JP2016193983A - Functional ink, film forming method, liquid droplet discharge apparatus, device with film, and electronic apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a functional ink that substantially prevents disturbance in a flow when passing through a supply line, a film forming method and a liquid droplet discharge apparatus using the functional ink, a device with a film manufactured by using the method and the apparatus, and an electronic apparatus having the device with a film.SOLUTION: The functional ink of the present invention comprises a film forming material and a liquid medium in which the film forming material is dissolved or dispersed. The ink is adjusted to have a dynamic viscosity coefficient of 2.5×10to 235×10m/s at room temperature and a Reynolds number of 2,300 or less when passing through a supply line at room temperature.SELECTED DRAWING: None

Description

  The present invention relates to a functional ink, a film forming method, a droplet discharge device, a film-coated device, and an electronic apparatus.

  By supplying (applying) a functional ink obtained by dissolving a film-forming material in a solvent onto a substrate using a droplet discharge method, and removing (drying) the solvent from the functional ink on the substrate. A method of forming a film has been put into practical use.

  A droplet discharge head used in such a method generally includes a plurality of nozzle openings, and discharges functional ink as droplets from each nozzle opening. From the viewpoint of forming the droplets with high dimensional accuracy and improving the flying characteristics of the droplets, the density, surface tension and viscosity of the functional ink, the diameter of the nozzle opening, and the droplet discharge An invention that defines the relationship of speed is disclosed (for example, see Patent Document 1).

  However, if the functional ink cannot be stably supplied from the storage unit (ink cartridge or ink tank) for storing the functional ink to the droplet discharge head, it is difficult to form a film with high dimensional accuracy. Usually, the reservoir and the droplet discharge head are connected by a supply line composed of a thin tube such as a tube, but the flow of functional ink is disturbed in the supply line (turbulent flow occurs). If this is the case, the functional ink may involve (capture) bubbles.

  When this bubble is brought into the droplet discharge head, a nozzle hole (so-called “nozzle missing”) that cannot discharge the functional ink is generated, and finally foreign matter (solid matter of the functional ink) is generated. The nozzle opening is closed due to clogging. For this reason, the thickness of the film formed on the substrate varies, and when this film is a functional film constituting an organic electroluminescence (organic EL) element, uneven light emission or the like occurs.

International Publication 2012/098580

  An object of the present invention is to provide a functional ink that does not easily disturb the flow when passing through a supply line, a film forming method and a droplet discharge device using the functional ink, and a device with a film manufactured using the functional ink And providing an electronic apparatus having the film-coated device.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

[Application Example 1]
The functional ink of the present invention includes a film forming material and a liquid medium in which the film forming material is dissolved or dispersed,
The kinematic viscosity coefficient at room temperature is 2.5 × 10 ^{−7 to} 235 × 10 ⁻⁷ m ² / s, and the Reynolds number when passing through the supply line at room temperature is adjusted to 2300 or less. It is characterized by having.

  The functional ink adjusted to have such characteristics has a laminar flow in the supply line, so that it is difficult for disturbance to occur, and can be smoothly and reliably transferred in the supply line.

[Application Example 2]
In the functional ink of the present invention, the static viscosity coefficient at room temperature is preferably 0.3 × 10 ^{−3 to} 20 × 10 ⁻³ Pa · s.

  As a result, the functional ink tends to be more surely laminar in the supply line. For example, when ejecting droplets, the functional ink can be more reliably ejected as droplets.

[Application Example 3]
In the functional ink of the present invention, the density is preferably 850 to 1,200 kg / m ³ .

  As a result, the functional ink tends to be more surely laminar in the supply line. For example, when ejecting droplets, the functional ink can be more reliably ejected as droplets.

[Application Example 4]
In the functional ink of the present invention, the amount of dissolved gas at room temperature is preferably 50 ppm or less.

  As a result, even when the functional ink entrains (captures) bubbles for some reason when the functional ink is transferred, the functional ink can absorb the bubbles (gas). For this reason, for example, when ejecting droplets, functional ink can be ejected stably and without unevenness.

[Application Example 5]
In the functional ink of the present invention, it is preferable that the inner diameter of the tube constituting the supply line is 0.1 × 10 ⁻³ to 10 × 10 ⁻³ m.

  Accordingly, when the functional ink passes through the supply line, turbulent flow is particularly difficult to occur in the flow.

[Application Example 6]
In the functional ink of the present invention, the speed of the functional ink when passing through the supply line is preferably 0.1 to 2 m / s.

  Thereby, it can prevent more reliably that the turbulent flow of the functional ink is generated in the supply line.

[Application Example 7]
The film forming method of the present invention includes a step of supplying the functional ink of the present invention to a droplet discharge head via a supply line;
Forming the liquid film of the functional ink by ejecting the functional ink as droplets from the droplet ejection head and attaching the functional ink onto a recording medium;
And drying the liquid film to form a film.

  According to the film forming method having such a configuration, a film having a uniform film thickness can be formed on the substrate with excellent film forming accuracy.

[Application Example 8]
The droplet discharge device of the present invention includes a storage unit that stores the functional ink of the present invention,
A droplet discharge head for discharging the functional ink as droplets;
The storage unit and the droplet discharge head are connected to each other, and a supply line for transferring the functional ink from the storage unit to the droplet discharge head is provided.

  According to the droplet discharge device having such a configuration, functional ink can be discharged as droplets stably and without unevenness, so that a film with a uniform film thickness can be formed on a substrate with excellent film formation accuracy. can do.

[Application Example 9]
The device with a film of the present invention is characterized by having a film formed by the film forming method of the present invention or the droplet discharge apparatus of the present invention or a film obtained by processing the film.
Such a device with a film is provided with a film with high dimensional accuracy, and thus has excellent reliability.

[Application Example 10]
The electronic apparatus of the present invention includes the film-coated device of the present invention.

  Since such an electronic apparatus includes a device with a film with high dimensional accuracy, it is excellent in reliability.

(A) is a perspective view showing a schematic configuration of the droplet discharge device of the present invention, (b) is a schematic plan view showing the arrangement of the droplet discharge head, and (c) is a schematic diagram of the droplet discharge head. It is sectional drawing which shows schematic structure of a part. It is a block diagram which shows the structure of an ink supply mechanism. It is a figure which shows the relationship between the droplet discharge head in a head unit, an intermediate | middle storage part, and a pressure control valve. It is a block diagram which shows the control system of the droplet discharge apparatus shown in FIG. It is a figure explaining the film-forming method using the droplet discharge apparatus shown in FIG. It is sectional drawing which shows the display apparatus which is an example of a device with a film | membrane. It is sectional drawing of the light emitting element with which the display apparatus shown in FIG. 6 is provided. It is a perspective view showing a configuration of a mobile (or notebook) personal computer which is an example of an electronic device. It is a perspective view which shows the structure of the mobile telephone (PHS is also included) which is an example of an electronic device. It is a perspective view which shows the structure of the digital still camera which is an example of an electronic device.

  Hereinafter, the functional ink, the film forming method, the droplet discharge device, the film-coated device, and the electronic apparatus of the present invention will be described based on preferred embodiments shown in the drawings. In each drawing, the scale of each part is appropriately changed for convenience of explanation, and the illustrated configuration does not necessarily match the actual scale.

  First, in the following, prior to describing the functional ink, film forming method, droplet ejection apparatus, film-coated device, and electronic apparatus of the present invention, the droplet ejection apparatus capable of using the functional ink of the present invention. An overall configuration of the example will be described.

(Droplet discharge device)
FIG. 1A is a perspective view showing a schematic configuration of a droplet discharge device, FIG. 1B is a schematic plan view showing the arrangement of droplet discharge heads, and FIG. FIG. 2 is a block diagram illustrating a configuration of an ink supply mechanism, and FIG. 3 illustrates a relationship between a droplet discharge head, an intermediate storage unit, and a pressure adjustment valve in the head unit. FIG. For convenience of explanation, FIG. 1 shows an X axis, a Y axis, and a Z axis that are orthogonal to each other. A direction parallel to the X axis is referred to as “X axis direction”, a direction parallel to the Y axis is referred to as “Y axis direction”, and a direction parallel to the Z axis is referred to as “Z axis direction”. In FIG. 1, the Z axis is along the vertical direction, the + Z axis direction side (the tip side of the arrow indicating the Z axis) is “up”, and the −Z axis direction side (the base end side of the arrow indicating the Z axis) ) Is called “below”.

  The droplet discharge device 6 shown in FIGS. 1 and 2 is an ink jet device. The droplet discharge device 6 includes a base 7, a pair of guide rails 8, a stage 9, a main scanning position detection device 10, a support base 12, a guide member 13, a cartridge installation unit 14, and a guide. A rail 15, a carriage 16, a sub-scanning position detection device 17, a head unit 18, and an ink supply mechanism 101 are provided.

  The base 7 has a rectangular parallelepiped shape having an upper surface 7a along the X-axis direction and the Y-axis direction. A pair of guide rails 8 extending along the Y-axis direction is installed on the upper surface 7 a of the base 7.

  A stage 9 is attached to the pair of guide rails 8 via a linear motion mechanism (not shown). As a result, the stage 9 is moved along the pair of guide rails 8 so that a later-described droplet discharge head 22 is moved relative to the stage 9 in the main scanning direction (Y-axis direction in the present embodiment). Can be made. In this embodiment, for example, a linear motor is used as such a linear motion mechanism, and the stage 9 repeats forward and backward movements at a predetermined speed along the Y-axis direction. In addition, this linear motion mechanism is not limited to a linear motor, For example, a screw-type linear motion mechanism etc. may be sufficient.

