JP2017044712A - Physical quantity measurement device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a flow rate measurement device with satisfactory thermal responsiveness.SOLUTION: A physical quantity measurement device includes: a temperature detection element; a first conductive lead frame for supporting and fixing the temperature detection element; and a second conductive lead frame. The first conductive lead frame and the second conductive lead frame are electrically connected to each other with a conductive member which has cross sectional area smaller than that of the first and second conductive lead frames.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a physical quantity measuring device that measures at least the temperature of air flowing in an intake air passage of an internal combustion engine.

  The most common method for accurately controlling the air-fuel ratio of an internal combustion engine includes means for measuring the intake air flow rate and the intake air temperature and successively calculating the fuel injection amount that optimizes the combustion state. The thermal flow rate measuring device includes a flow rate detection unit including a heating resistor and a temperature detection unit including a thermistor, and an electronic control circuit unit that controls the heating temperature of the flow rate detection unit. Conventional flow measuring devices are known in which a thermistor element for temperature measurement is arranged in the intake pipe of the internal combustion engine in order to make it less susceptible to thermal influence from the internal combustion engine, and a cooling effect by intake air is achieved. Yes.

  As a configuration using such a technique, for example, there is a flow rate measuring device described in Patent Document 1.

JP 2008-292508 A

  The problem to be solved is to ensure high detection temperature accuracy and thermal responsiveness of the temperature detection element. This is due to the material and structure of the conventional temperature detection element. Conductive members are used for the conductive lead wires joined to both ends of the temperature detection chip and the conductive terminals or connector terminals that support the temperature detection elements including the lead wires. The conductive metal material, for example, has a thermal conductivity higher than that of resin by one digit or more, and the heat of the resin housing of the flow rate measuring device body is transmitted to the temperature detection chip through the metal material. There is a problem that heat is transferred from the housing through the metal terminal to the temperature at which the temperature of the temperature detecting chip part exposed to the substrate through the coating is balanced, that is, the actual air temperature to be measured. Furthermore, when the heat capacity of the lead wire, terminal, and coating film is large, mainly during the transition when the temperature of the main body housing and the intake air temperature are different at the start of the internal combustion engine, the heat sinking is slow, and the detection thermal response of the temperature detection chip is reduced There is a problem to do.

  An object of the present invention is to provide a physical quantity measuring device with good thermal response.

  In order to achieve the above object, the physical quantity measuring device of the present invention is configured as follows.

  A temperature detecting element; a first conductive lead frame that supports and fixes the temperature detecting element; and a second conductive lead frame. The first conductive lead frame and the second conductive The conductive lead frame is electrically connected by a conductive member having a smaller cross-sectional area than the first and second conductive lead frames.

  According to the present invention, it is possible to provide a physical quantity measuring device with good thermal responsiveness.

FIG. 3 is a schematic cross-sectional view of a sensor chip package. 1 is a top view of the sensor chip package. 1 is a side view of the sensor chip package. The schematic block diagram of a lead frame and an outer lead. FIG. 3 is a schematic cross-sectional view of a sensor chip package. 1 is a top view of the sensor chip package. 1 is a side view of the sensor chip package. The schematic block diagram of a lead frame and an outer lead. FIG. 3 is a schematic sectional view of an air flow rate and temperature measuring device. 9 is a schematic side sectional view of the air flow rate and temperature measuring device. The A section expanded CC sectional view of FIG. The A section expanded CC sectional view of FIG.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

Example 1
First, a sensor chip package 1 according to an embodiment of the present invention will be described with reference to FIGS.

  1 to 3, the thermistor chip 2 for detecting the temperature, the flow sensor chip 8 for detecting the air flow rate, the control circuit chip 9, and the lead frame 3 for supporting and fixing the temperature sensor chip 8 and the electrical conduction. Are mounted by soldering or using a conductive adhesive, and all the necessary chips are bonded by heat-curing at least once.

  Here, the flow sensor chip 8 and the control circuit chip 9 are made of an insulating adhesive such as an epoxy adhesive without using a conductive adhesive when electrical conduction between the chip back surface and the lead frame 3 is not required. It can also be used.

  The lead frame 3 is made of a conductive metal material such as a copper alloy, an iron nickel alloy, or stainless steel, and is formed by precision fine press molding or etching.

