JP2016132113A - Method for producing composite material of aluminum with carbon particle, and method for producing insulated substrate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a composite material of aluminum with a carbon particle, the outer peripheral surface of which material can be made to have higher mechanical strength and dropout of the carbon particle from the outer peripheral surface of which material can be suppressed, and to provide a method for producing the composite material, an insulated substrate including a wiring layer comprising the composite material, and another method for producing the insulated substrate.SOLUTION: The method for producing the composite material comprises: a stacking step of alternately stacking a plurality of aluminum layers 1 and another plurality of brazing filler metal/carbon particle-containing layers 2, in each of which an aluminum-based brazing filler metal and the carbon particle are contained, to form a laminate 10; and a brazing step of heating the laminate 10 in such a state that the laminate 10 is pressurized to the stacked direction to braze/integrate all of the stacked layers to/with one another. The laminate 10 is heated in such a state that the laminate is pressurized so that a part of a molten material of the brazing filler metal in the brazing filler metal/carbon particle-containing layer is swollen out toward the outer peripheral surface side of the laminate 10.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a composite material of aluminum and carbon particles, a manufacturing method thereof, an insulating substrate, and a manufacturing method thereof.

  In the present specification and claims, the term “aluminum” is used to include both pure aluminum and aluminum alloys, unless otherwise specified.

  Further, although the vertical direction of the composite material of aluminum and carbon particles according to the present invention is not limited, in order to facilitate understanding of the composition of the composite material, in the present specification and claims, The stacking direction is defined as the vertical direction.

  In addition, although the vertical direction of the insulating substrate according to the present invention is not limited, in order to facilitate understanding of the configuration of the insulating substrate, in the present specification and claims, a heat generating element in the insulating substrate is mounted. The mounting surface side is defined as the upper side and the opposite side is defined as the lower side.

  As a composite material of a metal and carbon particles, for example, as described in Patent Document 1 (Patent No. 5150905) and Patent Document 2 (Patent No. 5145591), a carbon fiber as a metal layer and a carbon particle layer A layer in which a plurality of layers are alternately laminated and integrated is known. This type of composite material is expected to be used as a material for members that require high heat conduction characteristics.

Japanese Patent No. 5150905 Japanese Patent No. 5145591

  In this type of composite material, in order to increase the thermal conductivity, it is desirable to make the carbon particle layer such as the carbon fiber layer as thin as possible and to increase the carbon particle containing layer as much as possible. In order to do this, it is preferable to make a plurality of metal layers and carbon particle layers thin and alternately laminated.

  However, when the metal layer and the carbon particle layer are laminated in this way, the following problems occur.

  That is, it is difficult to alternately stack metal layers and carbon particle layers with the end portions of each layer aligned, and it is difficult to apply a bonding load for bonding the layers to the end portions of the layers. There is a problem that the end portion becomes insufficiently bonded, and the carbon particles in the carbon particle layer easily fall off from this portion.

  The present invention has been made in view of the above-described technical background, and the purpose thereof is a composite material of aluminum and carbon particles, which has high mechanical strength on the outer peripheral surface and can suppress the dropping of carbon particles from the outer peripheral surface. An object of the present invention is to provide a manufacturing method thereof, an insulating substrate having a wiring layer made of a composite material, and a manufacturing method thereof.

  The present invention provides the following means.

[1] A laminating step of forming a laminate in which a plurality of aluminum layers and brazing filler metal-carbon particle-containing layers containing an aluminum-based brazing material and carbon particles are alternately laminated;
A brazing step of brazing and integrating the plurality of aluminum layers and the plurality of brazing material-carbon particle-containing layers by heating the laminated body in a state of being pressed in the laminating direction;
In the brazing step, the laminated body is pressed in the laminating direction so that a part of the melt of the brazing material in the brazing material-carbon particle-containing layer protrudes to the outer peripheral surface side of the laminated body. A method for producing a composite material of aluminum and carbon particles to be heated.

[2] The brazing material-carbon particle-containing layer is divided into a brazing material layer mainly containing the brazing material and a carbon particle layer mainly containing the carbon particles,
In the laminating step, a coating brazing sheet is formed by coating the carbon particle layer on a brazing sheet having the aluminum layer as a core material and the brazing material layer as a skin material, and then the coating brazing sheet. 2. The method for producing a composite material of aluminum and carbon particles according to item 1, wherein a plurality of layers are laminated to form the laminated material.

[3] The method for producing a composite material of aluminum and carbon particles according to item 2 above, wherein the carbon particle layer is applied so that the coating amount of the carbon particles contained in the carbon particle layer is 40 g / m ² or less. .

  [4] Manufacture of a composite material of aluminum and carbon particles according to item 2 or 3, wherein the carbon particle layer is applied so that a volume content of the carbon particles with respect to the composite material is 2% by volume or more and 70% by volume or less. Method.

  [5] In the laminating step, a brazing filler metal particle-carbon particle mixed layer containing brazing filler metal particles and carbon particles in a mixed state is applied on the aluminum foil forming the aluminum layer as the brazing filler metal-carbon particle-containing layer. The method for producing a composite material of aluminum and carbon particles according to item 1 above, wherein a coated aluminum foil is formed by processing, and then a plurality of the coated aluminum foils are laminated to form the laminate.

[6] The method for producing a composite material of aluminum and carbon particles according to item 5 above, wherein the mixed layer is applied so that the coating amount of the carbon particles contained in the mixed layer is 40 g / m ² or less.

  [7] The method for producing a composite material of aluminum and carbon particles according to 5 or 6 above, wherein the mixed layer is applied so that the volume content of the carbon particles with respect to the composite material is 2% by volume or more and 70% by volume or less. .

  [8] The aluminum and carbon particles according to any one of 1 to 7 above, wherein the brazing material is an Al—Si based brazing material to which at least one element selected from the group consisting of Mg, Bi, and Sr is added. And manufacturing method of composite material.

  [9] A composite material of aluminum and carbon particles obtained by the method for manufacturing a composite material of aluminum and carbon particles according to any one of 1 to 8 above.

[10] A laminate in which a plurality of aluminum layers and brazing filler metal-carbon particle-containing layers containing an aluminum-based brazing material and carbon particles are alternately laminated,
The plurality of aluminum layers and the plurality of brazing material-carbon particle containing layers are brazed and integrated, and the protruding portion of the brazing material that protrudes to the outer peripheral surface side of the laminate is formed on the outer peripheral surface of the laminate. A composite of aluminum and carbon particles that is fixed.