  A main scanning position detection device 10 is provided on the upper surface 7 a of the base 7. The main scanning position detection device 10 detects the position of the stage 9 with respect to the base 7 in the Y-axis direction (that is, the position in the main scanning direction).

  A placement surface 11 on which the recording medium 2 is placed is formed on the upper surface of the stage 9. The mounting surface 11 is provided with a suction chuck mechanism (not shown). By this chuck mechanism, the recording medium 2 on the mounting surface 11 is attracted and fixed to the mounting surface 11.

  A pair of support bases 12 extending upward are provided at both ends of the base 7 in the X-axis direction. A guide member 13 extending along the X-axis direction is installed on the pair of support bases 12. On the upper side of the guide member 13, there is provided a cartridge installation portion 14 that can set a plurality of cartridges (reservoir portions) C that store functional ink (film-forming ink) 26.

  On the other hand, a guide rail 15 extending along the X-axis direction is installed below the guide member 13. A carriage 16 is attached to the guide rail 15 via a linear motion mechanism (not shown). Thereby, by moving the carriage 16 along the guide rail 15, a later-described droplet discharge head 22 can be moved relative to the stage 9 in the sub-scanning direction (X-axis direction in the present embodiment). it can. In this embodiment, for example, a linear motor is used as such a linear motion mechanism, and the carriage 16 moves in the X-axis direction at an arbitrary timing (for example, when switching between the forward and backward movements of the main scanning described above). It is designed to move along. In addition, this linear motion mechanism is not limited to a linear motor, For example, a screw-type linear motion mechanism etc. may be sufficient.

  A sub-scanning position detection device 17 is provided on the carriage 16 side of the guide member 13. The sub-scanning position detection device 17 detects the position of the carriage 16 in the X-axis direction with respect to the guide member 13 (that is, the position in the sub-scanning direction).

  A head unit 18 is installed on the carriage 16. As shown in FIG. 1B, the head unit 18 is provided with a plurality (nine in this embodiment) of droplet discharge heads 22. Each droplet discharge head 22 includes a nozzle plate 23, and a plurality of discharge nozzles 24 are formed on the nozzle plate 23. The number and arrangement of the droplet discharge heads 22 and the discharge nozzles 24 are not limited to those illustrated.

  More specifically, each droplet discharge head 22 has a nozzle plate 23, a cavity 25, a vibration plate 27, and a piezoelectric element 28.

  In the nozzle plate 23, a plurality of discharge nozzles 24 arranged in the X-axis direction are formed. On the upper side of the nozzle plate 23, cavities 25 (pressure chambers) communicating with the discharge nozzles 24 are provided corresponding to the discharge nozzles 24. The cavity 25 communicates with the cartridge C set in the cartridge installation unit 14 via the ink supply mechanism 101, and the functional ink 26 from the cartridge (ink tank) C is supplied.

  A diaphragm 27 is disposed above the cavity 25. The diaphragm 27 constitutes a part of the inner wall surface of the cavity 25. A piezoelectric element 28 is disposed on the surface of the diaphragm 27 opposite to the cavity 25. Upon receiving the element drive signal, the piezoelectric element 28 expands or contracts in the vertical direction (Z-axis direction) to vibrate the diaphragm 27 in the vertical direction (Z-axis direction). Thereby, the inside of the cavity 25 is pressurized with the reduction of the volume in the cavity 25. As a result, an amount of functional ink 26 corresponding to the reduced volume in the cavity 25 is ejected as droplets 29 from the ejection nozzle 24. The ejected droplets 29 land on the recording medium 2.

  The ink supply mechanism 101 is configured to supply the functional ink 26 using three droplet discharge heads 22 of nine droplet discharge heads 22 provided in the head unit 18 as one supply unit.

  The supply system of the functional ink 26 for one supply unit is a supply that connects the two cartridges C filled with the functional ink 26, the intermediate reservoir 103 (103a), and the two cartridges C and the intermediate reservoir 103. A path 148 and a supply path 149 that connects the intermediate reservoir 103 and the droplet discharge head 22 are provided. In order to distinguish between the two cartridges C, the description may be made with reference numeral 102a assigned to one cartridge C and reference numeral 102b assigned to the other cartridge C. Further, the number of cartridges C connected to the intermediate storage unit 103 is not limited to two, and may be, for example, one or three or more.

  The cartridge C is filled with a functional ink 26 from which foreign matter, moisture, bubbles or the like are removed. In the present embodiment, compressed air is used as a pressurizing unit that pressurizes the inside of the cartridge C and feeds the functional ink 26. In the compressed air, foreign substances, oil, moisture and the like are removed in advance.

  A regulator 105 is provided between the compressed air inlet Pa and the cartridge C. The pressure setting of the compressed air that pressurizes the inside of the cartridge C is set in consideration of physical characteristics (such as viscosity) of the functional ink 26 filled in the cartridge C. In the present embodiment, an electropneumatic regulator capable of adjusting the pressure of compressed air by an electric signal almost steplessly is adopted as the regulator 105. As a result, even if the type of the functional ink 26 changes, the compressed air taken in can be finely adjusted according to the functional ink 26.

  The method of pressurizing the inside of the cartridge C is not limited to using compressed air in which air is compressed, and for example, an inert gas such as nitrogen may be used after being compressed. The pressure method (pressure means) is determined in consideration of the functional ink 26 filled in the cartridge C.

  An open / close valve 143 is provided in the pressurized air supply path between the cartridge 102 a and the regulator 105, and an open / close valve 144 is provided in the pressurized air supply path between the cartridge 102 b and the regulator 105. In addition, at least a part of each compressed air supply path is formed of a transparent member that allows the inside to be visually recognized, and a liquid level detection sensor 104 is attached to the portion formed of the transparent member. When the functional ink 26 leaks into each compressed air supply path, this may be detected by the liquid level detection sensor 104 to notify the abnormality or to close the normally open on-off valves 143 and 144. It can be done.

  A filter 106 that filters the functional ink 26 is provided in the supply path 148 that connects the two cartridges 102 a and 102 b and the intermediate reservoir 103. An open / close valve 141 is provided between the cartridge 102 a and the filter 106, and an open / close valve 142 is provided between the cartridge 102 b and the filter 106. An opening / closing valve 145 is also provided between the filter 106 and the intermediate reservoir 103. Even if foreign matter or the like enters the supply path 148 when one of the two cartridges 102a and 102b is replaced, it can be removed by the filter 106.

  The intermediate storage part 103 is an air release type cylindrical container, and an open path 140 capable of opening the intermediate storage part 103 to the atmosphere is connected to one end on the upper side thereof. The open path 140 is made of, for example, a transparent plastic tube, and a filter 107 that filters gas is provided at the open end of the open path 140. In addition, an open / close valve 146 is provided in the vicinity of the filter 107 and is normally in an open state. Since the gas passing through the filter 107 is filtered, foreign substances in the atmosphere can be prevented from entering the intermediate storage unit 103. In this case, an open path 140 is provided in each of the three intermediate reservoirs 103 a, 103 b, 103 c corresponding to the three supply units in the head unit 18, and each open path 140 is connected to one filter 107. .

  A liquid level detection sensor 104 is attached to an open path 140 between the opening / closing valve 146 and the intermediate storage unit 103. Since the intermediate reservoir 103 is open to the atmosphere, when the functional ink 26 is supplied and overflows and leaks into the open path 140, the liquid level detection sensor 104 can detect and close the open / close valve 146. . Since the liquid level detection sensor 104 is used elsewhere, it is classified by adding alphabets a to e at the end of the reference numeral 104.

  Since the intermediate reservoir 103 is open to the atmosphere, the supply of the functional ink 26 from the intermediate reservoir 103 to the droplet discharge head 22 is influenced by the hydraulic head pressure of the functional ink 26 stored in the intermediate reservoir 103. Receive. In the present embodiment, a liquid level sensor 108 capable of detecting the liquid level of the functional ink 26 stored in the intermediate storage unit 103 is attached to the other end on the lower side of the intermediate storage unit 103 that is a cylindrical container. ing. The liquid level sensor 108 is composed of, for example, a pressure sensor.

  The capacity of the intermediate reservoir 103 is set by the number of droplet ejection heads 22 connected to one intermediate reservoir 103 and the consumption of the functional ink 26 ejected from the droplet ejection head 22 by main scanning. . Further, from the viewpoint of stably supplying the functional ink 26 from one intermediate reservoir 103 to the three droplet discharge heads 22, a pressure regulating valve is provided between the intermediate reservoir 103 and the three droplet discharge heads 22. 109 is provided.

  The pressure regulating valve 109 is, for example, a diaphragm type self-sealing valve, and can deliver the functional ink 26 to the droplet discharge head 22 in accordance with the negative pressure state of the cavity 25 in the droplet discharge head 22. ing. By providing the pressure adjustment valve 109, the management of the water head pressure in the intermediate reservoir 103 can be made more gradual.

  Here, the functional ink supply system in the head unit 18 will be described with reference to FIG. FIG. 3 is a diagram showing the relationship between the droplet discharge head, the intermediate reservoir, and the pressure regulating valve in the head unit. As shown in FIG. 3, the intermediate reservoir 103 and the pressure adjustment valve 109 are provided in the head unit 18. The liquid level sensor 108 associated with the intermediate reservoir 103 is also provided in the head unit 18.

  A supply path 149a that connects the intermediate reservoir 103 and the on-off valve 147, a supply path 149b that connects the on-off valve 147 and the pressure adjustment valve 109, and a supply path 149c that connects the pressure adjustment valve 109 and the droplet discharge head 22 are all available. For example, a flexible tube made of polyethylene terephthalate is used. In this embodiment, the functional ink 26 may be deteriorated or deteriorated even when, for example, an ink containing an organic electroluminescent material or an ultraviolet curable ink is used as the functional ink 26. A tube having a light-shielding property is used so as not to occur.

