JP5273191B2 - Discharge lamp - Google Patents

Discharge lamp Download PDF

Info

Publication number
JP5273191B2
JP5273191B2 JP2011082904A JP2011082904A JP5273191B2 JP 5273191 B2 JP5273191 B2 JP 5273191B2 JP 2011082904 A JP2011082904 A JP 2011082904A JP 2011082904 A JP2011082904 A JP 2011082904A JP 5273191 B2 JP5273191 B2 JP 5273191B2
Authority
JP
Japan
Prior art keywords
electrode
sealed space
tip
discharge lamp
surface roughness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2011082904A
Other languages
Japanese (ja)
Other versions
JP2012221582A (en
Inventor
久和 家氏
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Original Assignee
Ushio Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK filed Critical Ushio Denki KK
Priority to JP2011082904A priority Critical patent/JP5273191B2/en
Priority to DE201210006106 priority patent/DE102012006106A1/en
Publication of JP2012221582A publication Critical patent/JP2012221582A/en
Application granted granted Critical
Publication of JP5273191B2 publication Critical patent/JP5273191B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00Gas-discharge or vapour-discharge lamps
    • H01J61/84Lamps with discharge constricted by high pressure
    • H01J61/86Lamps with discharge constricted by high pressure with discharge additionally constricted by close spacing of electrodes, e.g. for optical projection
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00Gas-discharge or vapour-discharge lamps
    • H01J61/02Details
    • H01J61/04Electrodes; Screens; Shields
    • H01J61/06Main electrodes
    • H01J61/073Main electrodes for high-pressure discharge lamps

Landscapes

  • Discharge Lamp (AREA)

Abstract

The discharge lamp has an arc tube in which a pair of electrodes (12) is arranged. A sealed space (18) is formed in inner wall (2) of electrode. A heat conductor (m) is provided in a tip end face (2a) of inner wall of electrode. A side surface (2b) is located adjacent to the tip end face of the electrode. The surface roughness of the tip end face is lesser than the surface roughness of the side surface. The surface roughness of tip end face is 0.58mu m.

Description

この発明は、放電ランプに関するものであり、特に、電極本体の密閉空間に伝熱体が封入された電極を有する放電ランプに係わるものである。   The present invention relates to a discharge lamp, and particularly to a discharge lamp having an electrode in which a heat transfer body is sealed in a sealed space of an electrode body.

従来、半導体基板、液晶ディスプレイ用の液晶基板、プリント基板などを露光する露光装置の紫外線照射光源として用いられる放電ランプにおいては、その大出力化が進んでいる。この大出力化により定格消費電力が大きくなると、ランプに流れる電流値は通常大きくなり、これにより電極は電子衝突を受ける量が大きくなって、容易に昇温して溶融してしまうという問題が生じる。
また、電極を構成する材料、例えばタングステンが蒸発して発光管の内表面に付着して黒化してしまい、ランプとしての放射能力が低下するという問題も生じている。
2. Description of the Related Art Conventionally, the output of a discharge lamp used as an ultraviolet irradiation light source of an exposure apparatus that exposes a semiconductor substrate, a liquid crystal substrate for a liquid crystal display, a printed circuit board, and the like has been increasing. When the rated power consumption increases due to this increase in output, the value of the current flowing through the lamp usually increases, which causes the problem that the amount of the electrode subjected to electron collision increases, and the temperature easily rises and melts. .
In addition, the material constituting the electrode, such as tungsten, evaporates and adheres to the inner surface of the arc tube, resulting in blackening, resulting in a problem that the radiation ability of the lamp is reduced.

このような電極材料の溶融、蒸発といった問題を解決すべく、例えば、特開2004−6246号公報に開示されるような電極構造をもった放電ランプが提案されている。
この放電ランプにおいては、電極本体に形成した密閉内部空間に、電極材料よりも熱伝達率が高く、ランプ点灯時に溶融する伝熱体が封入された電極を用いるものである。
In order to solve such problems as melting and evaporation of the electrode material, for example, a discharge lamp having an electrode structure as disclosed in Japanese Patent Application Laid-Open No. 2004-6246 has been proposed.
In this discharge lamp, an electrode is used in which a sealed internal space formed in the electrode body has a heat transfer coefficient higher than that of the electrode material and is filled with a heat transfer material that melts when the lamp is turned on.

