JP2017024084A - Workpiece carrying-in/out device and plane machining system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a workpiece carrying-in/out device for collectively carrying-in/out a carrier and a workpiece to/from a plane machining device in a short time, and a plane machining system for collectively performing carrying-in/out and machining of the workpiece by the plane machining device and the workpiece carrying-in/out device in a shorter time.SOLUTION: A workpiece carrying-in/out device 200 includes a carrier device 230 which carries out a supply pallet 50 from a supply rack 210, carries the pallet to a carrying-in/out position with respect to a plane machining device 100, and carries a storage pallet 60 carried out at the carrying-in/out position to a storage rack 220. A plane machining system 100 includes the plane machining device 100 and the workpiece carrying-in/out device 200.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a workpiece loading / unloading device that loads and unloads a carrier and a workpiece in a lump in a plane machining device, and a plane machining that performs loading and unloading and machining of a workpiece collectively by the plane machining device and the workpiece loading / unloading device. About the system.

  Workpiece handling methods in surface polishing equipment and surface grinding equipment (hereinafter collectively referred to as plane machining equipment) include workpiece suction handling method (method for sucking and transporting workpieces) and carrier-by-carrier handling method (workpieces together with carriers in a horizontal plane). A method of transporting in the lateral direction above is known.

  The suction handling method is intended for thin workpieces such as light plate-like wafers and brittle workpieces such as glass that is brittle in material. It is also used in the field of mass production of works with almost the same variety using a common carrier.

  On the other hand, the carrier-by-carrier handling method targets a workpiece of a metal or ceramic material having a certain thickness and rigidity, for example, a workpiece such as a metal disc or a ring body. It is also used in the field of producing a wide variety of work pieces.

  For example, a workpiece such as a thin wafer is easy to lift. Therefore, a suction handling method is adopted. If a carrier-by-carrier handling method is adopted for transporting a thin workpiece, a large load may be applied to the end of the workpiece attached to a surface plate or the like when the workpiece moves in the lateral direction, and the workpiece may be damaged.

  Further, in the case of a workpiece having a certain thickness and rigidity, it is difficult to lift the workpiece as in the workpiece suction handling method. Therefore, a carrier-by-carrier handling method is adopted in which the carrier is slid laterally and conveyed on a plane. With such a workpiece, the strength of the workpiece itself is high, and even if the workpiece is moved laterally on a plane together with the carrier, the workpiece is less likely to be damaged.

  Furthermore, if there are several to several tens of workpiece shapes, and the workpiece shape changes due to a change in the workpiece to be machined at a certain frequency, carrier exchange work can be performed on the surface plate or the robot hand of the carrier transfer robot. Need to be changed to something that fits the workpiece. The carrier-by-carrier handling system can handle carriers and workpieces with simple equipment and simple process changes. In the carrier-by-carrier handling system, it is advantageous to perform a carrier exchange work and a work loading / recovering work outside the panel so that the work can be easily performed.

  Thus, the development of a technique for carrying by the carrier-by-carrier handling method has been advanced. For example, Patent Document 1 (Japanese Patent Application Laid-Open No. 2008-6578) discloses a technique for carrying in and out a work and a carrier integrally.

  FIG. 2 of Patent Document 1 shows a state in which the processed upper surface plate is raised. Similarly, FIG. 3 shows a state where the upper surface plate is slightly raised to prevent the workpiece from sticking. Similarly, FIG. 4 shows a state where the internal gear is lowered. Similarly, FIG. 5 shows a state in which the transport table (the tray) is moved to the vicinity of the end surface of the surface plate. Similarly, FIG. 6 shows the movement (sliding operation) of the carrier in the lateral direction along the carriage.

  Thereafter, one carrier is unloaded and a new carrier is loaded. Then, in order to carry out the next carrier on the surface plate, the state shown in FIGS. 4 to 3 is set, the next carrier is revolved and moved to the carry-out / carry-in position, and the carrier is carried out / carry-in again as shown in FIG. . These series of steps are repeated for the number of carriers.

  In addition, the development of a work loading / unloading device that loads and unloads a carrier and a work in a lump in a flat processing apparatus has been conventionally promoted. For example, Patent Document 2 (Japanese Patent Application Laid-Open No. 2001-88022) discloses a technique for carrying in and out a work and a carrier integrally. This is an example of a high-efficiency system in which a plurality of carriers are arranged in advance in the workpiece alignment unit, and these are sequentially supplied and discharged. Although this system conveys only the workpiece in the horizontal direction, it can be considered that it is almost the same as the form of conveying the entire carrier.

  This system collects the processed workpieces for one carrier at a time and similarly loads the unprocessed workpieces for one carrier at a time. In this way, collection and loading can be performed at almost the same timing, and this is an efficient system. In addition, since the work alignment unit (work table) circulates in the horizontal plane, the minimum necessary carrier can be repeatedly circulated and used, thereby reducing the cost of equipment.

  In addition, as another prior art of a workpiece loading / unloading device that loads and unloads a carrier and a workpiece with respect to a planar processing device, for example, Patent Document 3 (Japanese Patent Application Laid-Open No. 2002-184725) discloses carrier + work unloading / working. An example in which loading is automated is disclosed.

  A machine that automatically moves from the surface plate to the guide plate after machining and picks up the carrier and workpieces automatically, and unloads unprocessed workpieces from the workpiece feeder and loads them onto the carrier and batches them on the surface plate. It is a device to move to. The work around the processing equipment can be automated to save labor, and at the same time, the work is hardly touched and the work quality is maintained.

  Further, as another prior art of a workpiece loading / unloading device that loads and unloads a carrier and a workpiece with respect to a planar processing device, for example, Patent Document 4 (Japanese Patent Application Laid-Open No. 59-156665) describes a high-efficiency system. An example is disclosed. Equipped with the same number of unloading / loading devices as the carrier around the processing device, minimizing the time for unloading and loading the carrier + workpiece and maximizing productivity.

JP 2008-6578 A JP 2001-88022 A JP 2002-184725 A JP 59-156665 A

  Most of the conventional carrier-based handling systems have large facilities and require time for loading and unloading, and most of them require manual support.

  For example, in the prior art disclosed in Patent Document 1, it is necessary to move the transport table (sink) to the vicinity of the end surface of the surface plate. However, since this operation takes time, it is desired to employ a mechanism that shortens the time. The problem was discovered.

  In the prior art disclosed in Patent Document 2, since the work table circulates in a horizontal plane, an occupation area equal to or larger than that of the processing apparatus is required, and the installation is greatly restricted. In addition, providing the carry-out / carry-in device separately requires twice as many transport facilities, and at the same time, it is necessary to enlarge the carry-out / carry-in port, which increases the restrictions on the facilities.

  Since “unloading work” and “loading work” cannot be performed from the same direction, generally, one side of the processing apparatus is a carry-out port and the other side is a carry-in port. When other work on the board is performed, restrictions are increased, and various work on the surface board is hindered. The problem of realizing space saving as a whole was discovered.

  Further, in the prior art disclosed in Patent Document 3, there is a concern that the time required for carrying out and carrying in the carrier is large and the productivity is greatly impaired. As described above, it is necessary to shorten the time. Furthermore, the processing of the carrier after the workpiece is collected and the supply method to the carrier magazine to be supplied are not disclosed and are unknown.

  In the prior art disclosed in Patent Document 4, the carry-out / carry-in device is large and complex, and it is difficult to perform various operations on the surface plate. In other words, a significant increase in installation space constraints and equipment costs is inevitable. Space saving is necessary as described above. Furthermore, it is difficult to perform maintenance / inspection work on the processing apparatus or the like. The installation equipment is removed, which is complicated. In addition, there are a work for cleaning the surface plate, a work for correcting the flatness, a replacement work, and the like, and the work involves a lot of manpower. Note that a method for handling a carrier or a workpiece around the apparatus is not disclosed and is unknown.

  Therefore, the present invention has been made in view of the above-described problems, and an object of the present invention is to provide a small workpiece loading / unloading device that loads and unloads a carrier and a workpiece in a short time with respect to a planar processing device, and this An object of the present invention is to provide a plane machining system that performs loading and unloading and machining of workpieces in a short time in a short time using a plane machining device and a workpiece carry-in / out device.

