JP2017007672A - Sheet supply device and sheet supply method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To deliver a plurality of adhesive sheets with a simple configuration.SOLUTION: A sheet supply device includes: first supply means for delivering a first original sheet with a first adhesive sheet temporarily adhered to one surface of a belt-like first peeling sheet, peeling the first adhesive sheet from the first peeling sheet by first peeling means and supplying the first adhesive sheet; and second supply means for delivering a second original sheet with a second adhesive sheet temporarily adhered to one surface of a belt-like second peeling sheet, peeling the second adhesive sheet from the second peeling sheet by second peeling means and supplying the second adhesive sheet. The first supply means is provided to hold the first peeling sheet from which the first adhesive sheet is peeled by a drive roller rotationally driven by driving means and a first pinch roller so that the first original sheet can be delivered. The second supply means is provided to hold the second peeling sheet from which the second adhesive sheet is peeled by the drive roller and a second pinch roller so that the second original sheet can be delivered.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a sheet supply apparatus and a sheet supply method.

  2. Description of the Related Art Conventionally, an apparatus that supplies a plurality of adhesive sheets simultaneously with a plurality of supply means is known (for example, Patent Document 1).

JP 2006-181991 A

  However, in the apparatus described in Patent Document 1, the driving device of the first printing device 12 (first supply means) that supplies the first label L1 (first adhesive sheet) and the second label L2 (second Since the driving device of the second printing device 18 (second supply means) for supplying the adhesive sheet) is separate, the configuration becomes complicated, and the feeding speed of the second label L2 in addition to the feeding speed of the first label L1. There is an inconvenience that an initial adjustment to match is also required.

  An object of the present invention is to provide a sheet supply apparatus and a sheet supply method capable of simultaneously feeding a plurality of adhesive sheets with a simple configuration.

  In order to solve the above-described problems, the present invention feeds out a first original fabric in which a first adhesive sheet is temporarily attached to one surface of a strip-shaped first release sheet, and the first adhesive sheet is fed by a first release means. A first supply means that peels and supplies the first release sheet from the first release sheet; and a second original fabric in which a second adhesive sheet is temporarily attached to one surface of the belt-like second release sheet. Second supply means for peeling and supplying the second adhesive sheet from the second release sheet, and the first supply means includes a driving roller and a first pinch roller that are driven to rotate by a driving means. The first sheet is peeled from the first release sheet so that the first material can be fed out. The second supply means is configured such that the second adhesive sheet is peeled off by the drive roller and the second pinch roller. The second original sheet is sandwiched between the second original sheets. A sheet feeding apparatus which is characterized in that is provided to be feeding the.

  According to another aspect of the present invention, a first original fabric in which a first adhesive sheet is temporarily attached to one surface of a strip-shaped first release sheet is fed out, and the first adhesive sheet is removed by a first release means. A first supply step of peeling and feeding from the sheet, and a second original sheet in which the second adhesive sheet is temporarily attached to one surface of the belt-like second release sheet are fed out, and the second adhesive sheet is fed by a second peeling means. A second supply step for peeling and supplying the first release sheet from the second release sheet, and in the first supply step, the first adhesive sheet is peeled by a driving roller and a first pinch roller that are rotationally driven by a driving means. The first original sheet is fed out by sandwiching the first release sheet, and the second release sheet from which the second adhesive sheet has been peeled by the drive roller and the second pinch roller is sandwiched in the second supply step. To feed out the second material It is a sheet feeding method according to claim.

  According to the present invention, since the drive source of the second supply unit is shared with the drive source of the first supply unit, the second adhesive sheet is fed out in accordance with the feeding of the first adhesive sheet with a simple configuration. be able to.

The side view of a sheet sticking apparatus. Explanatory drawing of a modification.

Hereinafter, a sheet pasting apparatus 10 that employs a sheet feeding apparatus according to an embodiment of the present invention will be described with reference to the drawings.
In the embodiment, the X axis, the Y axis, and the Z axis are orthogonal to each other, the X axis and the Y axis are axes in a predetermined plane, and the Z axis is an axis that is orthogonal to the predetermined plane. . Furthermore, in the embodiment, when viewed from the near side of FIG. 1 parallel to the Y axis, when the direction is indicated, “up” is the arrow direction of the Z axis, “down” is the opposite direction, “left” “Right” is the direction of the arrow on the X axis, “Right” is the reverse direction, “Front” is the front direction orthogonal to the page, and “Rear” is the reverse direction of the Y axis arrow direction.

