JP2017007671A - Sheet sticking device and sheet sticking method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To easily set an original sheet around peeling means.SOLUTION: A sheet sticking device includes: first supply means for delivering a first original sheet with a first adhesive sheet temporarily adhered to one surface of a belt-like first peeling sheet; first peeling means for peeling the first adhesive sheet from the first peeling sheet by bending the first peeling sheet delivered by the first supply means by a first peeling member; second supply means for delivering a second original sheet with a second adhesive sheet temporarily adhered to one surface of a belt-like second peeling sheet; second peeling means for peeling the second adhesive sheet from the second peeling sheet by bending the second peeling sheet delivered by the second supply means by a second peeling member; and pressing means for pressing and sticking at least one of the first adhesive sheet and the second adhesive sheet to an adherend. At least one of the first peeling means and the second peeling means is provided so that the corresponding first peeling member or second peeling member can be separated and brought close from/to the pressing means in a prescribed direction.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a sheet sticking apparatus and a sheet sticking method.

  2. Description of the Related Art Conventionally, an apparatus that presses and adheres a plurality of adhesive sheets to an adherend is known (for example, Patent Document 1).

JP 2006-181991 A

  However, in the apparatus described in Patent Document 1, the peel plate 50 (first peeling means) and the peel plate 62 (second peeling means) are arranged at close positions. There is an inconvenience that the work of setting the material becomes complicated.

  The objective of this invention is providing the sheet sticking apparatus and sheet sticking method which can set an original fabric around the peeling means easily.

  In order to solve the above-described problems, the present invention provides a first supply means for feeding out a first original fabric in which a first adhesive sheet is temporarily attached to one surface of a strip-shaped first release sheet, and the first supply means. A first release means for peeling the first adhesive sheet from the first release sheet by bending the first release sheet fed out at a first release member; and a second release sheet on one surface of the belt-like second release sheet. A second supply means for feeding out the second original fabric temporarily attached with the adhesive sheet; and the second release sheet fed out by the second supply means by bending the second release sheet from the second release sheet to the second A second peeling means for peeling the adhesive sheet; and a pressing means for pressing and sticking at least one of the first adhesive sheet and the second adhesive sheet to an adherend, the first peeling means and the second peeling means. With at least stripping means One is a sheet sticking apparatus characterized by being arranged to be closely spaced in a predetermined direction relative to the corresponding said first separating member or the pressing means and the second separating member.

  At least one of the first peeling means and the second peeling means is provided such that the corresponding first peeling member or second peeling member can be moved in a direction different from the predetermined direction. Good.

  A third release sheet is temporarily attached to the second adhesive sheet of the second original fabric on a surface opposite to the surface in contact with the second release sheet, and the third release is fed out by the second supply means. A third release sheet peeling means is provided for peeling the third release sheet from the second adhesive sheet by bending the sheet with a third release sheet peeling member, and the third release sheet peeling means includes the third release sheet peeling means. The member may be provided so as to be separated and approachable in a predetermined direction with respect to the pressing means.

  According to another aspect of the present invention, there is provided a first supply step of feeding out a first original fabric in which a first adhesive sheet is temporarily attached to one surface of a belt-like first release sheet, and the first feed step of feeding out in the first supply step. A first peeling step of peeling the first adhesive sheet from the first peeling sheet with a first peeling member, and a second raw material in which the second adhesive sheet is temporarily attached to one surface of the belt-like second peeling sheet. A second supply step, a second release step of peeling the second adhesive sheet from the second release sheet fed out in the second supply step with a second release member, and the first adhesive sheet and the second adhesive sheet. A pressing step in which at least one is pressed against an adherend by pressing means and pasted, and in the preceding stage of at least one of the first peeling step and the second peeling step, the corresponding first peeling member or second peeling The member is opposed to the pressing means. Te is a sheet sticking method which comprises carrying out the separation step of closely spaced in a predetermined direction.

  According to the present invention, since at least one of the first peeling member and the second peeling member can be advanced and retracted in the predetermined direction with respect to the pressing means, the original fabric can be easily set around the peeling means.

The side view of a sheet sticking apparatus. FIG.