[11] A first laminated body for forming a wiring layer in a state where a plurality of aluminum layers and a brazing filler metal-carbon particle-containing layer containing an aluminum-based brazing material and carbon particles are alternately laminated is formed. A laminating step of laminating the laminate and another member including at least an insulating layer with a brazing filler metal layer interposed between the first laminate and the insulating layer to form a second laminate;
By heating the second laminate in a state of being pressed in the laminating direction, the plurality of aluminum layers, the plurality of brazing material-carbon particle-containing layers, and the insulating layer are collectively brazed and integrated, This includes a brazing process for bonding the wiring layer to the insulating layer,
In the brazing step, the second laminated body is added in the laminating direction so that a part of the melt of the brazing material in the brazing material-carbon particle-containing layer protrudes to the outer peripheral surface side of the first laminated body. A method for manufacturing an insulating substrate, wherein heating is performed in a pressed state.

  [12] An insulating substrate obtained by the method for manufacturing an insulating substrate according to 11 above.

[13] An insulating substrate provided with a wiring layer,
The wiring layer is composed of a laminate in a state where a plurality of aluminum layers and a brazing filler metal containing carbon particles and a carbon particle-containing layer are alternately laminated.
The plurality of aluminum layers and the plurality of brazing material-carbon particle containing layers are brazed and integrated, and the protruding portion of the brazing material that protrudes to the outer peripheral surface side of the wiring layer is formed on the outer peripheral surface of the wiring layer. An insulated substrate that is fixed.

  The present invention has the following effects.

  According to the preceding item [1], in the laminating step, the laminated body is formed in a state where a plurality of aluminum layers and brazing filler metal-carbon particle-containing layers are alternately laminated, so that the thermal conductivity of the obtained composite material Can be increased. Furthermore, in the brazing step, the laminate is heated in a state of being pressurized in the laminating direction so that a part of the melt of the brazing material in the brazing material-carbon particle-containing layer protrudes to the outer peripheral surface side of the laminate. After the brazing process, the protruding portion of the brazing material adheres to the outer peripheral surface of the composite material. As a result, the mechanical strength of the outer peripheral surface of the composite material is improved, and the carbon particles in the brazing material-carbon particle-containing layer can be prevented from falling off from the outer peripheral surface of the composite material.

  In the preceding item [2], since the laminate is formed by laminating a plurality of coated brazing sheets formed by coating a carbon particle layer on the brazing sheet, the laminate can be easily formed.

In the preceding item [3], delamination of the composite material can be reliably suppressed by applying the carbon particle layer so that the coating amount of the carbon particles is 40 g / m ² or less.

  In the previous item [4], the volume content of the carbon particles is within a predetermined range, so that the thermal conductivity of the composite material can be reliably increased, and all the layers constituting the laminate are surely brazed and integrated. can do.

  In the preceding item [5], since the laminate is formed by laminating a plurality of coated aluminum foils in which a brazing filler metal particle-carbon particle mixed layer is coated on an aluminum foil, the laminate can be easily formed. it can.

  The previous item [6] has the same effect as the previous item [3].

  The previous item [7] has the same effect as the previous item [4].

  In the above [8], since the brazing material is an Al—Si based brazing material, the wettability of the brazing material with the carbon particles and the brazing property can be improved. Furthermore, the fluidity | liquidity of a brazing material is improved by adding a predetermined element to an Al-Si type brazing material. Thereby, in a brazing process, it becomes easy to protrude a part of molten material of a brazing material to the outer peripheral surface side of a laminated body. As a result, the mechanical strength of the outer peripheral surface of the composite material is reliably improved, and the dropping of the carbon particles can be reliably suppressed.

  In the preceding item [9], it is possible to provide a composite material of aluminum and carbon particles that can achieve the effect of any one of the preceding items [1] to [8].

  In the preceding item [10], the laminated body is in a state in which a plurality of aluminum layers and brazing material-carbon particle-containing layers are alternately laminated, whereby the thermal conductivity of the obtained composite material can be increased. Further, the plurality of aluminum layers and the plurality of brazing material-carbon particle-containing layers are integrated by brazing, and the protruding portion of the brazing material that protrudes to the outer peripheral surface side of the laminate is fixed to the outer peripheral surface of the laminate. As a result, the mechanical strength of the outer peripheral surface of the composite material can be improved, and the carbon particles can be prevented from falling off from the outer peripheral surface of the composite material.

  In the previous item [11], for the same reason as in the previous item [1], the thermal conductivity of the wiring layer in the insulating substrate can be increased, and the carbon particles can be prevented from falling off from the outer peripheral surface of the wiring layer. . In addition, in the brazing step, the plurality of aluminum layers, the plurality of brazing material-carbon particle-containing layers, and the insulating layer are integrally brazed and integrated so that the wiring layer is joined to the insulating layer. The bonding of the aluminum layer and the plurality of brazing material-carbon particle-containing layers and the bonding of the wiring layer and the insulating layer can be performed simultaneously. Therefore, the time required for manufacturing the insulating substrate can be shortened.

  In the preceding item [12], it is possible to provide an insulating substrate capable of producing the effect of the preceding item [11].

  In the preceding item [13], the thermal conductivity of the wiring layer can be increased for the same reason as in the preceding item [10], the mechanical strength of the outer peripheral surface of the wiring layer is improved, and the carbon particles are added to the outer periphery of the wiring layer. It can suppress falling off from the surface.

FIG. 1 is a schematic cross-sectional view showing an insulating substrate including a wiring layer made of a composite material of aluminum and carbon particles according to a first embodiment of the present invention, together with a heat generating element. FIG. 2 is a schematic cross-sectional view illustrating a stacking process of the method for manufacturing the insulating substrate. FIG. 3 is a schematic cross-sectional view illustrating a brazing process of the method for manufacturing the insulating substrate. FIG. 4 is a schematic diagram illustrating a process of applying a carbon particle layer on a brazing sheet strip. FIG. 5 is an enlarged schematic cross-sectional view of the Z1 portion in FIG. FIG. 6 is an enlarged schematic cross-sectional view of a Z2 portion in FIG. FIG. 7 is an enlarged schematic cross-sectional view corresponding to FIG. 5 showing the aluminum foil strip in a state before the brazing filler metal particle-carbon particle mixed layer is applied in the second embodiment of the present invention. FIG. 8 is an enlarged schematic cross-sectional view corresponding to FIG. 6 showing the aluminum foil strip (that is, the coated aluminum foil strip) in a state after the brazing filler metal particle-carbon particle mixed layer is applied.

  Next, several embodiments of the present invention will be described below with reference to the drawings.

  1-6 is a figure explaining 1st Embodiment of this invention.

  As shown in FIG. 1, the composite material of aluminum and carbon particles according to the first embodiment is used as a material for forming the wiring layer 11 in the insulating substrate 25 according to the first embodiment, for example.

