CN106298432B

CN106298432B - Short arc discharge lamp

Info

Publication number: CN106298432B
Application number: CN201610329557.9A
Authority: CN
Inventors: 河尻晃明; 山本直树
Original assignee: Ushio Denki KK
Current assignee: Ushio Denki KK
Priority date: 2015-06-29
Filing date: 2016-05-18
Publication date: 2019-07-09
Anticipated expiration: 2036-05-18
Also published as: KR101899205B1; TWI687968B; CN106298432A; TW201701319A; JP2017016761A; KR20170002291A; JP6098676B2

Abstract

The present invention provides the short arc discharge lamp such as flowering structure, it is formed by confined space in the electrode for being located at vertical direction and is sealed with thermal conductor, and restricted body is set, the limitation body by above-mentioned confined space along the axially extending of electrode and radially transversal plate is constituted, the convection current that limitation dissolves thermal conductor circumferentially rotates, in the short arc discharge lamp, when the thermal conductor convection current melted in lamp lighting, the convection current is inhibited circumferentially to rotate in confined space, and pressing force will not be acted on by inner wall of the above-mentioned plate to the inner wall especially electrode rear side of confined space to prevent electrode damaged.It is characterized in that, above-mentioned plate has inclination in the lateral margin of the inner wall side for the above-mentioned electrode for forming above-mentioned confined space, the length until slave electrode centers axis to the end of radial direction at the top of above-mentioned plate is set to, less than the length until the slave electrode centers axis to the end of radial direction located below.

Description

Short arc discharge lamp

Technical field

The present invention relates to short arc discharge lamps, more particularly to are sealed with thermal conductor with the confined space in electrode body The short arc discharge lamp of electrode.

Background technique

In the past, in the exposure device of crystal liquid substrate, printed base plate as exposure semiconductor substrate, liquid crystal display etc. Ultraviolet light radiation source and in the short arc discharge lamp that uses, big outputization is constantly in progress.Specified because of the big outputization When consumption power becomes larger, create the problem that the current value flowed in lamp usually becomes larger, thus electrode receives tyco electronics Amount becomes larger and is easy to heat up and then melt.

And can also lead to the problem of it is as follows, constitute the material of electrode such as tungsten evaporate and be attached to the inner surface of luminous tube from And melanism, the radioactivity as lamp decline.

For melting, the evaporation etc. for solving the problems, such as this electrode material, such as Japanese Unexamined Patent Publication 2012-028168 public affairs As disclosed in report, proposes the short-arc type with the electrode structure for being sealed with thermal conductor in internal confined space and put Electric light.

The outline structure is disclosed in Fig. 5, Fig. 6, in fig. 5 it is shown that with vertically right in luminous tube 2 Set the short arc discharge lamp 1 of a pair of electrodes 3,4 of configuration.It is located at also, as shown in Fig. 6 (A), Fig. 6 (B), in a pair of electrodes upper The electrode body 5 of the electrode (being anode in the example) 4 of side is made of container parts 6 and cover 7, has been formed in the interior thereof closed Space 8.

Also, it is sealed with thermal conductor M in above-mentioned confined space 8, thermal conductor M is made of electrode 4 thermal conductivity ratio Material such as gold, silver that material such as tungsten is high, melts in lamp lighting etc. are constituted.Also, it is filled in above-mentioned confined space 8 There is inert gas.

Also, the limitation body 10 of plate is provided in the confined space 8 for the electrode 4 for having enclosed thermal conductor M, the plate Limitation body 10 is limited in the convection current for dissolving thermal conductor M melted when lighting and circumferentially rotates.

By being set as such structure, above-mentioned thermal conductor M is melted in lamp lighting, the convection current in confined space 8, by electrode The heat on 5 top of main body is transferred to rear end side, thus reduces the temperature gradient in the axial direction of electrode body 5, and result obtains as follows Effect: can reduce the temperature on top, and thereby, it is possible to inhibit the melting of electrode tip and evaporation.

