JP2016148686A - Handler and component inspection apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a handler capable of restraining an increase in a load and complexity in a cooling circuit relating to control of a control circuit for controlling temperature of components when cooling a plurality of support parts for supporting a plurality of components, and to provide a component inspection apparatus including the handler.SOLUTION: A handler includes: a first cooling passage 67A and second cooling passages 67B-67D corresponding to storage pockets 17A-17D; a first supply passage 66A; second supply passages 66B-66D branched from the first supply passage 66A; a first throttle valve 73A for making larger a flow rate of a refrigerant in the second cooling passages 67B-67D than in the first cooling passage 67A; heaters 69A-69D for heating the respective storage pockets; temperature sensors 70A-70D for detecting temperature of the respective storage pockets; and a control device for controlling an opening/closing mode of a valve 63 and output of the heater 69A and controlling output of the heaters 69B-69D such that the detection values of the respective temperature sensors become target temperatures.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a handler that conveys a component, and more particularly, to a handler having a temperature adjusting unit that adjusts the temperature of a component, and a component inspection apparatus including the handler.

  In general, a component inspection apparatus that inspects electrical characteristics of an electronic component uses a handler that conveys an electronic component before or after an inspection between a tray on a base and an inspection socket. Some of such component inspection apparatuses inspect the electrical characteristics of the electronic component after setting the electronic component to a low temperature of 0 ° C. or lower.

  Conventionally, as a method of cooling an electronic component, for example, a technique as described in Patent Document 1 is known. In Patent Document 1, a tray having a plurality of support portions on which electronic components are supported is placed on a stage. Inside this stage is formed a cooling path for cooling the tray via the stage. And the electronic component is cooled via a tray by the refrigerant | coolant which cooled the compressed air being supplied to the cooling path of a stage from a refrigerant | coolant supply part.

JP 2004-347329 A

  By the way, when cooling a plurality of stages with the above-described configuration, it is necessary to provide a flow rate control valve for controlling the supply amount of the refrigerant according to the temperature for each stage. However, in such a configuration, the structure of the piping connecting the refrigerant supply source and each cooling path becomes complicated. In addition, since the state of each of the plurality of flow control valves is different for each stage, a large load is applied to the control unit that controls the opening and closing of the flow control valves.

  The present invention has been made in view of the above circumstances, and its purpose is to increase the load related to the control of the control unit that controls the temperature of the component in cooling the plurality of support units that support the plurality of components. It is an object of the present invention to provide a handler capable of suppressing the complexity of a cooling circuit and a component inspection apparatus including the handler.

  One aspect of the handler according to the present invention includes a first cooling path that cools the first support portion that supports the component with the coolant, and a second support portion that supports the component and cools the second support portion that is different from the first support portion with the coolant. Two cooling paths, a first heater for heating the first support part, a second heater for heating the second support part and different from the first heater, and a first for detecting the temperature of the first support part A temperature sensor; a second temperature sensor that detects the temperature of the second support portion and is different from the first temperature sensor; and a refrigerant supply portion that supplies refrigerant to the first and second cooling paths through a flow control valve. The first and second cooling paths are connected in parallel to the refrigerant supply unit, and the flow control valve is opened and closed according to the detection value of the first temperature sensor, and the first Change the output of the heater to detect the second temperature sensor. Depending on the value, a control unit for changing the output of the second heater.

  According to one aspect of the handler of the present invention, since the first cooling path and the second cooling path are connected in parallel to the refrigerant supply section, the refrigerant from the refrigerant supply section through the common flow control valve Will be supplied to the first and second cooling paths. As a result, complication of the cooling circuit can be suppressed as compared with the case where the cooling supply unit is individually provided for each of the first and second cooling paths.

  Further, the control unit changes the output of the flow control valve and the first heater according to the detection value of the first temperature sensor for the first support unit, whereas the control unit changes the output of the second temperature sensor for the second support unit. Only the output of the second heater is changed according to the detected value. As a result, it is possible to reduce the load on the control unit in controlling the temperature of the component. Therefore, the cooling circuit for cooling the components can be simplified, and the load on the control unit can be reduced in controlling the components to the target temperature.

In another aspect of the handler according to the present invention, the first cooling path is a channel having a smaller refrigerant flow rate than the second cooling path.
According to another aspect of the handler of the present invention, the flow rate of the refrigerant in the second cooling path is larger than the flow rate of the refrigerant in the first cooling path, so the second support portion is lower than the first support portion. It will be cooled to temperature. As a result, the first support part and the second support part are controlled to the same temperature while simplifying the cooling circuit and reducing the load on the control part, and the second support is performed at a temperature lower than the temperature of the first support part. These can be realized by controlling the unit.

Another aspect of the handler according to the present invention includes a throttle valve that throttles the flow rate of the refrigerant in the first cooling path.
According to another aspect of the handler of the present invention, since the flow rate of the refrigerant in the first cooling path is throttled by the first throttle valve, the flow path cross-sectional area of the first cooling path is greater than the flow path cross-sectional area of the second cooling path. Even if it is large, the flow rate of the refrigerant in the first cooling path can be made smaller than that in the second cooling path. Therefore, it is possible to increase the degree of freedom related to the shape and size of the first cooling path and the second cooling path as compared with a configuration without such a throttle valve.

  Another aspect of the handler according to the present invention includes: a storage container in which the support portion is stored; a first discharge path that communicates the outlet of the first cooling path and the storage container; and an outlet of the second cooling path. A second discharge path that communicates with the storage container.

  In a handler that cools parts to a temperature lower than room temperature, an atmosphere with a lower moisture content than the atmosphere, such as dry air or nitrogen gas, is used to avoid condensation and icing around the cooling path and support. Or around the support. According to another aspect of the handler according to the present invention, since the refrigerant having a low water content is supplied to the storage container in which the support portion is stored, the support portion and the parts supported by the support portion, etc. It is possible to suppress the occurrence of dew condensation at the site.

  In another aspect of the handler according to the present invention, a first check valve disposed in the first discharge path to suppress the inflow of gas into the first cooling path, and disposed in the second discharge path. A second check valve that suppresses inflow of gas into the second cooling path.

  According to another aspect of the handler of the present invention, the gas flow toward the first cooling path is suppressed in the first discharge path, and the gas flow toward the second cooling path is suppressed in the second discharge path. Therefore, the refrigerant that has passed through the first cooling path flows back through the first discharge path and flows back into the first cooling path, and the refrigerant that has passed through the second cooling path flows backward through the second discharge path to perform the second cooling. It can suppress flowing into the road again. As a result, the refrigerant whose temperature has increased by passing through the first cooling path or the atmosphere from the storage container flows back to the first cooling path, and the refrigerant or storage container whose temperature has increased by passing through the second cooling path. The backflow of the air from the back to the second cooling path is suppressed. Therefore, the cooling of the first support part by the refrigerant supplied to the first cooling path and the cooling of the second support part by the refrigerant supplied to the second cooling path can be effectively performed.

In another aspect of the handler according to the present invention, a portion of the first discharge path downstream of the second check valve is connected to a downstream side of the first check valve. The
According to another aspect of the handler of the present invention, the cooling circuit can be simplified on the refrigerant discharge side as compared with the case where the first and second discharge paths are individually connected to the storage container. . In addition, the refrigerant whose temperature has increased by passing through the first cooling path flows back into the second cooling path through the second discharge path, and the refrigerant whose temperature has increased by passing through the second cooling path. It also becomes possible to suppress the reverse flow of the first discharge path and the flow into the first cooling path.

  In another aspect of the handler according to the present invention, a temperature raising unit that raises the temperature of the refrigerant passing through the first discharge path is provided downstream of a portion of the first discharge path to which the second discharge path is connected. Prepare.

