveyance means 20 will be in 1st, 2nd receiving position PA1, PA2, when primary processed product WK1 is mounted in both 1st receiving position PA1 and 2nd receiving position PA2. When the primary workpiece WK1 placed first is placed on the alignment device 23 first, and the primary workpiece WK1 is placed simultaneously at the first and second receiving positions PA1 and PA2. Any one of the primary processed products WK1 is placed on the alignment device 23 first. When the primary workpiece WK1 is positioned by the alignment device 23, the first transfer means 20 drives the articulated robot 21 and the decompression means (not shown), and the primary workpiece WK1 is moved to the wafer as shown by the solid line in FIG. The WF is placed on the sheet pasting table 47 with the WF facing upward. Thereafter, the sheet sticking means 40 drives a decompression means (not shown) to hold the primary processed product WK1 by suction on the support surface 47C. Next, the frame conveying means 30 drives the articulated robot 31 and the decompression means (not shown), and the holding member 31C sucks and holds the ring frame RF in the frame accommodating means 32. As shown by the solid line in FIG. The primary processed product WK1 is positioned in the RF opening RF1, and the ring frame RF is placed on the sheet sticking table 47. Thereafter, the sheet sticking means 40 drives a decompression means (not shown), and the ring frame RF is sucked and held by the support surface 47C.

  Next, the sheet sticking means 40 drives the linear motor 47A and moves the sheet sticking base 47 to the left, and the detection means (not shown) such as an optical sensor or an imaging means detects that the ring frame RF has reached a predetermined position. Then, the rotation motor 44 </ b> A is driven to feed out the original fabric RS in accordance with the moving speed of the sheet sticking table 47. As a result, the second adhesive sheet AS2 is peeled off from the release sheet RL by the release plate 43, and affixed to the ring frame RF and the wafer WF by the pressing roller 46 to form the secondary processed product WK2. When the secondary processed product WK2 reaches a predetermined position indicated by a two-dot chain line in FIG. 1, the sheet sticking means 40 stops driving the linear motor 47A and stops driving the decompression means (not shown). Next, the second transport unit 50 (frame transport unit 30) drives the articulated robot 31 and a decompression unit (not shown) to suck and hold the secondary processed product WK2 by the holding member 31C, and as shown by the solid line in FIG. The secondary processed product WK2 is placed on the sheet peeling table 68 with the first adhesive sheet AS1 facing upward. Thereafter, the sheet peeling means 60 drives a decompression means (not shown) and sucks and holds the secondary processed product WK2 on the support surface 68C, while the sheet sticking means 40 drives the linear motor 47A to bring the sheet sticking table 47 to the initial position. Return.

  Then, the sheet peeling means 60 drives the linear motor 68A to move the sheet peeling table 68 in the left direction, and the left end portion of the first adhesive sheet AS1 is directly below the pressing member 65 as shown by a two-dot chain line in FIG. To be located. Next, after the sheet peeling means 60 drives the linear motion motor 67A and the auxiliary roller 67 is retracted from below the accommodating means 63 as shown by a two-dot chain line in FIG. 3, the rotation motor 62A and the linear motion motor 63A are moved. As shown by a two-dot chain line in the drawing, the accommodating means 63 is lowered to a predetermined position directly above the first adhesive sheet AS1 while feeding the peeling tape PT. Thereafter, the sheet peeling means 60 drives the linear motor 65A, lowers the pressing member 65, and presses and sticks the peeling tape PT to the left end portion of the first adhesive sheet AS1. At this time, the sheet peeling means 60 may drive the heating means 65C such as a coil heater or the heating side of the heat pipe to heat the peeling tape PT. Next, the sheet peeling means 60 stops driving the suction means 64 and drives the linear motor 65A and the linear motion motor 63A to return the pressing member 65 and the accommodation means 63 to the initial positions.

