JP2016223533A - Valve and fluid controller - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a valve capable of increasing/decreasing the number of gas lines easily without restricting the number of gas lines, and a fluid controller.SOLUTION: A body 30 in which a first flow passage 31a and a second flow passage 31b are formed, includes a base part 33 having a first surface 33A, a first connection part 34, and a second connection part 35. The first connection part 34 is connected to a portion equivalent to the second connection part 35 from the first surface 33A side by a bolt in a state of being overlapped with the portion equivalent to the second connection part 35 in the body 30 of another valve 20 in a direction orthogonal to the first surface 33A, and a first-first flow passage 31c communicates with a flow passage equivalent to a first-second flow passage 31d in the body 30 of the other valve 20.SELECTED DRAWING: Figure 4

Description

  The present invention relates to a valve used in a fluid control device used in a semiconductor manufacturing apparatus or the like and a fluid control device including the valve.

  Conventionally, a fluid control device including a plurality of gas lines has been proposed (see, for example, Patent Document 1). Each gas line has a plurality of fluid control devices and a plurality of joints, and a plurality of fluid control devices are connected to each other by attaching a plurality of fluid control devices to the upper surface of the plurality of joints, thereby supplying fluid. Is done. A three-way valve is provided on the inlet side of the mass flow controller, and one manifold is provided for a plurality of gas lines below the three-way valve and connected to the three-way valve of each gas line. . A purge gas is supplied to the manifold and is supplied to a plurality of three-way valves.

JP 2002-349797 A

  In the conventional manifold, when the number of gas lines is increased or decreased due to a specification change or the like, it is necessary to replace the manifold with a length corresponding to the number of gas lines, and it is necessary to remove all the fluid control devices connected to the manifold. For this reason, it takes man-hours and time to change specifications.

  The flow path of the manifold is formed by cutting with a gun drill. For this reason, the length of the flow path depends on the length of the drill bit. However, if the length of the drill bit is increased, the drill bit is easily damaged, and therefore the length of the flow path cannot be increased too much. Therefore, the number of gas lines per manifold has been limited.

  Accordingly, an object of the present invention is to provide a valve and a fluid control device that can easily increase or decrease the number of gas lines without limiting the number of gas lines.

  In order to solve the above-described object, a valve according to one embodiment of the present invention communicates between a body in which a first flow path and a second flow path are formed, and the first flow path and the second flow path. Or a valve body that shuts off, wherein the body includes a base having a first surface located on the valve body side and a second surface located on the opposite side of the first surface; A first connecting portion having a third surface that forms a step portion with the second surface; and a second connecting portion having a fourth surface that forms the step portion with the first surface, and the first flow path. Has a 1-1 flow path and a 1-2 flow path, and a 1-1 port of the 1-1 flow path opens to the third surface, and the 1-2 flow path The first-3 port communicates with the first-first port 1-2 of the first-first flow path and opens toward the valve body, and the first-fourth port of the first-second flow path Opened on the 4th surface The first flow path and the second flow path can communicate with each other via the first to third ports, and the first connection portion corresponds to the second connection portion in the body of another valve. The first-first flow path is connected to a portion, and the flow path corresponding to the first-second flow path in the body of the another valve communicates.

  In addition, a third flow path is formed in the body, and the valve further includes another valve body that communicates or blocks between the first flow path and the third flow path. The two flow paths have a 1-5 port that opens toward the other valve body between the 1-3 port and the 1-4 port, and through the 1-5 port The first channel and the third channel may be able to communicate with each other.

  A fluid control device which is one embodiment of the present invention includes a manifold valve to which the valve described above is connected.

  ADVANTAGE OF THE INVENTION According to this invention, the valve | bulb and fluid control apparatus which can increase / decrease a gas line easily without restrict | limiting the number of gas lines can be provided.

