JP2017039846A - Electrically conductive adhesive and semiconductor device - Google Patents
Electrically conductive adhesive and semiconductor device Download PDFInfo
- Publication number
- JP2017039846A JP2017039846A JP2015162337A JP2015162337A JP2017039846A JP 2017039846 A JP2017039846 A JP 2017039846A JP 2015162337 A JP2015162337 A JP 2015162337A JP 2015162337 A JP2015162337 A JP 2015162337A JP 2017039846 A JP2017039846 A JP 2017039846A
- Authority
- JP
- Japan
- Prior art keywords
- component
- conductive adhesive
- morpholine
- conductive
- group
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000853 adhesive Substances 0.000 title claims abstract description 95
- 230000001070 adhesive effect Effects 0.000 title claims abstract description 95
- 239000004065 semiconductor Substances 0.000 title claims description 32
- 229920005989 resin Polymers 0.000 claims abstract description 50
- 239000011347 resin Substances 0.000 claims abstract description 50
- 239000002253 acid Substances 0.000 claims abstract description 48
- 150000001412 amines Chemical class 0.000 claims abstract description 37
- 229910052751 metal Inorganic materials 0.000 claims abstract description 31
- 239000002184 metal Substances 0.000 claims abstract description 31
- YNAVUWVOSKDBBP-UHFFFAOYSA-N Morpholine Chemical compound C1COCCN1 YNAVUWVOSKDBBP-UHFFFAOYSA-N 0.000 claims abstract description 29
- 239000003795 chemical substances by application Substances 0.000 claims abstract description 24
- 239000003822 epoxy resin Substances 0.000 claims abstract description 24
- 229920000647 polyepoxide Polymers 0.000 claims abstract description 24
- 239000000654 additive Substances 0.000 claims abstract description 18
- 125000003277 amino group Chemical group 0.000 claims abstract description 18
- 230000000996 additive effect Effects 0.000 claims abstract description 16
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 claims abstract description 11
- SJRJJKPEHAURKC-UHFFFAOYSA-N N-Methylmorpholine Chemical compound CN1CCOCC1 SJRJJKPEHAURKC-UHFFFAOYSA-N 0.000 claims abstract description 10
- 229960003540 oxyquinoline Drugs 0.000 claims abstract description 9
- MCJGNVYPOGVAJF-UHFFFAOYSA-N quinolin-8-ol Chemical compound C1=CN=C2C(O)=CC=CC2=C1 MCJGNVYPOGVAJF-UHFFFAOYSA-N 0.000 claims abstract description 9
- 239000011231 conductive filler Substances 0.000 claims abstract description 8
- 239000003638 chemical reducing agent Substances 0.000 claims abstract description 7
- VZKSLWJLGAGPIU-UHFFFAOYSA-N 3-morpholin-4-ylpropan-1-ol Chemical compound OCCCN1CCOCC1 VZKSLWJLGAGPIU-UHFFFAOYSA-N 0.000 claims abstract description 6
- PHNDZBFLOPIMSM-UHFFFAOYSA-N 4-morpholin-4-ylaniline Chemical compound C1=CC(N)=CC=C1N1CCOCC1 PHNDZBFLOPIMSM-UHFFFAOYSA-N 0.000 claims abstract description 6
- BRNULMACUQOKMR-UHFFFAOYSA-N thiomorpholine Chemical compound C1CSCCN1 BRNULMACUQOKMR-UHFFFAOYSA-N 0.000 claims abstract description 6
- HNVIQLPOGUDBSU-UHFFFAOYSA-N 2,6-dimethylmorpholine Chemical compound CC1CNCC(C)O1 HNVIQLPOGUDBSU-UHFFFAOYSA-N 0.000 claims abstract description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 35
- 239000000758 substrate Substances 0.000 claims description 35
- 239000010949 copper Substances 0.000 claims description 17
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 15
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 15
- 229910052802 copper Inorganic materials 0.000 claims description 15
- 229910052718 tin Inorganic materials 0.000 claims description 15
- 229910052782 aluminium Inorganic materials 0.000 claims description 14
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 14
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 13
- 229910052759 nickel Inorganic materials 0.000 claims description 13
- 229910052709 silver Inorganic materials 0.000 claims description 11
- 239000004332 silver Substances 0.000 claims description 11
- 229910045601 alloy Inorganic materials 0.000 claims description 5
- 239000000956 alloy Substances 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 4
- 229910001316 Ag alloy Inorganic materials 0.000 claims description 3
- 229910000838 Al alloy Inorganic materials 0.000 claims description 3
- 229910000881 Cu alloy Inorganic materials 0.000 claims description 3
- 229910000990 Ni alloy Inorganic materials 0.000 claims description 3
- 229910001128 Sn alloy Inorganic materials 0.000 claims description 3
- 239000000843 powder Substances 0.000 claims description 3
- 239000011135 tin Substances 0.000 claims description 3
- NDOVLWQBFFJETK-UHFFFAOYSA-N 1,4-thiazinane 1,1-dioxide Chemical compound O=S1(=O)CCNCC1 NDOVLWQBFFJETK-UHFFFAOYSA-N 0.000 abstract description 4
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 51
- 239000000047 product Substances 0.000 description 32
- 239000007788 liquid Substances 0.000 description 14
- 239000000126 substance Substances 0.000 description 13
- 230000000052 comparative effect Effects 0.000 description 12
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 description 10
- 229920000642 polymer Polymers 0.000 description 10
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 9
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 7
- 239000000203 mixture Substances 0.000 description 7
- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 6
- 125000002947 alkylene group Chemical group 0.000 description 6
- -1 etc. Substances 0.000 description 6
- 238000007747 plating Methods 0.000 description 6
- 238000005260 corrosion Methods 0.000 description 5
- 230000007797 corrosion Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- WRIDQFICGBMAFQ-UHFFFAOYSA-N (E)-8-Octadecenoic acid Natural products CCCCCCCCCC=CCCCCCCC(O)=O WRIDQFICGBMAFQ-UHFFFAOYSA-N 0.000 description 4
- LQJBNNIYVWPHFW-UHFFFAOYSA-N 20:1omega9c fatty acid Natural products CCCCCCCCCCC=CCCCCCCCC(O)=O LQJBNNIYVWPHFW-UHFFFAOYSA-N 0.000 description 4
- QSBYPNXLFMSGKH-UHFFFAOYSA-N 9-Heptadecensaeure Natural products CCCCCCCC=CCCCCCCCC(O)=O QSBYPNXLFMSGKH-UHFFFAOYSA-N 0.000 description 4
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 4
- 239000005642 Oleic acid Substances 0.000 description 4
- ZQPPMHVWECSIRJ-UHFFFAOYSA-N Oleic acid Natural products CCCCCCCCC=CCCCCCCCC(O)=O ZQPPMHVWECSIRJ-UHFFFAOYSA-N 0.000 description 4
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 4
- WNLRTRBMVRJNCN-UHFFFAOYSA-N adipic acid Chemical compound OC(=O)CCCCC(O)=O WNLRTRBMVRJNCN-UHFFFAOYSA-N 0.000 description 4
- QXJSBBXBKPUZAA-UHFFFAOYSA-N isooleic acid Natural products CCCCCCCC=CCCCCCCCCC(O)=O QXJSBBXBKPUZAA-UHFFFAOYSA-N 0.000 description 4
- ZQPPMHVWECSIRJ-KTKRTIGZSA-N oleic acid Chemical compound CCCCCCCC\C=C/CCCCCCCC(O)=O ZQPPMHVWECSIRJ-KTKRTIGZSA-N 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 238000003756 stirring Methods 0.000 description 4
- 239000005725 8-Hydroxyquinoline Substances 0.000 description 3
- 239000004593 Epoxy Substances 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 3
- 239000006185 dispersion Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 239000003112 inhibitor Substances 0.000 description 3
- 150000002780 morpholines Chemical class 0.000 description 3
- 229920003986 novolac Polymers 0.000 description 3
- 229910000679 solder Inorganic materials 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- VXQBJTKSVGFQOL-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethyl acetate Chemical compound CCCCOCCOCCOC(C)=O VXQBJTKSVGFQOL-UHFFFAOYSA-N 0.000 description 2
- CDAWCLOXVUBKRW-UHFFFAOYSA-N 2-aminophenol Chemical compound NC1=CC=CC=C1O CDAWCLOXVUBKRW-UHFFFAOYSA-N 0.000 description 2
- LXBGSDVWAMZHDD-UHFFFAOYSA-N 2-methyl-1h-imidazole Chemical compound CC1=NC=CN1 LXBGSDVWAMZHDD-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 239000006087 Silane Coupling Agent Substances 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- UUQQGGWZVKUCBD-UHFFFAOYSA-N [4-(hydroxymethyl)-2-phenyl-1h-imidazol-5-yl]methanol Chemical compound N1C(CO)=C(CO)N=C1C1=CC=CC=C1 UUQQGGWZVKUCBD-UHFFFAOYSA-N 0.000 description 2
- 150000008065 acid anhydrides Chemical class 0.000 description 2
- 239000001361 adipic acid Substances 0.000 description 2