  Thereafter, in a state where the sheet peeling means 60 locks the drive of the rotation motor 62A, the linear motor 68A is driven, the sheet peeling table 68 is moved leftward, and the first adhesive sheet AS1 is peeled from the wafer WF, The tertiary processed product WK3 is formed. When the sheet peeling table 68 supporting the tertiary processed product WK3 reaches a predetermined position indicated by a two-dot chain line in FIG. 1, the sheet peeling means 60 stops driving the linear motor 68A and drives a decompression means (not shown). To stop. After that, the third transfer means 70 (first transfer means 20) drives the articulated robot 21 and the decompression means (not shown) to hold the tertiary workpiece WK3 by the holding member 21B, and then holds the tertiary workpiece WK3 as the first. To the delivery position PB1. Then, at the first delivery position PB1, the first tertiary workpiece conveyance device CB1 receives the tertiary workpiece WK3 and conveys the tertiary workpiece WK3 to the next process. Here, the third transport means 70 (first transport means 20) transports the tertiary processed product WK3 to the second delivery position PB2 in the same manner as described above, and the second tertiary processed product at the second delivery position PB2. The transport device CB2 may receive the tertiary processed product WK3 and transport the tertiary processed product WK3 to the next process. In this way, the third transport means 70 (first transport means 20) transports the tertiary workpiece WK3 to the first delivery position PB1 or the second delivery position PB2, and transports the first tertiary work product. The tertiary workpiece WK3 can be delivered to the apparatus CB1 and also to the second tertiary workpiece transport apparatus CB2.

  On the other hand, when the tertiary processed product WK3 is formed, the sheet peeling means 60 drives the linear motion motor 67A and the suction means 64 to return the auxiliary roller 67 to the initial position, and the peeling tape PT is sucked and held by the suction surface 63C. After that, the linear motor 66A is driven, the cutting blade 66 is lowered to cut the peeling tape PT, and the manual adhesive or the transfer means (not shown) collects the first adhesive sheet AS1. Then, the sheet peeling means 60 drives the linear motor 68A to return the sheet peeling table 68 to the initial position, and thereafter the same operation as described above is repeated.

  According to the embodiment as described above, the first transport unit 20 is connected to the first receiving position PA1 and the second receiving position PA2 from the first primary workpiece transport apparatus CA1 and the second primary workpiece transport apparatus CA2. Since the primary processed product WK1 can be received in this manner, even if the primary processed product transport apparatus provided outside the processing apparatus 10 sets the primary processed product WK1 at a plurality of specific positions, the primary processed product WK1 can be handled.

  As described above, the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this. That is, the invention has been illustrated and described with particular reference to certain specific embodiments, but without departing from the spirit and scope of the invention, Various modifications can be made by those skilled in the art in terms of material, quantity, and other detailed configurations. In addition, the description of the shape, material, and the like disclosed above is exemplary for ease of understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded the limitation of some or all of such restrictions is included in this invention.

For example, the first transport unit 20 may place the primary processed product WK1 on the sheet sticking table 47 with the first adhesive sheet AS1 facing upward.
The first conveying means 20 does not need to have the alignment device 23. When the alignment device 23 is not provided, the first processed product WK1 received at the first receiving position PA1 or the second receiving position PA2 is directly on the sheet sticking table 47. It may be placed on.
In addition to the articulated robot 21, the first transport unit 20 may employ another articulated robot as a driving device equivalent to the articulated robot 21. In this case, for example, after the primary workpiece WK1 is positioned by the alignment apparatus 23 in the same manner as in the above embodiment, the first transport unit 20 drives another articulated robot and a decompression unit (not shown) to perform the primary workpiece. WK1 may be placed on the sheet sticking table 47.
The 1st conveyance means 20 may contain adhesive force reduction means, such as an ultraviolet irradiation device and an infrared irradiation device, which reduces the adhesive force of 1st adhesive sheet AS1 affixed on the primary workpiece WK1. In this case, the first transport unit 20 may first perform either positioning of the primary processed product WK1 or reduction of the adhesive force of the first adhesive sheet AS1. Further, the movement of the primary workpiece WK1 between the alignment device 23, the adhesive strength reducing means, and the sheet sticking table 47 may be performed by either the multi-joint robot 21 or the other multi-joint robot described above.
The first conveying means 20 may be configured to hold the primary workpiece WK1 (conveyed object) with chuck means such as a mechanical chuck or a chuck cylinder, coulomb force, adhesive, adhesive, magnetic force, Bernoulli adsorption, driving equipment, and the like. Well, the frame conveying means 30, the second conveying means 50, the first and second primary workpiece conveying devices CA1, CA2 and the first and second tertiary workpiece conveying devices CB1, CB2 etc. have the same configuration, It is good also as a structure holding a to-be-conveyed object.
The first transport means 20 receives a plurality or one ring frame RF at a predetermined frame receiving position from a frame member transport device (not shown) provided outside the processing apparatus 10 and transports the ring frame RF in a frame manner. You may deliver to the means 30 and may mount directly on the sheet sticking stand 47. FIG. Such a frame member conveyance device can be configured similarly to the first and second tertiary workpiece conveyance devices CB1 and CB2.
The first transport unit 20 may function as at least one of the frame transport unit 30, the second transport unit 50, and the third transport unit 70.
The articulated robot 21 may not be supported by the linear motor 22.
The first conveying means 20 receives the primary processed product WK1 at three or more receiving positions from three or more primary processed product transport apparatuses provided outside the processing apparatus 10, and attaches the primary processed product WK1 to a sheet. You may comprise so that it may mount on the stand 47. FIG.