A perspective view of a fluid control device provided with a valve concerning an embodiment is shown. The side view of a fluid control apparatus provided with the valve concerning an embodiment is shown. The external appearance perspective view of a valve | bulb is shown. (A) shows the fragmentary sectional view of the valve | bulb in a closed state in the plane orthogonal to a 1st direction, (b) is the fragmentary sectional view of the valve | bulb in the closed state along the IVb-IVb line | wire of (a). Indicates. FIG. 2 shows a partial cross-sectional view of a valve in an open state. (A) shows explanatory drawing of the flow path formed in the main-body part of a body, (b) shows explanatory drawing of the structure for the main-body part of a body to connect with another member. It is a figure which shows the state with which the body of the adjacent valve | bulb was connected. An explanatory view of a valve concerning a modification is shown.

  A valve and a fluid control device according to a first embodiment of the present invention will be described with reference to the drawings. In the following description, the upper and lower sides are the upper and lower sides in FIG. 1, the extending direction of the gas line 3 is defined as a first direction D1, and the direction parallel to the base 2 and perpendicular to the first direction D1 is defined as a second direction D2.

  FIG. 1 shows a perspective view of a fluid control apparatus 1 including a valve 20 according to this embodiment. FIG. 2 shows a side view of the fluid control apparatus 1 including the valve 20 according to the present embodiment.

  The fluid control device 1 includes a base 2, a plurality (three lines) of gas lines 3, and a gas out manifold 4. Since the configuration of each gas line 3 is the same, only one gas line 3 among the plurality of gas lines 3 will be described below.

  As shown in FIG. 1, the gas line 3 includes a plurality of joints 10 and 11 and a plurality of fluid control devices 12 to 17 and 20.

  The plurality of joints 10 and 11 are configured by an inlet joint 10 serving as an inlet for a process gas, and a plurality of block-shaped joints 11 disposed between the inlet joint 10 and the gas out manifold 4. The plurality of joints 10 and 11 are provided in a line on the base 2 and are fixed to the base 2 with bolts (not shown). As shown in FIG. 2, gas passages 10 a and 11 a are formed in the joints 10 and 11. Further, the gas out manifold 4 is formed with an outflow passage 4a extending along the second direction D2, and an outlet pipe 4B is connected thereto.

  The plurality of fluid control devices 12 to 17 include automatic valves (for example, fluid-driven automatic valves) 12 to 14 and 20, a manual regulator (pressure reducing valve) 15, a filter 16, and a flow rate control device (for example, mass flow). And a controller (MFC: Mass Flow Controller) 17. As shown in FIG. 1, each of the fluid control devices 12 to 17, 20 is connected to the joints 10, 11, gas by bolts 5 (only one bolt 5 is given a reference number for simplification of the drawing). Each is connected to the out manifold 4.

  Then, the process gas flowing in from the inlet joint 10 passes through the fluid control devices 12 to 17 and 20, the plurality of joints 11, and the gas out manifold 4 and is supplied to a chamber (not shown). As will be described later, the plurality of valves 20 are configured to be connectable to each other, and form a manifold valve together with the two closing blocks 7.

  Next, the valve 20 will be described with reference to FIGS.

  FIG. 3 shows an external perspective view of the valve 20. 4A shows a partial cross-sectional view of the valve 20 in a closed state in a plane orthogonal to the first direction D1, and FIG. 4B shows a closed state along the line IVb-IVb in FIG. 4A. The fragmentary sectional view of the valve 20 in the state is shown. FIG. 5 shows a partial cross-sectional view of the valve 20 in the open state.

  As shown in FIG. 3, the valve 20 includes a body 30, a bonnet portion 21, and an actuator 22.

  As shown in FIG. 4, the body 30 includes a main body portion 31 and a cylindrical portion 32, and is manufactured by, for example, casting, lost wax, or a 3D printer. The main body 31 is formed with a first flow path 31a and a second flow path 31b. The cylindrical part 32 is provided on the upper side of the main body part 31, and a valve chamber 32a is formed. An annular groove 32b is formed in the valve chamber 32a. The first flow path 31a is configured to communicate with the valve chamber 32a, and the second flow path 31b is configured to communicate with the groove 32b. The detailed configuration of the main body 31 will be described later.

