JP2016155197A - Wire saw and cutting method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a wire saw capable of improving processing efficiency.SOLUTION: In a wire saw 1 including a work tank 4 in which working liquid S is stored, and into which a workpiece W is immersed, and a wire 2 having abrasive grains 21 attached onto the surface, for cutting the workpiece W by reciprocating movement of the wire 2, an ultrasonic generation device 10 (processed waste removal part) for removing processed waste attached to the wire 2 in the work tank 4 is provided.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a wire saw and a cutting method for cutting a workpiece by a reciprocating motion of a wire.

  A conventional wire saw is disclosed in Patent Document 1. This wire saw includes a processing tank in which a processing liquid is stored and a workpiece is immersed, and a wire having abrasive grains fixed on the surface thereof. The workpiece is cut by the reciprocating motion of the wire pressed against the workpiece. At this time, since the workpiece is immersed in the machining fluid, the temperature rise of the workpiece due to frictional heat generated at the contact portion between the wire and the workpiece can be reduced.

JP 2012-139810 A (page 4, FIG. 3)

  However, according to the conventional wire saw, since there is a gap between the abrasive grains of the wire, the processing waste of the workpiece is easily clogged in the gap. For this reason, the unevenness | corrugation on the surface of a wire decreased and there existed a problem that the processing efficiency of a wire saw fell.

  An object of this invention is to provide the wire saw and cutting method which can improve processing efficiency.

  In order to achieve the above object, the present invention includes a processing tank in which a processing liquid is stored and the workpiece is immersed, and a wire having abrasive grains fixed on the surface thereof, and the workpiece is reciprocated by the reciprocating movement of the wire. In the wire saw which cuts, the processing waste removal part which removes the processing waste adhering to the said wire in the said processing tank is provided.

  In the wire saw having the above-described configuration, it is preferable that the processing scrap removal unit includes an injection unit that emits ultrasonic waves toward a contact portion between the wire and the workpiece.

  In the wire saw having the above-described configuration, the present invention is preferably provided with a degassing part for degassing the processing liquid in the processing tank.

  In the wire saw having the above-described configuration, the machining scrap removing unit circulates the machining liquid in the machining tank, and a contact portion between the wire and the workpiece connected to the circulation route. It is preferable to have an injection part that injects a liquid flow of the machining liquid toward the surface.

  In the wire saw having the above-described configuration, the present invention is preferably provided with a filtration unit for filtering the processing waste in the processing tank in the circulation path.

  In the wire saw having the above-described configuration, the present invention preferably includes a plurality of the injection portions and is arranged toward the contact portion from above and below the wire.

  In the wire saw having the above-described configuration, it is preferable that the workpiece is cut by the vertical movement of the wire, and the injection unit moves up and down together with the wire in the processing tank.

  In the wire saw configured as described above, it is preferable that the workpiece is cut by the vertical movement of the workpiece, and the injection portion is fixed in the processing tank.

  Further, the present invention is a cutting method that includes a processing tank in which a processing liquid is stored and the workpiece is immersed, and a wire having abrasive grains fixed on the surface thereof, and the workpiece is cut by reciprocating movement of the wire. In addition, the liquid flow of the ultrasonic wave or the processing liquid is ejected toward the contact portion between the wire and the workpiece, and the processing waste adhering to the wire is removed in the processing tank.

  According to the wire saw of the present invention, there is provided a processing waste removal unit that removes processing waste attached to the wire in the processing tank. Thereby, clogging of the processing waste into the clearance gap between the abrasive grains of a wire can be prevented. Therefore, the processing efficiency of the wire saw can be improved.

  Further, according to the cutting method of the present invention, an ultrasonic wave or a liquid flow of a processing liquid is injected toward the contact portion between the wire and the workpiece, and the processing waste adhering to the wire is removed in the processing tank. Thereby, clogging of the processing waste into the clearance gap between the abrasive grains of a wire can be prevented. Therefore, the processing efficiency of the wire saw can be improved.