この従来技術を図2、3に基づいて説明すると以下の通りである。
図2において、発光管10内に対向配置された一対の電極11、12を有する放電ランプ1が示されており、その電極のうちの少なくとも一方の電極(この例では陽極)12の電極本体15は、図3に示されるように、容器部材16と蓋部材17とからなり、その内部には密閉空間18が形成されている。
そして、該密閉空間18には、電極12を構成する材料、例えばタングステンよりも熱伝導率が高く、ランプ点灯時に溶融する材料、例えば、金、銀などからなる伝熱体Mが封入されている。また、前記密閉空間18には不活性ガスが充填されている。
前記伝熱体Mは、ランプ点灯時に溶融して、密閉空間18内で対流し、電極本体15の先端の熱を該電極本体15の後端側に伝達することによって、電極本体15の軸方向での温度勾配を減少し、その結果、先端の温度を下げることができるものであって、これにより、電極先端の溶融や蒸発を抑えることができるという効果を奏するものである。
This prior art will be described with reference to FIGS.
FIG. 2 shows a discharge lamp 1 having a pair of electrodes 11, 12 arranged opposite to each other in an arc tube 10, and an electrode body 15 of at least one of the electrodes (in this example, an anode) 12. 3 includes a container member 16 and a lid member 17, and a sealed space 18 is formed therein.
The sealed space 18 encloses a heat transfer body M made of a material that has a higher thermal conductivity than that of the electrode 12 such as tungsten and melts when the lamp is turned on, such as gold or silver. . The sealed space 18 is filled with an inert gas.
The heat transfer body M melts when the lamp is turned on, convects in the sealed space 18, and transfers the heat at the front end of the electrode main body 15 to the rear end side of the electrode main body 15. As a result, the temperature at the tip can be decreased, and as a result, the temperature at the tip can be lowered, and thereby, the melting and evaporation at the tip of the electrode can be suppressed.

しかしながら、このような電極構造を有する放電ランプを長時間点灯させていると、電極先端に割れを生じ、照度低下などの不具合に至ることがある。
電極先端に割れを生じた放電ランプを分析すると、点灯中に電極先端温度が所定温度以下に下がっておらず、電極先端の熱応力を十分に抑制できていないことが判明した。
However, if a discharge lamp having such an electrode structure is lit for a long time, a crack may occur at the electrode tip, leading to problems such as a decrease in illuminance.
An analysis of a discharge lamp with a crack at the electrode tip revealed that the electrode tip temperature did not drop below a predetermined temperature during lighting, and the thermal stress at the electrode tip could not be sufficiently suppressed.

この現象について、図3を用いて詳細に説明する。
電極12の密閉空間18内の伝熱体Mは、電極材料より熱伝達率が高く、融点の低い金、銀などの金属であり、ランプ点灯時には高温により溶融して液体状態となる。電極の長手方向を垂直方向に沿って配置してランプを垂直点灯した場合において、この溶融伝熱体Mは、容器部材16内で主に垂直方向に、浮力と、ローレンツ力を受けて上下に対流運動Fを行っており、上昇流Fuと下降流Fdが生じている。
This phenomenon will be described in detail with reference to FIG.
The heat transfer body M in the sealed space 18 of the electrode 12 is a metal such as gold or silver having a higher heat transfer rate than that of the electrode material and a low melting point. When the lamp is vertically lit by arranging the longitudinal direction of the electrodes along the vertical direction, the molten heat transfer body M is vertically moved within the container member 16 mainly in the vertical direction and receiving buoyancy and Lorentz force. The convection motion F is performed, and an upward flow Fu and a downward flow Fd are generated.

