JP7325793B2 - How to change valves, fluid controllers and purge gas lines - Google Patents

Description

The present invention relates to valves, fluid control devices, and methods of modifying purge gas lines.

In a conventional fluid control device, a purge gas line for flowing purge gas to a plurality of gas lines for flowing combustible gas and a purge gas line for flowing purge gas to a plurality of gas lines for flowing combustion-supporting gas are separated. is set up. This prevents both the combustible gas and the combustion-supporting gas from flowing back into one purge gas supply line.

JP 2013-177948 A

However, in the conventional fluid control device, the combustion-supporting gas is passed through one of the plurality of gas lines through which the combustible gas is passed, or one of the gas lines through which the combustion-supporting gas is passed If there is a specification change to allow combustible gas to flow through the

By using the block joint for changing the purge line disclosed in Patent Document 1, it becomes possible to use a new type of purge gas later. is not easy to change.

SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to facilitate change of a purge gas line in a plurality of gas lines.

In order to solve the above object, a valve according to one aspect of the present invention includes a body in which a first flow path, a second flow path, and a third flow path are formed, and the first flow path and the A valve body for communicating or blocking communication between the second flow path and the third flow path, and an actuator having a drive section for operating the valve body. The body has first to fourth recesses arranged in a straight line on the surface opposite to the actuator side, and the first flow path extends through the first recess on the opposite surface. the second flow path opens to the opposite surface through the second recess; the third flow path opens to the opposite surface through the third recess; A third recess and a fourth recess are formed between the first recess and the second recess. It is configured such that an intermediate position with respect to the fourth recess is the same position.

Moreover, the same position may be shifted from the central axis of the actuator.

Further, a fluid control device, which is one aspect of the present invention, includes the valve described above and a pair of joints to which the upstream side and the downstream side of the valve are connected, a plurality of gas lines for flowing a process gas, and a first purge gas line having a first manifold connected to the gas lines for flowing the purge gas; and a second purge gas line having a second manifold connected to each gas line for flowing the purge gas. Prepare. The first manifold has a first outflow path for flowing purge gas to each gas line, and the second manifold has a second outflow path for flowing purge gas to each gas line. In the valve, the first flow path and the flow path of the joint positioned upstream of the pair of joints communicate with each other, and the flow path of the second flow path and the joint positioned downstream of the pair of joints communicate with each other. a state in which the third flow path and the first outflow path communicate with each other, and the second outflow path is closed by the fourth concave portion; or the second flow path and the The flow path of the joint positioned upstream of the pair of joints communicates with each other, the first flow path communicates with the flow path of the joint positioned downstream of the pair of joints, and the flow path of the joint positioned downstream of the pair of joints communicates with each other. The third flow path and the second outflow path communicate with each other, and the first outflow path is connected to the pair of joints, the first manifold, and the second manifold in a state where the fourth recess is closed. be.

Further, a method for changing a purge gas line, which is an aspect of the present invention, is characterized in that, in the fluid control device described above, the first flow path and the flow path of the joint located upstream of the pair of joints are in communication with each other, The second flow path and the flow path of the joint located downstream of the pair of joints are in communication with each other, the third flow path and the first outflow path are in communication with each other, and the second outflow path is in communication with each other. , removing the valve connected to the pair of joints, the first manifold, and the second manifold in a state closed by the fourth recess, and connecting the third flow path to the first purge gas line; The valve is rotated by 180° and the inverted valve is connected so that the second flow path and the flow path of the joint located on the upstream side of the pair of joints communicate with each other, and the first flow path and the pair of joints are connected. The flow path of the joint located downstream of the joint communicates with each other, the third flow path communicates with the second outflow path, and the first outflow path is closed by the fourth recess. The pair of joints, the first manifold, and the second manifold are connected in a state, and the third flow path is connected to the second purge gas line.

ADVANTAGE OF THE INVENTION According to this invention, the technique which can facilitate the change of a purge gas line in a several gas line can be provided.

1 is a system diagram of a fluid control device according to a first embodiment of the present invention; FIG. 1 is a plan view of a fluid control device according to a first embodiment; FIG. FIG. 3 is a cross-sectional view along line III-III of the fluid control device shown in FIG. 2; FIG. 5 is a diagram showing a state in which the third flow path of the valve of the first embodiment is connected to the first outflow path of the first manifold; FIG. 5 is a diagram showing a state in which the third flow path of the valve of the first embodiment is connected to the second outflow path of the second manifold; FIG. 8 is a plan view of a fluid control device according to a second embodiment; FIG. 10 is a diagram showing a state in which the third flow path of the valve of the second embodiment is connected to the first outflow path of the first manifold; FIG. 10 is a diagram showing a state in which the third flow path of the valve of the second embodiment is connected to the second outflow path of the second manifold;

A fluid control device 1 having a valve 40 according to an embodiment of the present invention will be described with reference to the drawings.

