JP2017006823A - Deaeration method and deaerator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To efficiently deaerate, eliminate such labor hour as exchange of a hollow fiber or the like, and to downsize a device in the deaeration of a cleaning water for enhancing the impact effect of cavitation at ultrasonic oscillation.SOLUTION: A deaeration method includes: controlling a vacuum in a deaeration tank 4A to a prescribed pressure or lower by emptying of the deaeration tank 4A and vacuum drawing using a vacuum pump 2; making a cleaning liquid flow in the deaeration tank 4A to keep a liquid level constant by a liquid level gauge 12; continuing vacuum drawing from the upper part of the deaeration tank 4A while oscillating the ultrasonic wave of the oscillation frequency of 25 KHz to 2 MHz by an ultrasonic transducer 3; and after elapse of a prescribed time, stopping the ultrasonic wave oscillation and vacuum drawing to make the cleaning liquid in the tank 4A flow out. Those processes are intermittently repeated. Those deaeration processes may be continuously carried out.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a technique for degassing a cleaning liquid in order to enhance the impact effect of cavitation when deburring and cleaning is performed by the effect of cavitation by oscillating ultrasonic waves in the cleaning liquid.

Conventionally, when deburring a workpiece immersed in cleaning water using ultrasonic waves, the ultrasonic deburring and degassing device in the cleaning device according to the proposal of the present inventors (for example, Patent Document 1 and Patent Document 2). In this technology, the contact area between the liquid and gas is increased by introducing the wash water drawn from the wash tank to the multiple hollow fibers in the decylinder, and the outside of the hollow fiber. The vacuum pump is used to evacuate the gas such as oxygen dissolved in the wash water, and the degassed wash water is reintroduced into the wash tank. Deburring is performed. Here, degassing while circulating cleaning water is to improve the impact force of cavitation accompanying ultrasonic oscillation in the cleaning tank. By degassing the cleaning water, the impact force of cavitation is extremely high. It will be able to remove even a small burr.
Incidentally, as the degree of deaeration, if the dissolved oxygen (DO value) after deaeration is about 2.5 mg / l or less within about 10 minutes, deburring and cleaning are efficiently performed for practical use. This has been confirmed by the inventors' experience.

Japanese Utility Model Publication No. 6-34783 JP 2001-129306 A

  However, the technique as described above has a problem that it takes time for degassing and the working time is restricted because the washing water is circulated through the hollow fiber to degas. In addition, in the technology using hollow fibers or the like, after a certain period of time, the hollow fibers may become clogged and the deaeration performance may deteriorate, and maintenance such as periodic replacement is necessary. It was. Furthermore, in the case of a deaeration device using a hollow fiber, there is also a problem that the deaeration device is increased in size, and in the case of a hollow fiber, only water, particularly pure water can be used as a cleaning liquid. There is a problem that it cannot be applied to cleaning liquids using hydrocarbon solvents or the like.

  Therefore, in the present invention, in particular, when degassing from the cleaning water in the deburring / cleaning apparatus, the initial value of the dissolved oxygen (DO value) 7 mg / l is less than 2.5 mg / l within 10 minutes. The purpose is to eliminate the need for maintenance such as replacement, to reduce the size of the apparatus, and to eliminate restrictions on the cleaning liquid.

  In order to achieve the above object, the present invention relates to a degassing method for degassing a gas dissolved in a cleaning liquid, and the degree of vacuum in the degassing tank is increased by evacuating the degassing tank with an empty state. A step of lowering the pressure below a predetermined pressure, a step of flowing a predetermined amount of cleaning liquid into a predetermined region of the deaeration tank, and then stopping the inflow; and an ultrasonic wave having a vibration frequency of 25 KHz to 2 MHz toward the cleaning liquid in the deaeration tank There are provided a step of evacuating from a portion other than the cleaning liquid occupation area of the deaeration tank while oscillating, and a step of causing the cleaning liquid to flow out in the deaeration tank by stopping the ultrasonic oscillation and evacuation when a predetermined time has elapsed. These steps are intermittently repeated, or the cleaning liquid is allowed to flow into the deaeration tank that has been evacuated to the high level region of the deaeration tank, and then the inflow is stopped and the cleaning liquid in the deaeration tank Towards a vibration frequency of 25 KHz to 2 MHz The process of evacuating from the part other than the area occupied by the cleaning liquid in the deaeration tank while oscillating the wave, and the ultrasonic wave oscillation and evacuation are stopped when a predetermined time has elapsed, and the cleaning liquid in the deaeration tank flows out to the low level area A step of allowing the cleaning solution to flow into the high level region and a step of flowing the cleaning solution from the low level region to the low level region continuously repeated, or allowing the cleaning solution to flow into a predetermined region in the evacuated deaeration tank. Evacuating from a portion other than the region occupied by the cleaning liquid in the deaeration tank while oscillating ultrasonic waves having a vibration frequency of 25 KHz to 2 MHz toward the cleaning liquid while continuing the inflow, and a predetermined degassing chamber in the deaeration tank A step of flowing the cleaning liquid overflowing the partition into the overflow chamber of the adjacent deaeration chamber through the height partition, and a predetermined amount of the cleaning liquid in the overflow chamber Reached and to provide a step to flow out it out deaeration tank.

