JP2017070030A5 - - Google Patents

Download PDF

Info

Publication number
JP2017070030A5
JP2017070030A5 JP2015190750A JP2015190750A JP2017070030A5 JP 2017070030 A5 JP2017070030 A5 JP 2017070030A5 JP 2015190750 A JP2015190750 A JP 2015190750A JP 2015190750 A JP2015190750 A JP 2015190750A JP 2017070030 A5 JP2017070030 A5 JP 2017070030A5
Authority
JP
Japan
Prior art keywords
piezoelectric
electrode
driving device
provided above
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2015190750A
Other languages
English (en)
Japanese (ja)
Other versions
JP2017070030A (ja
JP6531909B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2015190750A priority Critical patent/JP6531909B2/ja
Priority claimed from JP2015190750A external-priority patent/JP6531909B2/ja
Priority to US15/268,972 priority patent/US20170092838A1/en
Priority to CN201610851955.7A priority patent/CN107017334A/zh
Publication of JP2017070030A publication Critical patent/JP2017070030A/ja
Publication of JP2017070030A5 publication Critical patent/JP2017070030A5/ja
Application granted granted Critical
Publication of JP6531909B2 publication Critical patent/JP6531909B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2015190750A 2015-09-29 2015-09-29 圧電駆動装置、モーター、ロボット及びポンプ Active JP6531909B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2015190750A JP6531909B2 (ja) 2015-09-29 2015-09-29 圧電駆動装置、モーター、ロボット及びポンプ
US15/268,972 US20170092838A1 (en) 2015-09-29 2016-09-19 Piezoelectric driving apparatus, method of manufacturing the same, motor, robot, and pump
CN201610851955.7A CN107017334A (zh) 2015-09-29 2016-09-26 压电驱动装置及其制造方法、马达、机器人以及泵

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015190750A JP6531909B2 (ja) 2015-09-29 2015-09-29 圧電駆動装置、モーター、ロボット及びポンプ

Publications (3)

Publication Number Publication Date
JP2017070030A JP2017070030A (ja) 2017-04-06
JP2017070030A5 true JP2017070030A5 (cg-RX-API-DMAC7.html) 2018-10-18
JP6531909B2 JP6531909B2 (ja) 2019-06-19

Family

ID=58495443

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015190750A Active JP6531909B2 (ja) 2015-09-29 2015-09-29 圧電駆動装置、モーター、ロボット及びポンプ

Country Status (1)

Country Link
JP (1) JP6531909B2 (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6946893B2 (ja) * 2017-09-22 2021-10-13 セイコーエプソン株式会社 圧電駆動装置、圧電モーター、ロボット、電子部品搬送装置、プリンターおよびプロジェクター

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008301557A (ja) * 2007-05-29 2008-12-11 Kyocera Corp 超音波モータ駆動装置
JP2012231595A (ja) * 2011-04-26 2012-11-22 Canon Inc 振動装置の駆動回路、塵埃除去装置及び振動型アクチュエータにおける振動装置の駆動回路
JP5983018B2 (ja) * 2012-05-16 2016-08-31 セイコーエプソン株式会社 圧電モーター、圧電モーター装置、駆動回路及び駆動方法

Similar Documents

Publication Publication Date Title
JP2016040993A5 (cg-RX-API-DMAC7.html)
JP2016040992A5 (cg-RX-API-DMAC7.html)
JP2015029410A5 (cg-RX-API-DMAC7.html)
JP2015184124A5 (cg-RX-API-DMAC7.html)
JP2016092879A5 (cg-RX-API-DMAC7.html)
JP2018010287A5 (cg-RX-API-DMAC7.html)
JP2017017916A5 (cg-RX-API-DMAC7.html)
JP2015008631A5 (cg-RX-API-DMAC7.html)
JP2016226175A5 (cg-RX-API-DMAC7.html)
JP2014233528A5 (cg-RX-API-DMAC7.html)
JP2013121188A5 (ja) 駆動装置およびロボット
RU2017103643A (ru) Вертолет с подавляющей шум и вибрацию трансмиссионной установкой
JP2016175274A5 (cg-RX-API-DMAC7.html)
JP2014209728A5 (cg-RX-API-DMAC7.html)
JP2017070030A5 (cg-RX-API-DMAC7.html)
JP2012191733A5 (cg-RX-API-DMAC7.html)
JP2017506866A5 (cg-RX-API-DMAC7.html)
JP2014235134A5 (cg-RX-API-DMAC7.html)
RU2019100446A (ru) Устройство привода, имеющее в своем составе электроактивный полимерный привод, и способ управления
JP2018074723A5 (cg-RX-API-DMAC7.html)
JP2016208732A5 (cg-RX-API-DMAC7.html)
JP2016114559A5 (cg-RX-API-DMAC7.html)
JP2017118625A5 (cg-RX-API-DMAC7.html)
JP2014176225A5 (cg-RX-API-DMAC7.html)
JP2017135940A5 (cg-RX-API-DMAC7.html)