  The bonnet portion 21 includes a bonnet 21A, a bonnet nut 21B, a seat 21C, a diaphragm 21D, a pressing adapter 21E, a diaphragm pressing 21F, a holder 21G, a stem 21H, and a spring 21J.

  The bonnet 21 </ b> A has a substantially cylindrical shape, and is fixed to the body 30 by screwing the bonnet nut 21 </ b> B to the cylindrical portion 32. The seat 21 </ b> C has an annular shape and is provided at the periphery of a portion where the valve chamber 32 a of the cylindrical portion 32 communicates with the first flow path 31 a. The outer peripheral edge of the diaphragm 21D is held by the body 30 by the pressing adapter 21E. Diaphragm 21D, which is a valve body, has a substantially spherical shell shape, and an upwardly convex substantially arc shape is in a natural state. When the diaphragm 21D comes into contact with and separates from the sheet 21C, communication or blocking between the first flow path 31a and the second flow path 31b is performed. When the valve 20 is in the closed state, the diaphragm 21D comes into contact with the seat 21C, and the first flow path 31a and the second flow path 31b are blocked. As shown in FIG. 5, when the valve 20 is in the open state, the diaphragm 21D is separated from the seat 21C, and the first flow path 31a and the second flow path 31b communicate with each other.

  The diaphragm retainer 21F is provided on the upper side of the diaphragm 21D and is configured to be able to press the central portion of the diaphragm 21D. Diaphragm retainer 21F is fitted to holder 21G, and holder 21G is supported by bonnet 21A so as to be movable in the vertical direction. The stem 21H is screwed and connected to the holder 21G. The spring 21J always urges the holder 21G downward.

  The stem 21H is driven by an actuator 22 which is a drive unit, and is moved upward. The actuator 22 generates a driving force by an external fluid. As a result, the holder 21G also moves upward against the biasing force of the spring 21J, and the diaphragm 21D returns to a substantially arc shape by the elastic force of the diaphragm 21D and the pressure of the gas flowing through the first flow path 31a, as shown in FIG. Thus, the valve 20 is in an open state.

  Next, the main body 31 of the body 30 will be described with reference to FIGS. FIG. 6A shows an explanatory view of a flow path formed in the main body 31 of the body 30, and FIG. 6B is an explanatory view of a structure for connecting the main body 31 of the body 30 to other members. Is shown.

  As shown in FIG. 3, the body portion 31 of the body 30 includes a base portion 33, a first connecting portion 34, and a second connecting portion 35.

  The base 33 has a substantially rectangular parallelepiped shape, and includes a first surface 33A and a second surface 33B located on the opposite side of the first surface 33A. A cylindrical portion 32 is provided on the first surface 33A. The second surface 33 </ b> B contacts the joint 11 when the valve 20 is connected to the joint 11. On the second surface 33B, annular recesses 33c (FIGS. 4B and 6A) are formed at two locations along the first direction D1.

  The first connecting portion 34 is provided so as to protrude to one side in the second direction D2 with respect to the base portion 33. The first connecting portion 34 has a third surface 34A that forms a stepped portion 36 with the second surface 33B. On the third surface 34A, an annular recess 34b (FIGS. 4A and 6A) is formed.

  The 2nd connection part 35 is provided so that it may protrude in the other side of the 2nd direction D2 with respect to the base 33. As shown in FIG. The second connecting portion 35 has a first surface 33A and a fourth surface 35A that forms a stepped portion 37. An annular recess 35b is formed on the fourth surface 35A. The third surface 34A and the fourth surface 35A are located on substantially the same plane. The fifth surface 34D and the first surface 33A, which are located on the opposite side of the third surface 34A of the first connecting portion 34, are flush with each other, and the second connecting portion 35 is opposite to the fourth surface 35A. The sixth surface 35 </ b> D and the second surface 33 </ b> B located at the same position are in a flush relationship. Moreover, the structure for connecting with the other member in the valve | bulb 20 is mentioned later.

  In addition, as described above, the first flow path 31a and the second flow path 31b are formed in the main body 31 of the body 30 as shown in FIGS.

