JP2017017895A5 - - Google Patents

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Publication number
JP2017017895A5
JP2017017895A5 JP2015133550A JP2015133550A JP2017017895A5 JP 2017017895 A5 JP2017017895 A5 JP 2017017895A5 JP 2015133550 A JP2015133550 A JP 2015133550A JP 2015133550 A JP2015133550 A JP 2015133550A JP 2017017895 A5 JP2017017895 A5 JP 2017017895A5
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JP
Japan
Prior art keywords
piezoelectric
drive device
fixed
piezoelectric drive
driven
Prior art date
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Application number
JP2015133550A
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English (en)
Japanese (ja)
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JP6617450B2 (ja
JP2017017895A (ja
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Priority to JP2015133550A priority Critical patent/JP6617450B2/ja
Priority claimed from JP2015133550A external-priority patent/JP6617450B2/ja
Priority to US15/194,943 priority patent/US10256749B2/en
Publication of JP2017017895A publication Critical patent/JP2017017895A/ja
Publication of JP2017017895A5 publication Critical patent/JP2017017895A5/ja
Application granted granted Critical
Publication of JP6617450B2 publication Critical patent/JP6617450B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2015133550A 2015-07-02 2015-07-02 圧電駆動装置、モーターおよびロボット Active JP6617450B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2015133550A JP6617450B2 (ja) 2015-07-02 2015-07-02 圧電駆動装置、モーターおよびロボット
US15/194,943 US10256749B2 (en) 2015-07-02 2016-06-28 Piezoelectric actuator, motor, robot, and method of driving piezoelectric actuator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015133550A JP6617450B2 (ja) 2015-07-02 2015-07-02 圧電駆動装置、モーターおよびロボット

Publications (3)

Publication Number Publication Date
JP2017017895A JP2017017895A (ja) 2017-01-19
JP2017017895A5 true JP2017017895A5 (cg-RX-API-DMAC7.html) 2018-08-02
JP6617450B2 JP6617450B2 (ja) 2019-12-11

Family

ID=57831242

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015133550A Active JP6617450B2 (ja) 2015-07-02 2015-07-02 圧電駆動装置、モーターおよびロボット

Country Status (1)

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JP (1) JP6617450B2 (cg-RX-API-DMAC7.html)

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60148384A (ja) * 1984-01-10 1985-08-05 Kanto Jidosha Kogyo Kk 振動波モ−タ
JP3334450B2 (ja) * 1995-10-12 2002-10-15 松下電器産業株式会社 圧電アクチュエータおよびそれを用いた焦電型赤外線センサ
JPH09135585A (ja) * 1995-11-08 1997-05-20 Nikon Corp 振動アクチュエータ
SE0002885D0 (sv) * 2000-08-11 2000-08-11 Piezomotor Uppsala Ab Fine walking actuator
US7355325B2 (en) * 2006-06-15 2008-04-08 Piezomotor Uppsala Ab Wide frequency range electromechanical actuator
WO2012087193A1 (en) * 2010-12-20 2012-06-28 Piezomotor Uppsala Ab Electromechanical motor
DE102011087801B4 (de) * 2011-02-22 2013-04-25 Physik Instrumente (Pi) Gmbh & Co. Kg Ultraschallmotor
JP2013240172A (ja) * 2012-05-14 2013-11-28 Seiko Epson Corp 圧電モーター、ロボットハンド、ロボット、電子部品搬送装置、電子部品検査装置、送液ポンプ、印刷装置、電子時計、投影装置、搬送装置
DE102013107154B4 (de) * 2013-07-08 2020-09-10 Physik Instrumente (Pi) Gmbh & Co. Kg Antriebsvorrichtung

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