JP2016164120A5 - - Google Patents

Download PDF

Info

Publication number
JP2016164120A5
JP2016164120A5 JP2016050574A JP2016050574A JP2016164120A5 JP 2016164120 A5 JP2016164120 A5 JP 2016164120A5 JP 2016050574 A JP2016050574 A JP 2016050574A JP 2016050574 A JP2016050574 A JP 2016050574A JP 2016164120 A5 JP2016164120 A5 JP 2016164120A5
Authority
JP
Japan
Prior art keywords
less
dislocation density
single crystal
silicon carbide
crystal wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2016050574A
Other languages
English (en)
Japanese (ja)
Other versions
JP6200018B2 (ja
JP2016164120A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2016050574A priority Critical patent/JP6200018B2/ja
Priority claimed from JP2016050574A external-priority patent/JP6200018B2/ja
Publication of JP2016164120A publication Critical patent/JP2016164120A/ja
Publication of JP2016164120A5 publication Critical patent/JP2016164120A5/ja
Application granted granted Critical
Publication of JP6200018B2 publication Critical patent/JP6200018B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2016050574A 2016-03-15 2016-03-15 炭化珪素単結晶ウェハ Active JP6200018B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2016050574A JP6200018B2 (ja) 2016-03-15 2016-03-15 炭化珪素単結晶ウェハ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016050574A JP6200018B2 (ja) 2016-03-15 2016-03-15 炭化珪素単結晶ウェハ

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2013195010A Division JP5931825B2 (ja) 2013-09-20 2013-09-20 炭化珪素単結晶インゴットの製造方法

Publications (3)

Publication Number Publication Date
JP2016164120A JP2016164120A (ja) 2016-09-08
JP2016164120A5 true JP2016164120A5 (OSRAM) 2016-10-20
JP6200018B2 JP6200018B2 (ja) 2017-09-20

Family

ID=56876408

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016050574A Active JP6200018B2 (ja) 2016-03-15 2016-03-15 炭化珪素単結晶ウェハ

Country Status (1)

Country Link
JP (1) JP6200018B2 (OSRAM)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111788339B (zh) 2018-03-01 2022-08-09 住友电气工业株式会社 碳化硅基板
CN110747504B (zh) * 2019-11-26 2021-03-23 中国科学院物理研究所 一种碳化硅单晶的生长方法
KR102195325B1 (ko) * 2020-06-16 2020-12-24 에스케이씨 주식회사 탄화규소 잉곳, 웨이퍼 및 이의 제조방법
CN113322520A (zh) * 2020-02-28 2021-08-31 Skc株式会社 晶片及其制造方法
CN114540954B (zh) * 2020-11-25 2022-12-09 北京天科合达半导体股份有限公司 碳化硅单晶片、晶体及制备方法、半导体器件
EP4411029A4 (en) 2021-09-30 2025-10-22 Central Glass Co Ltd SINGLE CRYSTAL SILICON CARBIDE WAFER, SINGLE CRYSTAL SILICON CARBIDE INGOT, AND METHOD FOR PRODUCING SINGLE CRYSTAL SILICON CARBIDE
KR20240072095A (ko) 2021-09-30 2024-05-23 샌트랄 글래스 컴퍼니 리미티드 탄화규소 단결정 웨이퍼 및 탄화규소 단결정 잉곳
JPWO2024080071A1 (OSRAM) * 2022-10-11 2024-04-18
CN116334748B (zh) * 2023-03-21 2024-12-10 浙江材孜科技有限公司 一种降低碳化硅晶体应力的生长方法
WO2025121062A1 (ja) * 2023-12-08 2025-06-12 住友電気工業株式会社 炭化珪素基板、エピタキシャル基板および半導体装置の製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5304712B2 (ja) * 2010-04-07 2013-10-02 新日鐵住金株式会社 炭化珪素単結晶ウェハ
EP2752508A4 (en) * 2011-08-29 2015-02-25 Nippon Steel & Sumitomo Metal Corp SILICON CARBIDE CRYSTAL WAFERS AND MANUFACTURING METHOD THEREFOR
JP5614387B2 (ja) * 2011-08-29 2014-10-29 新日鐵住金株式会社 炭化珪素単結晶の製造方法、及び炭化珪素単結晶インゴット

Similar Documents

Publication Publication Date Title
JP2016164120A5 (OSRAM)
JP2019058014A5 (OSRAM)
JP2017199810A5 (OSRAM)
JP2016038993A5 (OSRAM)
JP2019524620A5 (OSRAM)
JP2016031825A5 (OSRAM)
JP2016531837A5 (OSRAM)
JP2017089715A5 (OSRAM)
CN302510816S (zh) 悬挂装置(多屏)
CN302202085S (zh) 耳机(st)
CN302579839S (zh) 风扇(古典ft-23yt)
CN302559217S (zh) 工艺品(吉祥物4)
CN302534499S (zh) 工艺品(吉祥物1)
CN302534520S (zh) 工艺品(吉祥物2)
CN302534521S (zh) 工艺品(吉祥物3)
CN302541013S (zh) 酒壶(石皮弄)
CN302510830S (zh) 电视机挂架(psw531f)
CN302509095S (zh) 卡式炉(13-a)
CN302548761S (zh) 刀架(ag1)
CN302589269S (zh) U盘笔(20130428)
CN302443791S (zh) 柜子(高柜)
CN302548786S (zh) 可转位硬质合金涂层刀片
CN302511048S (zh) 数控纵切车床(xknc-s12-4)
CN302497229S (zh) 电视机壁挂架(psw842)
CN302487805S (zh) 拉手(5)