In FIG. 1, a sheet sticking apparatus 10 feeds out a first original fabric RS1 having a first adhesive sheet AS1 temporarily attached to one surface of a strip-like first release sheet RL1, and a first release plate as a first release means. 23, the first supply means 20 that peels and supplies the first adhesive sheet AS1 from the first release sheet RL1, and the second adhesive sheet AS2 that is temporarily attached to one surface of the belt-like second release sheet RL2. The raw material RS2 is fed out, supplied by the first supply means 20 and the second supply means 30 which peels and supplies the second adhesive sheet AS2 from the second release sheet RL2 with the second release plate 33 as the second release means. The first adhesive sheet AS1 and the second adhesive sheet AS2 supplied by the second supply means 30 are used as a ring frame RF and a semiconductor wafer (hereinafter simply referred to as “wafer”) WF as an adherend WK. A pressing roller 40 as a pressing means for affixing to press simultaneously, and a moving means 50 for supporting and transferring the adherend WK.
The first supply means 20 and the second supply means 30 in the present embodiment constitute a sheet supply apparatus according to the present invention.

  The first supply unit 20 includes a support roller 21 that supports the first original fabric RS1, a plurality of guide rollers 22 that guide the first original fabric RS1, a first peeling plate 23, and a driving unit as a driving device. The drive roller 24 rotated by the rotation motor 24A, the first pinch roller 25, the recovery roller 26 for recovering the first release sheet RL1 from which the first adhesive sheet AS1 has been released, and the drive roller 24 rotate. A driving pulley 24B, a driven pulley 26A that rotates together with the recovery roller 26, and a sliding belt 27 wound around the driving pulley 24B and the driven pulley 26A. It is provided so that the first original fabric RS1 can be fed out by sandwiching the first release sheet RL1 from which the first adhesive sheet AS1 has been peeled off by the 1 pinch roller 25.

  The second supply means 30 includes a support roller 31 that supports the second original fabric RS2, a guide roller 32 that guides the second original fabric RS2, a second peeling plate 33, and an output of a direct acting motor 34A as a drive device. Together with the second pinch roller 34D rotatably supported by the bracket 34C supported by the shaft 34B, the recovery roller 35 for collecting the second release sheet RL2 from which the second adhesive sheet AS2 has been peeled, and the second pinch roller 34D The driving roller 24 and the second pinch roller include a first pulley 34E that rotates, a second pulley 35A that rotates together with the collection roller 35, and a sliding belt 36 that is wound around the first pulley 34E and the second pulley 35A. 34D and 2nd peeling sheet RL2 from which 2nd adhesive sheet AS2 was peeled is inserted | pinched, and 2nd original fabric RS2 is provided so that supply | payout is possible.

  The moving means 50 includes a transport table 52 that is supported by a slider 51A of a linear motor 51 as a driving device and has a support surface 52A that can hold an adherend WK by a decompression means (not shown) such as a decompression pump or a vacuum ejector. Yes.

Next, operation | movement of the sheet sticking apparatus 10 in this embodiment is demonstrated.
First, an operator sets the first original fabric RS1 and the second original fabric RS2 to the sheet sticking apparatus 10 indicated by the solid line in FIG. Thereafter, when an automatic operation start signal is input via an input means such as an operation panel or a personal computer (not shown), the second supply means 30 drives the linear motor 34A, and the first and second pins 34 are driven by the second pinch roller 34D. The release sheets RL1 and RL2 are sandwiched between the driving roller 24. Next, the first supply means 20 drives the rotation motor 24A, and as shown by the solid line in FIG. 1, the leading second adhesive sheet AS2 is peeled from the second release sheet RL2 by a predetermined length by the second release plate 33. Is detected by an imaging means such as a camera or a detection means (not shown) such as an optical sensor, the first supply means 20 stops driving the rotation motor 24A. Next, the second supply unit 30 drives the linear motion motor 34A to release the sandwiching of the first and second release sheets RL1 and RL2 by the second pinch roller 34D and the drive roller 24. Thereafter, the first supply means 20 drives the rotation motor 24A to feed out the first original fabric RS1, and the first first adhesive sheet AS1 is first peeled off by the first peeling plate 23 as shown by the solid line in FIG. When it is detected by an image pickup means such as a camera or a detection means (not shown) such as an optical sensor that the sheet RL1 has been peeled off by a predetermined length, the rotation motor 24A stops driving and enters a standby state. The first and second release sheets RL1 and RL2 are collected by the collection rollers 26 and 35 that rotate via the slip belts 27 and 36, respectively.

