JP2016511924A5 - - Google Patents
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- Publication number
- JP2016511924A5 JP2016511924A5 JP2015556593A JP2015556593A JP2016511924A5 JP 2016511924 A5 JP2016511924 A5 JP 2016511924A5 JP 2015556593 A JP2015556593 A JP 2015556593A JP 2015556593 A JP2015556593 A JP 2015556593A JP 2016511924 A5 JP2016511924 A5 JP 2016511924A5
- Authority
- JP
- Japan
- Prior art keywords
- ray
- liquid metal
- ray source
- electron beam
- beams
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910001338 liquidmetal Inorganic materials 0.000 claims 18
- 238000010894 electron beam technology Methods 0.000 claims 13
- 238000004590 computer program Methods 0.000 claims 3
- 238000003384 imaging method Methods 0.000 claims 3
- 238000000034 method Methods 0.000 claims 3
- 230000000873 masking effect Effects 0.000 claims 2
- 230000002093 peripheral effect Effects 0.000 claims 2
- 239000011358 absorbing material Substances 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201361764043P | 2013-02-13 | 2013-02-13 | |
| US61/764,043 | 2013-02-13 | ||
| PCT/IB2014/058627 WO2014125389A1 (en) | 2013-02-13 | 2014-01-29 | Multiple x-ray beam tube |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016511924A JP2016511924A (ja) | 2016-04-21 |
| JP2016511924A5 true JP2016511924A5 (enExample) | 2017-08-17 |
| JP6277204B2 JP6277204B2 (ja) | 2018-02-07 |
Family
ID=50156815
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015556593A Expired - Fee Related JP6277204B2 (ja) | 2013-02-13 | 2014-01-29 | 多重ｘ線ビーム管 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9767982B2 (enExample) |
| EP (1) | EP2956954B1 (enExample) |
| JP (1) | JP6277204B2 (enExample) |
| CN (1) | CN105190823B (enExample) |
| WO (1) | WO2014125389A1 (enExample) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103171819B (zh) | 2013-04-16 | 2015-11-25 | 葛兰素史克（中国）投资有限公司 | 给液器 |
| WO2016075140A1 (en) | 2014-11-11 | 2016-05-19 | Koninklijke Philips N.V. | Source-detector arrangement |
| US10117629B2 (en) * | 2014-12-03 | 2018-11-06 | Board Of Supervisors Of Louisiana State University And Agricultural And Mechanical College | High energy grating techniques |
| WO2017019782A1 (en) * | 2015-07-27 | 2017-02-02 | Rensselaer Polytechnic Institute | Combination of an x-ray tube and a source grating with electron beam manipulation |
| US10660595B2 (en) | 2016-06-16 | 2020-05-26 | Koninklijke Philips N.V. | Apparatus for x-ray imaging an object |
| US10966307B2 (en) * | 2017-01-19 | 2021-03-30 | Koninklijke Philips N.V. | X-ray source arrangement for generating X-ray radiation |
| EP3385976A1 (en) * | 2017-04-05 | 2018-10-10 | Excillum AB | Vapour monitoring |
| US11576249B2 (en) | 2018-05-25 | 2023-02-07 | Micro-X Limited | Device for applying beamforming signal processing to RF modulated X-rays |
| US11237483B2 (en) * | 2020-06-15 | 2022-02-01 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method and apparatus for controlling droplet in extreme ultraviolet light source |
| EP4075474A1 (en) * | 2021-04-15 | 2022-10-19 | Excillum AB | Liquid jet target x-ray source |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6831963B2 (en) * | 2000-10-20 | 2004-12-14 | University Of Central Florida | EUV, XUV, and X-Ray wavelength sources created from laser plasma produced from liquid metal solutions |
| US6711233B2 (en) | 2000-07-28 | 2004-03-23 | Jettec Ab | Method and apparatus for generating X-ray or EUV radiation |
| WO2002011499A1 (en) * | 2000-07-28 | 2002-02-07 | Jettec Ab | Method and apparatus for generating x-ray or euv radiation |
| JP3897287B2 (ja) * | 2002-04-12 | 2007-03-22 | ギガフォトン株式会社 | Ｌｐｐ光源装置 |
| DE10306668B4 (de) * | 2003-02-13 | 2009-12-10 | Xtreme Technologies Gmbh | Anordnung zur Erzeugung von intensiver kurzwelliger Strahlung auf Basis eines Plasmas |
| EP1731099A1 (en) | 2005-06-06 | 2006-12-13 | Paul Scherrer Institut | Interferometer for quantitative phase contrast imaging and tomography with an incoherent polychromatic x-ray source |
| SE530094C2 (sv) * | 2006-05-11 | 2008-02-26 | Jettec Ab | Metod för alstring av röntgenstrålning genom elektronbestrålning av en flytande substans |
| GB2441578A (en) | 2006-09-08 | 2008-03-12 | Ucl Business Plc | Phase Contrast X-Ray Imaging |
| US7693256B2 (en) | 2008-03-19 | 2010-04-06 | C-Rad Innovation Ab | Phase-contrast X-ray imaging |
| US7929667B1 (en) * | 2008-10-02 | 2011-04-19 | Kla-Tencor Corporation | High brightness X-ray metrology |
| JP2013513418A (ja) | 2009-12-10 | 2013-04-22 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 微分位相コントラストイメージングシステム |
| RU2596805C2 (ru) | 2011-02-07 | 2016-09-10 | Конинклейке Филипс Н.В. | Формирование дифференциальных фазо-контрастных изображений с увеличенным динамическим диапазоном |
| CN102768931B (zh) * | 2012-07-30 | 2015-05-06 | 深圳大学 | 用于大视场x射线相衬成像的x射线源 |
-
2014
- 2014-01-29 US US14/765,391 patent/US9767982B2/en not_active Expired - Fee Related
- 2014-01-29 JP JP2015556593A patent/JP6277204B2/ja not_active Expired - Fee Related
- 2014-01-29 EP EP14706104.8A patent/EP2956954B1/en not_active Not-in-force
- 2014-01-29 WO PCT/IB2014/058627 patent/WO2014125389A1/en not_active Ceased
- 2014-01-29 CN CN201480008739.5A patent/CN105190823B/zh not_active Expired - Fee Related
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