  Three droplet discharge heads 22 are connected to one pressure adjusting valve 109 via a supply path 149c. As a result, the functional ink 26 can be ejected with the three droplet ejection heads 22 as one set. In other words, FIG. 3 shows a configuration in which the functional ink 26 can be supplied for each type to the plurality of droplet discharge heads 22 mounted on the head unit 18. Therefore, although not shown in FIG. 3, in order to supply the functional ink 26 to the nine droplet discharge heads 22, the head unit 18 has three intermediate storage portions 103 ( 103a, 103b, 103c) and three pressure regulating valves 109 are provided.

  Different types of functional ink 26 may be supplied to each of the three intermediate storage units 103, or the same type of functional ink 26 may be supplied. Also, functional ink 26 different from the other can be supplied to one of the three intermediate reservoirs 103.

The inner diameter of the tubes constituting each supply path (supply line) (tube) is preferably 0.1 × ^{10 -3} ~10 × ¹⁰ -3 order m, 0.5 × ^{10 -3} ~ More preferably, it is about 7.5 × 10 ⁻³ m. Characteristics described later (dynamic viscosity coefficient at room temperature is 2.5 × 10 ^{−7 to} 235 × 10 ⁻⁷ m ² / s, Reynolds number when passing through each supply path at room temperature is 2,300 or less) When the functional ink 26 adjusted to have the above is passed through the supply path of the size, turbulent flow is particularly difficult to occur in the flow.

  Furthermore, from the viewpoint of preventing disturbance of the flow of the functional ink 26 in each supply path (from the viewpoint of reliably generating a laminar flow), the speed of the functional ink 26 when passing through each supply path is as high as possible. It is preferable to set it quickly. Specifically, the speed of the functional ink 26 is preferably about 0.1 to 2 m / s, more preferably about 0.35 to 1.5 m / s, and 0.35 to 1 m / s. More preferably, it is about s. Thereby, it can prevent more reliably that the turbulent flow of the functional ink 26 occurs in each supply path.

  Next, the control system of the droplet discharge device 6 will be described. FIG. 4 is a block diagram showing a control system of the droplet discharge device shown in FIG.

  As shown in FIG. 4, the droplet discharge device 6 includes a control device 41 (control unit) that controls the operation of each unit of the droplet discharge device 6. The control device 41 includes a CPU (central processing unit) 42 that performs various types of arithmetic processing, and a memory 43 (storage unit) that stores various types of information.

  Here, the main scanning position detection device 10 and the sub-scanning position detection device 17 are connected to the CPU 42 via an input / output interface 46 and a data bus 47, respectively. In addition to the above, the CPU 42 is connected to the main scanning drive device 44, the sub-scanning drive device 45, the head drive circuit 48, the input device 49, the display device 50, and the ink supply via the input / output interface 46 and the data bus 47. The mechanism drive circuit 110 and various sensors (not shown) are connected to each other.

  The main scanning driving device 44 is a driving source for moving the stage 9 in the main scanning direction, and the sub scanning driving device 45 is a driving for moving the carriage 16 in the sub scanning direction. Is the source. The head drive circuit 48 drives the above-described droplet discharge head 22. The ink supply mechanism drive circuit 110 drives the pressurizing means, the regulator 105, the open / close valves 141 to 147, and the like of the ink supply mechanism 101. For example, the speed of the functional ink 26 passing through the supply path 148 can be adjusted by controlling the degree of pressurization of the cartridge C by the pressurizing means.

  The input device 49 is a device to which various operating conditions of the droplet discharge device 6 are input. For example, coordinate information for discharging the droplet 29 to the recording medium 2 is input from an external device (not shown). The display device 50 is a device that displays various information such as processing conditions and work status of the droplet discharge device 6. The operator can perform an operation using the input device 49 based on information displayed on the display device 50.

  The memory 43 includes, for example, a semiconductor memory such as a RAM and a ROM, or an external storage device such as a hard disk and a DVD-ROM. The memory 43 stores various information necessary for the operation of the CPU 42.

  More specifically, the memory 43 is set with a storage area for storing program software 51 in which the operation control procedure in the droplet discharge device 6 is described. The memory 43 is also set with a storage area for storing ejection position data 52 that is coordinate data of ejection positions ejected onto the recording medium 2.

  In addition, the memory 43 includes drive voltage data 53 which is data indicating the relationship between the drive waveform and the discharge amount when driving the droplet discharge head 22, drive waveform data 54 for driving the droplet discharge head 22, and the like. A storage area for storing a plurality of discharge conditions is set. In the memory 43, a storage area for storing discharge plan data 55, which is drive voltage data at each discharge location, is set. Furthermore, the memory 43 has a storage area that functions as a work area for the CPU 42, a temporary file, and the like, a storage area for storing how many times the functional ink 26 has been supplied to the intermediate storage unit 103, and other types. Storage area is set.

  The CPU 42 controls each part of the droplet discharge device 6 according to the program software 51 stored in the memory 43. The CPU 42 includes a drawing control unit 56, a landing characteristic correction control unit 60, a discharge condition setting unit 61, and a discharge plan setting unit 62.

  The drawing control unit 56 performs control for discharging and drawing the droplet 29 from the droplet discharge head 22. The drawing control unit 56 includes a main scanning control unit 57 that drives and controls the main scanning drive device 44, a sub-scanning control unit 58 that drives and controls the sub-scanning driving device 45, and an ejection control unit that drives and controls the head drive circuit 48. 59. The main scanning control unit 57 performs control for moving the stage 9 at a predetermined speed in the main scanning direction. The sub-scanning control unit 58 performs control for moving the droplet discharge head 22 by a predetermined sub-scanning amount in the sub-scanning direction. The discharge controller 59 controls the discharge amount of each of the plurality of nozzles included in the droplet discharge head 22 and the presence / absence of discharge.

  The landing characteristic correction control unit 60 calculates a correction value based on an inspection result of a discharge inspection apparatus (not shown) (landing information such as a landing position and a landing area of a test pattern) and preset appropriate landing information and a deviation amount. Acquired and fed back to the drawing control unit 56 to correct the landing position of the droplet 29 ejected by the droplet ejection head 22 on the recording medium 2. The discharge condition setting unit 61 sets the discharge amount and the number of discharges of the droplets 29 discharged from the discharge nozzle 24 based on the amount of the functional ink 26 discharged to the application region and the discharge characteristics. The discharge plan setting unit 62 sets the drive waveform of the piezoelectric element 28 at each location where the droplet 29 is discharged.

(Functional ink)
Hereinafter, the functional ink 26 (the functional ink of the present invention) used in the droplet discharge device 6 having such a configuration will be described in detail. The functional ink of the present invention includes a film forming material and a liquid medium in which the film forming material is dissolved or dispersed. Hereinafter, each of these components will be described in detail.

(Deposition material)
The film forming material is determined according to the type of film to be formed, and is not particularly limited. Various organic materials, various inorganic materials, and mixtures thereof can be used. For example, as a film forming material, a constituent material of each layer (especially, a hole injection layer, a hole transport layer, and a light emitting layer) of an organic electroluminescence (organic EL) element described later or a precursor thereof, a conductor pattern of a wiring board Examples thereof include a constituent material or a precursor thereof, a constituent material of a colored layer of a color filter, or a precursor thereof.

  Thus, by using the film-forming material as a constituent material of an organic layer of an organic electroluminescence element or a precursor thereof, an organic layer of the organic electroluminescence element (for example, a hole transport layer, a hole injection layer, a light emitting layer) , Intermediate layers, etc.) can be formed. Moreover, the conductor pattern of a wiring board can be formed by making the said film-forming material into the constituent material of the conductor pattern of a wiring board, or its precursor. Furthermore, the color layer of the color filter can be formed by using the film forming material as a constituent material of the color layer of the color filter or a precursor thereof. Further, as the film forming material, for example, two or more kinds of components selected from the above may be used in combination.

  In the functional ink 26, the film forming material may be dissolved or dispersed in a liquid medium described later, but the film forming material is liquid. In the case of being dispersed in the medium, the average particle diameter of the film forming material is preferably 20 to 100 nm, and more preferably 5 to 50 nm. Thereby, the dispersion stability of the film forming material in the functional ink 26 can be made excellent.

  The content ratio of the film forming material in the functional ink 26 is determined according to the application of the functional ink 26 and is not particularly limited. For example, the content is preferably 0.01 to 10 wt%. It is more preferable that it is 05-5 wt%. When the content of the film forming material is within the above range, the ejection stability from the droplet ejection head (inkjet head) 22 can be made particularly excellent.

(Liquid medium)
The liquid medium contained in the functional ink 26 is one that dissolves or disperses the above-described film forming material, that is, a solvent or a dispersion medium. This liquid medium is used for imparting excellent wettability to the functional ink 26 to the application target in a film forming method to be described later. Part is removed.

  Such a liquid medium is either a high-boiling solvent having a boiling point of 200 ° C. or higher at normal pressure (atmospheric pressure) and a low-boiling solvent having a boiling point at normal pressure lower than that of the high-boiling solvent. Or these can be mixed and used.