  According to another aspect of the handler of the present invention, the refrigerant whose temperature has been raised by the temperature raising unit is introduced into the storage container. As a result, since the temperature in the storage container becomes higher than that in the case where a refrigerant that has not been heated is introduced into the storage container, it is possible to suppress the occurrence of condensation in the storage container.

  According to another aspect of the handler of the present invention, a plurality of the second cooling passages are provided, and a first throttle valve for restricting a flow rate of the refrigerant in the first cooling passage, and each of the plurality of second cooling passages. And a second throttle valve that throttles the flow rate of the refrigerant in the second cooling path.

  According to another aspect of the handler of the present invention, even if the flow rates of the refrigerant in each of the plurality of second cooling paths are different from each other, the second throttle valve provided in each second cooling path causes the second It also becomes possible to suppress variation in the flow rate of the refrigerant between the cooling paths.

  One aspect of the component inspection apparatus according to the present invention includes a first cooling path that cools a first support portion that supports a component with a coolant, and a second support portion that supports the component and is different from the first support portion with a coolant. A second cooling path, a first heater for heating the first support part, a second heater different from the first heater by heating the second support part, and detecting a temperature of the first support part A first temperature sensor; a second temperature sensor different from the first temperature sensor by detecting the temperature of the second support; and a refrigerant supply unit for supplying refrigerant to the first and second cooling paths through a flow control valve And the first and second cooling paths are connected in parallel to the refrigerant supply unit, and the flow control valve is opened and closed according to a detection value of the first temperature sensor, and the The output of the first heater is changed, and the second temperature sensor Depending on the output value, a control unit for changing the output of the second heater.

  According to the aspect of the component inspection apparatus of the present invention, the cooling circuit for cooling the component can be simplified, and the load on the control unit can be reduced when controlling the temperature of the component.

The block diagram which shows the whole structure about one Embodiment of the handler and component inspection apparatus which actualized this invention. The schematic block diagram which showed typically the schematic structure of the cooling unit of the embodiment. The block diagram which shows a part of electrical structure in the handler of the embodiment. The graph which showed an example of the relationship between the detection value of a temperature sensor, the cooling output with respect to a storage pocket, and a heating output in the handler of the embodiment. (A)-(d) In the modification, the graph which showed an example of the relationship between the detected value of a temperature sensor, the cooling output with respect to a storage pocket, and a heating output. The figure which showed typically the support part in a modification.

  Hereinafter, an embodiment embodying a handler and a component inspection apparatus of the present invention will be described with reference to FIGS. The component inspection apparatus includes a handler that conveys an electronic component, and a tester that is an apparatus separate from the handler and inspects the electrical characteristics of the electronic component.

[Configuration of handler and parts inspection equipment]
First, the overall configuration of a handler and a component inspection apparatus including the handler will be described with reference to FIG. As shown in FIG. 1, the base 11 of the handler 10 is provided with a mounting surface 11 a on which various robots are mounted as an upper surface, and most of the mounting surface 11 a is covered with a cover member 12. In the conveyance space, which is a space surrounded by the cover member 12 and the mounting surface 11a, humidity and temperature are maintained at predetermined values by dry air supplied from the outside.

  On the mounting surface 11 a of the base 11, four conveyors C <b> 1 to C <b> 4 that convey the electronic component T between the outer side and the inner side of the cover member 12 are arranged. Among these, on one side of the X direction that is the arrangement direction of the conveyors, a supply conveyor C1 that conveys the electronic component T before inspection from the outside to the inside of the cover member 12 is laid, and on the other side in the X direction. Is provided with recovery conveyors C2, C3, C4 for conveying the inspected electronic component T from the inside to the outside of the cover member 12. In these conveyors C1-C4, the some electronic component T is conveyed in the state accommodated in the device trays C1a-C4a on each conveyor.

  In addition, a rectangular opening 13 penetrating the mounting surface 11a is formed in the mounting surface 11a substantially at the center of the conveyance space. A tester test head 14 is attached to the opening 13. The test head 14 has an inspection socket 14a into which the electronic component T is fitted on its upper surface, and is electrically connected to an inspection circuit in the tester for inspecting the electronic component T. In this tester, one stage is configured by the test head 14 and the inspection socket 14a.

  Furthermore, in the Y direction orthogonal to the X direction on the mounting surface 11a, the first shuttle 15 and the second shuttle 16 on which the electronic parts T before and after the inspection are temporarily placed on both sides of the opening 13 are provided. Are arranged. The shuttles 15 and 16 are formed so as to extend in the X direction, and a plurality of accommodation pockets 17 and 18 for accommodating the electronic components T before inspection are formed on the supply conveyor C1 side on the upper surface thereof. The supply shuttle plates 15a and 16a are fixed. On the other hand, recovery shuttle plates 15b and 16b for storing the electronic components T after inspection are fixed to the recovery conveyors C2 to C4 on the upper surfaces of the shuttles 15 and 16, respectively. The shuttles 15 and 16 are respectively connected to shuttle guides 15c and 16c that are fixed to the mounting surface 11a and extend in the X direction, and move forward and backward along the X direction. In the handler 10, one stage is constituted by the first shuttle 15 and the supply shuttle plate 15a, and one stage is constituted by the second shuttle 16 and the supply shuttle plate 16a. In FIG. 1, only a part of the accommodation pockets 17 and 18 is illustrated.

  On the mounting surface 11a of the base 11, a robot mechanism for carrying the electronic component T is mounted on each of the inspection socket 14a, the supply shuttle plates 15a and 16a, and the recovery shuttle plates 15b and 16b. The above-described shuttles 15 and 16 move along the shuttle guides 15c and 16c in accordance with the operations of the supply robot 20, the transport robot 30, and the collection robot 40 that constitute the robot mechanism.

  The supply robot 20 is a robot that transports the electronic component T before inspection from the device tray C1a on the supply conveyor C1 to the supply shuttle plates 15a and 16a on the shuttles 15 and 16, and the Y direction of the supply conveyor C1 Is arranged. Specifically, the supply robot 20 includes a supply-side fixed guide 21 which is a fixed shaft extending in the Y direction, and a supply-side movable guide 22 connected to the supply-side fixed guide 21 so as to be able to move forward and backward in the Y direction. And a supply hand unit 23 connected to the supply side movable guide 22 so as to be movable forward and backward in the X direction. Further, the supply hand unit 23 has a suction portion that sucks the electronic component T at the lower end thereof, and is connected to the supply-side movable guide 22 so as to be lowered and raised with respect to the mounting surface 11a. As the supply-side movable guide 22 and the supply hand unit 23 move, the electronic component T placed on the device tray C1a is sucked and conveyed by the suction portion of the supply hand unit 23, and the supply shuttle plate 15a. , 16a.

  The collection robot 40 is a robot that conveys the electronic components T after inspection from the collection shuttle plates 15b and 16b on the shuttles 15 and 16 to the device trays C2a to C4a on the collection conveyors C2 to C4. It arrange | positions in the Y direction of C2-C4. Specifically, the collection robot 40 is connected to the collection side fixed guide 41 that is a fixed shaft extending in the Y direction and the collection side fixed guide 41 so that the collection robot 40 can move forward and backward in the Y direction, like the supply robot 20 described above. The collection-side movable guide 42 and the collection-side hand unit 43 connected to the collection-side movable guide 42 so as to be able to move forward and backward in the X direction. The collection hand unit 43 has a suction part that sucks the electronic component T at the lower end thereof, and is connected to the collection-side movable guide 42 so as to be able to descend and rise with respect to the mounting surface 11a. Then, by the movement of the collection-side movable guide 42 and the collection hand unit 43, the electronic component T placed on the collection shuttle plates 15b and 16b is sucked and conveyed by the suction portion of the collection hand unit 43, and the device Placed on the trays C2a to C4a.