The invention according to claim 1 of the present invention is
The unprocessed workpiece holding carrier, which is a carrier for holding an unprocessed workpiece, and the processed workpiece holding carrier, which is a carrier for holding a processed workpiece, are pallet-transferred to the flat processing apparatus and the unprocessed workpiece holding carrier. An apparatus for carrying in and carrying out the processed workpiece holding carrier,
A supply rack for storing a plurality of supply pallets in which the unprocessed workpiece holding carrier is placed in multiple stages in the vertical direction;
A storage rack for storing a plurality of storage pallets in which the processed work holding carrier is placed in a vertical direction; and
Unloading the supply pallet from the supply rack and transporting the supply pallet to a loading / unloading position with respect to the planar processing apparatus, and a new storage in which the processed work holding carrier is unloaded onto an empty pallet at the loading / unloading position A transfer device for carrying the pallet for storage into the storage rack;
It was set as the workpiece carrying in / out apparatus characterized by comprising.

The invention according to claim 2 of the present invention is
The unprocessed workpiece holding carrier, which is a carrier for holding an unprocessed workpiece, and the processed workpiece holding carrier, which is a carrier for holding a processed workpiece, are pallet-transferred to the flat processing apparatus and the unprocessed workpiece holding carrier. An apparatus for carrying in and carrying out the processed workpiece holding carrier,
A supply rack for storing a plurality of supply pallets in which the unprocessed workpiece holding carrier is placed in multiple stages in the vertical direction;
A supply transport device for transporting the supply pallet from the supply rack;
New storage in which the supply pallet received from the supply conveyance device is conveyed to a loading / unloading position with respect to the planar processing device, and the processed work holding carrier is unloaded onto an empty pallet at the loading / unloading position. A traverse device that transports the pallet to the next process,
A transport device for transporting the storage pallet received from the traversing device to the next process;
The processed workpiece is separated from the storage pallet received from the storage transport device, the processed workpiece after separation is collected, and the separated empty carrier is placed on the remaining pallet for new loading. A workpiece collection unit to be a pallet;
A loading traversing device for conveying the loading pallet received from the workpiece recovery unit;
A replenishing transport device for receiving the loading pallet from the loading traversing device;
A workpiece loading unit that loads an unprocessed workpiece onto an empty carrier on the loading pallet of the replenishing transport device to form a new supply pallet;
The replenishing transport device is a work loading / unloading device in which a pallet is circulated by transporting and feeding a new supply pallet to the supply rack.

The invention according to claim 3 of the present invention is
In the work carrying in / out apparatus according to claim 2,
The workpiece collection unit includes:
A receiving part for supporting a part of the processed work holding carrier on the pallet for storage from below;
A carrier holding portion having a pair of holding plates that project the processed workpiece holding carrier from above at two locations on the storage pallet and on the receiving portion, and hold the position of the carrier;
A workpiece recovery device below the recovery position;
A pallet moving unit that moves only the pallet of the storage pallet;
With
The carrier holding part holds the processed workpiece holding carrier of the storage pallet at two places on the pallet and the receiving part,
Moving the pallet in the horizontal direction to a position where the pallet moving part is released at least below all processed workpieces in the processed workpiece holding carrier;
The workpiece collection device collects the processed workpiece that has been dropped in a batch,
The pallet moving unit returns the pallet to its original position and is combined with the empty carrier after separation and the pallet to form the loading pallet,
The carrier holding part stops holding down,
The pallet moving unit carries the loading pallet to the loading traversing device;
It was set as the workpiece carrying in / out apparatus characterized by this.

The invention according to claim 4 of the present invention is
The lower surface plate is provided with an upper and lower surface plate, a non-rotating internal gear by a pin gear, an internal gear lifting and lowering portion that is a part of the internal gear, and a carrier transport robot, and a hole through which the pin gear is inserted. A plane processing apparatus having at least a conveyance table adjacent to
The said work carrying in / out apparatus as described in any one of Claims 1-3,
With
In the pre-processing step, the internal gear elevating part is lowered to form a surface of the lower surface plate, a surface of the transfer table, and a surface of the supply pallet on the traversing device as a continuous plane, The transfer robot carries the unprocessed workpiece holding carrier on a continuous plane from the surface of the supply pallet to the surface of the lower surface plate,
Further, in the post-processing step, the carrier transport robot unloads the processed work holding carrier on a continuous plane from the surface of the lower surface plate, the surface of the transport table and the surface of the empty pallet on the traversing device. It was set as the plane processing system characterized by making it carry out.

The invention according to claim 5 of the present invention is
An unprocessed workpiece holding carrier that is a carrier for holding an unprocessed workpiece and a processed workpiece holding carrier that is a carrier for holding a processed workpiece are conveyed by conveyor to the planar processing apparatus. An apparatus for carrying in and carrying out the processed workpiece holding carrier,
A supply rack for accommodating a plurality of the workpiece holding carriers in multiple stages in the vertical direction;
A storage rack for storing a plurality of processed workpiece holding carriers in multiple stages in the vertical direction;
The unprocessed work holding carrier is unloaded from the supply rack and conveyed to a loading / unloading position with respect to the planar processing apparatus, and the processed work holding carrier unloaded to the loading / unloading position is loaded into the storage rack. A transport device;
It was set as the workpiece carrying in / out apparatus characterized by comprising.

The invention according to claim 6 of the present invention is
An unprocessed workpiece holding carrier that is a carrier for holding an unprocessed workpiece and a processed workpiece holding carrier that is a carrier for holding a processed workpiece are conveyed by conveyor to the planar processing apparatus. An apparatus for carrying in and carrying out the processed workpiece holding carrier,
A supply rack for accommodating a plurality of the workpiece holding carriers in multiple stages in the vertical direction;
A conveying device for conveying the raw workpiece holding carrier from the supply rack;
The traversing device that transports the processed workpiece holding carrier received from the feeding transport device to the loading / unloading position with respect to the planar processing device, and transports the processed workpiece holding carrier unloaded to the loading / unloading position to the next step. When,
A transport device for storage for transporting the processed workpiece holding carrier received from the traversing device to the next process;
A workpiece recovery unit that separates a processed workpiece from the processed workpiece holding carrier received from the storage conveyance device, and collects the processed workpiece after separation;
A traversing device for loading that transports an empty carrier after separation received from the workpiece recovery unit;
A replenishing transport device that receives the empty carrier from the loading traversing device;
A workpiece loading unit that loads a blank workpiece on an empty carrier on the replenishing transport device to form a new blank workpiece holding carrier;
The replenishing transport device is a work loading / unloading device characterized in that a carrier circulates by transporting a new unprocessed work holding carrier to the supply rack.

The invention according to claim 7 of the present invention provides
In the work carrying in / out apparatus according to claim 6,
The workpiece collection unit includes:
A temporary pallet on which the processed workpiece holding carrier is placed;
A receiving portion for supporting a part of the processed workpiece holding carrier on the pallet for temporary placement from below;
A carrier holding portion having a pair of holding plates that project the processed workpiece holding carrier from above at two locations on the temporary placement pallet and the receiving portion, and hold the position of the carrier;
A workpiece recovery device below the recovery position;
A pallet moving unit that moves only the temporary pallet;
With
The carrier holding part holds the processed workpiece holding carrier of the temporary placing pallet on the temporary placing pallet and the receiving part;
The pallet moving part moves the pallet for temporary placement in a horizontal direction to a position where at least the lower part of all processed works in the processed work holding carrier is released,
The workpiece collection device collects the processed workpiece that has been dropped in a batch,
The pallet moving unit returns the temporary pallet to the original position and integrates it with the empty carrier after separation,
The carrier holding part stops holding down,
The pallet moving unit carries out the separated empty carrier to the loading traversing device;
It was set as the workpiece carrying in / out apparatus characterized by this.

The invention according to claim 8 of the present invention is
The lower surface plate is provided with an upper and lower surface plate, a non-rotating internal gear by a pin gear, an internal gear lifting and lowering portion that is a part of the internal gear, and a carrier transport robot, and a hole through which the pin gear is inserted. A plane processing apparatus having at least a conveyance table adjacent to
The workpiece loading / unloading device according to any one of claims 5 to 7,
With
In the pre-processing step, the internal gear elevating unit is lowered to form a surface of the lower surface plate, a surface of the transfer table, and a surface of the traversing device as a continuous plane, and the carrier transport robot Carrying the unprocessed workpiece holding carrier on a continuous plane from the surface of the apparatus to the surface of the lower surface plate,
In the post-processing step, the carrier transport robot unloads the processed workpiece holding carrier on a continuous plane up to the surface of the lower surface plate, the surface of the transport table, and the surface of the traversing device. It was set as the characteristic plane processing system.

