JP2017016761A - Short arc type discharge lamp - Google Patents

Short arc type discharge lamp Download PDF

Info

Publication number
JP2017016761A
JP2017016761A JP2015129519A JP2015129519A JP2017016761A JP 2017016761 A JP2017016761 A JP 2017016761A JP 2015129519 A JP2015129519 A JP 2015129519A JP 2015129519 A JP2015129519 A JP 2015129519A JP 2017016761 A JP2017016761 A JP 2017016761A
Authority
JP
Japan
Prior art keywords
electrode
sealed space
heat transfer
plate material
discharge lamp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2015129519A
Other languages
Japanese (ja)
Other versions
JP6098676B2 (en
Inventor
晃明 河尻
Teruaki Kawajiri
晃明 河尻
山本　直樹
Naoki Yamamoto
直樹 山本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Ushio Inc
Original Assignee
Ushio Denki KK
Ushio Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK, Ushio Inc filed Critical Ushio Denki KK
Priority to JP2015129519A priority Critical patent/JP6098676B2/en
Priority to TW105112441A priority patent/TWI687968B/en
Priority to CN201610329557.9A priority patent/CN106298432B/en
Priority to KR1020160069581A priority patent/KR101899205B1/en
Publication of JP2017016761A publication Critical patent/JP2017016761A/en
Application granted granted Critical
Publication of JP6098676B2 publication Critical patent/JP6098676B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/04—Electrodes; Screens; Shields
    • H01J61/06—Main electrodes
    • H01J61/073—Main electrodes for high-pressure discharge lamps
    • H01J61/0732—Main electrodes for high-pressure discharge lamps characterised by the construction of the electrode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/04—Electrodes; Screens; Shields
    • H01J61/06—Main electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/04—Electrodes; Screens; Shields
    • H01J61/06—Main electrodes
    • H01J61/073—Main electrodes for high-pressure discharge lamps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/36—Seals between parts of vessels; Seals for leading-in conductors; Leading-in conductors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/84—Lamps with discharge constricted by high pressure
    • H01J61/86—Lamps with discharge constricted by high pressure with discharge additionally constricted by close spacing of electrodes, e.g. for optical projection

Landscapes

  • Discharge Lamp (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a structure for preventing an electrode from being broken by inhibiting a convection current from being rotated in a circumferential direction in a sealed space when a molten heat transfer medium circulates by convection at a lamp turn-on time, and by preventing a pressing force from acting on the inner wall of the sealed space, specially, on the inner wall of the backward side of an electrode by a plate material, in a short arc type discharge lamp in which a heat transfer medium is encapsulated in a sealed space formed in the electrode located vertically upward and extends in the axial direction of the electrode through the sealed space, and a restriction body is provided which is made of the plate material traversing in the radial direction and restricts the convection current of the molten heat transfer medium from being rotated in the circumferential direction.SOLUTION: The plate material has a gradient at the side edge on the inner wall side of the electrode forming the sealed space. The length from an electrode center axis to the end in the radial direction on the upper side of the plate material is shorter than that from the electrode center axis to the end in the radial direction on the lower side.SELECTED DRAWING: Figure 1

Description

この発明は、ショートアーク型放電ランプに関するものであり、特に、電極本体の密閉空間に伝熱体が封入された電極を有するショートアーク型放電ランプに係わるものである。   The present invention relates to a short arc type discharge lamp, and more particularly to a short arc type discharge lamp having an electrode in which a heat transfer body is sealed in a sealed space of an electrode body.

従来、半導体基板、液晶ディスプレイ用の液晶基板、プリント基板などを露光する露光装置の紫外線照射光源として用いられるショートアーク型放電ランプにおいては、その大出力化が進んでいる。この大出力化により定格消費電力が大きくなると、ランプに流れる電流値は通常大きくなり、これにより電極は電子衝突を受ける量が大きくなって、容易に昇温して溶融してしまうという問題が生じる。
また、電極を構成する材料、例えばタングステンが蒸発して発光管の内表面に付着して黒化してしまい、ランプとしての放射能力が低下するという問題も生じている。 Conventionally, the output of a short arc type discharge lamp used as an ultraviolet irradiation light source of an exposure apparatus that exposes a semiconductor substrate, a liquid crystal substrate for a liquid crystal display, a printed circuit board and the like has been increased. When the rated power consumption increases due to this increase in output, the value of the current flowing through the lamp usually increases, which causes the problem that the amount of the electrode subjected to electron collision increases, and the temperature easily rises and melts. .
In addition, the material constituting the electrode, such as tungsten, evaporates and adheres to the inner surface of the arc tube, resulting in blackening, resulting in a problem that the radiation ability of the lamp is reduced.

