JP2016526097A - ターボチャージャー用バリア層 - Google Patents
ターボチャージャー用バリア層 Download PDFInfo
- Publication number
- JP2016526097A JP2016526097A JP2016514301A JP2016514301A JP2016526097A JP 2016526097 A JP2016526097 A JP 2016526097A JP 2016514301 A JP2016514301 A JP 2016514301A JP 2016514301 A JP2016514301 A JP 2016514301A JP 2016526097 A JP2016526097 A JP 2016526097A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- barrier layer
- pvd
- deposition
- turbocharger
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 230000004888 barrier function Effects 0.000 title claims abstract description 17
- 239000011651 chromium Substances 0.000 claims description 21
- 238000000034 method Methods 0.000 claims description 15
- 239000000758 substrate Substances 0.000 claims description 11
- 238000000151 deposition Methods 0.000 claims description 10
- 239000000203 mixture Substances 0.000 claims description 10
- 229910052782 aluminium Inorganic materials 0.000 claims description 9
- 229910052804 chromium Inorganic materials 0.000 claims description 9
- 230000008021 deposition Effects 0.000 claims description 9
- 239000000126 substance Substances 0.000 claims description 8
- 239000013078 crystal Substances 0.000 claims description 7
- 229910052593 corundum Inorganic materials 0.000 claims description 4
- 239000010431 corundum Substances 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 230000003647 oxidation Effects 0.000 claims description 3
- 238000007254 oxidation reaction Methods 0.000 claims description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 2
- 239000001301 oxygen Substances 0.000 claims description 2
- 229910052760 oxygen Inorganic materials 0.000 claims description 2
- CXOWYMLTGOFURZ-UHFFFAOYSA-N azanylidynechromium Chemical compound [Cr]#N CXOWYMLTGOFURZ-UHFFFAOYSA-N 0.000 claims 1
- 239000007789 gas Substances 0.000 claims 1
- 238000005260 corrosion Methods 0.000 abstract description 2
- 230000007797 corrosion Effects 0.000 abstract description 2
- 229910018516 Al—O Inorganic materials 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 34
- 238000002441 X-ray diffraction Methods 0.000 description 9
- 238000000576 coating method Methods 0.000 description 6
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 238000002083 X-ray spectrum Methods 0.000 description 2
- 239000003054 catalyst Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 229910000765 intermetallic Inorganic materials 0.000 description 2
- 239000002346 layers by function Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 239000004408 titanium dioxide Substances 0.000 description 2
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical group [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- -1 Al—Cr metals Chemical class 0.000 description 1
- 244000000626 Daucus carota Species 0.000 description 1
- 235000002767 Daucus carota Nutrition 0.000 description 1
- ZSBXGIUJOOQZMP-JLNYLFASSA-N Matrine Chemical compound C1CC[C@H]2CN3C(=O)CCC[C@@H]3[C@@H]3[C@H]2N1CCC3 ZSBXGIUJOOQZMP-JLNYLFASSA-N 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- RHBRWKIPYGZNMP-UHFFFAOYSA-N [O--].[O--].[O--].[Al+3].[Cr+3] Chemical compound [O--].[O--].[O--].[Al+3].[Cr+3] RHBRWKIPYGZNMP-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000013081 microcrystal Substances 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 238000004663 powder metallurgy Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000007751 thermal spraying Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01D—NON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAM TURBINES
- F01D5/00—Blades; Blade-carrying members; Heating, heat-insulating, cooling or antivibration means on the blades or the members
- F01D5/12—Blades
- F01D5/28—Selecting particular materials; Particular measures relating thereto; Measures against erosion or corrosion
- F01D5/288—Protective coatings for blades
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02B—INTERNAL-COMBUSTION PISTON ENGINES; COMBUSTION ENGINES IN GENERAL
- F02B33/00—Engines characterised by provision of pumps for charging or scavenging
- F02B33/02—Engines with reciprocating-piston pumps; Engines with crankcase pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2220/00—Application
- F05D2220/40—Application in turbochargers
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Engineering & Computer Science (AREA)
- Physical Vapour Deposition (AREA)
- Combustion & Propulsion (AREA)