  The transfer robot 30 includes a transfer guide 31 that is a fixed shaft extending in the Y direction and is installed at a substantially center of the transfer space, and a first transfer unit that is connected to the transfer guide 31 so as to be able to move forward and backward in the Y direction. 32 and a second transport unit 33. Among these, the first transport unit 32 reciprocates between the first shuttle 15 and the test head 14, and the second transport unit 33 reciprocates between the second shuttle 16 and the test head 14. . Each of the first transport unit 32 and the second transport unit 33 has a suction portion that sucks the electronic component T at the lower end thereof, and is connected to the transport guide 31 so as to be able to descend and rise with respect to the mounting surface 11a. .

  Then, the first transport unit 32 sucks and transports the electronic component T before inspection placed on the supply shuttle plate 15 a on the first shuttle 15 to the suction portion and transports it to the inspection socket 14 a of the test head 14. Fit with a predetermined pressing force. A plurality of female terminals that can be engaged with the male terminals of the electronic component T are recessed in the bottom surface of the inspection socket 14a, and the male terminals of the electronic component T are fitted into the female terminals of the inspection socket 14a. Thus, the electrical characteristics of the electronic component T can be inspected by a tester. The tester receives an inspection start command from the handler 10 and starts an inspection of the electronic component T, and outputs a signal indicating the end of the inspection to the handler 10 together with the inspection result. When the inspection of the electronic component T is thus completed, the first transport unit 32 transports the electronic component T after the inspection from the inspection socket 14a of the test head 14 to the recovery shuttle plate 15b on the first shuttle 15.

  Similarly, the second transport unit 33 sucks and transports the electronic component T before inspection placed on the supply shuttle plate 16a on the second shuttle 16 to the suction portion, and transports the inspection socket 14a of the test head 14. Is fitted with a predetermined pressing force. When the inspection of the electronic component T by the tester is completed, the second transport unit 33 transports the electronic component T after the inspection from the inspection socket 14a of the test head 14 to the recovery shuttle plate 16b on the second shuttle 16. To do. The electronic parts T are transported alternately to the test head 14 by the first transport unit 32 and the second transport unit 33, and the electronic parts T are sequentially inspected by a tester.

  The supply hand unit 23, the recovery hand unit 43, the first transport unit 32, and the second transport unit 33 simultaneously hold and hold a plurality of electronic components. It is configured as an end effector capable of sucking and gripping the component T.

  Here, in the present embodiment, as a storage container having a room for storing the first shuttle 15, the supply shuttle plate 15a, and the recovery shuttle plate 15b around the first shuttle 15 in the transfer space. A storage box 50 is provided. Similarly, an inspection box 51 as an accommodation container having a room for accommodating the test head 14 and the inspection socket 14a around the opening 13 and the test head 14 attached to the opening 13 is isolated in the transfer space. Is arranged. Further, around the second shuttle 16, a storage box 52 is disposed as a storage container that is isolated within the transfer space and has a room for storing the second shuttle, the supply shuttle plate 16 a and the recovery shuttle plate 16 b. Has been. The electronic component T is cooled in each of the storage box 50, the inspection box 51, and the storage box 52.

[Configuration of cooling unit]
The configuration of the cooling unit that cools the electronic component T will be described with reference to FIG. The component inspection apparatus includes a cooling unit for cooling the electronic component T accommodated in each of the accommodation pockets 17 and 18 of the supply shuttle plates 15a and 16a, and an electronic component accommodated in the inspection socket 14a of the test head 14. Although a cooling unit for cooling T is mounted, in the present embodiment, description will be made using a cooling unit for cooling the electronic component T housed in the housing pocket 17 of the supply shuttle plate 15a.

  As shown in FIG. 2, one cooling unit includes a storage pocket 17A as a first support portion and a storage pocket 17B as a second support portion among the plurality of storage pockets 17 formed in the supply shuttle plate 15a. , 17C, 17D, the electronic component T accommodated in these four accommodation pockets is cooled. The cooling unit cools the storage pockets 17A to 17D so that the temperature is, for example, −45 ° C., which is a target temperature.

  In the cooling unit, the storage tank 55 that constitutes the refrigerant supply unit stores liquid nitrogen in which the nitrogen as the refrigerant is in a liquid phase. A first connection path 57 and a second connection path 58 constituting a refrigerant supply unit are connected to the storage tank 55 via a common path 56. These first and second connecting passages 57 and 58 are pipes having substantially the same cross-sectional area, and the first connecting passage 57 is connected to the first vaporization chamber 61 of the heat exchanger 60. The second connection path 58 is connected to the second vaporization chamber 62 of the heat exchanger 60. A supply valve 63 (hereinafter simply referred to as a valve 63) is disposed in the first connection path 57, and the valve 63 opens and closes the first connection path 57 to supply liquid nitrogen to the first vaporization chamber 61. Control the supply amount. A supply valve 64 is disposed in the second connection path 58, and the supply valve 64 opens and closes the second connection path 58 to control the supply amount of liquid nitrogen to the second vaporization chamber 62.

  The heat exchanger 60 is a so-called plate heat exchanger, and is a heat exchanger capable of exchanging heat between the fluid flowing in the first vaporization chamber 61 and the fluid flowing in the second vaporization chamber 62. The heat exchanger 60 is connected to first and second connecting passages 57 and 58 so that the fluid flows in the heat exchanger 60 are parallel flows. The first and second vaporization chambers 61 and 62 are formed to have a flow passage cross-sectional area larger than the flow passage cross-sectional area of the first and second connection passages 57 and 58. The liquid nitrogen that has flowed into the first and second vaporization chambers 61 and 62 is vaporized and expanded inside the vaporization container having a temperature higher than the boiling point of the liquid nitrogen, and is nitrogen having a temperature lower than the set temperature of the control device, which is the target temperature. It becomes gas. The refrigerant that has become nitrogen gas in the first vaporization chamber 61 is supplied to the first supply path 66A of the cooling unit, and the refrigerant that has become nitrogen gas in the second vaporization chamber 62 is the first supply of the other cooling units. Supplied to the road.

  The first supply path 66A is connected to a first cooling path 67A formed in the first shuttle 15 so as to pass directly under the accommodation pocket 17A. In addition, three second supply paths 66B, 66C, 66D branched in the branch portion DP of the first supply path 66A are connected in parallel to the first supply path 66A. Each of these second supply paths 66B to 66D is connected to second cooling paths 67B, 67C and 67D formed in the first shuttle 15 so as to pass directly under the storage pockets 17B to 17D. That is, the first cooling path 67A and the second cooling paths 67B to 67D are connected in parallel to each other.

  In addition, heating heaters 69A, 69B, 69C, and 69D (hereinafter simply referred to as heaters) are provided in the first shuttle 15 immediately below the storage pockets 17A to 17D. Each of the heaters 69A to 69D heats the accommodation pockets 17A to 17D. Each of the storage pockets 17A to 17D is provided with temperature sensors 70A, 70B, 70C, and 70D that detect the temperatures of the storage pockets 17A to 17D. The accommodation pockets 17A to 17D are controlled to the target temperature by cooperation of cooling with nitrogen gas flowing through the cooling paths 67A to 67D and heating by the heaters 69A to 69D.