Side surface sectional view which shows the wire saw of 1st Embodiment of this invention. The top view which shows the ultrasonic horn moving part of the wire saw of 1st Embodiment of this invention. The side view which shows the ultrasonic horn moving part of the wire saw of 1st Embodiment of this invention. The perspective view which expanded the cut location of the workpiece by the wire of the wire saw of 1st Embodiment of this invention. Side surface sectional drawing which shows the principal part of the wire saw of 2nd Embodiment of this invention. Side surface sectional view which shows the wire saw of 3rd Embodiment of this invention.

<First Embodiment>
Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows a side sectional view of the wire saw of the first embodiment. The wire saw 1 includes a wire 2, a wire reciprocating mechanism 3, a processing tank 4, and an ultrasonic generator 10 (processing waste removing unit).

  The wire 2 is made of, for example, a piano wire having a wire diameter of 0.5 mm or less, and diamond abrasive grains 21 (see FIG. 4), for example, are fixed to the surface. The wire 2 reciprocates as shown by an arrow R1 by the wire reciprocating mechanism 3 to cut the workpiece W. The abrasive grains fixed on the surface of the wire 2 may be abrasive grains other than diamond.

  The wire reciprocating mechanism 3 includes a wire reel 31, a guide roller 32, a dancer roller 33, and groove rollers 34a, 34b, and 34c. A pair of wire reels 31 sandwiching the processing tank 4 are connected by a single wire 2, and each wire 2 is wound around the wire reel 31. A motor 39 is connected to each of the wire reels 31, and by driving the motor 39, the wire 2 is drawn from one wire reel 31 and wound around the other wire reel 31.

  The guide roller 32 guides the wire 2 drawn from the wire reel 31 to the dancer roller 33 and the groove rollers 34a, 34b, 34c. The dancer roller 33 is connected to the dancer device 35. The dancer device 35 has a motor 35a and a support arm 35b. One end of the support arm 35b is connected to the motor 35a and the other end is connected to a shaft portion (not shown) of the dancer roller 33. By driving the motor 35a, the support arm 35b rotates in the vertical direction, and the dancer roller 33 rotates in the vertical direction. Thereby, the tension of the wire 2 is adjusted. The dancer roller 33 and the dancer device 35 constitute a tension adjusting unit that adjusts the tension of the wire 2.

  Groove rollers 34a, 34b, and 34c have grooves (not shown) recessed in the axial direction (direction orthogonal to the paper surface in FIG. 1) at a predetermined period on the surface. The wire 2 is disposed in each groove and is wound spirally between the groove rollers 34a, 34b, and 34c. Thereby, the wire saw 1 is a multi-wire saw in which the wire 2 between the globe rollers 34b and 34c is arranged at a predetermined period in the axial direction of the groove rollers 34b and 34c. Further, the groove rollers 34a, 34b, 34c are configured to be moved up and down by a vertical movement mechanism (not shown). The groove roller 34a is disposed above the groove rollers 34b and 34c, and faces the central portion between the groove rollers 34b and 34c with a predetermined distance therebetween. As a result, contact between the groove roller 34a and the workpiece W being cut can be prevented.

  The processing tank 4 has an upper surface opened, stores the processing liquid S, and the workpiece W is immersed therein. An installation portion 41 for installing the workpiece W is provided on the bottom surface in the processing tank 4. The installation unit 41 has a detection roller 38 that rotates when the wire 2 comes into contact therewith. As the working fluid S, for example, water, an aqueous grinding fluid, an oily grinding fluid or the like can be used. The workpiece W is not particularly limited, and examples thereof include silicon ingots and glass blocks.

  A suction port 51 is opened in the bottom wall of the processing tank 4, and air outlets 52 a and 52 b are opened in both side walls of the processing tank 4. The suction port 51 and the air outlets 52a and 52b are connected by a circulation path 5. The circulation path 5 is provided with a filtering unit 6, a pump 7, and a deaeration unit 8 in this order from the suction port 51 toward the outlets 52a and 52b. The circulation path 5 includes a first branch path 5 a and a second branch path 5 b that branch on the downstream side of the deaeration unit 8. The suction port 51 and the air outlet 52a communicate with each other through the first branch path 5a. Moreover, the suction inlet 51 and the blower outlet 52b are connected via the 2nd branch path 5b.