Hereinafter, sheet sticking device 10 concerning an embodiment of the present invention is explained based on a drawing.
In the embodiment, the X axis, the Y axis, and the Z axis are orthogonal to each other, the X axis and the Y axis are axes in a predetermined plane, and the Z axis is an axis that is orthogonal to the predetermined plane. . Furthermore, in the embodiment, when viewed from the near side of FIG. 1 parallel to the Y axis, when the direction is indicated, “up” is the arrow direction of the Z axis, “down” is the opposite direction, “left” “Right” is the direction of the arrow on the X axis, “Right” is the reverse direction, “Front” is the front direction orthogonal to the page, and “Rear” is the reverse direction of the Y axis arrow direction.

In FIG. 1, the sheet sticking device 10 includes a first supply means 20 for feeding out a first original fabric RS1 in which a first adhesive sheet AS1 is temporarily attached to one surface of a strip-shaped first release sheet RL1, and a first supply means. A first release means 30 for peeling the first adhesive sheet AS1 from the first release sheet RL1 by bending the first release sheet RL1 fed out at 20 with a first release plate 33 as a first release member; The second supply means 40 for feeding out the second original fabric RS2 having the second adhesive sheet AS2 temporarily attached to one surface of the second release sheet RL2, and the second release sheet RL2 fed out by the second supply means 40 are second peeled off. The second peeling means 50 for peeling the second adhesive sheet AS2 from the second release sheet RL2 by being bent by the second release plate 53 as a member, and the first adhesive sheet AS1 and the second adhesive sheet A pressing roller 70 as pressing means for pressing and sticking at least one of the ASs 2 to a ring frame RF and a semiconductor wafer (hereinafter sometimes simply referred to as “wafer”) WF as an adherend WK, and to support the adherend WK And a moving means 80 for conveying.
In the case of the present embodiment, the second adhesive sheet AS2 in the second original fabric RS2 has the third release sheet RL3 temporarily attached to the surface opposite to the surface in contact with the second release sheet RL2. The sticking device 10 folds the third release sheet RL3 fed out by the second supply means 40 with a third release sheet release plate 63 as a third release sheet release member, so that the third release sheet RL3 from the second adhesive sheet AS2 is bent. The third release sheet peeling means 60 for peeling the film is provided.

  The first supply means 20 includes a support roller 21 that supports the first original fabric RS1, a plurality of guide rollers 22 that guide the first original fabric RS1, and a drive roller 23 that is driven by a rotation motor 23A as a drive device. And a pinch roller 24 that sandwiches the first release sheet RL1 with the drive roller 23, and a collection roller 25 that is driven by a driving device (not shown) and collects the first release sheet RL1.

  The first peeling means 30 is supported by a linear motion motor 32 as a driving device supported by an output shaft 31A of a rotating motor 31 as a driving device, and an output shaft 32A of the linear motion motor 32, and the first peeling sheet RL1. And a first release plate 33 that bends. Accordingly, the first peeling means 30 is provided by the linear motor 32 so that the first peeling plate 33 can be separated and approached in the Aa direction as a predetermined direction with respect to the pressing roller 70, and the first peeling means 30 by the rotation motor 31. The plate 33 is provided so as to be movable in the Ab direction (see FIG. 2) as a direction different from the Aa direction.

  The second supply means 40 includes a support roller 41 that supports the second original fabric RS2, a plurality of guide rollers 42 that guide the second original fabric RS2, and a drive roller 43 that is driven by a rotation motor 43A as a drive device. A pinch roller 44 that sandwiches the second release sheet RL2 with the drive roller 43, and a collection roller 45 that is driven by a driving device (not shown) and collects the second release sheet RL2.

  The second peeling means 50 is supported by a linear motion motor 52 as a driving device supported by an output shaft 51A of a rotating motor 51 as a driving device, and an output shaft 52A of the linear motion motor 52, and the second peeling sheet RL2. And a second release plate 53 that bends. Thereby, the second peeling means 50 is provided by the linear motion motor 52 so that the second peeling plate 53 can be separated and approached in the Ba direction as a predetermined direction with respect to the pressing roller 70, and the rotation motor 51 can The peeling plate 53 is provided so as to be movable in the Bb direction (see FIG. 2) as a direction different from the Ba direction.

