JP2016527718A5 - - Google Patents

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Publication number
JP2016527718A5
JP2016527718A5 JP2016527976A JP2016527976A JP2016527718A5 JP 2016527718 A5 JP2016527718 A5 JP 2016527718A5 JP 2016527976 A JP2016527976 A JP 2016527976A JP 2016527976 A JP2016527976 A JP 2016527976A JP 2016527718 A5 JP2016527718 A5 JP 2016527718A5
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JP
Japan
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JP2016527976A
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JP6446450B2 (ja
JP2016527718A (ja
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Priority claimed from PCT/SG2014/000335 external-priority patent/WO2015009238A1/en
Publication of JP2016527718A publication Critical patent/JP2016527718A/ja
Publication of JP2016527718A5 publication Critical patent/JP2016527718A5/ja
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Publication of JP6446450B2 publication Critical patent/JP6446450B2/ja
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JP2016527976A 2013-07-16 2014-07-16 チップをウェハに対し集積する方法及びその装置 Active JP6446450B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
SG201305439-0 2013-07-16
SG2013054390 2013-07-16
PCT/SG2014/000335 WO2015009238A1 (en) 2013-07-16 2014-07-16 Method and apparatus for chip-to-wafer integration

Publications (3)

Publication Number Publication Date
JP2016527718A JP2016527718A (ja) 2016-09-08
JP2016527718A5 true JP2016527718A5 (ja) 2017-08-24
JP6446450B2 JP6446450B2 (ja) 2018-12-26

Family

ID=52346559

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016527976A Active JP6446450B2 (ja) 2013-07-16 2014-07-16 チップをウェハに対し集積する方法及びその装置

Country Status (4)

Country Link
US (1) US9613928B2 (ja)
JP (1) JP6446450B2 (ja)
SG (1) SG11201600268YA (ja)
WO (1) WO2015009238A1 (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190116198A (ko) * 2019-09-24 2019-10-14 엘지전자 주식회사 마이크로 led를 이용한 디스플레이 장치 및 이의 제조 방법
WO2021188042A1 (en) * 2020-03-18 2021-09-23 Airise Pte. Ltd. Bonding apparatus, system, and method of bonding

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4933042A (en) * 1986-09-26 1990-06-12 General Electric Company Method for packaging integrated circuit chips employing a polymer film overlay layer
WO1988002551A1 (en) * 1986-09-26 1988-04-07 General Electric Company Method and apparatus for packaging integrated circuit chips employing a polymer film overlay layer
US5352629A (en) * 1993-01-19 1994-10-04 General Electric Company Process for self-alignment and planarization of semiconductor chips attached by solder die adhesive to multi-chip modules
US5605547A (en) * 1995-03-27 1997-02-25 Micron Technology, Inc. Method and apparatus for mounting a component to a substrate using an anisotropic adhesive, a compressive cover film, and a conveyor
JP2010153670A (ja) * 2008-12-26 2010-07-08 Panasonic Corp フリップチップ実装方法と半導体装置
JP2011124413A (ja) * 2009-12-11 2011-06-23 Murata Mfg Co Ltd 電子部品モジュールの製造方法及び電子部品モジュール

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