  According to the present invention as described above, a small work loading / unloading apparatus that loads and unloads a carrier and a workpiece in a short time in a short time with respect to the planar machining apparatus, and a workpiece unloading by the planar machining apparatus and the workpiece carry-in / out apparatus It is possible to provide a planar machining system that performs batching and machining in a shorter time.

BRIEF DESCRIPTION OF THE DRAWINGS It is explanatory drawing of the 1st form plane processing system containing the workpiece | work carrying in / out apparatus of the 1st form for implementing this invention, Fig.1 (a) is a top view, FIG.1 (b) is a front view. is there. It is explanatory drawing of a plane processing apparatus, Fig.2 (a) is a top view, FIG.2 (b) is a front view. FIG. 3A is a state diagram before carrying in, FIG. 3B is a state diagram of the lowering of the internal gear lifting unit, and FIG. FIG. 3D is a state diagram of the movement of the carrier to be held, and FIG. It is an external view of the plane processing system of the 2nd form containing the workpiece carrying-in / out apparatus of the 2nd form for implementing this invention, Fig.4 (a) is a top view, FIG.4 (b) is a front view. is there. It is an external view of the 3rd form plane processing system containing the workpiece | work carrying in / out apparatus of the 3rd form for implementing this invention, Fig.5 (a) is a top view, FIG.5 (b) is a front view. is there. It is an initial state figure of a work carrying in / out device. It is explanatory drawing of the movement to the carrying in / out position of the supply pallet. It is explanatory drawing of collection | recovery of an empty pallet, and the movement to the carrying in / out position of another supply pallet. It is explanatory drawing of transfer of the pallet carrying an empty carrier. It is explanatory drawing of a 1st workpiece loading part. It is explanatory drawing of the 2nd workpiece loading part. It is explanatory drawing of conveyance to the supply rack of a supply pallet. It is explanatory drawing of conveyance to the carrying in / out position of a supply pallet, and conveyance to the front of the carrying in / out position of a supply pallet. It is explanatory drawing of carrying out of the supply pallet. It is explanatory drawing of carrying out of the pallet for storage, and conveyance of a new supply pallet. FIGS. 16A and 16B are explanatory views of the workpiece collecting unit, FIG. 16A is an explanatory diagram of carrying the storage pallet into the workpiece collecting unit, FIG. 16B is an explanatory diagram of the workpiece collection, and FIG. 16C is an empty carrier. An explanatory view of the movement of the pallet to the lower side, FIG. 16 (d) is an explanatory view of another work collection unit. It is an external view of the plane processing system of the 4th form including the workpiece carrying-in / out apparatus of the 4th form for implementing this invention, Fig.17 (a) is a top view, FIG.17 (b) is a front view. is there. FIG. 18A is a front view of a loading traversing apparatus that transports a pallet, and FIG. 18B is an internal structure diagram of the loading traversing apparatus that transports a pallet. FIG. 19A is a front view of a loading traversing apparatus that conveys a conveyor, and FIG. 19B is an internal structure diagram of the loading traversing apparatus that conveys a conveyor.

  A planar processing system 1 according to a first embodiment for carrying out the present invention will be described with reference to FIGS. The planar processing system 1 is a first semi-automated system, and includes a planar processing device 100 and a workpiece carry-in / out device 200 as shown in FIGS. In FIG. 1A, illustration of an upper surface plate and the like of the planar processing apparatus 100 is omitted to make the drawing easier to see. Further, in FIG. 1B, the planar processing apparatus 100 behind is not shown for easy viewing of the drawing.

  Next, details of the planar processing apparatus 100 will be described with reference to FIG. As shown in FIGS. 2A and 2B, the flat surface processing apparatus 100 includes a processing apparatus main body 101, a support column 102, an upper surface plate support turning arm 103, an upper surface plate lift cylinder 104, an upper surface plate 105, and a lower surface plate. 106, an internal gear 107, a sun gear 108, an internal gear lifting / lowering unit 109, a cover 110, a carrier transfer robot 111, and a transfer stand 112. The workpieces 30 are held by a plurality (five in FIG. 1) of carriers 20 and are flattened.

  In the flat processing apparatus 100, a support column 102 is integrally fixed to a processing apparatus main body 101 which is a robust mechanical structure. An upper surface plate support turning arm 103 is configured to be rotatable on the upper side of the column 102, and an upper surface plate lifting / lowering cylinder 104 is supported at the tip of the upper surface plate support turning arm 103.

  Specifically, the upper surface plate elevating cylinder 104 is a fluid pressure cylinder driven by hydraulic pressure or pneumatic pressure supplied from the outside, and moves the upper surface plate 105 up and down. When the upper surface plate 105 is raised and the upper surface plate 105 moves outward as shown in FIG. 2A, the carrier 20 and the work 30 can be carried in and out. The upper surface plate 105 and the lower surface plate 106 are annular disks, and come into contact with the work 30 to planarize the work 30. The lower surface plate 106 is rotationally driven by a drive unit (not shown) inside the processing apparatus main body 101.

  In the flat surface processing apparatus 100, the carrier 20 that holds the work 30 in the work hole is disposed between the lower surface plate 106 and the upper surface plate 105 during the surface processing. The workpiece 30 is sandwiched between the lower surface plate 106 and the upper surface plate 105 and is in close contact therewith. The carrier 20 is meshed with the internal gear 107 and the sun gear 108. The internal gear 107 employs a pin gear. Further, a part of the internal gear 107 is configured to be moved up and down by the internal gear lifting unit 109.

  As shown in FIG. 2B, a cylindrical water receiving cover 110 is provided on the lateral side of the lower surface plate 106 and the internal gear 107, and the cover 110 is provided with a notch 110 a. And the conveyance stand 112 used as the path | route for moving the carrier 20 holding the workpiece | work 30 to a horizontal direction and arrange | positioning is arrange | positioned. The transport table 112 is in a state of passing through the notch 110a.

  Further, as shown in FIG. 3A, the pin gear of the internal gear 107 is inserted into the hole at the tip of the transport table 112. The internal gear 107 can be moved up and down, and by raising and lowering the internal gear lifting and lowering unit 109, only the pin gear appears and moves without moving the transfer table 112, and a path that can move in the lateral direction on the transfer table 112 is set.

  Further, a carrier transfer robot 111 is disposed in the processing apparatus main body 101. 2A and 2B show a state in which the upper surface plate 105 is swung and retracted. In this state, the carrier 20 holding the workpiece 30 is gripped and transported by the robot hand 111a of the carrier transport robot 111. The carrier 20 holding the workpiece 30 is carried in and out in the direction of arrow b via the table 112.

  During planar processing of the workpiece 30, both the upper and lower surfaces of the workpiece 30 are polished with the workpiece 30 in contact with the lower surface plate 106 and the upper surface plate 105 with an optimal processing load. At this time, the upper surface plate 105, the lower surface plate 106, and the sun gear 108 are controlled to rotate, and perform a planetary motion in which the carrier 20 revolves while rotating. The internal gear 107 does not rotate. The upper surface plate 105, the lower surface plate 106, and the carrier 20 are rotated at an optimum speed by adjusting the rotation speed.

  Then, rinse or slurry is supplied from a supply hole (not shown) provided in the upper surface plate 105. Without rotating the internal gear 107, the upper surface plate 105 and the lower surface plate 106 are rotated, and at the same time, the sun gear 108 is rotated. Thereby, the upper and lower surfaces of the workpiece 30 are polished. Then, after the machining is completed, the carrier 20 is unloaded together with the workpiece 30, and the machining is completed.

  Next, the workpiece carry-in / out apparatus 200 of the present invention will be described with reference to FIG. As shown in FIGS. 1A and 1B, the work carry-in / out device 200 includes a supply rack 210, a storage rack 220, and a transfer device 230. A supply rack 210 is disposed on one side (left side in FIGS. 1A and 1B) and a storage rack 220 is disposed on the other side (right side in FIGS. 1A and 1B) with the transport device 230 in between. Is done.