  The third release sheet peeling means 60 is supported by a direct acting motor 62 as a driving device supported by an output shaft 61A of a rotating motor 61 as a driving device, and an output shaft 62A of the direct acting motor 62, and a third peeling sheet is provided. Driven by a third release sheet release plate 63 that bends the sheet RL3, a pinch roller 66 rotatably supported by a bracket 65 supported by an output shaft 64A of a linear motion motor 64 as a drive device, and a drive device (not shown). And a recovery roller 67 for recovering the third release sheet RL3. Accordingly, the third release sheet peeling means 60 is provided by the linear motion motor 62 so that the third release sheet release plate 63 can be separated and approached in the Ca direction as a predetermined direction with respect to the pressing roller 70, and the rotation motor. The third release sheet release plate 63 is provided by 61 so as to be movable in the Cb direction (see FIG. 2) as a direction different from the Ca direction.

  The moving means 80 is supported by a slider 81A of a linear motor 81 as a driving device, and includes a transport table 82 having a support surface 82A that can hold the adherend WK by a decompression means (not shown) such as a decompression pump or a vacuum ejector. Yes.

Next, operation | movement of the sheet sticking apparatus 10 in this embodiment is demonstrated.
First, the first and second release plates 33 and 53 and the third release sheet release plate 63 are retracted to a position sufficiently separated from the pressing roller 70 as indicated by the solid line in FIG. On the other hand, the worker sets the first original fabric RS1 and the second original fabric RS2 as shown in FIG. As described above, the first and second release plates 33 and 53 and the third release sheet release plate 63 are sufficiently separated from the press roller 70, so that the release plates and the press roller 70 shown by the solid line in FIG. Since these intervals are wider than the intervals, the operator can easily set each original fabric. Thereafter, when an automatic operation start signal is input via an input means such as an operation panel or a personal computer (not shown), the first and second peeling means 30 and 50 drive the rotation motors 31 and 51, and the first and second (2) The peeling plates 33 and 53 are moved in the Ab direction and Bb direction, respectively, and are moved to the positions indicated by the two-dot chain line in FIG. Next, the first and second release means 30 and 50 and the third release sheet release means 60 drive the linear motors 32, 52 and 62, and the first and second release plates 33 and 53 and the third release sheet release plate. 63 is moved in the Aa direction, Ba direction, and Ca direction, respectively, and moved to the position indicated by the solid line in FIG.

  Thereafter, the third release sheet peeling means 60 drives the linear motion motor 64, and the pinch roller 66 sandwiches the first and third release sheets RL 1 and RL 3 between the drive roller 23. Next, the first and second supply means 20 and 40 drive the rotation motors 23A and 43A to feed out the first and second original fabrics RS1 and RS2. As shown by the solid lines in FIG. When the sheet AS2 is peeled from the second release sheet RL2 by a predetermined length by the second release plate 53 by an imaging means such as a camera or a detection means (not shown) such as an optical sensor, the rotation motors 23A and 43A are driven. To stop. Then, the third release sheet peeling means 60 drives the linear motion motor 64 to release the pinching of the first and third release sheets RL1 and RL3 by the pinch roller 66 and the drive roller 23. Thereafter, the first supply means 20 drives the rotation motor 23A to feed out the first original fabric RS1, and the first first adhesive sheet AS1 is peeled off by the first peeling plate 33 as shown by the solid line in FIG. When it is detected by an image pickup means such as a camera or a detection means (not shown) such as an optical sensor that the sheet RL1 has been peeled off by a predetermined length, the rotation motor 23A stops driving and enters a standby state.

  Next, a transfer means (not shown) such as a human hand or an articulated robot or a belt conveyor is deposited on the support surface 82A of the transfer table 82 waiting at a predetermined standby position on the right side of the position indicated by the solid line in FIG. When the body WK is placed, the moving means 80 drives the decompression means (not shown) and sucks and holds them, and then drives the linear motor 81 to move the transport table 82 to the left. When the ring frame RF on the adherend WK has reached the sticking start position of the first adhesive sheet AS1, it is detected by an imaging means such as a camera or a detection means (not shown) such as an optical sensor. Drives the rotation motor 23A to feed out the first original fabric RS1 in accordance with the conveyance speed of the conveyance table 82. As a result, the first first adhesive sheet AS1 is peeled off from the first release sheet RL1, and is pressed against the ring frame RF by the pressing roller 70 and pasted.