In addition in turn, by the way that restricted body 10 is arranged in above-mentioned confined space 8, the melting thermal conductor melted in lighting M when convection current, can limit/prevent the convection current in confined space 8 and rotate in the circumferential, therefore seldom generate because of convection current movement Temperature change at the same position of electrode will not generate high-temerature creep deformation, the melting of electrode tip based on temperature change Evaporation prevents function that can be further improved.

Although however, thermal conductor is solidified because lamp lighting is melted when lamp extinguishes, and becoming it and being attached to confined space State on inner wall.Thermal conductor after the solidification melts again due to lighting again, at this point, thermal conductor is from the electrode for becoming high temperature Tip side (lower side) starts to melt.At this point, the upper side of thermal conductor is the state not melted also, before its melting, by molten Melt thermal conductor to the inner wall actuating pressure for constituting confined space.

At this point, as shown in fig. 7, the posture of plate limitation body is unstable, become sometimes to certain inclined state on one side, shoulder It is abutted with inner wall and pushes inner wall.

The tip side (lower side) of electrode becomes state at higher temperature, has ductility due to comparing, to dissolving thermal conductor Pressure and limit body pushing effect have resistance, be in state of temperature lower than it electrode rear side (top Side) ductility shortage, because the pressure for dissolving thermal conductor and the pushing force for limiting body can crack.Once cracking, then It is possible that destroying electrode quickly by the pressure for dissolving thermal conductor using it as starting point.

Patent document 1: Japanese Unexamined Patent Publication 2012-028168 bulletin

Summary of the invention

The present invention in view of the above problems in the prior art, provides a kind of short arc discharge lamp such as flowering structure, is located at and hangs down The electrode of straight top, which is formed by confined space, to be sealed with thermal conductor and restricted body is arranged, and the limitation body is by above-mentioned close It closes in space along the axially extending of electrode and transversal radially plate is constituted, the convection current for dissolving thermal conductor is circumferentially turned It is dynamic to be limited, when the thermal conductor convection current melted in lighting, inhibit the convection current circumferentially to rotate in confined space, and not Pressing force can be acted on by inner wall of the above-mentioned plate to the inner wall especially electrode rear side of confined space to prevent electrode broken Damage.

To solve the above-mentioned problems, it is a feature of the present invention that above-mentioned plate is in the above-mentioned electricity for forming above-mentioned confined space The lateral margin of the inner wall side of pole, which has, to be tilted, until slave electrode centers axis to the end of radial direction at the top of above-mentioned plate Length is set to, less than the length until the slave electrode centers axis to the end of radial direction located below.

And, which is characterized in that the above-mentioned lower avris of the lateral margin of the inner wall side of above-mentioned plate has the axis along above-mentioned electrode To parallel section.

The effect of invention

According to the present invention, since the lateral margin of the inner wall side of plate limitation body set in the confined space of electrode is with oblique Degree, and the length of upper avris is less than the length of lower avris, therefore, in the rear side of the confined space of electrode, even if plate limits The posture of body changes, and will not abut with inner wall in upper avris, after electrode relatively low in temperature and relatively low ductility The pressing force based on plate will not be acted at square position, therefore will not be cracked.

Also, since the lower avris in the lateral margin of plate limitation body has the axial parallel section along electrode, energy Enough postures to maintain the plate limitation body in confined space to a certain degree, to inhibit to tilt, and mitigate the pushing to electrode Power.

Detailed description of the invention

Fig. 1 is the sectional view (A) and its drawing in side sectional elevation (B) of the electrode of discharge lamp according to the present invention.

Fig. 2 is the main view for only indicating limitation body of the invention.

Fig. 3 is the sectional view of other embodiments.

Fig. 4 is the main view of another other embodiments.

Fig. 5 is previous short arc discharge lamp.

Fig. 6 is the sectional view (A) and its drawing in side sectional elevation (B) of previous electrode.

Fig. 7 is the sectional view for illustrating the unfavorable condition of previous electrode.