  The filtration unit 6 has a filter (not shown) that can be attached to and detached from the circulation path 5, for example, and removes processing waste generated when the workpiece W is cut by the wire 2 from the machining liquid S. The deaeration unit 8 has, for example, a hollow fiber membrane (not shown), and circulates the working fluid S in the hollow fiber membrane and depressurizes the outside of the hollow fiber membrane with, for example, a vacuum pump. Thereby, the dissolved gas in the working fluid S moves to the decompression side through the wall surface of the hollow fiber. Thereby, the dissolved gas in the processing liquid S is removed.

  When the pump 7 is driven, the processing liquid S in the processing tank 4 is sucked into the circulation path 5 from the suction port 51 and is sent into the processing tank 4 from the blowout ports 52a and 52b. As a result, the machining fluid S in the machining tank 4 circulates through the circulation path 5, and machining waste is removed by the filtration unit 6.

  The ultrasonic generator 10 includes a drive unit 11 and a plurality of ultrasonic horns 12 (ejecting units) connected to the drive unit 11. The ultrasonic horn 12 includes an ultrasonic generation element (not shown), and an ultrasonic wave is generated by the ultrasonic generation element by driving of the drive unit 11. The ultrasonic horn 12 emits ultrasonic waves (in this embodiment, ultrasonic waves of 15 kHz to 1 MHz) toward the contact portion 22 (see FIG. 4) between the wire 2 and the workpiece W. In the present embodiment, 16 ultrasonic horns 12 are provided and are arranged so as to sandwich the workpiece W in a direction in which the wire 2 between the globe rollers 34b and 34c extends. At this time, the eight ultrasonic horns 12 are arranged below the wire 2, and the remaining eight ultrasonic horns 12 are arranged above the wire 2.

  2 and 3 respectively show a plan view and a side view of the ultrasonic horn moving unit 60 that moves the ultrasonic horn 12 up and down. 2 and 3 show the ultrasonic horn moving part 60 on the groove roller 34b side, the same horn moving part 60 as that on the glove roller 34b side is also provided on the glove roller 34c side. The groove roller 34b is pivotally supported by the shaft portion 341b. The horn moving part 60 has a support part 70 provided on the shaft part 341b. The support unit 70 includes a first arm unit 71, a second arm unit 72, and a third arm unit 73.

  The first arm portion 71 projects and extends from both ends of the shaft portion 341b toward the workpiece W. The second arm portion 72 extends vertically from the tip of the first arm portion 71. The third arm portion 73 includes an upper connection portion 73 a that connects the upper ends of both the second arm portions 72, and a lower connection portion 73 b that connects the lower ends of both the second arm portions 72. The upper connecting portion 73a and the lower connecting portion 73b are disposed above and below the wire 2 between the groove rollers 34b and 34c, respectively. Four ultrasonic horns 12 are arranged in parallel in the axial direction of the upper connecting portion 73a and the lower connecting portion 73b, and each ultrasonic horn 12 is detachable from the upper connecting portion 73a and the lower connecting portion 73b. . Accordingly, when the groove rollers 34 a, 34 b, 34 c move up and down, the ultrasonic horn 12 can move up and down along with the up and down movement of the wire 2.

  In the wire saw 1 having the above-described configuration, the workpiece W is installed and fixed on the installation portion 41 in the processing tank 4 through the opening on the upper surface of the processing tank 4. Further, the workpiece W is immersed in the machining liquid S up to the upper surface. Thereafter, when the left motor 39 in FIG. 1 is driven, both wire reels 31 rotate clockwise, and the wire 2 is pulled out from the right wire reel 31 and wound around the left wire reel 31. . After a predetermined time has elapsed, the left motor 39 is stopped and the right motor 39 is driven to rotate both wire reels 31 counterclockwise. By alternately driving both motors 39 and changing the rotation direction of the wire reel 31, the wire 2 reciprocates as shown by an arrow R1 (see FIG. 1). At this time, the rotation angle of the wire reel 31 is different between right and left, and the wire 2 is gradually wound around one wire reel 31.