That is, the first method is a batch processing method, and the second and third methods are continuous processing methods, both of which generate ultrasonic waves with a vibration frequency of 25 KHz to 2 MHz toward the cleaning liquid, Since the gas dissolved in the cleaning liquid becomes a foam and separates and floats on the liquid surface, it can be efficiently degassed by evacuation. At this time, first, the predetermined pressure in the step of reducing the degree of vacuum in the deaeration tank to a predetermined pressure or less is about −96 Kpa, and by depressurizing the pressure below this level, the cleaning liquid is deaerated through the water supply channel. When it is introduced into the tank, the cleaning liquid automatically flows by simply opening the open / close valve of the water supply channel.
At this time, if the vibration frequency of the ultrasonic wave oscillated toward the cleaning liquid is less than 25 KHz or exceeds 2 MHz, the ability of the gas dissolved in the cleaning liquid to be foamed and separated is lowered. In particular, when the vibration frequency is 40 KHz, it has been clarified as a result of experiments that the separation capability is extremely high. From this experimental result, it is considered that the separation capability is particularly high when the vibration frequency is in the range of 35 to 45 KHz.

  Further, in a degassing apparatus for degassing a gas dissolved in the cleaning liquid, a degassing tank having a liquid level gauge connected to a vacuum pump through a vacuuming line, and for feeding the cleaning liquid to the degassing tank A water supply channel, an opening / closing valve in the middle of the water supply channel, a drainage channel for sending the cleaning liquid of the deaeration tank out of the deaeration tank, and an opening / closing valve in the middle of the water supply path are provided. An ultrasonic transducer capable of oscillating an ultrasonic wave having a vibration frequency of 25 KHz to 2 MHz, or a high level liquid level gauge for detecting a high level region of a deaeration tank as the liquid level gauge, and a low level Provide a low level liquid level gauge to detect the area, or a deaeration tank to which a vacuum pump is connected through a vacuum line, a water supply channel for sending the cleaning liquid to the deaeration tank, and a cleaning liquid for the deaeration tank Outside the deaeration tank A drainage channel is provided for delivery, and a drainage pump is provided in the middle of the drainage channel, and the inside of the deaeration tank is divided into a deaeration chamber and an overflow chamber via a partition having a predetermined height. A liquid level gauge is provided in the overflow chamber, the water supply channel communicates with the deaeration chamber, the drainage channel communicates with the overflow chamber, and the deaeration chamber side faces the cleaning liquid in the deaeration chamber. An ultrasonic vibrator capable of oscillating ultrasonic waves having a vibration frequency of 25 KHz to 2 MHz is provided.

  The first device is a device applied to the batch processing method, and the second and third devices are devices applied to the continuous processing method. At this time, if the liquid level gauge is provided outside the deaeration tank, it is not affected by the ultrasonic wave, which is preferable from the viewpoint of durability. Further, the apparatus can be reduced in size as compared with the use of the hollow fiber and is not restricted by the cleaning liquid.

  In order to enhance the impact effect of cavitation of ultrasonic waves oscillated in the cleaning liquid, in the degassing method for degassing the gas dissolved in the cleaning liquid, a hollow fiber is not used as in the past, and a specific ultrasonic vibration frequency range is used. By using ultrasonic waves, the deaeration effect can be improved, the time required for deaeration can be shortened, and the trouble of periodically replacing parts can be saved. Further, the apparatus can be reduced in size and is not restricted by the cleaning liquid, which is convenient.