  The insulating substrate 25 is used as an electronic module substrate (e.g., a power module substrate) or the like, and is composed of a plurality of layers integrated in a laminated form. Specifically, in order from the top, The wiring layer 11, the insulating layer 12, the metal buffer layer 13, and the metal cooling member 14 as a cooling layer are arranged in a laminated form, and these are integrally formed. In addition, since the insulating substrate 25 of the first embodiment includes the cooling member 14, it is also called a cooling substrate.

  The wiring layer 11 is a layer in which an electronic circuit is formed, and is also called a circuit layer. The upper surface 11 a of the wiring layer 11 constitutes a mounting surface of the insulating substrate 25. That is, the heat-generating element 26 such as an electronic element (eg, a semiconductor element) is mounted on the upper surface 11a of the wiring layer 11 by being joined by soldering or the like. When the exothermic element 26 is mounted, a Ni plating layer (not shown) such as a Ni-P plating layer may be formed on the upper surface 11a of the wiring layer 11 in order to improve solderability. . As described above, the wiring layer 11 is formed of the composite material of the first embodiment.

The insulating layer 12 has electrical insulation, and is formed of a ceramic plate such as AlN (aluminum nitride), Si ₃ N ₄ (silicon nitride), Al ₂ O ₃ (alumina).

  The buffer layer 13 is a layer for relaxing a stress such as a thermal stress generated in the insulating substrate 25, and is formed of a punching metal having a plurality of through holes 13a penetrating in the thickness direction. The material of the punching metal is aluminum, for example.

  The cooling member 14 cools the exothermic element 26 by radiating heat generated in the exothermic element 26 along with the operation of the exothermic element 26. In the first embodiment, an aluminum heat radiating member (eg, heat sink) having a plurality of heat radiating fins 14 a is used as the cooling member 14.

  In the insulating substrate 25, heat generated in the heat generating element 26 is sequentially conducted from the heat generating element 26 to the wiring layer 11, the insulating layer 12, the buffer layer 13, and the cooling member 14, and is dissipated from the radiation fins 14 a of the cooling member 14. The As a result, the temperature of the heat generating element 26 decreases, that is, the heat generating element 26 is cooled.

  Next, a method for manufacturing the insulating substrate 25 of the present embodiment will be described below with reference to FIGS.

  The method for manufacturing the insulating substrate 25 includes a lamination process, a brazing process, and the like.

  As shown in FIGS. 2 and 3, the stacking process includes a first stack forming process for forming the first stack 10 and a second stack forming process for forming the second stack 20. In the present embodiment, the first stacked body forming step and the second stacked body forming step are performed simultaneously.

  The brazing process is a process in which all the layers (members) constituting the insulating substrate 25 are integrated together by brazing.

  The first laminated body 10 is for forming the wiring layer 11, and is formed in a state where a plurality of aluminum layers 1 and brazing filler metal-carbon particle-containing layers 2 are alternately laminated as shown in FIG. Yes.

  The brazing filler metal-carbon particle-containing layer 2 is a layer containing an aluminum brazing filler metal and carbon particles. In the first embodiment, as shown in FIG. 2, the brazing material-carbon particle-containing layer 2 mainly contains the brazing material layer 2 a mainly containing the brazing material and the carbon particles among the brazing material and the carbon particles. It is divided into a carbon particle layer 2b (indicated by dot hatching). More specifically, the brazing material layer 2a is a layer formed of brazing material without containing carbon particles, and the carbon particle layer 2b is a layer formed of carbon particles without containing brazing material.

  The second laminate 20 is formed by laminating the first laminate 10 and another member including at least the insulating layer 12 with a brazing filler metal layer interposed between the first laminate 10 and the insulating layer 12. Has been.

  In the first embodiment, the other members including at least the insulating layer 12 are the insulating layer 12, the buffer layer 13, and the cooling member 14. In the present invention, it is particularly desirable that the other members including at least the insulating layer 12 are the insulating layer 12, the buffer layer 13, and the cooling member 14 in that the time required for manufacturing the insulating substrate 25 can be greatly shortened. For example, only the insulating layer 12 or the insulating layer 12 and the buffer layer 13 may be used.

  In the second stacked body 20, the brazing filler metal layer is interposed between the first stacked body 10 and the insulating layer 12 as described above, and further between the insulating layer 12 and the buffer layer 13, and between the buffer layer 13. Also, a brazing filler metal layer (for example, brazing filler metal foil) 15 is interposed between the cooling member 14 and the cooling member 14, respectively.

  A 1st laminated body formation process is a process of forming the 1st laminated body 10 as mentioned above.

  In the carbon particle layer 2b of the brazing filler metal-carbon particle-containing layer 2 shown in FIG. 2, the carbon particles are not limited, but have a high thermal conductivity as much as possible, that is, a high thermal conductivity. desirable. In particular, the carbon particles are preferably at least one selected from the group consisting of carbon fibers, carbon nanotubes, graphene, natural graphite particles, and artificial graphite particles, and further, carbon fibers, carbon nanotubes, graphene, and natural graphite particles. It is more desirable that it is at least one selected from the group consisting of The reason is that the thermal conductivity of the wiring layer 11 can be reliably improved, and the aluminum and carbon particles of the brazing material layer 2a can be reliably combined.

  The carbon fiber is particularly preferably pitch-based carbon fiber, PAN-based carbon fiber, or the like.

  The carbon nanotube is particularly preferably a single-walled carbon nanotube, a multi-walled carbon nanotube, a vapor-grown carbon fiber (VGCF), or the like.

  The graphene is particularly preferably single layer graphene, multilayer graphene, or the like.

  Natural graphite particles include flaky graphite particles, massive graphite particles, earthy graphite particles, and the like. In particular, natural graphite particles are desirably flaky graphite particles.

  The artificial graphite particles include isotropic graphite particles, anisotropic graphite particles (eg, graphite particles for electrode materials), pyrolytic graphite particles, and the like.

  The size of the carbon particles is not limited. However, when the carbon particles are carbon fibers, it is particularly desirable that the average fiber length is 10 μm or more and 2 mm or less, and the average fiber diameter is 1 μm or more and 0.5 mm or less. When the carbon particles are carbon nanotubes, it is particularly desirable that the average length is 1 μm or more and 10 μm or less and the average diameter is 50 nm or more and 500 nm or less. When the carbon particles are natural graphite particles, it is particularly desirable that the average particle diameter is 10 μm or more and 3 mm or less and the flatness is 5 or more and 500 or less. When the size of the carbon particles is within such a range, the content of the carbon particles in the brazing filler metal-carbon particle-containing layer 2 can be surely made uniform.

  In the brazing filler metal layer 2a of the brazing filler metal-carbon particle containing layer 2, the brazing filler is not limited as long as it is an aluminum brazing filler. It is desirable in that it can improve the wettability and brazing property. Furthermore, the brazing material is particularly preferably an Al—Si based brazing material to which at least one element selected from the group consisting of Mg, Bi and Sr is added. The reason for this is that in the brazing step, when brazing is performed by vacuum brazing, the flowability of the brazing material can be reliably increased, and as a result, a part of the brazing material melt is first laminated 10. It is because it becomes easy to protrude to the outer peripheral surface side.