  After mounting the thermistor chip 2, the flow sensor chip 8, and the control circuit chip 9 on the lead frame 3, each sensor chip and the control circuit chip 9 are made of gold wire, copper wire, aluminum wire, etc. in order to achieve electrical continuity with each other. The thin wire 12 is used and wire-bonded and bonded by a method such as thermocompression bonding, ultrasonic vibration, or ultrasonic thermocompression bonding.

  The lead frame 3 on which the thermistor chip 2, the flow sensor chip 8 and the control circuit chip 9 are mounted is covered by transfer molding using a thermosetting resin 5 so as to enclose them. However, transfer molding is performed so that a part of the lead frame 3 (referred to as the outer lead 4) necessary for electrical connection with a part of the surface of the flow sensor chip 8 and the outside is exposed from the resin 5. Made.

  Next, the sensor chip package 1, the lead frame 3, and the outer lead 4 will be described in detail with reference to FIG. In addition, the part of the resin 5 thermally cured by transfer molding is shown by a broken line.

The lead frame 3 is preferably arranged so that the side opposite to the one end on which the thermistor chip 2 is mounted goes out from the resin-molded surface and is connected to the outer frame 6. The lead frame 3 can be divided into two roles: (1) a part that is finally configured as a product part, and (2) a suspension structure part that is necessary for manufacturing to connect the outer frame 6. In particular, the latter suspension structure portion is called a tie bar 7.

  The tie bar 7 is a part punched by the same press or the like as the lead frame 3, and maintains its shape so that it does not fall apart even if the lead frame 3 is separated at a necessary location when an electric circuit is formed in the manufacturing process. Have a role. Then, after the transfer molding is completed with the thermosetting resin 5, after the lead frame 3 is fixed with the resin, the portion of the tie bar 7 is cut so that it does not remain on the product other than the cut surface.

  Similarly, the outer lead 4 for drawing out the detection signal of each sensor chip to the outside is connected to the outer frame 6 via the tie bar 7, and the shape of the lead is maintained.

The lead frame 3 on which the thermistor chip 2 is mounted is formed by precision micro-pressing or etching with a part of the signal line of the positive and negative electrodes thinner than the plate thickness, narrower than the lead width, or thin and narrow (thin). The

  The electrical signal of the thermistor chip 2 is connected to the control circuit chip 9 via a lead frame 3 by a thin wire such as a gold wire or copper wire, or directly connected to the outer lead 4 separately from the flow rate detecting function. Is output.

  The lead frame 3 on which the thermistor chip 2, the flow sensor chip 8, and the control circuit chip 9 are mounted, and the thin wires 11 and 12 having a small heat capacity such as a gold wire, a copper wire, or an aluminum wire are transferred except for a part of the surface of the flow sensor chip 8. The package structure is covered and protected by the resin 5 by a method such as molding.

  After the resin molding is completed, the tie bar 7 protruding to the outer periphery of the sensor chip package 1 is cut, and the cut surface is sealed with an adhesive as necessary to form the sensor chip package 1.

Here, the necessity of temperature measurement in the internal combustion engine and the structure of the temperature detection element 2 will be described. In addition to applications aimed at controlling internal combustion engines in steady state, temperature measurement is used for optimal control of fuel injection amount related to fuel consumption during transients such as during cold start, and for the control of harmful substances in exhaust gas by catalyst temperature control. A temperature detection function for measuring the temperature of air taken in by an internal combustion engine is indispensable. Therefore, temperature detection elements 2 using various methods and structures have been proposed and are widely used today. As the temperature detection element 2, a temperature measuring resistor such as a thermocouple, a diode, or platinum, or an element in which a temperature sensitive resistor is formed on a silicon substrate using a semiconductor micromachining technique is known. One method is to use a thermistor as a detection element and detect the temperature from the resistance value of the thermistor. In the temperature detection element using this thermistor, the thermistor element in which the thermistor chip is protected with various structures is disposed in the flow path into which the air of the internal combustion engine flows, and is electrically connected to the circuit in the flow measuring device. Or, it is electrically connected to a connector terminal for electrical connection with a fuel injection amount calculation device (engine control unit) and is put into practical use.

