JP2016168516A - Droplet discharge device, droplet discharge method, and manufacturing method of device with film - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a droplet discharge device which can supply a droplet to a different-sized opening part of a barrier wall included in a substrate with excellent accuracy, and provide a droplet discharge method using the droplet discharge device, and a manufacturing method of a device with a film.SOLUTION: A droplet discharge device includes a head unit 18 having a first droplet discharge head 512 and a second droplet discharge head 522. The first droplet discharge head 512 and the second droplet discharge head 522 are arranged along a main scanning direction of scanning the head unit 18 with respect to a substrate in discharging droplets, and each of them has a plurality of first discharge nozzles 511 and second discharge nozzles 521. The plurality of first discharge nozzles 511 and second discharge nozzles 521 are respectively arranged side by side in a sub-scanning direction orthogonal to the main scanning direction, and a nozzle pitch of the second discharge nozzles 521 is smaller than a nozzle pitch of the first discharge nozzles 511.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a droplet discharge apparatus, a droplet discharge method, and a method for manufacturing a device with a film.

  A film forming ink obtained by dissolving a film forming material in a solvent is supplied (applied) onto a substrate using a droplet discharge device, and the solvent is removed (dried) from the film forming ink on the substrate. A film forming method for forming a film has been put to practical use (for example, see Patent Document 1).

  Using this film formation method, for example, organic layers of organic electroluminescence (organic EL) elements (for example, light-emitting layers and hole transport layers), colored layers of color filters, and conductor patterns of wiring boards, etc. It has been proposed to form various films included in.

  Patterning (film formation method) of such an organic layer or a film such as a conductor pattern is performed by forming a partition (bank) having an opening corresponding to the shape of the film to be formed on the substrate (film formation substrate). After securing the film formation region, the film formation ink is supplied as droplets into the opening, and then heated to remove the solvent.

  Furthermore, from the viewpoint of improving the productivity of a film-equipped device such as an organic EL element, a plurality of film-equipped devices having different sizes may be taken (co-removed) from one substrate. Therefore, the partition formed on the substrate for manufacturing the device with a film has a different size, orientation, and the like of the opening for each size of the device with a film.

  Here, the head unit included in the droplet discharge device used in such a film forming method includes a plurality of droplet discharge heads. In general, these droplet discharge heads are provided with a plurality of discharge nozzles. Each of the discharge nozzles discharges a film-forming ink as droplets, and the discharged droplets are supplied to openings provided in the partition walls. Is done. Moreover, in these several droplet discharge heads, the nozzle pitch of the discharge nozzles is usually the same.

  Therefore, it is possible to supply droplets discharged from each discharge nozzle with excellent accuracy to the openings of partition walls with different sizes and orientations, which are provided in the formation of devices with films of different sizes. It was difficult.

  Patent Document 2 proposes a droplet discharge device having a plurality of droplet discharge heads each having a discharge nozzle formed at a different nozzle pitch. However, in this droplet discharge device, when supplying droplets, the main scanning direction in which the substrate is moved and the sub-scanning direction in which the droplet discharge head is moved are orthogonal to each other. Droplet discharge heads are arranged side by side in the sub-scanning direction. Therefore, it is difficult to supply droplets from a plurality of droplet discharge heads simultaneously to the openings provided in the partition wall by scanning the substrate once in the main scanning direction. Further, even if possible, it was extremely difficult to control droplet ejection from a plurality of droplet ejection heads, and it was not possible to supply droplets to the openings with excellent accuracy.

Japanese Patent Laid-Open No. 11-54270 JP 2001-315317 A

  An object of the present invention is to provide a droplet discharge device capable of supplying droplets with excellent accuracy to openings having different partition wall sizes, a droplet discharge method using such a droplet discharge device, and a film-coated device. It is in providing the manufacturing method of.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

[Application Example 1]
A droplet discharge device of the present invention is a droplet discharge device that supplies droplets from a head unit to a substrate while performing main scanning that relatively moves the substrate and the head unit in a first direction.
The head unit includes a first droplet discharge head and a second droplet discharge head that discharge the droplets,
The first liquid droplet ejection head has a first nozzle row in which a plurality of first ejection nozzles are arranged side by side in a direction intersecting the first direction at a first nozzle pitch.
The second droplet discharge head includes a second droplet discharge nozzle arranged side by side in a direction intersecting the first direction at a second nozzle pitch smaller than the first nozzle pitch. Nozzle row,
The first droplet ejection head and the second droplet ejection head are arranged at different positions in the first direction.

  By using the droplet discharge device having such a configuration, droplets can be supplied to the first region and the second region having different sizes with excellent accuracy.

[Application Example 2]
In the droplet discharge device of the present invention, the second droplet discharge head can discharge a smaller amount of droplets from the second discharge nozzle than the droplets discharged from the first discharge nozzle. Is preferred.
Thereby, a droplet can be supplied to the first and second regions with excellent accuracy.

[Application Example 3]
In the droplet discharge device of the present invention, it is preferable that the nozzle diameter of the second discharge nozzle is smaller than the nozzle diameter of the first discharge nozzle.

  Thereby, a smaller amount of liquid droplets than the liquid discharged from the first discharge nozzle can be discharged from the second discharge nozzle.

[Application Example 4]
In the droplet discharge apparatus of the present invention, the head unit includes a guide rail provided along a second direction intersecting the first direction, and the second droplet discharge head is attached to the guide rail. And
It is preferable that the second droplet discharge head is movable in the second direction with respect to the head unit.

  In the head unit configured as described above, the second droplet discharge head can be positioned with excellent accuracy relative to the second region by moving the second droplet discharge head.

[Application Example 5]
In the droplet discharge device of the present invention, the second droplet discharge head has a movable width movable in the second direction after the main scanning of the head unit in the first direction. It is preferable that the width is set equal to the movement width in the sub-scanning movement of the unit in the second direction.

  Accordingly, the second droplet discharge head can be reliably aligned with the second region to be supplied by the second droplet discharge head.

[Application Example 6]
In the droplet discharge device of the present invention, it is preferable that the nozzle row length of the first nozzle row is equal to the nozzle row length of the second nozzle row.

  Thus, when the head unit is moved relative to the substrate in the first direction, the discharge nozzles positioned at both ends of the first droplet discharge head and the second droplet discharge head Can pass through the same position on the substrate.

[Application Example 7]
In the droplet discharge device of the present invention, the first discharge nozzle and the second discharge nozzle are positioned at both ends when the head unit is moved relative to the base in the first direction. It is preferable that the discharge nozzles to be passed pass through the same position on the substrate.

  Thereby, it is possible to supply droplets with excellent accuracy to the first region and the second region.

[Application Example 8]
In the droplet discharge device of the present invention, the base has a first region and a second region having a smaller area than the first region,
The first droplet discharge head discharges the droplet to the first region;
The second droplet discharge head preferably discharges the droplet to the second region.

  By using the droplet discharge device having such a configuration, it is possible to supply droplets with excellent accuracy to the first region and the second region, that is, to regions having different sizes of the substrate.

[Application Example 9]
In the droplet discharge device of the present invention, the base body includes a first partition and a second partition,
The first region is defined by a first opening formed in the first partition;
The second region is preferably defined by a second opening formed in the second partition wall.

  By using the droplet discharge device having such a configuration, it is possible to supply droplets with excellent accuracy to the first opening and the second opening, that is, to openings having different sizes of the base. .

[Application Example 10]
In the droplet discharge device of the present invention, it is preferable that the second droplet discharge head is configured to discharge the droplets to the first region.

  Thereby, the droplet discharged from the second droplet discharge head can be supplied with excellent accuracy to the edge of the first opening without adhering to the first partition. Therefore, the film formation accuracy of the film obtained by drying the droplets can be improved.

[Application Example 11]
In the droplet discharge method of the present invention, the head unit included in the droplet discharge device of the present invention is moved relative to the base in the first direction,
When the first droplet discharge head faces the first region, the droplets are discharged from the first droplet discharge head and supplied to the first region, and the second droplet discharge head Is opposed to the second region, the droplets are ejected from the second droplet ejection head and supplied to the second region.

  With the droplet discharge method having such a configuration, it is possible to supply droplets with excellent accuracy to the first region and the second region, that is, regions having different sizes included in the substrate.

[Application Example 12]
In the droplet discharge method according to the aspect of the invention, it is preferable that the first region and the second region are disposed along the main scanning direction in the substrate to which the droplet is supplied.

  Droplets can be supplied to the first region and the second region with excellent accuracy.

[Application Example 13]
In the droplet discharge method of the present invention, it is preferable that each of the first region and the second region has a long shape in the sub-scanning direction.

  Droplets can be supplied to the first region and the second region with excellent accuracy.

[Application Example 14]
In the droplet discharge method of the present invention, it is preferable that the first region has a long shape in the sub-scanning direction, and the second region has a long rectangular shape in the main scanning direction.

  Droplets can be supplied to the first region and the second region with excellent accuracy.

[Application Example 15]
The method for manufacturing a film-coated device according to the present invention supplies the droplets to the first region and the second region, respectively, using the droplet discharge method according to the present invention. A supply step of forming a liquid film on the substrate in a second region;
A film forming step of forming a film in the first region and the second region by heating and drying the liquid film;
A dividing step of obtaining a film-coated device having different sizes by dividing the substrate into a first portion including the first region and a second portion including the second region. And

  According to this method for manufacturing a device with a film, a plurality of devices with a film having different sizes can be manufactured in a lump.