FIG. 1 is a system diagram of a fluid control device 1 according to this embodiment. FIG. 2 is a plan view of the fluid control device 1. FIG. FIG. 3 is a cross-sectional view of the fluid control device 1 shown in FIG. 2 along line III-III.

The fluid control device 1 comprises a base 2 , a plurality of gas lines 10 , a first purge gas line 20 and a second purge gas line 30 .

The base 2 is made of steel or the like and has a flat plate shape. The base 2 is formed with a plurality of bolt screw holes 2a. A combustible gas or a combustion-supporting gas, for example, flows through each gas line 10 . Combustible gases are, for example, hydrogen (H ₂ ), methane (CH ₄ ), silane (SiH ₄ ), etc., and combustion-supporting gases are, for example, oxygen (O ₂ ), nitrous oxide (N ₂ O). , chlorine (Cl ₂ ), and the like. Since each gas line 10 has the same configuration, only one gas line 10 out of the plurality of gas lines 10 will be described below.

As shown in FIGS. 1 to 3, each gas line 10 includes a plurality of joints 11, a plurality of fluid control devices 12 to 17, 40, a plurality of bolts 18, and a plurality of gaskets 19 (see FIG. 4). Prepare. For simplification of the drawing, only one bolt 18 among the plurality of bolts 18 is given a reference number. The gasket 19 is a sealing member and is made of, for example, metal or resin.

The plurality of joints 11 are arranged in a row along the longitudinal direction of the gas line 10 and fixed to the base 2 by screwing bolts (not shown) into the bolt screw holes 2a. The joint 11 has a substantially rectangular parallelepiped shape, and a substantially V-shaped flow path 11a is formed therein. The joint 11 is formed with a recess 11b (see FIG. 4) at each opening of the flow path 11a. The most upstream joint 11 is connected to an inlet pipe (not shown), and the most downstream joint 11 is connected to an outlet pipe (not shown).

A plurality of fluid control devices 12 to 17 and 40 include a valve 12 that is a manual valve, a regulator (reducing valve) 13, a pressure gauge 14, and valves 15 and 40 that are automatic valves (for example, fluid-driven automatic valves). , a flow control device (for example, a mass flow controller (MFC: Mass Flow Controller)) 16 , and a filter 17 . Each fluid control device 12-17, 40 is fixed to the corresponding joint 11 by a bolt 18. As shown in FIG.

A first purge gas line 20 and a second purge gas line 30 are provided adjacent to the plurality of gas lines 10 , and the second purge gas line 30 branches off from the first purge gas line 20 . The first purge gas line 20 and the second purge gas line 30 are lines for flowing purge gas (for example, nitrogen) from one purge gas supply source to the plurality of gas lines 10, and the first purge gas line 20 is a combustible gas. The second purge gas line 30 is provided for flowing the purge gas into the gas line 10 through which the combustion-supporting gas flows.

The first purge gas line 20 includes a plurality of joints 21 (only one joint 21 is shown in FIG. 2), a plurality of fluid control devices 22 to 24, a plurality of bolts 25, a plurality of gaskets (not shown), a first A pipe section 26 and a first manifold 27 are provided. For simplification of the drawing, only one bolt 25 among the plurality of bolts 25 is given a reference number. A gasket is a sealing member and is made of, for example, metal or resin.

Since the configuration of the joint 21 is the same as that of the joint 10, the description thereof is omitted. A plurality of fluid control devices 22 to 24 are composed of a valve 22 that is a manual valve, a regulator (reducing valve) 23 and a pressure gauge 24 . Each of the fluid control devices 22-24 is fixed to the corresponding joint 21 with a bolt 25. As shown in FIG.

The first pipe portion 26 has one end connected to the outlet side of the pressure gauge 24 and the other end connected to the inlet side of the first manifold 27 . The first manifold 27 is arranged to cross each gas line 10 under the valves 40 and is connected to each valve 40 . As shown in FIG. 4, the first manifold 27 includes a first common channel 27a extending perpendicularly to the gas line 10 and a first outflow channel extending from the first common channel 27a toward each valve 40. 27b are formed. A recess 27c is formed in the opening of the first outflow path 27b of the first manifold 27. As shown in FIG.

