JP2017044312A - Bearing with sensor and state monitoring system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a bearing with a sensor capable of detecting a flexure while being in an actual operation state, and to provide a state monitoring system.SOLUTION: The bearing with a sensor 10 includes a flexure detection part 20 disposed in an outer ring 11 or inner ring 13. The flexure detection part 20 may be a thin film-type flexure sensor 20 including an insulation film disposed on the outer ring 11 or inner ring 13; and a thin film resistance body disposed on the insulation film. The thin film-type flexure sensor 20 is disposed in a groove part 12 of the outer ring 11.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a sensor-equipped bearing and a condition monitoring system.

  Machine equipment such as vehicles, machine tools, and wind power generators are often equipped with various devices such as rolling bearings, motors, and pumps. If wear or damage occurs due to long-term use of mechanical equipment, smooth rotation and sliding of various devices such as bearings will be hindered, and not only will abnormal noise be generated but also the life may be shortened. . For this reason, conventionally, after using a machine facility for a certain period, the presence or absence of abnormalities such as wear and damage of a bearing or the like has been inspected.

  This inspection is performed by disassembling the part of the machine equipment in which the bearing or the like is incorporated, or the entire machine equipment, and damage or wear generated in the bearing or the like is found by visual inspection by the operator. As a result of the inspection, if an abnormality such as wear or damage is found in the bearing or the like, the bearing or the like is replaced with a new one to prevent a malfunction or accident of the mechanical equipment. However, in the inspection method in which a part or the whole of the mechanical equipment is disassembled and visually checked by an operator, it is very difficult to remove the bearings from the mechanical equipment and to incorporate the bearings etc. that have been inspected again into the mechanical equipment. There is a problem that labor is required and maintenance cost of mechanical equipment increases.

  In order to solve such problems, there has been proposed an abnormality diagnosis device that performs abnormality diagnosis of various devices such as bearings in an actual operation state of mechanical equipment. For example, in the apparatus described in Patent Document 1, the amount of bearing wear is constantly monitored to prevent trouble from occurring.

JP-A-6-193629

  It is desired that the wear or abnormality of the bearing can be diagnosed by detecting the strain generated by the load applied to the shaft held by the bearing. Furthermore, in order to control the apparatus state by monitoring the load, it is desired that the strain can be detected in the actual operation state.

  The present invention has been made in view of the above circumstances, and an object thereof is to provide a sensor-equipped bearing capable of detecting strain in an actual operating state, and a state monitoring system.

The above object of the present invention can be achieved by the following constitution.
(1) A sensor-equipped bearing including a strain detection unit disposed on an outer ring or an inner ring.
(2) The strain detection unit according to (1), wherein the strain detection unit is a thin film strain sensor having an insulating film disposed on the outer ring or the inner ring and a thin film resistor disposed on the insulating film. Bearing with sensor.
(3) The sensor-equipped bearing according to (2), wherein the thin film resistor is made of a metal or a conductive resin material.
(4) A groove is formed in the outer ring or the inner ring,
The said thin film type strain sensor is a bearing with a sensor as described in (2) or (3) arrange | positioned at the said groove part.
(5) The outer ring or the inner ring is a rotating wheel,
The sensor-equipped bearing according to any one of (2) to (4), wherein an output signal of the thin-film strain sensor disposed on the rotating wheel is taken out through a slip ring.
(6) The sensor-equipped bearing according to any one of (2) to (5), wherein the thin film strain sensor transmits an output signal as a radio wave.
(7) The sensor-equipped bearing according to any one of (2) to (6),
A state monitoring device for monitoring the state of the bearing with the sensor, based on the output signal of the thin film strain sensor;
A state monitoring system comprising:

  ADVANTAGE OF THE INVENTION According to this invention, the bearing with a sensor which can detect distortion in a real operation state, and a state monitoring system are realizable.

It is sectional drawing of a bearing with a sensor. It is a principal part perspective view of an outer ring.

  Hereinafter, a sensor-equipped bearing and a state monitoring system according to embodiments of the present invention will be described with reference to the drawings. In addition, this invention is not limited at all by this embodiment. In addition, constituent elements in the following description include those that are substantially the same as those that can be assumed by those skilled in the art, that is, those in an equivalent range.

  As shown in FIG. 1, the state monitoring system according to the present embodiment includes a sensor-equipped bearing 10 that is a monitoring target incorporated in mechanical equipment, and a strain detection that is disposed on an outer ring 11 or an inner ring 13 of the sensor-equipped bearing 10. And a state monitoring device (not shown) for monitoring the state of the sensor-equipped bearing 10 based on the output signal of the strain detection unit. The strain detection unit is not particularly limited as long as the strain generated in the outer ring 11 or the inner ring 13 can be detected. It is preferable.

  The sensor-equipped bearing 10 includes an outer ring 11 (a race ring that is a fixed ring) having an outer ring raceway surface 11a on an inner peripheral surface, an inner ring 13 (a race ring that is a rotating ring) having an inner ring raceway surface 13a on an outer peripheral surface, and an outer ring. And a plurality of balls 15 that are rotatably arranged between the raceway surface 11a and the inner ring raceway surface 13a.

