JP2017058217A5 - - Google Patents
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- JP2017058217A5 JP2017058217A5 JP2015182433A JP2015182433A JP2017058217A5 JP 2017058217 A5 JP2017058217 A5 JP 2017058217A5 JP 2015182433 A JP2015182433 A JP 2015182433A JP 2015182433 A JP2015182433 A JP 2015182433A JP 2017058217 A5 JP2017058217 A5 JP 2017058217A5
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- JP
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- Prior art keywords
- light
- surface treatment
- size
- spectrum
- measurement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000005259 measurement Methods 0.000 claims 9
- 238000004381 surface treatment Methods 0.000 claims 8
- 238000001228 spectrum Methods 0.000 claims 6
- 239000000758 substrate Substances 0.000 claims 2
- 238000001514 detection method Methods 0.000 claims 1
- 230000001678 irradiating Effects 0.000 claims 1
- 230000003287 optical Effects 0.000 claims 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015182433A JP6544171B2 (ja) | 2015-09-16 | 2015-09-16 | 表面処理状況モニタリング装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015182433A JP6544171B2 (ja) | 2015-09-16 | 2015-09-16 | 表面処理状況モニタリング装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2017058217A JP2017058217A (ja) | 2017-03-23 |
JP2017058217A5 true JP2017058217A5 (hu) | 2018-03-08 |
JP6544171B2 JP6544171B2 (ja) | 2019-07-17 |
Family
ID=58391450
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015182433A Expired - Fee Related JP6544171B2 (ja) | 2015-09-16 | 2015-09-16 | 表面処理状況モニタリング装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP6544171B2 (hu) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7103906B2 (ja) * | 2018-09-28 | 2022-07-20 | 株式会社ディスコ | 厚み計測装置 |
KR102659131B1 (ko) * | 2024-02-01 | 2024-04-23 | ㈜넥센서 | 간섭계와 fpm을 이용한 미세홈 측정시스템 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4460659B2 (ja) * | 1997-10-22 | 2010-05-12 | 株式会社ルネサステクノロジ | 薄膜の膜厚計測方法及びその装置並びにそれを用いた薄膜デバイスの製造方法及びその製造装置 |
JP3946470B2 (ja) * | 2001-03-12 | 2007-07-18 | 株式会社デンソー | 半導体層の膜厚測定方法及び半導体基板の製造方法 |
JP6107353B2 (ja) * | 2013-04-12 | 2017-04-05 | 株式会社島津製作所 | 表面処理状況モニタリング装置 |
-
2015
- 2015-09-16 JP JP2015182433A patent/JP6544171B2/ja not_active Expired - Fee Related
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