- 235000011037 adipic acid Nutrition 0.000 description 2
- 125000004432 carbon atom Chemical group C* 0.000 description 2
- PAFZNILMFXTMIY-UHFFFAOYSA-N cyclohexylamine Chemical compound NC1CCCCC1 PAFZNILMFXTMIY-UHFFFAOYSA-N 0.000 description 2
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- NIHNNTQXNPWCJQ-UHFFFAOYSA-N fluorene Chemical compound C1=CC=C2CC3=CC=CC=C3C2=C1 NIHNNTQXNPWCJQ-UHFFFAOYSA-N 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 125000005647 linker group Chemical group 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- RNVCVTLRINQCPJ-UHFFFAOYSA-N o-toluidine Chemical compound CC1=CC=CC=C1N RNVCVTLRINQCPJ-UHFFFAOYSA-N 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 238000003918 potentiometric titration Methods 0.000 description 2
- WGYKZJWCGVVSQN-UHFFFAOYSA-N propylamine Chemical compound CCCN WGYKZJWCGVVSQN-UHFFFAOYSA-N 0.000 description 2
- 238000004445 quantitative analysis Methods 0.000 description 2
- RUEBPOOTFCZRBC-UHFFFAOYSA-N (5-methyl-2-phenyl-1h-imidazol-4-yl)methanol Chemical compound OCC1=C(C)NC(C=2C=CC=CC=2)=N1 RUEBPOOTFCZRBC-UHFFFAOYSA-N 0.000 description 1
- RSWGJHLUYNHPMX-UHFFFAOYSA-N 1,4a-dimethyl-7-propan-2-yl-2,3,4,4b,5,6,10,10a-octahydrophenanthrene-1-carboxylic acid Chemical compound C12CCC(C(C)C)=CC2=CCC2C1(C)CCCC2(C)C(O)=O RSWGJHLUYNHPMX-UHFFFAOYSA-N 0.000 description 1
- YQMXOIAIYXXXEE-UHFFFAOYSA-N 1-benzylpyrrolidin-3-ol Chemical compound C1C(O)CCN1CC1=CC=CC=C1 YQMXOIAIYXXXEE-UHFFFAOYSA-N 0.000 description 1
- KWKAKUADMBZCLK-UHFFFAOYSA-N 1-octene Chemical group CCCCCCC=C KWKAKUADMBZCLK-UHFFFAOYSA-N 0.000 description 1
- VILCJCGEZXAXTO-UHFFFAOYSA-N 2,2,2-tetramine Chemical compound NCCNCCNCCN VILCJCGEZXAXTO-UHFFFAOYSA-N 0.000 description 1
- RNFJDJUURJAICM-UHFFFAOYSA-N 2,2,4,4,6,6-hexaphenoxy-1,3,5-triaza-2$l^{5},4$l^{5},6$l^{5}-triphosphacyclohexa-1,3,5-triene Chemical compound N=1P(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP=1(OC=1C=CC=CC=1)OC1=CC=CC=C1 RNFJDJUURJAICM-UHFFFAOYSA-N 0.000 description 1
- RUFZNDNBXKOZQV-UHFFFAOYSA-N 2,3-dihydro-1h-pyrrolo[1,2-a]benzimidazole Chemical compound C1=CC=C2N(CCC3)C3=NC2=C1 RUFZNDNBXKOZQV-UHFFFAOYSA-N 0.000 description 1
- GHKSKVKCKMGRDU-UHFFFAOYSA-N 2-(3-aminopropylamino)ethanol Chemical compound NCCCNCCO GHKSKVKCKMGRDU-UHFFFAOYSA-N 0.000 description 1
- QIRNGVVZBINFMX-UHFFFAOYSA-N 2-allylphenol Chemical compound OC1=CC=CC=C1CC=C QIRNGVVZBINFMX-UHFFFAOYSA-N 0.000 description 1
- QCBSYPYHCJMQGB-UHFFFAOYSA-N 2-ethyl-1,3,5-triazine Chemical compound CCC1=NC=NC=N1 QCBSYPYHCJMQGB-UHFFFAOYSA-N 0.000 description 1
- PQAMFDRRWURCFQ-UHFFFAOYSA-N 2-ethyl-1h-imidazole Chemical compound CCC1=NC=CN1 PQAMFDRRWURCFQ-UHFFFAOYSA-N 0.000 description 1
- QUPKCFBHJFNUEW-UHFFFAOYSA-N 2-ethyl-4,5-dihydro-1h-imidazole Chemical compound CCC1=NCCN1 QUPKCFBHJFNUEW-UHFFFAOYSA-N 0.000 description 1
- YTWBFUCJVWKCCK-UHFFFAOYSA-N 2-heptadecyl-1h-imidazole Chemical compound CCCCCCCCCCCCCCCCCC1=NC=CN1 YTWBFUCJVWKCCK-UHFFFAOYSA-N 0.000 description 1
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 1
- VWSLLSXLURJCDF-UHFFFAOYSA-N 2-methyl-4,5-dihydro-1h-imidazole Chemical compound CC1=NCCN1 VWSLLSXLURJCDF-UHFFFAOYSA-N 0.000 description 1
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 1
- ZCUJYXPAKHMBAZ-UHFFFAOYSA-N 2-phenyl-1h-imidazole Chemical compound C1=CNC(C=2C=CC=CC=2)=N1 ZCUJYXPAKHMBAZ-UHFFFAOYSA-N 0.000 description 1
- FUOZJYASZOSONT-UHFFFAOYSA-N 2-propan-2-yl-1h-imidazole Chemical compound CC(C)C1=NC=CN1 FUOZJYASZOSONT-UHFFFAOYSA-N 0.000 description 1
- LLEASVZEQBICSN-UHFFFAOYSA-N 2-undecyl-1h-imidazole Chemical compound CCCCCCCCCCCC1=NC=CN1 LLEASVZEQBICSN-UHFFFAOYSA-N 0.000 description 1
- DZIHTWJGPDVSGE-UHFFFAOYSA-N 4-[(4-aminocyclohexyl)methyl]cyclohexan-1-amine Chemical compound C1CC(N)CCC1CC1CCC(N)CC1 DZIHTWJGPDVSGE-UHFFFAOYSA-N 0.000 description 1
- TYOXIFXYEIILLY-UHFFFAOYSA-N 5-methyl-2-phenyl-1h-imidazole Chemical compound N1C(C)=CN=C1C1=CC=CC=C1 TYOXIFXYEIILLY-UHFFFAOYSA-N 0.000 description 1
- ULKLGIFJWFIQFF-UHFFFAOYSA-N 5K8XI641G3 Chemical compound CCC1=NC=C(C)N1 ULKLGIFJWFIQFF-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- RPNUMPOLZDHAAY-UHFFFAOYSA-N Diethylenetriamine Chemical compound NCCNCCN RPNUMPOLZDHAAY-UHFFFAOYSA-N 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000003723 Smelting Methods 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 238000007259 addition reaction Methods 0.000 description 1
- 239000002318 adhesion promoter Substances 0.000 description 1
- 125000002723 alicyclic group Chemical group 0.000 description 1
- 239000002518 antifoaming agent Substances 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- JWVAUCBYEDDGAD-UHFFFAOYSA-N bismuth tin Chemical compound [Sn].[Bi] JWVAUCBYEDDGAD-UHFFFAOYSA-N 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 239000013065 commercial product Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000007822 coupling agent Substances 0.000 description 1
- 229930003836 cresol Natural products 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- QGBSISYHAICWAH-UHFFFAOYSA-N dicyandiamide Chemical compound NC(N)=NC#N QGBSISYHAICWAH-UHFFFAOYSA-N 0.000 description 1
- ZBCBWPMODOFKDW-UHFFFAOYSA-N diethanolamine Chemical class OCCNCCO ZBCBWPMODOFKDW-UHFFFAOYSA-N 0.000 description 1
- 239000003085 diluting agent Substances 0.000 description 1
- 239000003995 emulsifying agent Substances 0.000 description 1
- 125000003700 epoxy group Chemical group 0.000 description 1
- 125000000816 ethylene group Chemical group [H]C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 239000003063 flame retardant Substances 0.000 description 1
- 235000021588 free fatty acids Nutrition 0.000 description 1
- 238000005227 gel permeation chromatography Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 150000002460 imidazoles Chemical class 0.000 description 1
- MTNDZQHUAFNZQY-UHFFFAOYSA-N imidazoline Chemical compound C1CN=CN1 MTNDZQHUAFNZQY-UHFFFAOYSA-N 0.000 description 1
- 150000002462 imidazolines Chemical class 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 230000005764 inhibitory process Effects 0.000 description 1
- 238000007561 laser diffraction method Methods 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000005065 mining Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229920001568 phenolic resin Polymers 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 125000000843 phenylene group Chemical group C1(=C(C=CC=C1)*)* 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000002952 polymeric resin Substances 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- YLLIGHVCTUPGEH-UHFFFAOYSA-M potassium;ethanol;hydroxide Chemical compound [OH-].[K+].CCO YLLIGHVCTUPGEH-UHFFFAOYSA-M 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- MHKFWKVLUPCEAH-UHFFFAOYSA-N quinolin-8-ol Chemical compound C1=CN=C2C(O)=CC=CC2=C1.C1=CN=C2C(O)=CC=CC2=C1 MHKFWKVLUPCEAH-UHFFFAOYSA-N 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- FQIWHPALNIWULM-UHFFFAOYSA-N thiomorpholine-2,3-dione Chemical compound O=C1NCCSC1=O FQIWHPALNIWULM-UHFFFAOYSA-N 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
Landscapes
- Adhesives Or Adhesive Processes (AREA)
- Conductive Materials (AREA)
Abstract
Description
本発明は、導電性接着剤に関し、特に、酸化膜を形成し易い金属を、低抵抗で接続可能な導電性接着剤に関する。 The present invention relates to a conductive adhesive, and more particularly to a conductive adhesive that can connect a metal that easily forms an oxide film with low resistance.
半導体素子の電極部と樹脂基板の導電部とが接着された半導体装置は、非常に広範に使用されており、半導体素子の電極部と樹脂基板の導電部との接着には、導電性接着剤やはんだが使用されている。導電性接着剤は、はんだより低温で接着させることができる、という利点があるが、はんだよりバルク抵抗が高いため、導電性接着剤の低抵抗化が検討されている。 A semiconductor device in which an electrode portion of a semiconductor element and a conductive portion of a resin substrate are bonded is very widely used, and a conductive adhesive is used for bonding the electrode portion of the semiconductor element and the conductive portion of the resin substrate. Or solder is used. The conductive adhesive has an advantage that it can be bonded at a lower temperature than the solder. However, since the bulk resistance is higher than that of the solder, a reduction in the resistance of the conductive adhesive is being studied.