  A particularly desirable addition amount of Mg is not less than 0.1% by mass and not more than 3% by mass with respect to the mass of the entire brazing filler metal. A particularly desirable addition amount of Bi is 0.01% by mass or more and 2% by mass or less with respect to the mass of the entire brazing filler metal. A particularly desirable addition amount of Sr is 0.0001 mass% or more and 0.3 mass% or less with respect to the mass of the entire brazing filler metal.

  As shown in FIG. 2, the aluminum layer 1 is formed of a core material of a brazing sheet (more specifically, an aluminum brazing sheet) 3. The brazing material layer 2 a is formed of a skin material of the brazing sheet 3. That is, the brazing filler metal layer 2a is clad over the entire surface of one side of the aluminum layer 1 as the core material. Further, in the first embodiment, the brazing material layer 2 a is also clad on the other side of the aluminum layer 1. Specifically, the brazing sheet 3 is a double-sided brazing sheet in which the brazing filler metal layer 2a is clad on both sides of the aluminum layer (core material) 1 in detail. Both brazing material layers 2a have substantially the same thickness.

  The thickness of the aluminum layer 1 is not limited, but is particularly preferably 30 μm or more and 800 μm or less. The material of the aluminum layer 1 is not limited and is, for example, A1000 series (pure aluminum), A3000 series, or A6000 series aluminum.

  The thickness of the brazing filler metal layer 2a is not limited as long as the adjacent layers can be joined to each other, but is particularly preferably 5 μm or more. When the thickness of the brazing filler metal layer 2a is 5 μm or more, the aluminum and the carbon particles of the brazing filler metal layer 2a can be reliably combined. The amount that protrudes to the outer peripheral surface side of the one laminate 10 can be surely increased. A desirable upper limit of the thickness of the brazing material layer 2a is 100 μm. When the thickness of the brazing material layer 2a is 100 μm or less, the manufacturing cost of the insulating substrate (composite material) 25 can be reduced, and erosion is surely generated in the aluminum layer (core material) 1 during brazing. Can be suppressed. A particularly desirable upper limit of the thickness of the brazing material layer 2a is 50 μm.

  The specific formation method of the 1st laminated body 10 in a 1st laminated body formation process is as follows.

  As shown in FIG. 4, the carbon particles 5, the binder 41, and the binder 41 solvent 42 are put in a mixing container 44, and these are stirred and mixed by a mixer 45 with stirring blades. Thereby, the coating liquid 6 which contains the carbon particle 5, the binder 41, and the solvent 42 in a mixed state is obtained. At this time, a dispersing agent, a surface adjusting agent, a viscosity adjusting agent, etc. may be put into the mixing container 44 and mixed with stirring as necessary.

  The binder 41 imparts adhesion to the brazing sheet 3 to the carbon particles 5, thereby suppressing the carbon particles 5 from falling off from the brazing sheet 3 during the lamination process. As the binder 41, it is desirable to use a binder that disappears by sublimation or decomposition without carbonizing at a temperature of about 300 ° C. to about 600 ° C. in a non-oxidizing atmosphere. As such a binder 41, resins such as acrylic resin, polyethylene glycol resin, butyl rubber resin, phenol resin, and cellulose resin are preferably used.

  The solvent 42 is not limited to the type as long as it dissolves the binder 41. As the solvent 42, water, an alcohol solvent (eg, methanol, isopropyl alcohol), a hydrocarbon solvent, or the like is preferably used.

  The coating liquid 6 particularly preferably contains the carbon particles 5 and the binder 41 so that the mass of the binder 41 is 0.5% to 25% with respect to the mass of the carbon particles 5.

  Next, the coating liquid 6 is applied in a layer over substantially the entire surface of the strip 3A of the brazing sheet 3 by the coating device 50, whereby one side of the strip 3A is formed as shown in FIGS. The strip material 4A of the coating brazing sheet 4 on which the carbon particle layer 2b is formed (coated) is formed (specifically, the strip material 4A of the coated double-sided brazing sheet 4).

  5 shows a state before the carbon particle layer 2b is formed on the strip 3A, and FIG. 6 shows a state after the carbon particle layer 2b is formed. In the first embodiment, the surface of the strip 3A to which the carbon particle layer 2b is applied is the upper surface.

  The coating process using the coating apparatus 50 will be described in detail below.

  As the coating device 50, a widely known device can be used for coating the coating liquid 6 on the sheet. Specifically, a roll coater, a knife coater, a die coater, a gravure coater, or the like can be used. is there.

  In the coating apparatus 50 shown in FIG. 4, the strip material 3A of the brazing sheet 3 unwound from the unwinding roller 51 passes through the coating roller unit 52 and a drying furnace 55 as a drying apparatus in order and is wound up. The roller 53 is wound up.

  Application of the coating liquid 6 onto the strip 3 </ b> A is performed by the coating roller unit 52. That is, when the strip 3A unwound from the unwinding roller 51 passes through the coating roller unit 52, the coating liquid 6 is applied over the substantially entire surface by the coating roller unit 52 on one surface (upper surface) thereof. As shown in FIG. 6, the carbon particle layer 2b is formed (coated) over the substantially entire surface of the strip 3A. Thereby, 4 A of coating brazing sheet strips are obtained. At this stage, the binder 41 and the solvent 42 are contained in the carbon particle layer 2b.

  The coating roller unit 52 includes a coating pan 52a, a pickup roller 52b, an applicator roller 52c, a backup roller 52d, and the like.

  When the coating brazing sheet strip 4A that has passed through the coating roller unit 52 passes through the drying furnace 55, most of the binder 41 and the solvent 42 contained in the carbon particle layer 2b by the drying furnace 55 are in the carbon particle layer 2b. Is removed by evaporation.

  The reason why the binder 41 and the solvent 42 are removed from the carbon particle layer 2b is as follows. That is, when the binder 41 and the solvent 42 are contained in the carbon particle layer 2b, the binder 41 and the solvent 42 may become an organic residue when the carbon particle layer 2b is heated during the brazing process. This causes a decrease in the thermal conductivity of the wiring layer 11 to be formed. Therefore, it is desirable to remove the binder 41 and the solvent 42 from the carbon particle layer 2b.

The coating amount of the carbon particle layer 2b is not limited as long as the coating amount is such that the aluminum of the brazing filler metal layer 2a and the carbon particles 5 can be combined. In particular, the carbon particle layer 2b is preferably applied so that the coating amount of the carbon particles 5 contained in the carbon particle layer 2b is 40 g / m ² (particularly desirably 30 g / m ² ) or less. The reason is that delamination in the wiring layer 11 (composite material) can be reliably suppressed. The carbon particle layer 2b is preferably applied so that the amount of the carbon particles 5 applied is 1 g / m ² or more. The reason is that the thermal conductivity of the wiring layer 11 can be reliably increased.