  The supply rack 210 and the storage rack 220 are configured so that a substantially rectangular pallet 40 configured to be slidable at each stage can be taken out and taken in and taken out in the direction of arrow a. The supply rack 210 stores in advance all the supply pallets 50 (the unprocessed workpiece 30 + the carrier 20 that holds the unprocessed workpiece 30 + the pallet 40 on which the carrier 20 is placed). In this supply rack 210, an operator manually slides the supply pallet 50 and carries it in. In this specification, the unprocessed workpiece 30 + the carrier 20 that holds the unprocessed workpiece 30 is referred to as an unprocessed workpiece holding carrier for convenience.

  The central transfer device 230 has a function as an elevator device, a function for automatically carrying the supply pallet 50 from the supply rack 210 onto the transfer device 230, and a storage pallet 60 into the storage rack 220. It has a function of automatically carrying out the processed workpiece 30 + the carrier 20 holding the processed workpiece 30 + the pallet 40 on which the carrier 20 is placed. In the present specification, the processed workpiece 30 + the carrier 20 that holds the processed workpiece 30 is referred to as a processed workpiece holding carrier for convenience.

  The storage rack 220 accommodates the loaded storage pallet 60. In the storage rack 220, the storage pallet 60 is manually unloaded by the operator, and the storage pallet 60 is collected. Only the processed workpiece 30 is collected from the storage pallet 60. Then, the unprocessed workpiece 30 is held on the empty carrier 20 on the pallet 40, and is again loaded into the supply rack 210 as the supply pallet 50 and set.

  Next, the conveyance platform 112 for carrying in / out the workpiece processing apparatus 200 from / to the planar processing apparatus 100 will be described. Here, the relationship between the internal gear 107 and the transport table 112 is as follows. As shown in FIG. 3A, the transport table 112 is positioned close to the lower surface plate 106 and is near the tip of the transport table 112. The pin gear of the internal gear 107 is passed through the hole in the plate thickness direction. The pin gear shall be a hole with a clearance to move up and down freely.

  The transport table 112 is provided with, for example, a lifting drive unit (not shown). When the unprocessed carrier 20 is transported from the transport table 112 to the lower surface plate 106, the transport table 112 has substantially the same height. When the height of the carrier 112 is set to a level slightly higher than the end surface level of the lower surface plate 106, and when the processed carrier 20 is carried out along the path from the lower surface plate 106 to the carrier table 112, the height is almost the same. However, the height of the conveyance table 112 is set to a level slightly lower than the end face level of the lower surface plate 106. As a result, the carrier 20 holding the workpiece 30 can smoothly move from the conveying table 112 to the lower surface plate 106 and from the lower surface plate 106 to the conveying table 112.

  The planar processing system 100 of the first semi-automated system is configured by the planar processing device 100 and the workpiece carry-in / out device 200.

  Subsequently, workpiece machining by the planar machining system 1 will be described. At the start of processing, the supply pallet 50 is accommodated in all stages of the supply rack 210, the carrier 20 is not in the lower surface plate 106, and nothing is stored in the storage rack 220. It is not empty. Here, the supply pallets 50 may be manually inserted into the supply rack 210 one by one from the side, or a new supply rack 210 in which the supply pallet 50 is previously stored is moved from another location. Then, it may be installed beside the workpiece carry-in / out device 200.

  The transport device 230 carries out the supply pallet 50 from the supply rack 210. In this unloading operation, first, the transport device 230 moves up and down, and the transport device 230 unloads a predetermined supply pallet 50 onto the transport device 230. In addition, positioning pins are arranged on the pallet 40, and the positioning of the carrier 20 is performed so that the pins are fitted into the holes of the carrier 20 and do not move during transportation when the pallet 40 is placed. Further, positioning jigs may be provided on the pallet 40. The transport device 230 on which such a supply pallet 50 is mounted is transported to the carry-in / out position of the planar processing device 100.

  Subsequently, loading into the planar processing apparatus 100 is performed. First, as shown in FIG. 3A, the lower surface plate 106 is rotated and moved to the installation location of the carrier 20. When the internal gear 107 is lowered by the internal gear lifting / lowering unit 109 as shown by the arrow c in FIG. 3B in a state where the transport base 112 is set to a level slightly higher than the lower surface plate 106, the transport base 112 The pin gear of the internal gear 107 penetrating through is lost.

  Then, as shown by the arrow d direction in FIG. 3C, the unprocessed workpiece holding carrier, which is the carrier 20 that holds the unprocessed workpiece 30, is held by the robot hand 111 a of the carrier transfer robot 111 and loaded. The carry-in is carried from the pallet 40 via the carrying table 112 to the lower surface plate 106 so as to move in the lateral direction while sliding on a substantially flat surface.

  At the time of carrying in, a pair of pins on the robot hand are fitted to the through holes (for example, the carrier 20 in FIG. 1) formed in the carrier 20 at an arbitrary pitch and moved laterally. Further, the protrusion on the outer periphery of the carrier may be hooked and moved so as not to cause misalignment during movement.

  Then, as indicated by the arrow e in FIG. 3D, the internal gear lifting / lowering unit 109 raises the internal gear 107 and meshes the tooth surface on the outer periphery of the carrier 20 with the pin gear.

  The pallet 40 remaining on the transport device 230 after the transport is temporarily placed on the supply rack 210 (or the storage rack 220) by the transport device 230.

  Then, the lower surface plate 106 is moved to a predetermined position so that the next carrier 20 can be carried in by rotating the gear 20 by driving the gear (self-revolving), returning to the state of FIG. The operations described with reference to FIGS. 4A to 4D are repeated, and five unprocessed workpiece holding carriers for one batch are set. In the end, it is assumed that the empty pallet 40 placed on the transport device 230 is at the loading / unloading position. Then, the workpiece 30 is planarized by the planar processing apparatus 100.

  Next, collection after flat processing and supply of the next workpiece will be described. After the planar processing is completed, the lower surface plate 106 is rotated and positioned at a position where the processed workpiece holding carrier, which is the carrier 20 that holds the processed workpiece 30, is unloaded (state of FIG. 3D).

  When the internal gear 107 is lowered (in the direction opposite to the arrow e) while the transport table 112 is set at a slightly lower level, the pin gear of the internal gear 107 passing through the transport table 112 is lost, and in this state, the carrier transport robot 111 The robot hand 111a holds the processed workpiece holding carrier, which is the carrier 20 that holds the processed workpiece 30 (state shown in FIG. 3C).

  The processed workpiece holding carrier is unloaded by the robot hand 111a of the carrier transfer robot 111 through the transfer table 112 to the empty pallet 40 on the transfer device 230 (in the direction opposite to the arrow d) (see FIG. 3 (b) state). Thereafter, the transport device 230 carries the pallet 40 on which the processed workpiece holding carrier is mounted as a storage pallet 60 into the storage rack 230.

  In order to put the unprocessed work holding carrier, which is the carrier 20 holding the unprocessed work 30, into the empty place of the lower surface plate 106, the transport device 230 takes out the next supply pallet 50 from the supply rack 210, and It moves to the loading / unloading position (state shown in FIG. 3A). Then, the supply operation as described above is performed. In order to carry the next processed workpiece holding carrier onto the remaining empty pallet 40 after the supply, the lower surface plate 106 is rotated to rotate the processed workpiece holding carrier to the loading / unloading position (see FIG. 3D). State).

  Thereafter, the same operation is performed for five carriers. In this way, the supply operation of placing a plurality of unprocessed workpiece holding carriers on the lower surface plate 106 and the storage operation of collecting and storing the plurality of processed workpiece holding carriers are alternately performed in parallel. Then, the storage pallet 60 is carried out into the storage rack 220.

  As with the supply rack 210, the storage pallet 60 may be unloaded from the storage rack 220 by hand from the side, as in the case of the supply rack 210. The rack 220 may be moved to another place.

  In this method, it is necessary to use the carrier 20 and the pallet 40 collected by the workers for supply. For example, the storage rack 220 on which the storage pallet 60 is mounted is moved to another location, and after the storage pallet 60 is unloaded and only the processed workpiece 30 is taken out, the unprocessed workpiece 30 is left on the carrier 20. Alternatively, the supply rack 210 may be used as the supply pallet 50. For replacement, an empty supply rack 210 that has already been supplied may be moved and installed as a storage rack 220 beside the work loading / unloading apparatus 200.