As shown in FIG. 2, the second purge gas line 30 includes a plurality of joints (not shown), a plurality of fluid control devices 31 and 32, a plurality of bolts 33, a plurality of gaskets (not shown), and a branch portion 34. , a second pipe section 35 and a second manifold 36 . For simplification of the drawing, only one bolt 33 among the plurality of bolts 33 is given a reference number. A gasket is a sealing member and is made of, for example, metal or resin.

The configuration of the joint (not shown) is the same as that of the joint 10 . A plurality of fluid control devices 31 and 32 are composed of regulators (reducing valves) 31 and pressure gauges 32 . Each fluid control device 31 to 32 is fixed to the corresponding joint by bolts 33 . A branch portion 34 connects the upstream side of the regulator 31 and the portion of the first purge gas line 20 between the valve 22 and the regulator 23 .

The second pipe portion 35 has one end connected to the outlet side of the pressure gauge 32 and the other end connected to the inlet side of the second manifold 36 . A second manifold 36 is arranged across each gas line 10 below the valves 40 and is connected to each valve 40 . As shown in FIG. 4, the second manifold 36 includes a second common flow path 36a extending perpendicularly to the gas line 10, and a second outflow path extending from the second common flow path 36a toward each valve 40. 36b are formed. A recess 36c is formed in the opening of the second outflow passage 36b of the second manifold 36. As shown in FIG.

In the first manifold 27 and the second manifold 36 located below the valve 40, and the joints 11 located upstream and downstream of these, intermediate the recess 27c of the first manifold 27 and the recess 36c of the second manifold 36 The position and the intermediate position of the concave portion 11b of the joint 11 located on the upstream side and the downstream side are substantially the same position A. As shown in FIG. The same position A is located on the central axis C of the actuator 42 . In the present embodiment, the first manifold 27, the second manifold 36, and the joints 11 positioned upstream and downstream of these are arranged so that the distances between the adjacent concave portions 27c, 36c, and 11b are equidistant. is installed in

Next, valve 40 will be described with reference to FIGS.

FIG. 4 is a diagram showing a state in which the third flow path 46c of the valve 40 is connected to the first outflow path 27b of the first manifold 27, and FIG. FIG. 11 is a diagram showing a state in which the second manifold 36 is connected to the second outflow path 36b.

As shown in FIGS. 4 and 5, valve 40 includes body 41 and actuator 42 .

The body 41 includes a body portion 43 and a cylindrical portion 44 and is manufactured by, for example, cutting, casting, lost wax, or a 3D printer. A first flow path 46 a , a second flow path 46 b , and a third flow path 46 c are formed in the body portion 43 . The cylindrical portion 44 is provided on the upper side of the body portion 43 and has a valve chamber 44a. An annular groove 44b is formed in the valve chamber 44a, and a diaphragm 44C, which is a valve element, is provided. The first flow path 46a and the second flow path 46b are configured to communicate with the groove 44b, and the third flow path 46c is configured to communicate with the valve chamber 44a other than the groove 44b. Therefore, the first flow path 46a and the second flow path 46b are always in communication with each other through the groove 44b. A detailed configuration of the main body portion 43 will be described later.

The actuator 42 has a bonnet 42A, a seat 42B, a presser adapter 42C, a diaphragm presser 42D, a stem (not shown), and a drive section (not shown).

The bonnet 42</b>A has a substantially cylindrical shape and is fixed to the cylindrical portion 44 of the body 41 . The seat 42B has an annular shape and is provided on the periphery of a portion where the valve chamber 44a of the cylindrical portion 44 and the third flow path 46c communicate with each other. The diaphragm 44C is held against the body 41 with its outer peripheral portion being compressed by the pressing adapter 42C.

The diaphragm 44C, which is a valve body, has a substantially spherical shell shape, and its natural state is a substantially arcuate shape that protrudes upward. By contacting and separating the diaphragm 44C from the seat 42B, communication or interruption between the first flow path 46a and the second flow path 46b and the third flow path 46c is performed. When the valve 40 is in the closed state, the diaphragm 44C abuts against the seat 42B, blocking the first flow path 46a, the second flow path 46b, and the third flow path 46c. When the valve 40 is in the open state, the diaphragm 44C is separated from the seat 42B, and the first and second flow paths 46a and 46b communicate with the third flow path 46c.