このような電極材料の溶融、蒸発といった問題を解決すべく、例えば、特開２０１２−０２８１６８号公報に開示されるような、内部の密閉空間内に伝熱体を封入した電極構造をもつショートアーク型放電ランプが提案されている。
図５、図６にその概略構造が示されていて、図５において、発光管２内に垂直方向に対向配置された一対の電極３，４を有するショートアーク型放電ランプ１が示されている。そして、図６（Ａ）（Ｂ）に示すように、一対の電極のうちの上方に位置する電極（この例では陽極）４の電極本体５は、容器部材６と蓋部材７とからなり、その内部には密閉空間８が形成されている。 In order to solve such a problem of melting and evaporation of the electrode material, for example, a short arc having an electrode structure in which a heat transfer body is enclosed in an enclosed space as disclosed in Japanese Patent Application Laid-Open No. 2012-028168. Type discharge lamps have been proposed.
FIG. 5 and FIG. 6 show the schematic structure, and FIG. 5 shows a short arc type discharge lamp 1 having a pair of electrodes 3 and 4 disposed in the arc tube 2 so as to face each other in the vertical direction. . And as shown to FIG. 6 (A) (B), the electrode main body 5 of the electrode (in this example, anode) 4 located above a pair of electrodes consists of the container member 6 and the lid member 7, A sealed space 8 is formed inside.

そして、前記密閉空間８には、電極４を構成する材料、例えばタングステンよりも熱伝導率が高く、ランプ点灯時に溶融する材料、例えば、金、銀などからなる伝熱体Ｍが封入されている。また、前記密閉空間８には不活性ガスが充填されている。
そして、伝熱体Ｍを封入した電極４の密閉空間８内には、点灯時に溶融した溶融伝熱体Ｍの対流が周方向に回動することを規制する板状の規制体１０が設けられている。
このような構成とすることで、前記伝熱体Ｍは、ランプ点灯時に溶融して、密閉空間８内で対流し、電極本体５の先端の熱を後端側に伝達することによって、電極本体５の軸方向での温度勾配を減少し、その結果、先端の温度を下げることができるものであって、これにより、電極先端の溶融や蒸発を抑えることができるという効果を奏するものである。 The sealed space 8 is filled with a heat transfer body M made of a material that has a higher thermal conductivity than the material constituting the electrode 4, such as tungsten, and melts when the lamp is turned on, such as gold or silver. . The sealed space 8 is filled with an inert gas.
In the sealed space 8 of the electrode 4 in which the heat transfer body M is enclosed, a plate-like restriction body 10 is provided that restricts the convection of the molten heat transfer body M melted at the time of lighting from rotating in the circumferential direction. ing.
By adopting such a configuration, the heat transfer body M melts when the lamp is turned on, convects in the sealed space 8, and transfers the heat at the front end of the electrode main body 5 to the rear end side. Thus, the temperature gradient in the axial direction of 5 can be reduced, and as a result, the temperature of the tip can be lowered, and thereby the effect of suppressing melting and evaporation of the electrode tip can be achieved.

そして更に、前記密閉空間８内には規制体１０が設けられていることにより、点灯時に溶融した溶融伝熱体Ｍが密閉空間８内で対流するとき、この対流が周方向に回動することが規制・防止されるので、対流の移動による電極の同一箇所での温度変化が生じることが少なくなり、温度変化に基づく高温クリープ変形が発生することがなく、電極先端の溶融・蒸発防止機能が一層十全なものとなる。   Further, since the regulating body 10 is provided in the sealed space 8, when the molten heat transfer body M melted at the time of lighting is convected in the sealed space 8, the convection is rotated in the circumferential direction. Therefore, the temperature change at the same location of the electrode due to the movement of convection is less likely to occur, the high temperature creep deformation based on the temperature change does not occur, and the function of preventing melting and evaporation of the electrode tip is achieved. It will be even more thorough.

