JP2017003460A - Radiation detector and method for manufacturing same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a radiation detector that can suppress the influence of gas generated from an adhesive agent.SOLUTION: A radiation detector 100 includes a detection element 10 for detecting radiation, a cooling element 20 for cooling the detection element 10, and a container 30 accommodating the detection element 10 and the cooling element 20. The container 30 comprises a first outer shell member 32 having a window 33 for allowing the radiation to pass through, a second outer shell member 34 connected to the cooling element 20, and a third outer shell member 36 formed of a material having electrical resistivity larger than that of a material forming the second outer shell member 34, and connected to the first outer shell member 32 and the second outer shell member 34.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a radiation detector and a manufacturing method thereof.

  As a radiation detector for detecting radiation such as X-rays, a silicon drift detector (SDD) is known. In the silicon drift detector, a Peltier element is generally used for cooling the detection element (see, for example, Patent Document 1).

  In such a radiation detector, the detection element and the Peltier element are accommodated in an airtight container (capsule). The inside of the container is, for example, a vacuum environment or an inert gas environment, and aims to reduce the influence of heat insulation and environmental fluctuation. The container in which the detection element and the Peltier element are accommodated is formed, for example, by adhering a lid portion with an adhesive or the like to a base portion to which the detection element or the Peltier element is attached.

JP 2010-169659 A

  However, when an adhesive is used to form a container, the gas generated from the adhesive may increase the pressure inside the container and reduce the heat insulation effect, or the detection element may be contaminated. . In particular, when the inside of the container is in a vacuum environment, since the adhesive must be bonded in the vacuum chamber, the curing time of the adhesive becomes long, and gas is released from the adhesive during that time. The effect of gas generated from is great.

  The present invention has been made in view of the above-described problems, and one of the objects according to some aspects of the present invention is from an adhesive used when forming a container that houses a detection element. An object of the present invention is to provide a radiation detector capable of suppressing the influence of the generated gas and a manufacturing method thereof.

(1) A radiation detector according to the present invention comprises:
A detection element for detecting radiation;
A cooling element for cooling the detection element;
A container for housing the detection element and the cooling element;
Including
The container is
A first outer shell member having a window through which the radiation passes;
A second outer shell member connected to the cooling element;
A third outer shell member made of a material having a higher electrical resistivity than the material constituting the second outer shell member and connected to the first outer shell member and the second outer shell member;
have.

In such a radiation detector, the third outer shell member is made of a material having a higher electrical resistivity than the material constituting the second outer shell member. The three outer shell members can be joined by resistance welding, and the heat of the cooling element can be efficiently transmitted to the outside by the second outer shell member. Therefore, in such a radiation detector, since it is not necessary to connect the first outer shell member and the third outer shell member using an adhesive, the influence of the gas generated from the adhesive can be suppressed. . Furthermore, since the heat of the cooling element can be efficiently transmitted to the outside by the second outer shell member, the cooling efficiency of the cooling element can be increased.

(2) In the radiation detector according to the present invention,
The cooling element is a Peltier element;
The heat absorption part of the Peltier element is connected to the detection element,
The heat dissipation part of the Peltier element may be connected to the second outer shell member.

  In such a radiation detector, since the heat dissipation part of the Peltier element is connected to the second outer shell member, the cooling efficiency of the Peltier element can be increased.

(3) In the radiation detector according to the present invention,
The material of the third outer shell member may be Kovar.

  In such a radiation detector, since the material of the third outer shell member is Kovar, which is a metal having a higher electrical resistivity than copper or the like, the first outer shell member and the third outer shell member are connected by resistance welding. Can be joined.

(4) In the radiation detector according to the present invention,
The material of the second outer shell member may be copper.

  In such a radiation detector, since the material of the second outer shell member is copper, which is a metal having a higher thermal conductivity than Kovar or the like, the heat of the cooling element is efficiently transmitted to the outside by the second outer shell member. can do.