  The inner ring 13 is a rotating wheel that is externally fixed to a shaft (not shown) and rotates together with the shaft. The outer ring 11 is a fixed ring that is fitted and fixed to a housing or the like (not shown) and does not rotate.

On the outer peripheral surface of the outer ring 11, a groove portion 12 is formed in parallel with the axial direction (perpendicular to the paper surface of FIG. 1) so as to be recessed from one end to the other end in the axial direction. A strain sensor 20 capable of detecting the strain of the outer ring 11 in the actual operating state of the mechanical equipment is fixed to the groove portion 12. The strain sensor 20 includes an insulating film 21 such as SiO ₂ laminated on the bottom of the groove 12, a thin film resistor 23 uniformly laminated on the insulating film 21 by a vacuum thin film forming method such as vapor deposition or sputtering, and a thin film resistor. And electrodes 25 formed by thick film printing or the like at both ends of the body 23.

  The thin film resistor 23 is appropriately selected from the viewpoints of economy and material characteristics, and is preferably made of, for example, a metal or a conductive resin material. Examples of the metal include Fe—Cr, Ni—Cr, CrN, W, and Ti. Examples of the conductive resin material include a resin material having a resistance value adjusted by containing a carbon material.

  Since the groove portion 12 is formed on the outer peripheral surface of the outer ring 11, the outer ring 11 is easily affected by a load. Therefore, the distortion generated by the load applied when the ball 15 passes is also increased, and the detection capability of the strain sensor 20 can be improved.

  Since the strain sensor 20 is disposed in the groove portion 12, that is, in a thin portion where distortion is likely to occur, the detection capability can be further improved. In addition, since the strain sensor 20 is disposed in the groove portion 12 and does not protrude from the outer ring 11, the sensor-equipped bearing 10 can be made compact.

  In addition, it is also possible to detect the rotation speed and rotational speed of a bearing by measuring the strain interval detected by the strain sensor 20.

  A lead terminal (not shown) is connected to the electrode 25, and the output signal of the strain sensor 20 is taken out by the lead wire. When the inner ring 13 is a fixed ring and the outer ring 11 is a rotating ring, the lead wire is connected to a known slip ring (not shown) so that an output signal can be taken out from the rotating strain sensor 20.

  The strain sensor 20 may include a wireless communication unit that transmits an output signal as a radio wave to the outside, and a self-power generation unit that supplies power to the wireless communication unit and the like. In this case, the strain sensor 20 can detect strain wirelessly and does not need to be connected to a slip ring. Note that a wireless power feeding method may be used for power generation by the self-power generation unit. If data acquisition and data transmission are performed only during power feeding, the strain sensor 20 can save power.

  In this way, the output signal of the strain sensor 20 taken out to the outside is transmitted to the state monitoring device, and this state monitoring device constantly monitors the state of the sensor-equipped bearing 10 based on the output signal.

  In addition, the position and shape of the groove part 12 provided in the outer peripheral surface of the outer ring 11 are not limited. For example, the groove 12 may be provided on the side surface in the axial direction of the outer ring 11. In this case, the strain sensor 20 disposed in the groove 12 detects a strain that is generated when the contact angle of the ball 15 changes when an axial load is generated.

  As described above, according to the sensor-equipped bearing 10 and the state monitoring device of the present embodiment, it is possible to monitor the state of the bearing with high sensitivity with a compact configuration.

  In addition, this invention is not limited to embodiment mentioned above, A change, improvement, etc. are possible suitably.

  For example, the strain sensor 20 may be disposed on the inner ring 13. In this case, in order to improve the detection capability of the strain sensor 20, a groove is formed at an arbitrary position such as the inner peripheral surface or the axial side surface of the inner ring 13, and the strain sensor 20 is disposed inside the groove. It is preferable to do.

DESCRIPTION OF SYMBOLS 10 Bearing 11 with a sensor Outer ring 11a Outer ring raceway surface 12 Groove part 13 Inner ring 13a Inner ring raceway surface 15 Ball 20 Thin film type strain sensor (strain detector)
21 Insulating film 23 Thin film resistor

Claims (7)

  A sensor-equipped bearing comprising a strain detector disposed on an outer ring or an inner ring.   2. The sensor-attached sensor according to claim 1, wherein the strain detection unit is a thin film type strain sensor including an insulating film disposed on the outer ring or the inner ring and a thin film resistor disposed on the insulating film. bearing.   The sensor-equipped bearing according to claim 2, wherein the thin film resistor is made of a metal or a conductive resin material. A groove is formed in the outer ring or the inner ring,
The sensor-equipped bearing according to claim 2, wherein the thin-film strain sensor is disposed in the groove portion. The outer ring or the inner ring is a rotating wheel,
The sensor-equipped bearing according to any one of claims 2 to 4, wherein an output signal of the thin-film strain sensor disposed on the rotating wheel is taken out through a slip ring.   The said thin film type strain sensor is a bearing with a sensor of any one of Claims 2-5 which transmits an output signal as a radio wave. A bearing with a sensor according to any one of claims 2 to 6,
A state monitoring device for monitoring the state of the bearing with the sensor, based on the output signal of the thin film strain sensor;
A state monitoring system comprising:

Images