1 is a perspective view illustrating a schematic configuration of a droplet discharge device according to a first embodiment of the present invention. FIG. 2 is a schematic plan view showing an arrangement of droplet discharge heads in a head unit provided in the droplet discharge device shown in FIG. 1. FIG. 3 is a cross-sectional view illustrating a schematic configuration of a main part of a droplet discharge head provided in the head unit illustrated in FIG. 2. It is a block diagram which shows the control system of the droplet discharge apparatus shown in FIG. It is a figure explaining the film-forming method using the droplet discharge apparatus shown in FIG. It is a top view explaining the droplet discharge method (an example of the droplet discharge method of this invention) using a droplet discharge apparatus provided with the head unit shown in FIG. It is a top view explaining the droplet discharge method (an example of the droplet discharge method of this invention) using a droplet discharge apparatus provided with the head unit shown in FIG. It is a top view explaining the other droplet discharge method using the droplet discharge apparatus provided with the head unit shown in FIG. It is a typical top view which shows arrangement | positioning of the droplet discharge head in the head unit with which the droplet discharge apparatus which concerns on 2nd Embodiment of this invention is provided. FIG. 10 is a plan view illustrating a droplet discharge method (an example of a droplet discharge method according to the present invention) using a droplet discharge device including the head unit shown in FIG. 9. It is sectional drawing which shows the display apparatus which is an example of a light-emitting device. It is sectional drawing of the light emitting element with which the display apparatus shown in FIG. 11 is provided. It is a perspective view showing a configuration of a mobile (or notebook) personal computer which is an example of an electronic device. It is a perspective view which shows the structure of the mobile telephone (PHS is also included) which is an example of an electronic device. It is a perspective view which shows the structure of the digital still camera which is an example of an electronic device.

Hereinafter, a droplet discharge device, a droplet discharge method, and a method for manufacturing a device with a film of the present invention will be described based on preferred embodiments shown in the drawings. In each drawing, the scale of each part is appropriately changed for convenience of explanation, and the illustrated configuration does not necessarily match the actual scale.
First, the overall configuration of the droplet discharge device of the present invention will be described.

(Droplet discharge device)
<First Embodiment>
1 is a perspective view showing a schematic configuration of a droplet discharge device according to a first embodiment of the present invention, and FIG. 2 shows an arrangement of droplet discharge heads in a head unit provided in the droplet discharge device shown in FIG. FIG. 3 is a schematic plan view, and FIG. 3 is a cross-sectional view showing a schematic configuration of a main part of a droplet discharge head provided in the head unit shown in FIG. For convenience of explanation, FIG. 1 shows an X axis, a Y axis, and a Z axis that are orthogonal to each other. A direction parallel to the X axis is referred to as “X axis direction”, a direction parallel to the Y axis is referred to as “Y axis direction”, and a direction parallel to the Z axis is referred to as “Z axis direction”. In FIG. 1, the Z axis is along the vertical direction, the + Z axis direction side (the tip side of the arrow indicating the Z axis) is “up”, and the −Z axis direction side (the base end side of the arrow indicating the Z axis) ) Is called “below”.

  A droplet discharge device 6 shown in FIG. 1 is an ink jet device. The droplet discharge device 6 includes a base 7, a pair of guide rails 8, a stage 9, a main scanning position detection device 10, a support base 12, a guide member 13, a storage tank 14, and a guide rail. 15, a carriage 16, a sub-scanning position detection device 17, and a head unit 18.

  The base 7 has a rectangular parallelepiped shape having an upper surface 7a along the X-axis direction and the Y-axis direction. A pair of guide rails 8 extending along the Y-axis direction is installed on the upper surface 7 a of the base 7.

  A stage 9 is attached to the pair of guide rails 8 via a linear motion mechanism (not shown). As a result, the stage 9 is moved along the pair of guide rails 8, whereby the droplet discharge head portions 510 and 520 included in the head unit 18 are moved in the main scanning direction (Y-axis direction in the present embodiment). ). In this embodiment, for example, a linear motor is used as such a linear motion mechanism, and the stage 9 repeats forward and backward movements at a predetermined speed along the Y-axis direction. In addition, this linear motion mechanism is not limited to a linear motor, For example, a screw-type linear motion mechanism etc. may be sufficient.

  A main scanning position detection device 10 is provided on the upper surface 7 a of the base 7. The main scanning position detection device 10 detects the position of the stage 9 with respect to the base 7 in the Y-axis direction (that is, the position in the main scanning direction (first direction)).

  A mounting surface 11 on which the substrate (base body) 2 is mounted is formed on the upper surface of the stage 9. The mounting surface 11 is provided with a suction chuck mechanism (not shown). By this chuck mechanism, the substrate 2 on the placement surface 11 is attracted and fixed to the placement surface 11.

  A pair of support bases 12 extending upward are provided at both ends of the base 7 in the X-axis direction. A guide member 13 extending along the X-axis direction is installed on the pair of support bases 12. On the upper side of the guide member 13, a storage tank 14 in which the film-forming ink 26 is stored is installed.

  On the other hand, a guide rail 15 extending along the X-axis direction is installed below the guide member 13. A carriage 16 is attached to the guide rail 15 via a linear motion mechanism (not shown). Accordingly, by moving the carriage 16 along the guide rail 15, the droplet discharge head portions 510 and 520 included in the head unit 18 are orthogonal to (intersect) the main scanning direction (first direction) with respect to the stage 9. ) In the sub-scanning direction (X-axis direction in the present embodiment). In this embodiment, for example, a linear motor is used as such a linear motion mechanism, and the carriage 16 moves in the X-axis direction at an arbitrary timing (for example, when switching between the forward and backward movements of the main scanning described above). It is designed to move along. In addition, this linear motion mechanism is not limited to a linear motor, For example, a screw-type linear motion mechanism etc. may be sufficient.

  A sub-scanning position detection device 17 is provided on the carriage 16 side of the guide member 13. The sub-scanning position detection device 17 detects the position of the carriage 16 in the X-axis direction with respect to the guide member 13 (that is, the position in the sub-scanning direction (second direction)).

A head unit 18 is installed on the carriage 16.
As shown in FIG. 2, the head unit 18 includes a first droplet discharge head portion 510 and a second droplet discharge head portion 520. These first droplet discharge head portion 510 and the second liquid discharge head portion 520 A droplet discharge head portion 520 is disposed along the main scanning direction (Y-axis direction in the present embodiment). That is, the first liquid droplet ejection head unit 510 and the second liquid droplet ejection head unit 520 are arranged at different positions in the main scanning direction. The first liquid droplet ejection head unit 510 includes a plurality (12 in this embodiment) of first liquid droplet ejection heads 512, and the second liquid droplet ejection head unit 520 includes a plurality of (this embodiment). 12) second liquid droplet ejection heads 522.

  In the first droplet discharge head unit 510, each first droplet discharge head 512 is divided into two subgroups each including six first droplet discharge heads 512. In each subgroup, six first liquid discharge heads are divided. The droplet discharge heads 512 are arranged side by side along the Y-axis direction at a certain interval in the sub-scanning direction (X-axis direction in the present embodiment). Also, the two subgroups are arranged side by side in the X-axis direction.

  Further, in the second droplet discharge head unit 520, each second droplet discharge head 522 is divided into two subgroups each including six second droplet discharge heads 522. In each subgroup, six second The droplet discharge heads 522 are arranged side by side along the Y-axis direction at a certain interval in the X-axis direction. Also, the two subgroups are arranged side by side in the X-axis direction.

  Each first droplet discharge head 512 has a plurality (12 in the present embodiment) of first discharge nozzles 511, and the second droplet discharge head 522 has a plurality (20 in the present embodiment). ) Second discharge nozzle 521.

  In the first droplet discharge head 512, each first discharge nozzle 511 has two nozzle rows (first nozzle rows) including six first discharge nozzles 511. In each subgroup, One discharge nozzle 511 is arranged side by side with a predetermined separation distance (nozzle pitch C1) in the X-axis direction. The two subgroups are arranged side by side in a zigzag arrangement in which the positions are shifted in the Y-axis direction and the positions corresponding to the half pitches of the nozzle pitch C1 are shifted in the X-axis direction. In this embodiment, the position is shifted by a half pitch, but the position shift in the X-axis direction may not be a half pitch. Further, the row direction of the first nozzle row may not coincide with the X-axis direction.

  Further, in the second liquid droplet ejection head 522, each second ejection nozzle 521 has two nozzle rows (second nozzle rows) composed of ten second ejection nozzles 521. The second discharge nozzles 521 are arranged side by side with a predetermined separation distance (nozzle pitch C2) in the X-axis direction. The two subgroups are arranged side by side in a state where the positions are shifted in the Y-axis direction and the positions corresponding to the half pitches of the nozzle pitch C1 are shifted in the X-axis direction. In the present embodiment, the staggered position is shifted by a half pitch, but the position shift in the X-axis direction may not be a half pitch. The row direction of the second nozzle row may not coincide with the X-axis direction, and may not coincide with the row direction of the first nozzle row.

  Further, in the first droplet discharge head 512, the number of nozzle rows made up of the plurality of first discharge nozzles 511 is not limited to two rows, but may be one row or three or more rows, or the second droplet discharge head 522. In this case, the number of nozzle rows made up of the plurality of second ejection nozzles 521 is not limited to two, and may be one or three or more rows.