  Further, the wire 2 between the groove rollers 34b and 34c and the ultrasonic horn 12 are lowered by the lowering of the groove rollers 34a, 34b and 34c, and the wire 2 comes into contact with a predetermined position on the upper surface of the workpiece W to be processed. Cutting is performed. At this time, the workpiece W is immersed in the processing liquid S in the processing tank 4. Thereby, the temperature rise of the workpiece W due to the frictional heat generated between the reciprocating wire 2 and the workpiece W can be reduced.

  FIG. 4 shows an enlarged perspective view of a cut portion of the workpiece W. When the workpiece W is cut by the wire 2, the driving unit 11 of the ultrasonic generator 10 is driven, and the ultrasonic wave UW is emitted from the ultrasonic horn 12 toward the contact portion 22 between the wire 2 and the workpiece W. . Thereby, the processing waste of the workpiece W accumulated in the processing groove G and the processing waste of the workpiece W clogged in the gap between the abrasive grains 21 of the wire 2 can be removed. Therefore, the unevenness | corrugation of the surface of the wire 2 can be ensured reliably and the processing efficiency of the wire saw 1 can be improved.

  Further, when the workpiece W is cut by the wire 2, the pump 7 is driven, and the machining liquid S in the machining tank 4 is sucked into the circulation path 5 through the suction port 51. The machining waste in the machining liquid S sucked into the circulation path 5 is removed by the filtration unit 6. Thereafter, the dissolved gas in the machining liquid S is removed by the deaeration unit 8. The machining fluid S deaerated in the deaeration unit 8 flows through the first branch path 5a and the second branch path 5b, and is sent into the processing tank 4 from the outlets 52a and 52b, respectively.

  Thereby, the processing waste in the processing liquid S in the processing tank 4 can be removed. Further, since the machining liquid S is degassed, a small vacuum cavity (cavitation) can be easily generated in the machining liquid S by ultrasonic waves. The processing waste adhering to the surface of the wire 2 can be easily peeled off by the shock wave generated when the cavity is crushed. Therefore, the processing efficiency of the wire saw 1 can be further improved.

  When the reciprocating wire 2 contacts the detection roller 38, the detection roller 38 rotates. When the rotation of the detection roller 38 is detected, the motor 39 stops. Thereby, the reciprocation of the wire 2 is stopped. At this time, the drive of the vertical movement mechanism, the pump 7, the vacuum pump of the deaeration unit 8, and the ultrasonic generator 10 are also stopped. Thereby, the cutting of the workpiece W by the wire saw 1 is completed.

  According to this embodiment, the ultrasonic generator 10 (processing waste removal part) which removes the processing waste adhering to the wire 2 within the processing tank 4 is provided. Thereby, the clogging of the processing waste to the clearance gap between the abrasive grains 21 on the wire 2 can be prevented. Therefore, the processing efficiency of the wire saw 1 can be improved.

  Moreover, it has the ultrasonic horn 12 (injection part) which inject | emits an ultrasonic wave toward the contact part 22 of the wire 2 and the workpiece W. FIG. Thereby, an ultrasonic wave can be reliably made to reach the contact part 22, and the processing efficiency of the wire saw 1 can be improved further. Moreover, since the some ultrasonic horn 12 is provided, the processing waste adhering to the multiple rows of wires 2 between the groove rollers 34b and 34c can be removed easily.

  Further, a deaeration unit 8 for deaerating the machining liquid S in the machining tank 4 is provided. Thereby, cavitation is generated and the processing waste adhering to the wire 2 can be more easily removed.

  Moreover, it has two or more ultrasonic horns 12, and is arrange | positioned toward the contact part 22 from the upper direction and the downward direction of the wire 2, respectively. Thereby, the processing waste deposited in the processing groove G by the ultrasonic horn 12 above the wire 2 can be easily removed. Further, ultrasonic waves can be emitted toward the surface of the wire 2 that slides on the bottom surface of the machining groove G by the ultrasonic horn 12 below the wire 2 to reliably remove the machining waste between the abrasive grains 21. .

