物体面上の理想的な輝点から発せられた光線群は、導入光学系や結像光学系を構成するレンズの円形開口によるフラウンホーファー回折を生じ、エアリーパターンと呼ばれる同心円状の明暗パターンである干渉縞を結像面上に形成する。エアリーパターン（明暗パターン）は、その中心が「エアリーディスク」とよばれる明るい領域であり、その周りを複数の同心円環がとりまく。一般的に、エアリーディスクは、レンズの円形開口による多光線干渉現象として理解される。
A group of light rays emitted from an ideal bright spot on the object surface is a concentric light-dark pattern called an Airy pattern, which causes Fraunhofer diffraction due to the circular aperture of the lenses constituting the introduction optical system and the imaging optical system. Interference fringes are formed on the image plane. The Airy pattern (light / dark pattern) is a bright region whose center is called an “Airy disk”, and a plurality of concentric rings surround it. In general, an Airy disk is understood as a multi-beam interference phenomenon due to a circular aperture of a lens.
分光特性測定装置によって試料面から出射された測定光が固定反射面及び可動反射面によって反射された後、結像レンズによって結像面上に集光する様子を説明する図。The figure explaining a mode that the measurement light radiate | emitted from the sample surface by the spectral characteristic measuring apparatus is condensed on an imaging surface by an imaging lens, after being reflected by the fixed reflective surface and the movable reflective surface.
固定反射面と可動反射面の間の角度ずれ量、結像レンズの焦点距離、結像面上の集光位置のずれ量の関係を示す図。The figure which shows the relationship between the amount of angular deviation between a fixed reflective surface and a movable reflective surface, the focal distance of an imaging lens, and the deviation | shift amount of the condensing position on an imaging surface.
固定反射面と可動反射面の間の角度ずれ量がゼロのときに結像面上に形成されるエアリーディスクの説明図。Explanatory drawing of the Airy disk formed on an image plane when the amount of angular deviations between a fixed reflective surface and a movable reflective surface is zero.
固定反射面と可動反射面の間の角度ずれ量がθのときに結像面上に形成されるエアリーディスクの説明図。Explanatory drawing of the Airy disk formed on an image plane when the amount of angle shifts between a fixed reflective surface and a movable reflective surface is (theta).
本発明の一実施形態に係る分光特性測定装置の概略構成図。1 is a schematic configuration diagram of a spectral characteristic measuring apparatus according to an embodiment of the present invention.
位相シフタの全体構成を示す斜視図。The perspective view which shows the whole structure of a phase shifter.
第１治具の構成を示す図。The figure which shows the structure of a 1st jig | tool.
第１実施例の判別方法を説明するための図であり、被測定物（人物）の撮影画像（ａ）及び中赤外画像（ｂ）並びに固定反射面と可動反射面の傾きがほぼ同じであるときの測定光のインターフェログラム（ｃ）及びこのインターフェログラムをフーリエ変換して得られるスペクトル（ｄ）の例を示す。It is a figure for demonstrating the discrimination | determination method of 1st Example, and the inclination of a picked-up image (a) and a mid-infrared image (b) of a to-be-measured object (person), and a fixed reflective surface and a movable reflective surface is substantially the same. An example of an interferogram (c) of measurement light at a certain time and a spectrum (d) obtained by Fourier transforming this interferogram are shown.
固定反射面と可動反射面の間の相対的な角度ずれ量を徐々に変化させたときのインターフェログラムの変化を示す図。The figure which shows the change of an interferogram when changing the relative angular deviation | shift amount between a fixed reflective surface and a movable reflective surface gradually.
第２実施例の判別方法を説明するための図であり、物体面にピンホールを有する調整部材を設置した状態の分光特性測定装置の概略図（ａ）、及び結像面上に形成される輝点像（ｂ）。It is a figure for demonstrating the discrimination method of 2nd Example, and is formed on the schematic surface (a) of the spectral characteristic measuring apparatus of the state which installed the adjustment member which has a pinhole in an object surface, and an image plane Bright spot image (b).
第１治具のねじのねじ込み量を変化させたときの輝点像の移動の様子を示す図。The figure which shows the mode of the movement of the bright spot image when changing the screwing amount of the screw of a 1st jig | tool.
第２治具のねじのねじ込み量を変化させたときの輝点像の移動の様子を示す図。 The figure which shows the mode of the movement of a bright spot image when changing the screwing amount of the screw of a 2nd jig | tool .
調整目標値の求め方の説明図。Explanatory drawing of how to obtain | require adjustment target value.
調整目標値から輝点像までの位置ずれ量の求め方の説明図。Explanatory drawing of how to obtain | require the positional offset amount from an adjustment target value to a luminescent spot image.
第１治具の変形例。The modification of a 1st jig | tool.
ＣＣＤカメラ１３は、受光面が受光した光の強度を検出する、２次元配置された複数の検出画素を備えている。制御装置１４は、ＣＣＤカメラ１３の検出信号からインターフェログラムを求め、このインターフェログラムを数学的にフーリエ変換て測定光の波長毎の相対強度である分光特性（スペクトル）を求める処理部１４１、ＣＣＤカメラ１３の検出信号から、位相シフタ１１を構成する固定ミラー部２０及び可動ミラー部３０の位置関係を判別する判別部１４２、処理部１４１の処理結果や判別部１４２の判別結果等を出力するディスプレイ、プリンタ等の出力装置１４３を備える。
The CCD camera 13 includes a plurality of two-dimensionally arranged detection pixels that detect the intensity of light received by the light receiving surface. The control device 14 obtains an interferogram from the detection signal of the CCD camera 13, and mathematically Fourier transforms the interferogram to obtain a spectral characteristic (spectrum) that is a relative intensity for each wavelength of the measurement light. From the detection signal of the CCD camera 13, a determination unit 142 for determining the positional relationship between the fixed mirror unit 20 and the movable mirror unit 30 constituting the phase shifter 11, a processing result of the processing unit 141, a determination result of the determination unit 142, and the like are output. An output device 143 such as a display or a printer is provided.