KR100234630B1 - Ultrasonic cleaning apparatus - Google Patents

Abstract

The present invention relates to an ultrasonic cleaning apparatus for removing and cleaning foreign substances or burrs attached to the surface of the workpiece immersed in the cleaning liquid by radiating ultrasonic waves from the ultrasonic vibrator attached to the bottom of the ultrasonic cleaning tank. And means for degassing the cleaning liquid supplied to the ultrasonic cleaning tank, comprising a hermetically sealed sealing tank into which the cleaning liquid is introduced and a decompression means for depressurizing the inside of the sealing tank. And a degassing means for contacting the space in the sealing vessel decompressed by the air to release the dissolved gas of the cleaning liquid to degas.

Description

Ultrasonic Cleaner

1 is a schematic view showing the configuration of the ultrasonic cleaning apparatus of the first embodiment.

2 is a schematic view showing the configuration of the ultrasonic cleaning apparatus of the second embodiment.

3 is an explanatory cross-sectional view showing one configuration example of the degassing means of the second embodiment.

4 is a cross-sectional view taken along the line IV-IV of FIG.

5 is a cross-sectional view of the cleaning liquid suction prevention means of the second embodiment.

6 is an explanatory cross-sectional view showing another configuration example of the degassing means of the second embodiment.

The present invention radiates ultrasonic waves from the ultrasonic vibrator attached to the bottom of the ultrasonic cleaning tank to the cleaning liquid supplied to the ultrasonic cleaning tank to remove foreign substances or burrs attached to the surface of the workpiece immersed in the cleaning liquid. The present invention relates to an ultrasonic cleaning apparatus for removing and cleaning, and more particularly, to an ultrasonic cleaning apparatus having degassing means for degassing the cleaning liquid in order to supply the degassed cleaning liquid.

Background Art Conventionally, an ultrasonic cleaning apparatus is known in which a cleaning liquid is supplied to an ultrasonic cleaning tank having an ultrasonic vibrator at a bottom thereof, and the workpiece is immersed in the cleaning liquid by radiating ultrasonic waves to the cleaning liquid by the ultrasonic vibrator.

In such an ultrasonic cleaning apparatus, when the ultrasonic vibrator radiates ultrasonic waves to the cleaning liquid, cavitation occurs in the cleaning liquid and a shock wave (micro jet; hereinafter simply referred to as a shock wave substrate) generated when the cavitation collapses. It is considered that the foreign matter, burrs, etc. adhering to the surface of the workpiece are removed by the workpiece being drained. Therefore, in order to make the ultrasonic cleaning liquid more efficient, first, a condition in which the cavitation is likely to be generated must be provided, and the lower the concentration of the gas (hereinafter referred to as dissolved gas) dissolved in the cleaning liquid, the lower the concentration. On the contrary, when the concentration of the dissolved gas is high, the dissolved gas is vaporized by ultrasonic waves emitted from the ultrasonic vibrator, and bubbles are generated, and the ultrasonic waves are absorbed by the bubbles, which makes it difficult to generate the cavitation.

Therefore, since it is important to control the dissolved gas amount of the cleaning liquid in the ultrasonic cleaning apparatus, various degassing means for supplying the cleaning liquid degassed to the ultrasonic cleaning species have been proposed.

Such conventional degassing means includes: 1) an apparatus for installing a boiling bath and boiling the cleaning liquid to release the degassed gas, and 2) forming a hot layer near the liquid level of the degassed cleaning liquid supplied to the ultrasonic cleaning tank. And forming a low temperature layer at a deeper portion and preventing the dissolution of air at the liquid level by using a difference in the dissolution rate of the air with the liquid due to the difference in liquid temperature, thereby maintaining the degassed state of the cleaning liquid in the low temperature layer, 3 ) A device for permeating the dissolved gas of the cleaning liquid to the outside of the gas separation membrane by degassing the outside of the gas separation membrane by passing the cleaning liquid through the hollow portion of the gas separation membrane using a hollow gas separation membrane module. Etc. are known.

However, each of the above conventional degassing apparatuses has the following problems, and a solution thereof is required.

First, in the apparatus for installing the boiling bath, the whole apparatus is enlarged, it takes a long time to degas, and the degree of degassing is not so practical.

Moreover, in the apparatus which forms a high temperature layer and a low temperature layer in the said washing | cleaning liquid, since the said high temperature layer must be formed, it is difficult to apply to the washing | cleaning liquid containing a low boiling point solvent.

In addition, the apparatus using the gas separation membrane module has a problem that the gas separation membrane itself is expensive, and the gas separation membrane tends to be invaded by a specific solvent such as higher alcohol, thereby limiting the cleaning liquid that can be used.

In addition, in the apparatus using the gas separation membrane module, if oil is attached on the gas separation membrane or the biofilm is formed by the propagation of microorganisms, there is a problem in that performance is difficult in a short period of time and thus it is difficult to use.

It is an object of the present invention to provide an ultrasonic cleaning apparatus having a degassing means which can be used regardless of the components of a small and inexpensive cleaning liquid and which can degas efficiently in a short time.

In order to achieve the above object, the ultrasonic cleaning apparatus of the present invention forms a degassing means for degassing the cleaning liquid in order to supply the cleaning liquid degassed to the ultrasonic cleaning tank having the ultrasonic vibrator attached to the bottom thereof, and degassing supplied to the ultrasonic cleaning tank. An ultrasonic cleaning apparatus for immersing a workpiece in the cleaning liquid and removing the foreign matter or burrs attached to the surface of the workpiece by radiating ultrasonic waves to the cleaning liquid by the ultrasonic vibrator, wherein the degassing means is introduced with the cleaning liquid. A hermetically sealed sealing tank and pressure reducing means for depressurizing the inside of the sealing tank, wherein the cleaning liquid introduced into the sealing tank is brought into contact with a space in the sealing tank depressurized by the decompression means to It is characterized by degassing by releasing the dissolved gas.