ところで、伝熱体はランプ点灯により溶融するが、ランプ消灯時には凝固し、これが密閉空間の内壁に付着した状態となる。この凝固した伝熱体は、再度のランプ点灯により再び溶融するが、その際、伝熱体は、高温となった電極先端側（下方側）から溶融していくことになる。その時、伝熱体の上方側はいまだ溶融していない状態であり、これが溶融するまでには、溶融伝熱体によって密閉空間を構成する内壁に圧力が作用する。
この時、板状規制体は、図７に示すように、その姿勢が安定せず、どちらかに傾いた状態となることがあり、肩部が内壁に当接してこれを押圧する。
電極の先端側（下方側）はより高温状態となっていて、比較的延性があるので、溶融伝熱体の圧力や規制体による押圧作用に対して抵抗力はあるが、これよりも低い温度状態にある電極後方側（上方側）においては延性が乏しく、溶融伝熱体の圧力や規制体の押圧力によってクラックが入ってしまうことがある。一旦クラックが生じると、これを起点として溶融伝熱体の圧力により一気に電極が破壊されるといったおそれがあった。 By the way, the heat transfer body melts when the lamp is turned on, but is solidified when the lamp is turned off, and is attached to the inner wall of the sealed space. The solidified heat transfer body is melted again when the lamp is turned on again. At this time, the heat transfer body is melted from the electrode tip side (lower side) that has reached a high temperature. At this time, the upper side of the heat transfer body is not yet melted, and pressure is applied to the inner wall constituting the sealed space by the melt heat transfer body until the heat transfer body melts.
At this time, as shown in FIG. 7, the plate-shaped restricting body is not stable in posture and may be inclined to either side, and the shoulder portion presses against the inner wall.
Since the tip side (lower side) of the electrode is in a higher temperature state and relatively ductile, it has resistance to the pressure of the molten heat transfer body and the pressing action by the regulator, but the temperature is lower than this On the rear side (upper side) of the electrode in the state, the ductility is poor, and cracks may occur due to the pressure of the molten heat transfer body or the pressing force of the regulating body. Once a crack occurs, there is a risk that the electrode may be destroyed at once due to the pressure of the molten heat transfer body starting from this crack.

特開２０１２−０２８１６８号公報JP 2012-028168 A

この発明は、上記従来技術の問題点に鑑みて、垂直上方にある電極に形成された密閉空間に伝熱体が封入されるとともに、前記密閉空間内を電極の軸方向に伸びるとともに、径方向に横断する板材からなり、溶融伝熱体の対流が周方向に回動することを規制する規制体が設けられているショートアーク型放電ランプにおいて、ランプ点灯時に溶融した伝熱体が対流するときに、該対流が密閉空間内で周方向に回動することを抑制するとともに、前記板材によって密閉空間の内壁、特に、電極後方側の内壁に押圧力が作用することがないようにして電極の破損を防止した構造を提供しようとするものである。   In the present invention, in view of the above-mentioned problems of the prior art, a heat transfer body is enclosed in a sealed space formed in the vertically upper electrode, and the inside of the sealed space extends in the axial direction of the electrode. In a short arc type discharge lamp, which is made of a plate material that crosses the surface and is provided with a restricting body that restricts the convection of the molten heat transfer body from rotating in the circumferential direction, In addition, it is possible to prevent the convection from rotating in the circumferential direction in the sealed space and to prevent the pressing force from acting on the inner wall of the sealed space, particularly the inner wall on the rear side of the electrode, by the plate material. It is intended to provide a structure that prevents damage.

上記課題を解決するために、この発明では、前記板材は、前記密閉空間を形成する前記電極の内壁側の側縁において勾配が付されていて、該板材の上辺での電極中心軸から半径方向の端部までの長さが、下辺での電極中心軸から半径方向の端部までの長さより小さくなるようにされていることを特徴とする。
また、前記板材の内壁側の側縁における前記下辺側には、前記電極の軸方向に沿った平行部分を有することを特徴とする。 In order to solve the above-mentioned problem, in the present invention, the plate material is provided with a gradient at a side edge on the inner wall side of the electrode that forms the sealed space, and is radial from the electrode central axis on the upper side of the plate material. The length to the end of the electrode is smaller than the length from the electrode center axis on the lower side to the end in the radial direction.
Moreover, it has the parallel part along the axial direction of the said electrode in the said lower side in the side edge by the side of the inner wall of the said board | plate material, It is characterized by the above-mentioned.

本発明によれば、電極の密閉空間内に設けられた板状規制体の内壁側の側縁に勾配をつけて上辺側の長さを下辺側の長さよりも小さくしたことにより、電極の密閉空間の後方側においては、板状規制体の姿勢に変化があっても、上辺側において内壁に当接することがなく、比較的温度が低く延性の低い電極後方部位で板材による押圧力が作用することがないので、クラックが入ることがない。
また、板状規制体の側縁の下辺側に電極の軸方向に沿った平行部分を有するので、密閉空間内での板状規制体の姿勢がある程度維持されて傾きが抑制され、電極への押圧力が軽減される。 According to the present invention, since the side edge on the inner wall side of the plate-shaped regulating body provided in the sealed space of the electrode is provided with a gradient so that the length on the upper side is smaller than the length on the lower side, the sealing of the electrode On the rear side of the space, even if there is a change in the posture of the plate-like regulating body, the upper side does not come into contact with the inner wall, and the pressing force by the plate material acts on the rear portion of the electrode having a relatively low temperature and low ductility. Since there is no such thing, there is no crack.
In addition, since it has a parallel portion along the axial direction of the electrode on the lower side of the side edge of the plate-like restricting body, the posture of the plate-like restricting body in the sealed space is maintained to some extent, the inclination is suppressed, and The pressing force is reduced.