  Here, in each of the first droplet discharge heads 512 having the above-described configuration, the separation distance between the first discharge nozzles 511 positioned closest to each end portion of the droplet discharge head 512 with respect to the X-axis direction is defined as a nozzle row. The length A1 is set, and in each second droplet discharge head 522, the distance between the second discharge nozzles 521 located closest to each end of the second droplet discharge head 522 with respect to the X-axis direction is the nozzle row length. Assuming A2, in this embodiment, the nozzle row length A1 and the nozzle row length A2 are equal. Therefore, the nozzle pitch C1, which is the separation distance between the first ejection nozzles 511 in each first droplet ejection head 512, is the separation between the second ejection nozzles 521 in each second droplet ejection head 522. It is larger than the nozzle pitch C2, which is the distance.

  In addition, between the first droplet discharge heads 512 adjacent in the X-axis direction, the separation distance between the first discharge nozzles 511 positioned closest to these end portions on the adjacent side is changed to the lower axis line feed. With the stroke B1, the distance between the second droplet discharge heads 522 adjacent to each other in the X-axis direction is reduced at the end portion on the adjacent side. In the present embodiment, when the axis line feed stroke B2 is set, the lengths of the lower axis line feed stroke B1 and the lower axis line feed stroke B2 are equal. Further, in the first droplet ejection head unit 510 and the second droplet ejection head unit 520, the first droplet ejection head 512 and the second droplet ejection head 522 are respectively arranged in two rows in the X-axis direction and in the Y-axis direction. Six columns are arranged side by side, and the first droplet discharge head 512 and the second droplet discharge head 522 located in the same row and column have the same position in the X-axis direction. The effect obtained by equalizing these will be described in a droplet discharge method using the droplet discharge device 6 described later.

  The first droplet discharge head 512 provided in the first droplet discharge head unit 510 and the second droplet discharge head 522 provided in the second droplet discharge head unit 520 have the following configurations. As a result, the droplets 29 are discharged from the discharge nozzles 511 and 521 provided therein.

  That is, as a portion having a common configuration, each droplet discharge head 512, 522 includes a nozzle plate 23 as shown in FIG. 3, and a plurality of discharge nozzles 511, 521 are formed on the nozzle plate 23. ing.

  More specifically, each of the droplet discharge heads 512 and 522 has a nozzle plate 23, a cavity 25, a vibration plate 27, and a piezoelectric element 28.

  A plurality of ejection nozzles 511 and 521 are formed on the nozzle plate 23. On the upper side of the nozzle plate 23, cavities 25 (pressure chambers) communicating with the discharge nozzles 511 and 521 are provided corresponding to the discharge nozzles 511 and 521. The cavity 25 communicates with the storage tank 14 described above via a flow path (not shown), and the film forming ink 26 from the storage tank 14 is supplied.

  A diaphragm 27 is disposed above the cavity 25. The diaphragm 27 constitutes a part of the inner wall surface of the cavity 25. A piezoelectric element 28 is disposed on the surface of the diaphragm 27 opposite to the cavity 25. Upon receiving the element drive signal, the piezoelectric element 28 expands or contracts in the vertical direction (Z-axis direction) to vibrate the diaphragm 27 in the vertical direction (Z-axis direction). Thereby, the inside of the cavity 25 is pressurized with the reduction of the volume in the cavity 25. As a result, an amount of film forming ink 26 corresponding to the reduced volume of the cavity 25 is discharged as droplets 29 from the discharge nozzles 511 and 521. The discharged droplets 29 land on the substrate 2 exposed at the opening 21 provided in the partition wall 20.

  The configuration of the droplet discharge device 6 has been described above. A droplet discharge method using the droplet discharge device 6 will be described in detail later.

[Control system for droplet discharge device]
Next, the control system of the droplet discharge device 6 will be described.

FIG. 4 is a block diagram showing a control system of the droplet discharge device shown in FIG.
As shown in FIG. 4, the droplet discharge device 6 includes a control device 41 (control unit) that controls the operation of each unit of the droplet discharge device 6. The control device 41 includes a CPU (central processing unit) 42 that performs various types of arithmetic processing, and a memory 43 (storage unit) that stores various types of information.

  Here, the main scanning position detection device 10 and the sub-scanning position detection device 17 are connected to the CPU 42 via an input / output interface 46 and a data bus 47, respectively. In addition to the above, the main scanning drive device 44, the sub-scanning drive device 45, the head drive circuit 48, the input device 49, and the display device 50 are connected to the CPU 42 via the input / output interface 46 and the data bus 47, respectively. Has been.

  The main scanning driving device 44 is a driving source for moving the stage 9 in the main scanning direction, and the sub scanning driving device 45 is a driving for moving the carriage 16 in the sub scanning direction. Is the source. The head drive circuit 48 drives the droplet discharge heads 512 and 522 described above.

  The input device 49 is a device to which various operating conditions of the droplet discharge device 6 are input. For example, coordinate information for discharging the droplet 29 to the substrate 2 is input from an external device (not shown).

  The display device 50 is a device that displays various information such as processing conditions and work status of the droplet discharge device 6. The operator can perform an operation using the input device 49 based on information displayed on the display device 50.

  The memory 43 includes, for example, a semiconductor memory such as a RAM and a ROM, or an external storage device such as a hard disk and a DVD-ROM. The memory 43 stores various information necessary for the operation of the CPU 42.

  More specifically, the memory 43 is set with a storage area for storing program software 51 in which the operation control procedure in the droplet discharge device 6 is described. The memory 43 is also set with a storage area for storing discharge position data 52 that is coordinate data of the discharge position discharged onto the substrate 2.

  In addition, the memory 43 includes drive voltage data 53 that is a data indicating a relationship between a drive waveform and a discharge amount when driving the droplet discharge heads 512 and 522, and a drive for driving the droplet discharge heads 512 and 522. A storage area for storing a plurality of discharge conditions such as waveform data 54 is set. In the memory 43, a storage area for storing discharge plan data 55, which is drive voltage data at each discharge location, is set. Further, the memory 43 is set with a work area for the CPU 42, a storage area that functions as a temporary file, and other types of storage areas.

  The CPU 42 controls each part of the droplet discharge device 6 according to the program software 51 stored in the memory 43. The CPU 42 includes a drawing control unit 56, a discharge condition setting unit 61, and a discharge plan setting unit 62.

  The drawing control unit 56 performs control for discharging and drawing the droplets 29 from the droplet discharge heads 512 and 522. The drawing control unit 56 includes a main scanning control unit 57 that drives and controls the main scanning drive device 44, a sub-scanning control unit 58 that drives and controls the sub-scanning driving device 45, and an ejection control unit that drives and controls the head drive circuit 48. 59. The main scanning control unit 57 performs control for moving the stage 9 at a predetermined speed in the main scanning direction. The sub-scanning control unit 58 performs control for moving the droplet discharge heads 512 and 522 in the sub-scanning direction by a predetermined sub-scanning amount. The discharge controller 59 controls the discharge amount of each of the plurality of nozzles included in the droplet discharge heads 512 and 522 and the presence or absence of discharge.

  The discharge condition setting unit 61 sets the discharge amount and the number of discharges of the droplets 29 discharged from the discharge nozzles 511 and 521 based on the amount of the film forming ink 26 discharged to the application region and the discharge characteristics. The discharge plan setting unit 62 sets the drive waveform of the piezoelectric element 28 at each location where the droplet 29 is discharged.

  Using the droplet discharge device 6 described above, a film-forming ink is supplied as the droplet 29 to the opening 21 of the partition wall 20 included in the substrate 2, thereby forming a film on the substrate 2 exposed at the opening 21. 29D is formed. Hereinafter, a film forming method by a liquid phase process using the droplet discharge device 6 will be described.

[Film formation method]
FIG. 5 is a diagram for explaining a film forming method using the droplet discharge device shown in FIG.

  The film forming method using the film forming ink includes: [1] a step of supplying the film forming ink as droplets 29 on the substrate 2 exposed at the openings 21 to form the liquid film 29C (supplying step); [2] The liquid coating 29C is heated and dried to form a film 29D (film formation process).

Hereinafter, each process will be described in detail.
[1] Supply process (ink application process)
First, as shown in FIG. 5A, a substrate 2 including a partition wall 20 having an opening 21 is prepared. Next, as shown in FIG. 5B, the substrate 2 exposed in the opening 21 is prepared. The film-forming ink described above is discharged and supplied as droplets 29 from the droplet discharge heads 512 and 522. As a result, a liquid film 29 </ b> C made of film-forming ink is formed on the substrate 2 exposed in the opening 21.

  The temperature and pressure of the atmosphere in this step [1] are determined according to the composition of the film-forming ink and the boiling point and melting point of the liquid medium, respectively, and the film-forming ink is applied onto the substrate 2. Although it will not be specifically limited if it can do, It is preferable that it is normal temperature normal pressure. Therefore, it is preferable to use a film-forming ink that can be applied onto the substrate 2 under normal temperature and pressure. Thereby, process [1] can be performed easily.

[2] Film formation process (drying process)
Next, the liquid film 29C (film forming ink) formed on the substrate 2 is heated.

  Thereby, the liquid medium is removed from the liquid coating 29C, and the liquid coating 29C is dried, so that a film mainly composed of a film forming material contained in the film forming ink as shown in FIG. 5C. 29D is formed.

  The temperature and pressure of the atmosphere in the drying step [2] are determined according to the composition of the film-forming ink and the boiling point and melting point of the liquid medium, respectively, and the liquid medium is removed from the liquid coating 29C on the substrate 2. There is no particular limitation as long as it can be removed.