Symbol description

1 short arc discharge lamp

2 luminous tubes

3 cathodes

4 anodes

5 anode bodies

6 container parts

7 covers

8 confined spaces

10 limitation bodies

11~17 plates

The lateral margin 11a

The top 11b

11c is following

11d parallel portion

The lateral margin 12a

The top 12b

12c is following

12d parallel portion

M thermal conductor

X electrode centers axis

Specific embodiment

Fig. 1 shows the electrode structure of short arc discharge lamp of the invention, Fig. 1 (A) is its profilograph, Fig. 1 (B) is its cross Sectional view.

Electrode (anode) 4 has the electrode body 5 being made of container parts 6 and cover 7, the electrode body 5 in the figure Inside it is formed with confined space 8.Also, the high thermal conductor M of the electrode materials such as thermal conductivity ratio tungsten is sealed in the confined space 8. Thermal conductor M is for example made of gold or the metals such as silver, and fusing point is lower than electrode material, when lighting, is melted in confined space 8.

Also, the limitation body 10 in the confined space 8 of above-mentioned electrode 4 inserted with plate.The limitation body 10 is in confined air Between 8 approximate centre axis on extend along its length, and with radially transversal mode is arranged and have it is closed with electrode 4 The roughly the same size of the internal diameter in space 8.In addition, electrode will be not necessarily located at by saying on the central axis stricti jurise of limitation body 10 On 4 central axis.

Fig. 2 shows the details of limitation body 10, Fig. 2 (A) is side view, and Fig. 2 (B) is its top view.In the embodiment, limit Body 10 processed is made of as known to Fig. 1 (B), Fig. 2 (B) cross one another plate component 11,12.

Also, these plate components 11,12 the inner wall side for the above-mentioned electrode 4 for forming above-mentioned confined space 8 lateral margin 11a, 12a, which has, to be tilted, until slave electrode centers axis X to the end of radial direction at top 11b, 12b of above-mentioned plate 11,12 Length L1 is set as, less than the length L2 (L1 until slave electrode centers axis X to the end of radial direction at following 11c, 12c < L2).

In addition, referring to below for this back veneer component is located at by the side of the tip side of the electrode of arranged perpendicular, top refers to it Opposite side, the i.e. side positioned at the root of electrode (Japanese: root member) side.

Fig. 3 shows the different embodiments of limitation body 10, in Fig. 3 (A), by being crossed as substantially T when limitation body 10 is overlooked Font a pair of plate 13,14 is constituted.In Fig. 3 (B), limitation body 10 from equiangularly to the plate component of three Directional Extensions 15,16, 17 are constituted.The plate 13~17 of these either cases extends along the length direction of electrode 4, and becomes transversal radially Shape, and the length L1 until slave electrode centers axis X to the end of radial direction at top is set as, less than locate below from Length L2 (L1 < L2) until electrode centers axis X to the end of radial direction.

According to the above embodiments, due to being set as, the plate for limiting body has inclination, the length L1 of top in its lateral margin Less than following length L2, therefore, near top, big gap is formed between the inner wall of confined space, when lighting, i.e., Make to be limited by the influence for dissolving thermal conductor flowed and generate inclination on body, the shoulder for limiting the top of the plate of body will not Wall surface is abutted and pressed on, wall surface damage will not be generated.In particular, electrode tip side becomes high temperature, solidification at lighting initial stage When thermal conductor starts melting, at the axial intermediate position and rear end side of electrode, temperature will not become high as tip side Temperature, when not becoming the high state of metal ductility, the corner for limiting the top of the plate of body be not easy to be pushed against constitute it is closed The inner wall of the container parts in space.Electrode is not easy the thermal stress when lighting due to is destroyed as a result,.

In addition, even if the case where lower section shoulder there are plate is abutted with the inner wall of confined space, also due to electrode Tip side becomes high temperature in lighting, has sufficient ductility compared to rear end side, therefore the risk damaged is low.