  Next, a transfer means (not shown) such as a manual or multi-joint robot or a belt conveyor is deposited on the support surface 52A of the transfer table 52 waiting at a predetermined standby position on the right side of the position indicated by the solid line in FIG. When the body WK is placed, the moving means 50 drives the decompression means (not shown) and holds them by suction, and then drives the linear motor 51 to move the transport table 52 to the left. When the ring frame RF on the adherend WK has reached the sticking start position of the first adhesive sheet AS1, it is detected by an imaging means such as a camera or a detection means (not shown) such as an optical sensor. Drives the rotation motor 24A to feed out the first original fabric RS1 in accordance with the conveyance speed of the conveyance table 52. As a result, the first first adhesive sheet AS1 is peeled off from the first release sheet RL1, and is pressed against the ring frame RF by the pressing roller 40 to be pasted.

  During the pasting of the first first adhesive sheet AS1, the fact that the wafer WF on the adherend WK has reached the pasting start position of the second adhesive sheet AS2 is detected by an imaging means such as a camera or a detection means (not shown) such as an optical sensor. Then, the second supply means 30 drives the linear motion motor 34A, and the first and second release sheets RL1 and RL2 are sandwiched between the drive roller 24 by the second pinch roller 34D. As a result, the leading second adhesive sheet AS2 is peeled off from the second release sheet RL2, and is pressed and stuck to the wafer WF by the pressing roller 40 simultaneously with the first adhesive sheet AS1. Thereafter, when the second adhesive sheet AS2 scheduled to be attached next time is detected by a detection means (not shown), the second supply means 30 drives the linear motion motor 34A, and the first and second pinch rollers 34D and the drive roller 24 perform first, The sandwiching of the second release sheets RL1 and RL2 is released. Then, when the first adhesive sheet AS1 scheduled to be attached next time is detected by a detection unit (not shown), the first supply unit 20 stops driving the rotation motor 24A and enters the standby state again. As a result, the outer edge portion of the first adhesive sheet AS1 is affixed to the ring frame RF, and the second adhesive sheet AS2 is affixed between the first adhesive sheet AS1 and the wafer WF, thereby forming an integrated object WK1.

  When the integrated object WK1 is formed, the moving unit 50 stops driving the linear motor 51, stops the conveyance table 52 at a predetermined position, and then stops driving the decompression unit (not shown). The transfer means conveys the integrated object WK1 to the next process. Then, after the moving means 50 drives the linear motor 51 and returns the transport table 52 to a predetermined standby position, the same operation as described above is repeated.

  According to the present embodiment as described above, since the drive source of the second supply means 30 is shared with the drive source of the first supply means 20, the simple configuration can be adapted to the feeding of the first adhesive sheet AS1. The second adhesive sheet AS2 can be fed out.

  The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions, or steps described with respect to those means and steps. The process is not limited at all. For example, a 1st supply means pays out the 1st original fabric by which the 1st adhesive sheet was temporarily attached to one side of a beltlike 1st exfoliation sheet, and a 1st exfoliation means removes the 1st adhesive sheet from the 1st exfoliation sheet As long as it is supplied after being peeled, there is no limitation as long as it is within the range in light of the common general technical knowledge at the time of filing (explanation of other means and steps is omitted).

The 1st supply means 20 may pay out 1st original fabric RS1 by which the strip | belt-shaped 1st adhesive sheet base material was temporarily attached to one surface of 1st peeling sheet RL1. In this case, the first supply means 20 forms a closed loop-shaped cut in the first adhesive sheet base material on the upstream side in the feeding direction of the first original fabric RS1 with respect to the first peeling plate 23, and inside the cut. You may provide the 1st cutting means which forms 1st adhesive sheet AS1.
The first peeling means may employ a rotatable peeling roller instead of the first peeling plate 23.
The 1st supply means 20 may drive the collection | recovery roller 26 with a drive apparatus instead of the driving pulley 24B, the driven pulley 26A, and the sliding belt 27. FIG.