本発明に係る放電ランプの電極の断面図（Ａ）、その横断面図（Ｂ）。Sectional drawing (A) of the electrode of the discharge lamp which concerns on this invention, and its cross-sectional view (B). 本発明の規制体のみを表す正面図。The front view showing only the control body of this invention. 他の実施例の断面図。Sectional drawing of another Example. 更に他の実施例の正面図。Furthermore, the front view of another Example. 従来のショートアーク型放電ランプ。Conventional short arc discharge lamp. 従来の電極の断面図（Ａ）、その横断面図（Ｂ）。Sectional drawing (A) of the conventional electrode, and the cross-sectional view (B). 従来の電極の不具合を説明する断面図。Sectional drawing explaining the malfunction of the conventional electrode.

図１はこの発明のショートアーク型放電ランプの電極構造を示し、図１（Ａ）はその縦断面図、図１（Ｂ）はその横断面図である。
図において、電極（陽極）４は、容器部材６と蓋部材７とからなる電極本体５を有し、該電極本体５内には密閉空間８が形成されている。そして、該密閉空間８内には、タングステンなどの電極材料よりも熱伝導率の高い伝熱体Ｍが封入されている。該伝熱体Ｍは、例えば金や銀などの金属からなり、電極材料よりも融点が低く、ランプ点灯時には密閉空間８内で溶融する。
そして、前記電極４の密閉空間８内には、板状の規制体１０が挿入されている。該規制体１０は、密閉空間８の略中心軸上を長手方向に伸び、かつ、径方向に横断するように設けられていて、電極４の密閉空間８の内径と略同一の寸法を有する。なお、規制体１０の中心軸は厳密な意味で電極４の中心軸上に位置しなければならないわけではない。 FIG. 1 shows an electrode structure of a short arc type discharge lamp according to the present invention. FIG. 1 (A) is a longitudinal sectional view thereof, and FIG. 1 (B) is a transverse sectional view thereof.
In the drawing, an electrode (anode) 4 has an electrode body 5 composed of a container member 6 and a lid member 7, and a sealed space 8 is formed in the electrode body 5. In the sealed space 8, a heat transfer body M having a higher thermal conductivity than that of an electrode material such as tungsten is enclosed. The heat transfer body M is made of a metal such as gold or silver, has a melting point lower than that of the electrode material, and melts in the sealed space 8 when the lamp is turned on.
A plate-shaped regulating body 10 is inserted into the sealed space 8 of the electrode 4. The restricting body 10 is provided so as to extend in the longitudinal direction substantially on the central axis of the sealed space 8 and to traverse in the radial direction, and has substantially the same dimensions as the inner diameter of the sealed space 8 of the electrode 4. The central axis of the regulating body 10 does not have to be positioned on the central axis of the electrode 4 in a strict sense.

図２に規制体１０の詳細が示されていて、図２（Ａ）は側面図、図２（Ｂ）はその上面図である。この実施例では、規制体１０は図１（Ｂ），図２（Ｂ）でも分かるように、互いに交差する板部材１１，１２からなる。
そして、これら板部材１１，１２は、前記密閉空間８を形成する前記電極４の内壁側の側縁１１ａ、１２ａにおいて勾配が付されていて、前記板材１１，１２の上辺１１ｂ、１２ｂでの電極中心軸Ｘから半径方向の端部までの長さＬ１が、下辺１１ｃ，１２ｃでの電極中心軸Ｘから半径方向の端部までの長さＬ２より小さくなる（Ｌ１＜Ｌ２）ようにされている。
なお、ここで、板部材の下辺とは垂直配置された電極の先端側に位置する辺をいい、上辺とはその反対側、つまり、電極の根元側に位置する辺をいう。 FIG. 2 shows details of the regulating body 10, FIG. 2 (A) is a side view, and FIG. 2 (B) is a top view thereof. In this embodiment, as shown in FIGS. 1B and 2B, the restricting body 10 is composed of plate members 11 and 12 that intersect each other.
The plate members 11 and 12 are provided with gradients at the side edges 11a and 12a on the inner wall side of the electrode 4 forming the sealed space 8, and the electrodes on the upper sides 11b and 12b of the plate materials 11 and 12 are provided. The length L1 from the central axis X to the end in the radial direction is made smaller than the length L2 from the electrode central axis X to the end in the radial direction on the lower sides 11c and 12c (L1 <L2). .
Here, the lower side of the plate member refers to the side located on the tip side of the vertically arranged electrode, and the upper side refers to the opposite side, that is, the side located on the base side of the electrode.