  Furthermore, the carbon particle layer 2b is preferably applied so that the volume content of the carbon particles 5 with respect to the wiring layer (composite material) 11 is 2% by volume or more and 70% by volume or less. When the volume content of the carbon particles 5 is 2% by volume or more, the thermal conductivity of the wiring layer 11 can be reliably increased. When the volume content of the carbon particles 5 is 70% by volume or less, it is possible to reliably braze and integrate all the layers constituting the first laminate 10. A particularly desirable lower limit of the volume content of the carbon particles 5 is 3% by volume, and a particularly desirable upper limit thereof is 50% by volume.

  The coating brazing sheet strip 4 </ b> A that has passed through the drying furnace 55 is wound around the winding roller 53.

  The coating brazing sheet strip 4A taken up by the take-up roller 53 is cut into a predetermined shape (eg, a square shape) while being unwound from the take-up roller 53 or after being unwound, A plurality of coated brazing sheets 4 are obtained.

  Next, as shown in FIG. 2, a first stacked body forming process and a second stacked body forming process are performed. That is, in the first laminated body forming step, the first laminated body 10 is formed by laminating a plurality of coating brazing sheets 4. In the second stacked body forming step, the first stacked body 10, the insulating layer 12, the buffer layer 13, and the cooling member 14 are arranged between the first stacked body 10 and the insulating layer 12, between the insulating layer 12 and the buffer layer 13, And the 2nd laminated body 20 is formed by laminating | inserting a brazing filler metal layer between the buffer layer 13 and the cooling member 14, respectively.

  In the first embodiment, as described above, the first stacked body forming step and the second stacked body forming step are performed simultaneously. By doing so, the time required for manufacturing the insulating substrate 25 can be greatly shortened, and as a result, the manufacturing cost of the insulating substrate 25 can be significantly reduced.

  In the first laminated body forming step, the aluminum layer 1 is arranged as the upper cover layer instead of the coating brazing sheet 4 at the uppermost position of the first laminated body 10. In the first embodiment, the uppermost aluminum layer 1 is formed of a core material of a single-sided brazing sheet. That is, this single-sided brazing sheet has an aluminum layer 1 as a core material, and a brazing material layer 2a is clad as a skin material on the lower surface of the aluminum layer (core material). Therefore, the aluminum layer 1 is exposed on the upper surface of the first stacked body 10 without exposing the carbon particle layer 2b.

  Moreover, since it is difficult to laminate | stack the coating brazing sheet 4 with the edge part aligned, as shown in FIG. 3, in the 1st laminated body 10, the edge part of the coating brazing sheet 4 is a little. It is not aligned.

  In the second laminate forming step, since the brazing sheet 3 of the coating brazing sheet 4 is a double-sided brazing sheet, the brazing filler metal layer interposed between the first laminate 10 and the insulating layer 12 is the first laminate. 10 is a brazing filler metal layer 2 a on the lower surface of the coating brazing sheet 4 disposed at the lowest position of 10. The brazing material layer 15 interposed between the insulating layer 12 and the buffer layer 13 and the brazing material layer 15 interposed between the buffer layer 13 and the cooling member 14 are respectively brazing material foils.

  Next, a brazing process is performed. That is, as shown in FIG. 3, in the brazing furnace (eg, vacuum brazing furnace) 35 of the brazing apparatus, the second stacked body 20 is mounted on the mounting table 31 and the first stacked body 10 The flat pressing member 32 is placed so as to cover the entire top surface of the first laminate 10. And the 2nd laminated body 20 is pressed below from the upper side of the pressing member 32, and, thereby, the 2nd laminated body 20 is pressed in the lamination direction (downward) between the mounting base 31 and the pressing member 32. Pressure is applied by means 30. Thus, the second stacked body 20 (insulating substrate 25) is temporarily assembled by restraining the second stacked body 20 so that the second stacked body 20 is not inadvertently decomposed.

  The pressurizing means 30 is not limited. For example, the pressurizing means 30 may be of a type that constantly pressurizes the second laminated body 20 by an elastic spring force, or is placed on the upper side of the pressing member 32. A system in which the second laminated body 20 is always pressurized when brazed by the weight of the weight may be used.

The pressure applied to the second laminate 20 by the pressurizing means 30 is such that a part of the melt of the brazing material of each brazing filler metal layer 2a of the coating brazing sheet 4 of the first laminate 10 is the first during the brazing process. but is not limited as long as the pressurizable pressure the second stack 20 so as to extend to the outside of the outer peripheral surface side of the first stack 10, is in particular 0.03 N / mm ² or more 1N / mm ² or less It is desirable. The reason is that a part of the melt of the brazing material can be reliably protruded, and all the layers constituting the first laminate 10 can be reliably brazed and integrated.

  Next, in the brazing furnace 35, the second stacked body 20 is heated in a predetermined brazing atmosphere (eg, inert atmosphere, vacuum) while the second stacked body 20 is pressed in the stacking direction. To do. Thereby, all the layers which comprise the 1st laminated body 10, the insulating layer 12, the buffer layer 13, and the cooling member 14 are integrated by brazing collectively.

  As a result, as shown in FIG. 1, all the layers constituting the first laminate 10 are joined and integrated with the brazing material of each brazing material layer 2 a of the coating brazing sheet 4 of the first laminate 10. Layer 11 is formed. Further, the wiring layer 11 is joined to the insulating layer 12 with the brazing material of the brazing material layer 2a interposed between the two. Further, the insulating layer 12 is joined to the buffer layer 13 with the brazing material of the brazing material layer 15 interposed between the two layers 12 and 13. Further, the buffer layer 13 is joined to the cooling member 14 with the brazing material of the brazing material layer 15 interposed between the both.

  When the brazing is completed, the pressurization to the second stacked body 20 by the pressurizing means 30 is released. Thereby, the insulating substrate 25 of the first embodiment is obtained.

  The above-described brazing process will be described in detail with a focus on the brazing phenomenon that occurs in the first laminate 10 as follows.

  That is, when the 2nd laminated body 20 is heated to brazing temperature, the brazing material of each brazing material layer 2a of the coating brazing sheet 4 will fuse | melt in the 1st laminated body 10. FIG. And since the 2nd laminated body 20 is pressurized in the lamination direction, the melt of each brazing material permeates into the carbon particle layer 2b and further passes through the carbon particle layer 2b and melts each brazing material. A part of the object protrudes to the outer peripheral surface side of the first laminated body 10 and adheres to the outer peripheral surface.

