JP2017022054A5 - - Google Patents
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- Publication number
- JP2017022054A5 JP2017022054A5 JP2015140706A JP2015140706A JP2017022054A5 JP 2017022054 A5 JP2017022054 A5 JP 2017022054A5 JP 2015140706 A JP2015140706 A JP 2015140706A JP 2015140706 A JP2015140706 A JP 2015140706A JP 2017022054 A5 JP2017022054 A5 JP 2017022054A5
- Authority
- JP
- Japan
- Prior art keywords
- ray generator
- generator according
- shape
- design information
- ray
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 238000010894 electron beam technology Methods 0.000 claims description 8
- 239000004020 conductor Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims 4
- 238000007689 inspection Methods 0.000 claims 3
- 238000004519 manufacturing process Methods 0.000 claims 3
- 238000000034 method Methods 0.000 claims 3
- 229910001385 heavy metal Inorganic materials 0.000 claims 2
- 238000000465 moulding Methods 0.000 claims 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 238000012938 design process Methods 0.000 claims 1
- 238000005259 measurement Methods 0.000 claims 1
- 230000008439 repair process Effects 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015140706A JP2017022054A (ja) | 2015-07-14 | 2015-07-14 | Ｘ線発生装置、ｘ線装置、構造物の製造方法、及び構造物製造システム |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015140706A JP2017022054A (ja) | 2015-07-14 | 2015-07-14 | Ｘ線発生装置、ｘ線装置、構造物の製造方法、及び構造物製造システム |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020068579A Division JP7099488B2 (ja) | 2020-04-06 | 2020-04-06 | Ｘ線発生装置、ｘ線装置、構造物の製造方法、及び構造物製造システム |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2017022054A JP2017022054A (ja) | 2017-01-26 |
| JP2017022054A5 true JP2017022054A5 (https=) | 2018-07-26 |
Family
ID=57888345
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015140706A Ceased JP2017022054A (ja) | 2015-07-14 | 2015-07-14 | Ｘ線発生装置、ｘ線装置、構造物の製造方法、及び構造物製造システム |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2017022054A (https=) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6652197B2 (ja) * | 2016-09-21 | 2020-02-19 | 株式会社島津製作所 | Ｘ線管 |
| JP2021067456A (ja) * | 2018-02-22 | 2021-04-30 | 株式会社ニコン | Ｘ線画像生成方法、ｘ線装置および構造物の製造方法 |
| JP7302423B2 (ja) * | 2019-10-10 | 2023-07-04 | 株式会社ニコン | Ｘ線発生装置、ｘ線装置、構造物の製造方法及び構造物製造システム |
| US11996259B2 (en) * | 2019-10-24 | 2024-05-28 | Nova Measuring Instruments Inc. | Patterned x-ray emitting target |
| US11145481B1 (en) | 2020-04-13 | 2021-10-12 | Hamamatsu Photonics K.K. | X-ray generation using electron beam |
| US11101098B1 (en) * | 2020-04-13 | 2021-08-24 | Hamamatsu Photonics K.K. | X-ray generation apparatus with electron passage |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52124890A (en) * | 1976-04-13 | 1977-10-20 | Toshiba Corp | X-ray tube |
| JPS55178962U (https=) * | 1979-06-11 | 1980-12-22 | ||
| US7236568B2 (en) * | 2004-03-23 | 2007-06-26 | Twx, Llc | Miniature x-ray source with improved output stability and voltage standoff |
| JP4832080B2 (ja) * | 2005-12-28 | 2011-12-07 | 株式会社日立メディコ | Ｘ線管及びｘ線撮影装置 |
| JP5896649B2 (ja) * | 2011-08-31 | 2016-03-30 | キヤノン株式会社 | ターゲット構造体及びｘ線発生装置 |
| JP5984403B2 (ja) * | 2012-01-31 | 2016-09-06 | キヤノン株式会社 | ターゲット構造体及びそれを備える放射線発生装置 |
| JP2015041585A (ja) * | 2013-08-23 | 2015-03-02 | 株式会社ニコン | Ｘ線源、ｘ線装置、及び構造物の製造方法 |
| JP2015083932A (ja) * | 2013-10-25 | 2015-04-30 | 株式会社ニコン | Ｘ線測定装置、ｘ線測定方法、及び構造物の製造方法 |
-
2015
- 2015-07-14 JP JP2015140706A patent/JP2017022054A/ja not_active Ceased
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