しかしながら、密閉空間18の内部では、この上昇流Fuと下降流Fdがスムーズに循環しない場合があり、この場合、電極本体15の先端の熱を電極本体15の後端側に効率よく伝達することができず、電極先端温度が所定温度以下に下がらない場合があった。   However, in the sealed space 18, the upward flow Fu and the downward flow Fd may not circulate smoothly. In this case, heat at the tip of the electrode body 15 is efficiently transmitted to the rear end side of the electrode body 15. In some cases, the electrode tip temperature did not fall below a predetermined temperature.

上昇流Fuと下降流Fdがスムーズに循環しない電極を更に詳細に分析すると、密閉空間18を形成する容器部材16の内壁面の表面粗さが影響し、容器部材16の電極先端側に形成された先端面16aで、下降流Fdから上昇流Fuと対流が変化するときに、内壁面の表面粗さによって乱流が発生し、下降流Fdから上昇流Fuへとスムーズに変化していないことが判明した。   When the electrode in which the upward flow Fu and the downward flow Fd are not smoothly circulated is analyzed in more detail, the surface roughness of the inner wall surface of the container member 16 that forms the sealed space 18 is affected, and the electrode is formed on the electrode tip side of the container member 16. When the upward flow Fu and the convection change from the downward flow Fd to the leading end surface 16a, turbulent flow is generated due to the surface roughness of the inner wall surface, and the upward flow Fu does not change smoothly from the downward flow Fd. There was found.

容器部材16は、密閉空間18を形成するために、中実の円柱状である容器部材構造体に穴ぐり加工を行うものである。
この穴ぐり加工は、中実の円柱状である容器部材構造体を電極の中心軸に沿って長手方向にドリルによって掘り込んで穴を作り、さらに、その穴の電極先端側を切削バイトによって曲面状に切削するものである。
この結果、密閉空間が形成された容器部材16の内壁面の表面粗さは、特に、制御されておらず、加工上必然的に形成される表面粗さになっていた。
In order to form the sealed space 18, the container member 16 is used to drill a hole in a solid cylindrical container member structure.
In this drilling process, a solid cylindrical container member structure is drilled in the longitudinal direction along the center axis of the electrode to create a hole, and the electrode tip side of the hole is curved with a cutting tool. It is cut into a shape.
As a result, the surface roughness of the inner wall surface of the container member 16 in which the sealed space is formed is not particularly controlled, and is a surface roughness that is inevitably formed in processing.

特開2004−6246号公報JP 2004-6246 A

この発明は、上記従来技術の問題点に鑑みて、電極の密閉空間に伝熱体が封入されてなる放電ランプにおいて、ランプ点灯時に電極内の密閉空間内で溶融した伝熱体をスムーズに対流させ、電極本体の先端の熱を電極本体の後端側に効率よく伝達することができず、電極先端に割れが発生することのない放電ランプを提供しようとするものである。   In view of the above-mentioned problems of the prior art, the present invention provides a discharge lamp in which a heat transfer body is enclosed in a sealed space of an electrode, and smoothly convects the heat transfer body melted in the sealed space in the electrode when the lamp is turned on. Thus, it is an object of the present invention to provide a discharge lamp in which the heat at the tip of the electrode body cannot be efficiently transmitted to the rear end side of the electrode body, and the electrode tip does not crack.

上記課題を解決するために、請求項1に記載の放電ランプは、発光管の内部に一対の電極を有し、少なくとも一方の電極は、その内部に形成された密閉空間内に伝熱体が封入されてなる放電ランプにおいて、前記密閉空間が形成された電極の内壁面は、電極先端側に形成された先端面と、当該先端面に続き電極後端側に向けて伸びる側面とを有し、前記先端面の表面粗さが、前記側面の表面粗さより小さくなっていることを特徴とする。   In order to solve the above-mentioned problem, the discharge lamp according to claim 1 has a pair of electrodes inside the arc tube, and at least one of the electrodes has a heat transfer body in a sealed space formed therein. In the enclosed discharge lamp, the inner wall surface of the electrode in which the sealed space is formed has a front end surface formed on the front end side of the electrode and a side surface extending toward the rear end side of the electrode following the front end surface. The surface roughness of the front end surface is smaller than the surface roughness of the side surface.