(5) In the radiation detector according to the present invention,
The first outer shell member may be made of a material having a higher electrical resistivity than the material constituting the second outer shell member.

  In such a radiation detector, the heat of the cooling element is efficiently transmitted to the outside by the second outer shell member to increase the cooling efficiency. For example, the first outer shell member is more than the material constituting the second outer shell member. Compared to the case of a material having a low electrical resistivity, it is possible to suppress the cooling efficiency and the cooling efficiency from being lowered due to the cooling element and its vicinity being heated via the first outer shell member.

(6) In the radiation detector according to the present invention,
A terminal pin inserted into a through-hole penetrating the third outer shell member;
A sealing member for sealing the through hole;
Including
The material of the third outer shell member is Kovar,
The material of the sealing member may be glass.

  In such a radiation detector, since the difference between the thermal expansion coefficient of the third outer shell member and the thermal expansion coefficient of the sealing member can be reduced, the through hole can be sealed well.

(7) In the radiation detector according to the present invention,
The first outer shell member and the third outer shell member may be joined by resistance welding.

  In such a radiation detector, since it is not necessary to connect the first outer shell member and the third outer shell member using an adhesive, the influence of gas generated from the adhesive can be suppressed.

(8) A method for manufacturing a radiation detector according to the present invention includes:
A method of manufacturing a radiation detector in which a detection element for detecting radiation is contained in a container having a first outer shell member, a second outer shell member, and a third outer shell member,
Joining the second outer shell member and the third outer shell member made of a material having an electrical resistivity greater than that of the material constituting the second outer shell member;
Attaching a cooling element to the second outer shell member;
Attaching the detection element to the cooling element;
Bonding the first outer shell member provided with a window for allowing the radiation to pass through and the third outer shell member by resistance welding to form the container;
including.

  In such a method of manufacturing a radiation detector, the first outer shell member and the third outer shell are formed by joining the first outer shell member and the third outer shell member by resistance welding to form a container. Since the member does not have to be bonded using an adhesive, the influence of gas generated from the adhesive can be suppressed. In addition, since the method of manufacturing the radiation detector includes a step of attaching a cooling element to the second outer shell member, the heat of the cooling element is efficiently transmitted to the outside by the second outer shell member to cool the cooling element. A radiation detector capable of increasing the efficiency can be manufactured.

(9) In the method for manufacturing a radiation detector according to the present invention,
In the step of joining the second outer shell member and the third outer shell member, the second outer shell member and the third outer shell member may be brazed and joined.

  In such a method of manufacturing a radiation detector, since the second outer shell member and the third outer shell member can be joined by brazing, for example, the second outer shell member and the third outer shell member are bonded. The strength can be maintained as compared with the case of bonding using an agent.

(10) In the method for manufacturing a radiation detector according to the present invention,
The step of joining the first outer shell member and the third outer shell member may be performed after the step of joining the second outer shell member and the third outer shell member.

(11) In the method for manufacturing a radiation detector according to the present invention,
In the step of joining the first outer shell member and the third outer shell member, the resistance welding may be performed in a vacuum environment.

  In such a manufacturing method of a radiation detector, the inside of a container can be made into a vacuum environment.

(12) In the method of manufacturing a radiation detector according to the present invention,
The material of the third outer shell member may be Kovar.

  In such a radiation detector manufacturing method, since the material of the third outer shell member is Kovar, which is a metal having a higher electrical resistivity than copper or the like, the first outer shell member and the third outer shell member are Can be joined by resistance welding.

(13) In the method of manufacturing a radiation detector according to the present invention,
The material of the second outer shell member may be copper.

In such a method of manufacturing a radiation detector, since the material of the second outer shell member is copper, which is a metal having a higher thermal conductivity than Kovar or the like, the heat of the cooling element is efficiently transferred by the second outer shell member. Can be transmitted to the outside.

(14) In the method of manufacturing a radiation detector according to the present invention,
Inserting a terminal pin into a through-hole penetrating the third outer shell member, and sealing the through-hole with a sealing member;
The material of the third outer shell member is Kovar,
The material of the sealing member may be glass.