  And the heating to the 2nd laminated body 20 is stopped, and the 2nd laminated body 20 is cooled, The mutually adjacent layers which comprise the 1st laminated body 10 of the brazing material layer 2a interposed between both are made. In addition to joining with the brazing material, as shown in FIG. 1, the protruding portion 2ax (shown by cross-hatching) of the molten brazing material that protrudes to the outer peripheral surface side of the first laminated body 10 is solidified. It adheres to the outer peripheral surface of 10 so as to cover substantially the whole. In this state, all layers constituting the first stacked body 10 are joined and integrated to form the wiring layer 11.

  The brazing means applied in the brazing process is not limited, but vacuum brazing is particularly desirable. The reason is that the binder 41 and the solvent 42 present in the carbon particle layer 2b are easily and reliably evaporated and removed by heating the second laminate 20 in a vacuum state in the brazing furnace 35 during the brazing step. This is because the generation of oxidative consumption of the carbon particles 5 due to heating can be reliably suppressed.

  The brazing conditions (the brazing temperature, the holding time, the cooling rate, etc.) applied in the brazing step are not limited, but a part of the brazing material melt is on the outer peripheral surface side of the first laminate 10. Therefore, it is desirable that the brazing temperature is as high as possible, and that the brazing temperature holding time is as long as possible. A particularly desirable brazing temperature is 590 ° C. or more and 620 ° C. or less. A particularly desirable holding time of the brazing temperature is 10 min or more and 60 min or less. The cooling rate from the brazing temperature is preferably as fast as possible. A particularly desirable cooling rate is 30 ° C./min to 100 ° C./min in the range from the brazing temperature to 300 ° C.

  According to the method for manufacturing the insulating substrate 25 of the first embodiment, as shown in FIG. 3, in the stacking process, the first stacked body 10 includes the aluminum layer 1 and the brazing material-carbon particle-containing layer 2 alternately. It is formed in a stacked state. Therefore, the thermal conductivity of the obtained wiring layer (composite material) 11 can be increased. Further, in the brazing step, the second laminated body 20 is added in the laminating direction so that a part of the brazing material melt in the brazing material-carbon particle-containing layer 2 protrudes to the outer peripheral surface side of the first laminated body 10. Since the heating is performed in a pressed state, the protruding portion 2ax of the brazing material protruding to the outer peripheral surface side of the first stacked body 10 is fixed to the outer peripheral surface of the first stacked body 10 so as to cover substantially the entire surface. Thereby, the mechanical strength of the outer peripheral surface of the wiring layer 11 is improved, and the carbon particles 5 in the brazing filler metal-carbon particle-containing layer 2 can be prevented from falling off from the outer peripheral surface of the wiring layer 11. Therefore, according to the insulating substrate 25, generation | occurrence | production of the electrical short circuit by the dropped carbon particle 5 can be suppressed.

  In addition, in the brazing process, all the layers constituting the first laminate 10, the insulating layer 12, the buffer layer 13, and the cooling member 14 are integrally brazed and integrated, so that the wiring layer 11 is insulated from the insulating layer 12. The insulating layer 12 is bonded to the buffer layer 13, and the buffer layer 13 is bonded to the cooling member 14. Therefore, the bonding of all the layers constituting the first stacked body 10, the bonding of the wiring layer 11 and the insulating layer 12, the bonding of the insulating layer 12 and the buffer layer 13, and the buffer layer 13 and the cooling member 14 are performed. Bonding can be performed simultaneously. Thereby, the time required for manufacturing the insulating substrate 25 can be significantly shortened.

  Furthermore, in the first embodiment, the brazing material-carbon particle-containing layer 2 is divided into a brazing material layer 2a and a carbon particle layer 2b. In the laminating step, the aluminum layer 1 is a core material, and the brazing material layer 2a is a skin material. Since the carbon particle layer 2b is applied on the brazing sheet 3 to be formed, and then the first laminated body 10 is formed by laminating a plurality of the coated brazing sheets 4, the first laminated body 10 can be easily formed. .

  As shown in the first embodiment, the brazing sheet 3 and its strip 3A are particularly preferably a double-sided brazing sheet and its strip, but the present invention is not limited to this. For example, it is not excluded that it is a single-sided brazing sheet in which a brazing material layer as a skin material is clad only on one side (upper surface) of an aluminum layer (core material) and its strip material.

  Furthermore, as shown in the first embodiment, in the first laminated body 10, the brazing material layer 2a is clad by the aluminum layer (core material) 1 to facilitate the lamination process (first laminated body forming process). However, the present invention is not limited to this. For example, it is not intended to exclude that the brazing material layer 2a is a brazing material foil not clad with the aluminum layer 1. Absent.

  Further, in the first embodiment, in order to prevent the brazing material-carbon particle-containing layer 2 such as the carbon particle layer 2b from being exposed on the upper surface of the first laminated body 10, the pressing member 32 is further provided with the first laminated body. In order not to be bonded to the upper surface of the first laminated body 10, a single-sided brazing sheet in which a brazing filler metal layer 2 a is clad as a skin material on the lower surface of the aluminum layer (core material) 1 is disposed at the top of the first laminate 10. However, the present invention is not limited to this. For example, in the present invention, only the aluminum foil in which the brazing filler metal layer is not clad on the lower surface may be disposed as the aluminum layer on the uppermost layer of the first stacked body 10, or the Ni layer and the Ti layer in order from the top. A Ni / Ti / Al clad plate laminated with an Al layer and clad integrally may be disposed at the uppermost position of the first laminate 10, or the pressing member 32 contacts the first laminate 10. A release layer that inhibits bonding with the brazing material may be disposed on the surface side (that is, the lower surface side of the pressing member 32).

  7 and 8 are diagrams for explaining a second embodiment of the present invention.

  In the second embodiment, as shown in FIG. 8, the brazing material-carbon particle-containing layer 2 is not divided into the brazing material layer 2a and the carbon particle layer 2b as in the first embodiment, This is a brazing filler metal particle-carbon particle mixed layer 2c containing aluminum brazing filler metal particles and carbon particles in a mixed state.

  Further, the mixed layer 2c is applied not on the brazing sheet 3 as in the first embodiment but on one surface (upper surface) of the aluminum foil 1 forming the aluminum layer as shown in FIG.

  The application of the mixed layer 2c is performed, for example, according to a coating method using the coating apparatus shown in FIG. That is, brazing filler metal particles (not shown) such as brazing filler metal powder are placed in a mixing container 44 together with the carbon particles 5, the binder 41, and the solvent 42 for the binder 41, and these are stirred and mixed by the mixer 45 with stirring blades. Is done. Thereby, the coating liquid containing the brazing filler metal particles, the carbon particles 5, the binder 41, and the solvent 42 in a mixed state is obtained.