  The method of heating the liquid coating 29C is not particularly limited, but can be performed by a hot plate, infrared rays, or the like, and may be performed by a rubber heater provided in the stage 9 of the droplet discharge device 6 described above.

  By using the film forming method having the steps as described above, a film 29D having a uniform and uniform film thickness is formed on the substrate 2 exposed in the opening 21 provided in the partition wall 20 with excellent film forming accuracy. Here, in order to form a film 29D having a uniform and uniform film thickness on the substrate 2 exposed in the opening 21 by the film forming method as described above, the droplet discharge device 6 It is necessary to supply the droplet 29 discharged using the liquid into the opening 21 with excellent accuracy.

  In particular, from the viewpoint of improving productivity of a film-coated device in which a film 29D is formed on the substrate 2, a plurality of devices having different sizes such as 32 inches and 42 inches are taken from one substrate 2 ( In the case of co-processing, the partition wall 20 formed on the substrate 2 for manufacturing the film-coated device has a different size, orientation, and the like of the opening 21 for each size of the film-coated device. Therefore, in order to supply the droplet 29 into the opening 21, higher accuracy is required. However, by using the droplet discharge device 6 (the droplet discharge device of the present invention), Supply of the droplet 29 can be realized. Hereinafter, a method of supplying the droplet 29 into the opening 21 by the droplet discharge method using the droplet discharge device 6 (droplet discharge method of the present invention) will be described.

[Droplet ejection method]
6 and 7 are plan views for explaining a droplet discharge method (an example of the droplet discharge method of the present invention) using the droplet discharge device including the head unit shown in FIG. 2, and FIG. It is a top view explaining the other droplet discharge method using a droplet discharge apparatus provided with the head unit shown.

  In the following, as shown in FIG. 6 and FIG. 7, as a film-equipped device having different sizes from one substrate 2, two large film-equipped devices 2 a and three small film-equipped devices 2 b As an example, a case where both are taken together will be described.

Hereinafter, each step of the droplet discharge method using the droplet discharge device 6 will be sequentially described in detail.
<1> First, as shown in FIG. 6 (a), in order to jointly take two large film-equipped devices 2a and three small film-equipped devices 2b, an opening (first opening) ) A substrate 2 having two and three partition walls (first partition walls) 20a including 21a and two partition walls (second partition walls) 20b including opening portions (second opening portions) 21b is prepared. Then, it is adsorbed and fixed to the mounting surface 11 of the stage 9 provided in the droplet discharge device 6.

  In the substrate 2, the two partition walls 20a are disposed along the X-axis direction, and the three partition walls 20b are disposed along the X-axis direction, and the two partition walls 20a, the three partition walls 20b, Are arranged along the Y-axis direction with the two partition walls 20a on the −Y-axis direction side. In the partition wall 20a, ten openings (first regions) 21a are formed, each having a long rectangular shape in the X-axis direction, and two in the Y-axis direction along the X-axis direction. 5 are arranged along each. In the partition wall 20b, eight openings (second regions) 21b are formed, each having a long rectangular shape in the X-axis direction, two along the X-axis direction and two in the Y-axis direction. 4 are arranged along each. In the substrate 2 having such a configuration, as shown in FIGS. 6 and 7, the opening 21a has an opening area larger than the opening area of the opening 21b.

  As described above, in the present embodiment, the first region is partitioned by the opening 21a formed in the partition wall 20a, and the second region is partitioned by the opening 21b formed in the partition wall 20b. Become.

  <2> Next, the carriage 16 is moved along the guide rail 15 to move the head unit 18 attached to the carriage 16 to a predetermined position in the sub-scanning direction (X-axis direction).

  <3> Next, the stage 9 is moved along the guide rail 8 (main scanning). As a result, the substrate 2 fixed on the stage 9 moves along the main scanning direction (Y-axis direction). As a result, the first and second liquid droplet ejection head portions 510 included in the head unit 18, 520 moves relative to the substrate 2 in the main scanning direction (Y-axis direction).

  In the present invention, when the first and second droplet discharge head portions 510 and 520 move relative to the main scanning direction (Y-axis direction) with respect to the substrate 2, the first droplet discharge head portion 510 (first Since the droplet discharge head 512) and the second droplet discharge head portion 520 (second droplet discharge head 522) are arranged along the Y-axis direction, the first and second droplet discharge heads 512 are arranged. 522 passes through the opening 21a of the partition 20a to which the droplet 29 is to be supplied and the opening 21b of the partition 20b, whereby the first droplet discharge head unit 510 (the first droplet discharge head 512). ) And the second droplet discharge head portion 520 (second droplet discharge head 522) are opposed to the opening portion 21a of the partition wall 20a and the opening portion 21b of the partition wall 20b, respectively. In particular, in the present embodiment, the separation distance of the first droplet discharge head 512 is the nozzle row length A1 and the separation distance of the second droplet discharge head 522 is equal to the nozzle row length A2, and is arranged in the Y-axis direction. When the head unit 18 is moved relative to the substrate 2 in the main scanning direction, the first and second discharge nozzles positioned at both ends of the first and second droplet discharge heads 512 and 522 511 and 521 pass through the same position on the substrate 2. That is, the regions of the opening 21a of the partition wall 20a and the opening 21b of the partition wall 20b that pass below the first and second droplet discharge heads 512 and 522 are the first droplet discharge head 512 and the second droplet discharge head. The head 522 is equal.

  Therefore, when the first and second droplet discharge heads 512 and 522 pass over the opening 21a of the partition wall 20a and the opening 21b of the partition wall 20b, the first and second discharges at positions overlapping in the X-axis direction. By ejecting the droplets 29 (29a, 29b) from the nozzles 511, 521, they can be supplied to the openings 21a, 21b.

  At this time, the droplet 29 (29a) is applied to the opening 21a of the partition wall 20a and the opening 21b of the partition wall 20b from both the first and second discharge nozzles 511 and 521 of the first and second droplet discharge heads 512 and 522. 29b), in the present invention, the nozzle pitch C2 of the second discharge nozzle 521 is set smaller than the nozzle pitch C1 of the first discharge nozzle 511.

  Therefore, the droplet 29a is supplied from the first discharge nozzle 511 to the opening 21a of the partition wall 20a. Thereby, the droplet 29a can be efficiently supplied to the opening 21a having a large opening area. Further, the droplet 29b is supplied from the second discharge nozzle 521 to the opening 21b of the partition wall 20b. Thereby, the droplet 29b can be supplied to the opening 21b having a small opening area with excellent accuracy.

  Further, the liquid droplets 29 (29a and 29b) are supplied from both the first discharge nozzle 511 and the second discharge nozzle 521 by the relative movement of the head unit 18 once along the main scanning direction (Y-axis direction). Therefore, the time for supplying the droplets 29 (29a, 29b) can be shortened.

  As described above, when the first and second droplet discharge head portions 510 and 520 included in the head unit 18 move relative to the substrate 2 in the main scanning direction, the first and second discharge nozzles 511, By discharging the droplets 29a and 29b from the nozzle 521, as shown in FIG. 6B, the opening of the partition wall 20a at the position where the first and second droplet discharge head portions 510 and 520 have passed along the Y-axis direction. The droplet 29 can be supplied to the opening 21b of the portion 21a and the partition wall 20b.

  <4> Next, the head unit 18 mounted on the carriage 16 is moved in the X-axis direction by sub-scanning in which the carriage 16 is moved along the guide rail 15 with the movement width of the lower axis line feed stroke B1. After moving by the distance of the lower axis line feed stroke B1, the process <3> is performed again. At this time, since the lower axis line feed stroke B1 and the lower axis line feed stroke B2 are equal in size, the droplets 29 in the opening 21a of the partition wall 20a and the opening 21b of the partition wall 20b are not supplied. Thus, the droplets 29 (29a, 29b) can be supplied more efficiently and with higher accuracy in this step <4>.

  Therefore, this step <4> is repeated until the first and second droplet discharge head portions 510 and 520 pass through the entire region of the opening 21a of the partition wall 20a and the opening 21b of the partition wall 20b. As shown in FIG. 7, the droplets 29a and 29b can be uniformly supplied to the opening 21a of the partition 20a and the opening 21b of the partition 20b, respectively.

  As described above, when the first droplet discharge head 512 and the second droplet discharge head 522 arranged along the Y-axis direction are moved along the main scanning direction (Y-axis direction), The droplet 29a is supplied from the first droplet discharge head 512 (first discharge nozzle 511) to the opening 21a of the partition 20a, and the opening of the partition 20b is supplied from the second droplet discharge head 522 (second discharge nozzle 521). By supplying the droplet 29b to the part 21b, even if the partition 20 having a different size is formed on the substrate 2 for co-removal, liquid is applied to both the opening 21a and the opening 21b of the partition 20a and the partition 20b. Drops 29 (29a, 29b) can be supplied with excellent accuracy.

  In the above description, in the scanning along the main scanning direction (Y-axis direction), the droplets 29a are supplied from the first discharge nozzles 511 to the openings 21a of the partition walls 20a, and the second discharge nozzles 521 supply the droplets 20b. Although the case where the droplet 29b is supplied to the opening 21b has been described, the present invention is not limited to such a droplet discharge method.