  In such a manufacturing method of a radiation detector, since the difference between the thermal expansion coefficient of the third outer shell member and the thermal expansion coefficient of the sealing member can be reduced, the through hole can be sealed well.

Sectional drawing which shows typically the radiation detector which concerns on this embodiment. The flowchart which shows an example of the manufacturing method of the radiation detector concerning this embodiment. Sectional drawing which shows typically the manufacturing process of the radiation detector which concerns on this embodiment. Sectional drawing which shows typically the manufacturing process of the radiation detector which concerns on this embodiment. Sectional drawing which shows typically the manufacturing process of the radiation detector which concerns on this embodiment. Sectional drawing which shows typically the manufacturing process of the radiation detector which concerns on this embodiment.

  DESCRIPTION OF EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. The embodiments described below do not unduly limit the contents of the present invention described in the claims. In addition, not all of the configurations described below are essential constituent requirements of the present invention.

1. Radiation Detector First, the radiation detector according to the present embodiment will be described with reference to the drawings. FIG. 1 is a cross-sectional view schematically showing a radiation detector 100 according to this embodiment.

  The radiation detector 100 is a detector for detecting radiation. The radiation detector 100 detects X-rays, for example. The radiation detector 100 is, for example, a silicon drift detector (SDD).

  As shown in FIG. 1, the radiation detector 100 includes a detection element 10, a cooling element 20, a container 30, and a feedthrough 40.

  The detection element 10 detects X-rays. The detection element 10 is a solid-state semiconductor element, and is configured to efficiently guide electrons generated from, for example, P-type Si in which Li is diffused by incident X-rays to the anode by an electrode structure having a concentric potential gradient. It is an element. The detection element 10 is connected to the heat absorption part 22 of the cooling element 20 and is cooled by the cooling element 20. The detection element 10 is cooled to about −20 degrees to −40 degrees by the cooling element 20.

  The cooling element 20 is an element for cooling the detection element 10. The cooling element 20 is, for example, a Peltier element. The Peltier element is an element using the Peltier effect, and heat can be transferred from the heat absorbing part to the heat radiating part by passing a direct current. In the illustrated example, the cooling element 20 (Peltier element) can transfer heat from the heat absorption part 22 connected to the detection element 10 to the heat dissipation part 24 connected to the second outer shell member 34. Thereby, the detection element 10 is cooled.

The cooling element 20 is connected to the second outer shell member 34 constituting the container 30. In the illustrated example, the heat radiating portion 24 of the cooling element 20 is connected to the second outer shell member 34. Therefore, the heat of the cooling element 20 (heat absorbed by the heat absorption part 22 or heat generated by the element itself) can be transmitted to the outside of the container 30 via the second outer shell member 34.

  The container 30 contains the detection element 10 and the cooling element 20 in an airtight manner. Although not shown, the container 30 may contain other components of the radiation detector 100. The inside of the container 30 is a vacuum environment, for example. In the radiation detector 100, heat insulation is achieved by making the inside of the container 30 into a vacuum environment.

  The container 30 includes a first outer shell member 32, a second outer shell member 34, and a third outer shell member 36. The first to third outer shell members 32, 34, and 36 are members that cover the space 31 in which the detection element 10 and the cooling element 20 are accommodated. In the example shown in the drawing, the container 30 is configured by joining the base portion formed by the second outer shell member 34 and the third outer shell member 36 to the lid portion made of the first outer shell member 32. .

  The shape of the first outer shell member 32 is a bottomed cylindrical shape in the illustrated example. The shape of the first outer shell member 32 is not particularly limited, and may be concave or hemispherical. The first outer shell member 32 has a window portion 33 that allows X-rays to pass therethrough. In the illustrated example, the window 33 is provided at the center of the bottom of the first outer shell member 32. The window part 33 can hold | maintain the vacuum of the container 30, passing X-ray | X_line. The window 33 is, for example, a metal thin film or an organic thin film. The first outer shell member 32 is connected to the third outer shell member 36.