It is explanatory drawing of the 1st structural example of the deburring and washing | cleaning apparatus in which the batch type deaeration apparatus which concerns on this invention is used. It is explanatory drawing of the 2nd structural example of the deburring and washing | cleaning apparatus in which the continuous deaeration apparatus which concerns on this invention is used. It is explanatory drawing of the 3rd structural example of the deburring and washing | cleaning apparatus in which the continuous deaeration apparatus which concerns on this invention is used.

An example of a degassing method and a degassing apparatus according to the present invention will be described with reference to the accompanying drawings.
The degassing method and degassing apparatus according to the present invention relates to a technique for degassing from cleaning water in order to enhance the impact effect of cavitation during ultrasonic oscillation particularly in deburring and cleaning using ultrasonic waves. Thus, it is possible to eliminate the trouble of deaeration and replacing the hollow fiber and the like.

First, a batch type degassing apparatus will be described.
As shown in FIG. 1, the batch type degassing apparatus 1 </ b> A includes a deaeration tank 4 </ b> A to which a vacuum pump 2 is connected through a vacuum line 15 and an ultrasonic vibrator 3 having a vibration frequency of 25 KHz to 2 MHz is attached. The vacuum pump 2 is connected to the upper surface side of the deaeration tank 4A, and the ultrasonic transducer 3 is attached to the bottom surface side of the deaeration tank 4A.

Further, a water supply path 5 through which the cleaning liquid can be introduced into the deaeration tank 4A is connected to one side surface of the deaeration tank 4A, and an open / close valve for opening and closing the water supply path is connected to the water supply path 5. Servo valve 6 is attached. Further, a drainage path 7 for draining the cleaning liquid in the degassing tank 4A to the outside of the degassing tank 4A is connected to the other side surface of the degassing tank A4. The drainage path 7 is also opened and closed. A servo valve 8 is attached as an opening / closing valve.
In this embodiment, the water absorption member that can be immersed in the cleaning liquid stored in the cleaning tank 20 used for ultrasonic deburring and cleaning at the extended end of the water supply channel 5 and suck in the cleaning liquid. 10 is connected, and a water supply member 11 capable of returning the cleaning liquid into the cleaning tank 20 is connected to the extending end of the drainage channel 7.

The deaeration tank 4A is provided with a liquid level gauge 12 capable of detecting the level of the cleaning liquid supplied into the deaeration tank 4A. Then, a system that can control the liquid level by detecting the liquid level outside the deaeration tank 4A is adopted, and even if an ultrasonic wave is oscillated in the cleaning liquid inside the deaeration tank 4A, it is affected by the ultrasonic wave and breaks down. Etc. are made difficult to occur.
In addition, the liquid level meter automatically stops supplying the cleaning liquid when the liquid level reaches a predetermined height.

  On the upper surface of the deaeration tank 4A, an air release line 13 for opening a space in the deaeration tank 4A to the atmosphere and a servo valve 14 as an opening / closing valve for opening and closing the line are provided. A servo valve 16 as an open / close valve is also attached to the vacuum line 15.

On the other hand, a vibration plate 22 having a plurality of ultrasonic vibrators 21 is disposed on the bottom surface side of the cleaning tank 20 for deburring and cleaning the object to be processed. The vibration from the diaphragm 22 in 20 is stored in a state where it can be transmitted.
The water absorption member 10 and the water supply member 11 on the deaeration device 1A side are immersed in the cleaning liquid in the cleaning tank 20, and are circulated to degas the gas dissolved in the cleaning liquid. .
Incidentally, the ultrasonic vibrator 21 on the cleaning tank 20 side has a vibration frequency of less than 50 KHz, preferably 20 to 25 KHz, and generates strong cavitation so that the deburring effect is enhanced.

The operation of the deaeration device 1A as described above will be described.
While the deaeration tank 4A is empty, the servo pump 6 of the water supply channel 5, the servo valve 8 of the drainage channel 7, and the servo valve 14 of the air release line 13 are all closed, and the vacuum pump 2 is operated. Then, the servo valve 16 of the evacuation line 15 is opened to evacuate the deaeration tank 4A. When the vacuum is drawn until the depressurization degree of the deaeration tank 4A becomes about -96 Kpa, the servo valve 6 of the water supply passage 5 is opened. Then, the cleaning liquid in the cleaning tank 20 flows into the degassing tank 4A due to the negative pressure in the degassing tank 4A, and when the liquid level gauge 12 detects that the liquid level of the cleaning liquid has reached a predetermined amount, The servo valve 6 of the water supply path 5 is automatically closed. During the suction of the cleaning liquid, the operation of the vacuum pump 2 is continued as necessary.