According to such an ultrasonic cleaning apparatus, the cleaning liquid introduced into the sealing tank is brought into contact with the space in the sealing tank decompressed by the decompression means, that is, the dissolved gas of the cleaning liquid is discharged from the contact surface between the cleaning liquid and the space. Since it is degassed, it can degas well and in a short time without using a large apparatus or an expensive gas separation membrane module. In addition, the ultrasonic cleaning apparatus does not use a gas separation membrane module and does not require a part of the cleaning liquid to be at a high temperature, and therefore, any cleaning liquid can be used regardless of the components.

The depressurization means of the degassing means is characterized by comprising suction and exhaust means for sucking and evacuating the air in the sealing tank to the outside of the sealing tank to depressurize the inside of the sealing tank. As such a decompression means, the ejector etc. provided with a vacuum pump or an atmospheric opening valve are mentioned, for example.

The degassing means in the ultrasonic cleaning apparatus is connected to the decompression means at an upper portion of the sealing tank, and the cleaning liquid is introduced into the sealing bath cooling at the bottom of the sealing tank to store and depressurize the degassing means. Degassing is made by contacting the cleaning liquid to the upper space in the sealed tank. According to the degassing means having such a configuration, the upper space in the sealing tank is narrowed by introducing and storing the cleaning liquid into the sealing tank, and the upper space is decompressed by the depressurizing means formed on the sealing tank in a short time. Since a high degree of vacuum is obtained, the dissolved gas of the cleaning liquid can be easily released from the liquid level of the cleaning liquid into the upper space.

The degassing means may include an ultrasonic vibrator for radiating ultrasonic waves to the cleaning liquid stored in the sealing tank at the bottom of the sealing tank. In the degassing means having such a configuration, since the dissolved gas of the cleaning liquid is easily vaporized by radiating ultrasonic waves from the ultrasonic vibrator to the cleaning liquid stored in the sealing tank, the release of the dissolved gas can be promoted.

The ultrasonic wave emitted from the ultrasonic vibrator is in the range of 25 kHz to 1.9 MHz, preferably in the range of 1.0 to 1.9 MHz. When the frequency of the said ultrasonic wave is less than 25 kHz, an unpleasant sound may generate | occur | produce according to the radiation of an ultrasonic wave. In addition, an ultrasonic vibrator capable of emitting ultrasonic waves with a frequency exceeding 1.9 MHz has not been developed at present.

Further, the degassing means in the ultrasonic cleaning device causes the cleaning liquid introduced from the upper portion of the sealing tank to flow down from the upper side of the sealing tank to the space in the sealing tank that is depressurized by the decompression means to degas. Characterized in that. According to the degassing means having such a configuration, the cleaning liquid is introduced from the upper portion of the sealing tank and flows down the inside of the sealing tank from the upper side to the lower side, thereby increasing the contact area with the space in the sealing tank that is decompressed by the decompression means. Therefore, the dissolved gas of the cleaning liquid can be easily released into the space.

At this time, the decompression means is composed of an exhaust pipe which is installed in the sealing tank in the up and down direction and has a plurality of openings in the pipe wall and suction exhaust means which is installed outside the sealing tank and in contact with the exhaust pipe. It is characterized in that the cleaning liquid suction prevention means for preventing the cleaning liquid is sucked into the hole is formed. The decompression means can be configured to exhaust the inside of the sealing tank uniformly to depressurize, and can flow down from the upper side of the sealing tank to the lower side while preventing the cleaning liquid from being sucked into the suction decompression means.

In addition, the cleaning liquid suction prevention means is characterized in that the emergency member provided to correspond to the opening of the exhaust pipe. The cleaning liquid suction preventing means can prevent the suction of the cleaning liquid from being sucked into the pressure reducing means efficiently because the cleaning liquid flows down along the emergency member, and the air in the sealing tank is lower than the emergency member. Since it is sucked into the open hole in the gap between the exhaust pipe and the exhaust pipe, the suction exhaust of air in the sealing tank by the decompression means is not disturbed.

Further, the degassing means is provided in the sealing tank with a contact area expanding member for enlarging the contact area between the cleaning liquid flowing into the sealing tank and flowing down from the upper side to the lower side and the space in the sealing tank depressurized by the decompression means. It is characterized by. The degassing means is configured as described above, so that the contact area between the space in the sealing tank that is depressurized by the decompression means and the cleaning liquid can be further enlarged, whereby the degassing efficiency of the liquid can be improved.

The contact area enlargement member may be a plurality of partition walls formed with a plurality of small holes for partitioning the inside of the sealing tank up and down. The contact area enlargement member is configured as described above, so that the sealing film is dispersed by the plurality of small holes every time the membrane hits the wall when it is introduced into the sealing tank of the cleaning liquid and flows down from the upper side to the lower side. The space in the tank and the contact area with the cleaning liquid can be enlarged.