  The second outer shell member 34 is connected to the cooling element 20. The second outer shell member 34 and the cooling element 20 are mechanically connected and thermally connected. In the illustrated example, the cooling element 20 and the second outer shell member 34 are joined via the connection member 26. The connection member 26 is, for example, solder containing indium. The second outer shell member 34 functions as a heat conducting unit that transfers the heat of the cooling element 20 to the outside of the container 30. The second outer shell member 34 is connected to the third outer shell member 36. The second outer shell member 34 is inserted into a through hole 37 provided in the third outer shell member 36.

  The shape of the third outer shell member 36 is, for example, a plate shape or a disk shape. The third outer shell member 36 is connected to the first outer shell member 32 and the second outer shell member 34. The first outer shell member 32 and the second outer shell member 34 are connected via a third outer shell member 36. The first outer shell member 32 and the second outer shell member 34 are not in contact (that is, separated).

  A joint surface is provided at the peripheral edge of the upper surface of the third outer shell member 36, and the first outer shell member 32 is joined to the joint surface. The first outer shell member 32 and the third outer shell member 36 are joined by resistance welding. In the illustrated example, the first outer shell member 32 and the third outer shell member 36 are joined by projection welding in which a projection 35 is provided on the third outer shell member 36 and current is concentrated on the projection 35 to perform welding. Yes. The first outer shell member 32 may be provided with a projection, and the first outer shell member 32 and the third outer shell member 36 may be joined by projection welding.

  A through hole 37 is provided at the center of the third outer shell member 36. The through hole 37 is provided so as to communicate the inside (space 31) of the container 30 and the outside of the container 30. The second outer shell member 34 is inserted into the through hole 37, and the through hole 37 is sealed by joining the second outer shell member 34 and the third outer shell member 36. The second outer shell member 34 and the third outer shell member 36 are joined by, for example, brazing.

The first outer shell member 32, the second outer shell member 34, and the third outer shell member 36 are made of different materials. The third outer shell member 36 is made of a material having a higher electrical resistivity than the material constituting the second outer shell member 34. Further, the first outer shell member 32 is made of a material having a higher electrical resistivity than the material constituting the second outer shell member 34.

  The material of the first outer shell member 32 is preferably a material having a low thermal conductivity (that is, a high electrical resistivity). Thereby, it can suppress that the heat of the cooling element 20 is transmitted to the 1st outer shell member 32, the detection element 10 and its vicinity are heated, and cooling efficiency falls. Since the first outer shell member 32 is disposed in the vicinity of the detection element 10 so as to surround the detection element 10, for example, when the first outer shell member is made of a material having a high thermal conductivity, the first outer shell member 32 is provided. When the heat of the cooling element is transmitted to the member, the detection element and the vicinity of the detection element may be heated to reduce the cooling efficiency.

  The material of the first outer shell member 32 is preferably nonmagnetic. Thereby, when the radiation detector 100 is incorporated in an electron microscope or the like, the influence of the magnetic field on the detection element 10 can be reduced. The material of the first outer shell member 32 is, for example, stainless steel.

  The material of the second outer shell member 34 is preferably a material having a high thermal conductivity (that is, a low electrical resistivity). Thereby, the heat of the cooling element 20 can be efficiently transmitted to the outside. The material of the second outer shell member 34 is a metal having a high thermal conductivity such as copper or aluminum.

  The material of the third outer shell member 36 is preferably a material having a high electrical resistivity. Thereby, the 3rd outer shell member 36 and the 1st outer shell member 32 can be joined by resistance welding. Since resistance welding uses Joule heat, welding is difficult because a material with low electrical resistivity generates little heat and easily escapes heat. The material of the third outer shell member 36 is preferably Kovar, and may be iron or the like.