The diaphragm retainer 42D is provided on the upper side of the diaphragm 44C, and is configured to be able to press the central portion of the diaphragm 44C. The diaphragm presser 42D is supported by the bonnet 42A so as to be vertically movable. A stem (not shown) is supported by the bonnet 42A so as to be vertically movable. A driving portion (not shown) generates a driving force by a fluid from the outside to vertically move a stem (not shown).

The body portion 43 is located on the side opposite to the actuator 42 side, and has a contact surface 45 that contacts the joint 11 , the first manifold 27 and the second manifold 36 . The contact surface 45 is formed with first to fourth recesses 45a to 45d. The first to fourth recesses 45a to 45d are formed to line up, and the intermediate position between the first recess 45a and the second recess 45b and the intermediate position between the third recess 45c and the fourth recess 45d are substantially the same. It is configured to be in position A. The same position A is located on the central axis C of the actuator 42 . In the present embodiment, the first to fourth recesses 45a to 45d are formed equidistant from adjacent recesses.

As described above, the body portion 43 is formed with the first flow path 46a, the second flow path 46b, and the third flow path 46c.

The first flow path 46a is a flow path for flowing process gas and purge gas, and has a first port 47a that opens to the contact surface 45 via the first concave portion 45a. The second flow path 46b is a flow path for flowing process gas and purge gas, and has a second port 47b that opens to the contact surface 45 via the second recess 45b. The third flow path 46c is a flow path for flowing purge gas, and has a third port 47c that opens to the contact surface 45 via the third concave portion 45c.

In FIG. 4, the gasket 19 is inserted into the recess 45a of the main body 43 and the recess 11b on the downstream side of the joint 11 located on the upstream side, and the connecting portion between the main body 43 and the joint 11 located on the upstream side is sealed. It is A gasket 19 is inserted into the concave portion 45b of the main body portion 43 and the concave portion 11b on the upstream side of the joint 11 positioned on the downstream side to seal the connecting portion between the main portion 43 and the joint 11 positioned on the downstream side. A gasket 19 is inserted into the recessed portion 45c of the main body portion 43 and the recessed portion 27c of the first manifold 27 to seal the connecting portion between the main body portion 43 and the first manifold 27. As shown in FIG. A gasket 19 is inserted into the concave portion 45d of the main body portion 43 and the concave portion 36c of the second manifold 36 to seal the connecting portion between the main portion 43 and the second manifold 36 .

As a result, the first flow path 46a communicates with the flow path 11a of the joint 11 positioned upstream, the second flow path 46b communicates with the flow path 11a of the joint 11 positioned downstream, and the third flow path 46b communicates with the flow path 11a of the joint 11 positioned downstream. The passage 46 c communicates with the first outflow passage 27 b of the first manifold 27 . Also, the second outflow passage 36b of the second manifold 36 is closed by the fourth concave portion 45d and does not communicate with any of the first to third flow passages 46a to 46c. That is, the third flow path 46 c of the valve 40 is connected to the first purge gas line 20 but not connected to the second purge gas line 30 . Since the valve 40 is connected to the first purge gas line 20 in this manner, combustible gas flows through the gas line 10 having the valve 40 .

In the gas line 10 having the valve 40, the combustible gas is supplied/cut off by opening and closing the valve 15 while the valve 40 remains closed. When purging the mass flow controller 16 and the like with the purge gas, the valve 22 is open, the valve 15 is closed, and the valve 40 is opened and closed to supply/shut off the purge gas. Since the valve 40 is connected to the first purge gas line 20 , the purge gas from the first purge gas line 20 flows through the gas line 10 .

Next, the valve 40 connected to the second purge gas line 30 will be described.

As shown in FIG. 5, the valve 40 is connected to the joint 11, the first manifold 27, and the second manifold 36 by 180° reversing the state shown in FIG.

A gasket 19 is inserted into the concave portion 45a of the main body portion 43 and the concave portion 11b on the upstream side of the joint 11 located on the downstream side to seal the connecting portion between the main portion 43 and the joint 11 located on the downstream side. A gasket 19 is inserted into the concave portion 45b of the main body portion 43 and the downstream concave portion 11b of the joint 11 located upstream, thereby sealing the connecting portion between the main portion 43 and the joint 11 located upstream. A gasket 19 is inserted into the concave portion 45d of the main body portion 43 and the concave portion 27c of the first manifold 27 to seal the connecting portion between the main portion 43 and the first manifold 27. As shown in FIG. A gasket 19 is inserted into the recess 45c of the main body 43 and the recess 36c of the second manifold 36 to seal the joint between the main body 43 and the second manifold 36. As shown in FIG.