請求項2に記載の放電ランプは、請求項1に記載の放電ランプであって、特に、前記先端面の表面粗さ(Ra)は、0.58μm以下であることを特徴とする。   A discharge lamp according to a second aspect is the discharge lamp according to the first aspect, and is characterized in that, in particular, the surface roughness (Ra) of the tip surface is 0.58 μm or less.

請求項3に記載の放電ランプは、請求項2に記載の放電ランプであって、特に、前記密閉空間が形成された電極の内壁面の先端面は、電解研磨されていることを特徴とする。   The discharge lamp according to claim 3 is the discharge lamp according to claim 2, and in particular, a tip surface of the inner wall surface of the electrode in which the sealed space is formed is electropolished. .

本発明によれば、電極の内部に形成された密閉空間内に伝熱体が封入されてなる放電ランプにおいて、密閉空間が形成された電極の内壁面は、電極先端側に形成された先端面と、当該先端面に続き電極後端側に向けて伸びる側面とを有し、先端面の表面粗さを側面の表面粗さより小さくすることにより、密閉空間の電極先端側で伝熱体の対流が下降流から上昇流へとスムーズに変化するので、長時間点灯しても、電極本体の先端の熱を電極本体の後端側に効率よく伝達することができず、電極先端に割れが生じるようなことはない。   According to the present invention, in the discharge lamp in which the heat transfer body is sealed in the sealed space formed inside the electrode, the inner wall surface of the electrode in which the sealed space is formed is the tip surface formed on the electrode tip side. And a side surface extending toward the rear end side of the electrode following the front end surface, and by making the surface roughness of the front end surface smaller than the surface roughness of the side surface, the convection of the heat transfer body on the electrode front end side of the sealed space Changes smoothly from descending flow to ascending flow, so even if it is lit for a long time, the heat at the tip of the electrode body cannot be efficiently transferred to the rear end side of the electrode body, and the electrode tip is cracked. There is no such thing.

さらには、密閉空間が形成された電極の内壁面の電極先端側に形成された先端面の表面粗さ(Ra)が、0.58μm以下であるので、電極先端側での伝熱体の乱流を防止し、スムーズに対流させることができる。   Furthermore, since the surface roughness (Ra) of the tip surface formed on the electrode tip side of the inner wall surface of the electrode in which the sealed space is formed is 0.58 μm or less, the heat transfer body is disturbed on the electrode tip side. The flow can be prevented and convection can be made smoothly.

さらには、電極の内壁面の先端面を電解研磨することにより、先端面の表面粗さ(Ra)を確実に0.58μm以下とすることができる。   Furthermore, the surface roughness (Ra) of the tip surface can be reliably reduced to 0.58 μm or less by electrolytic polishing of the tip surface of the inner wall surface of the electrode.

本発明に係る放電ランプの電極の断面図Sectional drawing of the electrode of the discharge lamp which concerns on this invention 従来の放電ランプの断面図Sectional view of a conventional discharge lamp 図2で示す放電ランプの電極の断面図Sectional drawing of the electrode of the discharge lamp shown in FIG.