導電性接着剤のバルク抵抗を下げる手法として、導電性接着剤中の導電性フィラーの高充填化が広く知られている。しかし、樹脂基板の導電部が、最表面に酸化膜を形成しやすい金属(ニッケル、銅、アルミニウム、錫等)であるときに、導電性接着剤で接合すると、この金属の酸化(腐蝕)により、界面抵抗値が上昇する。このため、導電性接着剤中の導電性フィラーの高充填化では接続抵抗値の上昇を防止することができない。 As a technique for reducing the bulk resistance of a conductive adhesive, high filling of a conductive filler in the conductive adhesive is widely known. However, when the conductive part of the resin substrate is a metal (nickel, copper, aluminum, tin, etc.) that is easy to form an oxide film on the outermost surface, if it is joined with a conductive adhesive, oxidation (corrosion) of this metal causes The interface resistance value increases. For this reason, the increase in the connection resistance value cannot be prevented by increasing the amount of the conductive filler in the conductive adhesive.
上記のような導電性接着剤を使用する場合の接続抵抗値の低抵抗化を目的とした既知の技術として、酸化皮膜を形成しやすい金属を導電性接着剤で接合するときに、導電性接着剤中に腐蝕防止剤として8−ヒドロキシキノリン(8−キノリノール)を添加することが知られている。 As a known technique for reducing the connection resistance when using a conductive adhesive as described above, a conductive adhesive is used when joining a metal that easily forms an oxide film with a conductive adhesive. It is known to add 8-hydroxyquinoline (8-quinolinol) to the agent as a corrosion inhibitor.
導電性接着剤中に腐蝕防止剤として8−ヒドロキシキノリンを添加する公知技術としては、(a)高分子樹脂、(b)導電性充填剤、(c)防食剤、(d)所望により反応性または非反応性希釈剤、(e)所望により不活性充填剤、および(f)所望により接着促進剤を含むマイクロ電子デバイスに使用される組成物であって、前記防食剤が8−ヒドロキシキノリンである、前記組成物(特許文献1)が、知られている。 Known techniques for adding 8-hydroxyquinoline as a corrosion inhibitor in a conductive adhesive include (a) a polymer resin, (b) a conductive filler, (c) an anticorrosive, and (d) reactive as desired. Or a composition for use in a microelectronic device comprising a non-reactive diluent, (e) optionally an inert filler, and (f) optionally an adhesion promoter, wherein the anticorrosive is 8-hydroxyquinoline. There is a known composition (Patent Document 1).
導電性接着剤は、半導体素子の電極部と樹脂基板の導電部との接着以外にも、ICチップの電磁波シールド材であるリッド(LID(蓋))と、アース用の金属電極が形成された樹脂基板との接着等、様々な箇所の接着に用いられる。すなわち、導電性接着剤には、金属−金属間だけでなく、金属−樹脂間の接着力も求められる用途がある。 In addition to the adhesion between the electrode portion of the semiconductor element and the conductive portion of the resin substrate, the conductive adhesive is formed with a lid (LID (lid)) that is an electromagnetic wave shielding material for the IC chip and a metal electrode for grounding. Used for bonding various parts such as bonding to a resin substrate. That is, the conductive adhesive has applications that require not only a metal-metal bond but also a metal-resin adhesive force.
上述の8−ヒドロキシキノリンを防食剤とする組成物には、接着力向上の目的で使用されることの多いシランカップリング剤を添加することにより、金属と導電性接着剤との接着力を向上させることができるものの、導電性接着剤と樹脂との接着力を向上させることはできない、という問題がある。そこで、本発明は、硬化後の接続抵抗値が低く、さらに金属と樹脂いずれとも接着強度が高い導電性接着剤を提供することを目的とする。 By adding a silane coupling agent, which is often used for the purpose of improving the adhesive strength, to the composition using 8-hydroxyquinoline as an anticorrosive agent, the adhesive strength between the metal and the conductive adhesive is improved. However, there is a problem that the adhesive force between the conductive adhesive and the resin cannot be improved. Accordingly, an object of the present invention is to provide a conductive adhesive having a low connection resistance value after curing and a high adhesive strength for both metal and resin.
本発明は、以下の構成を有することによって上記問題を解決した導電性接着剤、および半導体装置に関する。
〔1〕(A)エポキシ樹脂、
(B)フェノール系硬化剤および/またはアミン系硬化剤、
(C)モルホリン類還元剤および/または8−キノリノール、
(D)導電性充填剤、ならびに
(E)酸基とアミノ基を含む添加剤
を含有することを特徴とする、導電性接着剤。
〔2〕(C)成分が、モルホリン、2,6−ジメチルモルホリン、4−(3−ヒドロキシプロピル)モルホリン、4−メチルモルホリン、4−(4−アミノフェニル)モルホリン、チオモルホリンおよび1,1−ジオキソチオモルホリンからなる群より選択される少なくとも1種である、上記〔1〕記載の導電性接着剤。
〔3〕(C)成分が、(A)〜(E)成分の合計100質量部に対して、0.05〜1.00質量部である、上記〔1〕または〔2〕記載の導電性接着剤。
〔4〕(E)成分の酸価およびアミン価が、それぞれ20〜200mgKOH/gである、上記〔1〕〜〔3〕のいずれか記載の導電性接着剤。
〔5〕(D)成分が、銀、ニッケル、銅、錫、アルミニウム、銀合金、ニッケル合金、銅合金、錫合金およびアルミニウム合金からなる群から選択される少なくとも1種の金属または合金を含む粉末である、上記〔1〕〜〔4〕のいずれか記載の導電性接着剤。
〔6〕導電部を有する樹脂基板と、電極部を有する半導体素子とを含み、
上記〔1〕〜〔5〕のいずれか記載の導電性接着剤の硬化物で、樹脂基板の導電部と半導体素子の電極部とが接着された、半導体装置。
〔7〕樹脂基板の導電部がニッケル、アルミニウム、銅または錫である、上記〔6〕記載の半導体装置。
〔8〕ICチップの電磁波シールド材であるリッドと、アース用の金属電極が形成された樹脂基板とを含み、
上記〔1〕〜〔5〕のいずれか記載の導電性接着剤の硬化物で、リッドと、金属電極および/または樹脂基板とが、接着された、半導体装置。
〔9〕リッドが、少なくともその表面に、ニッケル、アルミニウム、銅または錫を有する、上記〔8〕記載の半導体装置。
The present invention relates to a conductive adhesive and a semiconductor device that have solved the above problems by having the following configuration.
[1] (A) epoxy resin,
(B) a phenolic curing agent and / or an amine curing agent,
(C) a morpholine reducing agent and / or 8-quinolinol,
A conductive adhesive comprising (D) a conductive filler and (E) an additive containing an acid group and an amino group.
[2] The component (C) is morpholine, 2,6-dimethylmorpholine, 4- (3-hydroxypropyl) morpholine, 4-methylmorpholine, 4- (4-aminophenyl) morpholine, thiomorpholine and 1,1- The conductive adhesive according to [1] above, which is at least one selected from the group consisting of dioxothiomorpholine.
[3] The conductivity according to [1] or [2], wherein the component (C) is 0.05 to 1.00 parts by mass with respect to 100 parts by mass in total of the components (A) to (E). adhesive.
[4] The conductive adhesive according to any one of [1] to [3], wherein the acid value and amine value of the component (E) are 20 to 200 mgKOH / g, respectively.
[5] Powder in which component (D) contains at least one metal or alloy selected from the group consisting of silver, nickel, copper, tin, aluminum, silver alloy, nickel alloy, copper alloy, tin alloy and aluminum alloy The conductive adhesive according to any one of [1] to [4] above.
[6] A resin substrate having a conductive portion and a semiconductor element having an electrode portion,
A semiconductor device in which a conductive part of a resin substrate and an electrode part of a semiconductor element are bonded with a cured product of the conductive adhesive according to any one of [1] to [5].
[7] The semiconductor device according to [6], wherein the conductive portion of the resin substrate is nickel, aluminum, copper, or tin.
[8] A lid that is an electromagnetic wave shielding material for an IC chip, and a resin substrate on which a metal electrode for grounding is formed,
A semiconductor device comprising a cured product of the conductive adhesive according to any one of [1] to [5], wherein a lid is bonded to a metal electrode and / or a resin substrate.
[9] The semiconductor device according to [8] above, wherein the lid has nickel, aluminum, copper, or tin at least on the surface thereof.
本発明〔1〕によれば、硬化後に低い接続抵抗値が得られ、かつ、金属とも樹脂とも接着強度が高い、導電性接着剤を提供することができる。 According to the present invention [1], it is possible to provide a conductive adhesive having a low connection resistance value after curing, and having a high adhesive strength for both metal and resin.
本発明〔6〕によれば、半導体素子の電極部と樹脂基板の導電部との間の接続抵抗値が小さく、かつ金属とも樹脂とも接着強度が高い導電性接着剤により、高信頼性の半導体装置を得ることができる。本発明〔8〕によれば、リッドと樹脂基板との間の接続抵抗値が小さく、かつ金属とも樹脂とも接着強度が高い導電性接着剤により、高信頼性の半導体装置を得ることができる。 According to the present invention [6], a highly reliable semiconductor can be obtained by a conductive adhesive having a small connection resistance value between the electrode portion of the semiconductor element and the conductive portion of the resin substrate and having high adhesive strength for both the metal and the resin. A device can be obtained. According to the present invention [8], a highly reliable semiconductor device can be obtained by using a conductive adhesive having a low connection resistance value between the lid and the resin substrate and having a high adhesive strength for both the metal and the resin.
