JP2016536155A5 - - Google Patents

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Publication number
JP2016536155A5
JP2016536155A5 JP2016539686A JP2016539686A JP2016536155A5 JP 2016536155 A5 JP2016536155 A5 JP 2016536155A5 JP 2016539686 A JP2016539686 A JP 2016539686A JP 2016539686 A JP2016539686 A JP 2016539686A JP 2016536155 A5 JP2016536155 A5 JP 2016536155A5
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JP
Japan
Prior art keywords
electric field
piezoelectric member
moving elements
moving
piezoelectric
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JP2016539686A
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English (en)
Japanese (ja)
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JP2016536155A (ja
JP6472804B2 (ja
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Priority claimed from US14/021,152 external-priority patent/US9510103B2/en
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Publication of JP2016536155A publication Critical patent/JP2016536155A/ja
Publication of JP2016536155A5 publication Critical patent/JP2016536155A5/ja
Application granted granted Critical
Publication of JP6472804B2 publication Critical patent/JP6472804B2/ja
Expired - Fee Related legal-status Critical Current
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JP2016539686A 2013-09-09 2014-09-08 物理的効果を発生するマイクロ電気機械装置 Expired - Fee Related JP6472804B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US14/021,152 US9510103B2 (en) 2013-09-09 2013-09-09 Microelectromechanical apparatus for generating a physical effect
US14/021,152 2013-09-09
PCT/IL2014/050798 WO2015033346A1 (en) 2013-09-09 2014-09-08 Microelectromechanical apparatus for generating a physical effect

Publications (3)

Publication Number Publication Date
JP2016536155A JP2016536155A (ja) 2016-11-24
JP2016536155A5 true JP2016536155A5 (OSRAM) 2017-10-26
JP6472804B2 JP6472804B2 (ja) 2019-02-20

Family

ID=51659977

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016539686A Expired - Fee Related JP6472804B2 (ja) 2013-09-09 2014-09-08 物理的効果を発生するマイクロ電気機械装置

Country Status (8)

Country Link
US (2) US9510103B2 (OSRAM)
EP (1) EP3044970B1 (OSRAM)
JP (1) JP6472804B2 (OSRAM)
KR (1) KR102180850B1 (OSRAM)
CN (1) CN105612764B (OSRAM)
DK (1) DK3044970T3 (OSRAM)
IL (1) IL244088B (OSRAM)
WO (1) WO2015033346A1 (OSRAM)

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WO2017013665A1 (en) 2015-07-22 2017-01-26 Audio Pixels Ltd. Dsr speaker elements and methods of manufacturing thereof
DE102015114242A1 (de) 2015-08-27 2017-03-02 USound GmbH MEMS-Lautsprecher mit Positionssensor
DE102015116707A1 (de) * 2015-10-01 2017-04-06 USound GmbH Flexible MEMS-Leiterplatteneinheit sowie Schallwandleranordnung
US10516943B2 (en) * 2016-05-04 2019-12-24 Infineon Technologies Ag Microelectromechanical device, an array of microelectromechanical devices, a method of manufacturing a microelectromechanical device, and a method of operating a microelectromechanical device
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US11697135B2 (en) * 2018-11-09 2023-07-11 Texas Instruments Incorporated Multi-frequency hybrid piezo actuation and capactive transducer
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