The second supply means 30 may cause the second adhesive sheet AS2 to contact the first adhesive sheet AS1 supplied by the first supply means 20 before contacting the adherend WK, or the first supply means Before contacting the first adhesive sheet AS1 supplied at 20, the second adhesive sheet AS2 may be brought into contact with the adherend WK, or the second adhesive sheet AS2 may be brought into contact with them simultaneously. .
When the second adhesive sheet AS2 is brought into contact with the first adhesive sheet AS1 supplied by the first supply means 20 before coming into contact with the adherend WK, the second supply means 30 is connected to the first adhesive sheet AS1 and the second adhesive sheet AS1. Pre-sticking pressing means for pressing the adhesive sheet AS2 with each other may be provided. Such a pre-sticking pressing means may be one that blows a gas such as air or gas in the direction toward the first adhesive sheet AS1 against the second adhesive sheet AS2, may be a pressing member such as a roller, or a decompression pump. The pressure reducing means such as a vacuum ejector may be used, and any means may be used as long as the second adhesive sheet AS2 is brought into contact with the adhesive surface of the first adhesive sheet AS1. The pre-sticking pressing means may perform gas blowing or pressing in the direction toward the second adhesive sheet AS2 with respect to the first adhesive sheet AS1, or may perform gas blowing or pressing from both directions. Anything may be used as long as the first adhesive sheet AS1 and the second adhesive sheet AS2 can be pressed against each other.
When the pre-sticking pressing means sprays a gas such as air or gas, the first adhesive sheet AS1 and the second adhesive sheet AS2 are placed above the pressure roller 40 (upper right side of the pressure roller 40) by the urging force generated by the gas blowing. ), The second supply means 30 is preferably provided with a rising prevention means. Such a roll-up preventing means may be a plate-like member 36B as shown by a two-dot chain line in FIG. 1, or a gas such as air or gas in the direction toward the second adhesive sheet AS2 with respect to the first adhesive sheet AS1. The first and second adhesive sheets AS1 and AS2 can be prevented from being rolled up.
As shown in FIG. 2, the second supply unit 30 may be configured to sandwich the second release sheet RL2 between the driving roller 24 and the second pinch roller 34D without using the first release sheet RL1, in this case, An appropriate guide roller 32 or the like may be provided so that the first and second release sheets RL1 and RL2 do not interfere with each other.
The 2nd supply means 30 may draw | feed out 2nd original fabric RS2 by which the strip | belt-shaped 2nd adhesive sheet base material was temporarily attached to one surface of 2nd peeling sheet RL2. In this case, the second supply means 30 forms a closed loop-shaped cut in the second adhesive sheet base material on the upstream side in the feeding direction of the second original fabric RS2 with respect to the second peeling plate 33, and inside the cut. You may provide the 2nd cutting means which forms 2nd adhesive sheet AS2.
The first and second cutting means may employ a cutting member such as a cutter blade, a cutter roller, a laser cutter, a heating wire, or a spray of gas or liquid.
The second supply means 30 may feed out the second original fabric RS2 at the same timing as the first supply means 20 or stop the feeding, or the second original fabric RS2 at a different timing from the first supply means 20. May be paid out or stopped.
The second peeling means may employ a rotatable peeling roller instead of the second peeling plate 33.
The sliding belts 27 and 36 may be round belts, flat belts, timing belts, sprockets, chains, wires or the like.
Instead of the first pulley 34E, the second pulley 35A, and the sliding belt 36, the second supply means 30 may drive the collection roller 35 with a driving device.

As the pressing means, a pressing member made of a blade material, rubber, resin, sponge, or the like may be employed, or a structure of pressing by blowing air such as air or gas may be employed.
The pressing means may move and press the adherend WK toward the pressing member without moving the pressing member, or direct the pressing member toward the adherend WK without moving the adherend WK. It may be moved and pressed, or both the pressing member and the adherend WK may be moved and pressed together.
The pressing means may press and affix the first adhesive sheet AS1 and the second adhesive sheet AS2 to the adherend WK separately.

The moving unit 50 moves other members such as the first and second supply units 20 and 30 and the pressing roller 40 in an appropriate direction without moving the adherend WK or while moving the adherend WK. The pasting operation similar to the above may be performed by moving.
The moving means 50 may be configured to hold the adherend WK by chuck means such as a mechanical chuck or a chuck cylinder, Coulomb force, adhesive, adhesive, magnetic force, Bernoulli adsorption or the like.
When the adherend WK is transported by another apparatus, the sheet sticking apparatus 10 may or may not have the moving means 50, and other pressing means may be employed as necessary. May or may not be.