  The first flow path 31a is a flow path for flowing a purge gas (for example, nitrogen), and has a first-first flow path 31c and a first-second flow path 31d.

  The first-first flow path 31c has a first-first port 31c1 that opens to the third surface 34A via the annular recess 34b, and a first-second port 31c2 that opens to the first-second flow path 31d. The 1-1st flow path 31c is comprised by the part extended upwards from the 1-1st port 31c1, and the part extended along the 2nd direction D2 from the upper end of the part extended upwards.

  The first-second flow path 31d includes a first-3 port 31d1 that opens toward the diaphragm 21D, and a first-4 port 31d2 that opens to the fourth surface 35A via the annular recess 35b. The first-second flow path 31d includes a portion extending downward from the first-3 port 31d1, a portion extending along the second direction D2 from the lower end of the portion extending downward, and a portion extending in the second direction D2. A portion extending downward from the end, a portion extending along the second direction D2 from a lower end of the portion extending downward, and a portion extending upward from the end of the portion extending along the second direction D2. Composed.

  The second flow path 31b is a flow path for flowing process gas and purge gas, and has a 2-1 flow path 31e and a 2-2 flow path 31f.

  The 2-1 flow path 31e has an inverted V shape, and has two 2-1 ports 31e1 and 2-2 ports 31e2 that open to the second surface 33B via an annular recess 33c. The 2-1 port 31e1 is located upstream of the process gas flow than the 2-2 port 31e2.

  The 2-2 flow path 31f has a 2-3 port 31f1 that opens toward the diaphragm 21D through the groove 32b, and a 2-4 port 31f2 that opens to the 2-1 flow path 31e. The second-second flow passage 31f is configured to extend downward from the second-third port 31f1 to the second-fourth port 31f2.

  Further, as shown in FIG. 6B, in the main body portion 31, connection holes 33 d are formed at the four corners of the base portion 33, a pair of bolt insertion holes 34 c are formed in the first connection portion 34, and a pair of bolts are inserted in the second connection portion 35. A female screw hole 35c is formed.

  Bolts 5 (FIG. 1) are inserted into the connection holes 33 d, the bolts 5 are screwed to the joints 11, and the main body 31 is connected to the joints 11. Bolts 6 (FIG. 1) are respectively inserted into the pair of bolt insertion holes 34c, screwed into the female screw holes 35c of the body 30 of the adjacent valve 20, and as shown in FIG. 30 are connected.

  FIG. 7 is a view showing a state in which the bodies 30 of the adjacent valves 20 are connected. In FIG. 7, only the main body 31 and the closing block 7 of the body 30 are shown in a sectional view, and the three main bodies 31 are given reference numbers 31X, 31Y, and 31Z in order from the right side in FIG. I will explain.

  As shown in FIG. 7, the closing block 7 is connected to the first connecting portion 34 of the main body portion 31 </ b> X to close the first-first port 31 c 1, and the closing block 7 is connected to the second connecting portion 35 of the main body portion 31 </ b> Z. The first to fourth ports 31d2 are closed.

  The first connecting part 34 of the main body part 31Y is connected to the second connecting part 35 of the main body part 31X so as to overlap in the vertical direction. In other words, the first connecting portion 34 of the main body portion 31Y is positioned in the stepped portion 37 (FIGS. 3 and 4 (a)) of the main body portion 31X, and the second connecting portion 35 of the main body portion 31X is the stepped portion of the main body portion 31Y. They are connected so as to be located within the portion 36 (FIGS. 3, 4A). Thereby, the 1-2nd flow path 31d of the main-body part 31X and the 1-1st flow path 31c of the main-body part 31Y mutually communicate.

  A gasket 38 is inserted into the annular recess 35b of the second connecting portion 35 of the main body portion 31X and the annular recess 34b of the first connecting portion 34 of the main body portion 31Y, and the connecting portion between the main body portion 31X and the main body portion 31Y is sealed. ing.

  The main body 31Z is connected to the main body 31Y in the same form as the main body 31Y is connected to the main body 31X.