  On the other hand, a first discharge path 71A is connected to the discharge port 68A of the first cooling path 67A. The first discharge path 71A is connected to the storage box 50, and introduces nitrogen gas discharged from the first cooling path 67A into the storage box 50. In addition, second discharge paths 71B, 71C, and 71D having a channel cross-sectional area equal to the first discharge path 71A are connected to the discharge ports 68B, 68C, and 68D of the second cooling paths 67B to 67D, respectively. The second discharge paths 71B to 71D are connected to the first discharge path 71A at the junction JP with the first discharge path 71A, and the nitrogen gas discharged from the second cooling paths 67B to 67D is the first discharge path. Discharge to 71A. That is, nitrogen gas discharged from the cooling paths 67 </ b> A to 67 </ b> D is introduced into the storage box 50.

  In the first discharge path 71A, a first throttle valve 73A that restricts the flow rate of nitrogen gas in the first cooling path 67A by changing the flow passage cross-sectional area of the first discharge path 71A upstream of the junction portion JP. It is arranged. Similarly, in each of the second discharge passages 71B to 71D, the flow passage cross-sectional area of the second discharge passages 71B to 71D is changed upstream of the junction portion JP, so that the nitrogen in the second supply passages 66B to 66D is changed. Second throttle valves 73B, 73C, 73D for restricting the flow rate of the gas are respectively provided.

  Further, the first reverse passage 71A prevents the gas flowing backward through the first discharge passage 71A from flowing into the first cooling passage 67A between the first throttle valve 73A and the junction portion JP. A stop valve 74A is provided. Similarly, in each of the second discharge passages 71B to 71D, the gas that flows backward through the second discharge passages 71B to 71D is interposed between the junction portion JP and the second throttle valves 73B to 73D. Second check valves 74B, 74C, and 74D for preventing the flow into 67D are provided.

  The first discharge path 71A is provided with a heat exchanger 75 as a temperature raising part for raising the temperature of the nitrogen gas flowing through the first discharge path 71A to room temperature downstream of the junction part JP. Yes. The heat exchanger 75 is a so-called plate heat exchanger, in which nitrogen gas flowing through the first discharge path 71A flows into the low temperature fluid chamber 76, and dry air generated by the dry air supply source 77 flows into the high temperature fluid chamber 78. To do. These nitrogen gas and dry air circulate in the heat exchanger 75 so as to be in parallel flow. The dry air supply source 77 is constituted by a compressor, a dryer, and the like. The dry air from the dry air supply source 77 is controlled in amount supplied to the heat exchanger 75 by a valve 79 and higher than normal temperature by an air heater 80. Raised to temperature. The nitrogen gas and the dry air are brought to room temperature by heat exchange in the heat exchanger 75 and then introduced into the storage box 50. In addition, a third check valve 81 that prevents the gas flowing backward through the first discharge passage 71A from flowing into the low temperature fluid chamber 76 is disposed in the first discharge passage 71A downstream of the heat exchanger 75. It is installed.

[Electric configuration of handler and parts inspection equipment]
Next, the electrical configuration of the handler and the component inspection apparatus will be described with reference to FIG. 3 focusing on the electrical configuration of the handler 10. The control device 85 that constitutes a control unit provided in the handler 10 is mainly configured by a microcomputer having a central processing unit (CPU), a nonvolatile memory (ROM), and a volatile memory (RAM). Based on the various data and programs stored in the ROM and RAM, the control device 85 performs various controls related to the handler 10 including the operations of the robot mechanisms such as the supply robot 20, the transfer robot 30, and the collection robot 40 described above. It is conducted comprehensively. In addition, a tester 90 is electrically connected to the control device 85, and a signal indicating the start and end of the inspection of the electronic component T is input to and output from the tester 90. Here, the aspect of the control related to the cooling unit that cools the accommodation pockets 17A to 17D of the supply shuttle plate 15a in the control by the control device 85 will be described.

As shown in FIG. 3, the controller 85 is electrically connected to a cooling unit drive unit 86 having a valve drive unit 86a, a throttle valve drive unit 86b, and a heater drive unit 86c.
The valve drive unit 86a is sufficient to cool the temperatures of the four storage pockets 17A to 17D to the target temperature based on the deviation between the target temperature input from the control device 85 and the temperature input from the temperature sensor 70A. The opening / closing time of the valve 63 is set so that a sufficient amount of nitrogen gas is supplied to the first supply path 66A, and a signal indicating the opening / closing time is output to the valve 63. Further, when the detected value of the temperature sensor 70A is lower than the low temperature side allowable temperature Tmin, which is a temperature lower than the target temperature, the valve driving unit 86a gives a signal to the valve 63 indicating that the valve 63 is maintained in the closed state. Output. The valve 63 adjusts the flow rate of the refrigerant in the first supply path 66A by opening and closing according to the input signal.

  The throttle valve driving unit 86b outputs, to the first throttle valve 73A, an opening degree signal that reduces the flow path cross-sectional area of the first discharge path 71A with respect to the first throttle valve 73A. The opening signal is a signal indicating an opening determined in advance based on the target temperature input from the control device 85. In addition, the throttle valve driving unit 86b generates an opening signal that makes the flow passage cross-sectional area in each of the second discharge paths 71B to 71D larger than that of the first discharge path 71A based on the opening signal of the first throttle valve 73A. It outputs to each 2nd throttle valve 73B-73D. In addition, the throttle valve drive part 86b of this embodiment can also output the opening degree signal which shows the maximum opening degree with respect to each 2nd throttle valve 73B-73D.

  Based on the target temperature input from the control device 85 and the temperatures input from the temperature sensors 70A to 70D, the heater driving unit 86c is configured so that each heater pocket 17A to 17D has a target temperature. While generating a drive current with respect to 69A-69D, this drive current is output to each heater 69A-69D, and each heater 69A-69D is driven.

  Here, the flow rate of the nitrogen gas in the first cooling passage 67A is throttled by the first throttle valve 73A as compared with the flow rates of the nitrogen gas in the second cooling passages 67B to 67D. Therefore, for example, when the detected values of the temperature sensors 70A and 70B are both the target temperature, the temperature of the accommodation pocket 17A is maintained at the target temperature even if the drive power of the same magnitude is output to the heaters 69A and 69B. However, the temperature of the storage pocket 17B is lower than the target temperature. Therefore, the heater drive unit 86c of the present embodiment is based on the deviation between the target temperature input from the control device 85 and the temperature input from each of the temperature sensors 70B to 70D, rather than the driving power of the heater 69A at the same deviation. Large driving power can be output to the heaters 69B to 69D.

  In addition, when the detected value of the temperature sensor is higher than the high temperature side allowable temperature Tmax, which is a temperature higher than the target temperature, the heater driving unit 86c is configured to provide a heater corresponding to the temperature sensor in order to prioritize cooling of the accommodation pocket. Is stopped.

  As with the cooling unit driving unit 86, the cooling unit corresponding to the other storage pocket 17 of the supply shuttle plate 15a, the storage pocket 18 of the supply shuttle plate 16a, and the inspection socket 14a of the test head 14 is also used. A cooling unit driving unit is provided for each cooling unit. That is, the control device 85 controls each cooling unit in an independent manner.

[Action]
Next, the operation of the handler and component inspection apparatus of this embodiment will be described.
In the handler and component inspection device of the present embodiment, in the cooling unit, liquid nitrogen supplied from the storage tank 55 to the first connection path 57 eventually flows into the first vaporization chamber 61 of the heat exchanger 60. The liquid nitrogen that has flowed into the first vaporization chamber 61 is vaporized and expanded inside the vaporization container whose temperature is higher than the boiling point of the liquid nitrogen, and is transferred to nitrogen gas. Then, the nitrogen gas flows into the first supply path 66A.