  During the pasting of the first first adhesive sheet AS1, the fact that the wafer WF on the adherend WK has reached the pasting start position of the second adhesive sheet AS2 is detected by an imaging means such as a camera or a detection means (not shown) such as an optical sensor. Then, the 2nd supply means 40 and the 3rd peeling sheet peeling means 60 drive the rotation motor 43A and the linear motion motor 64, and pay | feed out 2nd original fabric RS2 according to the conveyance speed of the conveyance table 82. FIG. As a result, the leading second adhesive sheet AS2 is peeled off from the second and third release sheets RL2 and RL3, and is pressed and stuck to the wafer WF by the pressing roller 70 simultaneously with the first adhesive sheet AS1. Thereafter, when the detection means (not shown) detects that the second adhesive sheet AS2 to be attached next time has been peeled from the second release sheet RL2 by the second release plate 53 for a predetermined length, the third release sheet release means 60 directly The driving motor 64 is driven to release the first and third release sheets RL1 and RL3 from being pinched by the pinch roller 66 and the driving roller 23, and the second supply unit 40 stops driving the rotation motor 43A. When the detection means (not shown) detects that the first adhesive sheet AS1 to be attached next time has been peeled from the first release sheet RL1 by the first release plate 33 for a predetermined length, the first supply means 20 is turned to the rotation motor. The drive of 23A is stopped and it will be in a standby state again. As a result, the outer edge portion of the first adhesive sheet AS1 is affixed to the ring frame RF, and the second adhesive sheet AS2 is affixed between the first adhesive sheet AS1 and the wafer WF, thereby forming an integrated object WK1.

  When the one-piece WK1 is formed, the moving unit 80 stops driving the linear motor 81, stops the conveyance table 82 at a predetermined position, and then stops driving the decompression unit (not shown). The transfer means conveys the integrated object WK1 to the next process. Then, after the moving means 80 drives the linear motor 81 and returns the transport table 82 to the standby position, the same operation as described above is repeated.

  According to the present embodiment as described above, since both the first peeling plate 33 and the second peeling plate 53 can be advanced and retracted in the predetermined direction with respect to the pressing roller 70, the first and second peeling means 30, The first and second original fabrics RS1 and RS2 can be easily set around 50.

  The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions, or steps described with respect to those means and steps. The process is not limited at all. For example, if the 1st supply means pays out the 1st original fabric by which the 1st adhesive sheet was temporarily attached to one side of a beltlike 1st exfoliation sheet, it is the range in light of technical common sense at the time of an application. If it is in, it will not be limited at all (explanation about other means and processes is omitted).

The 1st supply means 20 may pay out the 1st original fabric by which 4th exfoliation sheet RL4 was temporarily attached to the field on the opposite side to the surface contacted with 1st exfoliation sheet RL1 in 1st adhesive sheet AS1. In this case, for example, as shown by a two-dot chain line in FIG. 1, the first supply unit 20 peels the fourth release sheet RL4 with a guide roller 22 positioned below, and is a collection roller that is driven by a drive device (not shown). 26 may be configured to collect the fourth release sheet RL4, or may be configured to collect the fourth release sheet RL4 with the same as the third release sheet release means 60 of the embodiment. Also good.
The 1st supply means 20 may pay out 1st original fabric RS1 by which the strip | belt-shaped 1st adhesive sheet base material was temporarily attached to one surface of 1st peeling sheet RL1. In this case, the first supply means 20 forms a closed loop-shaped cut in the first adhesive sheet base material on the upstream side in the feeding direction of the first original fabric RS1 with respect to the first release plate 33, and inside the cut. You may provide the 1st cutting means which forms 1st adhesive sheet AS1.

The first peeling means 30 may be configured to move the first peeling plate 33 only in the Aa direction, or may be configured to move the first peeling plate 33 only in the Ab direction. Either one of the dynamic motors 32 can be omitted.
The first peeling means 30 may have a predetermined direction as the Ab direction, a direction different from the predetermined direction as the Aa direction, or a direction different from the predetermined direction or the predetermined direction as the Aa direction in the above embodiment. Or a direction different from the Ab direction.
The 1st peeling means 30 may drive the linear motion motor 32, and may advance and retract the 1st peeling plate 33, and may change the position which peels 1st peeling sheet RL1.
The first peeling means 30 may employ a rotatable peeling roller instead of the first peeling plate 33.