  Further, a gasket 38 is inserted into the annular recess 34b of the first connecting portion 34 of the main body 31X and the recess 7a of the closing block 7, and the connecting portion between the first connecting portion 34 and the closing block 7 of the main body 31X is sealed. ing. A gasket 38 is inserted into the annular recess 35b of the second connecting portion 35 of the main body 31Z and the recess 7a of the closing block 7, and the connecting portion between the second connecting portion 35 and the closing block 7 of the main body 31Z is sealed. .

  A gasket 38 is also inserted into the annular recess 33 c of each main body 31 and the annular recess (not shown) of each joint 11, and the connecting portion between the main body 31 and the joint 11 is sealed.

  In this way, by connecting the main body 31, the three valves 20 are connected along the second direction D <b> 2, and one flow path that can pass through each valve 20 and communicate with each second flow path. Is formed.

  Next, the gas flow when the valve 20 is in the closed state and the open state will be described.

  When supplying process gas to a chamber (not shown), the valve 20 is closed as shown in FIG. Thereby, even if the process gas supplied to the gas line 3 flows from the 2-1 port 31e1 of the main body 31 into the second flow path 31b, it does not flow into the first flow path 31a, and the second 2-2 It flows out from the port 31e2 and flows to the mass flow controller 17 on the downstream side.

  On the other hand, when purging the mass flow controller 17 and the like with the purge gas, the valve 20 is opened as shown in FIG. As a result, the purge gas flowing through the gas line 3 for supplying the purge gas flows into the second flow path 31b from the 2-1 port 31e1 of the main body 31, passes through the groove 32b and the valve chamber 32a, and flows through the first flow. It flows into the path 31a. In the gas lines 3 other than the gas line 3 for supplying the purge gas, the automatic valve 13 is closed.

  For example, in FIG. 7, when the gas line 3 for supplying the purge gas is the gas line 3 including the main body 31X, the purge gas flows into the first flow path 31a from the second flow path 31b of the main body 31X. . Thereafter, the purge gas flows from the first-second flow path 31d of the main body 31X to the first-first flow path 31c of the main body 31Y. A portion of the purge gas that has flowed into the first-first flow path 31c of the main body 31Y passes through the groove 32b and the valve chamber 32a, flows into the second flow path 31b of the main body 31Y, and the remaining portion of the purge gas of the main body 31Y. 1-2 flows into the flow path 31d.

  Since the automatic valve 13 is in the closed state, the purge gas flowing into the second flow path 31b of the main body 31Y flows to the mass flow controller 17 side, passes through the mass flow controller 17, the automatic valve 14, and the gas out manifold 4, Flows to chamber not shown.

  On the other hand, the purge gas that has flowed into the first-second flow path 31d of the main body portion 31Y flows into the first-first flow path 31c of the main body portion 31Z, passes through the groove 32b and the valve chamber 32a, and is second in the main body portion 31Z. It flows into the flow path 31b. The purge gas that has flowed into the second flow path 31b of the main body 31Z flows to the mass flow controller 17 side through the mass flow controller 17, the automatic valve 14, and the gas out manifold 4 because the automatic valve 13 is closed. , Flows to a chamber (not shown).

  Next, a method for adding or reducing the gas line 3 in the fluid control apparatus 1 including the valve 20 will be described with reference to FIGS.

  When the gas line 3 is added, all of the gas out manifold 4 and the automatic valve 14 fixed thereto are removed, and a new gas out corresponding to the number of joints 10 and 11 of the gas line 3 to be added and the number of gas lines 3 is added. The manifold 4 is fixed to the base 2. Next, the closing block 7 is removed from the second connection part 35 of the main body part 31Z, and the first connection part 34 of the main body part 31 of the valve 20 to be added is connected to the second connection part 35 of the main body part 31Z by the bolt 6. Let The closing block 7 is fixed to the second connecting portion 35 of the main body portion 31 of the added valve 20. The plurality of fluid control devices 12 to 17 and the added valve 20 of the gas line 3 to be added are connected to the joints 10 and 11. Further, the automatic valve 14 of the existing gas line 3 is connected to the new gas out manifold 4.