  The nitrogen gas that has flowed into the first supply path 66A is branched into the first supply path 66A and the second supply paths 66B to 66D at the branch portion DP. At this time, in the first cooling path 67A, the flow rate of the nitrogen gas is reduced by opening degree control of the first throttle valve 73A based on the target temperature. On the other hand, in each of the second cooling paths 67B to 67D, the second throttle valves 73B to 73D are always controlled to have an opening larger than the opening of the first throttle valve 73A, and the second cooling paths 67B to 67D. The flow rate of nitrogen gas at is not reduced compared to the first cooling passage 67A. Therefore, the flow rate of nitrogen gas in each of the second cooling passages 67B to 67D is larger than the flow rate of nitrogen gas in the first cooling passage 67A. Thereby, the accommodation pockets 17B to 17D are cooled more excessively than the accommodation pocket 17A with respect to the target temperature.

  Then, the control device 85 controls the opening / closing mode of the valve 63 and the driving power output to the heater 69A so that the temperature input from the temperature sensor 70A becomes the target temperature for the accommodation pocket 17A. Further, the control device 85 controls the drive power output to the heaters 69B to 69D so that the temperatures input from the temperature sensors 70B to 70D become the target temperatures for the storage pockets 17B to 17D. That is, the control device 85 outputs driving power larger than that of the heater 69A to the heaters 69B to 69D. Thereby, each accommodation pocket 17A-17D is controlled by target temperature, and the electronic component T accommodated in this accommodation pocket 17A-17D is controlled by target temperature.

  That is, as shown in FIG. 4, the storage pockets 17B to 17D are in a state of being cooled under a cooling output 92 higher than the cooling output 91 for the storage pocket 17A, and heated to the storage pocket 17A. Heating is performed under a heating output 94 higher than the output 93. Therefore, for example, when the detection values of the temperature sensors 70A and 70B are the same value and higher than the high temperature side allowable temperature Tmax, the cooling output 92 for the storage pocket 17B is higher than the cooling output 91 for the storage pocket 17A. Therefore, the storage pocket 17B reaches the target temperature Tt earlier than the storage pocket 17A. That is, the responsiveness with respect to cooling of the storage pockets 17B to 17D can be made higher than that of the storage pocket 17A.

  For example, when the detection values of the temperature sensors 70A and 70B are the same value and lower than the low temperature side allowable temperature Tmin, the heating output 94 for the accommodation pocket 17B is higher than the heating output 93 for the accommodation pocket 17A. Therefore, the storage pocket 17B reaches the target temperature Tt earlier than the storage pocket 17A. That is, it is possible to increase the responsiveness of the storage pockets 17B to 17D to heating compared to the storage pocket 17A.

  Nitrogen gas discharged from each of the cooling paths 67A to 67D flows into the low temperature fluid chamber 76 of the heat exchanger 75 through the first discharge path 71A. The dry air heated to a temperature higher than the normal temperature by the air heater 80 flows into the high temperature fluid chamber 78 of the heat exchanger 75. The nitrogen gas is heated to about room temperature by heat exchange with dry air in the heat exchanger 75 and then introduced into the storage box 50. Further, the dry air is cooled to about room temperature by heat exchange with nitrogen gas, and then introduced into the storage box 50.

  The nitrogen gas is vaporized liquid nitrogen, has a moisture content close to 0, and the dry air has a lower moisture content than the air around the handler. Therefore, by introducing these nitrogen gas and dry air into the storage box 50, the storage box 50 is filled with a gas having a low water content. That is, it is possible to suppress the occurrence of condensation in the storage box 50. As a result, it is possible to suppress the occurrence of dew condensation on the supply shuttle plate 15a and the electronic component T accommodated in the supply shuttle plate 15a and the failure of the electronic component T.

  Further, the fact that nitrogen gas and dry air are introduced into the storage box 50 means that the moisture content of the gas filling the storage box 50 is not zero. Therefore, if the nitrogen gas discharged from each cooling path is introduced into the storage box 50 without increasing the temperature, the temperature in the storage box 50 may be lower than the dew point at that time. In the present embodiment, since the nitrogen gas heated to about room temperature by the heat exchanger 75 is introduced into the storage box 50, the temperature in the storage box 50 is unlikely to be below the dew point at that time. As a result, with respect to the recovery shuttle plate 15b that is at a higher temperature than the supply shuttle plate 15a, condensation occurs on the recovery shuttle plate 15b and the electronic component T accommodated in the recovery shuttle plate 15b. It is possible to suppress the failure of the component T.

  Nitrogen gas for cooling the storage pockets 17A to 17D and dry air for raising the temperature of the nitrogen gas to about room temperature are used as a gas for preventing condensation in the storage box 50. For this reason, it is possible to simplify the configuration of the cooling unit and to reduce the amount of gas to be used, as compared with a case where a gas for preventing condensation is separately prepared.

  On the other hand, in the first discharge path 71A, a first check valve 74A is arranged on the upstream side of the junction part JP, and each of the second discharge paths 71B to 71D is also upstream of the junction part JP. Second check valves 74B to 74D are provided. Therefore, for example, the nitrogen gas discharged from the second cooling path 67B flows backward into the first cooling path 71A and flows into the first cooling path 67A. For example, the nitrogen gas discharged from the second cooling path 67B is second discharged. It is possible to suppress the reverse flow of the path 71C and the flow into the second cooling path 67C. As a result, the nitrogen gas that has passed through each of the second cooling paths 67B to 67D is prevented from flowing into the first cooling path 67A, so that it is accommodated by the nitrogen gas supplied to the first cooling path 67A. The pocket 17A can be cooled effectively. Further, since the inflow of nitrogen gas that has passed through the other cooling paths is suppressed in each of the second cooling paths 67B to 67D, each of the storage pockets 17B to 17D is maintained in a state of being cooled excessively than the target temperature. In addition, each of the storage pockets 17B to 17D can be effectively cooled.

  Further, a third check valve 81 is disposed in the first discharge path 71A on the downstream side of the heat exchanger 75. Therefore, during the period when the valve 63 is controlled to be in the closed state, the storage box is provided to the heat exchanger 75, the first cooling path 67A, the second cooling paths 67B to 67D, and the heat exchanger 60 through the first discharge path 71A. It is possible to prevent a gas having a moisture content higher than that of nitrogen gas from flowing in from 50. Moreover, the inflow of the gas into the first cooling path 67A, the second cooling paths 67B to 67D, and the heat exchanger 60 can be suppressed by the first check valve 74A and the second check valves 74B to 74D. As a result, when the valve 63 is controlled to be in the open state again, it is possible to suppress the occurrence of dew condensation in the refrigerant flow path such as the heat exchanger 75, the cooling paths 67A to 67D, and the heat exchanger 60.

As described above, according to the handler and the component inspection apparatus of the present embodiment, the effects listed below can be obtained.
(1) When the four storage pockets 17A to 17D are set to the target temperature, nitrogen gas is supplied from the first supply path 66A to the first cooling path 67A, and the first supply is supplied to the second cooling paths 67B to 67D. Nitrogen gas is supplied from the second supply paths 66B to 66D branched from the path 66A. Further, the flow rate of nitrogen gas in the first cooling passage 67A is throttled by the first throttle valve 73A, so that the flow rate of nitrogen gas in each of the second cooling passages 67B to 67D is larger than that in the first cooling passage 67A. For the storage pocket 17A, the opening and closing of the valve 63 and the output of the heater 69A are controlled so that the detected value of the temperature sensor 70A becomes the target temperature. For each of the storage pockets 17B to 17D, the temperature sensors 70B to 70D are controlled. Only the outputs of the heaters 69B to 69D are controlled so that the detected value becomes the target temperature. Therefore, the cooling circuit for cooling the storage pockets 17A to 17D can be simplified, and the load on the control device 85 can be reduced in controlling the storage pockets 17A to 17D to the target temperature.