本発明の導電性接着剤は、
(A)エポキシ樹脂、
(B)フェノール系硬化剤および/またはアミン系硬化剤、
(C)モルホリン類還元剤および/または8−キノリノール、
(D)導電性充填剤、ならびに
(E)酸基およびアミノ基を含む添加剤
を含有する。
The conductive adhesive of the present invention is
(A) epoxy resin,
(B) a phenolic curing agent and / or an amine curing agent,
(C) a morpholine reducing agent and / or 8-quinolinol,
(D) A conductive filler and (E) an additive containing an acid group and an amino group are contained.
(A)成分は、導電性接着剤に、接着性、硬化性を付与し、硬化後の導電性接着剤に、耐久性、耐熱性を付与する。(A)成分としては、液状ビスフェノールA型エポキシ樹脂、液状ビスフェノールF型エポキシ樹脂、液状ナフタレン型エポキシ樹脂、液状アミノフェノール型エポキシ樹脂、液状水添ビスフェノール型エポキシ樹脂、液状脂環式エポキシ樹脂、液状アルコールエーテル型エポキシ樹脂、液状環状脂肪族型エポキシ樹脂、液状フルオレン型エポキシ樹脂、液状シロキサン系エポキシ樹脂等が挙げられ、液状ビスフェノールA型エポキシ樹脂、液状ビスフェノールF型エポキシ樹脂、液状ナフタレン型エポキシ樹脂が、接着性、硬化性、耐久性、耐熱性の観点から好ましい。また、エポキシ当量は、粘度調整の観点から、80〜250g/eqが好ましい。市販品としては、新日鉄住金化学製ビスフェノールF型エポキシ樹脂(品名:YDF8170)、DIC製ビスフェノールA型エポキシ樹脂(品名:EXA−850CRP)、新日鉄住金化学製ビスフェノールF型エポキシ樹脂(品名:YDF870GS)、DIC製ビスフェノールA型/ビスフェノールF型混合型エポキシ樹脂(品名:EXA835LV)、DIC製ナフタレン型エポキシ樹脂(品名:HP4032D)、三菱化学製アミノフェノール型エポキシ樹脂(グレード:JER630、JER630LSD)、モメンティブ・パフォーマンス製シロキサン系エポキシ樹脂(品名:TSL9906)、新日鉄住金化学製1,4−シクロヘキサンジメタノールジグリシジルエーテル(品名:ZX1658GS)等が挙げられる。(A)成分は、単独でも2種以上を併用してもよい。 The component (A) imparts adhesiveness and curability to the conductive adhesive, and imparts durability and heat resistance to the cured conductive adhesive. As component (A), liquid bisphenol A type epoxy resin, liquid bisphenol F type epoxy resin, liquid naphthalene type epoxy resin, liquid aminophenol type epoxy resin, liquid hydrogenated bisphenol type epoxy resin, liquid alicyclic epoxy resin, liquid Examples include alcohol ether type epoxy resin, liquid cycloaliphatic type epoxy resin, liquid fluorene type epoxy resin, liquid siloxane type epoxy resin, etc., liquid bisphenol A type epoxy resin, liquid bisphenol F type epoxy resin, liquid naphthalene type epoxy resin From the viewpoints of adhesiveness, curability, durability, and heat resistance. The epoxy equivalent is preferably 80 to 250 g / eq from the viewpoint of adjusting the viscosity. As commercial products, bisphenol F type epoxy resin (product name: YDF8170) manufactured by Nippon Steel & Sumikin Chemical Co., Ltd., bisphenol A type epoxy resin (product name: EXA-850CRP) manufactured by DIC, bisphenol F type epoxy resin (product name: YDF870GS) manufactured by Nippon Steel & Sumikin Chemical Co., Ltd., DIC bisphenol A type / bisphenol F type mixed epoxy resin (product name: EXA835LV), DIC naphthalene type epoxy resin (product name: HP4032D), Mitsubishi Chemical aminophenol type epoxy resin (grade: JER630, JER630LSD), Momentive Performance Examples thereof include siloxane-based epoxy resins (product name: TSL9906), 1,4-cyclohexanedimethanol diglycidyl ether (product name: ZX1658GS) manufactured by Nippon Steel & Sumikin Chemical. (A) A component may be individual or may use 2 or more types together.
(B)成分は、導電性接着剤を硬化させる。(B)成分のフェノール系硬化剤としては、フェノールノボラック、クレゾールノボラック等が挙げられ、フェノールノボラックが好ましい。フェノール系硬化剤は、アミン系硬化剤に比べて、硬化後の導電性接着剤を低抵抗化することができる。また、フェノール系硬化剤は、アミン系硬化剤より、反応性が低いので、導電性接着剤のポットライフを長くすることができる。(B)成分のうちの80%以上がフェノール系硬化剤であれば、これらの効果を得られる。 The component (B) cures the conductive adhesive. (B) As a phenol type hardening | curing agent of a component, a phenol novolak, a cresol novolak, etc. are mentioned, A phenol novolak is preferable. The phenol-based curing agent can reduce the resistance of the conductive adhesive after curing as compared with the amine-based curing agent. In addition, the phenolic curing agent is less reactive than the amine curing agent, so that the pot life of the conductive adhesive can be lengthened. If 80% or more of the component (B) is a phenolic curing agent, these effects can be obtained.
(B)成分のアミン系硬化剤としては、エポキシ基と付加反応しうる活性水素を分子内に1個以上有するものであればよく、特に限定されない。アミン系硬化剤としては、ジシアンジアミド、ジエチレントリアミン、トリエチレンテトラミン、n−プロピルアミン、2−ヒドロキシエチルアミノプロピルアミン、シクロヘキシルアミン、4,4'−ジアミノ−ジシクロヘキシルメタン等の脂肪族アミン化合物;4,4'−ジアミノジフェニルメタン、2−メチルアニリン等の芳香族アミン化合物;イミダゾール、2−メチルイミダゾール、2−エチルイミダゾール、2−イソプロピルイミダゾール等のイミダゾール化合物;イミダゾリン、2−メチルイミダゾリン、2−エチルイミダゾリン等のイミダゾリン化合物等が挙げられる。 The amine-based curing agent as the component (B) is not particularly limited as long as it has at least one active hydrogen capable of addition reaction with an epoxy group in the molecule. Examples of amine-based curing agents include aliphatic amine compounds such as dicyandiamide, diethylenetriamine, triethylenetetramine, n-propylamine, 2-hydroxyethylaminopropylamine, cyclohexylamine, and 4,4′-diamino-dicyclohexylmethane; Aromatic amine compounds such as' -diaminodiphenylmethane, 2-methylaniline; imidazole compounds such as imidazole, 2-methylimidazole, 2-ethylimidazole, 2-isopropylimidazole; imidazoline, 2-methylimidazoline, 2-ethylimidazoline, etc. Examples include imidazoline compounds.
(B)成分の市販品としては、群栄化学製アリルフェノールタイプフェノール樹脂(品名:XPL−4437E)、明和化成製フェノール硬化剤(品名:MEH8000、MEH8005)、ADEKA製硬化剤(品名:EH−3842)等が挙げられるが、(B)成分は、これら品名に限定されるものではない。(B)成分は、単独でも2種以上を併用してもよい。 Commercially available products of component (B) include Gunei Chemical's allylphenol type phenolic resin (product name: XPL-4437E), Meiwa Kasei's phenol curing agent (product names: MEH8000, MEH8005), and ADEKA curing agent (product name: EH-). 3842) and the like, but the component (B) is not limited to these product names. (B) A component may be individual or may use 2 or more types together.
(C)成分は、(D)成分の表面の酸化膜を除去し、硬化後の導電性接着剤の接続抵抗値を低下させる役割を果たす。なお、(C)成分は、塩基性であるため、(A)成分の硬化剤である(B)成分も塩基性である。(C)成分としては、モルホリン類還元剤が、8−キノリノールより還元力が強く、硬化後の導電性接着剤を低抵抗にすることができ、好ましい。また、導電性接着剤のボイド発生を抑制できる観点からも、モルホリン類還元剤が好ましい。(C)成分の還元剤に使用されるモルホリン類とは、モルホリン、およびモルホリン構造を持つ化合物をいう。(C)成分は、硬化後の導電性接着剤の接続抵抗値を低下させることができる。(C)成分としては、モルホリン、2,6−ジメチルモルホリン、4−(3−ヒドロキシプロピル)モルホリン、4−メチルモルホリン、4−(4−アミノフェニル)モルホリン、チオモルホリン、1,1−ジオキソチオモルホリン等が挙げられる。 The component (C) serves to remove the oxide film on the surface of the component (D) and reduce the connection resistance value of the conductive adhesive after curing. In addition, since (C) component is basic, (B) component which is a hardening | curing agent of (A) component is also basic. As the component (C), a morpholine reducing agent is preferable because it has a reducing power stronger than 8-quinolinol, and can reduce the resistance of the conductive adhesive after curing. Moreover, a morpholine reducing agent is preferable from the viewpoint of suppressing generation of voids in the conductive adhesive. The morpholines used for the reducing agent of component (C) refer to morpholine and compounds having a morpholine structure. (C) component can reduce the connection resistance value of the conductive adhesive after hardening. As the component (C), morpholine, 2,6-dimethylmorpholine, 4- (3-hydroxypropyl) morpholine, 4-methylmorpholine, 4- (4-aminophenyl) morpholine, thiomorpholine, 1,1-dioxo Examples include thiomorpholine.
(C)成分としては、下記の化学式(1)〜(7)で表されるモルホリン類からなる群より選択される少なくとも1種であると、接続抵抗値を低下させることができ、好ましい。
化学式(1)で表されるモルホリン:
The component (C) is preferably at least one selected from the group consisting of morpholines represented by the following chemical formulas (1) to (7) because the connection resistance value can be reduced.
