JP2017044593A5 - - Google Patents

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Publication number
JP2017044593A5
JP2017044593A5 JP2015167518A JP2015167518A JP2017044593A5 JP 2017044593 A5 JP2017044593 A5 JP 2017044593A5 JP 2015167518 A JP2015167518 A JP 2015167518A JP 2015167518 A JP2015167518 A JP 2015167518A JP 2017044593 A5 JP2017044593 A5 JP 2017044593A5
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JP
Japan
Prior art keywords
electronic component
cooling
heating
conveying apparatus
electronic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2015167518A
Other languages
Japanese (ja)
Other versions
JP6597059B2 (en
JP2017044593A (en
Filing date
Publication date
Application filed filed Critical
Priority to JP2015167518A priority Critical patent/JP6597059B2/en
Priority claimed from JP2015167518A external-priority patent/JP6597059B2/en
Priority to TW105127119A priority patent/TWI600911B/en
Priority to CN201610726317.2A priority patent/CN106483440A/en
Publication of JP2017044593A publication Critical patent/JP2017044593A/en
Publication of JP2017044593A5 publication Critical patent/JP2017044593A5/ja
Application granted granted Critical
Publication of JP6597059B2 publication Critical patent/JP6597059B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Claims (8)

電子部品配置される電子部品載置部材と、
前記電子部品載置部材載置され、前記電子部品を冷却する冷却部材と、
前記電子部品を加熱する加熱部材と、を有し、
前記冷却部材は、前記電子部品載置部材と前記加熱部材との間に配置される子部品搬送装置。
An electronic component placement member on which the electronic component is placed;
Wherein the electronic component mounting member is placed, and a cooling member for cooling the electronic components,
A heating member for heating the electronic component,
It said cooling member, said to be electronic component conveying device disposed between the electronic component mounting member and the heating member.
前記冷却部材は、第1部材と第2部材とにて構成される請求項1に記載の電子部品搬送装置。
The cooling member, the electronic component transporting apparatus according to comprised claim 1 in the first member and the second member.
前記冷却部材は、冷媒流れるを有し、
前記は、前記第1部材に設けられる請求項2に記載の電子部品搬送装置。
The cooling member has a groove through which the refrigerant flows,
The electronic component conveying apparatus according to claim 2, wherein the groove is provided in the first member.
前記第1部材と前記第2部材との間封止部材が配置される請求項3に記載の電子部品搬送装置。
Electronic component conveying apparatus according to claim 3 in which the sealing member is disposed between the first member and the second member.
前記第2部材は、前記第1部材と前記加熱部材との間に配置される請求項2ないし4のいずれか1項に記載の電子部品搬送装置。
5. The electronic component conveying apparatus according to claim 2, wherein the second member is disposed between the first member and the heating member.
前記第2部材の厚さは、前記第1部材の厚さよりも厚い請求項2ないし5のいずれか1項に記載の電子部品搬送装置。
The thickness of the said 2nd member is an electronic component conveying apparatus of any one of Claim 2 thru | or 5 thicker than the thickness of the said 1st member.
前記冷却部材は、流体で冷却される請求項1ないし6のいずれか1項に記載の電子部品搬送装置。
The electronic component conveying apparatus according to claim 1, wherein the cooling member is cooled by a fluid.
電子部品配置される電子部品載置部材と、
前記電子部品載置部材載置され、前記電子部品を冷却する冷却部材と、
前記電子部品を加熱する加熱部材と、
前記電子部品を検査する検査部と、を有し、
前記冷却部材は、前記電子部品載置部材と前記加熱部材との間に配置される子部品検査装置。
An electronic component placement member on which the electronic component is placed;
Wherein the electronic component mounting member is placed, and a cooling member for cooling the electronic components,
A heating member for heating the electronic component;
An inspection unit for inspecting the electronic component,
It said cooling member, said to be electronic component inspecting device arranged between the electronic component mounting member and the heating member.
JP2015167518A 2015-08-27 2015-08-27 Electronic component conveying device and electronic component inspection device Expired - Fee Related JP6597059B2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2015167518A JP6597059B2 (en) 2015-08-27 2015-08-27 Electronic component conveying device and electronic component inspection device
TW105127119A TWI600911B (en) 2015-08-27 2016-08-24 Electronic parts conveying apparatus and electronic parts inspection apparatus
CN201610726317.2A CN106483440A (en) 2015-08-27 2016-08-25 Electronic component conveying device and electronic component inspection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015167518A JP6597059B2 (en) 2015-08-27 2015-08-27 Electronic component conveying device and electronic component inspection device

Publications (3)

Publication Number Publication Date
JP2017044593A JP2017044593A (en) 2017-03-02
JP2017044593A5 true JP2017044593A5 (en) 2018-09-13
JP6597059B2 JP6597059B2 (en) 2019-10-30

Family

ID=58209757

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015167518A Expired - Fee Related JP6597059B2 (en) 2015-08-27 2015-08-27 Electronic component conveying device and electronic component inspection device

Country Status (1)

Country Link
JP (1) JP6597059B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6336163B1 (en) 2017-03-09 2018-06-06 株式会社アマダホールディングス Cooling water supply system and cooling water supply method for laser processing head

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01163570A (en) * 1987-12-17 1989-06-27 Kobe Steel Ltd Low-temperature test apparatus for ic device
US6668570B2 (en) * 2001-05-31 2003-12-30 Kryotech, Inc. Apparatus and method for controlling the temperature of an electronic device under test
KR100436657B1 (en) * 2001-12-17 2004-06-22 미래산업 주식회사 Apparatus for heating and cooling semiconductor in handler for testing semiconductor
JP2007248317A (en) * 2006-03-17 2007-09-27 Sumitomo Electric Ind Ltd Heating and cooling module
JP6236957B2 (en) * 2013-07-23 2017-11-29 セイコーエプソン株式会社 Electronic component conveying device, electronic component inspection device, and cooling system

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