  For example, by changing the driving waveform and nozzle diameter of the second droplet discharge head 522, the discharge amount of the droplet 29b discharged from the second discharge nozzle 521 can be made smaller than that of the droplet 29a. . When the nozzle diameter is changed, the nozzle diameter of the second discharge nozzle 521 is made smaller than the nozzle diameter of the first discharge nozzle 511, so that the amount of liquid smaller than the liquid droplet 29 discharged from the first discharge nozzle 511 is reduced. The droplet 29 can be discharged from the second discharge nozzle 521.

  In this case, as shown in FIG. 8, the first droplet discharge head 512 (first discharge nozzle 511) and the second droplet discharge head 522 (second discharge nozzle 521) are provided in the opening 21a of the large partition wall 20a. ), The droplets 29 (29a, 29b) may be supplied. Thereby, the droplet 29b can be supplied to the edge of the opening 21a with excellent accuracy without adhering the droplet 29b to the partition wall 20a. For this reason, it is possible to accurately suppress or prevent the occurrence of uneven stripes in the film 29D obtained by drying the droplets 29 (29a, 29b), thereby improving the film forming accuracy of the film 29D.

  Further, the movement of the head unit 18 in the sub-scanning direction (X-axis direction) in the step <2> performed after each step <3> is omitted, and the step <3> is repeated a plurality of times. Then, the step <2> may be performed. In this case, of the reciprocating motion of the head unit 18 along the main scanning direction (Y-axis direction), the first droplet discharge head is used for both the forward movement along the + Y-axis direction and the backward movement along the −Y-axis direction. The droplets 29 (29a, 29b) may be supplied from both the 512 (first discharge nozzle 511) and the second droplet discharge head 522 (second discharge nozzle 521), or along the + Y-axis direction. In the forward movement, the droplet 29 is supplied from one of the first droplet discharge head 512 (first discharge nozzle 511) and the second droplet discharge head 522 (second discharge nozzle 521), and the -Y axis The droplet 29 is supplied from the other of the first droplet discharge head 512 (first discharge nozzle 511) and the second droplet discharge head 522 (second discharge nozzle 521) by the backward movement along the direction. It may be.

  Further, after the final step <3> in the step <4>, after inspecting the liquid droplets 29 (29a, 29b) supplied to the partition walls 20 (20a, 20b) for defects such as stripes, The step <3> may be performed again, and the droplet 29b may be supplied from the second droplet discharge head 522 (second discharge nozzle 521) to the position where the defect is recognized to repair the defect. . Thereby, the precision of this restoration can be improved.

<< Second Embodiment >>
Next, a second embodiment of the droplet discharge device of the present invention and a droplet discharge method using such a droplet discharge device will be described.

  FIG. 9 is a schematic plan view showing the arrangement of the droplet discharge heads in the head unit provided in the droplet discharge device according to the second embodiment of the present invention, and FIG. 10 is a droplet including the head unit shown in FIG. It is a top view explaining the droplet discharge method (an example of the droplet discharge method of the present invention) using a discharge device.

  Hereinafter, the head unit 18A included in the droplet discharge device 6 according to the second embodiment will be described focusing on the differences from the head unit 18 included in the droplet discharge device 6 according to the first embodiment. The description is omitted.

  The head unit 18A shown in FIG. 9 further includes a pair of guide rails 531 and the second droplet discharge head portion 520A is attached to the pair of guide rails 531 via a linear motion mechanism (not shown). Otherwise, the head unit 18 is the same as the head unit 18 shown in FIG.

  That is, in the head unit 18A provided in the droplet discharge device 6 of the second embodiment, the second droplet discharge head portion 520A is provided on a pair of guide rails 531 extending in the X-axis direction via a linear motion mechanism. Accordingly, the second droplet discharge head portion 520A is moved along the pair of guide rails 531. In other words, the second droplet discharge head portion 520A is moved along the X-axis direction with respect to the substrate 2. Can be moved relatively.

  In this embodiment, the width of the movement of the second droplet discharge head portion 520A in the X-axis direction is set to a maximum of ± E1 as shown in FIG. For example, a linear motor is used, and the second droplet discharge head portion 520A can perform forward and backward movements with a maximum width of ± E1 along the X-axis direction. In addition, this linear motion mechanism is not limited to a linear motor, For example, a screw-type linear motion mechanism etc. may be sufficient. The size of 2 × E1 is set to be equal to the movement width in the sub scanning in which the head unit 18 is moved in the sub scanning direction.

[Droplet ejection method]
In the droplet discharge device 6 including the head unit 18A in the present embodiment, in addition to the droplet discharge method using the droplet discharge device 6 including the head unit 18 described in the first embodiment, for example, the following A simple droplet discharge method can also be performed.

  That is, in the droplet discharge method of the present embodiment, in the step <1>, as shown in FIG. 10A, the device with a film having a different size from one substrate 2 as in the first embodiment. In the same way, two large film-equipped devices 2a and three small-sized film-coated devices 2b are taken together, but a bulkhead for taking the three small film-equipped devices 2b together. 20b, 20c, in the partition wall 20c located closest to the −X axis direction, eight openings 21c are formed, each having a long rectangular shape in the Y axis direction, and extending along the X axis direction. In the two partition walls 20b located on the + X-axis direction side, eight openings 21b are formed, each in the X-axis direction. Long one And none of Jo, two along the X-axis direction, that are arranged one by 4 along the Y-axis direction are different.

  In step <2>, the carriage 16 is moved along the guide rail 15 to move the head unit 18A attached to the carriage 16 to a predetermined position in the sub-scanning direction (X-axis direction). At the same time, the second droplet discharge head portion 520 is moved along the guide rail 531 to move the second droplet discharge head portion 520A in the sub-scanning direction (X-axis direction). By such movement of the carriage 16, the first droplet discharge head 512 is positioned with excellent accuracy with respect to the opening 21a, and by movement of the second droplet discharge head portion 520A, the second droplet discharge head 522 is positioned. However, positioning with respect to the opening 21b is performed with excellent accuracy.

  Therefore, in the step <3>, the droplet 29a is supplied from the first discharge nozzle 511 to the opening 21a of the partition wall 20a, and the opening 21b of the partition wall 20b and the opening 21c of the partition wall 20c are supplied from the second discharge nozzle 521. When the droplets 29b are supplied to the liquid, they can be supplied with excellent positional accuracy. In particular, the opening 21c of the partition wall 20c has a rectangular shape that is long in the Y-axis direction and has a fine shape in the Y-axis direction. However, the supply of the droplet 29b was excellent also to the opening 21c. This can be done with positional accuracy.

  In this embodiment, the nozzle row length A1 and the nozzle row length A2 are equal, but in this embodiment, the second droplet discharge head portion 520 is guided to the guide rail 531 as described above. Therefore, the region where the first discharge nozzle 511 passes with the nozzle row length A1 and the region where the second discharge nozzle 521 passes with the nozzle row length A2 are not completely coincident with each other. Thus, discharge from the discharge nozzles 511 and 521 is performed. However, although the area through which the first discharge nozzle 511 passes and the area through which the second discharge nozzle 521 pass are not completely the same, as described above, the size of 2 × E1 is the same as that of the head unit 18. It is set equal to the movement width in the sub-scanning movement in the sub-scanning direction. Thus, the second discharge nozzle 521 can be reliably aligned with the opening 21c of the partition wall 20c to be supplied by the second discharge nozzle 521 in one main scan.

  Using the film forming method using the droplet discharge device 6 and the droplet discharge method as described above, the partition wall 20a in which the film 29D is formed on the substrate 2 exposed at the openings 21a, 21b, and (21c), The substrate 2 including 20b and (20c) is cut in the thickness direction for each portion (first portion, second portion, (third portion)) where the partition walls 20a, 20b, and (20c) are formed. By (dividing) (dividing step), a plurality of devices with films having different sizes can be manufactured in a lump.

  In addition, examples of the device with a film include a display device including an organic electroluminescence (organic EL) element, a color filter, a wiring substrate, and the like. Hereinafter, the device with a film is applied to a display device including an organic EL element. The case will be described.

  In this case, among the organic layers included in the organic EL element, for example, a film included in the above-described device with a film is formed to form at least one of a hole injection layer, a hole transport layer, and a light emitting layer. For forming a hole injection layer, a hole transport layer, and a light emitting layer can be applied. As the film forming material, a polymer material having a hole injecting property, a polymer material having a hole transporting property, and an organic material having a light emitting property, which will be described later, can be used.

(Display device)
FIG. 11 is a cross-sectional view illustrating a display device which is an example of a light-emitting device. In the following description, for convenience of explanation, the upper side in FIG. 11 is described as “upper” and the lower side as “lower”.

  A display device 300 illustrated in FIG. 11 includes a plurality of light-emitting elements 200R, 200G, and 200B corresponding to the sub-pixels 300R, 300G, and 300B, and forms a top emission display panel.

  In the present embodiment, an example in which an active matrix method is employed as a display device driving method will be described. However, a passive matrix method may be employed.

  The display device 300 includes a substrate 301, a plurality of light emitting elements 200R, 200G, and 200B, and a plurality of switching elements 302.

  The substrate 301 supports the plurality of light emitting elements 200R, 200G, and 200B and the plurality of switching elements 302. Each of the light emitting elements 200R, 200G, and 200B of the present embodiment has a configuration (top emission type) that extracts light from the side opposite to the substrate 301. Accordingly, the substrate 301 can be either a transparent substrate or an opaque substrate. When each light emitting element 200R, 200G, and 200B is configured to extract light from the substrate 301 side (bottom emission type), the substrate 301 is substantially transparent (colorless transparent, colored transparent, or translucent). The

  Examples of the constituent material of the substrate 301 include resin materials such as polyethylene terephthalate, polyethylene naphthalate, polypropylene, cycloolefin polymer, polyamide, polyethersulfone, polymethyl methacrylate, polycarbonate, and polyarylate, quartz glass, and soda glass. Such glass materials can be used, and one or more of these can be used in combination.