  The feedthrough 40 is provided in the third outer shell member 36. The feedthrough 40 includes a terminal pin 42 and a sealing member 44. The terminal pin 42 is inserted into a through hole 46 provided in the third outer shell member 36. A wiring (not shown) that electrically connects the detection element 10 and the terminal pin 42 is connected to the end of the terminal pin 42 on the inner side of the container 30. The sealing member 44 seals the through hole 46 in which the terminal pin 42 is inserted. A plurality of feedthroughs 40 (terminal pins 42) are provided, for example, for supplying power to supply power to the detection element 10, for signal output for taking out an output signal of the detection element 10, and for ground of the detection element 10. Used for etc. In addition, the wiring for electrically connecting the cooling element 20 and the terminal pin 42 is connected to the end of the terminal pin 42 in the container 30, and the feedthrough 40 (terminal pin 42) is fed to the cooling element 20. It may be used for other purposes. When the material of the third outer shell member 36 is Kovar, the material of the sealing member 44 is, for example, glass such as hard glass (borosilicate glass).

  The radiation detector 100 has the following features, for example.

In the radiation detector 100, since the third outer shell member 36 is made of a material having a higher electrical resistivity than the material constituting the second outer shell member 34, the first outer shell member 32 and the third outer shell member 36 can be joined to each other by resistance welding, and the heat of the cooling element 20 can be efficiently transmitted to the outside by the second outer shell member 34. Therefore, in the radiation detector 100, since it is not necessary to connect the first outer shell member 32 and the third outer shell member 36 using an adhesive, the influence of the gas generated from the adhesive can be suppressed. it can. Thereby, it is possible to prevent the gas generated from the adhesive from increasing the pressure inside the container 30 to reduce the heat insulation effect or to contaminate the detection element 10. Furthermore, in the radiation detector 100, the heat of the cooling element 20 can be efficiently transmitted to the outside by the second outer shell member 34. Therefore, the cooling efficiency of the cooling element 20 can be increased.

  As described above, in the radiation detector 100, in the container 30 including the lid (first outer shell member 32) and the base (second outer shell member 34 and third outer shell member 36), the base portion has an electrical resistivity. By configuring the two members (the second outer shell member 34 and the third outer shell member 36) different from each other, the lid portion and the base portion can be joined by resistance welding, and the cooling efficiency of the cooling element 20 can be increased. Can be increased.

  Here, for example, when the base part is composed of one member, if the base part is made of a material having a low electrical resistivity, the cooling efficiency of the cooling element can be increased. It is not possible to use electric welding for the connection with the adhesive, and an adhesive must be used. Therefore, the gas generated from the adhesive may increase the pressure inside the container and reduce the heat insulation effect, or the detection element may be contaminated.

  Also, for example, when the base part is composed of a single member, if the base part is made of a material having a high electrical resistivity, electric welding can be used to connect the base part and the lid part. The cooling efficiency of a cooling element will be reduced.

  On the other hand, in the radiation detector 100, as described above, the base portion is configured by the second outer shell member 34 and the third outer shell member 36 having different electrical resistivity, so that the lid portion is formed by resistance welding. While being able to join a base part, the cooling efficiency of the cooling element 20 can be improved.

  Further, in the radiation detector 100, the first outer shell member 32 and the second outer shell member 34 are connected via the third outer shell member 36, and therefore, for example, the first outer shell member and the second outer shell member 36 are connected. Compared with the case where the shell member is directly connected, it is possible to suppress the heat of the cooling element 20 from being transmitted to the first outer shell member 32 via the second outer shell member 34. Thereby, it can suppress that a cooling element and its vicinity are heated via the 1st outer shell member 32, and cooling efficiency falls.

  In the radiation detector 100, the cooling element 20 is a Peltier element, and since the heat dissipation part 24 of the Peltier element is connected to the second outer shell member 34, the cooling efficiency of the Peltier element (cooling element 20) can be increased. .

  In the radiation detector 100, the material of the third outer shell member 36 is Kovar. Kovar is an alloy having a higher electrical resistivity than copper or the like. Therefore, by using Kovar as the material of the third outer shell member 36, the first outer shell member 32 and the third outer shell member 36 can be joined by resistance welding.