The thermistor element is composed of a conductive nickel alloy, CP wire (copper-ply wire) with thick copper plating using iron or steel as the core material, or iron nickel at both ends of the thermistor chip. Bonding copper to the alloy wire, and processing to diffusely bond the interface between the metals by pressure bonding, and forming a cuprous oxide on the outermost surface, the lead wire such as dumet wire that has improved the adhesion with the soft glass is joined The chip is covered with a cylindrical glass tube so as to cover the entire periphery of the chip and the joint between the chip and the lead wire, and then the chip, the lead wire, and the glass are fired to melt and shrink the glass. For a structure in which the lead wire is fixed or the glass tube is not used, the chip and the lead wire are joined by soldering etc. Covering (coating) element for temperature detection in a state where the joint is protected with the chip and the lead wires by fixing is completed. In the case of a dumet wire, it is known that when glass is baked, the glass is melted and a glass and cuprous oxide are chemically bonded to obtain a more closely bonded structure. Then, in order to arrange and support and fix the completed thermistor element in the flow path of the internal combustion engine, the lead wire of the element is joined to the conductive sheet metal terminal by welding or the like. The conductive terminal is connected directly to the connector terminal or indirectly through another conductive member such as an aluminum wire or an electronic circuit board for the purpose of exchanging electrical signals with an external device. The connector terminal is integrally formed with an insulating housing body such as a resin that supports and fixes the connector terminal. The thermistor element electrically connected via the conductive terminal arranged in the housing body is also connected to the flow measuring device or the fuel injection amount calculation device (engine control unit) via the connector arranged in the housing. In general, a constant voltage is supplied from the device to the thermistor element via at least one or more series resistances from the device to the thermistor element, and the voltage across the thermistor elements divided by the series resistance is obtained. When detected, the resistance value changes as the temperature of the thermistor element changes, so that the detected voltage changes and can be obtained as a temperature signal.

In many internal combustion engines such as automobiles, the flow measurement device is often used in a relatively harsh environment. For example, a corrosive gas generated in a fuel vapor atmosphere or a high temperature environment, And salt water are used in harsh environments such as splashing through air cleaner filters. A temperature sensing element that assumes exposure to the flow path of an internal combustion engine. Among them, a glass-sealed thermistor element is used to prevent corrosion and electric corrosion that occur at the interface (micro gap) between the lead wire and glass. A minute gap is coated using a resin such as thermosetting, and the joint between the lead wire and the conductive terminal is sealed with a thermosetting resin after soldering or welding according to the required degree of durability. In addition, in order to prevent electrochemical corrosion that occurs between lead wires with different polarities, etc., reliability is ensured by preventing and protecting against short-circuit failures due to water or salt water between lead wires by using heat-resistant coated wires. ing. However, since the glass tube is disposed so as to cover the thermistor chip itself and the junction between the thermistor chip and the lead wire, the glass tube has a limit on the structural corrosion resistance where the glass tube is larger than the diameter of the lead wire. . Here, the thermistor element in which the lead wire is generally arranged in the axial direction and the lead wire is generally called an axial lead type, and the end portion of the glass tube (fillet formed by the difference between the lead wire diameter and the glass tube diameter). It is difficult to make the coating thickness of the part) uniform, and the fillet thickness cannot be secured sufficiently, or if the coating film is formed in a porous state, that is, with a hole in the film, corrosion may occur. . On the other hand, in a temperature detection element generally called a radial type in which two lead wires are arranged in parallel in the same direction, the adhesion between the lead wire and the glass interface can be improved by using a dumet wire to improve the adhesion to the soft glass. Even if the crevice corrosion is prevented, a short-circuit between the lead wires occurs in the exposed state of the jumet wire, so a coating film is required. However, the distance between the lead wires is determined by the size of the thermistor chip. It is difficult to form a coating film with no gap between the lead wires. Furthermore, in a case where processing (forming) is required to expand the lead wire in the next step, there is a concern that the coating film applied around the lead wire may be damaged. In addition, when a heat-resistant coated electric wire is used instead of a dumet wire, it is difficult to completely take measures against corrosion caused by a minute gap between the coated electric wire and the glass tube interface.

  In the configuration described in the first embodiment, since the entire circumference of the thermistor chip 2 and the lead frame 3 can be covered with a thin resin, the thermistor chip 2 is held by the glass tube, and the glass tube and the lead wire joined portion are connected. Compared to the structure covered with a coating film, it is caused by unevenness of the coating film thickness at the end of the glass tube (fillet) due to the difference in the diameter of the lead wire and the glass tube, and distortion such as heat and vibration applied to the fillet It is possible to avoid cracks (defects) that have been made, and corrosion resistance can be improved.