  When the gas line 3 is reduced, the closing block 7 is removed from the second connecting portion 35 of the main body 31Z, and the plurality of joints 10, 11 and the plurality of fluid control devices 12-17, 20 of the gas line 3 to be reduced are removed from the base 2. remove. Further, all of the gas out manifold 4 and the automatic valve 14 fixed thereto are removed. Next, the closing block 7 is fixed to the second connecting portion 35 of the main body portion 31Y. Further, new gas out manifolds 4 corresponding to the number of gas lines 3 are fixed to the base 2, and automatic valves 14 are connected to the new gas out manifolds 4.

  According to the valve 20 as described above, the first connecting portion 34 of the body 30 of the valve 20 is easily connected to or disconnected from the second connecting portion 35 of the body 30 of another valve 20. The length of the manifold valve can be changed. As a result, the number of gas lines 3 is not limited, and the number of gas lines 3 can be easily increased or decreased.

  Moreover, the 1st connection part 34 of the body 30 of the valve | bulb 20 is mutually connected with the volt | bolt 5 from the upper side in the state which overlapped with the 2nd connection part 35 of the body 30 of the valve | bulb 20 adjacent to the up-down direction. For this reason, when connecting or removing the valve 20, the valve 20 can be connected or removed only by access from above. Therefore, it is possible to connect and remove the valve 20 without securing a wide space.

  In addition, this invention is not limited to the Example mentioned above. A person skilled in the art can make various additions and changes within the scope of the present invention.

  For example, as shown in FIG. 8, a valve 120 in which a plurality (two in FIG. 8) of the valves 20 of the above embodiment are connected may be used. As shown in FIG. 8A, the body 130 includes a main body portion 131 and two cylindrical portions 132A and 132B. A bonnet portion 21 and an actuator 22 are provided for each of the cylindrical portions 132A and 132B. The main body 131 includes a base 133, a first connecting part 34, and a second connecting part 35. The two cylindrical portions 132 </ b> A and 132 </ b> B are provided with respect to the first surface 133 </ b> A of the base portion 133. The base 133 has a second surface 133B located on the opposite side of the first surface 133A. A plurality of connection holes 133 d for connecting the valve 120 to the plurality of joints 11 are formed in the base 133.

  And as shown in FIG.8 (b), the 1st flow path 131a, the 2nd flow path 31b, and the 3rd flow path 131g are formed in the main-body part 131. As shown in FIG. The first-second flow path 131d of the first flow path 131a has a first-third port 131d1 that opens toward the diaphragm 21D (FIG. 4B) in the cylindrical portion 132A, and a first port that opens to the fourth surface 35A. 1-4 port 131d2, and 1-5th port 131d3 which opens toward diaphragm 21D (Drawing 4 (b)) in cylindrical part 132B between 1-3 port 131d1 and 1-4 port 131d2, and Have

  The third flow path 131g is a flow path for flowing process gas and purge gas, and has the same shape as the second flow path 31b. That is, the third channel 131g has a 3-1 channel and a 3-2 channel corresponding to the 2-1 channel 31e and the 2-2 channel 31f of the second channel 31b. Yes. Therefore, the 3-1 channel has an inverted V shape and has two ports that open to the second surface 133B via the annular recess 133c. The third 3-2 flow path opens in the cylindrical portion 132B through a groove 32b (FIG. 4B) and a port that opens toward the diaphragm 21D (FIG. 4B), and in the 3-1 flow path. Port. Then, when the diaphragm 21D comes into contact with and separates from the sheet 21C, communication or blocking between the first flow path 131a and the third flow path 131g is performed. According to the valve 120 having such a configuration, it is possible to easily increase or decrease the plurality of gas lines 3.

  The first-first channel 31c of the first channel 31a includes a first port 31c1 that opens to the third surface 34A via the annular recess 34b and a first port that opens to the first-second channel 31d. -2 port 31c2 as long as it has any shape. Similarly, the 1st-2 flow path 31d of the 1st flow path 31a has the 1st-3 port 31d1 opened toward the diaphragm 21D, and the 1st-4 opened to the 4th surface 35A via the annular recess 35b. As long as it has the port 31d2, it may have any shape.