図３に規制体１０の異なる実施例が示されていて、図３（Ａ）では、規制体１０は、上面視で、略Ｔ字型に交差する一対の板材１３，１４からなる。図３（Ｂ）では、規制体１０は、３方に等角度で広がる板部材１５，１６，１７からなる。これらいずれの場合の板材１３〜１７も電極４の長手方向に伸びると共に、径方向に横断する形状とされていて、上辺での電極中心軸Ｘから半径方向の端部までの長さＬ１が、下辺での電極中心軸Ｘから半径方向の端部までの長さＬ２より小さくなる（Ｌ１＜Ｌ２）ようにされている。   FIG. 3 shows a different embodiment of the restricting body 10. In FIG. 3A, the restricting body 10 is composed of a pair of plate members 13 and 14 that intersect in a substantially T shape when viewed from above. In FIG. 3B, the regulating body 10 is composed of plate members 15, 16, and 17 that spread in three directions at equal angles. The plate members 13 to 17 in any of these cases also extend in the longitudinal direction of the electrode 4 and have a shape transverse to the radial direction, and the length L1 from the electrode center axis X to the end in the radial direction on the upper side is: The length is smaller than the length L2 from the electrode central axis X to the end in the radial direction on the lower side (L1 <L2).

上記実施例によれば、規制体の板材が、その側縁において勾配が付され、上辺の長さＬ１が、下辺の長さＬ２より小さくなるようにされているので、上辺近傍においては、密閉空間の内壁面との間に大きめの間隙が形成され、点灯時に、流動する溶融伝熱体の影響を受けて規制体に傾きが生じても、規制体の板材の上方の肩部が壁面に当接して押圧することがなく、壁面が損傷するようなことがない。特に、点灯初期においては、電極先端側が高温となり凝固していた伝熱体が溶融を開始していくとき、電極の軸方向の中間部位や後端側では温度が先端側ほどには高温とならず、金属延性が高い状態とならない時に、規制体の板材の上辺の角部が、密閉空間を構成する容器部材の内壁に押し当てられにくくなる。これにより、点灯時の熱応力によって電極が破壊されにくくなるものである。
なお、板材の下方肩部が密閉空間の内壁面に当接することがあっても、電極の先端側は点灯時に高温となっており、後端側に比べて十分な延性を持つことから、損傷する危険性は低い。 According to the above embodiment, the plate member of the regulating body is provided with a gradient at the side edge thereof, and the length L1 of the upper side is made smaller than the length L2 of the lower side. A large gap is formed between the inner wall of the space, and even when the regulator is tilted due to the influence of the flowing molten heat transfer element during lighting, the upper shoulder of the plate of the regulator is on the wall. There is no contact and pressing, and the wall surface is not damaged. In particular, at the beginning of lighting, when the heat transfer body that has solidified and started to melt at the tip end of the electrode starts to melt, the temperature at the intermediate part in the axial direction of the electrode and at the rear end becomes as high as the tip end. When the metal ductility is not high, the corners on the upper side of the plate of the restricting body are not easily pressed against the inner wall of the container member constituting the sealed space. This makes it difficult for the electrode to be destroyed by thermal stress during lighting.
Even if the lower shoulder of the plate may abut against the inner wall surface of the sealed space, the tip side of the electrode is hot during lighting and has sufficient ductility compared to the rear end side, causing damage. The risk of doing is low.

なお、規制体の板材の側縁での傾斜は直線的である必要はなく曲線的な傾斜でも構わない。また、傾斜する角度は、傾斜が大きいほど規制体が内壁を傷つけるおそれがなくなるが、それとともに溶融伝熱体の対流の周方向への回動を規制する作用も低下するため、例えば、上辺長さＬ１／下辺長さＬ２が、０．４５〜０．９４となることが好ましい。
また、径方向外方に突出する板材の枚数は３枚以上であれば密閉空間内にセットした時に３点支持することができるので好ましいが、１枚であっても構わない。更には、規制体の交差する板材部分は、電極中心軸に直交する断面において点対称でなくてもかまわない。
さらに、板材の側縁に勾配を設けることによって、重心が規制体の下方に移動し、密閉空間内で姿勢が安定しやすくなるという効果もある。 In addition, the inclination at the side edge of the plate member of the regulating body does not need to be linear, and may be a curved inclination. In addition, the angle of inclination is such that the greater the inclination, the more likely that the restricting body will damage the inner wall, but the effect of restricting the rotation of the molten heat transfer body in the circumferential direction also decreases. The length L1 / lower side length L2 is preferably 0.45 to 0.94.
Further, it is preferable that the number of the plate members protruding outward in the radial direction is three or more because it can be supported at three points when set in the sealed space, but may be one. Furthermore, the plate member portions where the regulating bodies intersect may not be point-symmetric in a cross section perpendicular to the electrode central axis.
Furthermore, by providing a gradient at the side edge of the plate material, the center of gravity moves below the restricting body, and the posture is easily stabilized in the sealed space.