In addition to the need for corrosion resistance, the temperature detection element also needs to consider heat. This is because the flow path wall is higher than the air temperature in the flow path by receiving radiant heat from the internal combustion engine. Or, in the environment where the flow path wall is at room temperature or low temperature at startup but the temperature in the flow path is high, the temperature detection part to which the temperature detection element is attached and the internal flow path temperature of the internal combustion engine There is a problem that an error occurs between them. In any of the above cases, the thermistor element is configured to be actively exposed to air in order to keep temperature detection errors small, and lead wires and conductive terminals are also exposed to air (dissipate heat), so that flow path walls and The temperature detection element has a structure that reduces the influence of the temperature difference that occurs with the material of the temperature detection element. In addition, heat conduction can be suppressed by reducing the cross-sectional area of the member as a means for reducing the temperature error. However, considering the installation environment of the flow measuring device or temperature detection element, it is necessary to design it to withstand vibration and temperature / humidity cycles in addition to corrosion resistance. The cylinder or prism support terminal is also used in the above dimensions, and a structurally different reinforcing means is used to reduce the wire diameter or cross-sectional dimension. It is inevitable that the configuration is complicated because it requires.

  However, in the configuration described in the first embodiment, since the entire circumference of the thermistor chip 2 and the lead frame 3 can be covered with resin, the glass tube, the glass tube and the lead wire joint portion, and further the lead wire itself are coated. (Coating) A part of the lead frame which is an electric signal line having the same potential, which cannot be achieved due to insufficient mechanical strength in the structure to be protected, can be formed thinly. Therefore, the thermistor chip 2 can detect the highest heat conducted from the outer lead 4 (metal) composed of the target conductive member by reducing the cross-sectional area of the lead frame 3 and thereby suppressing the heat conduction. Therefore, it is possible to separate the temperature of the main body and the heat of the main body that supports and incorporates the sensor chip package 1, that is, it is possible to have the heat dividing structure 10.

As a result, the thermal effect conducted from the outside (internal combustion engine) through the outer lead 4 and the housing 14 is alleviated by the thermal dividing structure portion 10, so that the detection function of the thermistor chip 2 reduces the thermal effect. A highly accurate flow rate measuring apparatus with high accuracy and good thermal responsiveness can be realized.

(Example 2)
Next, a second embodiment which is an embodiment of the present invention will be described below.
5 to 8 correspond to the directions shown in FIGS. 1 to 4 in order, and the method of the thermal dividing structure 10 described above is achieved by another means compared to FIGS. 1 to 4. An example is possible.

  In FIG. 5, the lead frame 3 is formed by press molding or etching so as to divide the positive and negative signal lines formed between the thermistor chip 2 and the control circuit chip 9. At this time, the lead frame 3 on which the thermistor chip 2 is mounted is not electrically connected. In order to form an electric signal line of the same polarity, a thin wire 11 having a small heat capacity such as a gold wire, a copper wire or an aluminum wire is used between the two lead frames 3 and 23, and this is bonded by thermocompression, ultrasonic vibration or Wire bonding is performed by a method such as ultrasonic thermocompression bonding. The lead frame 23 that is electrically connected to the lead frame 3 mounted with the thermistor chip 2 by the thin wire 11 is transferred so that all necessary chip components and gold wires are included. The package structure is covered and protected by the resin 5 by a method such as molding. After finishing the resin molding, the tie bar 7 protruding to the outer periphery of the sensor chip package 1 is cut. The cut surface of the tie bar 7 is sealed with a resin or an adhesive to form the sensor chip package 1.

  As a result, it becomes possible to completely divide a part of the lead frame 3 which is an electric signal line having the same potential, which cannot be achieved by a glass tube and a structure in which the glass tube and the lead wire bonding part and the lead wire are coated and protected. Further, by connecting the divided lead frame 3 and the lead frame 23 with a thin wire 11 having a smaller heat capacity than the lead wire, it can be configured without impairing the function as an electric circuit, resulting from the radiant heat of the target internal combustion engine. The heat conducted through the lead frame 23 and the outer lead 4 can be blocked by a resin having a higher thermal resistance than that of the metal member, and the temperature detected by the thermistor chip 2 and the heat of the main body that supports and incorporates the temperature detection unit It is possible to obtain more effects of the heat dividing structure in which the slab is separated.