  The high boiling point solvent is not particularly limited. For example, A-1) 1,1-bis (3,4-dimethylphenyl) ethane (1,1-Bis (3,4-Dimethylphenyl) ethane, boiling point 333 ° C.) A-2) Benzyl benzoate (Benzyl Benzoate, boiling point 324 ° C.), A-3) 4- (3-phenylpropyl) pyridine (4- (3-phenylpropyl) pyridine, boiling point 322 ° C.), A-4) α , α-dichlorodiphenylmethane (α, α-Dichlorodiphenylmethane, boiling point 305 ° C.), A-5) 4-isopropylbiphenyl (4-Isopropylbiphenyl, boiling point 298 ° C.), A-6) N-methyldiphenylamine (N-Methyldiphenylamine, boiling point 297) ° C), A-7) biphenyl ether (Dibenzyl Ether, boiling point 295 ° C), A-8) 2,3,5-tri-methylbiphenyl ether (2,3,5-tri-methy diphenyl ether, 235TMDPE, boiling point 295) ° C), A-9) 2,2,5-tri-methylbiphenyl ether (2,2,5-tri-methy diphenyl et her, 225TMDPE, boiling point 290 ° C.), A-10) ethyl 2-naphthyl ether (boiling point 282 ° C.), A-11) 1-propyl-4-phenylbenzene (1-propyl-4-phenylbenzene) benzene, NPBP, boiling point 280 ° C.), A-12) 2-phenoxy 1,4-dimethylbenzene (25DMDPE, boiling point 280 ° C.), A-13) tetraethylene glycol dimethyl ether (Tetraethyleneglycol) dimethyl ether, boiling point 275 ° C.), A-14) 2-phenoxytetrahydropuran, boiling point 274.7 ° C., A-15) 2-phenylanisole, boiling point 274 ° C., A-16) 3-phenoxytoluene (3-Phenoxytoluene, boiling point 273 ° C.), A-17) 3-phenylpyridine (3-phenylpyridine, boiling point 272 ° C.), A-18) Dimethyl benzyl ether (boiling point) 270 ° C.), A-19) 2-phenylpyridine (2-Phenylpyridine, boiling point 268 ° C.), A-20) 2-phenoxytoluene (MDPE, boiling point 265 ° C.), A-21) Diphenyl methane , Boiling point 265 ° C.), A-22) 1,2-dimethoxy-4- (1-propenyl) benzene (1,2-Dimethoxy-4- (1-propenyl) benzene, boiling point 264 ° C.), A-23) tri Ethylene glycol butylmethyl ether (boiling point 261 ° C.), A-24) diphenyl ether (boiling point 259 ° C.), A-25) 4,4′-difluorodiphenylmethane (boiling point 258) ° C), A-26) Diethyleneglycol dibutyl ether (boiling point 256 ° C), A-27) 4-Methoxybenzaldehyde D (4-Methoxybenzaldehyde D) i-methyl Acetal (boiling point 253 ° C), A-28) 1,3-dipropoxybenzene (1,3-dipropoxybenzene, boiling point 251 ° C), A-29) cyclohexylbenzene (Cyclohexylbenzene, CHB, boiling point 236 ° C), A-30 ) Diethyleneglycol monobutyl ether (boiling point 230 ° C.), A-31) 1,3-dimethyl-2-imidazolidinone (DMI, boiling point 220 ° C.), A-32 ) P-Tolunitrile (boiling point 218 ° C.), A-33) Triethyleneglycol dimethyl ether (boiling point 216 ° C.), A-34) Tripropyleneglycol dimethyl ether (boiling point 215 ° C.), A-35) Diethyleneglycol butylmethyl ether (boiling point 212 ° C.), A-36) o-tolunitrile (o-Tolunitrile, boiling point 205 ° C.) and the like can be mentioned, and one or more of these can be used in combination.

  On the other hand, the low boiling point solvent is not particularly limited. For example, B-1) 1,2,4-trimethylbenzene (boiling point 169 ° C.), B-2) 1,3,5-trimethylbenzene (boiling point 165 ° C.) B-3) anisole (boiling point 154 ° C.), B-4) 3-fluoro-o-xylene (boiling point 150 ° C.), B-5) 4-heptane (boiling point 150 ° C.), B-6) 3-heptane ( Boiling point 148 ° C), B-7) 2-fluoro-m-xylene (boiling point 147 ° C), B-8) 2-heptane (boiling point 145 ° C), B-9) ethylene glycol monomethyl ether acetate (boiling point 145 ° C), B-10) o-xylene (boiling point 144 ° C), B-11) 2,6-lutidine (boiling point 144 ° C), B-12) 1,2,4-trimethylcyclohexane (boiling point 142 ° C), B-13) m-xylene (boiling point 139 ° C), B-14) p-xylene (boiling point 138 ° C), B- 5) 1-pentanol (boiling point 138 ° C), B-16) 2-hexanol (boiling point 135 ° C), B-17) chlorobenzene (boiling point 131 ° C), B-18) cyclopentanone (boiling point 130 ° C), B -19) Octane (boiling point 126 ° C), B-20) 1,2-dimethylcyclohexanone (boiling point 124 ° C), B-21) 1,3-dimethylcyclohexanone (boiling point 124 ° C), B-22) ethylene glycol monomethyl ether (Boiling point 124 ° C), B-23) 1,4-dimethylcyclohexane (boiling point 120 ° C), B-24) propylene glycol monomethyl ether (boiling point 120 ° C), B-25) 1-butanol (boiling point 118 ° C), B -26) 4-fluorotoluene (boiling point 116 ° C), B-27) 3-pentanol (boiling point 116 ° C), B-28) pyridine (boiling point 115 ° C), B-29 2-fluorotoluene (boiling point 114 ° C.), B-30) 3-fluorotoluene (boiling point 113 ° C.), B-31) toluene (boiling point 111 ° C.), B-32) 3-pentanone (boiling point 102 ° C.), B- 33) dioxane (boiling point 101 ° C.), B-34) methylcyclohexanone (boiling point 101 ° C.), B-35) 1,4-dioxane (boiling point 101 ° C.), B-36) 2-pentanone (boiling point 100 ° C.), B -37) water (boiling point 100 ° C), B-38) 2-butanol (boiling point 98 ° C), B-39) heptane (boiling point 98 ° C), B-40) 1-propanol (boiling point 97 ° C), B-41 ) Propylene glycol dimethyl ether (boiling point 97 ° C.), B-42) acetonitrile (boiling point 88 ° C.), B-43) ethylene glycol dimethyl ether (boiling point 85 ° C.), B-44) 2-propanol (boiling point 82 ° C.) ), B-45) Tert-butanol (boiling point 82 ° C), B-46) cyclohexane (boiling point 81 ° C), B-47) 2-butanone (boiling point 80 ° C), B-48) ethanol (boiling point 78 ° C), B-49) 1,3-dioxolane (boiling point 76 ° C), B-50) hexane (boiling point 69 ° C), B-51) tetrahydrofuran (boiling point 66 ° C), B-52) methanol (boiling point 65 ° C), B- 53) Acetone (boiling point 57 ° C.), B-54) Tert-butyl methyl ether (boiling point 55 ° C.) and the like, and one or two or more of these can be used in combination.

In the present invention, the functional ink 26 has a kinematic viscosity coefficient of 2.5 × 10 ^{−7 to} 235 × 10 ⁻⁷ m ² / s at room temperature, and supply paths 148, 149a to 149c (supply lines) at room temperature. The Reynolds number when passing through the inside is adjusted to be 2,300 or less. The functional ink 26 adjusted to have such characteristics is less likely to be turbulent in each of the supply paths 148, 149a to 149c because the flow becomes a laminar flow, and smoothly and reliably passes from the cartridge C to the intermediate reservoir. It is supplied to the droplet discharge head 22 via 103.

  Further, since the flow of the functional ink 26 hardly occurs in the supply path, it is possible to prevent or suppress the functional ink 26 from entraining (taking in) bubbles. Therefore, the discharge nozzle 24 that cannot discharge the functional ink 26 is not generated, and the discharge nozzle 24 is not closed due to clogging with foreign matter (solid matter of functional ink). As a result, the functional ink 26 can be stably discharged from each discharge nozzle 24 without variation. Therefore, even when a display device 300 to be described later is manufactured using such functional ink 26, light emission unevenness or the like is generated, that is, the probability of production failure is extremely small.

  Such characteristics of the functional ink 26 can be adjusted by appropriately changing the type, molecular weight and content of the film forming material, the type and combination of the liquid medium, and the like.

The kinematic viscosity coefficient of the functional ink 26 at room temperature is preferably about 5 × 10 ^{−7 to} 100 × 10 ⁻⁷ m ² / s, and is preferably about 10 × 10 ⁻⁷ to 75 × 10 ⁻⁷ m ^2. More preferably, it is about / s.

  On the other hand, the Reynolds number of the functional ink 26 when passing through each supply path at room temperature is preferably 2,100 or less, and more preferably 1,800 or less. The lower limit of the Reynolds number is not particularly limited, but is preferably 0.1 or more, and more preferably 0.4 or more. By adjusting the functional ink 26 so that the kinematic viscosity coefficient and the Reynolds coefficient have such values, the speed of the functional ink 26 when passing through each supply path is maintained in an appropriate range, and each supply is performed. It is possible to make the disturbance of the flow of the functional ink 26 in the path more difficult.

  Furthermore, in order to reliably discharge the functional ink 26 as droplets from the droplet discharge head 22 while suitably preventing the flow of the functional ink 26 in each supply path, the functional ink 26 is used. The static viscosity coefficient and density at room temperature are also important.

Specifically, the static viscosity coefficient of the functional ink 26 at room temperature is preferably about 0.3 × 10 ^{−3 to} 20 × 10 ⁻³ Pa · s, and 0.5 × 10 ⁻³ to More preferably, it is about 10 × 10 ⁻³ Pa · s. On the other hand, the density of the functional ink 26 is preferably about 850~1,200kg / ^{m 3,} this is more preferably about 850~1,150kg / ^{m 3.} The functional ink 26 having such a static viscosity coefficient and viscosity is more likely to be a laminar flow in each supply path, and can be more reliably discharged as droplets from the droplet discharge head 22.