The frame conveying means 30 may place the ring frame RF at a predetermined position on the sheet sticking table 47 before the primary processed product WK1 is placed on the sheet sticking table 47.
The frame conveying means 30 may receive a plurality or one ring frame RF at a predetermined frame receiving position from the above-described frame member conveying device (not shown) provided outside the processing apparatus 10.
The frame conveying means 30 may not be provided. In this case, the secondary processed product is obtained by the sheet attaching means 40 on the wafer WF side or the first adhesive sheet side of the primary processed product WK1 placed on the sheet attaching table 47. The second adhesive sheet AS2 is affixed.

The sheet sticking means 40 fixes the position of the sheet sticking table 47 and moves other members, or moves both the sheet sticking table 47 and other members to stick the second adhesive sheet AS2. Also good.
The sheet affixing table 47 is also configured to support a frame member or an adherend (conveyed object) with chuck means such as a mechanical chuck or a chuck cylinder, coulomb force, adhesive, adhesive, magnetic force, Bernoulli adsorption, driving equipment, etc. In addition, the sheet peeling table 68 may be configured to support the object to be conveyed with the same configuration.
The sheet sticking means 40 is formed such that a closed loop-shaped cut is formed in the belt-like adhesive sheet base material temporarily attached to the belt-like release sheet RL, so that the inside of the cut is the second adhesive sheet AS2, and the outside is unnecessary. The raw material made into a sheet may be fed out.
The sheet sticking means 40 is formed by a cutting means such as a cutting blade, a laser cutter, a heat cutter, an air cutter, a compressed water cutter, etc. Alternatively, a closed-loop cut may be formed in the adhesive sheet base material, and the original fabric may be processed so that the inside of the cut becomes the second adhesive sheet AS2.
The sheet sticking means 40 may cut the adhesive sheet base material into a predetermined shape by the same cutting means as described above after sticking the belt-like adhesive sheet base material to the ring frame RF and the wafer WF.
The peeling member may be composed of a round bar or a roller.
The pressing means may employ a pressing member made of a round bar, blade material, rubber, resin, sponge, or the like, or may be configured to press the second adhesive sheet AS2 by air spraying.

  The second transport unit 50 may be configured separately from the frame transport unit 30.

The sheet peeling means 60 may cancel the operation when the sheet sticking means 40 sticks the second adhesive sheet AS2 on the first adhesive sheet AS1 side to form a secondary processed product. In this case, when the second transport unit 50 (frame transport unit 30) places the secondary processed product on the sheet peeling table 68, the third transport unit 70 (first transport unit 20) holds the secondary processed product by suction. Then, the secondary processed product may be conveyed to the first and second delivery positions PB1, PB2, or the secondary processed product adsorbed and held by the second conveying means 50 (frame conveying means 30) is directly first. The second transfer positions PB1 and PB2 may be conveyed.
The sheet peeling means 60 is used instead of or in combination with the suction means 64, and the peeling tape PT is removed by chuck means such as a mechanical chuck or a chuck cylinder, coulomb force, adhesive, adhesive, magnetic force, Bernoulli adsorption, driving equipment, etc. The structure to hold | maintain can be employ | adopted.
The sheet peeling means 60 can employ a pressing member by blade material, rubber, resin, sponge, air spraying or the like instead of or in combination with the pressing member 65, and the peeling tape PT is pressure sensitive adhesive. In the case of a thing, the heating means 65C may or may not be provided.
Even if the sheet peeling means 60 fixes the sheet peeling table 68 and moves other members, or moves both the sheet peeling table 68 and other members to peel the first adhesive sheet AS1. Good.
The sheet peeling means 60 may employ other configurations such as a laser cutter, a thermal cutter, an air cutter, and a compressed water cutter instead of or in combination with the cutting blade 66.
The sheet peeling means 60 may adopt an adhesive form such as pressure sensitive adhesive or heat sensitive adhesive as the peeling tape PT, and when the pressure sensitive adhesive is adopted, the heating means 65C It may or may not exist.