When a predetermined amount of cleaning liquid is introduced into the deaeration tank 4A, the servo valve 6 of the water supply channel 5 is closed, and the ultrasonic vibrator 3 is driven while the vacuum pump 2 continues evacuation. Then, the gas dissolved in the cleaning liquid is separated into bubbles by the vibration frequency of 25 KHz to 2 MHz oscillated from the ultrasonic vibrator 3, floats in the cleaning liquid, is discharged onto the liquid surface, and is sucked by the vacuum pump 2. Is done. Then, the amount of dissolved gas dissolved in the cleaning liquid becomes 2.5 mg / l or less by the operation of the ultrasonic vibrator 3 within a few minutes (within 10 minutes).
When the operation of the ultrasonic transducer 3 is stopped in about a few minutes by a timer or the like, the servo valve 16 of the evacuation line 15 is closed, the servo valve 14 of the atmosphere release line 13 is opened, and the servo valve of the drainage channel 7 is opened. 8 is opened, and the degassed cleaning liquid is returned to the cleaning tank 20. And deaeration by such deaeration tank 4A, ie, suction of a predetermined amount of cleaning liquid, deaeration, and return of cleaning liquid are repeated intermittently.

  Incidentally, in the case of a conventional deaeration device using a hollow fiber, it was necessary to periodically replace the hollow fiber, which was accompanied by an increase in the size of the device, but in the case of this application, periodically replace the hollow fiber, etc. It is not necessary to reduce the size of the apparatus. Moreover, since it is applicable also when a washing | cleaning agent and a hydrocarbon-type solvent are included as a washing | cleaning liquid, the washing | cleaning effect can be improved.

  In this embodiment, the vibration frequency of the deaeration tank 4A is set to 25 KH to 2 MHz, but the table below shows actual measurement values when the dissolved oxygen (DO value) is measured after a predetermined time by changing the frequency. As a result, in the range of 25 KHz to 2 MHz, it was found that the dissolved oxygen (DO value) after degassing was 2.5 mg / l or less within 10 minutes, which was sufficiently practical. Of these vibration frequencies, especially when the vibration frequency is 40 KHz, it has been found that the special deaeration effect is good. From this result, it is particularly effective if the vibration frequency is in the range of 35 to 45 KHz. Seem.

Next, the degassing apparatus 1B of the continuous processing method will be described first from the case of the configuration example shown in FIG.
As shown in FIG. 2, in this configuration example, as a liquid level gauge for detecting the liquid level in the deaeration tank 4B, a high level liquid level gauge 12a for detecting that the cleaning liquid is filled up to the high level region, A low level liquid level gauge 12b for detecting that the cleaning liquid is filled up to the level region is provided.

  The other configuration is the same as that of the batch type degassing apparatus 1A. However, the high level liquid level gauge 12a automatically controls the cleaning of the cleaning liquid by controlling the servo valve 6 of the water supply channel 5 based on the detection. The water supply is stopped, and the low level liquid level gauge 12b is controlled so that the servo valve 8 of the drainage channel 7 is controlled and the drainage of the cleaning liquid in the deaeration tank 4B is stopped. Yes.

  In the degassing apparatus 1B as described above, the process of evacuating the degassing tank 4A and flowing the cleaning liquid into the degassing tank 4B is the same as in the case of the degassing apparatus 1A of the batch type processing method described above. is there. Then, when the high level liquid level gauge 12a detects, the servo valve 6 of the water supply channel 5 is automatically closed and the ultrasonic vibrator 3 is driven. During this time, evacuation by the vacuum pump 2 is continued. When the deaeration for a predetermined time is completed, the servo valve 8 of the drainage channel 7 is controlled to start drainage from the drainage channel 7, and the servo valve 8 is closed by the detection of the low level liquid level gauge 12b. Next, the servo valve 6 of the water supply channel 5 is opened, the cleaning liquid is supplied into the deaeration tank 4B, the water supply is stopped by the detection of the high level liquid level gauge 12a, and the ultrasonic vibrator 3 is driven for a predetermined time. Repeated.