In addition, the contact area expansion member may be a filler that allows the cleaning liquid in the sealing tank to flow down along the surface thereof. The contact area enlargement member is configured as described above, so that when the cleaning liquid is introduced into the sealing tank and flows down from the upper side to the lower side, the contact area expanding member flows along the surface of the filler to expand the surface area, and thus the space in the sealing tank is increased. The contact area with the said cleaning liquid can be enlarged remarkably. In addition, since the time for contacting the space is longer than the case where only the membrane is dispersed in the small hole in the wall, the degassing efficiency of the cleaning liquid can be further improved. The spiral filler is preferable because it is inexpensive to wrap a SUS net or a plastic net in a spiral shape and can be easily regenerated by backwashing even if an oil film or a biofilm is blown.

In addition, the contact area enlargement member includes a plurality of partition walls formed with a plurality of small holes for partitioning up and down inside a seal tank provided in a plurality at predetermined intervals in the seal tank, and the cleaning liquid disposed by being inserted into a space between the seal walls. It may be made of a filler to flow along the surface thereof. The contact area enlargement member can be configured as described above to synergistically obtain an effect of enlarging the contact area between the space in the sealing tank and the cleaning liquid by the partition wall and the filler. In addition, since the partition wall is provided in plural in the sealing tank at predetermined intervals, and acts as a reinforcing material which prevents deformation of the sealing tank by partitioning the inside of the sealing tank up and down, the sealing tank is not deformed even when the pressure is reduced by the decompression means.

Further, the ultrasonic cleaning apparatus forms a cleaning liquid outlet for taking out the cleaning liquid from the ultrasonic cleaning tank and a cleaning liquid supply port for supplying the cleaning liquid, and forms cleaning liquid circulation means for circulating the cleaning liquid from the cleaning liquid outlet to the cleaning liquid supply port. The degassing means is formed in the middle of the washing liquid circulation means. Since the ultrasonic cleaning device is configured as described above, the cleaning liquid is circulated and degassed, so that the cleaning liquid can be reused and the usage amount can be saved.

The ultrasonic cleaning apparatus further includes a defoaming means for extinguishing the bubbles generated in the sealing tank according to the discharge of the dissolved gas when the cleaning liquid contains the detergent. It characterized in that formed on. By forming the defoaming means as described above, the ultrasonic cleaning apparatus can prevent the foam from being sucked into the decompression means or the like because the foam disappears in the sealing tank. As said defoaming means, what installed the ultrasonic vibrator toward the bubble generated from the said washing | cleaning liquid in the upper part of the said sealing tank is mentioned.

The defoaming means may be formed between the sealing tank and the suction exhaust means of the decompression means. By forming the defoaming means as described above, the ultrasonic cleaning apparatus can prevent the foam from being sucked into the decompression means or the like because the foam disappears in the vicinity of the decompression means. Examples of such defoaming means include those obtained by molding a solid defoaming agent in which the foam disappears upon contact to a shape that does not interfere with the flow of air. Examples of the solid antifoaming agent include silicone-based solid antifoaming agents.

Next, a first embodiment of the ultrasonic cleaning apparatus of the present invention will be described with reference to FIG. 1 is an explanatory diagram showing the configuration of the ultrasonic cleaning apparatus of this embodiment.

As shown in FIG. 1, in the ultrasonic cleaning apparatus 1 of this embodiment, the ultrasonic vibrator 3 is attached to the bottom of the ultrasonic cleaning tank 2, and the cleaning liquid 4 supplied to the ultrasonic cleaning tank 2 is provided. The work is immersed in the inside, and the ultrasonic vibrator 3 radiates ultrasonic waves to the cleaning liquid 4 so as to remove and clean foreign substances adhering to the surface of the work, and burrs remaining on the work during manufacture.

On the outside of the ultrasonic cleaning tank 2, a degassing means 5 for degassing the cleaning liquid 4 in order to supply the cleaning liquid 4 degassed to the ultrasonic cleaning tank 2 is formed, and the degassing means 5 Hermetically sealed sealing tanks 6a and 6b into which the cleaning liquid 4 is introduced, and decompression means 7 for depressurizing the inside of the sealing tanks 6a and 6b. The decompression means 7 includes a vacuum pump 7a as a suction exhaust means for sucking and evacuating the air in the sealing tanks 6a and 6b to the outside of the sealing tanks 6a and 6b, and the vacuum pump 7a is It is connected to each upper part of sealing tank 6a, 6b via three-way solenoid valve SV1, SV2.

On the side of the ultrasonic cleaning tank 2, a cleaning liquid outlet 8a for taking out the cleaning liquid 4 from the ultrasonic cleaning tank 2 and a cleaning liquid supply port 8b for supplying the cleaning liquid 4 to the ultrasonic cleaning tank 2 are provided. It is formed so as to face each other, and the cleaning liquid outlet 8a and the cleaning liquid supply port 8b are connected via the cleaning liquid circulation conduit 9. The circulating pump 10 for circulating the cleaning liquid 4 in the ultrasonic cleaning tank 2 from the cleaning liquid outlet 8a to the cleaning liquid supply port 8b is installed in the cleaning liquid circulation conduit 9, and the circulation pump 10 is provided. Downstream of the filter 11 is provided a filter 11 for filtering foreign matter or burrs in the cleaning liquid 4, a solenoid valve SV3 upstream of the circulation pump 10, and a solenoid valve SV4 downstream of the filter 11. ) Are installed respectively. In addition, the cleaning liquid ejection opening 8a and the cleaning liquid supply port 8b are provided with a stop value (not shown) so that air is not swept away from the cleaning liquid 4 when the cleaning liquid 4 is circulated.