  Further, the workpiece W is cut by the vertical movement of the wire 2, and the ultrasonic horn 12 moves up and down together with the wire 2 in the processing tank 4. Thereby, an ultrasonic wave can be reliably emitted toward the contact portion 22.

Second Embodiment
Next, a second embodiment of the present invention will be described. FIG. 5 shows a side sectional view of the main part of the wire saw 1 of the second embodiment. For convenience of explanation, the same reference numerals are given to the same parts as those in the first embodiment shown in FIGS. In the present embodiment, the first is that the workpiece W is moved up and down without moving the groove rollers 34a, 34b and 34c up and down (without moving the wire 2 between the groove rollers 34b and 34c up and down). This is different from the embodiment. Other parts are the same as those in the first embodiment.

  The wire saw 1 has a lifting device 200 that lifts and lowers the workpiece W. The lifting device 200 has an installation part 201 for installing the workpiece W, an arm member 202 connected to the installation part 201 and extending vertically, and a pinion (not shown) connected to a rack (not shown) of the arm member 202. Have As the pinion rotates, the arm member 202 moves up and down, and the workpiece W installed on the installation unit 201 moves up and down. At this time, the ultrasonic horn 12 is fixed in the processing tank 4 from above and below the wire 2 toward the contact portion 22. Also in this embodiment, the processing efficiency of the wire saw 1 can be improved as in the first embodiment.

<Third Embodiment>
Next, a third embodiment of the present invention will be described. FIG. 6 shows a side sectional view of the wire saw of the third embodiment. For convenience of explanation, the same reference numerals are given to the same parts as those in the first embodiment shown in FIGS. This embodiment is different from the first embodiment in that the ultrasonic generator 10 and the deaeration unit 8 are omitted and a plurality of injection nozzles 53 are provided in place of the ultrasonic horn 12. Other parts are the same as those in the first embodiment.

  An injection nozzle 53 (injection unit) is connected to the outlets 52a and 52b of the circulation path 5 via a flexible hose 54 that can be expanded and contracted. Note that the hose 54 is not shown for the upper injection nozzle 53. The injection nozzle 53 is formed in a truncated cone shape or the like, and injects the liquid flow of the processing liquid S flowing through the circulation path 5 toward the contact portion 22 between the wire 2 and the workpiece W. The injection nozzle 53 is supported by the group rollers 34b and 34c similarly to the ultrasonic horn 12 of the first embodiment, and moves up and down integrally with the group rollers 34b and 34c. By the circulation path 5 and the injection nozzle 53, a machining waste removing unit that removes the machining waste attached to the wire 2 in the machining tank 4 is configured.

  According to this embodiment, it has the injection nozzle 53 (injection part) which inject | emits the liquid flow of the process liquid S toward the contact part 22 of the wire 2 and the workpiece W connected to the circulation path 5. Thereby, clogging of the processing waste into the clearance gap between the abrasive grains 21 of the wire 2 can be prevented. Further, the machining waste can be blown off from the cut portion of the workpiece W by the liquid flow of the machining liquid S injected from the injection nozzle 53. Accordingly, it is possible to more easily prevent the processing waste from staying at the cut portion of the workpiece W.

  Further, a filtration unit 6 for filtering the processing waste in the processing tank 4 is provided in the circulation path 5. Thereby, the processing waste in the processing liquid S can be easily removed. In addition, a liquid flow having a small amount of processing waste can be injected from the injection nozzle 53 while using the processing liquid S in the processing tank 4 without newly supplying the processing liquid S.