Morpholine represented by chemical formula (1):
化学式(2)で表される2,6−ジメチルモルホリン: 2,6-dimethylmorpholine represented by the chemical formula (2):
化学式(3)で表される4−(3−ヒドロキシプロピル)モルホリン: 4- (3-hydroxypropyl) morpholine represented by the chemical formula (3):
化学式(4)で表される4−メチルモルホリン: 4-methylmorpholine represented by chemical formula (4):
化学式(5)で表される4−(4−アミノフェニル)モルホリン: 4- (4-aminophenyl) morpholine represented by the chemical formula (5):
化学式(6)で表されるチオモルホリン: Thiomorpholine represented by the chemical formula (6):
化学式(7)で表される1,1−ジオキソチオモルホリン(チオモルホリン1,1−ジオキシド): 1,1-dioxothiomorpholine (thiomorpholine 1,1-dioxide) represented by chemical formula (7):
(C)成分は、例えば、和光純薬工業、日本乳化剤、東京化成工業から市販されている試薬を使用すればよい。(C)成分は、単独でも2種以上を併用してもよい。 As the component (C), for example, a reagent commercially available from Wako Pure Chemical Industries, Nippon Emulsifier, Tokyo Chemical Industry may be used. (C) A component may be individual or may use 2 or more types together.
(D)成分の導電性充填剤は、特に限定する必要はなく、(D)成分としては、銀、ニッケル、銅、金、パラジウム、白金、ビスマス、錫、これらの合金(特に、ビスマス‐錫合金)、炭素繊維、グラファイト、カーボンブラック、アルミニウム、インジウム錫酸化物、銀被覆銅、銀被覆アルミニウム、金属被覆ガラス球、銀被覆繊維、銀被覆樹脂、アンチモンドープ錫酸化錫、およびこれらの混合物が挙げられる。(D)成分が、銀、ニッケル、銅、錫、アルミニウム、銀合金、ニッケル合金、銅合金、錫合金およびアルミニウム合金からなる群から選択される少なくとも1種の金属または合金を含む粉末であると、接続抵抗値の上昇を抑えられるという、本発明の効果を発揮しやすく、好ましい。また、樹脂基板の導電部が、ニッケル、アルミニウム、銅または錫のように腐蝕されやすい金属の場合には、(C)成分が樹脂基板の導電部の腐蝕防止剤としても作用するため、(D)成分として、金、パラジウム、白金等、バルク抵抗の小さな金属を用いると、接続抵抗値を小さくでき、好ましい。(D)成分の平均粒径は、0.1〜50μmであると、作業性及び低粘度化の観点から、より好ましい。ここで、(D)成分の平均粒径は、レーザー回折法によって測定した体積基準のメジアン径である。また、(D)成分の形状は、リン片状であると、低抵抗化の観点から、より好ましい。市販品としては、DOWAエレクトロニクス製銀粉末(品名:FA618)、三井金属鉱業製銀粉末(品名:SL02)が挙げられる。(D)成分は、単独でも2種以上を併用してもよい。 The conductive filler of the component (D) is not particularly limited. Examples of the component (D) include silver, nickel, copper, gold, palladium, platinum, bismuth, tin, and alloys thereof (particularly bismuth-tin). Alloy), carbon fiber, graphite, carbon black, aluminum, indium tin oxide, silver-coated copper, silver-coated aluminum, metal-coated glass sphere, silver-coated fiber, silver-coated resin, antimony-doped tin oxide, and mixtures thereof Can be mentioned. The component (D) is a powder containing at least one metal or alloy selected from the group consisting of silver, nickel, copper, tin, aluminum, silver alloy, nickel alloy, copper alloy, tin alloy, and aluminum alloy. The effect of the present invention that suppresses an increase in the connection resistance value is easily exhibited, which is preferable. When the conductive portion of the resin substrate is a metal that is easily corroded, such as nickel, aluminum, copper, or tin, the component (C) also acts as a corrosion inhibitor for the conductive portion of the resin substrate. It is preferable to use a metal having a small bulk resistance, such as gold, palladium, or platinum, as the component, because the connection resistance value can be reduced. (D) The average particle diameter of a component is 0.1-50 micrometers from a viewpoint of workability | operativity and viscosity reduction, and is more preferable. Here, the average particle diameter of the component (D) is a volume-based median diameter measured by a laser diffraction method. In addition, the shape of the component (D) is more preferably a flake shape from the viewpoint of reducing resistance. Commercially available products include DOWA electronics silver powder (product name: FA618) and Mitsui Mining & Smelting silver powder (product name: SL02). (D) A component may be individual or may use 2 or more types together.
(E)成分の酸基およびアミノ基を含む添加剤中の酸基は、樹脂に対する接着力を向上させることができ、アミノ基は金属に対する接着力を向上させることができる。(E)成分としては、酸基およびアミノ基を1分子中に含む添加剤、酸基を含む分子とアミノ基を含む分子の混合物のいずれも使用することができるが、導電性接着剤の経時安定性の観点から、酸基およびアミノ基を1分子中に含む添加剤が、好ましい。ここで、酸基およびアミノ基を1分子中に含む添加剤は、低揮発性の観点から、高分子であると、より好ましい。ここで、酸基およびアミノ基を1分子中に含む高分子添加剤において、酸基とアミノ基の高分子本体への結合位置は、特に限定されず、主鎖であってもよく、側鎖であってもよく、主鎖および側鎖に位置していてもよい。酸基とアミノ基は、高分子本体へ直接結合してもよく、連結基を介して結合してもよい。連結基としては、エチレン基〜オクチレン基などの低級アルキレン基、フェニレン基、鎖中にエーテル結合を有する低中級アルキレン基、鎖中にカルボン酸エステル結合を有する低中級アルキレン基、鎖中にカルボン酸アミド結合を有する低中級アルキレン基等が挙げられる。低級アルキレン基の炭素原子数は1〜8が好ましく、鎖中にエーテル結合などを有する低中級アルキレン基の合計炭素原子数は2〜12が好ましい。酸基およびアミノ基を1分子中に含む高分子添加剤の重量平均分子量は、2,000〜150,000の範囲であると好ましく、3,000〜100,000の範囲であると、より好ましい。ここで、重量平均分子量(Mw)は、ゲルパーミエーションクロマトグラフィー(キャリア:テトラヒドロフラン)によって測定されるポリスチレン換算重量平均分子量である。酸基およびアミノ基を1分子中に含む添加剤は、合成品を用いてもよく、市販品を用いてもよい。 The acid group in the additive containing the acid group and amino group of the component (E) can improve the adhesion to the resin, and the amino group can improve the adhesion to the metal. As the component (E), any of an additive containing an acid group and an amino group in one molecule and a mixture of a molecule containing an acid group and a molecule containing an amino group can be used. From the viewpoint of stability, an additive containing an acid group and an amino group in one molecule is preferable. Here, the additive containing an acid group and an amino group in one molecule is more preferably a polymer from the viewpoint of low volatility. Here, in the polymer additive containing an acid group and an amino group in one molecule, the bonding position of the acid group and amino group to the polymer main body is not particularly limited, and may be a main chain or a side chain. It may be located in the main chain and the side chain. The acid group and amino group may be directly bonded to the polymer main body or may be bonded via a linking group. Examples of the linking group include lower alkylene groups such as ethylene group to octylene group, phenylene group, low intermediate alkylene group having an ether bond in the chain, low intermediate alkylene group having a carboxylic ester bond in the chain, and a carboxylic acid in the chain. And low intermediate alkylene groups having an amide bond. The lower alkylene group preferably has 1 to 8 carbon atoms, and the lower intermediate alkylene group having an ether bond in the chain preferably has 2 to 12 carbon atoms in total. The weight average molecular weight of the polymer additive containing an acid group and an amino group in one molecule is preferably in the range of 2,000 to 150,000, and more preferably in the range of 3,000 to 100,000. . Here, the weight average molecular weight (Mw) is a polystyrene equivalent weight average molecular weight measured by gel permeation chromatography (carrier: tetrahydrofuran). As the additive containing an acid group and an amino group in one molecule, a synthetic product or a commercially available product may be used.
(E)成分の酸価、アミン価は、金属、樹脂への接着性の観点から、それぞれ20〜200mgKOH/gである、と好ましく、50〜100mgKOH/gであるとより好ましい。(E)成分の酸価、アミン価が、20mgKOH/g未満の場合には、金属や樹脂との接着強度が十分でなくなり易くなり、200mgKOH/gを超えると、増粘し易くなる場合がある。ここで、酸価とは、(E)成分1g中に含有する遊離脂肪酸,樹脂酸などを中和するのに必要とする水酸化カリウムのmgを表し、JIS K0070に準じ、水酸化カリウムエタノール溶液を使用する電位差滴定法によって求める。アミン価は、(E)成分1g中のアミン価を表し、0.1Nの塩酸水溶液を用い、電位差滴定法によって求めた値を、水酸化カリウムの当量に換算する。 The acid value and amine value of the component (E) are each preferably 20 to 200 mgKOH / g, more preferably 50 to 100 mgKOH / g, from the viewpoint of adhesion to metals and resins. When the acid value and amine value of the component (E) are less than 20 mgKOH / g, the adhesive strength with a metal or resin tends to be insufficient, and when it exceeds 200 mgKOH / g, the viscosity tends to increase. . Here, the acid value represents mg of potassium hydroxide required to neutralize free fatty acid, resin acid and the like contained in 1 g of component (E), and a potassium hydroxide ethanol solution according to JIS K0070. Determined by potentiometric titration using The amine value represents the amine value in 1 g of component (E), and a value obtained by potentiometric titration using a 0.1N hydrochloric acid aqueous solution is converted to an equivalent of potassium hydroxide.
