JP2016507645A - 誘電体材料蒸発のためのプラズマ強化堆積設備、堆積装置及びその操作方法 - Google Patents
誘電体材料蒸発のためのプラズマ強化堆積設備、堆積装置及びその操作方法 Download PDFInfo
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- C23C14/24—Vacuum evaporation
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
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- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32091—Radio frequency generated discharge the radio frequency energy being capacitively coupled to the plasma
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- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32357—Generation remote from the workpiece, e.g. down-stream
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- H—ELECTRICITY
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- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
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- H01M4/04—Processes of manufacture in general
- H01M4/0402—Methods of deposition of the material
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- H01M4/0428—Chemical vapour deposition
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- H01M10/0561—Accumulators with non-aqueous electrolyte characterised by the materials used as electrolytes, e.g. mixed inorganic/organic electrolytes the electrolyte being constituted of inorganic materials only
- H01M10/0562—Solid materials
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Abstract
Description
本発明の上記の特徴を詳細に理解することができるように、実施形態を参照することによって、上で簡単に概説した本発明のより具体的な説明を得ることができる。添付の図面は本発明の実施形態に関連し、以下の記述において説明される。
以上の説明は本発明の実施形態を対象としているが、本発明の基本的な範囲を逸脱することなく本発明の他の追加の実施形態を考案することができ、本発明の範囲は、添付の特許請求の範囲によって定められる。
Claims (15)
- 誘電体材料、特にリチウム含有誘電体材料の蒸発のための堆積設備であって、
蒸気分配シャワーヘッドと、
前記誘電体材料を前記蒸気分配シャワーヘッドに提供するためのホルダであって、前記誘電体材料を前記蒸気分配シャワーヘッド内に供給するための供給ユニットを有するホルダと、
前記誘電体材料を前記蒸気分配シャワーヘッドで融解及び蒸発させる、若しくは前記誘電体材料を前記蒸気分配シャワーヘッドで昇華させるように構成されるエネルギー源であって、前記蒸気分配シャワーヘッドは、気化した前記誘電体材料を基板に向けるための一つ又は複数の排気口を有し、特に前記エネルギー源は、電子又は光子を放出し、前記電子又は光子は、前記誘電体材料を融解及び蒸発させる、若しくは前記誘電体材料を昇華させる、エネルギー源と、
前記蒸気分配シャワーヘッドと前記基板との間にプラズマを提供するように構成されるプラズマ源と
を備える、堆積設備。 - 前記蒸気分配シャワーヘッドは、直線的蒸気分配シャワーヘッドである、請求項1に記載の設備。
- 前記蒸気分配シャワーヘッドは、細長い管又は直方体である、請求項1又は2に記載の設備。
- 前記ホルダは、るつぼであり、当該るつぼは、当該るつぼを冷却するための冷却要素を有する、請求項1から3の何れか一項に記載の設備。
- 前記プラズマ源は、前記蒸気分配シャワーヘッド及び対向電極にバイアスをかけることにより提供され、特に前記基板支持体は、前記対向電極として提供される、請求項1から4の何れか一項に記載の設備。
- 前記プラズマ源は、前記蒸気分配シャワーヘッドと前記基板との間に設けられる処理領域に提供される、請求項1から5の何れか一項に記載の設備。
- 前記プラズマ源は、遠隔プラズマ源である、請求項1から6の何れか一項に記載の設備。
- 前記誘電体材料は、Li3PO4又はLCOである、請求項1から7の何れか一項に記載の設備。
- 誘電体材料の蒸発のための及び誘電体材料の基板上への堆積のための堆積装置であって、
前記誘電体材料を前記基板上に堆積させるための真空チャンバと、
前記チャンバに提供される基板支持体と、
請求項1から8の何れか一項に記載の堆積設備と
を備える、堆積装置。 - 前記真空チャンバに設けられる基板支持体システムであって、前記基板又は前記真空チャンバの前記基板を運ぶキャリアの垂直支持のために構成される、基板支持体システム
を更に備える、請求項9に記載の装置。 - 誘電体材料、特にリチウム含有誘電体材料を蒸発させる方法であって、
前記誘電体材料を蒸気分配シャワーヘッド内に供給することと、
前記誘電体材料を前記蒸気分配シャワーヘッドで液化及び蒸発させる、若しくは前記材料を前記蒸気分配シャワーヘッドで昇華させることであって、特に電子又は光子の前記誘電体材料上への衝突を含む、液化及び蒸発させること若しくは昇華させることと、
前記誘電体材料の蒸気を基板に向けることと
を含む、方法。 - 前記蒸気分配シャワーヘッドは、1100℃から1500℃までの温度、特に約1300℃に加熱される、請求項11に記載の方法。
- 前記誘電体材料は、Li3PO4又はLCOである、請求項11又は12に記載の方法。
- 前記蒸気分配シャワーヘッドと前記基板との間にプラズマを提供すること
を更に含む、請求項11から13の何れか一項に記載の方法。 - 前記電子の衝突は、電子銃により提供される、請求項11から14の何れか一項に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP12198692.1A EP2747122B1 (en) | 2012-12-20 | 2012-12-20 | Plasma enhanced deposition arrangement for evaporation of dielectric materials, deposition apparatus and methods of operating thereof |
EP12198692.1 | 2012-12-20 | ||
PCT/EP2013/077575 WO2014096303A1 (en) | 2012-12-20 | 2013-12-20 | Plasma enhanced deposition arrangement for evaporation of dielectric materials, deposition apparatus and methods of operating thereof |
Publications (3)
Publication Number | Publication Date |
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JP2016507645A true JP2016507645A (ja) | 2016-03-10 |
JP2016507645A5 JP2016507645A5 (ja) | 2017-02-09 |
JP6456841B2 JP6456841B2 (ja) | 2019-01-23 |