As shown by a two-dot chain line in FIG. 2, for example, the sheet sticking device 10 feeds out a third original fabric in which a third adhesive sheet (not shown) is temporarily attached to one surface of a strip-shaped third release sheet RL3, You may provide the 3rd supply means 60 which peels and supplies a 3rd adhesive sheet from 3rd peeling sheet RL3 by the 3rd peeling means not shown equivalent to the 1st, 2nd peeling means. Such third supply means 60 is rotatably supported by a bracket 64C supported by an output shaft 64B of a linear motion motor 64A as a drive device, and a third adhesive sheet is formed by the third pinch roller 64D and the drive roller 24. What is necessary is just to set it as the structure which rolls out the 3rd original fabric on both sides of peeled 3rd peeling sheet RL3. In addition, the sheet sticking apparatus 10 may employ four or more supply units with the same configuration as the second and third supply units 30 and 60.
The sheet sticking device 10 may be configured so as to stick the first and second adhesive sheets AS1 and AS2 to the lower surface and the side surface of the adherend WK by arranging them upside down or horizontally.
In the above embodiment, the sheet sticking apparatus 10 employing the sheet feeding apparatus of the present invention has been illustrated and described. However, the sheet feeding apparatus may be used as a single unit, and in this case, the first sheet fed from the sheet feeding apparatus, 1 and 2nd adhesive sheet AS1 and AS2 can be hold | maintained manually, and it can press and adhere to the to-be-adhered body WK simultaneously.

  Furthermore, the material, type, shape, etc. of each adhesive sheet (first, second, third... Adhesive sheet AS1, AS2...) And adherend WK in the present invention are not particularly limited. . For example, each adhesive sheet is not limited to adhesive forms such as pressure-sensitive adhesiveness and heat-sensitive adhesiveness. When a heat-sensitive adhesive is employed, a heating means such as an appropriate coil heater for heating each adhesive sheet or a heat pipe heating side may be provided. In addition, each such adhesive sheet is, for example, a single layer having only an adhesive layer, a base sheet and an adhesive layer, an intermediate layer between them, and an upper surface of the base sheet. Three or more layers having a cover layer, or a so-called double-sided adhesive sheet capable of peeling the base sheet from the adhesive layer may be used. It may be a layer having an intermediate layer or a single layer or a multilayer having no intermediate layer. Further, as the adherend WK, for example, only the wafer WF or the ring frame RF may be used, a food wafer, a resin container, a semiconductor wafer such as a silicon semiconductor wafer or a compound semiconductor wafer, a circuit board, an electrode substrate, an optical disk, etc. The information recording substrate, the glass plate, the steel plate, the pottery, the wooden plate, the resin plate, or any other member or article can be targeted. In addition, each adhesive sheet can be replaced with a functional or application reading, for example, an information description label, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, a recording layer forming resin sheet, etc. Sheets, films, tapes, etc. may be used.

  The drive device in the embodiment includes an electric device such as a rotation motor, a linear motion motor, a linear motor, a single-axis robot, and an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition to these, a combination of them directly or indirectly may be employed (some of them overlap with those exemplified in the embodiment).

20 ... 1st supply means 23 ... 1st peeling plate (1st peeling means)
24A... Rotation motor (drive means)
24 ... Drive roller 25 ... First pinch roller 30 ... Second supply means 33 ... Second peeling plate (second peeling means)
34D ... 2nd pinch roller AS1 ... 1st adhesive sheet AS2 ... 2nd adhesive sheet RL1 ... 1st release sheet RL2 ... 2nd release sheet RS1 ... 1st original fabric RS2. ..Second raw fabric

Claims (2)

First, a first raw material having a first adhesive sheet temporarily attached to one surface of a strip-shaped first release sheet is fed out, and the first adhesive sheet is peeled off from the first release sheet and supplied by a first release means. 1 supply means;
The second raw material having the second adhesive sheet temporarily attached to one surface of the belt-like second release sheet is fed out, and the second adhesive sheet is supplied from the second release sheet by the second release means. 2 supply means,
The first supply means is provided so as to be able to feed out the first original fabric by sandwiching the first release sheet from which the first adhesive sheet has been peeled off by a drive roller and a first pinch roller that are rotationally driven by the drive means. The second supply means is provided so that the second original fabric can be fed out by sandwiching the second release sheet from which the second adhesive sheet has been peeled off by the drive roller and the second pinch roller. A sheet supply device. First, a first raw material having a first adhesive sheet temporarily attached to one surface of a strip-shaped first release sheet is fed out, and the first adhesive sheet is peeled off from the first release sheet and supplied by a first release means. 1 supply process;
The second raw material having the second adhesive sheet temporarily attached to one surface of the belt-like second release sheet is fed out, and the second adhesive sheet is supplied from the second release sheet by the second release means. 2 supply processes,
In the first supply step, the first raw sheet is fed out by sandwiching the first release sheet from which the first adhesive sheet has been peeled off by a drive roller and a first pinch roller that are rotationally driven by a driving means, and 2. A sheet feeding method, wherein in the second feeding step, the second original sheet is fed out by sandwiching a second release sheet from which the second adhesive sheet has been peeled off by the drive roller and the second pinch roller.

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