In addition, the inclination at the lateral margin of the plate of limitation body needs not be straight line, the inclination of curve can also be with.Also, it is right A possibility that for inclined angle, the inclination the big, limits bulk damage inner wall is lower, but limitation dissolves thermal conductor therewith The effect of the rotation circumferential to flow direction also reduce, it is therefore preferable that be, for example, under upper edge lengths L1/ edge lengths L2 be 0.45~ 0.94。

Also, it, can be into when being arranged in confined space when the number to diameter plate outstanding outward is three or more 3 dot point of row, is therefore preferred, but may be one.In turn, limit the sheet material portions intersect of body with electrode It is that non-point symmetry can also be on the section of orthogonality of center shaft.

In turn, it is tilted by being arranged on the lateral margin of plate, also with center of gravity to the lower section movement of limitation body, in confined air Interior posture is easy stable effect.

Another other embodiments are shown in Fig. 4.In this embodiment, it is construed as limiting the lateral margin of the plate 11,12 of body 10 The certain area of the lower avris of 11a, 12a forms parallel section 11d, 12d along electrode axial direction without inclination.

Other structures are same as Fig. 1, embodiment shown in Figure 2.The inner wall of parallel portion 11d, 12d and confined space 8 It separates and little by little approaches to distance, it will be from when being tilted along the state of electrode centers axis in the posture for limiting body 10, which prolongs Long portion due to inner wall by limitation activity, thus stable posture.

Experiment below has been carried out in order to verify effect of the invention.

The specification of lamp is as described below.

< luminous tube >

Material: quartz glass

Interelectrode distance: 6mm

Enclosure: mercury 2.0mg/cc, argon 100kPa

< anode >

Material: tungsten

The outer diameter of body portion (container parts): 25mm

Electrode body internal volume: 6cm³

Wall thickness: 5.5mm

Thermal conductor: (silver) 4.7cm³

Enclosed gas: (argon) 100kPa

< lighting posture >

Make the vertical lighting of anode top

< rated value >

Rated current: 150A

Rated power: 5kW

< limits body >

Length: 16mm

The length of top: 7mm

Following length: 13.8mm

Thickness: 2mm

Summary > is tested in < lighting

It turns off the light experiment to the lighting of discharge lamp

Divide-turn off the light 120 points × 30 groups with rated power lighting 15

After experiment, without breakage when dismantling electrode and confirming limitation body, electrode is not also destroyed.

As more than, according to the present invention, has and be sealed with thermal conductor in the confined space of electrode body and be provided with to molten The convection current for melting thermal conductor circumferentially rotates in the short arc discharge lamp for the electrode for limiting body of the plate limited, constitutes above-mentioned The plate for limiting body has inclination, the top of above-mentioned plate in the lateral margin of the inner wall side for the above-mentioned electrode for forming above-mentioned confined space Length until the slave electrode centers axis to the end of radial direction at place is set to, less than locate below slave electrode centers axis to Length until the end of radial direction, therefore even if there are plates due to dissolving thermal conductor the case where run-off the straight, the plate Top shoulder the case where will not abutting and press on the inner wall of confined space, lesion electrode can be prevented.

Claims

1. a kind of short arc discharge lamp has vertical opposed pairs electrode in the inside of luminous tube, positioned at the sun of vertical direction Pole, which is formed by confined space, to be sealed with thermal conductor and restricted body is arranged, and the limitation body is by the edge in above-mentioned confined space The plate that is axially extending and radially extending of anode is constituted, and the convection current that limitation body limitation dissolves thermal conductor circumferentially rotates,

Above-mentioned plate has inclination in the lateral margin of the inner wall side for the above-mentioned anode for forming above-mentioned confined space,

The length until the end from anodes centre axis to radial direction at the top of above-mentioned plate is set to, and is less than following Length until the end from anodes centre axis to radial direction at place.

2. short arc discharge lamp as described in claim 1, which is characterized in that

The above-mentioned lower avris of the lateral margin of above-mentioned plate has the axial parallel section along above-mentioned anode.