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JP2015548616A Expired - Fee Related JP6456841B2 (ja) | 2012-12-20 | 2013-12-20 | 誘電体材料蒸発のためのプラズマ強化堆積設備、堆積装置及びその操作方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US20150284841A1 (ja) |
EP (1) | EP2747122B1 (ja) |
JP (1) | JP6456841B2 (ja) |
KR (1) | KR20150099577A (ja) |
CN (1) | CN104838467B (ja) |
TW (1) | TWI607102B (ja) |
WO (1) | WO2014096303A1 (ja) |
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CN105449216B (zh) * | 2015-11-18 | 2018-10-23 | 何整风 | 一种锂电池 |
US10483465B2 (en) * | 2016-05-10 | 2019-11-19 | Applied Materials, Inc. | Methods of operating a deposition apparatus, and deposition apparatus |
WO2017198297A1 (en) * | 2016-05-18 | 2017-11-23 | Applied Materials, Inc. | Apparatus and method for transportation of a deposition source |
EP3374540A1 (en) * | 2017-01-31 | 2018-09-19 | Applied Materials, Inc. | Material deposition arrangement, vacuum deposition system and method therefor |
WO2020251696A1 (en) | 2019-06-10 | 2020-12-17 | Applied Materials, Inc. | Processing system for forming layers |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001200361A (ja) * | 2000-01-19 | 2001-07-24 | Mitsubishi Heavy Ind Ltd | 高温真空蒸着装置における観測装置 |
WO2009023744A1 (en) * | 2007-08-13 | 2009-02-19 | University Of Virginia Patent Foundation | Thin film battery synthesis by directed vapor deposition |
WO2012124564A1 (ja) * | 2011-03-14 | 2012-09-20 | シャープ株式会社 | 蒸着粒子射出装置および蒸着装置並びに蒸着方法 |
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US5628829A (en) * | 1994-06-03 | 1997-05-13 | Materials Research Corporation | Method and apparatus for low temperature deposition of CVD and PECVD films |
WO2001090438A1 (en) * | 2000-05-23 | 2001-11-29 | University Of Virginia Patent Foundation | A process and apparatus for plasma activated deposition in a vacuum |
US20030045098A1 (en) * | 2001-08-31 | 2003-03-06 | Applied Materials, Inc. | Method and apparatus for processing a wafer |
JP4013859B2 (ja) * | 2003-07-17 | 2007-11-28 | 富士電機ホールディングス株式会社 | 有機薄膜の製造装置 |
EP2128303B1 (en) * | 2008-05-30 | 2013-03-13 | Applied Materials, Inc. | Arrangement for coating a substrate |
US20100267191A1 (en) * | 2009-04-20 | 2010-10-21 | Applied Materials, Inc. | Plasma enhanced thermal evaporator |
US9130238B2 (en) * | 2011-06-10 | 2015-09-08 | Applied Materials, Inc. | Methods of and hybrid factories for thin-film battery manufacturing |
-
2012
- 2012-12-20 EP EP12198692.1A patent/EP2747122B1/en not_active Not-in-force
-
2013
- 2013-12-18 TW TW102146965A patent/TWI607102B/zh not_active IP Right Cessation
- 2013-12-20 KR KR1020157019436A patent/KR20150099577A/ko not_active Application Discontinuation
- 2013-12-20 JP JP2015548616A patent/JP6456841B2/ja not_active Expired - Fee Related
- 2013-12-20 WO PCT/EP2013/077575 patent/WO2014096303A1/en active Application Filing
- 2013-12-20 CN CN201380063812.4A patent/CN104838467B/zh not_active Expired - Fee Related
- 2013-12-20 US US14/646,680 patent/US20150284841A1/en not_active Abandoned
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001200361A (ja) * | 2000-01-19 | 2001-07-24 | Mitsubishi Heavy Ind Ltd | 高温真空蒸着装置における観測装置 |
WO2009023744A1 (en) * | 2007-08-13 | 2009-02-19 | University Of Virginia Patent Foundation | Thin film battery synthesis by directed vapor deposition |
WO2012124564A1 (ja) * | 2011-03-14 | 2012-09-20 | シャープ株式会社 | 蒸着粒子射出装置および蒸着装置並びに蒸着方法 |
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Publication number | Publication date |
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TW201432072A (zh) | 2014-08-16 |
EP2747122A1 (en) | 2014-06-25 |
KR20150099577A (ko) | 2015-08-31 |
US20150284841A1 (en) | 2015-10-08 |
EP2747122B1 (en) | 2019-07-03 |
CN104838467B (zh) | 2018-01-19 |
TWI607102B (zh) | 2017-12-01 |
CN104838467A (zh) | 2015-08-12 |
JP6456841B2 (ja) | 2019-01-23 |
WO2014096303A1 (en) | 2014-06-26 |
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