図1はこの発明のショートアーク型放電ランプの電極構造を示し、図1は、電極軸に沿った断面図である。
図において、電極12は、容器部材16と蓋部材17とからなる電極本体15を有し、該電極本体15内には密閉空間18が形成されている。
容器部材16と蓋部材17はタングステンよりなるものである。
密閉空間18内には、タングステンなどの電極材料よりも熱伝導率の高い伝熱体Mが封入されている。該伝熱体Mは、例えば金や銀などの金属からなり、電極材料よりも融点が低く、ランプ点灯時には密閉空間18内で溶融する。
FIG. 1 shows an electrode structure of a short arc type discharge lamp according to the present invention, and FIG. 1 is a sectional view taken along the electrode axis.
In the figure, the electrode 12 has an electrode body 15 composed of a container member 16 and a lid member 17, and a sealed space 18 is formed in the electrode body 15.
The container member 16 and the lid member 17 are made of tungsten.
A heat transfer body M having a higher thermal conductivity than that of an electrode material such as tungsten is enclosed in the sealed space 18. The heat transfer body M is made of, for example, a metal such as gold or silver, has a lower melting point than the electrode material, and melts in the sealed space 18 when the lamp is lit.

密閉空間18が形成された電極12の内壁面2は、電極先端側に形成された曲面状の先端面2aと、当該先端面2aに続き電極後端側に向けて伸びる直線状の側面2bとを有している。尚、電極12の内壁面2は、曲面の先端面2aの先に平面が形成されていても良い。   The inner wall surface 2 of the electrode 12 in which the sealed space 18 is formed includes a curved front end surface 2a formed on the electrode front end side, and a linear side surface 2b extending toward the rear end end side of the electrode following the front end surface 2a. have. The inner wall surface 2 of the electrode 12 may be formed with a flat surface at the tip of the curved tip surface 2a.

側面2bは、容器部材構造体を電極の中心軸に沿って長手方向にドリルによって掘り込んで穴を作った際にできた面であり、一例として、側面2bの表面粗さ(Ra)は、1.82μmである。
先端面2aは、容器部材構造体を電極の中心軸に沿って長手方向にドリルによって掘り込んで穴を作り、さらに、その穴の電極先端側を切削バイトによって曲面状に切削し、その後、電解研磨してできた面であり、一例として、先端面2aの表面粗さ(Ra)は、0.17μmである。
つまり、先端面2aの表面粗さは、側面2bの表面粗さより小さくなっているものである。
The side surface 2b is a surface formed when the container member structure is drilled in the longitudinal direction along the center axis of the electrode to make a hole, and as an example, the surface roughness (Ra) of the side surface 2b is: 1.82 μm.
The tip surface 2a is formed by drilling the container member structure in the longitudinal direction along the center axis of the electrode with a drill, and further cutting the electrode tip side of the hole into a curved shape with a cutting bit. This is a polished surface. As an example, the surface roughness (Ra) of the tip surface 2a is 0.17 μm.
That is, the surface roughness of the front end surface 2a is smaller than the surface roughness of the side surface 2b.

本願発明では、密閉空間18が形成された電極の内壁面2は、先端面2aの表面粗さが側面2bの表面粗さより小さくなっているので、密閉空間18の電極先端側で伝熱体Mの対流が先端面2aで阻害されることがなく滑らかに流れるので、密閉空間18の電極先端側における伝熱体Mの対流が下降流から上昇流へとスムーズに変化するのである。
表面粗さ(Ra)は、以下の方法で測定するものである。
密閉空間が形成された電極を、電極軸に沿って切断する。
その後、密閉空間が形成された電極の内壁面のうち、先端面の内壁面と側面の内壁面をそれぞれ別々に触針式表面粗さ計により2mmの距離の表面粗さを測定する。
In the present invention, the inner wall surface 2 of the electrode in which the sealed space 18 is formed has the surface roughness of the tip surface 2a smaller than the surface roughness of the side surface 2b. Therefore, the convection of the heat transfer body M on the electrode tip side of the sealed space 18 smoothly changes from the downward flow to the upward flow.
The surface roughness (Ra) is measured by the following method.
The electrode in which the sealed space is formed is cut along the electrode axis.
After that, among the inner wall surfaces of the electrode in which the sealed space is formed, the inner wall surface of the tip surface and the inner wall surface of the side surface are separately measured for the surface roughness at a distance of 2 mm by a stylus type surface roughness meter.