酸基およびアミノ基を1分子中に含む添加剤の市販品としては、ビックケミー製高分子添加剤(品名:BYK−106(酸価:132mgKOH/g、アミン価:74mgKOH/g)、BYK−130(酸価:2mgKOH/g、アミン価:190mgKOH/g)、BYK−140(酸価:73mgKOH/g、アミン価:76mgKOH/g)、BYK−142(酸価:46mgKOH/g、アミン価:43mgKOH/g)、BYK−145(酸価:76mgKOH/g、アミン価:71mgKOH/g)、BYK−180(酸価:94mgKOH/g、アミン価:94mgKOH/g)、BYK−187(酸価:35mgKOH/g、アミン価:35mgKOH/g)、BYK−191(酸価:30mgKOH/g、アミン価:20mgKOH/g)、BYK−2001(酸価:19mgKOH/g、アミン価:29mgKOH/g)、BYK−2010(酸価:20mgKOH/g、アミン価:20mgKOH/g)、BYK−2020(酸価:37mgKOH/g、アミン価:36mgKOH/g)、BYK−2020N(酸価:36mgKOH/g、アミン価:36mgKOH/g)、BYK−2025(酸価:38mgKOH/g、アミン価:37mgKOH/g)BYK−9076(酸価:38mgKOH/g、アミン価:44mgKOH/g)、ANTI−TERRA−U(酸価:24mgKOH/g、アミン価:19mgKOH/g))ルーブリゾール製高分子添加剤(品名:SOLSPERSE24000(酸価:24mgKOH/g、アミン価:47mgKOH/g),SOLSPERSE32000(酸価:15mgKOH/g、アミン価:180mgKOH/g))、楠本化成製高分子添加剤(品名:ディスパロンDA−234(酸価:16mgKOH/g、アミン価:20mgKOH/g)、ディスパロンDA−325(酸価:14mgKOH/g、アミン価:20mgKOH/g)、味の素ファインテクノ製高分子添加剤(品名:アジスパーPB−821(酸価:17mgKOH/g、アミン価:10mgKOH/g)、アジスパーPB−822(酸価:14mgKOH/g、アミン価:17mgKOH/g)、アジスパーPB−881(酸価:17mgKOH/g、アミン価:17mgKOH/g))等が挙げられる。(E)成分は、ポットライフと作業性の観点から、ビックケミー製高分子添加剤(品名:BYK−140、BYK−180が好ましく、揮発成分の含有量が少ないという観点からBYK−180がより好ましい。酸基を含む分子とアミノ基を含む分子の混合物の場合には、酸基を含む分子の市販品としては、オレイン酸が挙げられ、アミノ基を含む分子の市販品としては、ビックケミー製高分子添加剤(品名:BYK−116(酸価:0mgKOH/g、アミン価:76mgKOH/g)が挙げられる。(E)成分は、これら品名に限定されるものではない。(E)成分は、単独でも2種以上を併用してもよい。 As a commercial product of an additive containing an acid group and an amino group in one molecule, a polymer additive manufactured by Big Chemie (Product name: BYK-106 (acid value: 132 mgKOH / g, amine value: 74 mgKOH / g), BYK-130 (Acid value: 2 mgKOH / g, amine value: 190 mgKOH / g), BYK-140 (acid value: 73 mgKOH / g, amine value: 76 mgKOH / g), BYK-142 (acid value: 46 mgKOH / g, amine value: 43 mgKOH) / G), BYK-145 (acid value: 76 mgKOH / g, amine value: 71 mgKOH / g), BYK-180 (acid value: 94 mgKOH / g, amine value: 94 mgKOH / g), BYK-187 (acid value: 35 mgKOH) / G, amine value: 35 mgKOH / g), BYK-191 (acid value: 30 mgKOH / g, amine value: 2) mgKOH / g), BYK-2001 (acid value: 19 mgKOH / g, amine value: 29 mgKOH / g), BYK-2010 (acid value: 20 mgKOH / g, amine value: 20 mgKOH / g), BYK-2020 (acid value: 37 mgKOH / g, amine value: 36 mgKOH / g), BYK-2020N (acid value: 36 mgKOH / g, amine value: 36 mgKOH / g), BYK-2025 (acid value: 38 mgKOH / g, amine value: 37 mgKOH / g) BYK -9076 (acid value: 38 mg KOH / g, amine value: 44 mg KOH / g), ANTI-TERRA-U (acid value: 24 mg KOH / g, amine value: 19 mg KOH / g)) Lubrizol polymer additive (product name: SOLPERSE24000) (Acid value: 24 mg KOH / g, amine value: 47 gKOH / g), SOLPERSE 32000 (acid value: 15 mgKOH / g, amine value: 180 mgKOH / g)), Enomoto Kasei Polymer Additive (Product name: Disparon DA-234 (acid value: 16 mgKOH / g, amine value: 20 mgKOH / g), Disparon DA-325 (acid value: 14 mg KOH / g, amine value: 20 mg KOH / g), Ajinomoto Fine-Techno polymer additive (product name: Ajisper PB-821 (acid value: 17 mg KOH / g, amine value: 10 mg KOH) / G), Azisper PB-822 (acid value: 14 mg KOH / g, amine value: 17 mg KOH / g), Azisper PB-881 (acid value: 17 mg KOH / g, amine value: 17 mg KOH / g)) and the like. E) Ingredients are big chemi from the viewpoint of pot life and workability -Polymer additives (Product names: BYK-140 and BYK-180 are preferred, and BYK-180 is more preferred from the viewpoint of low content of volatile components. In the case of a mixture of a molecule containing an acid group and a molecule containing an amino group, an example of a commercially available molecule containing an acid group is oleic acid, and an example of a commercially available molecule containing an amino group is a polymer manufactured by BYK Chemie. Additives (Product name: BYK-116 (acid value: 0 mg KOH / g, amine value: 76 mg KOH / g) are included. (E) Component is not limited to these product names. However, you may use 2 or more types together.
(A)成分は、(A)〜(E)成分の合計100質量部に対して、6〜24質量部であると好ましく、8〜21質量部であると、より好ましい。 (A) A component is preferable in it being 6-24 mass parts with respect to a total of 100 mass parts of (A)-(E) component, and more preferable in it being 8-21 mass parts.
(B)成分は、良好な反応性、信頼性の観点から、(A)〜(E)成分の合計100質量部に対して、1〜10質量部であると好ましく、1〜5質量部であると、より好ましい。 The component (B) is preferably 1 to 10 parts by mass, and 1 to 5 parts by mass with respect to 100 parts by mass in total of the components (A) to (E), from the viewpoint of good reactivity and reliability. More preferably.
(C)成分は、(A)〜(E)成分の合計100質量部に対して、0.05〜1.00質量部であると好ましく、0.1〜1.00質量部であると、より好ましい。(C)成分が、導電性接着剤100質量部に対して、0.05質量部未満であると、接続抵抗値が増加しやすくなり、一方、1.00質量部を超えると、導電性接着剤のポットライフが短くなり易くなる。 (C) It is preferable that it is 0.05-1.00 mass part with respect to a total of 100 mass parts of (A)-(E) component, and is 0.1-1.00 mass part, More preferred. When the component (C) is less than 0.05 parts by mass with respect to 100 parts by mass of the conductive adhesive, the connection resistance value is likely to increase. The pot life of the agent tends to be shortened.
また、(C)成分は、導電性接着剤の硬化物の場合も、(A)〜(E)成分の合計100質量部に対して、0.05〜1.00質量部であると好ましく、0.1〜1.00質量部であると、より好ましい。ここで、導電性接着剤が溶剤を含有しない場合(導電性接着剤から溶剤を揮発させた場合も含む)には、硬化時の質量減少が1%未満と少ないため、硬化物中での好ましい(C)成分の含有量は、硬化前の(A)〜(E)成分中での含有量と同様である。ここで、(C)成分の定量分析は、イオンクロマトグラフ−質量分析装置で行う。なお、導電性接着剤が溶剤を含有する場合の導電性接着剤の硬化時の質量減少は、例えば、3〜5質量%である。 In addition, the component (C) is preferably 0.05 to 1.00 parts by mass with respect to 100 parts by mass in total of the components (A) to (E) also in the case of the cured product of the conductive adhesive. It is more preferable in it being 0.1-1.00 mass part. Here, when the conductive adhesive does not contain a solvent (including the case where the solvent is volatilized from the conductive adhesive), the mass loss upon curing is less than 1%, which is preferable in the cured product. The content of the component (C) is the same as the content in the components (A) to (E) before curing. Here, the quantitative analysis of the component (C) is performed by an ion chromatograph-mass spectrometer. In addition, the mass reduction | decrease at the time of hardening of a conductive adhesive in case a conductive adhesive contains a solvent is 3-5 mass%, for example.
(D)成分は、導電性接着剤自体の電気抵抗値の観点から、19〜47体積%であることが好ましく、22〜38体積%であることがより好ましい。なお、体積%を質量部へと換算すると、(D)成分として銀を使用する場合には、(D)成分は、(A)〜(E)成分の合計100質量部に対して、70〜90質量部であると好ましく、74〜86質量部であると、より好ましい。 (D) It is preferable that it is 19-47 volume% from a viewpoint of the electrical resistance value of conductive adhesive itself, and, as for (D) component, it is more preferable that it is 22-38 volume%. In addition, when volume% is converted into a mass part, when using silver as (D) component, (D) component is 70- with respect to a total of 100 mass parts of (A)-(E) component. 90 parts by mass is preferable, and 74 to 86 parts by mass is more preferable.
また、(D)成分は、導電性接着剤の硬化物の場合も、19〜47体積%であることが好ましく、22〜38体積%であることがより好ましい。なお、体積%を質量部へと換算すると、(D)成分として銀を使用する場合には、(D)成分は、(A)〜(E)成分の合計100質量部に対して、70〜90質量部であると好ましく、74〜86質量部であると、より好ましい。ここで、(D)成分の定量分析は、質量分析法で行う。 In addition, the component (D) is preferably 19 to 47% by volume, and more preferably 22 to 38% by volume in the case of a cured product of the conductive adhesive. In addition, when volume% is converted into a mass part, when using silver as (D) component, (D) component is 70- with respect to a total of 100 mass parts of (A)-(E) component. 90 parts by mass is preferable, and 74 to 86 parts by mass is more preferable. Here, the quantitative analysis of the component (D) is performed by mass spectrometry.