  The amount of dissolved gas at room temperature of the functional ink 26 is not particularly limited, but is preferably 50 ppm or less, and more preferably 40 ppm or less. By setting the dissolved gas amount in the functional ink 26 within the above range, when the functional ink 26 is supplied (transferred) from the cartridge C to the droplet discharge head 22, the functional ink 26 may cause bubbles to occur for some reason. Even if it is entrained (taken in), the functional ink 26 can absorb the bubbles (gas). For this reason, it is possible to more reliably reduce the occurrence of the discharge nozzles 24 that cannot discharge the functional ink 26 in the droplet discharge head 22.

  Note that the amount of dissolved gas in the functional ink 26 is preferably as small as possible, and the lower limit is not particularly limited, but is preferably about 5 ppm. To make the amount of dissolved gas in the functional ink 26 less than 5 ppm, an advanced and expensive decompression device is required, but an increase in the effect cannot be expected so much. Further, as the amount of dissolved gas, the amount of nitrogen gas and / or the amount of oxygen gas, particularly the amount of nitrogen gas can be used as an index. In the present specification, “room temperature” means about “23 ° C.”.

  The functional ink 26 as described above is used for film formation by the liquid phase process using the droplet discharge device 6 (film formation method of the present invention).

(Film formation method)
Next, a film forming method using the functional ink 26 described above will be described with reference to FIG. FIG. 5 is a diagram for explaining a film forming method using the droplet discharge device 6 shown in FIG.

  In the film forming method using the functional ink of the present invention, that is, the film forming method of the present invention, [1] the above-described functional ink 26 is supplied to the droplet discharge head 22 via each supply path (supply line). (2) the functional ink 26 is ejected as droplets 29 from the droplet ejection head 22 and adhered onto the base material (recording medium) 20, so that the functional ink 26 A step of forming the liquid coating 29C (ink application step) and [3] a step of drying the liquid coating 29C to form the film 29F (drying step).

  According to such a film forming method, the functional ink 26 is adjusted so as to have the above-described characteristics, so that the functional ink 26 is smoothly transferred without causing turbulent flow in each supply path. Therefore, it is possible to discharge stably from each discharge nozzle 24 of the droplet discharge head 22 without variation. Therefore, the film 29F having a uniform and uniform film thickness can be formed, that is, the film 29F can be formed with high accuracy. As a result, when the display device 300 described later is manufactured, the display device 300 exhibits excellent characteristics with little or no light emission variation. In addition, the number of manufacturing defects of the display device 300 can be reliably reduced.

Hereinafter, each process will be described in detail.
[1] Ink supply process 1-1. First, when the liquid level sensor 108 detects that the liquid level of the functional ink 26 in the intermediate reservoir 103 has fallen below the lower limit value, the open / close valve 147 is closed, and the supply from the ink cartridge C to the intermediate reservoir 103 is performed. Injection of the functional ink 26 via the path 148 is started. Thereafter, when the liquid level sensor 108 detects that the liquid level of the functional ink 26 in the intermediate reservoir 103 has reached the upper limit value, the injection of the functional ink 26 into the intermediate reservoir 103 is stopped.

  1-2. Thereafter, when the opening / closing valve 147 is opened in a state where the liquid level of the functional ink 26 is the upper limit value in the intermediate reservoir 103, the water head pressure in the intermediate reservoir 103 and the flow path in the droplet discharge head 22 are increased. In accordance with the negative pressure state, the functional ink 26 is supplied to the droplet discharge head 22 via the supply path 149a, the opening / closing valve 147, the supply path 149b, the pressure regulating valve 109, and the supply path 149c.

  At this time, since the functional ink 26 is adjusted so as to have the above-described characteristics, it is smoothly transferred through each supply path without causing a disturbance in the flow, and bubbles are prevented from being taken in. .

[2] Ink application process 2-1. First, as shown in FIG. 5A, a base material 20 is prepared. The base material 20 is an object on which a target film is formed. In FIG. 5, for convenience of explanation, the base material 20 is simply illustrated, but as a film 29F, hole injection of an organic electroluminescence element is performed. In the case of forming a layer, an anode is formed on the upper surface (one surface) of the substrate 20.

  2-2. Next, as shown in FIG. 5B, the functional ink 26 described above is ejected and supplied as droplets 29 from the droplet ejection head 22 onto the substrate 20. As a result, a liquid film 29 </ b> C made of the functional ink 26 is formed on the substrate 20. In FIG. 5, for convenience of explanation, the liquid film 29 </ b> C is formed on the anode when an electroluminescent hole injection layer is formed as the film 29 </ b> F. At this time, the functional ink 26 spreads smoothly on the anode.

  The temperature and pressure of the atmosphere in this step [2] are determined according to the composition of the functional ink 26 and the boiling point and melting point of the liquid medium, respectively, and the functional ink 26 is placed on the substrate 20. Although it will not specifically limit if it can provide, It is preferable that it is normal temperature normal pressure. Therefore, it is preferable to use a functional ink that can be applied onto the substrate 20 under normal temperature and normal pressure. Thereby, process [2] can be performed easily.

[3] Drying step Next, the liquid coating 29C (functional ink 26) formed on the substrate 20 is heated. Thus, the liquid medium is removed from the liquid coating 29C, and the liquid coating 29C is dried, thereby forming a film 29F containing the film forming material as a main component, as shown in FIG. 4C.

The temperature and pressure of the atmosphere in the drying step [3] are determined according to the composition of the functional ink 26 and the boiling point and melting point of the liquid medium, respectively, and from the liquid film 29C on the substrate 20 to the liquid medium. Although it will not be specifically limited if it can be removed, It is more preferable that the heating temperature is about 5-30 degreeC higher than the boiling point of a liquid medium. The pressure is preferably from reduced pressure, and more preferably to or higher than ¹⁰ -7 Pa or less ¹⁰ 0 Pa.

  The time for heating / depressurizing is not particularly limited, but is set to about 1 minute to 30 minutes. Furthermore, the method for heating the liquid coating 29C is not particularly limited, but can be performed by a hot plate, infrared rays, or the like, and may be performed by a rubber heater provided in the stage 9 of the droplet discharge device 6 described above. The drying of the liquid coating 29C is not limited to drying by heating, and may be natural drying, reduced pressure drying, gas flow drying, or the like.

  Note that the film 29F obtained as described above is a film composed mainly of a film forming material or a precursor thereof.

  When a precursor is used as the film forming material, the film 29F is subjected to a predetermined process as necessary. For example, when the film forming material is a low molecular weight compound, a film 29F including a high molecular weight compound can be obtained by performing a treatment that causes a polymerization reaction of the low molecular weight compound. Further, when the film forming material is a resin material, a film 29F including a high molecular weight compound can be obtained by performing a treatment that causes a crosslinking reaction of the resin material. When the film forming material includes metal particles and a binder (resin material), the film 29F can be obtained by baking the film 29F.

  By passing through the above processes, the film | membrane 29F which has a uniform and uniform film thickness is formed in the base material 20 with the outstanding film-forming precision.

(Display device)
Next, a display device which is an example of a film-coated device including a film formed by the film forming method using the droplet discharge device 6 described above or a film obtained by processing the film will be described. FIG. 6 is a cross-sectional view showing a display device which is an example of a film-coated device. In the following description, for convenience of explanation, the upper side in FIG. 6 will be described as “upper” and the lower side as “lower”.

  A display device 300 illustrated in FIG. 6 includes a plurality of light emitting elements 200R, 200G, and 200B corresponding to the sub-pixels 300R, 300G, and 300B, and forms a top emission display panel.

  In the present embodiment, an example in which an active matrix method is employed as a display device driving method will be described. However, a passive matrix method may be employed.

  The display device 300 includes a substrate 301, a plurality of light emitting elements 200R, 200G, and 200B, and a plurality of switching elements 302.

  The substrate 301 supports the plurality of light emitting elements 200R, 200G, and 200B and the plurality of switching elements 302. Each of the light emitting elements 200R, 200G, and 200B of the present embodiment has a configuration (top emission type) that extracts light from the side opposite to the substrate 301. Accordingly, the substrate 301 can be either a transparent substrate or an opaque substrate. When each light emitting element 200R, 200G, and 200B is configured to extract light from the substrate 301 side (bottom emission type), the substrate 301 is substantially transparent (colorless transparent, colored transparent, or translucent). The

  Examples of the constituent material of the substrate 301 include resin materials such as polyethylene terephthalate, polyethylene naphthalate, polypropylene, cycloolefin polymer, polyamide, polyethersulfone, polymethyl methacrylate, polycarbonate, and polyarylate, quartz glass, and soda glass. Such glass materials can be used, and one or more of these can be used in combination.

  Examples of the opaque substrate include a substrate made of a ceramic material such as alumina, an oxide film (insulating film) formed on the surface of a metal substrate such as stainless steel, and a substrate made of a resin material. It is done.

  A plurality of switching elements 302 are arranged in a matrix on such a substrate 301.

  Each switching element 302 is provided corresponding to each light emitting element 200R, 200G, 200B, and is a driving transistor for driving each light emitting element 200R, 200G, 200B.

  Each switching element 302 includes a semiconductor layer 302a made of silicon, a gate insulating layer 302b formed on the semiconductor layer 302a, a gate electrode 302c formed on the gate insulating layer 302b, a source electrode 302d, And a drain electrode 302e.