To each bottom of the sealing tanks 6a and 6b, conduits 12a and 12b for introducing the cleaning liquid 4 into the sealing tanks 6a and 6b are connected via solenoid valves SV5 and SV6. The cleaning liquid introduction conduits 12a and 12b join upstream of the sealing tanks 6a and 6b to form one cleaning liquid introduction conduit 12. In addition, the conduit 12 for introducing the cleaning liquid is branched into two upstream, and the conduit 12c on one side thereof is connected to the conduit 9 for circulating the cleaning liquid between the circulation pump 10 and the solenoid valve SV3. The other conduit 12d is connected to the cleaning liquid circulation conduit 9 between the filter 11 and the solenoid valve SV4 via the solenoid valve SV8.

Moreover, the ultrasonic vibrators 13a and 13b which radiate an ultrasonic wave to the washing | cleaning liquid 4 introduce | transduced in the sealing tank 6a, 6b are provided in the bottom part of the sealing tank 6a, 6b, respectively.

In the ultrasonic cleaning tank 2, a preliminary bath 14 containing an overflowing washing liquid 4 and a preliminary washing liquid 4 is adjacent to each other, and the temperature of the washing liquid 4 is stored in the preliminary tank 14. The heater 15 for maintaining the constant is provided. The volume of the preliminary vessel 14 is larger than the sum of the volumes of the sealing vessels 6a and 6b, and the preliminary vessel 14 is connected to the cleaning liquid circulation conduit 9 at its bottom by a conduit 16. In addition, the ultrasonic cleaning tank 2 is connected to the cleaning liquid circulation conduit 9 at its bottom by a conduit 17.

Next, operation | movement of the ultrasonic cleaning apparatus 1 of a present Example is demonstrated.

In the ultrasonic cleaning apparatus 1 of the present embodiment, the ultrasonic cleaning tank 2 is filled with the degassed cleaning liquid 4, and the circulating pump 10 provided in the cleaning liquid circulation conduit 9 is operated to operate the cleaning liquid circulation conduit ( 9) The cleaning liquid 4 is circulated from the cleaning liquid outlet 8a to the cleaning liquid supply port 8b, and the ultrasonic vibrator 3 is operated.

And the workpiece | work which a foreign material, a burr, etc. adhered to the surface is immersed in the degassed washing | cleaning liquid 4 in the ultrasonic washing tank 2. As shown in FIG. The immersed workpiece is cleaned by removing the foreign matter, burrs, etc. by the action of cavitation generated by the ultrasonic waves radiated from the ultrasonic vibrator 3 to the cleaning liquid 4.

When the cleaning of one workpiece is completed as described above, the finished workpiece is taken out of the cleaning liquid 4 and a new workpiece is immersed in the cleaning liquid 4. The workpiece is cleaned by repeating the above operation, but if the above operation is repeated, the foreign matter or burr accumulates in the cleaning liquid 4, and on the other hand, air is dissolved and the dissolved gas amount increases, so that the cavitation tends to occur. Will suffer.

Here, in the ultrasonic cleaning apparatus 1 of the present embodiment, the cleaning liquid 4 is circulated from the cleaning liquid outlet 8a to the cleaning liquid supply port 8b through the cleaning liquid circulation conduit 9 and installed in the cleaning liquid circulation conduit 9. The foreign substance or burr is removed by the filter 11 and the cleaning liquid 4 derived from the cleaning liquid circulation conduit 9 is introduced into the sealing tanks 6a and 6b through the cleaning liquid introduction conduits 12a and 12b. Degassing by the degassing means (9).

Next, the degassing operation by the degassing means 9 is demonstrated.

In the ultrasonic cleaning apparatus 1, normally only the solenoid valves SV3 and SV4 provided in the conduit 9 for introducing the cleaning liquid are opened, and the solenoid valves SV5 and 12 respectively provided for the conduits 12a, 12b, 12c and 12d for the introduction of the cleaning liquid. Since the SV6, SV7 and SV8 are closed, the cleaning liquid 4 is circulated from the cleaning liquid outlet 8a to the cleaning liquid supply port 8b through the cleaning liquid circulation conduit 9. Here, when degassing the cleaning liquid 4, first, the solenoid valve SV4 is closed and the solenoid valves SV5 and SV8 are opened. In addition, the three-way solenoid valve SV1 is opened to the outside air side. In this case, since only the solenoid valves SV3, SV8, and SV5 are opened, the cleaning liquid 4 is introduced into the sealing tank 6a on one side via the cleaning liquid circulation conduit 9 and the cleaning liquid introduction conduits 12d and 12a.

Subsequently, when a predetermined amount of the cleaning liquid 4 is introduced into the sealing tank 6a, the solenoid valves SV5 and SV8 are closed and the solenoid valve SV1 is opened to return the cleaning liquid 4 to the normal circulation state.

Then, the three-way solenoid valve SV1 is opened to the vacuum pump 7a side, and the vacuum pump 7a is operated. In this way, the upper space 18a of the sealing tank 6a is narrowed by introducing the washing | cleaning liquid 4, and high vacuum degree can be acquired easily by decompression by the vacuum pump 7a. As a result, since the cleaning liquid 4 comes into contact with the reduced pressure upper space 18a, the dissolved gas contained in the cleaning liquid 4 is discharged to the upper space 18a and degassed. At this time, when the ultrasonic vibrator 13a is simultaneously operated to radiate ultrasonic waves into the cleaning liquid 4 introduced into the sealing tank 6a, the dissolved gas is easily vaporized and the release thereof is promoted.