次に、本発明の効果を実証するために以下の実験を行った。
ランプの仕様は以下の通り。
<発光管>
材料:石英ガラス
内容積:550cm
電極間距離:6mm
封入物:水銀2.0mg/cc、アルゴン100kPa
<陽極>
材料:タングステン
胴部(容器部材)の外径:25mm
電極本体容積:6cm
肉厚:陰極と対向する先端部の肉厚3.0mm、先端部以外の側面部の肉厚5.5mm
伝熱体:銀5.4cm
封入ガス:アルゴン100kPa
<陰極>
材料:トリウム含有タングステン(トリタン) トリウム含有2重量%
<定格>
定格電流:150A
定格電力:5kW
Next, the following experiment was conducted to verify the effect of the present invention.
The specifications of the lamp are as follows.
<Luminescent tube>
Material: Quartz glass Internal volume: 550cm 3
Distance between electrodes: 6mm
Inclusion material: mercury 2.0 mg / cc, argon 100 kPa
<Anode>
Material: Tungsten trunk (container) outer diameter: 25mm
Electrode body volume: 6 cm 3
Thickness: Thickness 3.0mm at the tip facing the cathode, Thickness 5.5mm at the side other than the tip
Heat transfer body: Silver 5.4cm 3
Filled gas: Argon 100 kPa
<Cathode>
Material: Thorium-containing tungsten (tritan) Thorium-containing 2% by weight
<Rating>
Rated current: 150A
Rated power: 5kW

次いで、電極構造が図3に示す従来のランプと、図1に示す本発明のランプを作成した。
従来例のランプと、本願発明のランプの相違点は、密閉空間が形成された電極の内壁面である側面と先端面の表面粗さが異なるものである。
表1に表面粗さの違いを整理した。
Next, the conventional lamp shown in FIG. 3 and the lamp of the present invention shown in FIG. 1 were prepared.
The difference between the lamp of the conventional example and the lamp of the present invention is that the surface roughness of the side surface, which is the inner wall surface of the electrode in which the sealed space is formed, and the tip surface are different.
Table 1 summarizes the differences in surface roughness.

Figure 0005273191
Figure 0005273191

(実験1)
表1に記載の従来のランプと本発明のランプを、陽極を上方とした垂直点灯を行い、電極破壊が確認された場合はその時点でランプを消灯し、破壊が確認されない場合は100時間経過した時刻において陽極の状態を目視で確認した。
電極を目視で確認する方法は、点灯中のランプの密閉空間が形成された方の電極を減光フィルターを介して目視し、電極先端付近に発生する割れの有無を確認するものである。
その結果を、表2に示す。
(Experiment 1)
The conventional lamp shown in Table 1 and the lamp of the present invention were vertically lit with the anode facing upward. When electrode destruction was confirmed, the lamp was extinguished at that time, and when destruction was not confirmed, 100 hours passed. At that time, the state of the anode was visually confirmed.
The method of visually confirming the electrode is to visually confirm the electrode on which the sealed space of the lamp being lit is formed through a neutral density filter and confirm the presence or absence of a crack near the electrode tip.
The results are shown in Table 2.

Figure 0005273191
Figure 0005273191

表2の実験1の結果を詳細に説明すると、従来のランプでは点灯直後、本実験では点灯後30秒程度の極めて短時間で陽極の先端に割れが発生し、電極内部の伝熱体が漏れ出した。
一方、本発明のランプでは、100時間点灯しても、割れによる破壊が全く起こらないものであった。
つまり、本発明のランプは、陽極の先端の熱を陽極の後端側に効率よく伝達することができる。
The results of Experiment 1 in Table 2 will be explained in detail. In the conventional lamp, a crack occurs at the tip of the anode in a very short time of about 30 seconds after lighting, and the heat transfer body inside the electrode leaks. I put it out.
On the other hand, the lamp of the present invention did not break at all even after lighting for 100 hours.
That is, the lamp of the present invention can efficiently transfer the heat at the tip of the anode to the rear end side of the anode.