  A planarizing layer 303 made of an insulating material is formed so as to cover the plurality of switching elements 302.

  On the planarization layer 303, light emitting elements 200R, 200G, and 200B are provided corresponding to the switching elements 302, respectively.

  In the light emitting element 200R, a reflective film 304, a corrosion prevention film 305, an anode 201, a laminate (organic EL light emitting unit) 208 (208R), a cathode 207, and a cathode cover 306 are laminated in this order on a planarization layer 303. . In the present embodiment, the anode 201 of each light emitting element 200R, 200G, 200B constitutes a pixel electrode, and is electrically connected to the drain electrode 302e of each switching element 302 by a conductive portion (wiring) 307. The cathodes 207 of the light emitting elements 200R, 200G, and 200B are common electrodes.

  The light emitting elements 200G and 200B can be configured in the same manner as the light emitting element 200R. Here, different colors can be emitted by making the stacked bodies 208R, 208G, and 208B (particularly, the light emitting layer) of the light emitting elements 200R, 200G, and 200B different from each other. For example, the light emitting element 200R emits red light, the light emitting element 200G emits green light, and the light emitting element 200B emits blue light.

  A partition wall 308 is provided between the adjacent light emitting elements 200R, 200G, and 200B. Further, the substrate 310 is bonded to the cathode cover 306 via a resin layer 309 made of a thermosetting resin such as an epoxy resin.

  As described above, since each of the light emitting elements 200R, 200G, and 200B of this embodiment is a top emission type, a transparent substrate is used as the substrate 310.

  The constituent material of the substrate 310 is not particularly limited as long as the substrate 310 has light transmittance, and the same constituent material as that of the substrate 301 described above can be used.

(Light emitting element)
Here, based on FIG. 7, the light emitting elements 200R, 200G, and 200B will be described in detail. FIG. 7 is a cross-sectional view of a light-emitting element included in the display device shown in FIG.

  A light-emitting element (electroluminescence element) 200 shown in FIG. 7 constitutes the light-emitting elements 200R, 200G, and 200B described above, and is laminated between two electrodes (between the anode 201 and the cathode 207) as described above. A body 208 is inserted. As shown in FIG. 7, the stacked body 208 includes a hole injection layer 202, a hole transport layer 203, a light emitting layer 204, an electron transport layer 205, and an electron injection layer 206 from the anode 201 side to the cathode 207 side. They are stacked in order.

  In such a light emitting element 200, electrons are supplied (injected) from the cathode 207 side to the light emitting layer 204, and holes are supplied (injected) from the anode 201 side. In each light-emitting layer 204, holes and electrons recombine, and excitons (excitons) are generated by the energy released during the recombination. When excitons return to the ground state, energy (fluorescence or phosphorescence) is generated. ) Is emitted (emitted).

  In the light emitting element 200, the hole transport layer 203 or the hole injection layer 202 is formed by using the above-described film formation method (the film formation method of the present invention). Thereby, the light emitting element 200 and the display apparatus 300 which have the outstanding characteristic can be provided. Note that in the light-emitting element 200, one of the hole injection layer 202 and the hole transport layer 203 may be omitted.

Hereinafter, each part which comprises the light emitting element 200 is demonstrated sequentially.
(anode)
The anode 201 is an electrode that injects holes into the hole transport layer 203 via a hole injection layer 202 described later. As a constituent material of the anode 201, it is preferable to use a material having a large work function and excellent conductivity.

Examples of the constituent material of the anode 201 include oxides such as ITO (Indium Tin Oxide), IZO (Indium Zinc Oxide), In ₃ O ₃ , SnO ₂ , Sb-containing SnO ₂ , and Al-containing ZnO, Au, Pt, and Ag. Cu, alloys containing these, and the like can be used, and one or more of these can be used in combination.

(cathode)
On the other hand, the cathode 207 is an electrode that injects electrons into the electron transport layer 205 via an electron injection layer 206 described later. As a constituent material of the cathode 207, a material having a small work function is preferably used.

  Examples of the constituent material of the cathode 207 include Li, Mg, Ca, Sr, La, Ce, Er, Eu, Sc, Y, Yb, Ag, Cu, Al, Cs, Rb, and alloys containing these. These can be used alone or in combination of two or more thereof (for example, a multi-layer laminate).

  In particular, when an alloy is used as a constituent material of the cathode 207, an alloy containing a stable metal element such as Ag, Al, or Cu, specifically, an alloy such as MgAg, AlLi, or CuLi is preferably used. By using such an alloy as the constituent material of the cathode 207, the electron injection efficiency and stability of the cathode 207 can be improved.

  In addition, since the light emitting element 200 of the present embodiment is a top emission type, the cathode 207 has light transmittance.

(Hole injection layer)
The hole injection layer 202 has a function of improving hole injection efficiency from the anode 201.

  The hole injection layer 202 is formed by using the above-described film forming method using the functional ink 26, and the constituent material (hole injection material) is the above-described hole injection property. Examples thereof include a film forming material containing a polymer material.

  The average thickness of the hole injection layer 202 is not particularly limited, but is preferably about 5 nm or more and 150 nm or less, and more preferably about 10 nm or more and 100 nm or less.

(Hole transport layer)
The hole transport layer 203 has a function of transporting holes injected from the anode 201 through the hole injection layer 202 to the light emitting layer 204.

  The constituent material of the hole transport layer 203 is not particularly limited, but is, for example, a triphenylamine system such as TFB (poly (9,9-dioctyl-fluorene-co-N- (4-butylphenyl) -diphenylamine)). Includes amine compounds such as polymers, polyfluorene derivatives (PF), polyparaphenylene vinylene derivatives (PPV), polyparaphenylene derivatives (PPP), polyvinylcarbazole (PVK), polythiophene derivatives, polymethylphenylsilane (PMPS) Examples include polysilane-based polymer organic materials (polymer materials), and one or more of these can be used in combination. The constituent material of the hole injection layer 202 described above can also be used as the constituent material of the hole transport layer 203.

  The average thickness of the hole transport layer 203 is not particularly limited, but is preferably about 10 to 150 nm, more preferably about 10 to 100 nm.

(Light emitting layer)
The light emitting layer 204 includes a light emitting material.

  The light emitting material is not particularly limited, and various fluorescent materials and phosphorescent materials can be used alone or in combination. When the light emitting element 200 is used for the light emitting element 200R described above, a red fluorescent material or a red phosphorescent material is used as the light emitting material, and when the light emitting element 200 is used for the light emitting element 200G described above, a green fluorescent material is used as the light emitting material. Alternatively, when a green phosphorescent material is used and the light emitting element 200 is used as the light emitting element 200B, a blue fluorescent material or a blue phosphorescent material is used as the light emitting material.

  The red fluorescent material is not particularly limited as long as it emits red fluorescence. For example, perylene derivatives such as diindenoperylene derivatives, europium complexes, benzopyran derivatives, rhodamine derivatives, benzothioxanthene derivatives, porphyrin derivatives, Nile Red, 2- (1,1-dimethylethyl) -6- (2- (2,3,6,7-tetrahydro-1,1,7,7-tetramethyl-1H, 5H-benzo (ij) quinolidine- 9-yl) ethenyl) -4H-pyran-4H-ylidene) propanedinitrile (DCJTB), 4- (dicyanomethylene) -2-methyl-6- (p-dimethylaminostyryl) -4H-pyran (DCM), etc. Can be mentioned.

The red phosphorescent material is not particularly limited as long as it emits red phosphorescence, and examples thereof include metal complexes such as iridium, ruthenium, platinum, osmium, rhenium, and palladium. Among the ligands of these metal complexes, And those having at least one of phenylpyridine skeleton, bipyridyl skeleton, porphyrin skeleton and the like. More specifically, tris (1-phenylisoquinoline) iridium, bis [2- (2′-benzo [4,5-α] thienyl) pyridinate-N, C ³ ′] iridium (acetylacetonate) (btp2Ir ( acac)), 2,3,7,8,12,13,17,18-octaethyl-12H, 23H-porphyrin-platinum (II), bis [2- (2′-benzo [4,5-α] thienyl ) Pyridinate-N, C ³ '] iridium, bis (2-phenylpyridine) iridium (acetylacetonate).

  The green fluorescent material is not particularly limited as long as it emits green fluorescence. For example, quinacridone such as coumarin derivatives and quinacridone derivatives and derivatives thereof, 9,10-bis [(9-ethyl-3-carbazole)- Vinylenyl] -anthracene, poly (9,9-dihexyl-2,7-vinylenefluorenylene), poly [(9,9-dioctylfluorene-2,7-diyl) -co- (1,4-diphenylene-vinylene) -2-methoxy-5- {2-ethylhexyloxy} benzene)], poly [(9,9-dioctyl-2,7-divinylenefluorenylene) -ortho-co- (2-methoxy-5- (2 -Ethoxylhexyloxy) -1,4-phenylene)] and the like.

The green phosphorescent material is not particularly limited as long as it emits green phosphorescence, and examples thereof include metal complexes such as iridium, ruthenium, platinum, osmium, rhenium, and palladium. 2-phenylpyridine) iridium (Ir (ppy) 3), bis (2-phenyl-pyridinium sulfonate -N, ^{C 2} ') iridium (acetylacetonate), fac - tris [5-fluoro-2- (5-tri Fluoromethyl-2-pyridine) phenyl-C, N] iridium and the like.