  In the second embodiment, an ultrasonic generator 10 similar to that in the first embodiment may be further provided. Thereby, the processing waste adhering to the wire 2 can be peeled off by ultrasonic waves, and the peeled processing waste can be blown off by the liquid flow of the processing liquid S injected from the injection nozzle 53. Therefore, the processing efficiency of the wire saw 1 can be further improved. In this case, the injection nozzle 53 may be disposed from above the wire 2 toward the contact portion 22, and the ultrasonic horn 12 may be disposed from below the wire 2 toward the contact portion 22. Thereby, the liquid flow of the processing liquid S can be sprayed along the processing groove G (refer FIG. 4) formed on the workpiece W by the wire 2, and the retention of the processing waste in a cutting location is made easier. Can be prevented.

  In this case, a deaeration unit 8 may be provided in the circulation path 5. Thereby, cavitation is generated in the machining liquid S, and the machining waste clogged in the gaps between the abrasive grains 21 on the wire 2 can be easily removed.

  Further, in the present embodiment, the workpiece W may move up and down to cut, and the injection nozzle 53 may be fixed in the processing tank 4.

  In the first embodiment and the second embodiment, the multi-wire saw in which the wire 2 between the globe rollers 34b and 34c is arranged at a predetermined cycle in the axial direction of the groove rollers 34b and 34c has been described as an example. Instead of the saw, a single wire saw in which the wire 2 between the globe rollers 34b and 34c is one may be used.

  In the first and second embodiments, the workpiece 2 is cut by moving the wire 2 from the upper side to the lower side of the workpiece W, but from the lower side to the upper side of the workpiece W. The workpiece W may be cut by moving the wire 2. In addition, when the workpiece W is moved, the workpiece W may be cut by moving the workpiece W from above to below.

  INDUSTRIAL APPLICATION This invention can be utilized for the wire saw and cutting method which cut | disconnect a workpiece by the reciprocating motion of a wire.

DESCRIPTION OF SYMBOLS 1 Wire saw 2 Wire 3 Wire reciprocation mechanism 4 Processing tank 5 Circulation path 5a 1st branch path 5b 2nd branch path 6 Filtration part 7 Pump 8 Deaeration part 10 Ultrasonic generator (machining waste removal part)
11 Drive unit 12 Ultrasonic horn (Ejection unit)
DESCRIPTION OF SYMBOLS 21 Abrasive grain 22 Contact part 31 Wire reel 32 Guide roller 33 Dancer roller 34 Groove roller 41 Installation part 51 Suction inlet 52a, 52b Outlet 53 Injection nozzle (injection part)
S Machining fluid W Workpiece

Claims (9)

In a wire saw that includes a processing tank in which a processing liquid is stored and a workpiece is immersed, and a wire having abrasive grains fixed on the surface thereof, and the workpiece is cut by reciprocating movement of the wire,
A wire saw characterized in that a machining waste removing unit for removing machining waste adhering to the wire in the processing tank is provided.   2. The wire saw according to claim 1, wherein the processing waste removing unit includes an injection unit that emits ultrasonic waves toward a contact portion between the wire and the workpiece.   The wire saw according to claim 2, further comprising a deaeration unit for deaerating the processing liquid in the processing tank.   The machining waste removing unit circulates the machining liquid in the machining tank, and the injection that is connected to the circulation path and injects the liquid flow of the machining liquid toward the contact portion between the wire and the workpiece. The wire saw according to claim 1, further comprising: a portion.   The wire saw according to claim 4, wherein a filtration part for filtering the processing waste in the processing tank is provided in the circulation path.   The wire saw according to any one of claims 2 to 5, wherein the wire saw includes a plurality of the injection parts and is arranged toward the contact part from above and below the wire.   The wire saw according to any one of claims 2 to 6, wherein the workpiece is cut by the vertical movement of the wire, and the injection portion moves up and down together with the wire in the processing tank.   The wire saw according to any one of claims 2 to 6, wherein the workpiece is cut by the vertical movement of the workpiece, and the injection portion is fixed in the processing tank. In a cutting method of storing a processing liquid and having a processing tank in which a workpiece is immersed, and a wire having abrasive grains fixed to the surface thereof, and cutting the workpiece by reciprocating movement of the wire,
A cutting method characterized by injecting a flow of ultrasonic waves or a processing liquid toward a contact portion between the wire and a workpiece, and removing processing waste adhering to the wire in the processing tank.

Images