  Further, in this embodiment, the role of the rack is fixed, such as the supply rack 210 and the storage rack 220. However, since the configuration of the apparatus is symmetrical and it is not necessary to fix the role of the rack, when the supply rack 210 becomes empty, it is used as the storage rack 220, and the storage rack 220 is filled with the storage pallet 60. Then, the storage pallet 60 can be pulled out, the processed workpiece can be collected, and the unprocessed workpiece can be loaded and used as the supply rack 210. The role of the two racks is not fixed, but sometimes functions as the supply rack 210 or the storage rack 220.

  In addition, since the collected pallets may be sequentially placed on the empty shelf, the racks do not have to be on both sides. For example, a part of one rack on only one side functions as the supply rack 210, and the remaining racks May function as the storage rack 220.

  By operating such a rack, it is possible to eliminate the work of taking out the carrier and pallet from the work loading / unloading device and the flat processing system and carrying it manually, and the number of carriers prepared for each work can be minimized. It is economically advantageous. Such a form may be adopted.

According to the present invention, there are the following advantages.
(1) Minimization of space In particular, vertical supply racks and storage racks are used to efficiently store carriers vertically in multiple stages, minimizing equipment and occupied space, and reducing installation restrictions. It was possible to realize the carrier operation, arrangement and transfer method that maximized production efficiency. In addition, an automated workpiece handling system suitable for production of other products has been realized.

  In addition, the carrier loading / unloading port with respect to the surface plate is provided in one place, and the structural changes on the planar processing device 100 side are minimized by minimizing the lifting and lowering devices such as internal gears and slides (slides and slide plates). To do. As a result, downsizing of the device, simplification of equipment, and cost reduction were realized.

  Further, since only one side surface of the planar processing apparatus 100 is used, it becomes possible to access the surface plate from the side surface of the device without the entrance and exit, and the surface plate can be easily replaced and maintained. In addition, since only one robot transfer device is required to transfer the carrier, it is possible to reduce the size and equipment cost.

(2) Shorter tact time Despite having one unloading / unloading port, the carrier and workpiece unloading and loading processes can be performed continuously, reducing overall waiting time. The tact time can be reduced.

  Further, since the machining process is performed by the plane machining apparatus 100 and the unprocessed workpiece is supplied and the processed workpiece is collected by the workpiece carry-in / out apparatus 200, the tact time can be shortened.

  In addition, when handling and loading the workpieces 30 one by one, the loading time per piece becomes a bottleneck, resulting in a decrease in productivity or doubling the loading equipment to solve this. However, in the present invention, the loading time per piece can be increased by carrying in / out the carrier 20 together with the workpiece 30, thereby avoiding excessive investment of equipment.

  In addition, a pin gear structure and a conveyance base penetration structure are adopted in order to shorten the tact time, so that the lateral movement operation of the carrier conveyance base, which is a relatively large structure, can be omitted, and the tact of this process can be greatly shortened. Became possible.

Next, the planar processing system 2 according to the second embodiment of the present invention will be described.
The first embodiment described above is a first semi-automated system that minimizes the space occupied by automation equipment on the premise that the work of collecting processed workpieces and loading of unprocessed workpieces are performed manually. . As described above, there are many operations that contribute to human labor, and since there is only one transfer device 230, a waiting time between the processes occurs.

  Therefore, the second embodiment of the present invention is a second semi-automated system, which is a system in which access to a pallet with a complicated work and a large work load is improved. In the workpiece loading / unloading apparatus 200 ′ of the present embodiment shown in FIG. 4, in addition to the configuration of the workpiece loading / unloading apparatus 200 of the first embodiment (supply rack 210, storage rack 220, transport device 230), the workpiece loading unit 240 is provided. , A supply transfer device 250 and a storage transfer device 260 are provided. In FIG. 4A, the upper surface plate and the like of the planar processing apparatus 100 are not shown for easy viewing of the drawing. Further, in FIG. 4B, illustration of the planar processing apparatus 100 behind is omitted to make the drawing easier to see.

  The workpiece loading unit 240 and the supply transport device 250 are disposed outside the supply rack 210. The workpiece loading unit 240, which is a robot, loads the workpieces 30 of the empty carrier 20 mounted on the pallet 40 on the supply transport device 250 into the supply pallet 50 by loading the unprocessed workpieces 30. Do work automatically. The supply transport device 250 automatically performs a supply operation of transporting and transporting the supply pallet 50 to the supply rack 210.

  Further, the storage transport device 260 automatically performs a collection operation for carrying out and transporting the storage pallet 60 from the storage rack 220. Since the workpiece carry-in / out device 200 ′ has the same basic structure and operation at the central portion of the device as the workpiece carry-in / out device 200, the work efficiency of the carry-in / out with respect to the planar processing device 100 is the same as that of the first semi-automated system of the first embodiment. It is the same as the workpiece carry-in / out device 200.

  Further, as described above, an operation may be performed such that two racks are switched. Furthermore, a part (for example, the upper side) of one rack on only one side may function as the supply rack 210, and the rest of the rack (for example, the lower side) may function as the storage rack 220. Then, the workpiece loading unit 240 and the supply transport device 250 are arranged beside the supply rack 210, and the storage transfer device 260 is arranged beside the storage rack 220, and the supply transfer device 250 and the storage transfer device 260 are arranged. And may be positioned vertically.

Compared with the first semi-automated system of the first embodiment, this second semi-automated system can further expect the following effects in addition to the effects (1) and (2) described above.
(3) Since the work loading unit 240 and the feeding transport device 250 can perform the work of loading an unprocessed work at a fixed position, the manual work becomes efficient and the work load can be further reduced.
(4) Similarly, the work for collecting processed workpieces can be performed at a fixed position by the storage transport device 260, so that manual work is efficient and the work load can be further reduced.

  Then, the plane processing system 3 of the 3rd form of this invention is demonstrated. As shown in FIGS. 5A and 5B, the work loading / unloading device 300 according to the third embodiment of the present invention is newly used without changing the planar processing device 100 described in the first and second embodiments. . In FIG. 5A, the upper surface plate and the like of the planar processing apparatus 100 are not shown for easy viewing of the drawing. Further, in FIG. 5B, the planar processing apparatus 100 behind is not shown for easy viewing of the drawing.

  The work loading / unloading device 300 includes a supply rack 310, a storage rack 320, a work loading unit 330, a replenishing transport device 340, a supply transport device 350, a traversing device 360, a storage transport device 370, a work collection unit 380, and a loading. A traversing device 390 for the use is provided.

  Next, the operation of the workpiece carry-in / out apparatus 300 that characterizes the present invention will be described together with the operation of each component. FIG. 6 shows an initial set state. It is assumed that nothing is mounted on the lower surface plate 106 at this time. A supply pallet 50 is accommodated in the supply rack 310. Further, the storage rack 320 accommodates a pallet 40 on which an empty carrier 20 having no workpiece is mounted. A supply pallet 50 is placed on the top of the supply rack 310.

  Then, as indicated by an arrow A in FIG. 7, the first supply pallet 50 at the top of the supply rack 310 is sent to the carry-in / out position on the traversing device 360 via the supply conveyance device 350. . Then, the robot hand 111 a of the carrier transport robot 111 carries the unprocessed work holding carrier, which is the carrier 20 holding the unprocessed work 30, onto the lower surface plate 106 from the pallet 40. The carry-in is performed in the same manner as the carry-in described with reference to FIG. An empty pallet 40 remains on the traversing device 360.

  Then, as indicated by an arrow B in FIG. 8, the traversing device 360 sends the empty pallet 40 to the storage transport device 370, and the storage transport device 370 carries the empty pallet 40 into the storage rack 320. At the same time, the supply conveyance device 350 carries out a new supply pallet 50 from the supply rack 310 and sends it onto the traversing device 360 as indicated by an arrow C in FIG. The carrier transfer robot 111 carries the unprocessed work holding carrier, which is the carrier 20 holding the unprocessed work 30, onto the lower surface plate 106 from the pallet 40.

  Hereinafter, the unprocessed work holding carriers for five batches are placed on the lower surface plate 106, the four empty pallets 40 are accommodated in the storage rack 320, and the one empty pallet 40 is the traversing device 360. It will be in the state which exists in the carrying in / out position as shown in FIG.