  The blue fluorescent material is not particularly limited as long as it emits blue fluorescence. For example, distyrylamine derivatives such as distyryldiamine compounds, fluoranthene derivatives, pyrene derivatives, perylene and perylene derivatives, anthracene derivatives, benzo Oxazole derivatives, benzothiazole derivatives, benzimidazole derivatives, chrysene derivatives, phenanthrene derivatives, distyrylbenzene derivatives, tetraphenylbutadiene, 4,4′-bis (9-ethyl-3-carbazovinylene) -1,1′-biphenyl (BCzVBi) ), Poly [(9.9-dioctylfluorene-2,7-diyl) -co- (2,5-dimethoxybenzene-1,4-diyl)], poly [(9,9-dihexyloxyfluorene-2, 7-diyl) -ortho-co- (2-me Xyl-5- {2-ethoxyhexyloxy} phenylene-1,4-diyl)], poly [(9,9-dioctylfluorene-2,7-diyl) -co- (ethylnylbenzene)] and the like. .

The blue phosphorescent material is not particularly limited as long as it emits blue phosphorescence. Examples thereof include metal complexes such as iridium, ruthenium, platinum, osmium, rhenium, and palladium. Specifically, bis [4 , 6-difluorophenyl pyridinium sulfonate -N, ^{C 2} '] - picolinate - iridium, tris [2- (2,4-difluorophenyl) pyridinate -N, ^{C 2']} iridium, bis [2- (3,5 - trifluoromethyl) pyridinate -N, ^{C 2} '] - picolinate - iridium, bis (4,6-difluorophenyl pyridinium sulfonate -N, ^{C 2')} iridium (acetylacetonate) and the like.

  The above light emitting materials can be used individually by 1 type or in combination of 2 or more types.

  In addition to the light emitting material described above, the light emitting layer 204 may include a host material to which the light emitting material is added as a guest material.

  The host material has a function of recombining holes and electrons to generate excitons and excitating the luminescent material by transferring the exciton energy to the luminescent material (Felster transfer or Dexter transfer). . In the case of using such a host material, for example, the host material can be used by doping a light emitting material that is a guest material as a dopant.

Such a host material is not particularly limited as long as it exhibits a function as described above with respect to a light emitting material to be used. For example, an acene derivative such as a naphthacene derivative, a naphthalene derivative, or an anthracene derivative (acene type) Materials), distyrylarylene derivatives, perylene derivatives, distyrylbenzene derivatives, distyrylamine derivatives, quinolinolato metal complexes such as tris (8-quinolinolato) aluminum complex (Alq ₃ ), and triphenylamine tetramers Reelamine derivatives, oxadiazole derivatives, silole derivatives, dicarbazole derivatives, oligothiophene derivatives, benzopyran derivatives, triazole derivatives, benzoxazole derivatives, benzothiazole derivatives, quinoline derivatives, 4,4'-bis (2,2'-diph Enylvinyl) biphenyl (DPVBi) and the like, and one or more of them can be used in combination.

  When the red light emitting material (guest material) and the host material as described above are used, the content (doping amount) of the light emitting material in the light emitting layer 204 is preferably 0.01 to 10 wt%, More preferably, it is 5 wt%. Luminous efficiency can be optimized by setting the content of the red light emitting material within such a range.

  The average thickness of the light emitting layer 204 is not particularly limited, but is preferably about 10 to 150 nm, and more preferably about 10 to 100 nm. The light emitting layer 204 may be composed of a plurality of stacked light emitting layers. In that case, an intermediate layer that does not emit light may be interposed between any light emitting layers.

(Electron transport layer)
The electron transport layer 205 has a function of transporting electrons injected from the cathode 207 through the electron injection layer 206 to the light emitting layer 204.

As a constituent material (electron transport material) of the electron transport layer 205, for example, a quinoline derivative such as an organometallic complex having an 8-quinolinol or its derivative such as tris (8-quinolinolato) aluminum (Alq ₃ ) as a ligand. Oxadiazole derivatives, perylene derivatives, pyridine derivatives, pyrimidine derivatives, quinoxaline derivatives, diphenylquinone derivatives, nitro-substituted fluorene derivatives, and the like, and one or more of these can be used in combination.

The average thickness of the electron transport layer 205 is not particularly limited, but is preferably about 0.5 to 100 nm, and more preferably about 1 to 50 nm.
The electron transport layer 205 can be omitted.

(Electron injection layer)
The electron injection layer 206 has a function of improving the efficiency of electron injection from the cathode 207.

  Examples of the constituent material (electron injection material) of the electron injection layer 206 include various inorganic insulating materials and various inorganic semiconductor materials.

  Examples of such inorganic insulating materials include alkali metal chalcogenides (oxides, sulfides, selenides, tellurides), alkaline earth metal chalcogenides, alkali metal halides, and alkaline earth metal halides. Of these, one or two or more of these can be used in combination. The electron injection property can be further improved by forming the electron injection layer using these as main materials. In particular, an alkali metal compound (alkali metal chalcogenide, alkali metal halide, or the like) has a very small work function. By using this to form the electron injection layer 206, the light-emitting element 200 can obtain high luminance. Become.

Examples of the alkali metal chalcogenide include Li ₂ O, LiO, Na ₂ S, Na ₂ Se, and NaO.

  Examples of the alkaline earth metal chalcogenide include CaO, BaO, SrO, BeO, BaS, MgO, and CaSe.

  Examples of the alkali metal halide include CsF, LiF, NaF, KF, LiCl, KCl, and NaCl.

Examples of the alkaline earth metal halide include CaF ₂ , BaF ₂ , SrF ₂ , MgF ₂ , and BeF ₂ .

  In addition, as the inorganic semiconductor material, for example, an oxide including at least one element of Li, Na, Ba, Ca, Sr, Yb, Al, Ga, In, Cd, Mg, Si, Ta, Sb, and Zn , Nitrides, oxynitrides, and the like, and one or more of these can be used in combination.

The average thickness of the electron injection layer 206 is not particularly limited, but is preferably about 0.1 to 1000 nm, more preferably about 0.2 to 100 nm, and about 0.2 to 50 nm. Further preferred.
The electron injection layer 206 can be omitted.

(Electronics)
FIG. 8 is a perspective view illustrating a configuration of a mobile (or notebook) personal computer that is an example of an electronic apparatus.

  In this figure, a personal computer 1100 includes a main body 1104 provided with a keyboard 1102 and a display unit 1106 provided with a display. The display unit 1106 is rotatable with respect to the main body 1104 via a hinge structure. It is supported by.

  In the personal computer 1100, the display unit included in the display unit 1106 is configured by the display device 300 described above.

  FIG. 9 is a perspective view illustrating a configuration of a mobile phone (including PHS) which is an example of an electronic device.

In this figure, a cellular phone 1200 includes a plurality of operation buttons 1202, an earpiece 1204 and a mouthpiece 1206, and a display unit.
In the mobile phone 1200, the display unit is configured by the display device 300 described above.

  FIG. 10 is a perspective view illustrating a configuration of a digital still camera which is an example of an electronic apparatus. In this figure, connection with an external device is also simply shown.

  Here, an ordinary camera sensitizes a silver halide photographic film with a light image of a subject, whereas a digital still camera 1300 photoelectrically converts a light image of a subject with an imaging device such as a CCD (Charge Coupled Device). An imaging signal (image signal) is generated.

  A display unit is provided on the back of a case (body) 1302 in the digital still camera 1300, and is configured to display based on an imaging signal from the CCD, and functions as a finder that displays an object as an electronic image.

  In the digital still camera 1300, the display unit is configured by the display device 300 described above.

  A circuit board 1308 is installed inside the case. The circuit board 1308 is provided with a memory that can store (store) an imaging signal.

  A light receiving unit 1304 including an optical lens (imaging optical system), a CCD, and the like is provided on the front side of the case 1302 (on the back side in the illustrated configuration).

  When the photographer confirms the subject image displayed on the display unit and presses the shutter button 1306, the CCD image pickup signal at that time is transferred and stored in the memory of the circuit board 1308.

  In the digital still camera 1300, a video signal output terminal 1312 and an input / output terminal 1314 for data communication are provided on the side surface of the case 1302. As shown in the figure, a television monitor 1430 is connected to the video signal output terminal 1312 and a personal computer 1440 is connected to the input / output terminal 1314 for data communication as necessary. Further, the imaging signal stored in the memory of the circuit board 1308 is output to the television monitor 1430 or the personal computer 1440 by a predetermined operation.

  In addition to the personal computer (mobile personal computer) shown in FIG. 8, the mobile phone shown in FIG. 9, and the digital still camera shown in FIG. 10, the electronic apparatus may be, for example, a television, a video camera, a viewfinder type, or a monitor direct view type. Video tape recorders, laptop personal computers, car navigation devices, pagers, electronic notebooks (including those with communication functions), electronic dictionaries, calculators, electronic game machines, word processors, workstations, videophones, security TV monitors, electronic Devices equipped with binoculars, POS terminals, touch panels (for example, cash dispensers of financial institutions, automatic ticket vending machines), medical devices (for example, electronic thermometers, blood pressure monitors, blood glucose meters, electrocardiographs, ultrasonic diagnostic devices, endoscopes) Display device), fish finder, various measuring instruments, instruments For example, gages for vehicles, aircraft, and ships), a flight simulator, various monitors, and a projection display such as a projector.

  As described above, the functional ink, the film forming method, the droplet discharge device, the film-coated device, and the electronic apparatus according to the present invention have been described based on the illustrated embodiments, but the present invention is not limited thereto.

  For example, the functional ink of the present invention can be used to form a layer (film) other than the hole injection layer. Specifically, it can be used for film formation of wiring provided in a circuit board. In this case, a conductive polymer material such as polyacetylene, poly (p-phenylene vinylene), polypyrrole, polythiophene, polyaniline, poly (p-phenylene sulfide) is used as a film forming material for forming the wiring. What contains as a molecular material is mentioned.