- Supercharger (AREA)
- Laminated Bodies (AREA)
Abstract
Description
表1は、界面の堆積におけるプロセスパラメーターを示す。
表2は、機能層の堆積におけるプロセスパラメーターを示す。
表3は、例示的な実施形態1および2から得られる層1および2の層厚さを示す。
Claims (10)
- 酸化および化学的バリア層を有するPVDコーティング基板であって、前記基板が、システムの操作の間に高温を受けるシステムの部品または構成要素であり、前記バリア層が少なくとも1つのAl−Cr−O層を含むことを特徴とする、PVDコーティング基板。
- 前記システムがターボチャージャーである、請求項1に記載のPVD堆積バリア層。
- 前記バリア層が、前記基板と前記Al−Cr−O層との間に位置する窒化クロム層を含む、請求項1または2に記載のPVD堆積バリア層。
- 前記Al−Cr−O層の化学組成が、(Al,Cr)2O3−y(式中、y≦0.3である)の組成を生じる、請求項1〜3のいずれか一項に記載のPVD堆積バリア層。
- X線回折図が、コランダム構造の(Al,Cr)2O3層の反射を示す、請求項1〜4のいずれか一項に記載のPVD堆積バリア層。
- X線回折図が、AlCr金属間相の結晶構造の反射を示す、請求項1〜5のいずれか一項に記載のPVD堆積バリア層。
- 請求項1〜6のいずれか一項に記載のバリア層を堆積するためのPVD法。
- 少なくとも前記Al−Cr−O層の堆積のために、反応性アーク法が使用される、請求項7に記載のPVD法。
- 少なくとも1つのAlCrターゲットが、前記Al−Cr−O層の堆積のための供給源物質として使用され、かつ酸素が反応性ガスとして使用される、請求項8に記載のPVD法。
- 前記ターゲットが、式Al1−xCrx(式中、原子濃度において0.2≦x≦0.9である)に従う元素組成を有する、請求項9に記載のPVD法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201361826586P | 2013-05-23 | 2013-05-23 | |
US61/826,586 | 2013-05-23 | ||
PCT/EP2014/001390 WO2014187570A1 (de) | 2013-05-23 | 2014-05-22 | Barriereschicht für turbolader |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2016526097A true JP2016526097A (ja) | 2016-09-01 |
JP6441318B2 JP6441318B2 (ja) | 2018-12-19 |
Family
ID=50897526
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016514301A Active JP6441318B2 (ja) | 2013-05-23 | 2014-05-22 | ターボチャージャー用バリア層 |
Country Status (5)
Country | Link |
---|---|
US (1) | US10001021B2 (ja) |
EP (1) | EP2999807B1 (ja) |
JP (1) | JP6441318B2 (ja) |
KR (1) | KR102190320B1 (ja) |
WO (1) | WO2014187570A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102016125042A1 (de) * | 2015-12-28 | 2017-06-29 | Oerlikon Surface Solutions Ag, Pfäffikon | Infrarotspiegel mit einer thermisch stabilen Schicht |
CN111534799B (zh) * | 2020-05-29 | 2021-11-12 | 四川大学 | 一种抗氧化和隔热的陶瓷涂层及其制备方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005539138A (ja) * | 2002-09-16 | 2005-12-22 | ボーグワーナー・インコーポレーテッド | 長寿命ターボチャージャノズルリングに特に適した耐熱合金 |
JP2008533310A (ja) * | 2005-03-24 | 2008-08-21 | エリコン・トレーディング・アクチェンゲゼルシャフト,トリュープバッハ | 硬質材料膜 |
JP2010506049A (ja) * | 2006-10-10 | 2010-02-25 | エーリコン・トレイディング・アーゲー・トリューバッハ | 少なくとも1つの複酸化物混合結晶皮膜を有する皮膜システム |
JP2011514437A (ja) * | 2008-01-25 | 2011-05-06 | エーリコン・トレイディング・アーゲー・トリューバッハ | 透過障壁層 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
MX2007011703A (es) * | 2005-03-24 | 2008-03-10 | Oerlikon Trading Ag | Capa de material duro. |
EP1878879A1 (de) | 2006-07-14 | 2008-01-16 | Abb Research Ltd. | Turbolader mit katalytischer Beschichtung |
GB0807627D0 (en) | 2008-04-25 | 2008-06-04 | Accentus Plc | A thermal barrier, an article with a thermal barrier and a method of applying a thermal barrier to a surface |
DE102009002183A1 (de) * | 2009-03-11 | 2010-09-16 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verbrennungskraftmaschine mit einer Brennraum- oder brennraumnahen Oberflächenbeschichtung sowie Verfahren zur Beschichtung |
-
2014
- 2014-05-22 WO PCT/EP2014/001390 patent/WO2014187570A1/de active Application Filing
- 2014-05-22 KR KR1020157036260A patent/KR102190320B1/ko active IP Right Grant
- 2014-05-22 US US14/893,478 patent/US10001021B2/en active Active
- 2014-05-22 JP JP2016514301A patent/JP6441318B2/ja active Active
- 2014-05-22 EP EP14728827.8A patent/EP2999807B1/de active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005539138A (ja) * | 2002-09-16 | 2005-12-22 | ボーグワーナー・インコーポレーテッド | 長寿命ターボチャージャノズルリングに特に適した耐熱合金 |
JP2008533310A (ja) * | 2005-03-24 | 2008-08-21 | エリコン・トレーディング・アクチェンゲゼルシャフト,トリュープバッハ | 硬質材料膜 |
JP2010506049A (ja) * | 2006-10-10 | 2010-02-25 | エーリコン・トレイディング・アーゲー・トリューバッハ | 少なくとも1つの複酸化物混合結晶皮膜を有する皮膜システム |
JP2011514437A (ja) * | 2008-01-25 | 2011-05-06 | エーリコン・トレイディング・アーゲー・トリューバッハ | 透過障壁層 |
Non-Patent Citations (1)
Title |
---|
H.NAJAFI ET.AL.: "Formation of cubic structured (Al1-xCrx)2+δO3 and its dynamic transition to corundum phase during c", SURFACE & COATINGS TECHNOLOGY, vol. 214, JPN6018002151, 2013, pages 46 - 52, XP055134940, ISSN: 0003725566, DOI: 10.1016/j.surfcoat.2012.10.062 * |
Also Published As
Publication number | Publication date |
---|---|
US10001021B2 (en) | 2018-06-19 |
JP6441318B2 (ja) | 2018-12-19 |
KR102190320B1 (ko) | 2020-12-14 |
KR20160013131A (ko) | 2016-02-03 |
EP2999807A1 (de) | 2016-03-30 |
US20160215632A1 (en) | 2016-07-28 |
EP2999807B1 (de) | 2019-03-06 |
WO2014187570A1 (de) | 2014-11-27 |
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