  Examples of the opaque substrate include a substrate made of a ceramic material such as alumina, an oxide film (insulating film) formed on the surface of a metal substrate such as stainless steel, and a substrate made of a resin material. It is done.

  A plurality of switching elements 302 are arranged in a matrix on such a substrate 301.

  Each switching element 302 is provided corresponding to each light emitting element 200R, 200G, 200B, and is a driving transistor for driving each light emitting element 200R, 200G, 200B.

  Each switching element 302 includes a semiconductor layer 302a made of silicon, a gate insulating layer 302b formed on the semiconductor layer 302a, a gate electrode 302c formed on the gate insulating layer 302b, a source electrode 302d, And a drain electrode 302e.

  A planarizing layer 303 made of an insulating material is formed so as to cover the plurality of switching elements 302.

  On the planarization layer 303, light emitting elements 200R, 200G, and 200B are provided corresponding to the switching elements 302, respectively.

  In the light emitting element 200R, a reflective film 304, a corrosion prevention film 305, an anode 201, a laminate (organic EL light emitting unit) 208 (208R), a cathode 207, and a cathode cover 306 are laminated in this order on a planarization layer 303. . In the present embodiment, the anode 201 of each light emitting element 200R, 200G, 200B constitutes a pixel electrode, and is electrically connected to the drain electrode 302e of each switching element 302 by a conductive portion (wiring) 307. The cathodes 207 of the light emitting elements 200R, 200G, and 200B are common electrodes.

  The light emitting elements 200G and 200B can be configured in the same manner as the light emitting element 200R. Here, different colors can be emitted by making the stacked bodies 208R, 208G, and 208B (particularly, the light emitting layer) of the light emitting elements 200R, 200G, and 200B different from each other. For example, the light emitting element 200R emits red light, the light emitting element 200G emits green light, and the light emitting element 200B emits blue light.

  A partition wall 308 is provided between the adjacent light emitting elements 200R, 200G, and 200B. Further, the substrate 310 is bonded to the cathode cover 306 via a resin layer 309 made of a thermosetting resin such as an epoxy resin.

  As described above, since each of the light emitting elements 200R, 200G, and 200B of this embodiment is a top emission type, a transparent substrate is used as the substrate 310.

  The constituent material of the substrate 310 is not particularly limited as long as the substrate 310 has light transmittance, and the same constituent material as that of the substrate 301 described above can be used.

(Light emitting element)
Here, the light emitting elements 200R, 200G, and 200B will be described in detail with reference to FIG.

12 is a cross-sectional view of a light-emitting element included in the display device shown in FIG.
A light-emitting element (electroluminescence element) 200 shown in FIG. 12 constitutes the light-emitting elements 200R, 200G, and 200B described above, and is stacked between two electrodes (between the anode 201 and the cathode 207) as described above. A body 208 is inserted. As shown in FIG. 12, the stacked body 208 includes a hole injection layer 202, a hole transport layer 203, a light emitting layer 204, an electron transport layer 205, and an electron injection layer 206 from the anode 201 side to the cathode 207 side. They are stacked in order.

  In such a light emitting element 200, electrons are supplied (injected) from the cathode 207 side to the light emitting layer 204, and holes are supplied (injected) from the anode 201 side. In each light-emitting layer 204, holes and electrons recombine, and excitons (excitons) are generated by the energy released during the recombination. When excitons return to the ground state, energy (fluorescence or phosphorescence) is generated. ) Is emitted (emitted).

  In the light-emitting element 200, the hole transport layer 203 or the hole injection layer 202 is formed by using the film formation method described above. Thereby, the light emitting element 200 and the display apparatus 300 which have the outstanding characteristic can be provided. Note that in the light-emitting element 200, one of the hole injection layer 202 and the hole transport layer 203 may be omitted.

Hereinafter, each part which comprises the light emitting element 200 is demonstrated sequentially.
(anode)
The anode 201 is an electrode that injects holes into the hole transport layer 203 via a hole injection layer 202 described later. As a constituent material of the anode 201, it is preferable to use a material having a large work function and excellent conductivity.

Examples of the constituent material of the anode 201 include oxides such as ITO (Indium Tin Oxide), IZO (Indium Zinc Oxide), In ₃ O ₃ , SnO ₂ , Sb-containing SnO ₂ , and Al-containing ZnO, Au, Pt, and Ag. Cu, alloys containing these, and the like can be used, and one or more of these can be used in combination.

(cathode)
On the other hand, the cathode 207 is an electrode that injects electrons into the electron transport layer 205 via an electron injection layer 206 described later. As a constituent material of the cathode 207, a material having a small work function is preferably used.

  Examples of the constituent material of the cathode 207 include Li, Mg, Ca, Sr, La, Ce, Er, Eu, Sc, Y, Yb, Ag, Cu, Al, Cs, Rb, and alloys containing these. These can be used alone or in combination of two or more thereof (for example, a multi-layer laminate).

  In particular, when an alloy is used as a constituent material of the cathode 207, an alloy containing a stable metal element such as Ag, Al, or Cu, specifically, an alloy such as MgAg, AlLi, or CuLi is preferably used. By using such an alloy as the constituent material of the cathode 207, the electron injection efficiency and stability of the cathode 207 can be improved.

  In addition, since the light emitting element 200 of the present embodiment is a top emission type, the cathode 207 has light transmittance.

(Hole injection layer)
The hole injection layer 202 has a function of improving hole injection efficiency from the anode 201.

  Examples of the constituent material (hole injection material) of the hole injection layer 202 include a polymer material having a hole injection property.

  The polymer material having hole injection properties is not particularly limited. For example, poly (2,7- (9,9-di-n-octylfluorene)-(1,4-phenylene-(( Those having an arylamine skeleton such as polyarylamine such as 4-sec-butylphenyl) imino) -1,4-phenylene (TFB), those having a fluorene skeleton such as a fluorene-bithiophene copolymer, fluorene- Those having both an arylamine skeleton and a fluorene skeleton such as an arylamine copolymer, poly (N-vinylcarbazole), polyvinylpyrene, polyvinylanthracene, polythiophene, polyalkylthiophene, polyhexylthiophene, poly (p-phenylene vinylene) ), Polytinylene vinylene, pyrene formaldehyde resin Ethylcarbazole formaldehyde resin, or derivatives thereof.

  The average thickness of the hole injection layer 202 is not particularly limited, but is preferably about 5 nm or more and 150 nm or less, and more preferably about 10 nm or more and 100 nm or less.

(Hole transport layer)
The hole transport layer 203 has a function of transporting holes injected from the anode 201 through the hole injection layer 202 to the light emitting layer 204.

  The constituent material of the hole transport layer 203 is not particularly limited. For example, a triphenylamine system such as TFB (poly (9,9-dioctyl-fluorene-co-N- (4-butylphenyl) -diphenylamine)) is used. Includes amine compounds such as polymers, polyfluorene derivatives (PF), polyparaphenylene vinylene derivatives (PPV), polyparaphenylene derivatives (PPP), polyvinylcarbazole (PVK), polythiophene derivatives, polymethylphenylsilane (PMPS) Examples thereof include polymer materials having hole transport properties such as polysilane, and one or more of these can be used in combination. The constituent material of the hole injection layer 202 described above can also be used as the constituent material of the hole transport layer 203.

  The average thickness of the hole transport layer 203 is not particularly limited, but is preferably about 10 to 150 nm, more preferably about 10 to 100 nm.

(Light emitting layer)
The light emitting layer 204 includes a light emitting material.

  The light emitting material is not particularly limited, and various kinds of fluorescent materials and organic materials such as phosphorescent materials can be used singly or in combination. When the light emitting element 200 is used for the light emitting element 200R described above, a red fluorescent material or a red phosphorescent material is used as the light emitting material, and when the light emitting element 200 is used for the light emitting element 200G described above, a green fluorescent material is used as the light emitting material. Alternatively, when a green phosphorescent material is used and the light emitting element 200 is used as the light emitting element 200B, a blue fluorescent material or a blue phosphorescent material is used as the light emitting material.

  The red fluorescent material is not particularly limited as long as it emits red fluorescence. For example, perylene derivatives such as diindenoperylene derivatives, europium complexes, benzopyran derivatives, rhodamine derivatives, benzothioxanthene derivatives, porphyrin derivatives, Nile Red, 2- (1,1-dimethylethyl) -6- (2- (2,3,6,7-tetrahydro-1,1,7,7-tetramethyl-1H, 5H-benzo (ij) quinolidine- 9-yl) ethenyl) -4H-pyran-4H-ylidene) propanedinitrile (DCJTB), 4- (dicyanomethylene) -2-methyl-6- (p-dimethylaminostyryl) -4H-pyran (DCM), etc. The organic material is mentioned.