  The deaeration process can be continuously performed in the manner described above.

Next, a configuration example of another continuous processing type deaeration device 1C will be described with reference to FIG.
The deaeration tank 4C of the deaeration device 1C is partitioned into a deaeration chamber 18a and an overflow chamber 18b by a partition 17 having a predetermined height, and the water supply channel 5 is connected to the deaeration chamber 18a. The drainage channel 7 is connected to the overflow chamber 18b. Moreover, the ultrasonic transducer | vibrator 3 is arrange | positioned at the bottom face by the side of the deaeration chamber 18a. A drainage pump 19 is disposed in the middle of the drainage channel 7, and a liquid level gauge 12 is provided in the overflow chamber 18b for detecting the level of the cleaning liquid flowing into the overflow chamber 18b. The operation of the drain pump 19 is controlled by a signal detected by the liquid level gauge 12.

  Other configurations are the same as those in the above examples, and the performance of the ultrasonic transducer 3 is the same.

The operation and the like of the above-described continuous processing type deaeration device 1C will be described.
Initially, the steps until the cleaning liquid is introduced into the deaeration tank 4C are the same as those in the above example. When the evacuation of the deaeration tank 4C is completed, the servo valve 6 of the water supply channel 5 and the servo valve 8 of the drainage channel 7 are opened, and the introduction of the cleaning liquid into the deaeration tank 4C is started. Then, when the liquid level in the deaeration chamber 18a of the deaeration tank 4C reaches a predetermined level (for example, a position where the liquid level is slightly lower than the height of the partition 17), the vacuum pump 2 continues evacuation. The ultrasonic transducer 3 is driven.

When the liquid level in the deaeration chamber 18a rises and the liquid level exceeds the height of the partition 17, the degassed cleaning liquid overflows the partition 17 and is stored in the overflow chamber 18b. Then, when the liquid level of the cleaning liquid in the overflow chamber 18b reaches a predetermined height, the liquid level gauge 12 detects it and the drain pump 19 is actuated to drain the water through the drain channel 7 and return to the cleaning tank 20. It is. At this time, it is set so that a predetermined time elapses after the ultrasonic transducer 3 is driven until the liquid level meter 12 detects the liquid level and starts draining.
Even in this case, the amount of dissolved gas dissolved in the cleaning liquid can be efficiently reduced to about 2.5 mg / l or less, and the deaeration efficiency is extremely good.

In addition, this invention is not limited to the above embodiments. What has substantially the same configuration as the matters described in the claims of the present invention and exhibits the same operational effects belongs to the technical scope of the present invention.
For example, the use of the degassed cleaning liquid is not limited to deburring / cleaning but may be simple cleaning. Moreover, the number of the ultrasonic transducer | vibrators 3 used for deaeration tank 1A, 1B, 1C is arbitrary.

  When performing ultrasonic deburring and cleaning treatment, it is possible to efficiently degas from the cleaning liquid and increase the impact force of cavitation, so the industry that performs processing such as product polishing, deburring and cleaning Widespread use is expected.

DESCRIPTION OF SYMBOLS 1A, 1B, 1C ... Deaeration device, 2 ... Vacuum pump, 3 ... Ultrasonic vibrator, 4A, 4B, 4C ... Deaeration tank, 5 ... Water supply path, 6 ... Servo valve, 7 ... Drainage path, 8 ... Servo Valves 12, 12, 12a, 12b ... Level gauge, 15 ... Vacuum drawing line, 16 ... Servo valve, 17 ... Partition, 18a ... Deaeration chamber, 18b ... Overflow chamber, 19 ... Drain pump.