  The size of the brazing filler metal particles is not limited, but it is particularly preferable that the average particle diameter is 5 μm or more and 500 μm or less because the composite of aluminum and carbon particles can be reliably performed.

  The strip 1 </ b> A of the aluminum foil 1 is wound around the unwind roller 51 of the coating apparatus 50 instead of the strip 3 </ b> A of the brazing sheet 3. And using the coating apparatus 50, the mixed layer 2c is coated on the single side | surface (upper surface) of 1 A of aluminum foil strips in the layer form over the substantially whole surface. Thereby, the strip material 8A of the coated aluminum foil 8 in which the mixed layer 2c is formed (coated) on one surface (upper surface) of the aluminum foil strip material 1A is obtained and wound around the winding roller 53.

In this coating step, the coating amount of the mixed layer 2c is not limited. In particular, the mixed layer 2c has a coating amount of the carbon particles 5 included in the mixed layer 2c of 40 g / m ² or less. The mixed layer 2c is preferably coated so that the coating amount of the carbon particles 5 contained in the mixed layer 2c is 1 g / m ² or more. These reasons are the same as those explained in the first embodiment.

  Furthermore, the mixed layer 2c is preferably applied such that the volume content of the carbon particles 5 with respect to the wiring layer (composite material) 11 is 2% by volume or more and 70% by volume or less. The reason is the same as the reason described in the first embodiment.

  The coated aluminum foil strip 8A taken up by the take-up roller 53 is cut into a predetermined shape (eg, a square shape) while being unwound from the take-up roller 53 or after being unwound, A plurality of coated aluminum foils 8 are obtained.

  Next, a plurality of coated aluminum foils 8 are laminated to form the first laminate 10, and the first laminate 10, the insulating layer 12, the buffer layer 13, and the cooling member 14 are combined with the first laminate 10 and the insulating layer. 12, the insulating layer 12 and the buffer layer 13, and the buffer layer 13 and the cooling member 14 are laminated with the brazing material layer interposed therebetween to form the second stacked body 20. Subsequent steps are performed in the same manner as in the above embodiment.

  In the present invention, the first laminated body 10 may be formed by stacking a plurality of coated aluminum foils 8 upside down.

  Although several embodiments of the present invention have been described above, the present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the gist of the present invention.

  In the above embodiment, the wiring layer of the insulating substrate is formed of the composite material of the present invention. However, in the present invention, for example, the buffer layer of the insulating substrate may be further formed of the composite material of the present invention. Furthermore, the present invention does not exclude that only the buffer layer is formed of the composite material of the present invention.

  Moreover, in the said embodiment, although a cooling member is a heat radiating member, in this invention, the cooler which has a flow path through which a cooling fluid (for example, cooling water) distribute | circulates may be used.

  Next, specific examples and comparative examples of the present invention are shown below. The present invention is not limited to the following examples.

<Example 1>
The insulating substrate 25 of the first embodiment shown in FIGS. 1 to 6 was manufactured according to the manufacturing method. The manufacturing method and the conditions are as follows.

The coating amount of the pitch-based carbon fiber contained in the layer 2b of the pitch-based carbon fiber layer 2b as the carbon particle layer on one side of the double-sided brazing sheet strip (cladding rate 20%) 3A having a thickness of 70 μm is 21 g / m. coating at ² and then dried. In this way, a coated brazing sheet strip (more specifically, a coated double-sided brazing sheet strip) 4A was obtained. The average fiber length of the pitch-based carbon fibers was 200 μm, and the average fiber diameter was 15 μm.

Next, a plurality of coating brazing sheets 4 were obtained by cutting the coating brazing sheet strip 4A into a square shape having a length of 25 mm and a width of 25 mm. Then, 10 sheets were laminated to form the first laminated body 10, and the first laminated body 10, the insulating layer 12, the buffer layer 13, and the cooling member 14 were laminated to form the second laminated body 20. The insulating layer 12 was an AlN layer, the buffer layer 13 was an aluminum layer with a purity of 4N, and the cooling member 14 was an aluminum heat sink. When forming the 2nd laminated body 20, the brazing material foil as the brazing material layer 15 was interposed between the insulating layer 12 and the buffer layer 13, and between the buffer layer 13 and the cooling member 14, respectively. And the 2nd laminated body 20 was temporarily assembled by pressurizing the 2nd laminated body 20 with the applied pressure of 0.15 N / mm < ² > in the lamination direction.

Next, the second laminated body 20 was brazed using a vacuum brazing apparatus, and the insulating substrate 25 was manufactured. The brazing conditions applied at that time were a vacuum of 1 × 10 ⁻⁴ Pa, a brazing temperature of 600 ° C., a holding time of 20 min, and a cooling rate of 50 ° C./min within the range from the brazing temperature to 300 ° C. .

  In the insulating substrate 25 obtained in this way, the protruding portion 2ax of the brazing material is fixed to the outer peripheral surface of the wiring layer 11 so as to cover the substantially entire surface, and therefore, the mechanical strength of the outer peripheral surface of the wiring layer 11 is high, In addition, the carbon fiber was not dropped from the outer peripheral surface of the wiring layer 11. Furthermore, the insulating substrate 25 has high thermal conductivity.

<Example 2>
The insulating substrate 25 of the first embodiment shown in FIGS. 1 to 6 was manufactured according to the manufacturing method. The manufacturing method and the conditions are as follows.

The coating amount of the scaly graphite particles contained in the layer 2b is a high thermal conductivity scaly graphite particle layer 2b as a carbon particle layer on one side of a double-sided brazing sheet strip (cladding rate 20%) 3A having a thickness of 60 μm. It was applied to 9 g / m ² and dried. In this way, a coated brazing sheet strip (more specifically, a coated double-sided brazing sheet strip) 4A was obtained. The average particle diameter of the scaly graphite particles was 200 μm, and the flatness was 10.

Next, a plurality of coating brazing sheets 4 were obtained by cutting the coating brazing sheet strip 4A into a square shape having a length of 25 mm and a width of 25 mm. Then, 20 sheets were laminated to form the first laminated body 10, and the first laminated body 10, the insulating layer 12, the buffer layer 13, and the cooling member 14 were laminated to form the second laminated body 20. The insulating layer 12, the buffer layer 13, and the cooling member 14 are the same as those in the first embodiment. When forming the 2nd laminated body 20, the brazing material foil as the brazing material layer 15 was interposed between the insulating layer 12 and the buffer layer 13, and between the buffer layer 13 and the cooling member 14, respectively. And the 2nd laminated body 20 was temporarily assembled by pressurizing the 2nd laminated body 20 with the applied pressure of 0.15 N / mm < ² > in the lamination direction.

  Next, the insulating substrate 25 was manufactured by brazing the second laminate 20 using the vacuum brazing apparatus under the same brazing conditions as in Example 1 above.