When degassing the cleaning liquid 4 of the total liquid amount by the degassing means 9, the effect which the said ultrasonic wave at the time of radiating the said ultrasonic wave has on the degassing of the cleaning liquid 4 is shown in following Table 1.

As can be seen from Table 1, by discharging ultrasonic waves from the ultrasonic vibrators 13a and 13b to the cleaning liquid 4 introduced into the sealing tanks 6a and 6b, the time required for degassing operation is shortened and the dissolved oxygen concentration reached It can be seen that the lower. This is due to the fact that vaporization and release of the dissolved gas of the cleaning liquid 4 can be promoted by the radiation of the ultrasonic waves.

The frequency of the ultrasonic waves radiated from the ultrasonic vibrators 13a and 13b is effective in the range of 25 kHz to 1.9 MHz, and particularly preferably in the range of 1.0 to 1.9 MHz. However, when the frequency of the ultrasonic wave is less than 25 kHz, an unpleasant sound may occur, so care should be taken. In addition, although the frequency of the said ultrasonic wave is considered to be effective also in 1.9 MHz or more, the ultrasonic vibrator which radiates the frequency of 1.9 MHz or more is not manufactured at this time.

In the ultrasonic cleaning under normal conditions, the gas dissolved in the cleaning liquid 4 is air, and since the composition of the air is almost constant, Table 1 represents the dissolved gas concentration by the dissolved oxygen concentration.

When a predetermined time elapses from the start of the degassing operation, the solenoid valve SV4 is closed and the solenoid valves SV6 and SV8 are opened. The three-way solenoid valve SV2 is opened to the outside air side. In this case, only the solenoid valves SV3, SV8, and SV6 are opened, so that the cleaning liquid 4 is introduced into the other sealing tank 6b through the cleaning liquid circulation conduit 9 and the cleaning liquid introduction conduits 12d and 12b. .

Subsequently, when a predetermined amount of the cleaning liquid 4 is introduced into the sealing tank 6b, the solenoid valves SV6 and SV8 are closed and the solenoid valve SV4 is opened to return the cleaning liquid 4 to the normal circulation state. Then, by opening the three-way solenoid valve SV2 toward the vacuum pump 7a and operating the vacuum pump 7a, the cleaning liquid 6 introduced into the sealing tank 6b is similar to the case of the sealing tank 6a described above. At the same time, the discharging of the dissolved gas is promoted by operating the ultrasonic vibrator 13b.

On the other hand, the cleaning liquid 4 in the sealing tank 6a in which degassing was completed first, the solenoid valves SV3 and SV8 were closed, the solenoid valves SV5 and SV7 were opened, and the 3-way solenoid valve SV1 was opened to the outside air side. Is sucked out by the circulation pump 10 installed in the circulating conduit 9 for circulating the cleaning liquid, so that the ultrasonic cleaning tank (8b) is supplied to the cleaning liquid supply port 8b through the rinsing liquid introduction conduits 12a and 12c and the rinsing liquid circulation conduit 9. 2) You are returned to me. When all the cleaning liquid 4 in the sealing tank 6a is returned to the ultrasonic cleaning tank 2, the solenoid valves SV5 and SV7 are closed, and the solenoid valve SV3 is opened to make a normal circulation state.

Then, when the degassing operation of the cleaning liquid 4 in the other sealing tank 6b is completed, the operation of the vacuum pump 7a is stopped, the solenoid valve SV3 is closed, and the solenoid valves SV6 and SV7 are opened. The directional solenoid valve SV2 is opened to the outside air to return the cleaning liquid 4 to the ultrasonic cleaning tank 2, and then the solenoid valves SV6 and SV7 are closed, and the solenoid valve SV3 is opened to normal circulation.

According to the ultrasonic cleaning apparatus 1 of this embodiment, the cavitation is always generated by continuously performing the degassing operation or intermittently according to the dissolved gas amount of the washing liquid 4. Easy concentration control In addition, the degassing operation can be performed automatically by operating the solenoid valves SV1 to SV8, and when the degassing operation is performed automatically, there is no need to stop the cleaning of the work, so that the cleaning quality of the work can be uniform. It can be done.

Moreover, although the case where two sets of sealing tanks 6a and 6b were used in this Example was shown, the number of tanks can be increased and the degassing of the washing liquid 4 which is more effective can be performed.

Next, a second embodiment of the ultrasonic cleaning apparatus of the present invention will be described with reference to FIG. 2 is an explanatory diagram showing the configuration of the ultrasonic cleaning apparatus of this embodiment.

As shown in FIG. 2, in the ultrasonic cleaning apparatus 21 of this embodiment, the ultrasonic vibrator 23 is attached to the bottom of the ultrasonic cleaning tank 22a, and the cleaning liquid 24 supplied to the ultrasonic cleaning tank 22a is provided. The work is immersed in the inside, and the ultrasonic vibrator 23 radiates ultrasonic waves to the cleaning liquid 24 to remove and clean foreign matter adhering to the surface of the work, and burrs remaining on the work during manufacture. In this embodiment, in the ultrasonic cleaning apparatus 21, tap water containing 10% of a nonionic surfactant detergent is used as the cleaning liquid 24.