図４に更に他の実施例が示されている。この実施例では、規制体１０を構成する板材１１，１２における側縁１１ａ，１２ａの下辺側の一定領域に、勾配を付さずに、電極軸方向に沿った平行部分１１ｄ，１２ｄを形成してある。
その他の構成は図１、図２に示す実施例と同様である。この平行部１１ｄ，１２ｄは、密閉空間８の内壁とわずかな距離を隔てて接近しており、規制体１０の姿勢が電極中心軸に沿った状態から傾斜しようとすると、この直線延長部が内壁によって動きを規制されることで姿勢が安定する。 FIG. 4 shows still another embodiment. In this embodiment, parallel portions 11d and 12d along the electrode axis direction are formed in a certain region on the lower side of the side edges 11a and 12a of the plate members 11 and 12 constituting the regulating body 10 without giving a gradient. It is.
Other configurations are the same as those of the embodiment shown in FIGS. The parallel portions 11d and 12d are close to the inner wall of the sealed space 8 with a slight distance, and when the attitude of the restricting body 10 is inclined from the state along the electrode center axis, the linear extension portion becomes the inner wall. The posture is stabilized by restricting the movement.

本発明の効果を実証するために以下の実験を行った。
ランプの仕様は以下の通り。
＜発光管＞
材料：石英ガラス
電極間距離：６ｍｍ
封入物：水銀２．０ｍｇ／ｃｃ、アルゴン１００ｋＰａ
＜陽極＞
材料：タングステン
胴部（容器部材）の外径：２５ｍｍ
電極本体内容積：６ｃｍ３
肉厚：５．５ｍｍ
伝熱体：（銀）４．７ｃｍ３
封入ガス：（アルゴン）１００ｋＰａ
＜点灯姿勢＞
陽極を上方にした垂直点灯
＜定格＞
定格電流：１５０Ａ
定格電力：５ｋＷ
＜規制体＞
長さ：１６ｍｍ
上辺の長さ：７ｍｍ
下辺の長さ：１３．８ｍｍ
厚さ：２ｍｍ
＜点灯試験概要＞
・放電ランプについての点灯点滅試験
・定格電力にて点灯１５分−消灯１２０分×３０セット
試験終了後、電極を解体して規制体を確認したところ破損しておらず、
電極も破壊されていなかった。 In order to demonstrate the effect of the present invention, the following experiment was conducted.
The specifications of the lamp are as follows.
<Luminescent tube>
Material: Quartz glass Distance between electrodes: 6mm
Inclusion material: mercury 2.0 mg / cc, argon 100 kPa
<Anode>
Material: Tungsten trunk (container) outer diameter: 25mm
Electrode body internal volume: 6 cm 3
Wall thickness: 5.5mm
Heat transfer body: (Silver) 4.7 cm 3
Filled gas: (Argon) 100 kPa
<Lighting posture>
Vertical lighting with anode on top <Rating>
Rated current: 150A
Rated power: 5kW
<Regulatory body>
Length: 16mm
Upper side length: 7mm
Lower side length: 13.8mm
Thickness: 2mm
<Lighting test overview>
・ Lighting and blinking test for discharge lamp ・ Lighting at rated power 15 minutes-Lights off 120 minutes × 30 sets After the test was completed, the electrode was disassembled and the regulation body was checked.
The electrode was not destroyed.