(Example 3)
Next, Embodiment 3 which is an embodiment of the present invention will be described below.
FIG. 9 is a schematic cross-sectional view of an air temperature measuring device in a state where the sensor chip package 1 of the first and second embodiments is attached to an intake pipe (duct) 13 for introducing air 18 taken into the internal combustion engine. FIG. 10 is a schematic cross-sectional view as seen from the side of FIG.

  9 and 10, the sensor chip package 1 is bonded and incorporated in a resin housing 14 main body serving as a box-shaped insulating housing via an adhesive or the like.

  The housing 14 serves as a case member that accommodates the sensor chip package 1 in order to transmit and receive electrical signals to and from an external device in addition to the function of protecting the sensor chip package 1 by enclosing the entire bottom surface and side surfaces of the sensor chip package 1. The connector (coupler) 15 is formed by resin molding or the like, and a conductive connector terminal 16 such as a copper alloy is insert-molded inside the connector 15 using a thermoplastic resin or the like.

  Note that the case member may be configured by bonding and fixing a plate-shaped resin or sheet metal base plate to the housing 14 or insert-molding and integrating the housing 14 with the bottom surface of the housing 14 as another member.

  The sensor chip package 1 mounted on the housing 14 is ultrasonically welded to the connector terminal 16 using an aluminum thin wire 17 or the like, so that an electrical interface with an external device is prepared.

  Here, the outer lead 4 of the sensor chip package 1 is bent (formed) by press working or the like and directly connected to the connector terminal 16 by a method such as spot welding, ultrasonic vibration welding, or laser welding. Can be achieved.

When the connector terminal 16 and the outer lead 4 are welded together, the plate-like terminal surface and the lead are sandwiched between the welding electrodes, and in the case of welding from the front and back directions of the terminal surface, the bottom surface of the housing 14 interferes with the welding electrode. Since it may be impossible to dispose, the connector terminal 16 and the outer lead 4 can be welded by opening the entire bottom surface of the housing 14 or a space in which the welding electrode can be inserted, and the base plate is then attached to the housing after being joined. It can also be established as a structure by bonding to 14.

  The housing 14 may have a structure in which a sub-passage 19 for taking in part of the air 18 passing through the intake pipe 13 is formed by resin molding to protect the sensor chip package 1 from damage such as a drop impact.

  The housing 14 in which the sensor chip package 1 is mounted is sealed with a plate-shaped resin cover 20 using an adhesive, or joined to the housing 14 by a method such as laser welding, vibration welding, or ultrasonic welding. .

  The housing 14 sealed by the cover 20 is fixed by a method such as a screw 21 or heat welding so as to be positioned inside the intake pipe 13 through which air 18 introduced into the internal combustion engine flows.

  The connector 15 integrated with the housing 14 is fixed so as to be located outside the intake pipe 13.

  11 shows an enlarged CC cross-sectional view of a part A shown in FIGS. 9 and 10. Here, in the sensor chip package 1 mounted on the housing 14, the heat dividing structure portion 10 provided on the lead frame 3 on which the thermistor chip 2 is mounted is preferably connected to the thermistor chip 2 with the resin portion of the housing 14 body as a boundary. The lead frame 3 is disposed so as to be exposed at the front end side in the direction opposite to the connector 15 of the housing, and the heat dividing structure portion 10 is disposed inside the housing resin 5 and the heat dividing structure is mounted on the lead frame 3 on which the thermistor chip 2 is mounted. The lead frame 23 on the opposite side with respect to the portion 10 is preferably arranged in the circuit chamber side direction surrounded by the resin of the housing 14 main body. Alternatively, even if a part of the heat dividing structure portion 10 is within the range of the resin portion of the housing 14, the signal line having the same polarity in the lead frame 3 has a reduced cross-sectional area structure or is constituted by a thin wire having a small heat capacity. That is, it is possible to reduce the heat conduction of the metal member if it has a thermally divided structure.

  This makes it possible to separate the temperature detected by the thermistor chip 2 from the heat of the main body that supports and fixes the temperature detection unit, so that the flow rate measuring device that accurately controls the air temperature sucked by the internal combustion engine and has a good thermal response. Can be provided.