  In the radiation detector 100, the material of the second outer shell member 34 is copper. Copper is a metal having a higher thermal conductivity than Kovar or the like. Therefore, the heat of the cooling element 20 can be efficiently transmitted to the outside by the second outer shell member 34.

  In the radiation detector 100, the first outer shell member 32 is made of a material having a higher electrical resistivity than the material constituting the second outer shell member 34. Therefore, the heat of the cooling element 20 is efficiently transmitted to the outside by the second outer shell member 34 to increase the cooling efficiency, and for example, the first outer shell member has an electrical resistivity higher than that of the material constituting the second outer shell member. Compared with the case of a small material, it is possible to suppress the cooling efficiency and the cooling efficiency from being lowered due to the cooling element and its vicinity being heated via the first outer shell member 32.

In the radiation detector 100, the terminal pin 42 is inserted into the through hole 46 provided in the third outer shell member 36, and the through hole 46 is sealed by the sealing member 44. The material of the third outer shell member 36 is Kovar, and the material of the sealing member 44 is glass. The difference between the coefficient of thermal expansion of Kovar and that of glass is small. Therefore, in the radiation detector 100, the difference between the thermal expansion coefficient of the third outer shell member 36 and the thermal expansion coefficient of the sealing member 44 can be reduced, and the through hole 46 is sealed well with the sealing member 44. can do.

2. Next, a method for manufacturing a radiation detector according to the present embodiment will be described with reference to the drawings. FIG. 2 is a flowchart showing an example of a method for manufacturing the radiation detector according to the present embodiment. 3-6 is sectional drawing which shows typically the manufacturing process of the radiation detector concerning this embodiment.

  First, as shown in FIG. 3, the second outer shell member 34 and the third outer shell member 36 are joined (S10). The second outer shell member 34 and the third outer shell member 36 are joined by brazing. As the brazing material, for example, silver brazing can be used.

  Next, as shown in FIG. 4, the feedthrough 40 is formed in the third outer shell member 36 (S12). Specifically, the terminal pin 42 is inserted into the through hole 46 penetrating the third outer shell member 36, and the through hole 46 is sealed with the sealing member 44 to form the feedthrough 40.

  Here, the example in which the feedthrough 40 is formed in the third outer shell member 36 after the second outer shell member 34 and the third outer shell member 36 are joined has been described. After the feedthrough 40 is formed, the second outer shell member 34 and the third outer shell member 36 may be joined.

  Next, as shown in FIG. 5, the cooling element 20 is attached to the second outer shell member 34 (S14). For example, after applying a solder containing indium (connecting member 26) on the second outer shell member 34, the cooling element 20 is placed on the solder and heated by a hot plate or the like, whereby the second outer shell. The member 34 and the cooling element 20 can be connected via the connection member 26.

  Next, as shown in FIG. 6, the detection element 10 is attached to the cooling element 20 (S16). The cooling element 20 can be attached to the detection element 10 by fixing the detection element 10 on the cooling element 20 with an adhesive or the like. Thereafter, the electrode of the detection element 10 and the terminal pin 42 are electrically connected by wiring (not shown) or the like.

  Next, as shown in FIG. 1, the first outer shell member 32 provided with the window 33 and the third outer shell member 36 are joined by resistance welding to form the container 30 (S18).

  As a resistance welding method, for example, projection welding is used. Specifically, the first outer shell member 32 and the third outer shell member 36 are joined by providing a projection 35 on the third outer shell member 36 and concentrating the current on the projection 35 for welding. Resistance welding is performed in a vacuum environment. For this reason, the space 31 in the container 30 can be in a vacuum environment. For example, after the first outer shell member 32 and the third outer shell member 36 are introduced into the vacuum chamber, the inside of the container 30 can be vacuumed by performing resistance welding with the vacuum chamber in a vacuum environment. it can.

  The radiation detector 100 can be manufactured through the above steps.

  The manufacturing method of the radiation detector 100 has the following characteristics, for example.