The second supply means 40 drives the rotation motor 51 to bring the second adhesive sheet AS2 into contact with the first adhesive sheet AS1 supplied by the first supply means 20 before contacting the adherend WK. Alternatively, the second adhesive sheet AS2 may be brought into contact with the adherend WK before being brought into contact with the first adhesive sheet AS1 supplied by the first supply means 20, or the second adhesive sheet may be simultaneously brought into contact with them. AS2 may be contacted.
The 2nd supply means 40 may pay out 2nd original fabric RS2 by which the strip | belt-shaped 2nd adhesive sheet base material was temporarily attached to one surface of 2nd peeling sheet RL2. In this case, the second supply means 40 forms a closed loop-shaped cut in the second adhesive sheet base material on the upstream side in the feed direction of the second original fabric RS2 with respect to the second peeling plate 53, and inside the cut. You may provide the 2nd cutting means which forms 2nd adhesive sheet AS2.
The first and second cutting means may employ a cutting member such as a cutter blade, a cutter roller, a laser cutter, a heating wire, or a spray of gas or liquid.
The second supply means 40 may feed out the second original fabric RS2 at the same timing as the first supply means 20, or may stop the feeding, or the second original fabric RS2 at a different timing from the first supply means 20. May be paid out or stopped.

The second peeling means 50 may be configured to move the second peeling plate 53 only in the Ba direction, or may be configured to move the second peeling plate 53 only in the Bb direction. Either one of the dynamic motors 52 can be omitted.
The second peeling means 50 may be configured such that the predetermined direction is the Bb direction, a direction different from the predetermined direction is the Ba direction, and the predetermined direction or a direction different from the predetermined direction is the Ba direction of the above embodiment. Or a direction different from the Bb direction.
The 2nd peeling means 50 may drive the linear motion motor 52, and may advance and retract the 2nd peeling plate 53, and may change the position which peels 2nd peeling sheet RL2.
The second peeling means 50 may employ a rotatable peeling roller instead of the second peeling plate 53 or may not employ the rotation motor 51.

The third release sheet release means 60 may be configured to move the third release sheet release plate 63 only in the Cb direction, and in this case, the linear motor 62 can be omitted. In the above embodiment, the third release sheet peeling means 60 can omit the rotation motor 61. Moreover, the 3rd peeling sheet peeling means 60 may be the structure which moves the 3rd peeling sheet peeling plate 63 to Ca direction and Cb direction.
The third release sheet peeling means 60 may have a predetermined direction as the Cb direction, a direction different from the predetermined direction as the Ca direction, or a direction different from the predetermined direction or the predetermined direction in the above embodiment. It is good also as a direction different from Ca direction and Cb direction.
The third release sheet peeling means 60 can change the position where the third release sheet RL3 is peeled by driving the linear motor 62 to advance and retract the third release sheet release plate 63. For example, when the second adhesive sheet AS2 is exposed to the outside air, the adhesive force is reduced, oxidized, dried, or damp, and the function of the second adhesive sheet AS2 is reduced. When it is desired to prevent dust from entering between the second adhesive sheet AS2 as much as possible, by moving the third release sheet release plate 63 forward and backward to bring the release position of the third release sheet RL3 closer to the pressing position, the second adhesion is achieved. The time during which the sheet AS2 is exposed to the outside air can be shortened as much as possible. Further, for example, when the function of the second adhesive sheet AS2 is improved by the same principle as described above by touching the outside air, the third release sheet release plate 63 is moved forward and backward to set the release position of the third release sheet RL3. By adjusting the distance from the pressing position, the time required for the second adhesive sheet AS2 to be exposed to the outside air is made as long as possible, or the second adhesive sheet AS2 is adjusted to be exposed to the outside air for the time required to fully perform its function. You can also
The third release sheet peeling means 60 may have the same configuration as that of the first and second supply means 20 and 40, and may independently apply a peeling force to the third release sheet RL3.
The third release sheet peeling means 60 may employ a rotatable peeling roller instead of the third release sheet peeling plate 63, or may not employ the rotation motor 61 or the linear motion motor 62.
The third release sheet peeling means 60 may be configured to sandwich the second release sheet RL2 between the driving roller 23 and the pinch roller 66 without using the first release sheet RL1, and in this case, an appropriate guide roller or the like is provided. The first and third release sheets RL1 and RL3 may be prevented from interfering with each other.