  Furthermore, the 2-1 flow path 31e of the second flow path 31b has two 2-1 ports 31e1 and 2-2 ports 31e2 that open to the second surface 33B via the annular recess 33c. Any shape may be used. The 2nd-2 flow path 31f of the 2nd flow path 31b is the 2nd-3 port 31f1 opened toward the diaphragm 21D via the groove | channel 32b, and the 2nd-4 port opened to the 2nd-1 flow path 31e. As long as it has 31f2, it may have any shape.

  Moreover, although one gas line 3 of the plurality of gas lines 3 is used as a gas line for flowing purge gas, the first connecting portion 34 or the second connecting portion 34 of the body 30 of the valve 20 located at the end in the second direction D2 is used. A pipe may be connected to the connecting portion 35 so that the purge gas flows.

  The driving means for moving the stem 21H up and down is an automatic driving means, but it may be a manual driving means. The automatic driving means may be an electromagnetic driving means. The valves 20 and 120 are diaphragm valves, but may be other valves.

  In the embodiment, the fluid control device 1 includes the on-off valve, the filter, the regulator, and the mass flow controller as the fluid control device. However, in addition to these, the fluid control device 1 may include a check valve, a pressure gauge, and the like. .

1: Fluid control device 2: Base 3: Gas line 4: Gas out manifold 4a: Outlet passage 4B: Outlet pipe 5, 6: Bolt 7: Closing block 7a: Concave portion 10, 11: Fittings 12 to 17: Fluid control device 20 120: Valve 21: Bonnet portion 21C: Seat 21D: Diaphragm 21H: Stem 22: Actuator 30, 130: Body 31a, 131a: First flow path 31b: Second flow path 31c: 1-1st flow path 31c1: First 1-1 port
31c2: Port 1-2
31d, 131d: 1-2nd flow path
31d1, 131d1: 1-3 port
31d2, 131d2: 1-4th port
31e: 2-1 flow path 31e1: 2-1 port 31e2: 2-2 port 31f: 2-2 flow path 31f1: 2-3 port 31f2: 2-4 port 32a: valve chamber 32b: Annular grooves 33, 133: base 33A, 133A: first surface
33B, 133B: Second surface
33c, 34b, 35b, 133c: annular recess 33d, 133d: connection hole 34: first connecting portion
34A: 3rd surface 34c: Bolt insertion hole 34D: 5th surface 35: 2nd connection part
35A: Fourth surface 35c: Female screw hole 35D: Sixth surface 36, 37: Stepped portion 38: Gasket 131d3: First to fifth port 131g: Third flow path

Claims (3)

A body in which the first flow path and the second flow path are formed;
A valve body for communicating or blocking between the first flow path and the second flow path;
A valve with
The body is
A base having a first surface located on the valve body side and a second surface located on the opposite side of the first surface;
A first connecting portion having a third surface forming a step portion with the second surface;
A second connecting portion having a fourth surface forming a stepped portion with the first surface,
The first channel has a 1-1 channel and a 1-2 channel,
The 1-1 port of the 1-1 channel is open to the third surface.
The 1-3 port of the 1-2 flow path communicates with the 1-2 port of the 1-1 flow path and opens toward the valve body,
The 1-4 port of the 1-2 flow path opens to the fourth surface,
The first flow path and the second flow path can communicate with each other via the first to third ports,
The first connecting portion is connected to a portion corresponding to the second connecting portion in the body of another valve, and is connected to the first to first passage and the first to second passage in the other valve body. A valve that communicates with the corresponding channel. A third flow path is formed in the body,
The valve is
And further comprising another valve body for communicating or blocking between the first flow path and the third flow path,
The 1-2 flow path has a 1-5 port that opens toward the other valve body between the 1-3 port and the 1-4 port,
The valve according to claim 1, wherein the first flow path and the third flow path can communicate with each other via the first 1-5 port.   A fluid control apparatus comprising a manifold valve to which the valve according to any one of claims 1 to 3 is connected.

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