The third transport unit 70 may be configured separately from the first transport unit 20.
The third transport means 70 may be configured to deliver the tertiary processed product WK3 to three or more tertiary processed product transport apparatuses provided outside the processing apparatus 10 at three or more delivery positions.

The processing apparatus 10 may not include the second conveyance unit 50, the sheet peeling unit 60, and the third conveyance unit 70. In this case, the processing apparatus 10 carries out the secondary processed product WK2 from the sheet sticking means 40, and passes it to the first secondary processed product transport apparatus CC1 provided outside the processing apparatus 10 at the third delivery position PB3. The fourth transport means 80 may be provided to deliver the secondary processed product WK2. Such a 4th conveyance means 80 can be combined with the frame conveyance means 30 of the said embodiment. In addition, the fourth transport unit 80 sends the second secondary workpiece transport apparatus CC2 provided outside the processing apparatus 10 to the secondary transfer position PB4 that is different from the third transfer position PB3. The workpiece WK2 can be delivered. The third delivery position PB3 is the upper surface of the delivery table T5 on which the secondary workpiece WK2 is temporarily placed, and the fourth delivery position PB4 is the delivery platform T6 on which the secondary workpiece WK2 is temporarily placed. It is the upper surface.
The fourth conveying means 80 may be configured to deliver the secondary processed product WK2 to three or more secondary workpiece conveying devices provided outside the processing apparatus 10 at three or more delivery positions. Good.
The first, second, third and fourth transport means 20, 50, 70, 80 and the frame transport means 30 may be configured by a plurality of apparatuses having the same configuration, or may be configured by a plurality of apparatuses having different configurations. Alternatively, it may be configured by a single device, and when configured by a plurality of devices having the same configuration or different configurations, any of these devices may be configured by a single device.
1st, 2nd primary processed goods conveyance apparatus CA1, CA2, 1st, 2nd tertiary processed goods conveyance apparatus CB1, CB2, frame member conveyance apparatus which is not illustrated, 1st, 2nd secondary processed goods The transport devices CC1 and CC2 may be configured by a plurality of devices having the same configuration, may be configured by a plurality of devices having different configurations, may be configured by a single device, and may be the same configuration or different. When configured by a plurality of devices having a configuration, any one of these devices may be configured by a single device.
1st, 2nd primary processed goods conveyance apparatus CA1, CA2, 1st, 2nd tertiary processed goods conveyance apparatus CB1, CB2, frame member conveyance apparatus which is not illustrated, 1st, 2nd secondary processed goods The conveyor devices CC1 and CC2 may be, for example, a grinder, a dicer, or a polishing device that processes the wafer WF in addition to a belt conveyor, a roller conveyor, and a driving device, or a coating device, a printing device, an inspection device, and a surface treatment device. It may be an exposure apparatus, an imaging apparatus, a chemical processing apparatus, or the like, or may be a member that constitutes these apparatuses, and is not limited at all.

The receiving tables T1 and T2 may or may not be other devices besides the table. When there is no receiving stand T1, T2, the first transport unit 20 may directly receive the primary processed product WK1 from the first and second primary processed product transport apparatuses CA1, CA2 at a predetermined receiving position.
The transfer tables T3, T4, T5, T6 may be other devices or the like in addition to the table, or may not be provided. If there are no transfer tables T3, T4, T5, T6, the third and fourth transfer means 70 are provided. 80, the third processed product WK3 and the second processed product WK2 are transferred to the first and second processed product conveying devices CB1 and CB2 and the first and second processed product conveying devices CC1 at a predetermined delivery position. You may hand over to CC2.
In addition to the ring frame RF, the frame member may have other shapes such as a circle, an ellipse, a polygon more than a triangle, or a non-annular one.
Further, the material, type, shape, and the like of the first and second adhesive sheets AS1, AS2, and the adherend are not particularly limited. For example, the first and second adhesive sheets AS1 and AS2 may be circular, elliptical, polygonal such as a triangle or a quadrangle, or other shapes, or may be adhesive forms such as pressure-sensitive adhesiveness and heat-sensitive adhesiveness. When the first and second adhesive sheets AS1 and AS2 having heat-sensitive adhesive properties are employed, appropriate coil heaters and heat pipes for heating the first and second adhesive sheets AS1 and AS2 are used. Bonding may be performed by an appropriate method such as providing a heating means on the heating side. Moreover, such 1st, 2nd adhesive sheet AS1, AS2 is a thing of a single layer only of an adhesive bond layer, what has an intermediate | middle layer between a base material sheet and an adhesive bond layer, There may be three or more layers such as a cover layer on the upper surface, or a so-called double-sided adhesive sheet that can peel the substrate sheet from the adhesive layer. Alternatively, it may have a multilayer intermediate layer, or may be a single layer or multilayer without an intermediate layer. Examples of the adherend include, for example, foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, circuit board, information recording substrates such as optical disks, glass plates, steel plates, ceramics, wood plates or resin plates, Arbitrary forms of members and articles can also be targeted. Note that the first and second adhesive sheets AS1 and AS2 are replaced with functional and application readings, for example, information description labels, decorative labels, protective sheets, dicing tapes, die attach films, die bonding tapes, recording layers. Arbitrary sheets, films, tapes, etc. of arbitrary shapes, such as a formation resin sheet, can be stuck on arbitrary adherends as described above.