以上のように、本発明によれば、電極本体の密閉空間に伝熱体を封入するとともに、溶融伝熱体の対流が周方向に回動することを規制する板状の規制体を設けた電極を有するショートアーク型放電ランプにおいて、前記規制体を構成する板材は、前記密閉空間を形成する前記電極の内壁側の側縁において勾配が付されていて、前記板材の上辺での電極中心軸から半径方向の端部までの長さが、下辺での電極中心軸から半径方向の端部までの長さより小さくなるようにされているので、溶融伝熱体によって板材が傾くようなことがあっても、該板材の上方肩部が密閉空間の内壁に当接して押圧することがなく、電極を損傷することが防止できるものである。   As described above, according to the present invention, the heat transfer body is enclosed in the sealed space of the electrode body, and the plate-shaped restriction body that restricts the convection of the molten heat transfer body from rotating in the circumferential direction is provided. In the short arc type discharge lamp having an electrode, the plate member constituting the regulating body is provided with a gradient at a side edge on the inner wall side of the electrode forming the sealed space, and the electrode central axis on the upper side of the plate member Since the length from the electrode end to the radial end is smaller than the length from the electrode center axis on the lower side to the radial end, the plate may be inclined by the molten heat transfer element. However, the upper shoulder portion of the plate material does not contact and press against the inner wall of the sealed space, and the electrode can be prevented from being damaged.

１ ショートアーク型放電ランプ
２ 発光管
３ 陰極
４ 陽極
５ 陽極本体
６ 容器部材
７ 蓋部材
８ 密閉空間
１０ 規制体
１１〜１７ 板材
１１ａ 側縁
１１ｂ 上辺
１１ｃ 下辺
１１ｄ 平行部
１２ａ 側縁
１２ｂ 上辺
１２ｃ 下辺
１２ｄ 平行部
Ｍ 伝熱体
Ｘ 電極中心軸


DESCRIPTION OF SYMBOLS 1 Short arc type discharge lamp 2 Arc tube 3 Cathode 4 Anode 5 Anode main body 6 Container member 7 Cover member 8 Sealed space 10 Regulator 11-11 17 Plate material 11a Side edge 11b Upper side 11c Lower side 11d Parallel part 12a Side edge 12b Upper side 12c Lower side 12d Parallel part M Heat transfer element X Electrode center axis


Claims (2)

発光管の内部に垂直に対向する一対の電極を有し、垂直上方にある電極に形成された密閉空間に伝熱体が封入されるとともに、前記密閉空間内を電極の軸方向に延びるとともに、径方向に延びる板材からなり、溶融伝熱体の対流が周方向に回動することを規制する規制体が設けられているショートアーク型放電ランプにおいて、
前記板材は、前記密閉空間を形成する前記電極の内壁側の側縁において勾配が付されていて、
前記板材の上辺での電極中心軸から半径方向の端部までの長さが、下辺での電極中心軸から半径方向の端部までの長さより小さくなるようにされていることを特徴とするショートアーク型放電ランプ。 The arc tube has a pair of vertically opposed electrodes, and a heat transfer body is enclosed in a sealed space formed in the vertically upper electrode, and extends in the sealed space in the axial direction of the electrode, In a short arc type discharge lamp comprising a plate material extending in the radial direction and provided with a regulating body that regulates rotation of the convection of the molten heat transfer body in the circumferential direction,
The plate material is provided with a gradient at a side edge on the inner wall side of the electrode forming the sealed space,
The short from the electrode central axis to the radial end on the upper side of the plate material is shorter than the length from the electrode central axis to the radial end on the lower side Arc type discharge lamp. 前記板材の内壁側の側縁における前記下辺側には、前記電極の軸方向に沿った平行部分を有することを特徴とする請求項１に記載のショートアーク型放電ランプ。


2. The short arc discharge lamp according to claim 1, wherein a parallel portion along an axial direction of the electrode is provided on the lower side of the side edge on the inner wall side of the plate material.


JP2015129519A 2015-06-29 2015-06-29 Short arc type discharge lamp Active JP6098676B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2015129519A JP6098676B2 (en) 2015-06-29 2015-06-29 Short arc type discharge lamp
TW105112441A TWI687968B (en) 2015-06-29 2016-04-21 Short arc discharge lamp
CN201610329557.9A CN106298432B (en) 2015-06-29 2016-05-18 Short arc discharge lamp
KR1020160069581A KR101899205B1 (en) 2015-06-29 2016-06-03 Short arc type discharge lamp

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015129519A JP6098676B2 (en) 2015-06-29 2015-06-29 Short arc type discharge lamp

Publications (2)

Publication Number Publication Date
JP2017016761A true JP2017016761A (en) 2017-01-19
JP6098676B2 JP6098676B2 (en) 2017-03-22

Family

ID=57651306

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015129519A Active JP6098676B2 (en) 2015-06-29 2015-06-29 Short arc type discharge lamp

Country Status (4)