  In the insulating substrate 25 obtained in this way, the protruding portion 2ax of the brazing material is fixed to the outer peripheral surface of the wiring layer 11 so as to cover the substantially entire surface, and therefore, the mechanical strength of the outer peripheral surface of the wiring layer 11 is high, Moreover, the flake graphite particles did not fall off from the outer peripheral surface of the wiring layer 11. Furthermore, the insulating substrate 25 has high thermal conductivity.

<Comparative example>
A high thermal conductivity scaly graphite particle layer as a carbon particle layer is coated on one surface of a 60 μm thick aluminum foil strip so that the coating amount of scaly graphite particles contained in the layer is 9 g / m ^2. And dried. Thereby, a coated aluminum foil strip was obtained. The average particle diameter of the scaly graphite particles was 200 μm, and the flatness was 10.

  Next, a plurality of coated aluminum foils were obtained by cutting the coated aluminum foil strip into a square shape of 25 mm long × 25 mm wide. And 20 sheets of these were laminated | stacked and the laminated body was formed.

  Subsequently, the laminate was manufactured by heating and pressurizing and sintering the laminate using a hot press apparatus under conditions of a heating temperature of 600 ° C., a holding time of 60 min, and a pressing force of 1 MPa.

  In the composite material obtained in this way, the joining of the outer peripheral surface of the composite material is incomplete. Therefore, the mechanical strength of the outer peripheral surface of the composite material is weak, and scaly graphite particles have fallen off from the outer peripheral surface of the composite material. It was.

  The present invention can be used for a composite material of aluminum and carbon particles, a manufacturing method thereof, an insulating substrate, and a manufacturing method thereof.

1: Aluminum layer (aluminum foil)
DESCRIPTION OF SYMBOLS 1A: Aluminum foil strip material 2: Brazing material-carbon particle content layer 2a: Brazing material layer 2b: Carbon particle layer 2c: Brazing material particle-carbon particle mixed layer 3: Brazing sheet 3A: Brazing sheet strip material 4: Coating brazing Sheet 4A: Coating brazing sheet strip 5: Carbon particles 8: Coating aluminum foil 8A: Coating aluminum foil strip 10: First laminate 11: Wiring layer 12: Insulating layer 20: Second laminate 25: Insulation Substrate 30: Pressurizing means

Claims (13)

A lamination step of forming a laminate in which a plurality of aluminum layers and a brazing filler metal-carbon particle-containing layer containing an aluminum-based brazing material and carbon particles are alternately laminated;
A brazing step of brazing and integrating the plurality of aluminum layers and the plurality of brazing material-carbon particle-containing layers by heating the laminated body in a state of being pressed in the laminating direction;
In the brazing step, the laminated body is pressed in the laminating direction so that a part of the melt of the brazing material in the brazing material-carbon particle-containing layer protrudes to the outer peripheral surface side of the laminated body. A method for producing a composite material of aluminum and carbon particles to be heated. The brazing material-carbon particle-containing layer is divided into a brazing material layer mainly containing the brazing material and a carbon particle layer mainly containing the carbon particles,
In the laminating step, a coating brazing sheet is formed by coating the carbon particle layer on a brazing sheet having the aluminum layer as a core material and the brazing material layer as a skin material, and then the coating brazing sheet. The method for producing a composite material of aluminum and carbon particles according to claim 1, wherein a plurality of layers are laminated to form the laminated material. The manufacturing method of the composite material of the aluminum and carbon particle of Claim 2 which coats the said carbon particle layer so that the coating amount of the said carbon particle contained in the said carbon particle layer may be 40 g / m < ² > or less.   The method for producing a composite material of aluminum and carbon particles according to claim 2 or 3, wherein the carbon particle layer is applied so that a volume content of the carbon particles with respect to the composite material is 2 vol% or more and 70 vol% or less.   In the laminating step, a brazing filler metal particle-carbon particle mixed layer containing brazing filler metal particles and carbon particles in a mixed state is applied onto the aluminum foil forming the aluminum layer as the brazing filler metal-carbon particle-containing layer. The method for producing a composite material of aluminum and carbon particles according to claim 1, wherein a coated aluminum foil is formed, and then the laminated body is formed by laminating a plurality of the coated aluminum foils. The method for producing a composite material of aluminum and carbon particles according to claim 5, wherein the mixed layer is applied so that a coating amount of the carbon particles contained in the mixed layer is 40 g / m ² or less.   The manufacturing method of the composite material of the aluminum and carbon particle of Claim 5 or 6 which coats the said mixed layer so that the volume content rate of the said carbon particle with respect to a composite material may be 2 volume% or more and 70 volume% or less.   The brazing material is an Al-Si brazing material to which at least one element selected from the group consisting of Mg, Bi, and Sr is added. The aluminum and carbon particles according to any one of claims 1 to 7 A method of manufacturing a composite material.   A composite material of aluminum and carbon particles obtained by the method for producing a composite material of aluminum and carbon particles according to claim 1. An aluminum layer and a brazing material containing an aluminum-based brazing material and carbon particles-a laminated body in a state where a plurality of carbon particle-containing layers are alternately laminated,
The plurality of aluminum layers and the plurality of brazing material-carbon particle containing layers are brazed and integrated, and the protruding portion of the brazing material that protrudes to the outer peripheral surface side of the laminate is formed on the outer peripheral surface of the laminate. A composite of aluminum and carbon particles that is fixed. Forming a first laminated body for forming a wiring layer in which a plurality of aluminum layers and brazing filler metal-carbon particle-containing layers containing an aluminum-based brazing material and carbon particles are alternately laminated; and the first laminated body, A stacking step of stacking another member including at least an insulating layer with a brazing filler metal layer interposed between the first stack and the insulating layer to form a second stack;
By heating the second laminate in a state of being pressed in the laminating direction, the plurality of aluminum layers, the plurality of brazing material-carbon particle-containing layers, and the insulating layer are collectively brazed and integrated, This includes a brazing process for bonding the wiring layer to the insulating layer,
In the brazing step, the second laminated body is added in the laminating direction so that a part of the melt of the brazing material in the brazing material-carbon particle-containing layer protrudes to the outer peripheral surface side of the first laminated body. A method for manufacturing an insulating substrate, wherein heating is performed in a pressed state.   An insulating substrate obtained by the method for manufacturing an insulating substrate according to claim 11. An insulating substrate having a wiring layer,
The wiring layer is composed of a laminate in a state where a plurality of aluminum layers and a brazing filler metal containing carbon particles and a carbon particle-containing layer are alternately laminated.
The plurality of aluminum layers and the plurality of brazing material-carbon particle containing layers are brazed and integrated, and the protruding portion of the brazing material that protrudes to the outer peripheral surface side of the wiring layer is formed on the outer peripheral surface of the wiring layer. An insulated substrate that is fixed.

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