In order to achieve the above object, the present invention provides a degassing method for reducing the dissolved oxygen amount (DO value) to 2.5 mg / l or less within 10 minutes when the gas dissolved in the cleaning liquid is degassed. The process of lowering the degree of vacuum in the deaeration tank to a predetermined pressure or less by evacuating the air tank in an empty state, and flowing a predetermined amount of cleaning liquid into a predetermined area of the deaeration tank, A step of stopping, a step of evacuating from a portion other than the region occupied by the cleaning liquid in the deaeration tank while oscillating an ultrasonic wave having a vibration frequency of 35 KHz to 45 KHz toward the cleaning liquid in the deaeration tank, and when a predetermined time has elapsed. There is a process to stop the ultrasonic oscillation and vacuuming and to let the cleaning solution in the degassing tank flow out, and repeat these processes intermittently, or the degassing tank water supply stop level in the vacuumed degassing tank After the cleaning liquid has flowed into the When the steps of evacuating the portion other than the washing liquid occupying area of deaeration tank while oscillating the ultrasonic vibration frequency 35KHz~45KHz toward the cleaning liquid degassing vessel, an ultrasonic oscillator at a predetermined time has elapsed stop vacuuming the step of flowing out provided a cleaning liquid for degassing vessel until effluent stop level, the water supply or the stop level step of discharging the cleaning liquid from the step of flowing the cleaning solution to a drainage stop level to continuously repeat, Alternatively , the cleaning liquid is allowed to flow into a predetermined area in the evacuated deaeration tank, and while continuing the inflow, an ultrasonic wave having a vibration frequency of 35 KHz to 45 KHz is oscillated toward the cleaning liquid, and the part other than the cleaning liquid occupation area of the deaeration tank Evacuating from the vacuum chamber, and overflowing the partition into the overflow chamber in the deaeration chamber adjacent to the deaeration chamber in the deaeration tank through a partition having a predetermined height. A step of flowing the over washing solution, washing solution overflow chamber was set to provide a step to flow out this out deaeration tank reaches the predetermined amount.

That is, the first method is a batch type processing method, and the second and third methods are continuous type processing methods, both of which generate ultrasonic waves with a vibration frequency of 25 KHz to 2 MHz toward the cleaning liquid. Since the gas dissolved in the cleaning liquid becomes a foam and separates and floats on the liquid surface, it can be efficiently degassed by evacuation. At this time, first, the predetermined pressure in the step of reducing the degree of vacuum in the deaeration tank to a predetermined pressure or less is about −96 Kpa, and by depressurizing the pressure below this level, the cleaning liquid is deaerated through the water supply channel. When it is introduced into the tank, the cleaning liquid automatically flows by simply opening the open / close valve of the water supply channel.
At this time, if the vibration frequency of the ultrasonic wave oscillated toward the cleaning liquid is less than 25 KHz or exceeds 2 MHz, the ability of the gas dissolved in the cleaning liquid to be foamed and separated is lowered. In particular, when the vibration frequency is 40 KHz, it has been clarified as a result of experiments that the separation capability is extremely high. From this experimental result, it is considered that the separation capability is particularly high when the vibration frequency is in the range of 35 to 45 KHz.

In addition, when degassing the gas dissolved in the cleaning liquid, a vacuum pump is connected through a vacuum pumping line in a degassing device for reducing the dissolved oxygen amount (DO value) to 2.5 mg / l or less within 10 minutes. And a deaeration tank equipped with a liquid level gauge, a water supply path for feeding the cleaning liquid into the deaeration tank, an open / close valve in the middle thereof, a drainage path for sending the cleaning liquid of the deaeration tank out of the deaeration tank, and its An opening / closing valve is provided on the way, and the deaeration tank is provided with an ultrasonic vibrator capable of oscillating ultrasonic waves having a vibration frequency of 35 KHz to 45 KHz toward the cleaning liquid in the deaeration tank, or the liquid level as a total, either providing a water supply stop level level gauge for detecting the water supply stop level of deaeration tank, a drainage stop level level gauge for detecting the draining stop level, or vacuum pump is connected through a vacuum line Prolapse A tank, a water supply path for sending the cleaning liquid into the deaeration tank, and a drainage path for sending out the cleaning liquid from the deaeration tank to the outside of the deaeration tank, and a drainage pump disposed in the middle of this drainage path The inside of the deaeration tank is partitioned into a deaeration chamber and an overflow chamber through a partition having a predetermined height, a liquid level gauge is provided in the overflow chamber, and the water supply channel is provided in the deaeration chamber. The drainage channel communicates with the overflow chamber, and an ultrasonic transducer capable of oscillating ultrasonic waves with a vibration frequency of 35 KHz to 45 KHz toward the cleaning liquid in the deaeration chamber is disposed on the deaeration chamber side. I made it.