(E)成分は、(A)〜(E)成分の合計100質量部に対して、好ましくは0.05〜5質量部、より好ましくは0.1〜0.8質量部含有される。0.05質量部以上であると、接着強度が高くなり、5質量部以下であると、導電性接着剤の硬化時の架橋阻害が抑制される。 The component (E) is preferably contained in an amount of 0.05 to 5 parts by mass, more preferably 0.1 to 0.8 parts by mass with respect to a total of 100 parts by mass of the components (A) to (E). Adhesive strength becomes it high that it is 0.05 mass part or more, and the bridge | crosslinking inhibition at the time of hardening of a conductive adhesive is suppressed as it is 5 mass parts or less.
本発明の導電性接着剤は、さらに、硬化促進の観点から、(F)成分として、硬化促進剤を含有させることができる。硬化促進剤としては、イミダゾール化合物であることが好ましく、イミダゾール化合物としては、2−メチルイミダゾール、2−ウンデシルイミダゾール、2−ヘプタデシルイミダゾール、2−エチル−4−メチルイミダゾール、2−フェニルイミダゾール、2−フェニル−4−メチルイミダゾール、2,4−ジアミノ−6−[2’−メチルイミダゾリル−(1’)]エチル−s−トリアジン、2−フェニル−4,5−ジヒドロキシメチルイミダゾール、2−フェニル−4−メチル−5−ヒドロキシメチルイミダゾール、2,3−ジヒドロ−1H−ピロロ[1,2−a]ベンズイミダゾール等を挙げることができ、2−フェニル−4,5−ジヒドロキシメチルイミダゾールが、硬化速度、作業性の観点から好ましい。 The conductive adhesive of the present invention can further contain a curing accelerator as the component (F) from the viewpoint of acceleration of curing. The curing accelerator is preferably an imidazole compound. Examples of the imidazole compound include 2-methylimidazole, 2-undecylimidazole, 2-heptadecylimidazole, 2-ethyl-4-methylimidazole, 2-phenylimidazole, 2-phenyl-4-methylimidazole, 2,4-diamino-6- [2′-methylimidazolyl- (1 ′)] ethyl-s-triazine, 2-phenyl-4,5-dihydroxymethylimidazole, 2-phenyl -4-methyl-5-hydroxymethylimidazole, 2,3-dihydro-1H-pyrrolo [1,2-a] benzimidazole and the like can be mentioned, and 2-phenyl-4,5-dihydroxymethylimidazole is cured. It is preferable from the viewpoint of speed and workability.
本発明の導電性接着剤には、本発明の目的を損なわない範囲で、更に必要に応じ、レベリング剤、着色剤、イオントラップ剤、消泡剤、難燃剤等を配合することができる。 In the conductive adhesive of the present invention, a leveling agent, a colorant, an ion trapping agent, an antifoaming agent, a flame retardant, and the like can be further blended as necessary without departing from the object of the present invention.
本発明の導電性接着剤は、例えば、(A)成分〜(E)成分およびその他成分を同時にまたは別々に、必要により加熱処理を加えながら、撹拌、溶融、混合、分散させることにより得ることができる。これらの混合、撹拌、分散等の装置としては、特に限定されるものではないが、撹拌、加熱装置を備えたライカイ機、3本ロールミル、ボールミル、プラネタリーミキサー、ビーズミル等を使用することができる。また、これら装置を適宜組み合わせて使用してもよい。 The conductive adhesive of the present invention can be obtained, for example, by stirring, melting, mixing, and dispersing the components (A) to (E) and other components simultaneously or separately, with heat treatment as necessary. it can. The mixing, stirring, dispersing and the like devices are not particularly limited, and a raikai machine equipped with a stirring and heating device, a three-roll mill, a ball mill, a planetary mixer, a bead mill and the like can be used. . Moreover, you may use combining these apparatuses suitably.
本発明の導電性接着剤は、ディスペンサー、印刷等で、樹脂基板の導電部や、半導体素子の電極部等の電子部品の所望の位置に形成・塗布される。 The conductive adhesive of the present invention is formed and applied to a desired position of an electronic component such as a conductive portion of a resin substrate or an electrode portion of a semiconductor element by a dispenser, printing or the like.
本発明の導電性接着剤の硬化は、120〜200℃が好ましい。 As for hardening of the conductive adhesive of this invention, 120-200 degreeC is preferable.
本発明の導電性接着剤は、半導体素子の電極部と樹脂基板の導電部等の電子部品用接着剤として適している。 The conductive adhesive of the present invention is suitable as an adhesive for electronic parts such as an electrode part of a semiconductor element and a conductive part of a resin substrate.
〔半導体装置〕
本発明の半導体装置は、導電部を有する樹脂基板と、電極部を有する半導体素子とを含み、上記導電性接着剤の硬化物で、樹脂基板の導電部と半導体素子の電極部とが接続される。
[Semiconductor device]
The semiconductor device of the present invention includes a resin substrate having a conductive portion and a semiconductor element having an electrode portion, and the conductive portion of the resin substrate and the electrode portion of the semiconductor element are connected by a cured product of the conductive adhesive. The
この半導体装置は、樹脂基板の導電部がニッケル、アルミニウム、銅または錫であると、上記導電性接着剤の効果を発揮しやすい観点から、好ましい。ニッケル、アルミニウム、銅または錫は、既知の技術では、金属の腐蝕によって界面抵抗値の上昇を招きやすいためである。樹脂基板の導電部としては、錫メッキ電極、Niメッキ電極等が挙げられる。樹脂基板に限定はなく、FR−4基板、ガラスエポキシ基板等が挙げられる。半導体の電極部としては、錫メッキ電極、Niメッキ電極、金メッキ電極、銀メッキ電極等が挙げられる。 In this semiconductor device, the conductive portion of the resin substrate is preferably nickel, aluminum, copper, or tin from the viewpoint of easily exerting the effect of the conductive adhesive. This is because nickel, aluminum, copper, or tin is likely to cause an increase in the interface resistance value due to corrosion of the metal in the known technique. Examples of the conductive portion of the resin substrate include a tin plating electrode and a Ni plating electrode. The resin substrate is not limited, and examples thereof include an FR-4 substrate and a glass epoxy substrate. Examples of the semiconductor electrode portion include a tin plating electrode, a Ni plating electrode, a gold plating electrode, and a silver plating electrode.
また、もう一つの本発明の半導体装置は、ICチップの電磁波シールド材であるLID(蓋)と、アース用の金属電極が形成された樹脂基板とを含み、上記導電性接着剤の硬化物で、LID(蓋)と、金属電極および/または樹脂基板とが、接着される。樹脂基板に限定はなく、FR−4基板、ガラスエポキシ基板等が挙げられる。リッドにも限定はなく、少なくともその表面にニッケル、アルミニウム、銅または錫を有するリッド等が挙げられる。このようなリッドは、銅のような熱伝導性の高い金属にメッキを被覆して形成できる。金属電極は、樹脂基板の導電部と同様である。 Another semiconductor device of the present invention includes an LID (lid) which is an electromagnetic wave shielding material for an IC chip, and a resin substrate on which a metal electrode for grounding is formed, and is a cured product of the conductive adhesive. , The LID (lid) and the metal electrode and / or the resin substrate are bonded. The resin substrate is not limited, and examples thereof include an FR-4 substrate and a glass epoxy substrate. The lid is not limited, and examples thereof include a lid having nickel, aluminum, copper, or tin on at least its surface. Such a lid can be formed by coating a metal with high thermal conductivity such as copper. The metal electrode is the same as the conductive part of the resin substrate.
本発明の半導体装置は、半導体素子の電極部と樹脂基板の導電部との間の接続抵抗値が小さく、高信頼性である。 The semiconductor device of the present invention has a small connection resistance value between the electrode portion of the semiconductor element and the conductive portion of the resin substrate, and is highly reliable.
本発明について、実施例により説明するが、本発明はこれらに限定されるものではない。なお、以下の実施例において、部、%はことわりのない限り、質量部、質量%を示す。 The present invention will be described with reference to examples, but the present invention is not limited thereto. In the following examples, parts and% indicate parts by mass and mass% unless otherwise specified.
〔評価用サンプルの作製〕
表1〜表3に示す割合で、(C)成分以外をハイブリッドミキサーで分散させた。なお、実施例19では、BYK−116とオレイン酸を、それぞれ0.21質量部加えた。
[Preparation of sample for evaluation]
Components other than the component (C) were dispersed by a hybrid mixer at the ratios shown in Tables 1 to 3. In Example 19, 0.21 parts by mass of BYK-116 and oleic acid were added.
次に、得られた分散品に、(C)成分を添加し、自転公転式の撹拌機にて撹拌した。ここで、モルホリンは、通常、液状であるため、ロール分散の必要がない。なお、モルホリン類で固形のもの(例えば、4−(3−ヒドロキシプロピル)モルホリン、4−(4−アミノフェニル)モルホリン、1,1−ジオキソチオモルホリン)、および8−キノリノールはロールミルにて分散させた。最後に、ブルックフィールド製HBDV−I(SC4−14スピンドル)を使用し、10rpmでの粘度が、50Pa・sになるように、ブチルカルビトールアセテート(BCA)で粘度調整を行い、脱泡機で撹拌しながら、分散品内の泡を完全に除去し、導電性接着剤を得た。 Next, component (C) was added to the obtained dispersion, and the mixture was stirred with a rotation and revolution type stirrer. Here, since morpholine is usually in a liquid state, there is no need for roll dispersion. In addition, solid morpholines (for example, 4- (3-hydroxypropyl) morpholine, 4- (4-aminophenyl) morpholine, 1,1-dioxothiomorpholine), and 8-quinolinol are dispersed in a roll mill. I let you. Finally, using Brookfield HBDV-I (SC4-14 spindle), adjust the viscosity with butyl carbitol acetate (BCA) so that the viscosity at 10 rpm is 50 Pa · s. While stirring, the bubbles in the dispersion were completely removed to obtain a conductive adhesive.