  (2) Further, since the flow rate of nitrogen gas in the first cooling passage 67A is throttled by the first throttle valve 73A, for example, the flow passage cross-sectional area of the first cooling passage 67A is the flow passage break of the second cooling passages 67B to 67D. Even when the area is larger than the area, the flow rate of the nitrogen gas in the first cooling passage 67A can be made smaller than the flow rate of the nitrogen gas in the second cooling passages 67B to 67D. Therefore, the degree of freedom related to the shape and size of the first cooling passage 67A and the second cooling passages 67B to 67D can be increased as compared with the configuration without the first throttle valve 73A.

  (3) Moreover, since the cooling output with respect to the accommodation pockets 17B to 17D is higher than that of the accommodation pocket 17A, the responsiveness to the cooling of the accommodation pockets 17B to 17D can be enhanced more than the accommodation pocket 17A.

  (4) Moreover, since the heating output with respect to accommodation pockets 17B-17D is higher than accommodation pocket 17A, the responsiveness with respect to the heating of accommodation pockets 17B-17D can be improved rather than accommodation pocket 17A.

  (5) Since the nitrogen gas used for cooling the storage pockets 17A to 17D is introduced into the storage box 50, the moisture content of the gas that fills the storage box 50 can be reduced. As a result, it is possible to suppress the occurrence of condensation in the storage box 50.

  (6) Since the first check valve 74A is disposed in the first discharge path 71A on the upstream side of the junction JP with the second discharge paths 71B to 71D, it is supplied to the first cooling path 67A. The accommodation pocket 17A can be effectively cooled by the nitrogen gas.

  (7) Since each of the second discharge passages 71B to 71D is provided with the second check valves 74B to 74D on the upstream side of the joining portion JP with the first discharge passage 71A, The accommodation pockets 17B to 17D can be effectively cooled by the nitrogen gas supplied to the cooling paths 67B to 67D.

  (8) Since the first check valve 74A and the second check valves 74B to 74D inhibit the gas other than the nitrogen gas from each supply path from flowing into the respective cooling paths from the storage box 50, each cooling path It is possible to suppress the occurrence of condensation in.

(9) Since the second discharge paths 71B to 71D are connected to the first discharge path 71A, the cooling circuit can be simplified.
(10) The first exhaust path 71A is provided with a heat exchanger 75 that raises the temperature of the nitrogen gas discharged from the first cooling path 67A and the second cooling paths 67B to 67D to about room temperature. As a result, since the temperature in the storage box 50 is suppressed to be equal to or lower than the dew point, the occurrence of dew condensation in the storage box 50 can be suppressed.

  (11) Nitrogen gas for cooling the storage pockets 17A to 17D and dry air for raising the temperature of the nitrogen gas to about room temperature are used as a gas for preventing condensation in the storage box 50. Therefore, it is possible to reduce the amount of gas used for suppressing the occurrence of condensation in the storage box 50.

  (12) Since the third check valve 81 is disposed on the downstream side of the heat exchanger 75, in the heat exchanger 60, the first cooling path 67A, the second cooling paths 67B to 67D, and the heat exchanger 75, It is possible to suppress the occurrence of condensation.

  (13) The heat exchanger 75 is disposed on the downstream side of the joining portion JP to which the second discharge passages 71B to 71D are connected in the first discharge passage 71A. Therefore, the number of installed heat exchangers 75 can be reduced as compared with the case where such heat exchangers 75 are disposed in the discharge paths 71A to 71D.

  (14) Nitrogen gas and dry air are in parallel flow in the heat exchanger 75. Therefore, the temperature difference between the nitrogen gas and the dry air immediately after passing through the heat exchanger 75 can be reduced as compared with the case where the nitrogen gas and the dry air circulate so as to be opposed to each other in the heat exchanger 75. . As a result, the temperature distribution in the storage box 50 into which these nitrogen gas and dry air are introduced can be made uniform.

In addition, said embodiment can also be suitably changed and implemented as follows.
The control device 85 opens the first throttle valve 73A and opens the second throttle valves 73B to 73D so that the refrigerant flow rate in the second cooling paths 67B to 67D is larger than that of the first cooling path 67A. The degree should be controlled.

  For example, when there is a variation in the refrigerant flow rate between the second cooling paths 67B to 67D, the controller 85 causes the variation based on, for example, the detected values of the temperature sensors 70B to 70D and the magnitude of the driving power of the heaters 69B to 69D. Can be detected to control the opening degree of each of the second throttle valves 73B to 73D. As a result, the flow rate of the refrigerant in each of the second cooling paths 67B to 67D can be made uniform.

  Further, for example, the flow rate of the refrigerant in the second cooling path 67B is set to another second cooling path while maintaining the state where the flow rate of the refrigerant in each of the second cooling paths 67B to 67D is higher than the flow rate of the refrigerant in the first cooling path 67A. More than 67C and 67D. As a result, the target temperature for the storage pocket 17B can be set to a temperature lower than that of the storage pocket 17A and the storage pockets 17C and 17D. That is, in the temperature range lower than the target temperature of the storage pocket 17A, the degree of freedom regarding the target temperature of the storage pockets 17B to 17D can be increased.

  -The opening degree of the first throttle valve 73A and the opening degree of each of the second throttle valves 73B to 73D are adjusted in advance so that the flow rate of the refrigerant in each of the second cooling paths 67B to 67D is larger than that of the first cooling path 67A. You may keep it. According to such a configuration, it is possible to omit the throttle valve driving unit 86b of the control device 85, so that the load on the control device 85 can be further reduced.

  -The structure by which each 2nd throttle valve 73B-73D was omitted may be sufficient. With such a configuration, the cooling circuit can be simplified and the load on the control device 85 can be further reduced.

  -The structure by which the heat exchanger 75 which heats up the nitrogen gas discharged | emitted from each cooling path 67A-67D is omitted may be sufficient. At this time, although the temperature in the storage box 50 is lowered, since nitrogen gas having a moisture content close to 0 is introduced into the storage box 50, it is possible to suppress the occurrence of condensation in the storage box 50.

-Moreover, the heat exchanger 75 may be arrange | positioned by each of discharge path 71A-71D in the upstream of the junction part JP of 71 A of 1st discharge paths and the 2nd discharge paths 71B-71D.
-The refrigerant | coolant discharged | emitted from each cooling path 67A-67D may be directly heated not only with the heat exchanger 75 but with an air heater etc., for example.

  Each discharge path 71 </ b> A to 71 </ b> D may be individually connected to the storage box 50. In this case, the heat exchanger 75 and the third check valve 81 may be disposed in each of the discharge paths 71A to 71D.

  In the first discharge path 71A, the third check valve 81 may be omitted. Even in such a configuration, the first check valve 74A is disposed in the first discharge path 71A, and the second check valves 74B to 74D are disposed in the second discharge paths 71B to 71D. It can suppress that the air which flowed back through the paths 71A-71D flows in into each cooling path 67A-67D and the heat exchanger 60. FIG.

  The first check valve 74A in the first discharge path 71A may be omitted, or at least one of the second check valves 74B to 74D in the second discharge paths 71B to 71D may be omitted. It may be a configuration. That is, a configuration in which at least one of the cooling paths 67A to 67D and the storage box 50 are always in communication may be employed.

-The nitrogen gas discharged | emitted from each cooling path 67A-67D may be discharged | emitted not only to the storage box 50 but the inside of the cover member 12, and may be discharged | emitted in air | atmosphere.
The first cooling path 67A and the second cooling paths 67B to 67D are formed in the first shuttle 15, but for example, the first cooling path 67A and the second cooling path 67B are formed in the first shuttle 15, and the second The cooling paths 67C and 67D may be formed in the second shuttle 16. At that time, it is preferable that the nitrogen gas discharged from the second cooling passages 67 </ b> C and 67 </ b> D is introduced into the storage box 52.