  Next, specific examples of the present invention will be described. Note that the characteristics described below are all at room temperature.

(Example A)
1. Production of functional ink Using the film forming material and the liquid medium as described above, the kinematic viscosity coefficient is in the range of 2.5 × 10 ^{−7 to} 235 × 10 ⁻⁷ m ² / s, and the static viscosity coefficient is 0. In the range of 3 × 10 ^{−3 to} 20 × 10 ⁻³ Pa · s, different sample Nos. Satisfying a density of 1,200 kg / m ³ and a dissolved nitrogen gas amount of 50 ppm or less. Functional inks 1A to 12A were prepared.

2. 72-hour continuous discharge inspection Sample No. was detected using a droplet discharge apparatus shown in FIG. The functional inks 1A to 12A were ejected continuously for 72 hours, and the ejection stability was examined. In addition, the internal diameter of the tube which comprises each supply path | route was 10 * 10 < ^-3 > m, and the speed of the functional ink at the time of passing a tube was 2 m / s.

  “OK” when the functional ink can be stably ejected after 72 hours, and when it becomes impossible to stably eject the functional ink before the passage of 72 hours (occurrence of nozzle omission) Etc.) was defined as “NG”.

3. Calculation of Reynolds number Reynolds number Re was calculated according to the following equation.

Note that ρ is the density (kg / m ³ ) of the functional ink, v is the speed (m / s) of the functional ink when passing through the supply paths 148 and 149b, and μ is the static of the functional ink. The viscosity coefficient (Pa · s) and _DH indicate the inner diameters (m) of the tubes constituting the supply paths 148 and 149b.
The results are shown in Table 1 below.

(Example B)
1. Preparation of functional ink Sample No. 1 was prepared in the same manner as in Example A except that the density was 850 kg / m ³ . Functional inks 1B-12B were prepared.

2. 72-hour continuous discharge inspection In the same manner as in Example A, a 72-hour continuous discharge inspection was performed.

3. Calculation of Reynolds number The Reynolds number was calculated in the same manner as in Example A.

(Example C)
1. Preparation of functional ink Sample No. 1 was prepared in the same manner as in Example A. Functional inks of 1C to 12C were prepared.

2. 72-hour continuous discharge inspection A 72-hour continuous discharge inspection was performed in the same manner as in Example A, except that the speed of the functional ink when passing through the tube was set to 0.1 m / s.

3. Calculation of Reynolds number The Reynolds number was calculated in the same manner as in Example A.

(Example D)
1. Preparation of functional ink Sample No. 1 was prepared in the same manner as in Example B. Functional inks of 1D to 12D were prepared.

2. 72-hour continuous discharge inspection In the same manner as in Example C, a 72-hour continuous discharge inspection was performed.

3. Calculation of Reynolds number The Reynolds number was calculated in the same manner as in Example A.

(Example E)
1. Preparation of functional ink Sample No. 1 was prepared in the same manner as in Example A. Functional inks 1E-12E were prepared.

2. 72-hour continuous discharge inspection A 72-hour continuous discharge inspection was performed in the same manner as in Example A, except that the inner diameter of the tube constituting the supply path was set to 0.1 × 10 ⁻³ m.

3. Calculation of Reynolds number The Reynolds number was calculated in the same manner as in Example A.

(Example F)
1. Preparation of functional ink Sample No. 1 was prepared in the same manner as in Example B. Functional inks of 1F to 12F were prepared.

2. 72-hour continuous discharge inspection In the same manner as in Example E, a 72-hour continuous discharge inspection was performed.

3. Calculation of Reynolds number The Reynolds number was calculated in the same manner as in Example A.

(Example G)
1. Preparation of functional ink Sample No. 1 was prepared in the same manner as in Example A. Functional inks of 1G to 12G were prepared.

2.72-hour continuous discharge inspection Implemented except that the speed of the functional ink when passing through the tube is 0.1 m / s and the inner diameter of the tube constituting the supply path is 0.1 × 10 ⁻³ m. In the same manner as in Example A, a continuous discharge inspection was performed for 72 hours.

3. Calculation of Reynolds number The Reynolds number was calculated in the same manner as in Example A.

(Example H)
1. Preparation of functional ink Sample No. 1 was prepared in the same manner as Example B. Functional inks of 1H to 12H were prepared.

2. 72-hour continuous discharge inspection In the same manner as in Example G, a 72-hour continuous discharge inspection was performed.

3. Calculation of Reynolds number The Reynolds number was calculated in the same manner as in Example A.

As shown in Tables 1 to 8, the kinematic viscosity coefficient at room temperature is 2.5 × 10 ^{−7 to} 235 × 10 ⁻⁷ m ² / s, and the Reynolds number when passing through each supply path at room temperature. Any of the functional inks adjusted to be 2300 or less could be ejected without problems even after 72 hours. On the other hand, any functional ink that has not been adjusted to have the above characteristics cannot be stably ejected before 72 hours.

2 ... Recording medium 6 ... Droplet discharge device 7 ... Base 7a ... Upper surface 8 ... Guide rail 9 ... Stage 10 ... Main scanning position detector 11 ... Placement surface 12 ... Support table 13 Guide member 14 Cartridge installation section 15 Guide rail 16 Carriage 17 Sub-scanning position detection device 18 Head unit 19 Discharge inspection device 20 Substrate 22 Droplet discharge head 23 ... Nozzle plate 24 ... Discharge nozzle 25 ... Cavity 26 ... Functional ink 27 ... Vibration plate 28 ... Piezoelectric element 29 ... Droplet 29C ... Liquid coating 29F ... Film 41 ... Control device 42 CPU
43 Memory 44 Main scanning drive 45 Sub-scanning drive 46 Input / output interface 47 Data bus 48 Head drive circuit 49 Input device 50 Display device 51 Program software 52 ... Discharge position data 53 ... Drive voltage data 54 ... Drive waveform data 55 ... Discharge plan data 56 ... Drawing controller 57 ... Main scan controller 58 ... Sub-scan controller 59 ... Discharge controller 60 ... Landing characteristic correction control unit 61 ... Discharge condition setting unit 62 ... Discharge plan setting unit 110 ... Ink supply mechanism drive circuit 101 ... Ink supply mechanism Pa ... Intake port C (102a, 102b) ... Cartridge 103 (103a to 103c) ... Intermediate reservoir 104 (104a to 104e) ... Liquid level detection sensor 105 ... Regulators 106 and 107 ... Filter 108 Liquid level sensor 109 Pressure regulating valve 140 Open path 141 to 147 Open / close valves 148 and 149 (149a to 149c) Supply path 200 Light emitting element 200B Light emitting element 200G Light-emitting element 200R ... Light-emitting element 201 ... Anode 202 ... Hole injection layer 203 ... Hole transport layer 204 ... Light-emitting layer 205 ... Electron transport layer 206 ... Electron injection layer 207 ... Cathode 208 ... Lamination Body 208B ... Stacked body 208G ... Stacked body 208R ... Stacked body 300 ... Display device 300B ... Subpixel 300G ... Subpixel 300R ... Subpixel 301 ... Substrate 302 ... Switching element 302a ... Semiconductor layer 302b ... gate insulating layer 302c ... gate electrode 302d ... source electrode 302e ... drain electrode 303 ... planarization layer 04 ... Reflection film 305 ... Corrosion prevention film 306 ... Cathode cover 307 ... Conductive part 308 ... Partition 309 ... Resin layer 310 ... Substrate 1100 ... Personal computer 1102 ... Keyboard 1104 ... Body part 1106 ... Display unit 1200 Mobile phone 1202 Operation button 1204 Earpiece 1206 Transmission mouth 1300 Digital still camera 1302 Case 1304 Light receiving unit 1306 Shutter button 1308 Circuit board 1312 Video signal output terminal 1314 Input / output terminal 1430 Television monitor 1440 Personal computer

Claims (10)

A film forming material, and a liquid medium in which the film forming material is dissolved or dispersed,
The kinematic viscosity coefficient at room temperature is 2.5 × 10 ^{−7 to} 235 × 10 ⁻⁷ m ² / s, and the Reynolds number when passing through the supply line at room temperature is adjusted to 2300 or less. A functional ink characterized by The functional ink according to claim 1, wherein the static viscosity coefficient at room temperature is 0.3 × 10 ^{−3 to} 20 × 10 ⁻³ Pa · s. The functional ink according to claim 1, wherein the density is 850 to 1,200 kg / m ³ .   The functional ink according to any one of claims 1 to 3, wherein the dissolved gas amount at room temperature is 50 ppm or less. 5. The functional ink according to claim 1, wherein an inner diameter of a tubular body constituting the supply line is 0.1 × 10 ⁻³ to 10 × 10 ⁻³ m.   The functional ink according to any one of claims 1 to 5, wherein the speed of the functional ink when passing through the supply line is 0.1 to 2 m / s. Supplying the functional ink according to any one of claims 1 to 6 to a droplet discharge head via a supply line;
Forming the liquid film of the functional ink by ejecting the functional ink as droplets from the droplet ejection head and attaching the functional ink onto a recording medium;
Forming a film by drying the liquid film, and forming a film. A storage section for storing the functional ink according to any one of claims 1 to 6,
A droplet discharge head for discharging the functional ink as droplets;
A droplet discharge apparatus comprising: a supply line that connects the storage unit and the droplet discharge head and transfers the functional ink from the storage unit to the droplet discharge head.   A device with a film comprising the film formed by the film forming method according to claim 7 or the liquid droplet ejection apparatus according to claim 8, or a film obtained by processing the film.   An electronic apparatus comprising the film-coated device according to claim 9.

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