JP2016219578A5 - - Google Patents

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Publication number
JP2016219578A5
JP2016219578A5 JP2015101980A JP2015101980A JP2016219578A5 JP 2016219578 A5 JP2016219578 A5 JP 2016219578A5 JP 2015101980 A JP2015101980 A JP 2015101980A JP 2015101980 A JP2015101980 A JP 2015101980A JP 2016219578 A5 JP2016219578 A5 JP 2016219578A5
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JP
Japan
Prior art keywords
processing chamber
plasma
vacuum processing
vacuum
processing apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2015101980A
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English (en)
Japanese (ja)
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JP2016219578A (ja
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Publication date
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Priority to JP2015101980A priority Critical patent/JP2016219578A/ja
Priority claimed from JP2015101980A external-priority patent/JP2016219578A/ja
Publication of JP2016219578A publication Critical patent/JP2016219578A/ja
Publication of JP2016219578A5 publication Critical patent/JP2016219578A5/ja
Pending legal-status Critical Current

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JP2015101980A 2015-05-19 2015-05-19 プラズマ処理装置 Pending JP2016219578A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2015101980A JP2016219578A (ja) 2015-05-19 2015-05-19 プラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015101980A JP2016219578A (ja) 2015-05-19 2015-05-19 プラズマ処理装置

Publications (2)

Publication Number Publication Date
JP2016219578A JP2016219578A (ja) 2016-12-22
JP2016219578A5 true JP2016219578A5 (https=) 2018-02-22

Family

ID=57578621

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015101980A Pending JP2016219578A (ja) 2015-05-19 2015-05-19 プラズマ処理装置

Country Status (1)

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JP (1) JP2016219578A (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102600534B1 (ko) * 2021-11-02 2023-11-10 세메스 주식회사 기판 처리 장치 및 기판 처리 방법

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62204528A (ja) * 1986-03-05 1987-09-09 Hitachi Ltd ドライプロセス処理装置
JPH02151027A (ja) * 1988-12-01 1990-06-11 Nec Corp 半導体装置の製造装置
JPH0653169A (ja) * 1992-07-28 1994-02-25 Tokyo Electron Ltd 処理室圧力安定化方法
JP2002363755A (ja) * 2001-06-06 2002-12-18 Sharp Corp プラズマ処理装置およびプラズマ処理装置の調圧方法
JP4620537B2 (ja) * 2005-07-21 2011-01-26 東京エレクトロン株式会社 プラズマ処理装置およびプラズマ処理装置の制御方法
WO2007026889A1 (ja) * 2005-09-01 2007-03-08 Matsushita Electric Industrial Co., Ltd. プラズマ処理装置、プラズマ処理方法、これに用いられる誘電体窓及びその製造方法

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