  Further, the first cooling path 67A and the second cooling path 67B may be formed in the first shuttle 15, and the second cooling paths 67C and 67D may be formed in the test head 14. At that time, the nitrogen gas discharged from the second cooling paths 67C and 67D is preferably introduced into the inspection box 51.

  When the control device 85 cools each of the storage pockets 17A to 17D from the normal temperature to the target temperature, the opening degree of each of the throttle valves 73A to 73D is set to the maximum opening degree until the detection value of the temperature sensor 70A reaches the target temperature. The opening of the first throttle valve 73A may be reduced after the detected value of the temperature sensor 70A reaches the target temperature. According to such a configuration, it is possible to shorten the time until each of the accommodation pockets 17A to 17D reaches the target temperature from the normal temperature.

  As a mode for controlling the flow rate of the refrigerant in the first cooling passage 67A, the control device 85 controls the valve 63 with a predetermined opening / closing time based on the target temperature, and the first throttle valve based on the detection value of the temperature sensor 70A You may make it control the opening degree of 73A.

The first throttle valve 73A may be disposed on the downstream side of the branch portion DP in the first supply path 66A.
Further, the flow rate of the refrigerant in the first cooling passage 67A is reduced by locally or entirely making the flow passage cross-sectional area of the first supply passage 66A smaller than the flow passage cross-sectional areas of the second supply passages 66B to 66D. You may make it make it smaller than 2nd cooling path 67B-67D. The same can be said for the upstream portion of the joining portion JP in the first discharge path 71A and the second discharge paths 71B to 71D.

  -The 2nd supply path branched from the 1st supply path is not restricted to three, and may be one and may be four or more. In this case, it is preferable that sufficient refrigerant is supplied from the refrigerant supply unit to cool all the accommodation pockets to a temperature lower than the target temperature.

  The storage tank 55 may be provided outside the handler 10. In this case, for example, a connection part provided in the common path 56 of the handler 10 and connected to a pipe that leads to the storage tank 55 constitutes a part of the refrigerant supply part.

  -The refrigerant | coolant which cools each accommodation pocket may be not only nitrogen but oxygen and helium, for example, the dry air cooled to the temperature lower than target temperature using nitrogen gas etc. may be sufficient as it.

  In the above embodiment, the heaters 69B to 69D are driven with a driving power larger than the driving power of the heater 69A. For example, the heaters 69B to 69D may be driven with the same driving power as that of the heater 69A in a range where the detection values of the temperature sensors 70B to 70D are lower than the low temperature side allowable temperature Tmin. Alternatively, it may be driven with a driving power smaller than that of the heater 69A.

  The configuration may be such that the flow rate of the refrigerant in the first cooling path 67A is smaller than the flow rate of the refrigerant in the second cooling paths 67B to 67D. According to such a configuration, the responsiveness to cooling of the accommodation pocket 17A and the responsiveness to heating can be enhanced as compared with the accommodation pockets 17B to 17D.

  The cooling unit may have a configuration in which the refrigerant flow rates in the cooling paths 67A to 67D are substantially equal. Here, a sufficient amount of nitrogen gas is supplied to the first supply path 66A to cool the temperatures of the four storage pockets 17A to 17D to the target temperature based on the target temperature and the detection value of the temperature sensor 70A. It is possible to supply. Therefore, also in the cooling unit configured as described above, the accommodation pocket is controlled to the target temperature by the cooperation of the cooling by the refrigerant and the heating by the heater. That is, the control device 85 controls the supply valve 63 and the heater 69A according to the detection value of the temperature sensor 70A, and controls only the outputs of the heaters 69B to 69D according to the detection values of the temperature sensors 70B to 70D. Thus, each of the storage pockets 17A to 17D is controlled to the target temperature. According to such a configuration, it is possible to omit the throttle valves 73A to 73D and omit the throttle valve driving unit 86b. Therefore, the cooling circuit can be further simplified and the load on the control device 85 can be reduced.

  For example, when the detected value of the temperature sensor 70B is a temperature Ta higher than the target temperature Tt, the flow rate of the refrigerant in the second cooling path 67B is a flow rate suitable for maintaining the accommodation pocket 17B at the target temperature Tt. More is preferable. Further, when the detected value of the temperature sensor 70B is a temperature Tb lower than the target temperature Tt, the flow rate of the refrigerant in the second cooling path 67B is less than the flow rate suitable for maintaining the accommodation pocket 17B at the target temperature Tt. It is preferable.

  However, in the cooling unit configured as described above, when the detected value of the temperature sensor 70A is the target temperature Tt, the temperature of the storage pocket 17A is maintained at the target temperature Tt in the first cooling path 67A of the storage pocket 17A. A refrigerant having a flow rate suitable for the above is supplied. Regardless of the detection value of the temperature sensor 70B, the second cooling passage 67B is also supplied with a refrigerant having a flow rate suitable for maintaining the accommodation pocket 17B at the target temperature Tt.

  Therefore, when the detected value of the temperature sensor 70A is the target temperature Tt and the detected value of the temperature sensor 70B is a temperature Ta higher than the target temperature Tt, the driving power of the heater 69B is the detected value of the temperature sensor 70A is the temperature Ta. If it becomes the same magnitude as the driving power of the heater 69A at that time, the responsiveness to the cooling of the accommodation pocket 17B will be lowered. Further, when the detection value of the temperature sensor 70A is the target temperature Tt and the detection value of the temperature sensor 70B is the temperature Tb lower than the target temperature Tt, the driving power of the heater 69B is equal to the detection value of the temperature sensor 70A. If it becomes the same magnitude as the driving power of the heater 69A at that time, the response to the heating of the accommodation pocket 17B will be reduced.

  For these reasons, in the cooling unit configured as described above, the control device 85 determines the drive power of the heaters 69B to 69D at a predetermined temperature based on, for example, the deviation between the detected value of the temperature sensor 70A and the detected values of the temperature sensors 70B to 70D. It is preferable that the power can be controlled to be different from the driving power of the heater 69A at the predetermined temperature.

  Further, in the cooling unit having the above-described configuration, as shown in FIG. 5A, an overlap amount W that is a range in which both the cooling output 96 and the heating output 97 are output with respect to the target temperature Tt. Adjust it.

  That is, as shown in FIG. 5B, by increasing the overlap amount W with respect to the target temperature Tt, the cooling output 96 and the heating output 97 required to control the accommodation pocket to the target temperature are increased. Become. Therefore, for example, when the temperature of the storage pocket that has been maintained at the target temperature rises, it is possible to cool the storage pocket under a high cooling output, thereby improving the response to the cooling of the storage pocket. Can do. In addition, for example, when the temperature of the storage pocket that has been maintained at the target temperature decreases, the storage pocket can be heated under a high heating output, so that the responsiveness to heating of each storage pocket is increased. be able to. Accordingly, by increasing the overlap amount W, it is possible to improve the response to cooling of the storage pocket and the response to heating, and to increase the accuracy when controlling the temperature of the storage pocket to the target temperature. be able to.

  On the other hand, as shown in FIG. 5C, the overlap amount W with respect to the target temperature Tt may be set to zero. Further, as shown in FIG. 5D, a dead band where the overlap amount W with respect to the target temperature Tt is a negative value, that is, the cooling output 96 and the heating output 97 are not output may be set. According to such a configuration, in controlling the temperature of the accommodation pocket to the target temperature, it is possible to suppress the amount of refrigerant consumed and the amount of power consumed by the heater.