As the pressing means, a pressing member made of a blade material, rubber, resin, sponge, or the like may be employed, or a structure of pressing by blowing air such as air or gas may be employed.
The pressing means may move and press the adherend WK toward the pressing member without moving the pressing member, or direct the pressing member toward the adherend WK without moving the adherend WK. It may be moved and pressed, or both the pressing member and the adherend WK may be moved and pressed together.

The moving means 80 moves the adherend WK without moving the adherend WK, or while moving the adherend WK, the first, second supply means 20, 40, the first, second peeling means 30, 50, and the third. Other means such as the release sheet peeling means 60 and the pressing roller 70 may be moved in an appropriate direction to perform a sticking operation similar to the above.
The moving means 80 may be configured to hold the adherend WK by chuck means such as a mechanical chuck or a chuck cylinder, Coulomb force, adhesive, adhesive, magnetic force, Bernoulli adsorption, or the like.
When the adherend WK is transported by another apparatus, the sheet sticking apparatus 10 may or may not have the moving means 80, and other pressing means may be employed as necessary. May or may not be.

In the first directions Aa, Ba, Ca and the second directions Ab, Bb, Cb, the first, second release plates 33, 53 and the third release sheet release plate 63 are separated from the pressing roller 70, respectively. In the direction, all may be the same direction, any two may be the same direction, or all may be different directions.
The first and second release means 30 and 50 and the third release sheet release means 60 are configured such that at least one of the first and second release plates 33 and 53 and the third release sheet release plate 63 is against the pressing roller 70. It may be provided so as to be able to advance and retreat.
In the above embodiment, the second release plate 53 and the third release sheet release plate 63 may be moved in the Bb direction and Cb direction to move them apart without moving the first release plate 33 in the Ab direction. Without moving the second release plate 53 in the Bb direction, the first release plate 33 and the third release sheet release plate 63 may be moved in the Ab direction and Cb direction to separate them. The second release plates 33 and 53 and the third release sheet release plate 63 may be moved in the Ab direction, Bb direction, and Cb direction to separate them.
In the above embodiment, the second release plate 53 and the third release sheet release plate 63 may be moved in the Ba direction and the Ca direction to move them apart without moving the first release plate 33 in the Aa direction. Instead of moving the second release plate 53 in the Ba direction, the first release plate 33 and the third release sheet release plate 63 may be moved in the Aa direction and the Ca direction to separate them.
The third release sheet RL3 may not be temporarily attached to the second original fabric RS2, and in this case, the sheet sticking device 10 may or may not have the third release sheet peeling means 60.
The sheet sticking device 10 may be configured so as to stick the first and second adhesive sheets AS1 and AS2 to the lower surface and the side surface of the adherend WK by arranging them upside down or horizontally.
The sheet sticking device 10 may stick only the first adhesive sheet AS1 to the adherend WK, or may stick only the second adhesive sheet AS2 to the adherend WK.
The sheet sticking apparatus 10 may have a configuration in which three or more supply units are provided, and a release member that bends the release sheet in each supply unit can be separated and approached to the pressing roller 70.
Furthermore, the material, type, shape, and the like of the first adhesive sheet AS1, the second adhesive sheet AS2, and the adherend WK in the present invention are not particularly limited. For example, the first and second adhesive sheets AS1 and AS2 are not limited to adhesive forms such as pressure-sensitive adhesiveness and heat-sensitive adhesiveness. When a heat-sensitive adhesive is used, a heating means such as an appropriate coil heater for heating the first and second adhesive sheets AS1 and AS2 or a heating pipe heating side may be provided. In addition, the first and second adhesive sheets AS1, AS2 are, for example, a single layer having only an adhesive layer, a base sheet and an adhesive layer, and an intermediate layer therebetween. In addition, the base sheet may have three or more layers having a cover layer on the upper surface, and may also be a so-called double-sided adhesive sheet that can peel the base sheet from the adhesive layer. The sheet may have a single layer or a multilayer intermediate layer, or may be a single layer or a multilayer without an intermediate layer. Further, as the adherend WK, for example, only the wafer WF or the ring frame RF may be used, a food wafer, a resin container, a semiconductor wafer such as a silicon semiconductor wafer or a compound semiconductor wafer, a circuit board, an electrode substrate, an optical disk, etc. The information recording substrate, the glass plate, the steel plate, the pottery, the wooden plate, the resin plate, or any other member or article can be targeted. Note that the first and second adhesive sheets AS1 and AS2 are replaced with functional and application readings, for example, information description labels, decorative labels, protective sheets, dicing tapes, die attach films, die bonding tapes, recordings. Arbitrary sheets, such as a layer formation resin sheet, a film, a tape, etc. may be sufficient.