The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions, or steps described with respect to those means and steps. The process is not limited at all. For example, if the sheet sticking means is capable of forming a secondary processed product by sticking the second adhesive sheet to the primary processed product placed on the sheet sticking table, in light of the technical common sense at the beginning of the application, There is no limitation as long as it is within the technical scope (description of other means and steps is omitted).
The drive device in the embodiment includes an electric device such as a rotation motor, a linear motion motor, a linear motor, a single axis robot, an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition to these, a combination of them directly or indirectly may be employed (some of them overlap with those exemplified in the embodiment).

DESCRIPTION OF SYMBOLS 10 Processing apparatus 20 1st conveyance means 40 Sheet sticking means 47 Sheet sticking stand 50 2nd conveyance means 60 Sheet peeling means 68 Sheet peeling stand 70 3rd conveyance means AS1 1st adhesive sheet AS2 2nd adhesive sheet CA1 1st primary processing Product transport device CA2 second primary workpiece transport device CB1 first tertiary workpiece transport device CB2 second tertiary workpiece transport device CC1 first secondary workpiece transport device CC2 second secondary workpiece transport device PA1 1st receiving position PA2 2nd receiving position PB1 1st delivery position PB2 2nd delivery position PB3 3rd delivery position PB4 4th delivery position PT Stripping tape WF Wafer (Substrate)
WK1 Primary processed product WK2 Secondary processed product WK3 Tertiary processed product

Claims (3)

A processing apparatus for attaching a second adhesive sheet to a primary processed product having a first adhesive sheet attached to one surface of an adherend,
First conveying means for receiving the primary processed product at a first receiving position from a first primary processed product conveying device provided outside the processing apparatus, and placing the primary processed product on a sheet sticking table; ,
Sheet pasting means for pasting the second adhesive sheet to the primary work product placed on the sheet sticking table to form a secondary work product,
The first transport unit receives the primary processed product from a second primary processed product transport device provided outside the processing apparatus at a second receiving position different from the first receiving position, and A processing apparatus, wherein the processed product is provided so as to be placed on a sheet sticking table. Second conveying means for placing the secondary processed product on a sheet peeling table;
Affixing a peeling tape to the first adhesive sheet in the secondary processed product placed on the sheet peeling table, and peeling the first adhesive sheet from the adherend through the peeling tape to provide a tertiary Sheet peeling means for forming a processed product;
Third conveying means for carrying out the tertiary processed product from the sheet peeling means and delivering the tertiary processed product at a first delivery position to a first tertiary processed product conveying device provided outside the processing apparatus; With
The third transfer means transfers the tertiary processed product to a second tertiary processed product transfer apparatus provided outside the processing apparatus at a second transfer position different from the first transfer position. The processing apparatus according to claim 1, wherein the processing apparatus is provided. The second processed product is unloaded from the sheet sticking means, and the second processed product is delivered to the first secondary processed product transport apparatus provided outside the processing apparatus at the third delivery position. A conveying means,
The fourth transfer means transfers the secondary processed product to a second secondary processed product transfer device provided outside the processing apparatus at a fourth transfer position different from the third transfer position. The processing apparatus according to claim 1, wherein the processing apparatus is provided.

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