Next, the degassing apparatus 1B of the continuous processing method will be described first from the case of the configuration example shown in FIG.
As shown in FIG. 2, in this configuration example, as the liquid level gauge for detecting the liquid surface of the deaeration tank 4B, the water supply stop level level gauge 12a for detecting that the cleaning liquid to the water supply stop level is filled (hereinafter , and that.) high level gauge 12a, drainage stop level level gauge 12b which cleaning liquid to drainage stop level is detected that is filled (hereinafter, is referred to as low level gauge 12b.) the provided.

Claims (6)

A degassing method for degassing the gas dissolved in the cleaning liquid, the step of reducing the vacuum in the degassing tank to a predetermined pressure or less by evacuating the degassing tank in an empty state; A step of stopping the inflow after flowing a predetermined amount of cleaning liquid into a predetermined region of the deaeration tank, and oscillating an ultrasonic wave having a vibration frequency of 25 KHz to 2 MHz toward the cleaning liquid in the deaeration tank A step of evacuating from a portion other than the region occupied by the cleaning liquid, and a step of stopping the ultrasonic oscillation and evacuation when a predetermined time elapses and causing the cleaning liquid to flow out of the deaeration tank are repeated repeatedly. A degassing method characterized by that. A degassing method for degassing the gas dissolved in the cleaning liquid, the step of reducing the vacuum in the degassing tank to a predetermined pressure or less by evacuating the degassing tank in an empty state; The step of stopping the inflow after flowing the cleaning liquid into the high level region of the deaeration tank, and the cleaning liquid occupation region of the deaeration tank while oscillating ultrasonic waves with a vibration frequency of 25 KHz to 2 MHz toward the cleaning liquid in the deaeration tank A step of evacuating from a portion other than the above, and a step of stopping ultrasonic oscillation and evacuation when a predetermined time has elapsed and causing the cleaning liquid in the deaeration tank to flow out to the low level region, The deaeration method is characterized by continuously repeating the step of flowing the cleaning liquid from the step of flowing in the low level region. A degassing method for degassing the gas dissolved in the cleaning liquid, the step of reducing the vacuum in the degassing tank to a predetermined pressure or less by evacuating the degassing tank in an empty state; The cleaning liquid is caused to flow into a predetermined area of the deaeration chamber in the deaeration tank, and while continuing the inflow, an ultrasonic wave having a vibration frequency of 25 KHz to 2 MHz is oscillated toward the cleaning liquid, and at the same time from a portion other than the cleaning liquid occupation area A step of evacuating, a step of flowing the cleaning liquid overflowing the partition into the overflow chamber in the deaeration chamber adjacent to the deaeration chamber in the deaeration tank through a predetermined height partition, and the cleaning liquid in the overflow chamber A deaeration method comprising a step of causing a predetermined amount to flow out of the deaeration tank. A degassing device for degassing a gas dissolved in a cleaning liquid, a degassing tank having a liquid level gauge connected to a vacuum pump through a vacuuming line, and for feeding the cleaning liquid to the degassing tank Provided with a water supply channel and an open / close valve in the middle thereof, a drainage channel for sending out the cleaning liquid of the deaeration tank to the outside of the degassing tank, and an open / close valve in the middle thereof, the deaeration tank is directed to the cleaning liquid in the deaeration tank And a deaeration device comprising an ultrasonic transducer capable of oscillating ultrasonic waves having a vibration frequency of 25 KHz to 2 MHz. 5. The deaeration according to claim 4, wherein the liquid level gauge includes a high level liquid level gauge that detects a high level region of a degassing tank and a low level liquid level meter that detects a low level region. apparatus. A degassing device for degassing a gas dissolved in the cleaning liquid, a degassing tank to which a vacuum pump is connected through a vacuuming line, a water supply channel for sending the cleaning liquid to the degassing tank, and a degassing A drainage channel is provided for sending the tank cleaning liquid out of the deaeration tank. A drainage pump is disposed in the middle of the drainage channel, and the inside of the deaeration tank is separated by a partition having a predetermined height. The overflow chamber is divided into a deaeration chamber and an overflow chamber. A liquid level gauge is provided in the overflow chamber. The water supply channel communicates with the deaeration chamber. The drainage channel communicates with the overflow chamber. The deaeration apparatus is characterized in that an ultrasonic transducer capable of oscillating ultrasonic waves having a vibration frequency of 25 KHz to 2 MHz toward the cleaning liquid in the deaeration chamber is disposed on the side.

Images