JP2017013239A - Break device and breaking method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a breaking method by which a substrate can be broken along a scribe line even if the substrate is thin.SOLUTION: A breaking method includes steps (a), (b), (c). In the step (a), a guide bar 2 is loaded on a substrate W along a scribe line 12a. In the step (b), an impact shock which is directed to the substrate W is given onto the guide bar 2 after the step (a). In the step (c), in the state that one region of the substrate W with the scribe line 12 as a border is projected from a bearing member 30, the one region is pressed from above and is broken after the step (b).SELECTED DRAWING: Figure 1

Description

  The present invention relates to a break device and a break method.

  When breaking a bonded substrate or the like, first, a scribe line is formed on the substrate. The substrate is broken along the scribe line by lowering the break bar toward the scribe line and pressing the substrate with the break bar. (See Patent Document 1).

JP 2010-159187 A

  In recent years, the thickness of the substrate has been reduced. For this reason, the substrate is broken before the lowered break bar contacts the substrate evenly, and there is a problem that the substrate is not broken along the scribe line.

  An object of the present invention is to provide a breaking method and a breaking device that can break along a scribe line even with a thin substrate.

  In the breaking method according to the first aspect of the present invention, a substrate in which a first substrate and a second substrate are bonded together, a first scribe line formed on the surface of the first substrate, and the surface on the surface of the second substrate are arranged. This is a breaking method of breaking along a first scribe line and a second scribe line formed at the same position in plan view. This break method includes step (a), step (b) and step (c). Step (a) places a guide bar on the first scribe line. In the step (b), after the step (a), an impact toward the first substrate is given to the guide bar to break the second substrate along the second scribe line. In step (c), after step (b), when one area of the substrate having the first scribe line and the second scribe line as a boundary is a first area and the other area is a second area, With the support member supporting a part or the whole of the one region and the entire second region protruding from one end of the support member, the second substrate is pressed from above to hold the first substrate to the first. Break along one scribe line.

  This method does not break the substrate by lowering the break bar as in the prior art. That is, in the breaking method according to the present invention, first, the guide bar is placed on the substrate along the scribe line, and then the guide bar is impacted. Furthermore, after that, one region having the scribe line as a boundary is pressed from above with the region protruding from the support member. For this reason, even a thin substrate can be broken along the scribe line.

  In the breaking device according to the second aspect of the present invention, a substrate formed by bonding a first substrate and a second substrate is a first scribe line formed on the surface of the first substrate and the surface on the surface of the second substrate. It is a device that breaks along the first scribe line and the second scribe line formed at the same position in plan view. This apparatus includes a guide bar, an impact member, a support member, and a pressing member. The guide bar is placed on the first scribe line. The impact member gives an impact toward the first substrate to the guide bar. The support member supports a part or all of the first region when one region of the substrate having the first scribe line and the second scribe line as a boundary is a first region and the other region is a second region. To do. The pressing member presses the second region from above in a state where the entire second region protrudes from one end of the support member.

  This break device does not break a substrate using a break bar that descends toward the substrate as in the prior art. That is, the breaking device according to the present invention is such that the impact member gives an impact to the guide bar extending along the scribe line, and further, one region with the scribe line as a boundary protrudes from the support member from above. Since the substrate is broken by pressing, even a thin substrate can be broken along the scribe line.

  Preferably, the guide bar has a circular cross section.

  Preferably, a guide bar has an elastic part in an outer peripheral part. According to this configuration, since the elastic portion is interposed between the guide bar and the substrate, the impact applied to the substrate can be made more uniform.

  Preferably, the impact member impacts the guide bar by colliding with the guide bar.

  Preferably, the breaking device further includes a regulating member that regulates movement of the guide bar toward the substrate.

  Preferably, the breaking device further includes a mounting table on which the substrate is mounted when an impact is applied by the guide bar.

  Preferably, the breaking device further includes a cushion material disposed between the mounting table and the substrate.

  Preferably, the restricting member is disposed between the mounting table and the guide bar.

  According to the present invention, even a thin substrate can be broken along a scribe line.

The side view of a break device. The front view of a break device. It is a front view which shows the state which made a part of board | substrate protrude from a supporting member. It is a front view which shows the state which presses a part of the board | substrate made to protrude from upper direction.

  Hereinafter, embodiments of a break device and a break method according to the present invention will be described with reference to the drawings.

  As shown in FIGS. 1 to 4, the breaking device 10 breaks the substrate W along the scribe lines 11a and 12a. Here, the substrate W to be broken will be described. The substrate W is a bonded substrate and includes a first substrate 11 and a second substrate 12. A first scribe line 11 a is formed on the first substrate 11, and a second scribe line 12 a is formed on the second substrate 12. The first scribe line 11a and the second scribe line 12a are formed at the same position in plan view.

  The breaking device 10 includes a guide bar 2, an impact member 3, a mounting table 4, and a regulating member 5. Further, a cushion material 6 is disposed between the mounting table 4 and the substrate W.

  The guide bar 2 extends along the scribe lines 11 a and 12 a of the substrate W and is placed on the substrate W. Preferably, the guide bar 2 is columnar or cylindrical. That is, the cross section of the guide bar 2 is circular. The guide bar 2 has a cylindrical main body portion 21 and an elastic portion 22. The main body 21 is made of, for example, SUS (stainless steel). The elastic part 22 covers the outer peripheral surface of the main body part 21. The elastic part 22 is made of, for example, natural rubber or synthetic rubber.