  During placement of these carriers 20 on the lower surface plate 106, as indicated by an arrow D in FIG. 9, the pallet 40 on which only the empty carrier 20 is placed is placed from the storage rack 320 into the storage transport device 370. Are sequentially carried out and conveyed to the loading traversing device 390 via the workpiece collecting unit 380, and the loading traversing device 390 is transported in a pre-packed manner onto the replenishing conveying device 340 in front of the workpiece loading unit 330. To do. Then, the workpiece loading unit 330 loads an unprocessed workpiece 30 into a new supply pallet 50 with respect to the loading pallet which is the pallet 40 on which only the empty carrier 20 is placed.

  The workpiece loading unit 330 will be described. In the workpiece loading unit 330 shown in FIGS. 10A and 10B, a plurality of stacked workpieces 331 are accommodated on the rotating plate 334. One of the stacked workpieces 331 is lifted up and taken out on the top plate 332, and the workpiece 30 is put into the workpiece hole of the carrier 20 mounted on the pallet 40 on the replenishing transport device 340 by a handling device 333 such as a robot. Load one by one. In this case, if necessary, the work may be performed while detecting the loading position using a sensor for detecting a work hole.

  Moreover, you may employ | adopt the other workpiece | work loading part 330 which handles a ring-shaped workpiece | work. A workpiece loading unit 330 shown in FIGS. 11A and 11B is a loading unit applied when the workpiece 30 has a relatively small diameter, light weight, and a large quantity, and is loaded at high speed by the following procedure.

  Only the carrier 20 is transported from the pallet 40 on the replenishing transport device 340 to the turntable device 335 outside the device. A carrier transport table 336 is provided between the replenishing transport device 340 and the turntable device 335, and the carrier 20 transports the carrier 20 so as to slide on the carrier transport table.

  A stacked workpiece gripping device 338 that grips a plurality of stacked workpieces 337 is set on a circular plate 339, and the workpieces 30 of the carrier 20 on the turntable device 335 are moved one by one through the through holes provided in the circular plate 339. It falls into the hole. The stacked workpiece gripping device 338 regulates the position of the workpiece that is gripped and dropped at the bottom of the stacked workpiece 337, and at the same time detects that one workpiece has been loaded, → Slightly lift the stack → Swivel table turns a predetermined amount → Release gripping ”is repeated. As a result, the table is intermittently turned to sequentially load the workpieces.

  After loading, the carrier 20 holding the unprocessed workpiece 30 is conveyed so as to slide on the carrier conveyance table 336. Then, it is mounted on the pallet 40 on the replenishing transport device 340, and a new supply pallet 50 is mounted. The workpiece loading is performed in this way.

  The work loading unit 330 shown in FIG. 11 requires a turning table device 335, a carrier transport table 336, a stacked workpiece gripping device 338, and the like, but is effective when the number of workpieces to be loaded is large. What is necessary is just to select suitably on the assumption that a circulation system is operated continuously.

  The replenishment conveyance device 340 replenishes the supply pallet 50 after such loading into the supply rack 310 as indicated by an arrow E in FIG. Then, after confirming that the replenishing transport device 340 is empty, the loading pallet, which is the pallet 40 on which the next empty carrier 20 is placed, is transported from the loading traversing device 390 to the replenishing transport device 340. On this lower layer line, when the pallet position is empty, the loading traversing device 390 sequentially transports the pallet position to that position and stops it as a standby state. A series of operations from loading these new workpieces to storing them in the supply rack 310 is sequentially performed.

  Finally, five carriers for one batch are loaded on the lower surface plate 106. As shown in FIG. 12, the four empty pallets 40 are accommodated in the storage rack 320. The last pallet 40 is a pallet 40 for receiving a carrier that holds the first workpiece that has been processed, and waits at a carry-in / out position on the traversing device 360. Then, in preparation for the next carrier carry-in, the supply pallet 50 is in a standby state on the supply conveyance device 350 on the upper layer line. The next carrier to be supplied is supplied from the remaining batch.

  It is assumed that processing has been completed. In FIG. 13, the robot hand 111a of the carrier transport robot 111 carries the processed workpiece holding carrier, which is the carrier 20 holding the processed workpiece 30 from the lower surface plate 106, onto the empty pallet 40 of the traversing device 360 for storage. This is a state where the pallet 60 is used. Here, the robot hand 111a of the carrier transfer robot 111 stands by at a position where it has left and raised.

  14, as indicated by an arrow F, the storage pallet 60 on the traversing device 360 is transported to the storage transport device 370 on the right side, and the supply pallet 50 on the supply transport device 350 is transported on the right side traversing device. Transport onto 360. Then, the robot hand 111 a of the carrier transfer robot 111 transfers the next unprocessed workpiece holding carrier from the supply pallet 50 on the supply transfer device 350 onto the lower surface plate 106.

  FIG. 15 shows a state in which the supply conveyance device 350 carries out and conveys the next supply pallet 50 from the supply rack 310 as indicated by an arrow G, while leaving the empty pallet 40 on the traversing device 360 as it is. Further, as indicated by an arrow H, the storage transport device 370 transports the storage pallet 60 to the lower layer and transports it to the work collection unit 380. The storage transport device 370 immediately returns to the upper layer position and stands by. The workpiece collection unit 380 sequentially performs the collection operation, and sequentially conveys the remaining carrier 20 and pallet 40 to the replenishment conveyance device 340.

  Here, as shown in FIG. 16, the workpiece collection unit 380 includes a receiving unit 381, an elevating cylinder 382, a workpiece receiving table 383, a workpiece collecting device 384, and a carrier holding unit 385. Further, a pallet moving unit (not shown) for moving the pallet 40 is provided.

  The workpiece collection operation will be described. The storage pallet 60 is carried in the direction of arrow α in FIG. And the receiving part 381 attached to the front-end | tip of the raising / lowering cylinder 382 raises, and the receiving part 381 supports the carrier 20 on the right side. Further, the carrier holding portion 385 descends, protrudes to the right side, and the holding plate 385a comes into contact with the outer peripheral portion of the carrier 40 on the receiving portion 381, and also protrudes to the left side to hold the holding plate on the outer peripheral portion of the carrier 40 on the pallet 40. 385a abuts, and the carrier 40 is fixed so as not to move even if the lower pallet 40 moves.

  In this state, when a pallet moving unit (not shown) moves the pallet 40 of the storage pallet 60 as shown in FIG. 16B, only the lower pallet 40 moves in the direction of arrow β, and the work 30 is slightly changed. Lower to the work cradle 383 below.

  Every time the workpiece 30 is received, the workpiece cradle 383 is lowered by one layer so as not to give an impact to the workpiece. A rod-shaped workpiece collection device 384 collects hollow workpieces and ring-shaped workpieces by passing them through a rod in a skewer shape. This facilitates handling to subsequent processes. Although not shown, it may be dropped in a box. In any case, the process can be completed in a short time if the processed workpieces 30 are dropped and collected in this manner.

  After collection, a pallet moving unit (not shown) inserts the pallet 40 again below the carrier 20 as indicated by an arrow γ in FIG. 16C, and forms a loading pallet that is the pallet 40 on which only the empty carrier 20 is mounted. . Such an operation is reciprocated by a sensor. Thereafter, a pallet moving unit (not shown) conveys the loading pallet to the loading traversing device 390. Then, the loading traversing device 390 transports the loading pallet to the replenishing transport device 340, and the workpiece loading unit 330 sequentially loads the unprocessed workpieces 30. Thereafter, the same operation is repeated.

  In addition, as shown in FIG.16 (d), the receiving part 381 may be provided in two places, and you may make it support the carrier 20 in the stabilized state.

  As described above, the planar processing system 3 realizes full automation by forming a circulation path of pallets. Further, the planar processing system 3 operates independently so that the apparatus of each part in each process does not enter a standby state (only the shortest time is possible) and operates in a coordinated manner so that overall productivity is maximized. I have to. The planar processing system 3 of the present invention is as described above.

  Such planar processing system 3 realizes automation with particularly high efficiency. In addition to the effects (1) to (4), an automation system such as the following (5) and (6) There are unique advantages.

(5) Speeding up the conveyance on the automated circulation line In the plane machining system 3 of the present invention, the carrier 20 holding the machined workpiece 30 (machined workpiece holding carrier) is unloaded from the plane machining apparatus 100 and immediately thereafter. Since the carrier 20 that holds the unprocessed workpiece 30 (unprocessed workpiece holding carrier) is carried into the planar machining apparatus 100, the loading and unloading is performed efficiently without time loss. Further, in particular, since the storage pallet 60 on which the processed workpiece holding carrier is mounted is sequentially sent to the downstream side, the replacement of the carrier 20 on the lower surface plate 106 becomes faster, and the processing process proceeds without delay.