In the manufacturing method of the radiation detector 100, the second outer shell member 34 and the third outer shell member 36 made of a material having a higher electrical resistivity than the material constituting the second outer shell member 34 are joined. And a step of forming the container 30 by joining the first outer shell member 32 and the third outer shell member 36 by resistance welding. Therefore, in the manufacturing method of the radiation detector 100, it is not necessary to use an adhesive for connection between the first outer shell member 32 and the third outer shell member 36, so that the influence of gas generated from the adhesive is suppressed. Can do. Moreover, since the manufacturing method of the radiation detector 100 includes the step of attaching the cooling element 20 to the second outer shell member 34, the heat of the cooling element 20 is efficiently transmitted to the outside by the second outer shell member 34. A radiation detector capable of increasing the cooling efficiency of 20 can be manufactured.

  Moreover, in the manufacturing method of the radiation detector 100, the 1st outer shell member 32 and the 3rd outer shell member 36 are joined by resistance welding, for example, the 1st outer shell member 32 and the 3rd outer shell member 36, As compared with the case where is bonded with an adhesive, the strength can be increased and the reliability can be increased.

  In the method for manufacturing the radiation detector 100, in the step of joining the first outer shell member 32 and the third outer shell member 36, resistance welding for joining the first outer shell member 32 and the third outer shell member 36 is performed. In a vacuum environment. Thereby, the inside of the container 30 can be made into a vacuum environment.

  In the method of manufacturing the radiation detector 100, in the step of joining the second outer shell member 34 and the third outer shell member 36, the second outer shell member 34 and the third outer shell member 36 are brazed and joined. Therefore, for example, strength can be maintained as compared with the case where the second outer shell member and the third outer shell member are bonded using an adhesive.

  As described above, the second outer shell member 34 is preferably made of a material having a low electrical resistivity in order to efficiently transmit the heat of the cooling element 20 to the outside. In order to join the first outer shell member 32 by resistance welding, it is preferable that the electrical resistivity is large. Therefore, it is preferable that the difference between the electrical resistivity of the second outer shell member 34 and the electrical resistivity of the third outer shell member 36 is large, but when the difference in electrical resistivity is large, good joining is performed by resistance welding. It ’s difficult. In brazing, even when members having a large difference in electrical resistivity are used, good bonding can be performed. Therefore, the second outer shell member 34 and the third outer shell member 36 are joined by brazing.

  The manufacturing method of the radiation detector 100 includes a step of inserting the terminal pin 42 into the through hole 46 penetrating the third outer shell member 36 and sealing the through hole 46 with the sealing member 44, The material of the shell member 36 is Kovar, and the material of the sealing member 44 is glass. Therefore, the through hole 46 can be satisfactorily sealed with the sealing member 44.

  In addition, this invention is not limited to embodiment mentioned above, A various deformation | transformation implementation is possible within the range of the summary of this invention.

  For example, in the radiation detector 100 described above, an example in which the inside of the container 30 is a vacuum environment has been described, but the inside of the container 30 may be an inert gas environment such as nitrogen gas. Even when the inside of the container 30 is an inert gas environment, the same effect as the case where the inside of the container 30 is a vacuum environment can be produced.

Here, when making the inside of the container 30 into an inert gas environment, the step (S18) of joining the first outer shell member and the third outer shell member shown in FIG. 2 by resistance welding is different from the above-described embodiment. Specifically, first, the first outer shell member 32 and the third outer shell member 36 are introduced into the vacuum chamber. Next, after making the vacuum chamber into a vacuum environment, an inert gas is introduced to make the vacuum chamber into an inert gas environment. Then, the container 30 is formed by joining the first outer shell member 32 and the third outer shell member 36 by resistance welding in an inert gas environment. Thereby, the inside of the container 30 can be made into an inert gas environment.

  For example, in the radiation detector 100 described above, the example in which the detection element 10 is a detection element that detects X-rays has been described, but the detection element 10 may be a detection element that detects radiation other than X-rays. Good.