The red phosphorescent material is not particularly limited as long as it emits red phosphorescence, and examples thereof include metal complexes such as iridium, ruthenium, platinum, osmium, rhenium, and palladium. Among the ligands of these metal complexes, An organic material in which at least one of them has a phenylpyridine skeleton, a bipyridyl skeleton, a porphyrin skeleton, or the like is also included. More specifically, tris (1-phenylisoquinoline) iridium, bis [2- (2′-benzo [4,5-α] thienyl) pyridinate-N, C ³ ′] iridium (acetylacetonate) (btp2Ir ( acac)), 2,3,7,8,12,13,17,18-octaethyl-12H, 23H-porphyrin-platinum (II), bis [2- (2′-benzo [4,5-α] thienyl ) Pyridinate-N, C ³ '] iridium, bis (2-phenylpyridine) iridium (acetylacetonate).

  The green fluorescent material is not particularly limited as long as it is an organic material that emits green fluorescence. For example, quinacridone such as coumarin derivatives and quinacridone derivatives and derivatives thereof, 9,10-bis [(9-ethyl-3-carbazole) -Vinylenyl] -anthracene, poly (9,9-dihexyl-2,7-vinylenefluorenylene), poly [(9,9-dioctylfluorene-2,7-diyl) -co- (1,4-diphenylene- Vinylene-2-methoxy-5- {2-ethylhexyloxy} benzene)], poly [(9,9-dioctyl-2,7-divinylenefluorenylene) -ortho-co- (2-methoxy-5- ( 2-ethoxylhexyloxy) -1,4-phenylene)] and the like.

The green phosphorescent material is not particularly limited as long as it is an organic material that emits green phosphorescence, and examples thereof include metal complexes such as iridium, ruthenium, platinum, osmium, rhenium, and palladium. (2-phenylpyridine) iridium (Ir (ppy) 3), bis (2-phenyl-pyridinium sulfonate -N, ^{C 2} ') iridium (acetylacetonate), fac - tris [5-fluoro-2- (5- Trifluoromethyl-2-pyridine) phenyl-C, N] iridium and the like.

  The blue fluorescent material is not particularly limited as long as it is an organic material that emits blue fluorescence. For example, distyrylamine derivatives such as distyryldiamine compounds, fluoranthene derivatives, pyrene derivatives, perylene and perylene derivatives, anthracene derivatives, Benzoxazole derivatives, benzothiazole derivatives, benzimidazole derivatives, chrysene derivatives, phenanthrene derivatives, distyrylbenzene derivatives, tetraphenylbutadiene, 4,4′-bis (9-ethyl-3-carbazovinylene) -1,1′-biphenyl ( BCzVBi), poly [(9,9-dioctylfluorene-2,7-diyl) -co- (2,5-dimethoxybenzene-1,4-diyl)], poly [(9,9-dihexyloxyfluorene-2) , 7-diyl) -ortho-co- (2 Methoxy-5- {2-ethoxyhexyloxy} phenylene-1,4-diyl)], poly [(9,9-dioctylfluorene-2,7-diyl) -co- (ethylnylbenzene)] and the like. .

The blue phosphorescent material is not particularly limited as long as it is an organic material that emits blue phosphorescence. Examples thereof include metal complexes such as iridium, ruthenium, platinum, osmium, rhenium, and palladium. Specifically, bis [ 4,6-difluorophenyl pyridinium sulfonate -N, ^{C 2} '] - picolinate - iridium, tris [2- (2,4-difluorophenyl) pyridinate -N, ^{C 2']} iridium, bis [2- (3, 5-trifluoromethyl) pyridinate -N, ^{C 2} '] - picolinate - iridium, bis (4,6-difluorophenyl pyridinium sulfonate -N, ^{C 2')} iridium (acetylacetonate) and the like.

  The above light emitting materials can be used individually by 1 type or in combination of 2 or more types.

  In addition to the light emitting material described above, the light emitting layer 204 may include a host material to which the light emitting material is added as a guest material.

  The host material has a function of recombining holes and electrons to generate excitons and excitating the luminescent material by transferring the exciton energy to the luminescent material (Felster transfer or Dexter transfer). . In the case of using such a host material, for example, the host material can be used by doping a light emitting material that is a guest material as a dopant.

Such a host material is not particularly limited as long as it exhibits a function as described above with respect to a light emitting material to be used. For example, an acene derivative such as a naphthacene derivative, a naphthalene derivative, or an anthracene derivative (acene type) Materials), distyrylarylene derivatives, perylene derivatives, distyrylbenzene derivatives, distyrylamine derivatives, quinolinolato metal complexes such as tris (8-quinolinolato) aluminum complex (Alq ₃ ), and triphenylamine tetramers Reelamine derivatives, oxadiazole derivatives, silole derivatives, dicarbazole derivatives, oligothiophene derivatives, benzopyran derivatives, triazole derivatives, benzoxazole derivatives, benzothiazole derivatives, quinoline derivatives, 4,4'-bis (2,2'-diph Enylvinyl) biphenyl (DPVBi) and the like, and one or more of them can be used in combination.

  When the red light emitting material (guest material) and the host material as described above are used, the content (doping amount) of the light emitting material in the light emitting layer 204 is preferably 0.01 to 10 wt%, More preferably, it is 5 wt%. Luminous efficiency can be optimized by setting the content of the red light emitting material within such a range.

  The average thickness of the light emitting layer 204 is not particularly limited, but is preferably about 10 to 150 nm, and more preferably about 10 to 100 nm. The light emitting layer 204 may be composed of a plurality of stacked light emitting layers. In that case, an intermediate layer that does not emit light may be interposed between any light emitting layers.

(Electron transport layer)
The electron transport layer 205 has a function of transporting electrons injected from the cathode 207 through the electron injection layer 206 to the light emitting layer 204.

As a constituent material (electron transport material) of the electron transport layer 205, for example, a quinoline derivative such as an organometallic complex having an 8-quinolinol or its derivative such as tris (8-quinolinolato) aluminum (Alq ₃ ) as a ligand. Oxadiazole derivatives, perylene derivatives, pyridine derivatives, pyrimidine derivatives, quinoxaline derivatives, diphenylquinone derivatives, nitro-substituted fluorene derivatives, and the like, and one or more of these can be used in combination.

The average thickness of the electron transport layer 205 is not particularly limited, but is preferably about 0.5 to 100 nm, and more preferably about 1 to 50 nm.
The electron transport layer 205 can be omitted.

(Electron injection layer)
The electron injection layer 206 has a function of improving the efficiency of electron injection from the cathode 207.

  Examples of the constituent material (electron injection material) of the electron injection layer 206 include various inorganic insulating materials and various inorganic semiconductor materials.

  Examples of such inorganic insulating materials include alkali metal chalcogenides (oxides, sulfides, selenides, tellurides), alkaline earth metal chalcogenides, alkali metal halides, and alkaline earth metal halides. Of these, one or two or more of these can be used in combination. By forming the electron injection layer using these as main materials, the electron injection property can be further improved. In particular, an alkali metal compound (alkali metal chalcogenide, alkali metal halide, or the like) has a very small work function. By using this to form the electron injection layer 206, the light-emitting element 200 can obtain high luminance. Become.

Examples of the alkali metal chalcogenide include Li ₂ O, LiO, Na ₂ S, Na ₂ Se, and NaO.

  Examples of the alkaline earth metal chalcogenide include CaO, BaO, SrO, BeO, BaS, MgO, and CaSe.

  Examples of the alkali metal halide include CsF, LiF, NaF, KF, LiCl, KCl, and NaCl.

Examples of the alkaline earth metal halide include CaF ₂ , BaF ₂ , SrF ₂ , MgF ₂ , and BeF ₂ .

  In addition, as the inorganic semiconductor material, for example, an oxide including at least one element of Li, Na, Ba, Ca, Sr, Yb, Al, Ga, In, Cd, Mg, Si, Ta, Sb, and Zn , Nitrides, oxynitrides, and the like, and one or more of these can be used in combination.

The average thickness of the electron injection layer 206 is not particularly limited, but is preferably about 0.1 to 1000 nm, more preferably about 0.2 to 100 nm, and about 0.2 to 50 nm. Further preferred.
The electron injection layer 206 can be omitted.

(Electronics)
FIG. 13 is a perspective view illustrating a configuration of a mobile (or notebook) personal computer that is an example of an electronic apparatus.

  In this figure, a personal computer 1100 includes a main body 1104 provided with a keyboard 1102 and a display unit 1106 provided with a display. The display unit 1106 is rotatable with respect to the main body 1104 via a hinge structure. It is supported by.

  In the personal computer 1100, the display unit included in the display unit 1106 is configured by the display device 300 described above.

  FIG. 14 is a perspective view illustrating a configuration of a mobile phone (including PHS) which is an example of an electronic device.

In this figure, a cellular phone 1200 includes a plurality of operation buttons 1202, an earpiece 1204 and a mouthpiece 1206, and a display unit.
In the mobile phone 1200, the display unit is configured by the display device 300 described above.

  FIG. 15 is a perspective view illustrating a configuration of a digital still camera which is an example of an electronic apparatus. In this figure, connection with an external device is also simply shown.

  Here, an ordinary camera sensitizes a silver halide photographic film with a light image of a subject, whereas a digital still camera 1300 photoelectrically converts a light image of a subject with an imaging device such as a CCD (Charge Coupled Device). An imaging signal (image signal) is generated.

  A display unit is provided on the back of a case (body) 1302 in the digital still camera 1300, and is configured to display based on an imaging signal from the CCD, and functions as a finder that displays an object as an electronic image.

  In the digital still camera 1300, the display unit is configured by the display device 300 described above.

  A circuit board 1308 is installed inside the case. The circuit board 1308 is provided with a memory that can store (store) an imaging signal.