  In the above embodiment, the stage is configured by the test head 14 attached to the opening 13 penetrating the base 11 and the inspection socket 14 a on the upper surface of the test head 14. Instead, as shown in FIG. 6, a pedestal 103 including a cooling path 100 through which nitrogen gas flows, a heater 101, and an accommodating portion 102 in which an inspection socket 14 a is accommodated is installed on the base 11. The pedestal 103 may be a stage. In this case, the pedestal 103 serves as a support portion, and the inspection socket 14 a is mounted on the handler 10 by being accommodated in the accommodating portion 102 of the pedestal 103. And the electronic component accommodated in the socket 14a for an inspection is cooled by the base 103 being cooled.

  Since the handler and the tester constituting the part inspection apparatus are separate apparatuses, when the test head 14 and the inspection socket 14a are used as a stage, a nitrogen gas is previously applied to the test head 14 of the tester separately from the configuration on the handler side. It is necessary to provide a flow path and a heater. In this regard, according to the above-described configuration, it is possible to cool the electronic component T accommodated in the inspection socket 14a without requiring the test head 14 including the internal flow path and the heater.

  Note that the temperature sensor may be mounted on the pedestal 103 or may be mounted on the inspection socket 14a as long as the temperature of the inspection socket 14a can be detected. Moreover, although one accommodating part 102 is formed in the base 103 of FIG. 6, the number of the accommodating parts 102 formed in the base 103 may be two or more. Further, the test head 14 and the inspection socket 14a may be accommodated in the accommodating portion 102 of the pedestal 103. The point is that the member itself that indirectly touches the electronic component with the heat conducting member interposed therebetween may be cooled as the supporting portion that supports the electronic component. In addition, when the some accommodating part 102 is formed in the base 103, it is preferable that the cooling path 100 corresponding to each accommodating part 102 is formed in the base 103 individually.

  In addition, the support part may be arbitrarily set as long as it is a part that supports the electronic component T on the mounting surface 11a of the base 11 or above the base 11 in the transport space covered by the cover member 12. Is possible. For example, the supply shuttle plate 15a and the recovery shuttle plate 15b may be provided as separate stages, and cooling may be provided by providing separate cooling units for these stages. In addition, a stage is provided at the lower end suction portion of the first transfer unit 32 and the second transfer unit 33 in the transfer robot 30, and a cooling unit is provided at the lower end of each of the first transfer unit 32 and the second transfer unit 33. You may do it. In short, if it is a part where the electronic component T is supported, the cooling unit can be provided using that part as a support part. It should be noted that when the electronic component T is transported between the cooling units, the electronic component T may be transferred by opening and closing a part of the container.

  T: Electronic parts, C1: Conveyor for supply, C2, C3, C4 ... Conveyor for recovery, DP: Branching part, JP: Junction part, C1a, C2a, C3a, C4a ... Device tray, 10 ... Handler, 11 ... Base 11a ... mounting surface, 12 ... cover member, 13 ... opening, 14 ... test head, 14a ... inspection socket, 15 ... first shuttle, 15a ... supply shuttle plate, 15b ... recovery shuttle plate, 15c ... shuttle Guide, 16 ... second shuttle, 16a ... supply shuttle plate, 16b ... recovery shuttle plate, 16c ... shuttle guide, 17, 17A, 17B, 17C, 17D, 18 ... receiving pocket, 20 ... supply robot, 21 ... supply Side fixed guide, 22 ... Supply side movable guide, 23 ... Supply hand unit, 30 ... Transfer robot, 31 Transport guide 32: First transport unit 33: Second transport unit 40: Recovery robot 41: Recovery side fixed guide 42: Recovery side movable guide 43: Recovery hand unit 50: Storage box 51 Inspection box 52 ... Storage box 55 ... Storage tank 56 ... Common path 57 ... First connection path 58 ... Second connection path 60 ... Heat exchanger 61 ... First vaporization chamber 62 ... Second vaporization Chamber 63, 64 ... Supply valve, 66A ... First supply passage, 66B, 66C, 66D ... Second supply passage, 67A ... First cooling passage, 67B, 67C, 67D ... Second cooling passage, 68A, 68B, 68C , 68D ... discharge port, 69A, 69B, 69C, 69D ... heater, 70A, 70B, 70C, 70D ... temperature sensor, 71A ... first discharge path, 71B, 71C, 71D ... second discharge path, 73 ... 1st throttle valve, 73B, 73C, 73D ... 2nd throttle valve, 74A ... 1st check valve, 74B, 74C, 74D ... 2nd check valve, 75 ... Heat exchanger, 76 ... Cold fluid chamber, 77 DESCRIPTION OF SYMBOLS ... Dry air supply source, 78 ... High temperature fluid chamber, 79 ... Valve, 80 ... Air heater, 81 ... Third check valve, 85 ... Control device, 86 ... Cooling unit drive part, 86a ... Valve drive part, 86b ... Throttle valve Drive unit, 86c ... heater drive unit, 90 ... tester, 100 ... cooling path, 101 ... heating heater, 102 ... storage unit, 103 ... pedestal.

Claims (9)

A first cooling path for cooling the first support part for supporting the component with a refrigerant;
A second cooling path for supporting a component and cooling a second support portion different from the first support portion with a refrigerant;
A first heater for heating the first support part;
A second heater different from the first heater by heating the second support part;
A first temperature sensor for detecting a temperature of the first support part;
A second temperature sensor that detects the temperature of the second support part and is different from the first temperature sensor;
A refrigerant supply unit that supplies refrigerant to the first and second cooling paths through a flow control valve;
The first and second cooling paths are connected in parallel to the refrigerant supply unit;
The opening and closing of the flow rate control valve and the output of the first heater are changed according to the detection value of the first temperature sensor, and the second heater is changed according to the detection value of the second temperature sensor. A handler characterized by comprising a control unit that changes the output of the. The handler according to claim 1, wherein the first cooling path is a flow path in which the flow rate of the refrigerant is smaller than that of the second cooling path. The handler according to claim 1, further comprising a throttle valve that throttles a flow rate of the refrigerant in the first cooling path. A storage container in which the support portion is stored;
A first discharge path for communicating the outlet of the first cooling path and the container;
The handler as described in any one of Claims 1-3 provided with the 2nd discharge path which connects the exit of the said 2nd cooling path, and the said storage container. A first check valve disposed in the first discharge path to inhibit the inflow of gas to the first cooling path; and a gas flow inflow to the second cooling path disposed in the second discharge path. The handler according to claim 4 provided with the 2nd check valve which suppresses. Of the first discharge path, on the downstream side of the first check valve,
The handler according to claim 5, wherein a site on the downstream side of the second check valve in the second discharge path is connected. Of the first discharge path, on the downstream side of the portion to which the second discharge path is connected,
The handler according to claim 6, further comprising a temperature raising unit that raises the temperature of the refrigerant passing through the first discharge path. A plurality of the second cooling passages;
A first throttle valve that throttles a flow rate of the refrigerant in the first cooling path;
The handler according to any one of claims 1 to 7, further comprising a second throttle valve that is individually provided for each of the plurality of second cooling paths and throttles the flow rate of the refrigerant in the second cooling path. A first cooling path for cooling the first support part for supporting the component with a refrigerant;
A second cooling path for supporting a component and cooling a second support portion different from the first support portion with a refrigerant;
A first heater for heating the first support part;
A second heater different from the first heater by heating the second support part;
A first temperature sensor for detecting a temperature of the first support part;
A second temperature sensor that detects the temperature of the second support part and is different from the first temperature sensor;
A refrigerant supply unit that supplies refrigerant to the first and second cooling paths through a flow control valve;
The first and second cooling paths are connected in parallel to the refrigerant supply unit;
The opening and closing of the flow rate control valve and the output of the first heater are changed according to the detection value of the first temperature sensor, and the second heater is changed according to the detection value of the second temperature sensor. A component inspection apparatus comprising a control unit that changes the output of the component.

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