(実験2)
次に、本発明のランプと比較用のランプ用いて、先端面2aの粗さを変え、陽極を上方とした垂直点灯を行い、電極破壊が確認された場合はその時点でランプを消灯し、破壊が確認されない場合は100時間経過した時刻において陽極の状態を目視で確認した。
先端面2aと側面2bの表面粗さ、及び、陽極の状態を表3に整理した。
電極を目視で確認する方法は、点灯中のランプの密閉空間が形成された方の電極を減光フィルターを介して目視し、電極先端付近に発生する割れの有無を確認するものである。
(Experiment 2)
Next, using the lamp of the present invention and a comparative lamp, the roughness of the tip surface 2a is changed, the vertical lighting is performed with the anode facing upward, and when the electrode breakage is confirmed, the lamp is turned off at that time, When the destruction was not confirmed, the state of the anode was visually confirmed at the time when 100 hours had passed.
Table 3 shows the surface roughness of the front end surface 2a and the side surface 2b and the state of the anode.
The method of visually confirming the electrode is to visually confirm the electrode on which the sealed space of the lamp being lit is formed through a neutral density filter and confirm the presence or absence of a crack near the electrode tip.

Figure 0005273191
Figure 0005273191

表3の実験2の結果を詳細に説明すると、密閉空間が形成された陽極の先端面の表面粗さ(Ra)が、0.58μm以下であれば、電極割れによる破壊が全く起こらないものであった。
つまり、密閉空間が形成された陽極の先端面の表面粗さ(Ra)が、0.58μm以下であれば、電極先端側での伝熱体の乱流を防止し、密閉空間内で伝熱体をスムーズに対流させることができる。
The results of Experiment 2 in Table 3 will be described in detail. If the surface roughness (Ra) of the tip surface of the anode in which the sealed space is formed is 0.58 μm or less, the electrode cracking does not occur at all. there were.
That is, if the surface roughness (Ra) of the tip surface of the anode in which the sealed space is formed is 0.58 μm or less, turbulent flow of the heat transfer body on the electrode tip side is prevented, and heat transfer is performed in the sealed space. The body can be convected smoothly.

1 放電ランプ
10 発光管
11 陰極
12 陽極
2 陽極の内壁面
2a 先端面
2b 側面
15 電極本体
16 容器部材
17 蓋部材
18 密閉空間
M 伝熱体
F 対流
Fu 上昇流
Fd 下降流
DESCRIPTION OF SYMBOLS 1 Discharge lamp 10 Arc tube 11 Cathode 12 Anode 2 Anode inner wall surface 2a Tip surface 2b Side surface 15 Electrode body 16 Container member 17 Lid member 18 Sealed space M Heat transfer body F Convection Fu Upflow Fd Downflow

Claims (3)

発光管の内部に一対の電極を有し、少なくとも一方の電極は、その内部に形成された密閉空間内に伝熱体が封入されてなる放電ランプにおいて、
前記密閉空間が形成された電極の内壁面は、電極先端側に形成された先端面と、当該先端面に続き電極後端側に向けて伸びる側面とを有し、
前記先端面の表面粗さが、前記側面の表面粗さより小さくなっていることを特徴とする放電ランプ。
In the discharge lamp having a pair of electrodes inside the arc tube, at least one of the electrodes is formed by enclosing a heat transfer body in a sealed space formed therein,
The inner wall surface of the electrode in which the sealed space is formed has a front end surface formed on the electrode front end side, and a side surface extending toward the electrode rear end side following the front end surface,
The discharge lamp according to claim 1, wherein a surface roughness of the front end surface is smaller than a surface roughness of the side surface.
前記先端面の表面粗さ(Ra)は、0.58μm以下であることを特徴とする請求項1に記載の放電ランプ。   2. The discharge lamp according to claim 1, wherein a surface roughness (Ra) of the front end surface is 0.58 μm or less. 前記密閉空間が形成された電極の内壁面の先端面は、電解研磨されていることを特徴とする請求項2に記載の放電ランプ。   The discharge lamp according to claim 2, wherein a tip end surface of an inner wall surface of the electrode in which the sealed space is formed is electropolished.
JP2011082904A 2011-04-04 2011-04-04 Discharge lamp Active JP5273191B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2011082904A JP5273191B2 (en) 2011-04-04 2011-04-04 Discharge lamp
DE201210006106 DE102012006106A1 (en) 2011-04-04 2012-03-26 Discharge lamp has electrode comprising tip end face whose surface roughness is lesser than surface roughness of side surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011082904A JP5273191B2 (en) 2011-04-04 2011-04-04 Discharge lamp