Example 4
Next, a fourth embodiment which is an embodiment of the present invention will be described below.
FIG. 12 shows a schematic cross-sectional view in which the flow rate measuring device of FIG. 11 is further improved.

  A lead frame 22 that is disposed so as to form an electric signal line having the same polarity as the lead frame 3 on which the thermistor chip 2 is mounted and is not electrically connected to the other lead frame 23 connected by the thin wire 11. Are formed simultaneously with the outer frame 6 (lead frame main body) through the tie bar 7 by precision fine pressing or etching. The lead frame 3 and the lead frame 23 which are separated after the thermistor chip 2 is mounted on the lead frame 3 are joined by the thin wire 11 and transfer molded using the resin 5.

  As a result, the portion of the heat dividing structure portion 10 provided on the lead frame 3 on which the thermistor chip 2 is mounted has a metal member lead inside the resin 5 as compared with the case where the structure is rigid only by the resin 5. By including the frame 22, the mechanical shock resistance and vibration resistance can be further improved, and the heat conducted through the originally intended metal material can also be divided so that reliability is ensured. High flow rate measuring device can be realized.

1 Sensor chip package 2 Thermistor chip (temperature detection element)
3, 22, 23 Lead frame 4 Outer lead 5 Resin 6 Outer frame (lead frame body)
7 Tie bar (lead frame suspension structure)
8 Flow sensor chip 9 Control circuit chip 10 Thermally divided structure portion 11, 12 Fine wire 13 Intake pipe 14 Housing 15 Connector (coupler)
16 Connector terminal 17 Aluminum wire 18 Air (Air flow)
19 Secondary passage (temperature sensor protection member)
20 Cover 21 Screw

Claims (12)

In the sensor chip package of the flow rate measuring device including the flow rate detecting element disposed in the auxiliary passage,
A temperature sensing element;
A first conductive lead frame that supports and fixes the temperature detection element and is electrically connected to the temperature detection element;
A second conductive lead frame;
Conductivity electrically connecting the first conductive lead frame and the second conductive lead frame, and having a smaller cross-sectional area than the first conductive lead frame and the second conductive lead frame. Having a sex member,
A resin package covered so that the first conductive lead frame, the second conductive lead frame, the conductive member, and the temperature detection element are encapsulated with resin;
A sensor chip package, wherein a cut surface of the first conductive lead frame or the second conductive lead frame on an outer periphery of the resin package is sealed. The sensor chip package according to claim 1,
A sensor chip package, wherein a cut surface of the tie bar is covered with an adhesive. The sensor chip package according to claim 1,
A sensor chip package, wherein a cut surface of the tie bar is covered with a resin. The sensor chip package according to claim 1,
The temperature detecting element is a thermistor chip. The sensor chip package according to claim 1,
The resin package is
A third conductive lead frame independent of the first and second conductive lead frames;
The temperature detecting element is mounted so as to straddle the first conductive lead frame and the third conductive lead frame. The sensor chip package according to claim 1,
The sensor chip package, wherein the conductive member is a bonding wire. The sensor chip package according to claim 1,
The sensor chip package, wherein the conductive member, the first conductive lead frame, and the second conductive lead frame are made of the same metal plate. In the sensor chip package according to claim 5,
The temperature detecting element is bonded to the first and third conductive lead frames via a conductive adhesive. In the sensor chip package according to claim 5,
The resin package is
A circuit board disposed on the second conductive lead frame;
The sensor chip package, wherein the circuit board and the third conductive lead frame are electrically connected by the conductive member. In the sensor chip package according to claim 5,
The resin package is
A circuit board disposed on the second conductive lead frame;
The first, second and third conductive lead frames have a fourth conductive lead frame independent from each other;
The third conductive lead frame and the fourth lead frame are electrically connected by the conductive member,
The sensor chip package, wherein the fourth conductive lead frame and the circuit board are electrically connected by the conductive member. The sensor chip package according to claim 1,
The flow rate detection element is a thermal flow rate sensor chip having a diaphragm,
The sensor chip package, wherein the flow rate detecting element is mounted on the resin package. The sensor chip package according to claim 11, wherein
The sensor package according to claim 1, wherein the resin package has an exposed portion that exposes the diaphragm.

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