  Further, in order to perform the work collection work in the shortest time by the work collection unit 380, one batch of storage pallet 60 is stocked. Thereby, the storage pallet 60 can be separated into the processed workpiece 30 and the loading pallet which is the pallet 40 on which only the carrier 20 is mounted, and this loading pallet can be sent to the next process quickly. If more stock than one batch is stocked, it is essential to perform the subsequent “collection work → loading work” with higher efficiency, and the system configuration becomes difficult, so one batch is preferable.

  The role of the storage rack 320 is to store four extra pallets at the start of processing. However, the storage rack 320 can be used for other purposes.

  An arbitrary number of supply pallets 50 are placed in the storage rack 320, and the supply pallets 50 are sequentially stored in the supply rack 310 (because one batch is available) via the lower layer line at the start of processing. Alternatively, an arbitrary number of loading pallets are placed in the storage rack 320, and at the start of processing, the loading pallet is loaded by the work loading unit 330 via the lower layer line as the supply pallet 50 in the supply rack 310 (for one batch). Store them in order. By doing so, the number of stocks of the supply pallet 50 can be increased, so that production can be continued even if a small-scale trouble occurs on the circulation line. The storage capacity of the original supply rack 310 can be increased.

  In addition, by securing an empty space in the storage rack 320, when a traffic jam due to a trouble occurs in the collection unit or the loading unit on the downstream side, the processed storage pallet 60 is temporarily retracted here. As a result, the loading operation at the upper part can be advanced, so that the machining process can be advanced. Production can be continued without any loss of productivity if the traffic jam can be recovered during this time.

  For example, if supply pallets 50 for two batches are loaded in the supply rack 310 and the circulation line speed is secured so that the processing and the carrier carry-out / carry-in operation can proceed smoothly, the storage rack 310 can be used. It is not necessary to place a pallet on the rack 320 for operation. The storage rack 320 may be used as described above.

(6) Full automation will be realized and continuous operation will continue stably.
It becomes a fully automated system that realizes work supply work, work collection work, and circulation use of carriers and pallets, and can realize a system that achieves both labor saving and productivity. Store at least two batches of unprocessed workpieces (one processing), and as shown in the circulation line, “collecting processed workpieces → loading unprocessed workpieces → loading to supply rack” Even if the next processing step is started before the “storage” is repeated five times, the unprocessed workpiece can be supplied from the supply rack. Originally, in the design of the takt time, the circulation line operates until the next machining process starts, and a state in which two batches of unprocessed workpieces are always stored in the supply rack is collected or recovered. Even if some trouble occurs in the loading process, there is little risk of impairing productivity.

  Next, a fourth embodiment of the present invention will be described with reference to the drawings. In the 4th form of this invention, as shown in FIG. 17, it is set as the fully automatic system 4 which reversed the workpiece carry-in / out apparatus 300 with respect to the plane processing apparatus 100 left-right. In the present embodiment, the configuration of the work loading / unloading apparatus 300 of the third embodiment which is the above-described fully automated system 1 (supply rack 310, storage rack 320, transport apparatus 330, work loading unit 340, supply transport apparatus 350, traversing The device 360, the transport device for storage 370, the work collecting unit 380, and the traversing device for loading 390) are arranged so as to be horizontally reversed. The functions are exactly the same, and the contents are appropriately selected in terms of arrangement. You may comprise in this way.

  Next, a fifth embodiment of the present invention will be described with reference to the drawings. In the first to fourth embodiments described so far, pallet conveyance is performed. For example, as shown in a loading traverse device 390 that is a configuration example of FIGS. A roller 392 is provided. The roller 392 is driven by a drive system (not shown). By these rollers 392, the pallet 40 is conveyed to the side. The flange 391 prevents the pallet 40 from falling.

  Pallet conveyance by such roller driving is performed by the supply rack 210, the storage rack 220, the conveyance device 230, the work loading unit 240, the supply conveyance device 250, and the storage conveyance device 260 of the first and second embodiments. . In addition, pallet conveyance by such roller driving is performed in the supply rack 310, the storage rack 320, the conveyance device 330, the work loading unit 340, the supply conveyance device 350, the traversing device 360, and the storage in the third and fourth embodiments. This is performed by the transfer device 370, the workpiece collection unit 380, and the loading traverse device 390.

  However, in this embodiment, in place of the pallet conveyance of the first to fourth embodiments described above, the unprocessed workpiece holding carrier, the processed workpiece holding carrier, or the carrier without the workpiece is conveyed alone on the conveyor belt without the pallet. You may make it perform the conveyor conveyance to perform. For example, as shown in the loading traversing apparatus 390 which is a configuration example of FIGS. 19A and 19B, guard portions 393 are provided on both sides, and a conveyor belt 395 moved by rollers 394 is provided in the guard portion 393. The roller 394 is driven by a drive system (not shown). The empty carrier 20 is conveyed laterally by the conveyor belt 395 driven by the roller 394. And the situation where it falls by the guard part 393 is prevented. Further, for example, a connecting portion 400 is disposed between the traversing device and the transport device to eliminate a gap and prevent a drop or the like.

  Such conveyor conveyance is performed by the supply rack 210, the storage rack 220, the conveyance device 230, the work loading unit 240, the supply conveyance device 250, and the storage conveyance device 260 of the first and second embodiments. Further, such conveyor conveyance is performed in the third and fourth forms of the supply rack 310, the storage rack 320, the conveyance device 330, the work loading unit 340, the supply conveyance device 350, the traversing device 360, and the storage conveyance device 370. The workpiece collecting unit 380 and the loading traversing device 390 are used. The unprocessed workpiece holding carrier and the processed workpiece holding carrier are conveyed.

  The workpiece collection unit 380 uses a temporary pallet, and the processed workpiece holding carrier is placed on the temporary placement pallet, so that the workpiece is collected by the same operation as the workpiece collection unit 380 for pallet conveyance. can do. Then, a pallet moving unit (not shown) sends only the carrier from the temporary pallet on which the recovered empty carrier is mounted to the loading traversing device 390. Thereby, it can apply to the apparatus which conveys the workpiece | work collection | recovery part 380 on a conveyor.

In the above, the workpiece carrying-in / out apparatus of this invention and the plane processing system provided with this workpiece carrying-in / out apparatus were demonstrated. The present invention can be variously modified.
The planar processing apparatus 100 described above is a general plane in which a grindstone (which can be said to be a fixed abrasive method) is arranged on the upper and lower surface plates, and the internal gear is not rotated (only the sun gear rotates and the carrier rotates and revolves). Although the description has been made on the premise of the structure of the grinding apparatus, the present invention can also be applied to a flat polishing apparatus such as a lapping machine or a polishing machine (application of loose abrasive grains, application of a polishing pad). Moreover, it can be used not only for double-sided processing but also for single-sided processing.

  According to the present invention as described above, a workpiece loading / unloading device that loads and unloads a carrier and a workpiece in a short time in a short time with respect to the planar processing device, and further, the workpiece is unloaded by the planar processing device and the workpiece loading / unloading device. It is possible to provide a planar machining system that performs batching and machining in a shorter time.