  The drive device in the embodiment includes an electric device such as a rotation motor, a linear motion motor, a linear motor, a single-axis robot, and an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition to these, a combination of them directly or indirectly may be employed (some of them overlap with those exemplified in the embodiment).

DESCRIPTION OF SYMBOLS 10 ... Sheet sticking apparatus 20 ... 1st supply means 30 ... 1st peeling means 33 ... 1st peeling plate (1st peeling member)
40 ... second supply means 50 ... second peeling means 53 ... second peeling plate (second peeling member)
60 ... third release sheet peeling means 63 ... third release sheet release plate (third release sheet release member)
70 ... Pressing roller (pressing means)
AS1 ... first adhesive sheet AS2 ... second adhesive sheet RL1 ... first release sheet RL2 ... second release sheet RL3 ... third release sheet RS1 ... first raw fabric RS2 ..Second raw fabric WK: adherends Aa, Ba, Ca: predetermined directions Ab, Bb, Cb: directions different from the predetermined directions

Claims (4)

A first supply means for feeding out a first original fabric in which a first adhesive sheet is temporarily attached to one surface of a strip-shaped first release sheet;
A first peeling means for peeling the first adhesive sheet from the first release sheet by bending the first release sheet fed by the first supply means with a first peeling member;
A second supply means for feeding out a second original fabric in which a second adhesive sheet is temporarily attached to one surface of the belt-like second release sheet;
A second peeling means for peeling the second adhesive sheet from the second peeling sheet by bending the second peeling sheet fed by the second supply means with a second peeling member;
Pressing means for pressing and sticking at least one of the first adhesive sheet and the second adhesive sheet to an adherend,
At least one of the first peeling means and the second peeling means is provided so that the corresponding first peeling member or second peeling member can be separated and approached in a predetermined direction with respect to the pressing means. Sheet sticking device. At least one of the first peeling means and the second peeling means is provided such that the corresponding first peeling member or second peeling member can be moved in a direction different from the predetermined direction. The sheet sticking apparatus according to claim 1. A third release sheet is temporarily attached to the second adhesive sheet in the second original fabric on the surface opposite to the surface in contact with the second release sheet,
A third release sheet peeling means for peeling the third release sheet from the second adhesive sheet by bending the third release sheet fed by the second supply means with a third release sheet peeling member;
The sheet sticking according to claim 1 or 2, wherein the third release sheet peeling means is provided so that the third release sheet peeling member can be separated and approached in a predetermined direction with respect to the pressing means. apparatus. A first supply step of paying out a first original fabric in which a first adhesive sheet is temporarily attached to one surface of a strip-shaped first release sheet;
A first peeling step of peeling the first adhesive sheet with a first peeling member from the first peeling sheet fed out in the first supply step;
A second supply step of paying out a second original fabric in which a second adhesive sheet is temporarily attached to one surface of the belt-like second release sheet;
A second peeling step of peeling the second adhesive sheet with a second peeling member from the second peeling sheet fed out in the second supply step;
A pressing step of pressing and sticking at least one of the first adhesive sheet and the second adhesive sheet to an adherend by pressing means,
In at least one of the first peeling step and the second peeling step, a separation step is performed in which the corresponding first peeling member or second peeling member is spaced apart and approached in a predetermined direction with respect to the pressing means. The sheet sticking method characterized by this.

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