  The impact member 3 gives an impact to the guide bar 2. The impact applied to the guide bar 2 is applied in the direction toward the substrate W. The impact member 3 impacts the guide bar 2 by colliding with the guide bar 2. For example, the impact member 3 is disposed at a distance from the guide bar 2. The impact member 3 moves toward the guide bar 2 from a position away from the guide bar 2 and collides with the guide bar 2. The impact member 3 may collide with the guide bar 2 at a plurality of locations. That is, the plurality of impact members 3 may be arranged at intervals from each other along the longitudinal direction of the guide bar 2. And each impact member 3 collides with the guide bar 2 simultaneously.

  The substrate W is mounted on the mounting table 4. A cushion material 6 is disposed between the mounting table 4 and the substrate W. The cushion material 6 is made of polyurethane, for example.

  The regulating member 5 regulates the movement of the guide bar 2 to the substrate W side. The restriction member 5 is disposed between the mounting table 4 and the guide bar 2. For example, the regulating member 5 can be expanded and contracted in the vertical direction. The distance between the mounting table 4 and the guide bar 2 can be adjusted by expanding and contracting the regulating member 5.

  Next, a breaking method for breaking a substrate with the breaking device described above will be described.

  First, the substrate W is mounted on the mounting table 4. At this time, the substrate W is placed so that the scribe line to be broken faces the placement table 4. In the present embodiment, a process of breaking the second substrate 12 along the second scribe line 12a will be described.

  Next, the guide bar 2 is placed on the substrate W along the second scribe line 12a of the substrate W. In general, since the first scribe line 11a is formed on the opposite side of the second scribe line 12a, the guide bar 2 is placed on the first scribe line 11a. In addition, the guide bar 2 is previously arranged above the mounting table 4 with a gap, and the guide bar 2 is placed on the substrate W by arranging the substrate W between the guide bar 2 and the mounting table 4. It may be in a state of being placed.

  Subsequently, an impact toward the substrate W is given to the guide bar 2 by the impact member 3. Specifically, the impact member 3 is moved to the guide bar 2 from a position away from the guide bar 2, and the impact member 3 is caused to collide with the guide bar 2, thereby giving an impact to the guide bar 2. Due to this impact, the second substrate 12 is broken along the second scribe line 12a.

  Subsequently, as shown in FIG. 3, when one region of the substrate W with the scribe line as a boundary is the first region 41 and the other region is the second region 42, the entire second region 42 protrudes. In addition, all or part of the first region 41 is supported by the support member 30. The support member 30 may be the same member as the mounting table 4.

  In this state, as shown in FIG. 4, the second region 42 is pressed by the pressing member 50 from above. In this way, the first substrate 11 can be broken along the first scribe line 11a, and the substrate W can be divided into the first region 41 and the second region 42.

  As mentioned above, although embodiment of this invention was described, this invention is not limited to these, A various change is possible unless it deviates from the meaning of this invention.

2 Guide bar 21 Body portion 22 Elastic portion 3 Impact member 4 Mounting table 5 Restriction member 6 Cushion material 10 Break device 30 Support member 41 First region 42 Second region 50 Press member W Substrate

Claims (9)

A substrate formed by bonding the first substrate and the second substrate is formed at the same position in plan view as the first scribe line formed on the surface of the first substrate and the first scribe line on the surface of the second substrate. A break method for breaking along a second scribe line,
(A) placing a guide bar on the first scribe line;
(B) after the step (a), applying an impact toward the first substrate to the guide bar to break the second substrate along the second scribe line;
(C) After the step (b), when one region of the substrate having the first scribe line and the second scribe line as a boundary is a first region and the other region is a second region, the first region With the support member supporting a part or all of the second region, the second region is pressed from above with the second region protruding from one end of the support member, and the first substrate is moved to the first scribe. Breaking along the line;
Including break method. A substrate formed by bonding the first substrate and the second substrate is formed at the same position in plan view as the first scribe line formed on the surface of the first substrate and the first scribe line on the surface of the second substrate. A break device that breaks along the second scribe line,
A guide bar placed on the first scribe line;
An impact member that applies an impact toward the first substrate to the guide bar;
A support member that supports part or all of the first region when one region of the substrate having the first scribe line and the second scribe line as a boundary is a first region and the other region is a second region; ,
A pressing member that presses the second region from above with the entire second region protruding from one end of the support member;
A break device. The impact member impacts the guide bar by colliding with the guide bar;
The break device according to claim 2. The guide bar has a circular cross section,
The break device according to claim 2 or 3. The guide bar has an elastic part on the outer peripheral part,
The break device according to any one of claims 2 to 4. A regulation member for regulating movement of the guide bar to the substrate side;
The break device according to any one of claims 2 to 5. A mounting table on which the substrate is mounted when an impact is applied by the guide bar;
The break device according to any one of claims 2 to 6. Further comprising a cushion material disposed between the mounting table and the substrate,
The break device according to claim 7. Further comprising a mounting table on which the substrate is mounted;
The break device according to claim 6, wherein the restriction member is disposed between the mounting table and the guide bar.