On the side of the ultrasonic cleaning tank 22a, a cleaning liquid outlet 25a for taking out the cleaning liquid 24 from the ultrasonic cleaning tank 22a and a cleaning liquid supply port 25b for supplying the cleaning liquid 24 to the ultrasonic cleaning tank 22a are mutually provided. It is formed to face each other, and each stop value which is not shown is built in. Outside the ultrasonic cleaning tank 22a, a degassing means 28 for degassing the cleaning liquid 24 is provided to supply the cleaning liquid 24 degassed to the ultrasonic cleaning tank 22a, and the degassing means 28 is provided. The silver is connected to the cleaning liquid outlet 25a through the cleaning liquid introduction conduit 27a to be degassed, and to the cleaning liquid supply port 25b through the degassing cleaning liquid supply conduit 27b.

That is, in the ultrasonic cleaning apparatus 21 of this embodiment, the cleaning liquid circulation means is formed by the cleaning liquid introduction conduit 27a and the degassed cleaning liquid supply conduit 27b to be degassed, and the degassing means ( 28) is formed.

Next, the structure of the degassing means 28 of this embodiment is demonstrated based on FIG. 3 is an explanatory cross-sectional view showing an example of the configuration of the degassing means 28 of this embodiment.

As shown in FIG. 3, the degassing means 28 introduces a conduit 27a for degassing cleaning liquid to introduce the degassing cleaning liquid 24 into the upper side of the sealing tank 31 in which both ends of the SUS pipe are hermetically closed. ) Is connected. In the middle of the cleaning solution introduction conduit 27a to be degassed, a cleaning solution introduction pump 32 is provided, and the sealing tank 31 is connected to the cleaning solution introduction conduit 27a to be degassed together with the cleaning solution introduction conduit 27a to be degassed. The cleaning liquid introduction means for degassing which introduce | transduces the cleaning liquid 24 in the inside is comprised.

In the sealing tank 31, as one of the contact area enlargement members which enlarges the contact area between the cleaning liquid 24 and the space in the sealing tank 31, a plurality of small holes for partitioning the inside of the sealing tank 31 up and down ( The plurality of partition walls 34 through which 33, 33, ... are drilled are arranged at predetermined intervals. The cleaning liquid 24 introduced into the sealing tank 31 through the cleaning liquid introduction conduit 27a to be degassed by the cleaning liquid introduction pump 32 is dispersed by the small holes 33, 33,... Of the partition wall 34. While flowing down from the upper side of the sealing tank 31.

The sealing tank 31 is a pressure reducing means for depressurizing the inside of the tank, and the exhaust pipe 35 provided in the vertical direction of the sealing tank 31 through the upper end surface 31a of the sealing tank 31 and the partition walls 34, 34,... And an ejector 36 which is provided outside the sealing tank 31 and connected to the exhaust pipe 35 as suction suction means. The ejector 36 is provided with the atmospheric release valve which is not shown in figure.

A plurality of open holes 37, 37,... Are formed in the pipe wall of the exhaust pipe 35. In addition, the exhaust pipe 35 is an emergency member 38 which shields in correspondence with the open hole 37 as a cleaning liquid suction prevention means for preventing the flowing down of the cleaning liquid 24 into the open hole 37. , 38, ...) are attached.

In the sealing tank 31, the filler 39 is filled as another contact area enlargement member around the exhaust pipe 35 between the partition walls 34. The filler 39 may be any material as long as the washing liquid 24 flows down along the surface thereof. However, the filler 39 is inexpensively wound in a spiral shape made of SUS or plastic, and backwashed even when oil film, biofilm or the like adheres. It is desirable to be able to easily reproduce by.

A degassed cleaning solution supply conduit 27b is connected near the bottom of the sealing tank 31, and a cleaning solution supply pump 40 is installed in the middle of the degassed cleaning solution supply conduit 27b, and the degassed cleaning solution supply Together with the conduit 27b, the degassed washing | cleaning liquid supply means which supplies the degassed washing | cleaning liquid 24 to the ultrasonic cleaning tank 22a through the degassing washing | cleaning supply pipe 27b is comprised.

The outer side surface of the sealing tank 31 is provided with the communication tube 41 which connects the upper side and the lower side of the sealing tank 31, The predetermined position of the communication tube 41 is built in the communication tube 41, and the sealing tank ( 31. Capacitive level switches 42a and 42b are provided to detect the liquid level in the sealing tank 31 by a float that interlocks with the liquid level in the liquid 31, respectively, and are electrically connected to the degassing control unit 43, respectively. Connected. In addition, the degassing control device 3 is connected to the cleaning liquid introduction pump 32 and the cleaning liquid supply pump. In addition, the degassing control device 43 is electrically connected to the cleaning liquid introduction pump 32 and the cleaning liquid supply pump 40.

When the predetermined upper limit position of the liquid level in the sealing tank 31 is detected by the level switch 42a, the degassing control device 43 stops the washing liquid introduction pump 32 and simultaneously operates the washing liquid supply pump 40. The cleaning liquid 24 stored in the sealing tank 31 is discharged and supplied to the ultrasonic cleaning tank 22a through the degassed cleaning liquid supply conduit 27b. When the predetermined lower limit position of the liquid level in the sealing tank 31 is detected by the level switch 42b, the cleaning liquid supply pump 40 is stopped and the cleaning liquid introduction pump 32 is operated to again seal the sealing tank 31. The degassed washing liquid is stored in the tank.

An ultrasonic vibrator 44 is attached to the upper inner wall of the sealing tank 31 as a defoaming means for dissipating bubbles generated when the cleaning liquid 24 contains detergents such as surfactants as the dissolved gas is released. .