Publications (2)

Publication Number Publication Date
JP2012221582A JP2012221582A (en) 2012-11-12
JP5273191B2 true JP5273191B2 (en) 2013-08-28

Family

ID=46845172

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011082904A Active JP5273191B2 (en) 2011-04-04 2011-04-04 Discharge lamp

Country Status (2)

Country Link
JP (1) JP5273191B2 (en)
DE (1) DE102012006106A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6235909B2 (en) * 2014-01-10 2017-11-22 株式会社オーク製作所 Discharge lamp
JP2022088841A (en) * 2020-12-03 2022-06-15 ウシオ電機株式会社 Discharge lamp, discharge lamp electrode, and manufacturing method of discharge lamp electrode

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000100377A (en) * 1998-04-16 2000-04-07 Toshiba Lighting & Technology Corp High-pressure discharge lamp and lighting system
JP3994880B2 (en) * 2002-04-26 2007-10-24 ウシオ電機株式会社 Discharge lamp
JP4161815B2 (en) * 2003-06-17 2008-10-08 ウシオ電機株式会社 Discharge lamp
JP4993115B2 (en) * 2007-12-03 2012-08-08 ウシオ電機株式会社 High pressure discharge lamp
JP5303923B2 (en) * 2007-12-20 2013-10-02 ウシオ電機株式会社 Discharge lamp
JP4998840B2 (en) * 2010-07-23 2012-08-15 ウシオ電機株式会社 Short arc type discharge lamp

Also Published As

Publication number Publication date
DE102012006106A1 (en) 2012-10-04
JP2012221582A (en) 2012-11-12

Similar Documents

Publication Publication Date Title
JP4548290B2 (en) Discharge lamp
EP1357579B1 (en) Discharge lamp
JP4998840B2 (en) Short arc type discharge lamp
KR101899205B1 (en) Short arc type discharge lamp
JP4993115B2 (en) High pressure discharge lamp
JP5273191B2 (en) Discharge lamp
JP3838110B2 (en) Positive electrode for discharge lamp and short arc discharge lamp
JP4042588B2 (en) Discharge lamp
JP2005011710A (en) Low-pressure discharge lamp
JP5363174B2 (en) Short arc type discharge lamp
JP2005011564A (en) Discharge lamp
JP5024730B2 (en) Discharge lamp
JP2003234083A (en) Electrode of short arc electric discharge lamp and method of manufacturing the same, and short arc electric discharge lamp
KR100973108B1 (en) Discharge lamp
TWI621151B (en) Electrode for discharge lamp tube, discharge lamp tube having the electrode for discharge lamp tube, and method for manufacturing the same
JP2003257365A (en) Electrode for short arc type discharge lamp and short arc type discharge lamp
CN113711334B (en) Electrode for a gas discharge lamp and gas discharge lamp
JP7223162B2 (en) Electrodes for gas discharge lamps and gas discharge lamps
JP5527248B2 (en) Short arc type discharge lamp
JP2003178668A (en) Lead-in wire for vessel and vessel
JP2007242469A (en) Discharge lamp
JP2008010272A (en) Ceramic metal halide lamp
JP2005149791A (en) Short-arc type high-pressure mercury lamp
JP2012059651A (en) Long arc type discharge lamp and manufacturing method thereof

Legal Events

Date Code Title Description
TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20130416

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20130429

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

Ref document number: 5273191

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250