As a result, the first flow path 46a communicates with the flow path 11a of the joint 11 located downstream, the second flow path 46b communicates with the flow path 11a of the joint 11 located upstream, and the third flow The passage 46 c communicates with the second outflow passage 36 b of the second manifold 36 . Also, the first outflow path 27b of the first manifold 27 is closed by the fourth recess 45d and does not communicate with any of the first to third flow paths 46a to 46c. That is, the third flow path 46 c of the valve 40 is connected to the second purge gas line 30 but not connected to the first purge gas line 20 . Since the valve 40 is connected to the second purge gas line 30 in this way, the combustion-supporting gas flows through the gas line 10 having the valve 40 .

In the gas line 10 having the valve 40, by opening and closing the valve 15 while the valve 40 remains closed, the combustion-supporting gas is supplied/cut off. When purging the mass flow controller 16 and the like with the purge gas, the valve 22 is open, the valve 15 is closed, and the valve 40 is opened and closed to supply/shut off the purge gas. Since the valve 40 is connected to the second purge gas line 30 , the purge gas from the second purge gas line 30 flows through the gas line 10 .

In the valve 40 and the fluid control device 1 of this embodiment, the valve 40 in the connected state shown in FIG. By doing so, the purge gas line can be changed.

As described above, according to the valve 40 of the present embodiment, the contact surface 45 of the body portion 43 of the body 41 is formed with the first to fourth concave portions 45a to 45c aligned in a straight line, and the first flow path 46a is , the contact surface 45 opens through the first recess 45a, the second flow path 46b opens into the contact surface 45 through the second recess 45b, and the third flow path 46c opens the third recess 45c. The abutment surface 45 is open through the contact surface 45 . A third concave portion 45 and a fourth concave portion 45 are formed between the first concave portion 45 and the second concave portion 45, and an intermediate position between the first concave portion 45 and the second concave portion 45 An intermediate position between the third recess 45 and the fourth recess 45 is configured to be the same position.

According to this configuration, by rotating the valve 40 by 180°, the first flow path 46a of the valve 40 communicates with the flow path 11a of the joint 11 located on the upstream side, and the second flow path 46b communicates with the downstream side. The third flow path 46c communicates with the first outflow path 27b of the first manifold 27, and the second outflow path 36b of the second manifold 36 communicates with the fourth concave portion. 45d, or the first channel 46a communicates with the channel 11a of the joint 11 located downstream, and the second channel 46b communicates with the channel 11a of the joint 11 located upstream. The third flow path 46c communicates with the second outflow path 36b of the second manifold 36, and the first outflow path 27b of the first manifold 27 is closed by the fourth recess 45d. 11, can be connected to the first manifold 27 and the second manifold 36;

Therefore, the valve 40 of the gas line 10 through which the combustible gas is intended to flow can be connected to the first purge gas line 20, and the valve 40 of the gas line 10 through which the combustion-supporting gas is desired can be connected to the second purge gas line 30. . Therefore, it is possible to easily change the purge gas line, and in the fluid control device 1 having a plurality of gas lines 10, it is possible to prevent the combustible gas and the combustion-supporting gas from being mixed. Further, in the fluid control device 1 having a plurality of purge gas lines, the purge gas lines can be designed in common.

Next, a fluid control device 101 including a valve 50 according to a second embodiment of the invention will be described.

FIG. 6 is a plan view of the fluid control device 101 according to the second embodiment. FIG. 7 is a diagram showing a state in which the third flow path 46c of the valve 50 is connected to the first outflow path 27b of the first manifold 27, and FIG. FIG. 11 is a diagram showing a state in which the second manifold 36 is connected to the second outflow path 36b. The same members as those of the fluid control device 1 of the first embodiment are denoted by the same reference numerals, the description thereof is omitted, and only the different portions are described.

In this embodiment, the configuration of the body 51 of the valve 50 is different. The body 51 has a body portion 53 and a cylindrical portion 54 . In the first embodiment, the axis of the cylindrical portion 44 was located on the same position A, but the axis of the cylindrical portion 54 is shifted from the same position A in this embodiment. That is, the same position A is configured to deviate from the central axis C of the actuator 42 .