Moreover, as shown in FIG. 2, the adjacent washing tank 22b is provided in the ultrasonic washing tank 22a, and the washing | cleaning liquid 4 which overflows when the workpiece is immersed in the ultrasonic washing tank 22a is preliminary. It is supposed to be accommodated in the tank 22b. A bottom discharge conduit 29a and an overflow liquid discharge conduit 29b are provided at the bottom of the ultrasonic cleaning tank 22a and the preliminary tank 22b, respectively, to degas upstream of the cleaning liquid introduction pump 32. It is connected to the washing | cleaning liquid introduction conduit 27a. Each conduit is provided with a flow control valve 30, it is possible to adjust the flow rate.

Next, the operation of the ultrasonic cleaning apparatus 21 of the present embodiment will be described.

In the ultrasonic cleaning apparatus 21 according to the present embodiment, the ultrasonic vibrator 23 is operated by filling the degassed cleaning liquid 24 in the ultrasonic cleaning tank 22a in the same manner as in the first embodiment, so that foreign matters or burrs are attached to the surface. The workpiece is washed by immersing the workpiece into the cleaning liquid 24 accommodated in the ultrasonic cleaning tank 22a.

Repeating the above washing operation dissolves the air in the washing liquid 24 and increases the amount of dissolved gas. Thus, the degassing means 28 through the washing liquid introduction conduit 27a through which the washing liquid 24 is degassed by the washing liquid introducing pump 32. And degassed by introducing into the sealing tank 31 of the c), and the degassed cleaning liquid 24 is discharged from the sealing tank 31 by the cleaning liquid supply pump 40 and degassed by the cleaning liquid supply conduit 27b. Return to (22a).

Next, the degassing operation by the degassing means 28 is demonstrated.

First, the washing | cleaning liquid 24 taken out from the ultrasonic washing tank 22a is introduce | transduced into the sealing tank 31 via the washing | cleaning liquid introduction conduit 27a which will be degassed by the washing | cleaning liquid introduction pump 32. As shown in FIG. At this time, the inside of the sealing tank 31 is sucked by the ejector 36 through the exhaust pipe 35 shown in FIG. 3, and is depressurized. The exhaust pipe 35 is provided in the up-and-down direction of the sealing tank 31, and since the openings 37, 37, ... are formed in the pipe wall, the inside of the sealing tank 31 is uniformly about -650 mmHg, for example. Decompression

The cleaning liquid 24 introduced into the sealing tank 31 flows down the inside of the sealing tank 31 from the upper side to the lower side, and dissolved gas is released by contacting the space in the pressure-sensitive sealing tank 31 as described above.

Next, the structure of the partition wall 34 in the sealing tank 31 is demonstrated based on FIG. 4 is a cross-sectional view taken along the line IV-IV of FIG. 3 and shows the structure of the partition wall 34.

Since the partition wall 34 has a plurality of small holes 33, 33,... Circumferentially formed around the exhaust pipe 35 passing through the center as shown in FIG. 4, the cleaning liquid introduced into the sealing tank 31 ( 24 is dispersed by the small holes 33, 33,... Of the wall 34, and the contact area between the pressure-reduced space and the cleaning liquid 24 is enlarged by flowing the inside of the sealing tank 31 from the upper side to the lower side. As a result, the dissolved gas is efficiently discharged.

In addition, since the filling material 39 is filled in the sealing tank 31 between the partition walls 34, the dispersed washing liquid 24 flows down along the surface of the filling material 39 to reduce the pressure. The contact area between the space and the cleaning liquid 24 is remarkably increased, and the contact time with the space is longer than when the membrane is dispersed and flowed down by the small holes 33, 33,... Of the wall 34. You lose. Accordingly, the cleaning liquid 24 promotes the release of the dissolved gas and improves the degassing effect.

Since the partition wall 34 is arranged in a plurality so as to partition the inside of the sealing tank 31 up and down, the cleaning liquid 24 flows down along the surface of the filler 39 and is small every time the partition wall hits the wall 34. Since it is dispersed by the holes 33, 33, ..., it does not concentrate locally. Thus, the dissolved gas is released efficiently.

In addition, since the partition wall 34 is provided in plurality in the sealing tank 31 at predetermined intervals as mentioned above, and also acts as a reinforcing member of the sealing tank 31, the sealing tank 31 has the inside inside as mentioned above. No deformation even under reduced pressure.

On the other hand, since the open hole 37 formed in the exhaust pipe 35 faces the filler 39, the cleaning liquid 24 flowing along the surface of the filler 39 may be sucked. Therefore, the emergency member 38 which shields the open hole 37 of the exhaust pipe 35 is attached to prevent the cleaning liquid 24 from being sucked into the open hole 37.

Next, the structure and operation of the emergency member 38 will be described with reference to FIG. 5 is an explanatory cross-sectional view of the cleaning liquid suction prevention means (emergency member 38) of this embodiment.

Since the emergency member 38 is attached to the upper part of the open hole 37 and shields the open hole 37 toward the lower side as shown in FIG. 5, the gas in the sealing tank 31 is discharged. It is possible to prevent the cleaning liquid 24 sucked into the exhaust pipe 35 from the lower open hole portion 37a of 38 and flowing into the open hole 37 in the direction of the arrow in FIG.

The cleaning liquid 24 degassed as mentioned above is stored in the sealing tank 31, and the liquid level rises gradually at the bottom. When the liquid level of the cleaning liquid 24 rises, the cleaning liquid 24 enters the exhaust pipe 35, but the cleaning liquid 24 is not sucked into the ejector 36.