なお、比較例1では、(E)成分を使用しなかった。比較例2では、(E)成分の代わりに酸基のないBYK−116を、比較例3では、(E)成分の代わりにオレイン酸を、比較例4では、(E)成分の代わりにシランカップリング剤を、使用した。比較例5では、(B)成分の代わりに酸無水物を使用し、(C)成分を使用せず、比較例6では、(C)成分の代わりにアジピン酸を使用し、比較例7では、(C)成分の代わりにアミノフェネチルアルコールを使用した。 In Comparative Example 1, the component (E) was not used. In Comparative Example 2, BYK-116 without an acid group was used instead of (E) component, in Example 3, oleic acid was used instead of (E) component, and in Comparative Example 4, silane was used instead of (E) component. A coupling agent was used. In Comparative Example 5, an acid anhydride was used instead of the component (B), and the component (C) was not used. In Comparative Example 6, adipic acid was used instead of the component (C). Aminophenethyl alcohol was used in place of the component (C).
〔評価方法〕
〈接続抵抗値の測定〉
NiめっきをしたCuリードフレーム(厚み:200μm)上に、導電性接着剤を印刷し、3216サイズのAgPd端面電極をマウントさせた。150℃のオーブン中に30分間保持して硬化させた後、リードフレームと電極との間の抵抗値を4端子法で測定し、接続抵抗値を得た。接続抵抗値は、3000mΩ未満であると、好ましく、1000mΩ未満であると、さらに好ましい。表1〜表3に、接続抵抗値の結果を示す。
〔Evaluation method〕
<Measurement of connection resistance>
A conductive adhesive was printed on a Ni-plated Cu lead frame (thickness: 200 μm) to mount a 3216 size AgPd end face electrode. After being cured in an oven at 150 ° C. for 30 minutes, the resistance value between the lead frame and the electrode was measured by a four-terminal method to obtain a connection resistance value. The connection resistance value is preferably less than 3000 mΩ, and more preferably less than 1000 mΩ. Tables 1 to 3 show the results of connection resistance values.
〈接着強度〉
NiめっきをしたCuリードフレーム(厚み:200μm)上に、導電性接着剤を印刷し、2mm角のシリコンチップ(電極なし)をマウントした。150℃のオーブン中に30分間保持して硬化させた後、強度試験機(アイコーエンジニアリング株式会社製 型番:Model 1605HTP)を用いてせん断強度を測定することにより、常温での接着強度を求めた。Niとの接着強度は、10N/mm2以上であれば好ましく、樹脂との接着強度は、6N/mm2以上であれば好ましい。表1〜表3に、Niとの接着強度、樹脂との接着強度の結果を示す。
<Adhesive strength>
A conductive adhesive was printed on a Ni-plated Cu lead frame (thickness: 200 μm), and a 2 mm square silicon chip (no electrode) was mounted. After being held for 30 minutes in an oven at 150 ° C. and cured, the shear strength was measured using a strength tester (model number: Model 1605HTP manufactured by Aiko Engineering Co., Ltd.) to determine the adhesive strength at normal temperature. The adhesive strength with Ni is preferably 10 N / mm 2 or more, and the adhesive strength with resin is preferably 6 N / mm 2 or more. Tables 1 to 3 show the results of adhesive strength with Ni and adhesive strength with resin.
表1〜表3からわかるように、実施例1〜22の全てで、接続抵抗値が3000mΩ未満と低く、Niおよび樹脂との接着力も良好であった。これに対して、(E)成分を使用しなかった比較例1は、Niおよび樹脂との接着強度が低かった。(E)成分の代わりに酸基のないBYK−116を使用した比較例2では、樹脂との接着強度が低かった。(E)成分の代わりにオレイン酸を使用した比較例3では、Niとの接着強度が低かった。(E)成分の代わりにシランカップリング剤を使用した比較例4は、樹脂との接着強度が低かった。(B)成分の代わりに酸無水物を使用し、(C)成分を使用しなかった比較例5は、接続抵抗値が高く、Niおよび樹脂との接着強度が低かった。(C)成分の代わりにアジピン酸を使用した比較例6は、接続抵抗値が高く、Niとの接着強度が低かった。(C)成分の代わりにアミノフェネチルアルコールを使用した比較例7は、接続抵抗値が高かった。 As can be seen from Tables 1 to 3, in all of Examples 1 to 22, the connection resistance value was as low as less than 3000 mΩ, and the adhesion strength with Ni and resin was also good. On the other hand, the comparative example 1 which did not use (E) component had low adhesive strength with Ni and resin. In Comparative Example 2 using BYK-116 having no acid group instead of the component (E), the adhesive strength with the resin was low. In Comparative Example 3 in which oleic acid was used instead of the component (E), the adhesive strength with Ni was low. In Comparative Example 4 in which a silane coupling agent was used instead of the component (E), the adhesive strength with the resin was low. In Comparative Example 5 in which an acid anhydride was used instead of the component (B) and the component (C) was not used, the connection resistance value was high, and the adhesive strength between Ni and the resin was low. The comparative example 6 which uses adipic acid instead of (C) component had high connection resistance value, and its adhesive strength with Ni was low. In Comparative Example 7 in which aminophenethyl alcohol was used instead of the component (C), the connection resistance value was high.
上記のように、本発明の導電性接着剤は、硬化後に接続抵抗値を低くし、かつ、金属とも樹脂とも接着強度を高くすることができる。 As described above, the conductive adhesive of the present invention can reduce the connection resistance value after curing, and can increase the adhesive strength of both the metal and the resin.
Claims (9)
(B)フェノール系硬化剤および/またはアミン系硬化剤、
(C)モルホリン類還元剤および/または8−キノリノール、
(D)導電性充填剤、ならびに
(E)酸基およびアミノ基を含む添加剤
を含有することを特徴とする、導電性接着剤。 (A) epoxy resin,
(B) a phenolic curing agent and / or an amine curing agent,
(C) a morpholine reducing agent and / or 8-quinolinol,
A conductive adhesive comprising (D) a conductive filler and (E) an additive containing an acid group and an amino group.
請求項1〜5のいずれか1項記載の導電性接着剤の硬化物で、樹脂基板の導電部と半導体素子の電極部とが接着された、半導体装置。 Including a resin substrate having a conductive portion and a semiconductor element having an electrode portion;
A semiconductor device, wherein the conductive part of the resin substrate and the electrode part of the semiconductor element are bonded to each other by the cured product of the conductive adhesive according to claim 1.
請求項1〜5のいずれか1項記載の導電性接着剤の硬化物で、リッドと、金属電極および/または樹脂基板とが、接着された、半導体装置。 Including a lid that is an electromagnetic wave shielding material for an IC chip, and a resin substrate on which a metal electrode for grounding is formed,
A semiconductor device in which the lid is bonded to the metal electrode and / or the resin substrate with the cured product of the conductive adhesive according to claim 1.
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111210925A (en) * | 2020-03-17 | 2020-05-29 | 成都银盛新材料有限公司 | Low-cost conductive silver adhesive for photovoltaic laminated tile assembly and preparation method thereof |
JP2021050329A (en) * | 2019-09-20 | 2021-04-01 | 北京藍海黒石科技有限公司Blue Ocean & Black Stone Technology Co.,Ltd.(Beijing) | Recyclable led packaging conductive adhesive composition and method for manufacturing the same |
CN113861912A (en) * | 2021-09-14 | 2021-12-31 | 苏州柯仕达电子材料有限公司 | Anti-aging epoxy conductive adhesive and preparation method thereof |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006524286A (en) * | 2003-02-28 | 2006-10-26 | ナショナル スターチ アンド ケミカル インベストメント ホールディング コーポレーション | Electrically stable and impact resistant conductive adhesive composition for electronic devices |
JP2012164852A (en) * | 2011-02-08 | 2012-08-30 | Murata Mfg Co Ltd | Shielding structure of semiconductor package |
JP2013171927A (en) * | 2012-02-20 | 2013-09-02 | Denso Corp | Method of manufacturing electronic apparatus |
JP2015145455A (en) * | 2014-02-03 | 2015-08-13 | ナミックス株式会社 | Conductive adhesive, semiconductor device and method of producing conductive adhesive |
-
2015
- 2015-08-19 JP JP2015162337A patent/JP6576736B2/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006524286A (en) * | 2003-02-28 | 2006-10-26 | ナショナル スターチ アンド ケミカル インベストメント ホールディング コーポレーション | Electrically stable and impact resistant conductive adhesive composition for electronic devices |
JP2012164852A (en) * | 2011-02-08 | 2012-08-30 | Murata Mfg Co Ltd | Shielding structure of semiconductor package |
JP2013171927A (en) * | 2012-02-20 | 2013-09-02 | Denso Corp | Method of manufacturing electronic apparatus |
JP2015145455A (en) * | 2014-02-03 | 2015-08-13 | ナミックス株式会社 | Conductive adhesive, semiconductor device and method of producing conductive adhesive |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2021050329A (en) * | 2019-09-20 | 2021-04-01 | 北京藍海黒石科技有限公司Blue Ocean & Black Stone Technology Co.,Ltd.(Beijing) | Recyclable led packaging conductive adhesive composition and method for manufacturing the same |
US11840647B2 (en) | 2019-09-20 | 2023-12-12 | Fujian Blue Ocean & Black Stone Technology Co., Ltd. | Recyclable conductive adhesive composition for Led packaging and preparation method thereof, recycling method and recycled conductive silver powder |
CN111210925A (en) * | 2020-03-17 | 2020-05-29 | 成都银盛新材料有限公司 | Low-cost conductive silver adhesive for photovoltaic laminated tile assembly and preparation method thereof |
CN113861912A (en) * | 2021-09-14 | 2021-12-31 | 苏州柯仕达电子材料有限公司 | Anti-aging epoxy conductive adhesive and preparation method thereof |
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