  A light receiving unit 1304 including an optical lens (imaging optical system), a CCD, and the like is provided on the front side of the case 1302 (on the back side in the illustrated configuration).

  When the photographer confirms the subject image displayed on the display unit and presses the shutter button 1306, the CCD image pickup signal at that time is transferred and stored in the memory of the circuit board 1308.

  In the digital still camera 1300, a video signal output terminal 1312 and an input / output terminal 1314 for data communication are provided on the side surface of the case 1302. As shown in the figure, a television monitor 1430 is connected to the video signal output terminal 1312 and a personal computer 1440 is connected to the input / output terminal 1314 for data communication as necessary. Further, the imaging signal stored in the memory of the circuit board 1308 is output to the television monitor 1430 or the personal computer 1440 by a predetermined operation.

  In addition to the personal computer (mobile personal computer) shown in FIG. 13, the mobile phone shown in FIG. 14, and the digital still camera shown in FIG. 15, the electronic apparatus may be, for example, a television, a video camera, a viewfinder type, or a monitor direct view type. Video tape recorders, laptop personal computers, car navigation devices, pagers, electronic notebooks (including those with communication functions), electronic dictionaries, calculators, electronic game machines, word processors, workstations, videophones, security TV monitors, electronic Devices equipped with binoculars, POS terminals, touch panels (for example, cash dispensers of financial institutions, automatic ticket vending machines), medical devices (for example, electronic thermometers, blood pressure monitors, blood glucose meters, electrocardiographs, ultrasonic diagnostic devices, endoscopes) Display device), fish detector, various measuring instruments, total Class (e.g., gages for vehicles, aircraft, and ships), a flight simulator, various monitors, and a projection display such as a projector.

  As mentioned above, although the droplet discharge apparatus, the droplet discharge method, and the manufacturing method of the device with a film of the present invention have been described based on the illustrated embodiments, the present invention is not limited thereto.

  For example, in the above-described embodiment, the first liquid droplet ejection head and the second liquid droplet ejection head included in the head unit are rotatable with respect to the head unit, and the first liquid droplet ejection head and the second liquid droplet ejection head The nozzle rows of the first discharge nozzle and the second discharge nozzle respectively provided in the discharge head may be variable in the sub-scanning direction.

  Moreover, although the case where the manufacturing method of the device with a film of the present invention is applied to the manufacture of a display device including an organic EL element has been described, the manufacturing method of the device with a film of the present invention is a method of forming a wiring included in a circuit board It can also be applied to. In this case, a conductive polymer material such as polyacetylene, poly (p-phenylene vinylene), polypyrrole, polythiophene, polyaniline, poly (p-phenylene sulfide) is used as a film forming material for forming the wiring. What contains as a molecular material is mentioned.

2 ... Substrate 2a ... Device with film 2b ... Device with film 6 ... Droplet discharge device 7 ... Base 7a ... Upper surface 8 ... Guide rail 9 ... Stage 10 ... Main scanning position detector 11 ··· Placement surface 12 ··· Support base 13 ··· Guide member 14 · · · Storage tank 15 · · · Guide rail 16 · · · Carriage 17 · · · Sub-scanning position detector 18 · · · Head unit 18A · · · Head unit 20 · · · Partition 20a ... Partition 20b ... Partition 20c ... Partition 21 ... Opening 21a ... Opening 21b ... Opening 21c ... Opening 23 ... Nozzle plate 25 ... Cavity 26 ... Film-forming ink 27 Vibration plate 28 Piezoelectric element 29 Droplet 29a Droplet 29b Droplet 29C Liquid coating 29D Film 41 Control device 42 CPU
43 Memory 44 Main scanning drive 45 Sub-scanning drive 46 Input / output interface 47 Data bus 48 Head drive circuit 49 Input device 50 Display device 51 Program software 52 ... Discharge position data 53 ... Drive voltage data 54 ... Drive waveform data 55 ... Discharge plan data 56 ... Drawing controller 57 ... Main scan controller 58 ... Sub-scan controller 59 ... Discharge controller 61 ... Discharge condition setting unit 62 ... Discharge plan setting unit 200 ... Light emitting element 200B ... Light emitting element 200G ... Light emitting element 200R ... Light emitting element 201 ... Anode 202 ... Hole injection layer 203 ... Hole Transport layer 204 ... Light emitting layer 205 ... Electron transport layer 206 ... Electron injection layer 207 ... Cathode 208 ... Stack 208B ... Stack 208G ... Stack 208R ... Stack 00 ... Display device 300B ... Subpixel 300G ... Subpixel 300R ... Subpixel 301 ... Substrate 302 ... Switching element 302a ... Semiconductor layer 302b ... Gate insulating layer 302c ... Gate electrode 302d ... Source electrode 302e ... drain electrode 303 ... planarization layer 304 ... reflective film 305 ... corrosion prevention film 306 ... cathode cover 307 ... conductive part 308 ... partition 309 ... resin layer 310 ... substrate 510 ... first Droplet discharge head portion 511 ... First discharge nozzle 512 ... First droplet discharge head 520 ... Second droplet discharge head portion 520A ... Second droplet discharge head portion 521 ... Second discharge nozzle 522 ... Second droplet ejection head 531 Guide rail 1100 Personal computer 1102 Keyboard 1104 Main unit 1106 Display unit 1200 ... Mobile phone 1202 ... Operation button 1204 ... Earpiece 1206 ... Mouthpiece 1300 ... Digital still camera 1302 ... Case 1304 ... Light receiving unit 1306 ... Shutter button 1308 ... Circuit board 1312 ... Video signal output terminal 1314 Input / output terminal 1430 Television monitor 1440 Personal computer A1 Nozzle row length A2 Nozzle row length B1 Lower shaft line feed stroke B2 Lower shaft line feed stroke C1 Nozzle pitch C2 ... Nozzle pitch

Claims (15)

A droplet discharge device that supplies droplets from a head unit to a substrate while performing main scanning in which the substrate and the head unit are relatively moved in a first direction,
The head unit includes a first droplet discharge head and a second droplet discharge head that discharge the droplets,
The first liquid droplet ejection head has a first nozzle row in which a plurality of first ejection nozzles are arranged side by side in a direction intersecting the first direction at a first nozzle pitch.
The second droplet discharge head includes a second droplet discharge nozzle arranged side by side in a direction intersecting the first direction at a second nozzle pitch smaller than the first nozzle pitch. Nozzle row,
The liquid droplet ejection apparatus, wherein the first liquid droplet ejection head and the second liquid droplet ejection head are arranged at different positions in the first direction.   2. The droplet discharge device according to claim 1, wherein the second droplet discharge head is capable of discharging a smaller amount of droplets than the droplets discharged from the first discharge nozzle from the second discharge nozzle. .   The droplet discharge device according to claim 1, wherein a nozzle diameter of the second discharge nozzle is smaller than a nozzle diameter of the first discharge nozzle. The head unit includes a guide rail provided along a second direction intersecting the first direction, and the second droplet discharge head is attached to the guide rail.
4. The liquid droplet ejection apparatus according to claim 1, wherein the second liquid droplet ejection head is movable in the second direction with respect to the head unit. 5.   The movable width of the second droplet discharge head movable in the second direction is such that the head unit moves in the second direction after main scanning of the head unit in the first direction. The droplet discharge device according to claim 4, wherein the droplet discharge device is set to be equal to a moving width in the sub-scanning.   6. The droplet discharge device according to claim 1, wherein a nozzle row length of the first nozzle row is equal to a nozzle row length of the second nozzle row.   The first discharge nozzle and the second discharge nozzle are arranged such that when the head unit is moved relative to the base in the first direction, the discharge nozzles located at both ends are on the base. The droplet discharge device according to claim 6, which passes through the same position. The base has a first region and a second region having a smaller area than the first region,
The first droplet discharge head discharges the droplet to the first region;
The liquid droplet ejection apparatus according to claim 1, wherein the second liquid droplet ejection head ejects the liquid droplets to the second region. The base includes a first partition and a second partition,
The first region is defined by a first opening formed in the first partition;
The liquid droplet ejection apparatus according to claim 8, wherein the second region is partitioned by a second opening formed in the second partition wall.   The droplet discharge device according to claim 8 or 9, wherein the second droplet discharge head is configured to discharge the droplet to the first region. While moving the head unit included in the droplet discharge device according to any one of claims 8 to 10 relative to the base in the first direction,
When the first droplet discharge head faces the first region, the droplets are discharged from the first droplet discharge head and supplied to the first region, and the second droplet discharge head A droplet discharge method comprising: discharging the droplets from the second droplet discharge head and supplying the droplets to the second region when facing the second region.   12. The droplet discharge method according to claim 11, wherein the first region and the second region are disposed along the main scanning direction in the substrate to which the droplet is supplied.   The droplet discharge method according to claim 11 or 12, wherein each of the first region and the second region has a shape that is long in the sub-scanning direction.   13. The droplet discharge method according to claim 11, wherein the first region has a long shape in the sub-scanning direction, and the second region has a long rectangular shape in the main scanning direction. 15. The droplet discharge method according to claim 11, wherein the droplet is supplied to the first region and the second region, respectively, and the first region and the second region are supplied. A supplying step of forming a liquid film on the substrate in the region of 2;
A film forming step of forming a film in the first region and the second region by heating and drying the liquid film;
A dividing step of obtaining a film-coated device having different sizes by dividing the substrate into a first portion including the first region and a second portion including the second region. A method for manufacturing a film-coated device.

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