Since the washing | cleaning liquid 24 contains surfactant as mentioned above, it foams violently according to discharge | release of the said dissolved gas, and foam is filled in the sealing tank 31. FIG. Since the foam is not easily removed when it is left, there is a fear that the bubbles rise with the liquid level of the cleaning liquid 24 and are sucked into the ejection 36 from the exhaust pipe 35. Here, the fraud bubbles are extinguished by appropriately radiating ultrasonic waves from the ultrasonic vibrator 44 attached to the upper inner wall of the sealing tank 31.

When the cleaning liquid 24 is stored in the sealing tank 31 in a predetermined amount, that is, when the liquid level of the cleaning liquid 24 in the sealing tank rises and reaches the upper limit position of the predetermined amount, the level switch provided in the communication tube 41. The detection signal is sent to the degassing control device 43 by 42a. When the degassing control device 43 receives the upper limit position detection signal of the liquid level from the level switch 42a, the cleaning liquid introduction pump 32 is stopped and the cleaning liquid supply pump 40 is operated. As a result, the degassed cleaning liquid 24 stored in the sealing tank 31 is supplied to the ultrasonic cleaning tank 22a via the cleaning liquid supply conduit 27b degassed by the cleaning liquid supply pump 40.

When the degassed cleaning liquid 24 is supplied to the ultrasonic cleaning tank 22a, that is, when the liquid level of the cleaning liquid 24 in the sealing tank 31 descends and reaches the lower limit position of the predetermined amount, the level provided in the communication tube 41. The detection signal is sent to the degassing control device 43 by the switch 42a. When the degassing control device 43 receives the lower limit position detection signal of the liquid level from the level switch 42b, the cleaning liquid supply pump 40 is stopped and the cleaning liquid introduction pump 32 is operated. As a result, the cleaning liquid 24 to be degassed again is introduced into the sealing tank 31 by the cleaning liquid introduction pump 32, and the degassed cleaning liquid 24 having undergone the above-described process is introduced into the sealing tank 31. It will be stored.

Therefore, the degassing means 28 is automatically supplied to the ultrasonic cleaning tank 22a whenever the degassed cleaning liquid 24 is stored in a predetermined amount, and the supply of the degassed cleaning liquid 24 to the ultrasonic cleaning tank 22a is prevented. When the cleaning liquid 24 degassed again automatically starts to be stored in the sealing tank 31 when it is completed, the liquid level of the cleaning liquid 24 in the sealing tank 31 rises too much and the degassed cleaning liquid 24 is ejected. The suction can be prevented from being sucked into the s), and the degassing cleaning liquid 24 can be efficiently supplied to the ultrasonic cleaning tank 22a.

In the present embodiment, as shown in FIG. 2, only one base of the degassing means 28 is connected to the ultrasonic cleaning apparatus 21, but a plurality of the degassing means 28 are connected in parallel to each other. The operation may be performed so that the timing of the degassing operation does not overlap. In this way, the degassed cleaning liquid 24 can be continuously supplied to the ultrasonic cleaning tank 22a.

Next, another structural example of the degassing means 28 used in a present Example is demonstrated based on FIG. 6 is an explanatory cross-sectional view showing another configuration example of the degassing means 28 of the present embodiment.

In the degassing means 28 shown in FIG. 6, a defoaming tank 45 for removing bubbles is provided between the exhaust pipe 35 and the ejector 36 of the sealing tank 31. The same configuration as the degassing means 28 shown in FIG. 3 is carried out except that the ultrasonic vibrator 44 shown is not provided. The defoaming tank 45 is provided with a silicone-based solid antifoaming agent (manufactured by Jeil Pharmaceutical Co., Ltd., trade name: Anpol MT-9) having a shape that does not interfere with the flow of gas. When the defoaming tank 45 is installed, even when the washing liquid 24 contains detergent, bubbles generated by the discharge of the dissolved gas are sucked into the exhaust pipe 35 so that the bubbles disappear due to contact with the solid defoaming agent. Aspiration to 36 can be prevented.

Claims (3)

A degassing means for degassing the cleaning liquid for supplying the degassed cleaning liquid to the ultrasonic cleaning tank having the ultrasonic vibrator attached to the bottom thereof, immersing the workpiece in the degassed cleaning liquid supplied to the ultrasonic cleaning tank, and ultrasonic waves in the cleaning liquid from the ultrasonic vibrator An ultrasonic cleaning apparatus for removing and cleaning foreign matter or burrs attached to the surface of the workpiece by radiating a gas, wherein the degassing means includes a hermetically sealed sealing tank for introducing a cleaning liquid from the upper side to flow down; An exhaust pipe installed in the tank in the vertical direction and having a plurality of open holes at predetermined intervals in the pipe wall, an ejector connected to an upper portion of the exhaust pipe and sucking gas in the sealing tank and exhausting it out of the sealing tank; It is installed in correspondence with the open hole, and the cleaning liquid is sucked into the open hole. Filler formed by filling between the emergency member which prevents it from falling, and a plurality of small holes which partition across the inside of the said sealing tank between the open hole formed in the said exhaust pipe, and each said membrane between the walls. Ultrasonic cleaning apparatus comprising a. The ultrasonic cleaning apparatus according to claim 1, wherein an ultrasonic vibrator for dissipating the bubbles by dissipating the ultrasonic waves in the bubbles generated in accordance with the discharge of the dissolved gas when the cleaning liquid contains a detergent is provided. The method of claim 1, wherein the silicon-based solid defoamer is provided between the exhaust pipe and the ejector of the sealing tank to remove the contact with the bubbles generated in accordance with the discharge of the dissolved gas when the cleaning liquid contains a detergent. Ultrasonic cleaning device.