  The present invention includes configurations that are substantially the same as the configurations described in the embodiments (for example, configurations that have the same functions, methods, and results, or configurations that have the same objects and effects). In addition, the invention includes a configuration in which a non-essential part of the configuration described in the embodiment is replaced. In addition, the present invention includes a configuration that exhibits the same operational effects as the configuration described in the embodiment or a configuration that can achieve the same object. Further, the invention includes a configuration in which a known technique is added to the configuration described in the embodiment.

DESCRIPTION OF SYMBOLS 10 ... Detection element, 20 ... Cooling element, 22 ... Heat absorption part, 24 ... Heat radiation part, 26 ... Connection member, 30 ... Container, 31 ... Space, 32 ... 1st outer shell member, 33 ... Window part, 34 ... 2nd Outer shell member, 35 ... projection, 36 ... third outer shell member, 37 ... through hole, 40 ... feedthrough, 42 ... terminal pin, 44 ... sealing member, 46 ... through hole, 100 ... radiation detector

Claims (14)

A detection element for detecting radiation;
A cooling element for cooling the detection element;
A container for housing the detection element and the cooling element;
Including
The container is
A first outer shell member having a window through which the radiation passes;
A second outer shell member connected to the cooling element;
A third outer shell member made of a material having a higher electrical resistivity than the material constituting the second outer shell member and connected to the first outer shell member and the second outer shell member;
Having a radiation detector. In claim 1,
The cooling element is a Peltier element;
The heat absorption part of the Peltier element is connected to the detection element,
The radiation detector of the said Peltier device is a radiation detector connected to the said 2nd outer shell member. In claim 1 or 2,
The material of the third outer shell member is a radiation detector, which is Kovar. In any one of Claims 1 thru | or 3,
The material of the second outer shell member is a radiation detector, which is copper. In any one of Claims 1 thru | or 4,
The first outer shell member is a radiation detector made of a material having an electric resistivity higher than that of the material constituting the second outer shell member. In any one of Claims 1 thru | or 5,
A terminal pin inserted into a through-hole penetrating the third outer shell member;
A sealing member for sealing the through hole;
Including
The material of the third outer shell member is Kovar,
The material of the said sealing member is a radiation detector which is glass. In any one of Claims 1 thru | or 6,
The first outer shell member and the third outer shell member are radiation detectors joined by resistance welding. A method of manufacturing a radiation detector in which a detection element for detecting radiation is contained in a container having a first outer shell member, a second outer shell member, and a third outer shell member,
Joining the second outer shell member and the third outer shell member made of a material having an electrical resistivity greater than that of the material constituting the second outer shell member;
Attaching a cooling element to the second outer shell member;
Attaching the detection element to the cooling element;
Bonding the first outer shell member provided with a window for allowing the radiation to pass through and the third outer shell member by resistance welding to form the container;
A method for manufacturing a radiation detector, comprising: In claim 8,
The method of manufacturing a radiation detector, wherein, in the step of joining the second outer shell member and the third outer shell member, the second outer shell member and the third outer shell member are joined by brazing. In claim 8 or 9,
The step of joining the first outer shell member and the third outer shell member is a method of manufacturing a radiation detector, which is performed after the step of joining the second outer shell member and the third outer shell member. In any one of Claims 8 thru | or 10,
The method of manufacturing a radiation detector, wherein, in the step of joining the first outer shell member and the third outer shell member, the resistance welding is performed in a vacuum environment. In any one of claims 8 to 11,
The method of manufacturing a radiation detector, wherein a material of the third outer shell member is Kovar. In any one of claims 8 to 12,
The method of manufacturing a radiation detector, wherein a material of the second outer shell member is copper. In any one of claims 8 to 13,
Inserting a terminal pin into a through-hole penetrating the third outer shell member, and sealing the through-hole with a sealing member;
The material of the third outer shell member is Kovar,
The method of manufacturing a radiation detector, wherein a material of the sealing member is glass.

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