With such a configuration, when the valve 50 is rotated by 180°, the position of the actuator 42 is displaced as shown in FIGS. 6-8. As a result, it is possible to easily confirm to which of the first purge gas line 20 or the second purge gas line 30 the valve 50 is connected. The change can be facilitated, and the mixture of the combustible gas and the combustion-supporting gas can be prevented. Further, in the fluid control device 1 having a plurality of purge gas lines, the purge gas lines can be designed in common.

Also, the valve 50 and the fluid control device 101 according to the present embodiment have the same effects as the valve 40 and the fluid control device 1 according to the first embodiment.

It should be noted that the present invention is not limited to the embodiments described above. Those skilled in the art can make various additions, modifications, etc. within the scope of the present invention.

For example, in the above embodiment, the first purge gas line 20 and the second purge gas line 30 were configured to flow purge gas from one purge gas supply source, but the first purge gas line 20 and the second purge gas line 30 may be configured to flow different purge gases from different purge gas supply sources. In this case, the branch 34 is eliminated and a new manual valve is provided in the second purge gas line 30 .

Reference Signs List 1, 101: Fluid control device 10: Gas line 11: Joint 11a: Flow path 20: First barge gas line 27: First manifold 27b: First outflow passage 30: Second purge gas line 36: Second manifold 36b: Second 2 Outflow Paths 40, 50: Valves 41, 51: Body 42: Actuator 43: Main Body 44C: Diaphragm 45: Contact Surface 45a: First Concave 45b: Second Concave 45c: Third Concave 45d: Fourth Concave 46a: 1st flow path 46b: 2nd flow path 46c: 3rd flow path A: Same position C: Central axis

Claims (4)

a body in which a first channel, a second channel, and a third channel are formed;
a valve body that communicates or blocks communication between the first flow path and the second flow path, which are always in communication, and the third flow path;
and an actuator having a driving part that operates the valve body,
The body has first to fourth recesses arranged in a straight line on a surface opposite to the actuator side,
The first flow path opens to the opposite surface through the first recess, the second flow path opens to the opposite surface through the second recess, and the third flow the path opens to the opposite surface through the third recess;
A third recess and a fourth recess are formed between the first recess and the second recess, and a middle position between the first recess and the second recess and the third recess The intermediate position with the fourth recess is configured to be the same position,
The valve , wherein none of the flow paths formed in the body open to the opposite surface through the fourth recess. 2. The valve of claim 1, wherein the same position is offset from the central axis of the actuator. a plurality of gas lines for flowing a process gas, comprising the valve according to claim 1 or claim 2 and a pair of joints to which the upstream side and the downstream side of the valve are connected;
a first purge gas line for flowing purge gas, having a first manifold connected to each gas line;
a second purge gas line having a second manifold connected to each gas line for flowing the purge gas;
The first manifold has a first outflow path for flowing purge gas to each gas line,
The second manifold has a second outflow path for flowing the purge gas to each gas line,
The valve is
The first flow path and the flow path of the joint positioned upstream of the pair of joints communicate with each other, and the second flow path and the flow path of the joint positioned downstream of the pair of joints communicate with each other. a state in which the third flow path and the first outflow path are in communication with each other, and the second outflow path is closed by the fourth recess; or
The second flow path and the flow path of the joint positioned upstream of the pair of joints communicate with each other, and the first flow path and the flow path of the joint positioned downstream of the pair of joints communicate with each other. in a state in which the third flow path and the second outflow path are in communication with each other, and the first outflow path is closed by the fourth recess;
A fluid control device coupled to the pair of joints, the first manifold, and the second manifold. In the fluid control device according to claim 3,
The first flow path and the flow path of the joint positioned upstream of the pair of joints communicate with each other, and the second flow path and the flow path of the joint positioned downstream of the pair of joints communicate with each other. The pair of joints, the first manifold, and the removing the valve connected to the second manifold and connecting the third flow path to the first purge gas line;
Rotate the removed valve by 180°,
In the inverted valve, the second flow path and the flow path of the joint positioned upstream of the pair of joints communicate with each other, and the first flow path and the flow path of the joint positioned downstream of the pair of joints communicate with each other. The pair of joints communicates with each other, the third channel and the second outflow channel communicate with each other, and the first outflow channel is closed by the fourth recess. and connecting the first manifold and the second manifold, and connecting the third flow path to the second purge gas line.

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