JP2017022054A5

JP2017022054A5 -

Info

Publication number: JP2017022054A5
Application number: JP2015140706A
Authority: JP
Filing date: 2015-07-14
Publication date: 2018-07-26

Description

本発明の態様によれば、電子線を放出する電子源と、電子線が照射されることでＸ線を発生するターゲットと、電子源からターゲットに至る電子線の進路に配置された部材と、を備え、部材およびターゲットの少なくとも一方の少なくとも一部は、軽元素でかつ導電性を有する材料を含む、Ｘ線発生装置が提供される。
本発明の第１態様によれば、電子線を放出する電子源と、電子源が照射されることでＸ線を発生するターゲットと、電子線が電子源からターゲットに至る進路中の部材と、を備え、部材の少なくとも一部は軽元素でかつ導電性を有する材料を少なくとも一部に含む、Ｘ線発生装置が提供される。 According to an aspect of the present invention, an electron source that emits an electron beam, a target that generates X-rays when irradiated with the electron beam, a member that is disposed in the path of the electron beam from the electron source to the target, There is provided an X-ray generation device including at least a part of at least one of the member and the target including a light element and a conductive material.
According to the first aspect of the present invention, an electron source that emits an electron beam, a target that generates X-rays by irradiation of the electron source, a member in a path from the electron source to the target, There is provided an X-ray generation apparatus including at least a part of a light element and a conductive material.

Claims

An electron source that emits an electron beam;
A target that generates X-rays when irradiated with the electron beam;
A member disposed in a path of the electron beam from the electron source to the target;
With
The X-ray generator, wherein at least a part of at least one of the member and the target includes a light element and a conductive material.

The X-ray generator according to claim 1, wherein the light element includes any one element of carbon, silicon, and aluminum.

The X-ray generator according to claim 1, wherein the material includes at least a part of a material that satisfies a predetermined condition for a gas discharge amount in a vacuum state.

The X-ray generator according to any one of claims 1 to 3, wherein the path includes an irradiation range of a reflected electron beam reflected by the member.

The X-ray generator according to any one of claims 1 to 4, wherein at least a part of the member is an inner surface of a tube that forms the path.

The X-ray generator according to claim 1, wherein at least a part of the member is an opening disposed in the path.

The X-ray generator according to claim 6, wherein the opening is made of heavy metal, and a surface of the heavy metal is covered with the material.

The X-ray generator according to any one of claims 1 to 7, wherein a part of an irradiation surface of the target is covered with the material.

X-ray generator according to any one of claims 1 to 8,
A detector for detecting X-rays emitted from the X-ray generator.

A design process for creating design information on the shape of the structure;
A molding step for creating the structure based on the design information;
Measuring the shape of the produced structure using the X-ray apparatus according to claim 9;
A method for manufacturing a structure, comprising: an inspection step of comparing the shape information obtained in the measurement step with the design information.

The method for manufacturing a structure according to claim 10, further comprising a repair process that is executed based on a comparison result of the inspection process and performs reworking of the structure.

A design device for creating design information on the shape of the structure;
A molding apparatus for producing the structure based on the design information;
The X-ray apparatus according to claim 9 that measures the shape of the manufactured structure,
A structure manufacturing system, comprising: an inspection device that compares shape information related to the shape of the structure obtained by the X-ray apparatus with the design information.