Country Link
JP (1) JP6098676B2 (en)
KR (1) KR101899205B1 (en)
CN (1) CN106298432B (en)
TW (1) TWI687968B (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020193121A1 (en) * 2019-03-25 2020-10-01 Osram Gmbh Electrode for a gas discharge lamp, and gas discharge lamp
KR20220078479A (en) 2020-12-03 2022-06-10 우시오덴키 가부시키가이샤 Discharge lamp, discharge lamp electrode and discharge lamp electrode manufacturing method
KR20220169395A (en) 2021-06-18 2022-12-27 우시오덴키 가부시키가이샤 Discharge lamp and electrode used in the discharge lamp
JP7491646B2 (en) 2020-09-29 2024-05-28 株式会社オーク製作所 Discharge lamp and method of manufacturing electrode for discharge lamp

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7115993B2 (en) 2019-01-27 2022-08-09 未来工業株式会社 Wiring/piping support

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012028168A (en) * 2010-07-23 2012-02-09 Ushio Inc Short arc type discharge lamp
JP2014127364A (en) * 2012-12-26 2014-07-07 Orc Manufacturing Co Ltd Discharge lamp

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4042588B2 (en) * 2003-02-27 2008-02-06 ウシオ電機株式会社 Discharge lamp
JP4993115B2 (en) * 2007-12-03 2012-08-08 ウシオ電機株式会社 High pressure discharge lamp
JP5303923B2 (en) * 2007-12-20 2013-10-02 ウシオ電機株式会社 Discharge lamp
JP5024730B2 (en) * 2007-12-20 2012-09-12 ウシオ電機株式会社 Discharge lamp
JP5167980B2 (en) * 2008-06-21 2013-03-21 ウシオ電機株式会社 Discharge lamp
JP6180716B2 (en) * 2012-09-25 2017-08-16 株式会社オーク製作所 Discharge lamp

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012028168A (en) * 2010-07-23 2012-02-09 Ushio Inc Short arc type discharge lamp
JP2014127364A (en) * 2012-12-26 2014-07-07 Orc Manufacturing Co Ltd Discharge lamp

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020193121A1 (en) * 2019-03-25 2020-10-01 Osram Gmbh Electrode for a gas discharge lamp, and gas discharge lamp
JP7491646B2 (en) 2020-09-29 2024-05-28 株式会社オーク製作所 Discharge lamp and method of manufacturing electrode for discharge lamp
KR20220078479A (en) 2020-12-03 2022-06-10 우시오덴키 가부시키가이샤 Discharge lamp, discharge lamp electrode and discharge lamp electrode manufacturing method
US11482406B2 (en) 2020-12-03 2022-10-25 Ushio Denki Kabushiki Kaisha Discharge lamp, discharge lamp electrode, and discharge lamp electrode manufacturing method
KR20220169395A (en) 2021-06-18 2022-12-27 우시오덴키 가부시키가이샤 Discharge lamp and electrode used in the discharge lamp

Also Published As

Publication number Publication date
KR20170002291A (en) 2017-01-06
CN106298432A (en) 2017-01-04
CN106298432B (en) 2019-07-09
TWI687968B (en) 2020-03-11
JP6098676B2 (en) 2017-03-22
KR101899205B1 (en) 2018-09-14
TW201701319A (en) 2017-01-01

Similar Documents

Publication Publication Date Title
JP6098676B2 (en) Short arc type discharge lamp
JP4998840B2 (en) Short arc type discharge lamp
JP3994880B2 (en) Discharge lamp
JP4548290B2 (en) Discharge lamp
JP4993115B2 (en) High pressure discharge lamp
JP4042588B2 (en) Discharge lamp
JP4161815B2 (en) Discharge lamp
JP5211712B2 (en) Discharge lamp
JP2005071972A (en) Electrode for cold cathode tube, and manufacturing method of the same
JP7032859B2 (en) Discharge lamp and manufacturing method of discharge lamp
JP6180716B2 (en) Discharge lamp
US20090039785A1 (en) Discharge lamp
JP5273191B2 (en) Discharge lamp
TW201703102A (en) Discharge lamp capable of preventing lack of emitter materials and inhibiting flicker of the arc discharge
JP2007128755A (en) Short-arc mercury lamp
JP6263770B2 (en) Short arc type discharge lamp
JP5527248B2 (en) Short arc type discharge lamp
JP2004265663A (en) Discharge lamp
JP2006179421A (en) Short arc type high-pressure discharge lamp
JP2022055818A (en) Discharge lamp and manufacturing method for electrodes for the same
JP2005340136A (en) Short arc discharge lamp
JP2007242469A (en) Discharge lamp
JP2003092081A (en) Short arc type very high pressure discharge lamp

Legal Events

Date Code Title Description
TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20170124

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20170206

R150 Certificate of patent or registration of utility model

Ref document number: 6098676

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250