1, 2, 3, 4: Planar processing system 100: Planar processing apparatus 101: Processing apparatus main body 102: Support column 103: Upper surface plate support turning arm 104: Upper surface plate lifting cylinder 105: Upper surface plate 106: Lower surface plate 107: Internal gear 108: Sun gear 109: Internal gear lifting / lowering unit 110: Cover 110a: Notch 111: Carrier transfer robot 112: Transfer platform 200, 200 ': Workpiece loading / unloading device 210: Supply rack 220: Storage rack 230: Transfer device 240: Work loading unit 250: Supplying conveying device 260: Storage conveying device 270: Work collecting unit 300: Work carrying in / out device 310: Supplying rack 320: Storage rack 330: Work loading unit 331: Stacked work 332: Top Plate 333: Handling device 334: Rotating plate 335: Turning table device 336: Key Carrier transport table 337: Laminated workpiece 338: Laminated workpiece gripping device 339: Disc 340: Replenishing transport device 350: Feeding transport device 360: Pallet traversing device 370: Storage transport device 380: Work collecting unit 381: Receiving unit 382 : Lifting cylinder 383: Work receiving base 384: Work collecting device 385: Carrier holding portion 385 a: Holding plate 390: Loading pallet traversing device 391: Head 392, 394: Roller 393: Guard portion 395: Conveyor belt 400: Transit portion 20: Career 30: Work

Claims (8)

The unprocessed workpiece holding carrier, which is a carrier for holding an unprocessed workpiece, and the processed workpiece holding carrier, which is a carrier for holding a processed workpiece, are pallet-transferred to the flat processing apparatus and the unprocessed workpiece holding carrier. An apparatus for carrying in and carrying out the processed workpiece holding carrier,
A supply rack for storing a plurality of supply pallets in which the unprocessed workpiece holding carrier is placed in multiple stages in the vertical direction;
A storage rack for storing a plurality of storage pallets in which the processed work holding carrier is placed in a vertical direction; and
Unloading the supply pallet from the supply rack and transporting the supply pallet to a loading / unloading position with respect to the planar processing apparatus, and a new storage in which the processed work holding carrier is unloaded onto an empty pallet at the loading / unloading position A transfer device for carrying the pallet for storage into the storage rack;
A workpiece carry-in / out device characterized by comprising: The unprocessed workpiece holding carrier, which is a carrier for holding an unprocessed workpiece, and the processed workpiece holding carrier, which is a carrier for holding a processed workpiece, are pallet-transferred to the flat processing apparatus and the unprocessed workpiece holding carrier. An apparatus for carrying in and carrying out the processed workpiece holding carrier,
A supply rack for storing a plurality of supply pallets in which the unprocessed workpiece holding carrier is placed in multiple stages in the vertical direction;
A supply transport device for transporting the supply pallet from the supply rack;
New storage in which the supply pallet received from the supply conveyance device is conveyed to a loading / unloading position with respect to the planar processing device, and the processed work holding carrier is unloaded onto an empty pallet at the loading / unloading position. A traverse device that transports the pallet to the next process,
A transport device for transporting the storage pallet received from the traversing device to the next process;
The processed workpiece is separated from the storage pallet received from the storage transport device, the processed workpiece after separation is collected, and the separated empty carrier is placed on the remaining pallet for new loading. A workpiece collection unit to be a pallet;
A loading traversing device for conveying the loading pallet received from the workpiece recovery unit;
A replenishing transport device for receiving the loading pallet from the loading traversing device;
A workpiece loading unit that loads an unprocessed workpiece onto an empty carrier on the loading pallet of the replenishing transport device to form a new supply pallet;
The replenishing transport device transports and carries in a new supply pallet to the supply rack, whereby the pallet circulates. In the work carrying in / out apparatus according to claim 2,
The workpiece collection unit includes:
A receiving part for supporting a part of the processed work holding carrier on the pallet for storage from below;
A carrier holding portion having a pair of holding plates that project the processed workpiece holding carrier from above at two locations on the storage pallet and on the receiving portion, and hold the position of the carrier;
A workpiece recovery device below the recovery position;
A pallet moving unit that moves only the pallet of the storage pallet;
With
The carrier holding part holds the processed workpiece holding carrier of the storage pallet at two places on the pallet and the receiving part,
Moving the pallet in the horizontal direction to a position where the pallet moving part is released at least below all processed workpieces in the processed workpiece holding carrier;
The workpiece collection device collects the processed workpiece that has been dropped in a batch,
The pallet moving unit returns the pallet to its original position and is combined with the empty carrier after separation and the pallet to form the loading pallet,
The carrier holding part stops holding down,
The pallet moving unit carries the loading pallet to the loading traversing device;
A workpiece loading / unloading device characterized by that. The lower surface plate is provided with an upper and lower surface plate, a non-rotating internal gear by a pin gear, an internal gear lifting and lowering portion that is a part of the internal gear, and a carrier transport robot, and a hole through which the pin gear is inserted. A plane processing apparatus having at least a conveyance table adjacent to
The said work carrying in / out apparatus as described in any one of Claims 1-3,
With
In the pre-processing step, the internal gear elevating part is lowered to form a surface of the lower surface plate, a surface of the transfer table, and a surface of the supply pallet on the traversing device as a continuous plane, The transfer robot carries the unprocessed workpiece holding carrier on a continuous plane from the surface of the supply pallet to the surface of the lower surface plate,
Further, in the post-processing step, the carrier transport robot unloads the processed work holding carrier on a continuous plane from the surface of the lower surface plate, the surface of the transport table and the surface of the empty pallet on the traversing device. Planar processing system characterized by letting An unprocessed workpiece holding carrier that is a carrier for holding an unprocessed workpiece and a processed workpiece holding carrier that is a carrier for holding a processed workpiece are conveyed by conveyor to the planar processing apparatus. An apparatus for carrying in and carrying out the processed workpiece holding carrier,
A supply rack for accommodating a plurality of the workpiece holding carriers in multiple stages in the vertical direction;
A storage rack for storing a plurality of processed workpiece holding carriers in multiple stages in the vertical direction;
The unprocessed work holding carrier is unloaded from the supply rack and conveyed to a loading / unloading position with respect to the planar processing apparatus, and the processed work holding carrier unloaded to the loading / unloading position is loaded into the storage rack. A transport device;
A workpiece carry-in / out device characterized by comprising: An unprocessed workpiece holding carrier that is a carrier for holding an unprocessed workpiece and a processed workpiece holding carrier that is a carrier for holding a processed workpiece are conveyed by conveyor to the planar processing apparatus. An apparatus for carrying in and carrying out the processed workpiece holding carrier,
A supply rack for accommodating a plurality of the workpiece holding carriers in multiple stages in the vertical direction;
A conveying device for conveying the raw workpiece holding carrier from the supply rack;
The traversing device that transports the processed workpiece holding carrier received from the feeding transport device to the loading / unloading position with respect to the planar processing device, and transports the processed workpiece holding carrier unloaded to the loading / unloading position to the next step. When,
A transport device for storage for transporting the processed workpiece holding carrier received from the traversing device to the next process;
A workpiece recovery unit that separates a processed workpiece from the processed workpiece holding carrier received from the storage conveyance device, and collects the processed workpiece after separation;
A traversing device for loading that transports an empty carrier after separation received from the workpiece recovery unit;
A replenishing transport device that receives the empty carrier from the loading traversing device;
A workpiece loading unit that loads a blank workpiece on an empty carrier on the replenishing transport device to form a new blank workpiece holding carrier;
And the replenishing transport device circulates the carrier by transporting and transporting a new unprocessed work holding carrier to the supply rack. In the work carrying in / out apparatus according to claim 6,
The workpiece collection unit includes:
A temporary pallet on which the processed workpiece holding carrier is placed;
A receiving portion for supporting a part of the processed workpiece holding carrier on the pallet for temporary placement from below;
A carrier holding portion having a pair of holding plates that project the processed workpiece holding carrier from above at two locations on the temporary placement pallet and the receiving portion, and hold the position of the carrier;
A workpiece recovery device below the recovery position;
A pallet moving unit that moves only the temporary pallet;
With
The carrier holding part holds the processed workpiece holding carrier of the temporary placing pallet on the temporary placing pallet and the receiving part;
The pallet moving part moves the pallet for temporary placement in a horizontal direction to a position where at least the lower part of all processed works in the processed work holding carrier is released,
The workpiece collection device collects the processed workpiece that has been dropped in a batch,
The pallet moving unit returns the temporary pallet to the original position and integrates it with the empty carrier after separation,
The carrier holding part stops holding down,
The pallet moving unit carries out the separated empty carrier to the loading traversing device;
A workpiece loading / unloading device characterized by that. The lower surface plate is provided with an upper and lower surface plate, a non-rotating internal gear by a pin gear, an internal gear lifting and lowering portion that is a part of the internal gear, and a carrier transport robot, and a hole through which the pin gear is inserted. A plane processing apparatus having at least a conveyance table adjacent to
The workpiece loading / unloading device according to any one of claims 5 to 7,
With
In the pre-processing step, the internal gear elevating unit is lowered to form a surface of the lower surface plate, a surface of the transfer table, and a surface of the traversing device as a continuous plane, and the carrier transport robot Carrying the unprocessed workpiece holding carrier on a continuous plane from the surface of the apparatus to the surface of the lower surface plate,
In the post-processing step, the carrier transport robot unloads the processed workpiece holding carrier on a continuous plane up to the surface of the lower surface plate, the surface of the transport table, and the surface of the traversing device. A featured flat machining system.

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